Main body of an inspection substrate of a substrate processing apparatus

Abstract

1. Name of the designed product: main body of the substrate for inspection of substrate processing apparatus 2. Use of the designed product: the whole use of the product is the main body of the substrate for inspection of substrate processing apparatus, such as coating and developing apparatus, for checking whether the positional relationship between the substrate to be processed and various components of the substrate processing apparatus is appropriate. Part use: main body of the substrate for inspection of substrate processing apparatus 3. Design points of the designed product: the shape of the part claimed. 4. Picture or photo showing the design points most: perspective view 1 5. Other circumstances needing to be explained: the designed product claims partial design protection, the part represented by solid line is the part claimed, and the part represented by dotted line is not claimed.

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