Air bearing device, method for manufacturing an air bearing device, holding device with air bearing device and coordinate measuring machine

Abstract

The invention relates to an air bearing device, wherein the air bearing device (1) has or forms at least one receiving section (8) for a connecting element (17) for mechanically connecting the air bearing device (1) to a holding device (16), wherein the air bearing device (1) has or forms at least one receiving section (21, 23) for adhesive material for bonding the air bearing device (1) to the holding device (16).

Description

[0001] The invention relates to an air bearing device, in particular for supporting a movable part of a coordinate measuring machine, a holding device with such an air bearing device, a coordinate measuring machine and a method for producing an air bearing device.

[0002] For the motion control of high- and ultra-precision machine tools and measuring machines, such as coordinate measuring machines, air bearing systems are used, among other things. These offer the advantage of virtually frictionless bearings and high rigidity. Short-period or locally occurring guidance errors can also be compensated for using certain types of air bearings, which advantageously enables homogeneous guidance behavior.

[0003] However, air bearing systems are not only used in coordinate measuring machines, but also in a wide variety of other applications. Air bearing systems are known in various designs. In addition to various sizes and different geometries, air bearing systems also differ in the design of the air outlet. Some air bearing systems, for example, have an air outlet through a centrally located throttle bore. Other air bearing systems have throttle bores arranged on a circular line with a defined diameter radially around a bearing center axis. The use of a porous material for surface airflow is also known; this material can be arranged in or at the outlet of the air bearing system.

[0004] Air bearing devices are usually made of metals, particularly aluminum, steel, or brass. Machining processes are used to create the desired shape of the air bearing device from a solid body. For example, outlet openings can be created through drilled holes. Thus, elements for air supply and air outlets can be manufactured using machining processes.

[0005] DE 102 40 700 A1 discloses a coordinate measuring machine having a spindle mounted on a carriage, the carriage being mounted on a crosshead with air bearings. Furthermore, preloading of guide bearings by means of air bearings is disclosed.

[0006] EP 2 924 721 A1 discloses a positioning device in gantry design with a carriage resting on air bearings on a granite base.

[0007] Also known is DE 195 33 690 A1, which discloses an air bearing consisting of a body with holes formed into it for guiding air to a lower surface of the body. The body of the air bearing is manufactured as an aluminum casting.

[0008] The subsequently published DE 10 2017 212 090 A1 discloses an air bearing device, wherein at least one base body of the air bearing device has a bionic structure. The document also describes that the air bearing device can be adhesively bonded to a holding device. Furthermore, the document discloses that the base body has or forms a receiving section for a connecting element for mechanically connecting the base body of the air bearing device to the holding device for the base body.

[0009] US 5 989 444 A discloses fluid bearings, vacuum chucks and other devices and methods for manufacturing these articles.

[0010] The technical problem is to create an air bearing device, a holding device with an air bearing device, a coordinate measuring machine, and a method for producing an air bearing device that enables an alternative or improved, in particular more reliable, attachment of the air bearing device to the holding device. The solution to the technical problem is provided by the subject matter having the features of claims 1, 9, 10, and 11. Further advantageous embodiments of the invention are set out in the subclaims.

[0011] An air bearing device is proposed, in particular for supporting a moving part of a coordinate measuring machine. The air bearing device can generate an air layer, which can also be referred to as an air film, between two bearing partner bodies, for example between the air bearing device and a support body. The air bearing device can provide one of the bearing partner bodies and have a running surface. Another bearing partner body can then have a counter-running surface. This can be the support body, for example. The support body can be, for example, a guide beam, in particular a cross member or a crossbeam of a coordinate measuring machine. However, it is also possible for the bearing partner body to be a rotor.

[0012] The compressed air introduced between these bearing partner bodies can act as a lubricating medium and simultaneously form a pressure cushion, which can, for example, support a load contact-free against / on the bearing partner body. The air bearing device can, in particular, be a bearing device that enables relative movement between the bearing partner bodies. The relative movement can, in particular, be a linear movement. For example, the air bearing device can be part of a guide device that serves to guide the described movement, in particular the linear movement. In particular, the air bearing device can be part of a carriage or so-called X-slide. This will be explained in more detail later.

[0013] However, it is of course also conceivable for the relative movement to be a rotational movement. In this case, for example, the air bearing device can be arranged on a stator, with the bearing partner being, for example, a rotor.

[0014] The air bearing device may comprise a base body. The base body may be made of metal, ceramic, or plastic, particularly a fiber-reinforced plastic, or a mixture of these materials. A metal alloy may also be used.

[0015] Furthermore, the air bearing device can have or form a front side, which can also be referred to as the top side. This can refer to a side of the air bearing device associated with the air gap that can be generated by the air bearing device. A rear side, which can also be referred to as the bottom side, can refer to a side of the air bearing device facing away from the air gap that can be generated by the air bearing device. A central axis of the air bearing device can extend from the rear side to the front side. The central axis can be a central axis of symmetry of the air bearing device.

