Substrate conveying holding device
CN309775743SActive Publication Date: 2026-02-06HIRATA CORPORATION
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Patent Information
- Application Number
- CN202530265648.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2025-03-11
- Filing Date
- 2025-05-13
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2040-05-13
Smart Images
Figure 000001_ABST
Abstract
1. Name of the designed product: holding device for substrate transport. 2. Use of the designed product: The product is used for transporting substrates such as glass substrates, semiconductor substrates, etc. By holding the substrate from below, it can be removed from a substrate storage container or a substrate processing device and transported to another substrate storage container or substrate processing device. 3. Design points of the designed product: in shape. 4. Picture or photo that best shows the design points: perspective view.
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