Substrate holding device for substrate processing apparatus
CN309957023SActive Publication Date: 2026-05-01KOKUSAI DENKI KK
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- KOKUSAI DENKI KK
- Filing Date
- 2022-08-31
- Publication Date
- 2026-05-01
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Figure 000007_ABST
Abstract
1. Name of the designed product: substrate holding device for substrate processing apparatus. 2. Use of the designed product: substrate holding device for horizontally holding a plurality of substrates in a longitudinal reaction chamber of a substrate processing apparatus. 3. Design points of the designed product: in shape. 4. Picture or photograph best indicating the design points: perspective view.
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