[0016] The running surface of the air bearing device can be formed on the front side, or an element that forms the running surface, for example, an outflow body, can be arranged. Furthermore, it is possible for the air bearing device to have or form at least one side wall. The front side and / or the rear side and / or the at least one side wall can be formed, for example, by the base body.

[0017] The air bearing device, in particular the base body, has at least one receiving section for a connecting element for mechanically connecting the air bearing device to a holding device or forms this receiving section. The connecting element can be a mechanical element, e.g., an element made of metal or plastic. A connecting element can, for example, be (partially) spherical or have a (partially) spherical section that can be arranged in the receiving section. In this case, a diameter of the receiving section can be smaller than a diameter of the (partially) spherical section.

[0018] The connecting element can also be mechanically connected to the holding device, in particular via a positive and / or force-fitting and / or material-locking connection. The mechanical connection can be detachable or non-detachable. The connecting element can serve to mount the air bearing device on the holding device. The connecting element can, in particular, enable a movable mounting of the air bearing device on the holding device, as explained in more detail below.

[0019] In particular, the connecting element can have or form connecting means for establishing this mechanical connection. The holding device can then have or form connecting means that interact with these connecting means. In particular, the connecting element can be screwed to the holding device, wherein the connecting element can have or form a threaded portion. Thus, the connecting element can have or form both a connecting element portion for being received in the receiving portion of the air bearing device and a connecting means for mechanically connecting to the holding device. For example, the connecting element can be designed as a threaded pin with a (partially) spherical portion. In this case, a thread and the (partially) spherical portion can be arranged at different ends of the threaded pin.Alternatively, however, the connecting element can also be designed as a ball, which can be arranged on the one hand in the receiving section of the air bearing device and on the other hand also in a receiving section of the holding device.

[0020] The receiving section can be formed, in particular, on the rear side of the air bearing device. The receiving section can be formed, in particular, by a recess, cutout, or depression in the region of this rear side. This recess, cutout, or depression can, in particular, be designed as a blind hole. Furthermore, in particular, the receiving section can be designed in the shape of a spherical segment, a pyramid or pyramid segment, or a cone or truncated cone.

[0021] A central axis of the receiving section can be oriented parallel, and in particular concentrically, to the previously explained central axis of the air bearing device.

[0022] Furthermore, the air bearing device, in particular additionally, has at least one receiving section for adhesive material for bonding the air bearing device to the holding device or forms such a receiving section. Adhesive material can thus be arranged in the receiving section, in particular a receiving volume of the receiving section, whereby the air bearing device can be bonded to the holding device by means of the adhesive material.

[0023] The receiving section can be formed by the previously explained base body. The base body can also have the receiving section. A housing of the air bearing device can also have or form the receiving section for adhesive material. The adhesive connection can, in particular, enable a rigid mounting of the air bearing device on the holding device, as explained in more detail below.

[0024] This advantageously results in the air bearing device being able to be mechanically connected to the holding device either via the previously explained connecting element, or alternatively or additionally, by adhesive bonding to the holding device. If a connection is provided via adhesive bonding, a reliable mechanical connection is advantageously achieved. If a connection is provided via the connecting element, a mechanical connection is advantageously achieved that can permit a desired relative movement between the holding device and the air bearing device.

[0025] Furthermore, there is greater flexibility in the mechanical connection of the air bearing device to the holding device, since the air bearing device can be either glued to the holding device or connected to it via the connecting element.

[0026] In a preferred embodiment, the receiving section for the connecting element is arranged on a rear side of the air bearing device. If the connecting element is arranged in the receiving section, it can extend away from the rear side of the air bearing device and toward a section of the holding device that serves to receive or fasten this connecting element. This reliably results in a space-saving yet reliable mechanical connection between the air bearing device and the holding device.

[0027] In a further preferred embodiment, a receiving section for adhesive material is arranged on a rear side of the air bearing device. This also advantageously results in a simple and space-saving attachment of the air bearing device to a holding device, in particular without the air flow being impeded by adhesive material.

[0028] According to the invention, a receiving section for adhesive material is arranged on a side wall of the air bearing device.

[0029] It is possible for a receiving section for adhesive material to be arranged on the rear side of the air bearing device and for at least one receiving section for adhesive material to be arranged on the side wall. However, embodiments are also conceivable in which at least one receiving section is arranged on the rear side and no receiving section is arranged on the side wall, or in which at least one receiving section is arranged on the side wall but no receiving section is arranged on the rear side.

[0030] The arrangement of a receiving section on a side wall of the air bearing device results in a further saving of installation space when fastening the air bearing device to the holding device, in particular since the holding device can be at least partially glued into a recess of the holding device.

