Valve linear actuator and valve

Abstract

A linear valve drive (14) for connection to a valve body (12) having a valve seat (26), wherein the linear valve drive (14) comprises a drive housing (31), a valve closure element (28), and a piezoelectric actuator (32) arranged within the drive housing (31), wherein the valve closure element (28) is adjustable in the axial direction between an open position and a closed position via the piezoelectric actuator (32) and an intermediate actuating device (34), wherein the piezoelectric actuator (32) is supported on the actuating device (34) via its side facing the valve closure element (28), and wherein the linear valve drive (14) comprises an adjusting device (56) designed such that an idle stroke of the linear valve drive (14) is adjustable.

Description

[0001] The invention relates to a linear valve actuator for connection to a valve body having a valve seat and to a valve, in particular a normally closed valve, i.e. a normally closed valve (NC valve).

[0002] Valves for controlling or regulating fluids are known from the prior art, comprising a valve body and a valve linear actuator formed separately from the valve body. The valve linear actuator and the valve body are connected to form the valve.

[0003] The linear valve actuator has a drive unit, for example, a piezoelectric actuator. The drive unit can adjust a valve closure element via an actuating device or mechanism provided in the linear valve actuator. In this way, the linear valve actuator can move the valve closure element to at least an open and / or a closed position, in which the valve closure element rests on a valve seat formed in the valve body and seals it, preventing fluid from flowing through the valve.

[0004] Furthermore, it is known from the prior art that an adjustment device or adjustment option can be provided with which a change in length in the linear valve actuator, in particular in the actuating device, can be compensated. The change in length is caused by temperature changes or effects of service life, for example settling effects.

[0005] A specific material pairing can be used in the actuating device to compensate for at least temperature-related changes in length. However, this does not compensate for effects on service life.

[0006] Another possibility involves applying a voltage, provided the drive unit is a piezoelectric actuator. This actively causes a change in length within the linear valve actuator, specifically a change in the length of the piezoelectric actuator itself, so that, from a valve control perspective, its initial length is altered. This actively set length change compensates for length changes caused by temperature variations or wear and tear.

[0007] Another possibility, known from the prior art, is to provide a clearance or free stroke that can be used to react to and compensate for changes in the length of the actuating device. A free stroke is the adjustment travel of the actuating device or the actuating mechanism in the linear valve actuator that is not converted into an axial movement of the valve closure element because the existing clearance in the actuating device or the actuating mechanism must first be overcome.

[0008] For example, DE 10 2010 027 518 A1 discloses an NC valve, i.e., a normally closed valve, which has an adjustable idle stroke that can be set via an externally arranged clamping element. The force emanating from the actuator is transmitted to the valve closure element via a mechanism provided in the linear valve drive, wherein the actuating mechanism includes, among other things, lever devices, i.e., deflection mechanisms.

[0009] The JP H11-173 440 A describes a valve actuator with an adjustment device that can compensate for play during assembly.

[0010] US Patent 5,145,147 A discloses a valve actuator in which length tolerances of a piezo stack used in the valve actuator can be compensated by means of an adjusting element by clamping the piezo stack between the adjusting element and a mounting element.

[0011] US 2010 / 0294964A1 describes a valve with an adjusting element used to compensate for manufacturing tolerances or to adjust the preload force.

[0012] US 2011 / 0042595A1 also describes a valve with an adjusting element used to compensate for manufacturing tolerances.

[0013] US patent 2012 / 0273061A1 discloses a piezoelectric valve actuator in which length tolerances of the piezo stack can be compensated for with an adjusting element.

[0014] US 2016 / 0 047 483 A1 also discloses a valve actuator in which an adjustment element is provided to compensate for length tolerances of a piezo stack.

[0015] The object of the invention is to provide a linear valve actuator and a valve that are simple in design and with which an idle stroke can be set.

[0016] The object of the invention is achieved, among other things, by a linear valve actuator for connection to a valve body having a valve seat, wherein the linear valve actuator comprises an actuator housing, a valve closure element and a piezoelectric actuator arranged inside the actuator housing, wherein the valve closure element is adjustable in the axial direction between an open and a closed position via the piezoelectric actuator and an intermediate actuating device, wherein the piezoelectric actuator is supported on the actuating device via its side facing the valve closure element, and wherein the linear valve actuator comprises an adjustment device designed such that an idle stroke of the linear valve actuator is adjustable.

