Body of process chamber collimator
CN310018933SActive Publication Date: 2026-06-05APPLIED MATERIALS INC
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2025-04-18
- Publication Date
- 2026-06-05
Smart Images
Figure 000011_ABST
Abstract
1. Name of the design product: Main body of process chamber collimator. 2. Use of the design product: The design product is used as a process chamber collimator. 3. Design points of the design product: In shape. 4. Picture or photograph best indicating the design points: Fig. 1.
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