[0031] In a further embodiment, a receiving section on the side wall extends from a rear side to a front side of the air bearing device. A central axis of the receiving section can be oriented parallel to the central axis of the air bearing device. However, it is also conceivable that a central axis of the receiving section or at least a part of the receiving section forms an angle with the central axis of the air bearing device. This angle can be greater than zero. Furthermore, the angle can additionally be less than 90°. In this case, a direction vector of the central axis of the receiving section can have a portion that is oriented parallel to the central axis of the air bearing device.

[0032] It is possible for the receiving section to begin at the rear. Alternatively or cumulatively, it is possible for the receiving section to end at the front. Preferably, the receiving section begins at the rear and ends before the front, in particular in such a way that no adhesive material can pass from the receiving section to the front, or this is at least made more difficult.

[0033] This advantageously results in a reliable bonding of the air bearing device to the holding device.

[0034] In a further embodiment, a receiving section for adhesive material extends on a side wall along a circumferential direction of the air bearing device, in particular the circumferential direction of the housing or the base body. This can mean, in particular, that a central axis of the receiving section or at least a partial section of the receiving section forms an angle of 90° with the central axis of the air bearing device. In this case, a direction vector of the central axis of the receiving section may not have a portion that is oriented parallel to the central axis of the air bearing device.

[0035] This also advantageously results in a reliable bonding of the air bearing device to the holding device.

[0036] In a further embodiment, a receiving section extending along the side wall from the rear side to the front side opens at a front end into the receiving section extending along the circumferential direction. For example, if adhesive material is poured into the receiving section extending from the rear side to the front side, in particular from the rear side, the adhesive material can flow toward the front side, and from this receiving section into the receiving section extending along the circumferential direction.

[0037] However, it is also possible for a receiving portion extending along the side wall from the rear side to the front side to end before the receiving portion extending along the circumferential direction. In this case, a predetermined distance may be provided between a front end of the receiving portion extending along the side wall from the rear side to the front side and the receiving portion extending along the circumferential direction.

[0038] This advantageously prevents adhesive material from reaching the front side and, for example, clogging air outlet openings. The receiving section running along the circumferential direction can also be referred to as a stop receiving section. This advantageously enables a secure mechanical attachment of the air bearing device to the holding device, while simultaneously increasing the operational reliability of the air bearing device.

[0039] In a further preferred embodiment, a receiving section for adhesive material is designed as a groove. In a cross-sectional plane perpendicular to the central axis of the groove, a groove can have a part-circular, in particular semicircular, rectangular, triangular, or trapezoidal cross-section. A groove can be produced, for example, by milling. In the cross-sectional plane explained, for example, a width of the groove can taper in a direction from the top side of the groove to the bottom side of the groove. This advantageously results in simple production of the at least one receiving section for adhesive material.

[0040] In a further embodiment, a groove width changes, in particular along the groove. In particular, a groove width extending from the rear side to the front side can change, in particular decrease, toward the front side.

[0041] This also advantageously ensures that adhesive material cannot reach the front of the air bearing device and thus block air outlet openings.

[0042] Further proposed is a holding device with at least one air bearing device according to one of the embodiments described in this disclosure. The holding device can, in particular, be a carriage, which can also be referred to as a slide or X-slide, or a part thereof. The carriage, in turn, can be part of a coordinate measuring machine. In particular, the carriage can be mounted on / at a support body by at least one air bearing device. The support body can also be part of the coordinate measuring machine, in particular a so-called crosshead.

[0043] The holding device, or at least a part thereof, can be cage-shaped. In particular, it is possible for only sections, but not the entire holding device, to be cage-shaped. Such a cage-shaped design is described in detail in DE 10 2017 212 090 A1, discussed above. Accordingly, for the purposes of this disclosure, reference is made in full to the disclosure regarding the features of such a cage-shaped holding device.

[0044] The holding device can, in particular, have at least one receiving and / or fastening section for holding the at least one air bearing device. For example, the holding device can have a recess, in particular a recess designed as a through-opening, wherein the air bearing device can be arranged in the recess.

[0045] In this case, it is possible for the air bearing device to be connected to the holding device via a connecting element for mechanical connection. Alternatively or additionally, it is possible for the air bearing device to be adhesively bonded to the holding device. To create the adhesive connection, adhesive material can be arranged in at least one receiving section for adhesive material of the air bearing device.

[0046] It is further possible that the holding device, in particular the receiving and / or fastening section, for holding the at least one air bearing device has a receiving section for receiving the explained connecting element, which can also be referred to as a connecting element receiving section.

[0047] This connecting element receiving section of the holding device can, for example, have a threaded bore. The connecting element, in particular an end of the connecting element on the holding device side, can be screwed into the threaded bore. In this case, an end of the connecting element on the air bearing device side can be arranged in the receiving section of the air bearing device. The connecting element receiving section of the holding device can also be formed by a through-opening, recess, gap, or depression. This recess, gap, or depression can, in particular, be designed like a blind hole. Furthermore, in particular, the receiving section can be designed in the shape of a spherical segment, a pyramid or pyramid segment, or a cone or truncated cone.