[0017] The basic idea of ​​the invention is to simplify the mechanical design of the linear actuator for the NC valve by supporting the piezoelectric actuator on the side of the actuating device facing the valve closure element. This creates a bearing for the piezoelectric actuator at its lower end, i.e., on the side facing the valve closure element. The other end of the piezoelectric actuator is therefore a free end, which moves axially away from the valve closure element when the voltage of the piezoelectric actuator changes. The actuating mechanism or device can then be easily arranged at this free end of the piezoelectric actuator, transmitting a tensile force to the valve closure element as the piezoelectric actuator expands.The actuating mechanism of the linear valve actuator, which is required to transmit the force from the piezoelectric actuator to the valve closure element, is simplified accordingly. A complex lever mechanism in the actuating system, which reverses the direction of force, can be eliminated. In particular, the idle stroke can be adjusted only once, during valve assembly.

[0018] The adjustment mechanism also ensures that the free stroke in the actuator can be set, thus allowing for compensation of unavoidable changes in length within the actuator mechanism of the linear valve. These changes can be caused, for example, by wear and tear or temperature effects. The free stroke is adjusted accordingly to compensate for these changes, ensuring they do not affect the opening or closing behavior of the linear valve.

[0019] One aspect stipulates that the actuating device comprises a drive element and a pull piece, in particular wherein a clearance corresponding to the free stroke can be adjusted between the drive element and the pull piece via the adjusting device. The actuating device is therefore designed in multiple parts, with two parts that are not rigidly connected to each other. Thus, the drive element and the pull piece are generally movable relative to each other. The adjusting device interacts with the actuating device to change the clearance provided between the drive element and the pull piece when necessary.

[0020] The drive element is preferably coupled to the piezoelectric actuator and carries the pull piece along when the piezoelectric actuator transmits a tensile force to the drive element, i.e., a force directed away from the valve closure element. The pull piece is in turn coupled to the valve closure element and then pulls it from its closed position towards the open position.

[0021] According to another aspect, the adjusting device comprises an axially adjustable pull sleeve that at least partially surrounds the piezoelectric actuator and is part of the actuating device, in particular being rigidly coupled to the drive element of the actuating device. The piezoelectric actuator is additionally mechanically protected by the pull sleeve in the linear valve actuator. Furthermore, the concentric arrangement ensures that the forces emanating from the piezoelectric actuator are transmitted homogeneously via the pull sleeve.

[0022] The pull sleeve is part of both the adjusting device and the actuating device. Accordingly, any change made to the adjusting device is transmitted via the pull sleeve to the drive element, thus altering the clearance between the drive element and the pull piece, which in turn changes or adjusts the idle stroke of the linear valve actuator.

[0023] The drive element and the pull sleeve can be formed in one piece, so that a pull drive sleeve is formed which is coupled to the free end of the piezoelectric actuator and interacts directly with the pull piece.

[0024] The pull sleeve is also coupled to an axial end of the piezoelectric actuator, specifically to the end of the piezoelectric actuator pointing away from the valve closure element. This is the unfixed end of the piezoelectric actuator, through which a change in length is transmitted when the piezoelectric actuator is actuated accordingly. This axial end can also be referred to as the free end of the piezoelectric actuator.

[0025] When the length of the piezoelectric actuator changes, the pull sleeve is adjusted and acts on the drive element of the actuating device, which in turn adjusts the valve closure element. Therefore, if the piezoelectric actuator changes its length due to a corresponding control signal, the pull sleeve coupled to the actuator moves along with it. The pull sleeve pulls on the drive element coupled to it, which in turn moves the actuator rod, provided the adjustable free play between the drive element and the pull sleeve has been overcome.

[0026] According to a preferred embodiment, the actuating device has a bearing element directly coupled to the piezoelectric actuator, against which the piezoelectric actuator is supported, particularly wherein the bearing element is fixedly mounted in the drive housing. The bearing element thus constitutes the bearing of the piezoelectric actuator in the linear valve drive, against which the piezoelectric actuator can be supported with its fixed end or bearing end. Since the bearing element is fixedly mounted in the drive housing, it is ensured that the piezoelectric actuator is fixedly mounted on this side with respect to the linear valve drive.

[0027] In particular, the pull sleeve has at least one recess through which the bearing element extends. This ensures that the pull sleeve can be adjusted axially, for example, when the idle stroke or clearance is changed, or when the valve is generally moved to a different position. The pull sleeve can also have two separate recesses through which corresponding legs of the bearing element extend to bear against the actuator housing.

