Heater for semiconductor wafer and tray

Abstract

1. Name of the design product: a heater for semiconductor wafer and tray. 2. Use of the design product: to heat the gas supplied from the upper side from the periphery and to heat the wafer and the tray holding the wafer from the upper side in the process of manufacturing semiconductor. 3. Design points of the design product: in shape. 4. Picture or photograph best indicating the design points: perspective view 1. 5. Other circumstances requiring explanation Other explanation: the figures 1 to 3 in the using state in the drawing respectively represent the wafer, the tray and the product.

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