[0048] It is possible for the holding device to have or form a spring element, wherein the spring element has or forms the connecting element receiving section for receiving the described connecting element. The spring element can, for example, be mechanically connected, in particular, mechanically rigidly connected, to a base body of the holding device.

[0049] It is further possible for the receiving and / or fastening section of the holding device for holding the at least one air bearing device to have or form a receiving section for receiving adhesive material. These can be arranged, for example, on the side walls of a recess for receiving the air bearing device.

[0050] This makes it possible to mechanically connect the air bearing device to the holding device. This allows the air bearing device to be mechanically rigidly connected to the holding device, i.e., firmly mounted. In this case, no relative movement between the air bearing device and the holding device is possible. The mechanically rigid connection can be established, in particular, using the adhesive connection described above. Of course, it is also possible to choose other positive-locking, material-locking, and / or force-locking connection types for this connection.

[0051] Alternatively or additionally, it is possible to connect the air bearing device to the holding device in a mechanically movable, i.e. loosely mounted, manner. In this case, a relative movement between the air bearing device and the holding device is possible. The relative movement can be a rotational movement with one, two, or three independent rotational degrees of freedom. Alternatively or additionally, the relative movement can be a translational movement with one, two, or three independent translational degrees of freedom. Preferably, the relative movement is a rotational movement, but not a translational movement. In this case, tilting but not displacement of the air bearing device relative to the holding device is possible. This can be used advantageously to compensate for manufacturing tolerances in the bearing partner body and thus air gap changes.A mechanically movable connection between the air bearing device and the holding device can be established, in particular, by connecting the air bearing device to the holding device via the at least one connecting element. For example, the holding device can be mechanically connected to the air bearing device via a threaded pin. The threaded pin can be screwed into the threaded bore of the fastening section. Furthermore, the threaded pin can have a partially spherical end, wherein the partially spherical end is / will be arranged in a receiving section of the air bearing device.

[0052] The holding device can also be mechanically connected to the air bearing device via a ball. The ball can be inserted into a receiving section of the fastening section of the holding device. The receiving section of the fastening section can be designed to correspond to the receiving section of the air bearing device. Furthermore, the ball can be arranged in a receiving section of the air bearing device.

[0053] Such a connection advantageously enables the previously explained tilting of the air bearing device relative to the holding device. In this case, the base body can be arranged in a recess or gap in the holding device, in particular in such a way that the explained tilting is possible.

[0054] As already explained above, it is also possible for the holding device to have at least one spring element or to form a spring element. Furthermore, the air bearing device can be connected to the holding device via the connecting element and the spring element. The spring element can, in particular, be a spiral-shaped spring element.

[0055] The following reference coordinate system can be used below. A longitudinal direction can correspond to a longitudinal axis of the holding device, in particular a central axis. If the holding device is a carriage or a part thereof, the longitudinal direction can be oriented parallel to a direction of linear movement of the carriage. If the holding device is a stator or a part thereof, the longitudinal direction can also be parallel to a rotational axis of a rotor that is rotatably mounted on air bearings in the stator.

[0056] A vertical direction can be oriented parallel to and opposite to a weight force. A transverse direction can be oriented perpendicular to the longitudinal and vertical directions. The spatial directions can form a Cartesian coordinate system. In this case, sidewall sections can be arranged spaced apart from one another along the transverse direction. In particular, a receiving volume for a support body can be formed between the sidewall sections, on / at which the holding device is mounted by an air bearing device arranged thereon.

[0057] Furthermore, surfaces of the side wall sections can be oriented orthogonally to the transverse direction. In this case, in particular on one of the side wall sections, at least one air bearing device can be rigidly mounted on the holding device, i.e. stationary relative to the holding device. Furthermore, on a remaining side wall section, at least one air bearing device can be movably mounted on the holding device, i.e. movable relative to the holding device. A movably mounted air bearing device can in particular be mounted on the holding device via a spring element, e.g. via a plate-shaped spring element. A movably mounted air bearing device can thus serve to preload the air bearing, which can also comprise a plurality of rigidly and / or movably mounted air bearing devices. The spring element can be designed as a slotted plate.In particular, the spring element can have a base body, in particular a plate-shaped base body, wherein the plate-shaped base body has or forms at least one slot or groove. This slot or groove can have a spiral shape, in particular around a central axis of the spring element. In particular, the spring element can be designed as a conical spring element or form such a spring element. However, in particular, windings, furthermore in particular all windings, of the conical spring element can be arranged in a common plane, wherein the plane can be oriented perpendicular to the central axis of the spring element.

[0058] Furthermore, the ceiling and floor wall sections can be arranged at a distance from one another along the vertical direction. The receiving volume for the support body can be formed, for example, between the floor and ceiling wall sections, preferably between the floor and ceiling wall sections and the side wall sections.