[0028] Another aspect provides that the actuating device includes a spring system by which the piezoelectric actuator is pre-tensioned, in particular wherein the spring system is supported on one side by the bearing element, preferably on the side of the bearing element opposite the piezoelectric actuator. The spring system pushes the drive element towards the valve closure element, thereby pulling the pull sleeve coupled to the drive element towards the valve closure element. The pull sleeve thus pre-tensions the free axial end of the piezoelectric actuator, since the free axial end of the piezoelectric actuator is pushed by the pull sleeve towards the valve closure element.

[0029] Furthermore, a closing spring can be provided, which is supported by the actuator housing and exerts force on the valve closure element away from the piezoelectric actuator, so that the valve closure element is pressed onto the valve seat when the valve body is connected, provided no voltage is applied to the piezoelectric actuator. This is how the NC valve is formed.

[0030] In particular, the piezoelectric actuator does not transmit any force to the valve closure element in the closed position. Accordingly, the linear valve actuator is an actuator for a normally closed (NC) valve, since no forces emanate from the piezoelectric actuator in the closed position. Only when the valve closure element is moved from the closed position towards the open position is a force transmitted via the piezoelectric actuator, which moves the valve closure element from the closed position.

[0031] The valve closure element can comprise a sealing section and a diaphragm section, which are preferably formed as a single unit. The sealing section serves to seal an inlet or outlet channel in the valve body, provided the linear valve actuator is coupled to the valve body to form the valve. The at least one diaphragm section ensures that other flow chambers, such as a collection chamber, are appropriately sealed.

[0032] The object of the invention is further achieved by a valve, in particular an NC valve, which has a valve actuator of the type mentioned above. The corresponding advantages of the linear valve actuator mentioned above apply analogously to the valve.

[0033] In particular, the valve has a valve body that includes at least one inlet channel, at least one outlet channel, and / or at least one collection chamber. The corresponding channels and chambers are sealed in the closed position by the valve closure element. For this purpose, the valve closure element has a sealing section and / or a diaphragm section, respectively.

[0034] Further advantages and features of the invention will become apparent from the following description and the drawings, to which reference is made. The drawings show: - Fig. 1 a perspective view of a valve according to the invention, - Fig. 2 a sectional view of the valve according to the invention Fig. 1, - Fig. 3 a detailed view of the Fig. 2, wherein the valve linear actuator is in the closed position, - Fig. 4 the section of the Fig. 3, wherein the valve linear actuator moves towards the open position, and - Fig. 5 another detailed view of the Fig. 2, which shows an adjustment device for the valve linear actuator.

[0035] In the Fig. 1 and Fig. Figure 2 shows a valve 10, which is used for controlling or regulating fluids. In the embodiment shown, the valve 10 has a two-part construction and comprises a valve body 12 and a linear valve actuator 14 coupled to it.

[0036] The valve body 12 has a fluid inlet 16 through which a fluid to be controlled or regulated is supplied to the valve 10. The valve body 12 also has a fluid outlet 18 through which the fluid can leave the valve 10.

[0037] The valve body 12 also includes an inlet channel 20, which is in flow communication with the fluid inlet 16. The inlet channel 20 opens into a collection chamber 22, which in turn is in flow communication with two outlet channels 24 that open into the fluid outlet 18.

[0038] The valve body 12 is made of a stainless material. In particular, the inner surfaces of the fluid-carrying channels and chambers are made of stainless material.

[0039] The inflow channel 20 also has a valve seat 26 (see Fig. 3) associated with a valve closure element 28 of the linear valve actuator 14, with which it interacts to control or regulate the flow through the valve 10, as will be explained below. Furthermore, the valve closure element 28 seals the fluidic part of the valve 10, which is formed in the valve body 12, from the linear valve actuator 14. The valve closure element 28 therefore simultaneously constitutes a sealing barrier and, in the illustrated embodiment, is a diaphragm.

[0040] From the Fig. 1 and Fig. 2 further shows that the collecting chamber 22 and the valve seat 26 are formed in a flange section 30 projecting from the base body of the valve body 12, to which the linear valve actuator 14 is coupled with an axial end.

