Heating panel for substrate heating

CN309902121SActive Publication Date: 2026-04-07SHIN ETSU CHEMICAL CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2025-05-15
Publication Date
2026-04-07

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Abstract

1. Name of the designed product: heating panel of a heater for substrate heating. 2. Use of the designed product: the whole of the designed product is used for a heater for substrate heating, for example, for heat treatment of a disc having a magnetic film as a storage medium of a hard disc, and the part as claimed in the partial design is used for a heating panel of a heater for substrate heating. 3. Design points of the designed product: combination of shape and pattern. 4. Picture or photograph best indicating the design points: front view. 5. Left view and right view are symmetrical, and the left view is omitted; bottom view and top view are symmetrical, and the bottom view is omitted. 6. Other circumstances needing explanation: the part indicated by solid line is the part as claimed in the partial design.
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