[0059] Furthermore, a movably mounted air bearing device can be arranged on the ceiling or floor wall section. Furthermore, a rigidly mounted air bearing device can be arranged on the opposite wall section, i.e., the floor or ceiling wall section.

[0060] In particular, the holding device can be rectangular or square in cross-section, wherein a cross-sectional plane can be oriented perpendicular to the longitudinal direction.

[0061] It is possible for a side wall section, a base wall section, or a ceiling wall section of the holding device, or a section thereof, to each have or form a honeycomb structure. Alternatively or in addition to the honeycomb structure, the corresponding section can have or form another bionic structure, for example a star structure, a tree structure, or a bone structure. It is possible for different bionic structures to overlap within the section. This has already been explained above. However, it is also possible for different bionic structures not to overlap within the respective section.

[0062] Furthermore, it is possible for a central axis of a honeycomb structure of the holding device to correspond to a central axis of a star structure of the holding device, in particular of a section of the holding device. Furthermore, it is possible for a diagonal web to be arranged in at least one honeycomb of the holding device, in particular of a section of the holding device. Furthermore, it is possible for a diagonal web of this at least one honeycomb to form a section of a star structure. The diagonal web can divide a honeycomb of a honeycomb structure with rectangular cross-sections, in particular into two honeycombs with triangular cross-sections.

[0063] Further described is an arrangement comprising a holding device with at least one air bearing device attached thereto and at least one carrier body. The carrier body can be arranged in a receiving volume for the carrier body, which is formed by the holding device. The air bearing device can be attached to the holding device in such a way that an air gap can be generated between the carrier body and the holding device by the air bearing device. In particular, the air bearing device can be arranged on the holding device in a predetermined position and / or with a predetermined orientation, in particular relative to the explained reference coordinate system.

[0064] A coordinate measuring machine is also proposed. The coordinate measuring machine comprises at least one holding device according to one of the embodiments described in this disclosure. Furthermore, the coordinate measuring machine comprises at least one air bearing device according to one of the embodiments described in this disclosure. Furthermore, the coordinate measuring machine comprises at least one carrier body, wherein the carrier body is arranged in a receiving section or volume of the holding device. The carrier body can, in particular, be a so-called cross member of the coordinate measuring machine. The air bearing device is mechanically attached to the holding device, as explained above.

[0065] This advantageously results in a coordinate measuring machine that enables highly precise, air-bearing movement of a moving part, while reducing manufacturing costs and weight.

[0066] Further proposed is a method for producing an air bearing device according to one of the embodiments described in this disclosure. The air bearing device, in particular the base body, is provided with at least one receiving portion for a connecting element for mechanically connecting the air bearing device to a holding device. Furthermore, the air bearing device is provided with at least one receiving portion for adhesive material for bonding the air bearing device to the holding device. The receiving portion for the connecting element can be different from the receiving portion for adhesive material. However, it is also possible for the receiving portion for the connecting element to form a receiving portion for adhesive material.

[0067] The air bearing device can be manufactured using a primary forming manufacturing process, in particular a sand casting process, an injection molding process, an investment casting process or a die casting process.

[0068] The air bearing device can also be manufactured using a generative manufacturing process, which can also be referred to as an additive manufacturing process. This can be, for example, a selective laser melting process or a selective laser sintering process. An additive process can also be a 3D printing process.

[0069] Also described is a method for producing a holding device according to one of the embodiments described in this disclosure. In this case, the holding device can be provided with a receiving and / or fastening section for the air bearing device. The holding device can also be produced using a primary forming manufacturing process or a generative manufacturing process or an additive manufacturing process. Furthermore, at least one air bearing device according to one of the embodiments described in this disclosure is mechanically connected to the holding device, in particular in a mechanically rigid or mechanically movable manner. For this purpose, the air bearing device can be arranged at least partially in or on a receiving / fastening section of the holding device for the air bearing device.

[0070] The invention is explained in more detail using exemplary embodiments. The figures show: Fig. 1 is a schematic plan view of a rear side of an air bearing device according to the prior art, Fig. 2 is a perspective view of a rear side of an air bearing device according to the prior art, Fig. 3 is a perspective view of a rear side of an air bearing device according to the prior art, Fig. 4 is a perspective view of a rear side of an air bearing device according to the prior art, Fig. 5 a schematic cross-section through a holding device with air bearing devices attached thereto according to the prior art, Fig. 6 is a schematic perspective view of an air bearing device according to the invention, Fig. 7 a schematic cross section through a holding device according to the invention with air bearing devices according to the invention attached thereto and Fig. 8 a schematic cross section through a holding device according to the invention with air bearing devices according to the invention attached thereto in a further embodiment.

[0071] In the following, the same reference symbols designate elements with the same or similar technical features.