[0041] The linear valve actuator 14 has a multi-part actuator housing 31 with a cup-shaped lower part 31a and a sleeve-shaped upper part 31b mounted on it. A piezoelectric actuator 32, designed as a stack actuator, is provided in the actuator housing 31 and interacts with an actuating device 34. The lower part 31a has a base 35 that clamps or simply holds the valve closure element 28 between itself and the valve body 12. The lower part 31a, together with the upper part 31b, defines a receiving space in which the actuator 32 and the actuating device 34 are housed.

[0042] A change in length of the piezoelectric actuator 32 is transmitted via the actuating device 34 to the valve closure element 28, allowing it to be adjusted axially between an open and a closed position. Accordingly, the actuating device 34 can also be described as an actuating mechanism.

[0043] Furthermore, the actuating device 34 comprises a pull sleeve 36, which is coupled to the piezoelectric actuator 32 via an axial upper end of the piezoelectric actuator 32. This is the axial end of the piezoelectric actuator 32, which faces away from the valve closure element 28 or the valve body 12 and is also movable within the actuator housing 31. This axial end is also referred to as the free end of the piezoelectric actuator 32.

[0044] Furthermore, a drive element 38 is coupled to the pull sleeve 36, which is also part of the actuating device 34. Accordingly, the drive element 38 is rigidly coupled to the piezoelectric actuator 32, namely via the pull sleeve 36.

[0045] Alternatively, the pull sleeve 36 and the drive element 38 can also be formed as a single unit, so that they form a pull drive sleeve.

[0046] Furthermore, the actuating device 34 comprises a pull piece 40, which is rigidly connected to the valve closure element 28. For example, the pull piece 40 can have a thread via which it is screwed into the valve closure element 28. The valve closure element 28 accordingly has a corresponding, for example, sleeve-shaped mounting section 42, which has a corresponding mating thread into which the pull piece 40 engages via its thread.

[0047] The actuating device 34 further comprises a bearing element 44 seated on a shoulder of the lower part 31a, on which the piezoelectric actuator 32 is supported via its end facing the valve closure element 28. This end can also be referred to as the bearing end, fixed end, or firmly supported end of the piezoelectric actuator 32.

[0048] The piezoelectric actuator 32 thus has a fixed axial end, which is supported on the bearing element 44, and a free axial end, which is axially movable in the drive housing 31 and with which the pull sleeve 36 is rigidly coupled, so that the movement of the piezoelectric actuator 32 is transferred to the pull sleeve 36.

[0049] The bearing element 44 is fixedly mounted on a shoulder of the lower part 31a, so that the bearing element 44 is arranged immovably in the drive housing 31.

[0050] As can be seen particularly from the Fig. As shown in Figures 2 to 4, lateral legs 45 of the bearing element 44 extend through the pull sleeve 36 to be mounted in the drive housing 31. The pull sleeve 36 has at least one corresponding recess 46 for this purpose, preferably two opposing recesses, through which the bearing element 44 with two corresponding legs 45 extends.

[0051] Furthermore, the figures show that a spring system 48 (here a disc spring assembly) is supported on the bearing element 44 on the side opposite the piezoelectric actuator 32, pressing against the drive element 38 and thus applying force to it in the direction of the valve closure element 28. This results in a preload of the piezoelectric actuator 32.

[0052] The spring force emanating from the spring system 48 is transmitted via the drive element 38 and the attached pull sleeve 36 to the piezoelectric actuator 32, whose free axial end is pressed against the bearing element 44, thereby generating the preload in the piezoelectric actuator 32.

[0053] In addition to the spring system 48, a closing spring 50 is provided, which is supported on the base 35 and acts on the valve closure element 28 in the direction of the closing position, i.e. in the direction of the valve seat 26.

[0054] The valve closure element 28 also has a sealing section 52 extending from the mounting section 42, which is associated with the inlet channel 20 or the valve seat 26. The sealing section 52 is located on the opposite side of the mounting section 42 and presses against the valve seat 26 when closed.

[0055] Furthermore, the valve closure element has a diaphragm section 54 which is assigned to the collection chamber 22 and seals it in the closed position.

[0056] From the Fig. 2 and Fig. Figure 5 further shows that the linear valve actuator 14 includes an adjustment device 56 by means of which the relative position of the pull sleeve 36 to the piezoelectric actuator 32 can be adjusted. The adjustment device 56 includes a mounting element 58 which is coupled (screwed in) to the pull sleeve 36. An adjusting screw 60 is screwed into a central internal thread of the mounting element 58, which presses against a bearing part 59 resting on the upper end of the actuator 32. A central recess on the bearing part 59 centers it with respect to the convex end of the adjusting screw 60.

