Modular magnetron sputtering apparatus
CN309909879SActive Publication Date: 2026-04-10TRUTH EQUIP CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- TRUTH EQUIP CO LTD
- Filing Date
- 2025-08-29
- Publication Date
- 2026-04-10
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Figure 000006_ABST
Abstract
1. The name of the design product: modular magnetron sputtering equipment. 2. The use of the design product: for magnetron sputtering coating. 3. The design points of the design product: in the combination of shape and pattern. 4. The picture or photo that best indicates the design points: perspective view.
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