[0072] Fig. 1 shows a bottom view of an air bearing device 1 according to the prior art. The air bearing device 1 comprises a base body 2. The base body 2, or at least a portion of the base body 2, has a bionic structure. In particular, at least a portion of the base body 2 has or forms a honeycomb structure. The honeycomb structure of the base body 2 forms a rear side 14 of the base body 2. The base body 2 has a rectangular, in particular square, base area.

[0073] The honeycomb structure comprises honeycombs 3 with a rectangular or square cross-section, wherein the cross-sectional plane is oriented orthogonally to a central axis 4 of the air bearing device 1. For the sake of clarity, not all such honeycombs 3 with a rectangular cross-section are provided with a reference symbol. A base body-specific reference coordinate system is shown with a longitudinal axis xG and a transverse axis yG, which are oriented perpendicular to each other. The central axis 4 is oriented perpendicular to the longitudinal axis xG and transverse axis yG. Also shown are longitudinal webs 5 of the base body 2 and transverse webs 6 of the base body 2.

[0074] In this case, longitudinal webs 5 extend along or parallel to the longitudinal direction xG and transverse webs 6 extend along or parallel to the transverse direction yG. The longitudinal and transverse webs 5, 6 each delimit honeycombs 3. Two of the longitudinal webs 5 each form a side wall 13 of the base body 2. Two of the transverse webs 5 each form a side wall 13 (see Fig. 3) of the base body 2. The longitudinal and transverse directions xG, yG define a plane that can be oriented parallel to the plane of the rear side 14 or base surface.

[0075] The honeycomb structure also comprises honeycombs 7 with a triangular cross-section, although for the sake of clarity, only one such honeycomb is provided with a reference numeral. Also shown is a receiving section 8 for a connecting element for mechanically connecting the base body 2 to a holding device 16. This receiving section 8 has a circular base area. Furthermore, the receiving section 8 can be designed as a honeycomb. The receiving section can also be designed as a recess, in particular as a tapered recess, for example as a truncated cone-shaped recess. The receiving section 8 is arranged in the region of the honeycomb structure and interrupts the honeycomb structure.

[0076] The receiving section 8 interrupts the course of a central longitudinal web 5 and a central transverse web 6. Also shown are diagonal webs 9, which extend away from the receiving section 8 along a diagonal direction relative to the base body-specific coordinate system. In the illustrated embodiment, a diagonal direction is oriented at an angle of 45° to the longitudinal direction xG and an angle of 45° to the transverse direction yG. The diagonal webs 9 each form a beam section of a star structure. Thus, at least a part of the base body 2 also has or forms a star structure. In particular, the star structure is formed by the diagonal webs 9 and the central honeycomb 8. Also shown are honeycombs 3 with a rectangular cross-section, wherein a diagonal web section 10 is arranged in such a honeycomb 3.This diagonal web section 10 divides a honeycomb 3 with a rectangular cross-section into two honeycombs 7 with a triangular cross-section. The wall thickness of the webs 5, 6, 9 can be, for example, 2 mm. In intersection sections 12, where the honeycomb structure and the star structure intersect, the webs 5, 6, 9 can be thickened. For example, and for the sake of clarity, not all thickened regions 12 are provided with a reference symbol. Sections 12 where the honeycomb and star structures intersect can, in particular, be sections where a longitudinal web 5, a transverse web 6, and a diagonal web 9 intersect.

[0077] It is further shown that four honeycombs 11, which are arranged adjacent to the receiving section 8, each have a triangular cross-section, wherein the triangular cross-section has a concave wall section at an inner corner facing the central axis 4, which is formed by the wall of the receiving section 8. For the sake of clarity, not all such honeycombs 11 are provided with a reference symbol.

[0078] It can be seen that a central axis of the honeycomb structure corresponds to the central axis 4 of the air bearing device 1. Furthermore, it can be seen that a central axis of the star structure also corresponds to this central axis 4 of the air bearing device 1.

[0079] Fig. 2 shows a schematic perspective view of the Fig. 1 shown air bearing device 1. Also shown are side walls 13 of the base body 2. In contrast to the Fig. In the embodiment shown in Figure 1, a connection device 15 for compressed air supply means, in particular a compressed air line, is arranged on a side wall 13. Further connection devices 15 for compressed air supply means are also shown, which are arranged on a bottom or rear side of the base body 2.

[0080] The base body 2 can have a rectangular cross-sectional area, wherein the cross-sectional area is oriented orthogonally to the central axis 4 of the base body 4. Of course, corners of the rectangular cross-section can also be rounded. The cross-sectional area of ​​the base body 2 is delimited by side walls 13 of the base body. In this case, a side wall 13 can form a longitudinal or transverse web.