[0057] Accordingly, the pull sleeve 36 is simultaneously part of the adjusting device 56 and part of the actuating device 34. In a similar manner, the retaining element 58 and the adjusting screw 60 are also simultaneously part of the adjusting device 56 and part of the actuating device 34, since the force emanating from the piezoelectric actuator 32 is transmitted to the adjusting device 56 and the pull sleeve 36 connected thereto.

[0058] This results from the operation of valve 10 and the function of the adjusting device 56, which will be explained below. Particular attention will be paid to the following: Fig. 3 to 5 received.

[0059] Valve 10 is a normally closed valve, i.e., an NC valve. This means that the valve closure element 28 is in its closed position when no voltage is applied to the piezoelectric actuator 32. This closed position is in Fig. 3 shown.

[0060] From the in Fig. Figure 3 shows in the closed position that there is an axial play S between the drive element 38 and the pull piece 40. The drive element 38 and the pull piece 40 are therefore not rigidly connected.

[0061] In the closed position, the piezoelectric actuator 32 is in its initial position, which is why the pull sleeve 36 is in its lowest position in the axial direction. Accordingly, the drive element 38 coupled to the pull sleeve 36 is also in its lowest position in the axial direction, creating the corresponding clearance S between the drive element 38 and the pull piece 40. The pull piece 40 cannot be any lower in the axial direction because the valve closure element 28 coupled to the pull piece 40 rests on the valve seat 26.

[0062] Provided that the valve linear actuator 14 is in Fig. When the position shown in 3 is moved into the open position, the piezoelectric actuator 32 expands with its free end in the direction opposite to the valve closure element 28, i.e. with the end to which the pull sleeve 36 is attached.

[0063] Here, the pull sleeve 36 is moved away from the valve closure element 28 by the piezoelectric actuator 32, so that a tensile force is exerted on the drive element 38 via the pull sleeve 36. The drive element 38 also moves away from the valve closure element 28 accordingly, which initially reduces the clearance S provided between the drive element 38 and the pull piece 40 until the drive element 38 rests against the pull piece 40, at which point Fig. Figure 4 shows that a positive connection is created between the drive element 38 and the pull piece 40, at least in the axial direction.

[0064] The clearance S provided between the drive element 38 and the pull piece 40 therefore corresponds to a small idle stroke of the valve linear actuator 14, since the axial movement generated by the valve linear actuator 14, in particular the piezoelectric actuator 32, to close the clearance S, has no influence on the valve closing element 28. This remains in its closed position.

[0065] However, from the moment the drive element 38 comes into contact with the pull piece 40, a force is transferred from the drive element 38 to the pull piece 40, provided that the piezoelectric actuator 32 continues to expand, causing the pull piece 40 to pull on the valve closure element 28, so that the valve closure element 28 is pulled from the valve seat 26, particularly in the area of ​​the sealing section 52.

[0066] Valve 10 then opens accordingly, and a fluid flow between inlet channel 20 and outlet channel 24 is enabled, or between fluid inlet 16 and fluid outlet 18.

[0067] The force emanating from the piezoelectric actuator 32 is accordingly greater than the spring force of the closing spring 50 and the spring force of the spring system 48, so that the valve closure element 28 can be adjusted against the spring forces of the spring system 48 and the closing spring 50.

[0068] A complicated reversal of direction of the force emanating from the piezoelectric actuator 32 therefore does not take place in the actuating device 34, since the pull sleeve 36, the drive element 38 and the pull piece 40 are all moved in the same direction if the valve 10 is to be opened.

[0069] To move the valve 10 from its open position to the closed position, the piezoelectric actuator 32 is simply de-energized, i.e., the previously applied voltage is no longer applied. This returns the piezoelectric actuator 32 to its valve control starting position. The spring force of the closing spring 50 presses the valve closure element 28 onto the valve seat 26. This clearly demonstrates that the valve 10 is a normally closing valve.

[0070] If the clearance S between the drive element 38 and the pull piece 40 is too small or too large, which can occur due to changes in length in the actuating mechanism caused by temperature or wear, the corresponding clearance S, and thus the free stroke of the linear valve actuator 14, can be adjusted via the adjusting device 56. A certain free stroke is also necessary because all parts coupled in series are subject to manufacturing tolerances, and it must not happen that the pull piece 40 contacts the drive element 38 too early, preventing the valve closure element 28 from reaching the valve seat.

