Body of process chamber collimator

Abstract

1. The name of the design product: the main body of a process chamber collimator. 2. The use of the design product: the design product is used as a process chamber collimator. 3. The design points of the design product: in shape. 4. The picture or photograph that best indicates the design points: Fig. 1. 5. Other circumstances that need to be explained: Fig. 1 is a top left front perspective view of the process chamber collimator, Fig. 2 is a top right rear perspective view thereof, Fig. 3 is a bottom left front perspective view thereof, and Fig. 4 is a bottom right rear perspective view thereof. The dashed lines in the figures show parts of the process chamber collimator that do not form part of the claimed design.

Images