[0081] Fig. Figure 3 shows a perspective view of an air bearing device 1 in a further embodiment according to the prior art. The air bearing device 1 has a base body 2. The base body 2 is cuboid-shaped. Shown are side walls 13 of the base body 2 and a rear side 14. In / on the rear side 14 of the base body 2, receiving sections 21 designed as grooves for adhesive material are arranged. These receiving sections 21 can have a circular segment-shaped, in particular semicircular, cross-section in a cross-sectional plane perpendicular to a central axis of the receiving sections 21. The receiving sections 21 serve to receive adhesive material for bonding the air bearing device 1 to a holding device 16 (see Fig. 7).

[0082] It is also shown that the base body 2 of the Fig. 2 illustrated embodiment of the air bearing device 1 no receiving section 8 (see e.g. Fig. 1) for receiving a connecting element for the mechanical connection of the air bearing device 1 to a holding device 16.

[0083] In Fig. Figure 4 shows a perspective view of a rear side 14 of another air bearing device 1 according to the prior art. This air bearing device 1 also has a base body 2. The base body 2 is cylindrical in shape. In the center of the rear side 14 of the base body 2, a receiving section 8 is provided for receiving a connecting element for mechanically connecting the air bearing device 1 to a base body 16 (see Fig. 5). It is also shown that the base body 2 of the Fig. 4 illustrated embodiment of the air bearing device 1 no receiving section 21 (see e.g. Fig. 3) for adhesive material.

[0084] Fig. 5 shows a schematic cross-section through a holding device 16 with air bearing devices 1 fastened thereto according to the prior art. The air bearing devices 1 are held on the holding device 16. The holding device 16 can form a carriage or part of a carriage, wherein the carriage can be moved with a linear movement along a support body 31. The holding device has a bottom wall section 29, side wall sections 27, and a top wall section 28. The wall sections 27, 28, 29 enclose or comprise a receiving volume 30 of the holding device 16, wherein the support body 31 is arranged in the receiving volume 30. Shown are a transverse direction y, which can also be referred to as the y-direction, and a vertical direction z, which can also be referred to as the z-direction. Not shown is a longitudinal direction x, which can also be referred to as the x-direction.The vertical direction z can be oriented parallel to the direction of a weight force and opposite to this weight force. The longitudinal direction x can be oriented in or opposite to a direction of movement of the holding device 16 along the support body 31. In . Fig. 5 shows that the air bearing devices 1 are mechanically connected to the holding device via connecting elements 17.

[0085] A connecting element 17 is designed as a threaded pin, the threaded pin having an external thread portion at a first end and a spherical portion 18 at a further end. It is shown that a first side wall portion 27a and the top wall portion 28 have internal threads for receiving the external thread portion of the threaded pin 17, and the threaded portions of the connecting elements 17 are screwed into these internal threads. It is further shown that the spherical portion 18 of these connecting elements 17 is arranged in the receiving portions 8 of the air bearing devices 1 mounted on the holding device 16 via these connecting elements 17. As a result, the corresponding air bearing devices 1 are mounted movably on the holding device 16, namely tiltably about the three spatial axes x, y, z.

[0086] It is further shown that spring elements 32 are attached, in particular screwed, to the second side wall section 27b and the bottom wall section 29. These spring elements 32 can be designed, in particular, spiral-shaped. Furthermore, the spring elements 32 can have a central internal thread, with threaded sections of the connecting elements 17 being screwed into this internal thread. Furthermore, the spherical sections 18 are in turn arranged in receiving sections 8 of the correspondingly mounted air bearing devices 1.

[0087] It is further shown that the air bearing devices 1 are arranged mirror-symmetrically to one another, wherein a center point of a connecting line oriented parallel to the transverse axis y between two mirror-symmetrically arranged air bearing devices which are mounted on the side wall sections 27a, 27b is arranged in a mirror symmetry plane, wherein the mirror symmetry plane is oriented perpendicular to the transverse axis y.

[0088] Air bearing devices 1 arranged on the bottom wall section 29 and the ceiling wall section 28 can also be arranged mirror-symmetrically to one another such that a center point of a connecting line oriented parallel to the vertical axis z between two mirror-symmetrically arranged air bearing devices 1 is arranged in a mirror symmetry plane, wherein the mirror symmetry plane is oriented perpendicular to the vertical axis z.

[0089] Air gaps can be seen that are formed between air bearing devices 1 and a correspondingly oppositely arranged section of the support body 31. This allows the holding device 16 to be air-supported on / at the support body 1. The air bearing enables a carriage to move in or against the x-direction via a drive device (not shown).

[0090] The air bearing devices 1, which are movably mounted on the holding device 16 via spring elements 32, enable preloading of the bearing. This is described as an example for an air bearing device 1 movably mounted on the second side wall section 27b. In particular, the carrier body 31 and / or the holding device 16 can be designed and / or arranged relative to one another such that a spring element 32, via which an air bearing device 1 is movably mounted on the second side wall section 27b, is preloaded when an air gap width of the air gap generated by the air bearing device 1 connected to the corresponding spring element 32 is greater than 0 mm. In normal operation, an air gap width of less than or equal to 10 µm, for example 0.006 mm, can be set by the air bearing device 1. If the air gap widens, e.g.Because the width of the support body 31 decreases in the transverse direction, the air bearing device 1 can be moved in the transverse direction y due to this preload by the spring element 32. Alternatively, the movably mounted air bearing device 1 can be displaced counter to the transverse direction y, in particular when the pressure in the air gap increases. The pressure increase can occur, for example, when the air gap width decreases, e.g., when the width of the support body 31 increases in the transverse direction y.