[0071] To adjust the game S, the retaining element 58 of the adjusting device 56 is actuated, in particular manually, which changes the relative position of the pull sleeve 36 to the piezoelectric actuator 32, in particular to the free axial end of the piezoelectric actuator 32.

[0072] The pull sleeve 36 is thereby axially adjusted relative to the piezoelectric actuator 32, which in turn also axially adjusts the drive element 38 coupled to the pull sleeve 36. The clearance S between the drive element 38 and the pull piece 40 changes accordingly, since the pull piece 40 is not rigidly coupled to the drive element 38.

[0073] Access to the adjusting device 56 is easily possible via the drive housing 31, since the drive housing 31 includes, for example, a cover element 61 which can be removed from the rest of the drive housing 31.

[0074] The electrical cables 62 required for the electrical control of the piezoelectric actuator 32 can also be easily routed through the cover element 61.

[0075] After the linear valve actuator 14 has been coupled to the valve body 12, the flange section 30 and the side walls of the valve closure element 28 can be welded together in particular to hermetically seal the valve 10.

[0076] The clearance S or the idle stroke can only be set once during the assembly of the valve 10; for example, when the valve body 12 is coupled to the valve linear actuator 14.

[0077] In general, a linear valve actuator 14 and a normally closing valve 10 are thus created, which is simple in design and yet provides the possibility to adjust the clearance S in the actuating device 34 in order to react to or compensate for temperature-related or lifetime-related changes or manufacturing-related tolerances.

Claims

[1] Valve linear actuator (14) for connection to a valve body (12) having a valve seat (26), wherein the valve linear actuator (14) comprises an actuator housing (31), a valve closure element (28) and a piezoelectric actuator (32) arranged inside the actuator housing (31), wherein the valve closure element (28) is adjustable in the axial direction between an open and a closed position via the piezoelectric actuator (32) and an intermediate actuating device (34), wherein the piezoelectric actuator (32) is supported on the actuating device (34) over its side facing the valve closure element (28), and wherein the valve linear actuator (14) comprises an adjusting device (56) configured such that an idle stroke of the valve linear actuator (14) is adjustable. [2] Valve linear actuator (14) according to claim 1, characterized by, that the actuating device (34) comprises a drive element (38) and a pull piece (40), in particular wherein a clearance (S) between the drive element (38) and the pull piece (40) can be adjusted via the adjusting device (56) which corresponds to the free stroke. [3] Valve linear actuator (14) according to claim 1 or 2, characterized by , that the adjusting device (56) comprises an axially adjustable pull sleeve (36) which at least partially surrounds the piezoelectric actuator (32) and is part of the actuating device (34), in particular being firmly coupled to the drive element (38) of the actuating device (34). [4] Valve linear actuator (14) according to one of the preceding claims, characterized by , that the actuating device (34) has a bearing element (44) directly coupled to the piezoelectric actuator (32), on which the piezoelectric actuator (32) is supported, in particular wherein the bearing element (44) is firmly mounted in the drive housing (31). [5] Valve linear actuator (14) according to claims 3 and 4, characterized by that the pull sleeve (36) has at least one recess (46) through which the bearing element (44) extends. [6] Valve linear actuator (14) according to one of the preceding claims, characterized by , that the actuating device (34) comprises a spring system (48) by which the piezoelectric actuator (32) is biased, in particular wherein the spring system (48) is supported on one side on the bearing element (44), preferably on the side of the bearing element (44) opposite the piezoelectric actuator (32). [7] Valve linear actuator (14) according to one of the preceding claims, characterized by , that a closing spring (50) is provided which is supported on the drive housing (31) and acts on the valve closing element (28) away from the piezoelectric actuator (32). [8] Valve linear actuator (14) according to one of the preceding claims, characterized by, that the piezoelectric actuator (32) does not transmit any force to the valve closure element (28) in the closed position. [9] Valve linear actuator (14) according to one of the preceding claims, characterized by , that the valve closure element (28) comprises a sealing section (52) and a diaphragm section (54), which are formed in particular as a single unit. [10] Valve (10), in particular NC valve, with a valve linear actuator (14) according to one of the preceding claims. [11] Valve (10) according to claim 10, characterized by that the valve body (12) includes at least one inlet channel (20), at least one outlet channel (24) and / or at least one collection chamber (22).

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