[0091] Then, due to a mechanical connection of the air bearing device 1 to the spring element 32 via the connecting element 17, the spring element 32 can also be deformed, in particular a center point of the spring element 32 can be displaced counter to the transverse direction y. Due to this deformation, the force generated by the spring element 32, which acts in the transverse direction y via the connecting element 17 on the movably mounted air bearing device 1, changes. Based on this change in force, a desired air gap width, for example that of normal operation, can be set again. A spring rate is preferably selected such that this results in only a comparatively small change in the spring force, which allows the desired air gap width to be set, but also prevents unwanted vibrations during operation. A spring rate can, for example, be less than 1 N / µm.Corresponding statements apply to the air bearing device 1 which is movably mounted on the base wall section 29.

[0092] By supporting the air bearing devices 1 via spherical sections of the connecting elements 17 on the spring elements 32 or on the wall sections 27a, 28 of the holding device 16, forces can be transmitted in and against the transverse direction y (also in and against the z direction), although rotations about the three directions x, y, z shown are permitted. This results in improved spatial positioning of the air bearing device 1 relative to a sliding surface of the support body 31 opposite the air bearing device 1, particularly if this sliding surface has, for example, a curved or inclined section.

[0093] Fig. Figure 6 shows a perspective view of an air bearing device 1 according to the invention. The air bearing device 1 has a base body 2, wherein the base body 2 is cuboid-shaped. The base body 2 is essentially like the base body 2 of the Fig. 1 and Fig. 2. Therefore, reference can be made to the corresponding explanations. In particular, a receiving section 8 for a connecting element 17 (see e.g. Fig. 7), which is provided in the back.

[0094] It is further shown that on side walls 13 receiving sections 21 for receiving adhesive material for bonding the air bearing device 1 to a holding device 16 (see Fig. 7). These receiving sections 21 can also be designed as grooves. A cross-section of these grooves can be partially circular, in particular semicircular, wherein the cross-section can be arranged in a cross-sectional plane perpendicular to a central axis of the grooves.

[0095] It is further shown that these receiving sections 21 arranged on the side walls 13 extend from a rear side 14 to a front side 22 of the base body 2. A central axis of the receiving sections 21 can have a straight course and be oriented parallel to the central axis 4 of the air bearing device 1.

[0096] Also shown is a further receiving section 23, which extends along a circumferential direction on the side walls 13 of the base body 2. This receiving section 23 can also be referred to as a so-called stop groove. This receiving section 23 is also designed as a groove, which, according to the previous explanations, can have a partially circular, in particular semicircular, cross-section. A central axis of this further receiving section 23 is oriented orthogonally to the central axis 4 of the air bearing device 1 and thus also orthogonally to the central axis of the receiving sections 21.

[0097] It is further illustrated that a front end of the receiving sections 21, which extend along the side walls 13 from the rear side 14 to the front side 22, terminates at a predetermined distance in front of the further receiving section 23, which extends along the circumferential direction. However, it is also possible for the receiving sections 21 to open into the further receiving section 23 at a front end.

[0098] Also shown are connection devices 15, which are arranged on a side wall 13 of the housing 2.

[0099] Fig. 7 shows a schematic cross section through a holding device 16 with air bearing devices 1 according to the invention mounted thereon. The holding device 16 is essentially like the one in Fig. 5 is formed. Therefore, the corresponding explanations for the Fig. 5 illustrated embodiment.

[0100] It is shown that the first side wall section 27a and the top wall section 28 each have recesses 33 for receiving / arranging an air bearing device 1. The air bearing device 1, in particular the base body 2, can be arranged at least partially in this recess 33. Adhesive material can then be filled into the recess, for example, from a side of the wall sections 27a, 28 facing away from the receiving volume 30, in particular through a filling opening 34. The adhesive material can then flow into receiving sections of the base body 2, which are arranged on a rear side 14 of the air bearing device 1 or the base body 2.

[0101] Thus, the air bearing devices 1 bonded to the first side wall section 27a and the ceiling wall section 28 in this way are individually mechanically rigidly fastened to the holding device 16.

[0102] Also shown are air bearing devices 1 which are movably mounted on the holding device 16. These are movably mounted on the second side wall section 27b and the bottom wall section 29. This movable mounting has already been explained above, in particular in the explanations for Fig. 5.

[0103] It is essential that all air bearing devices 1 installed in Fig. 7 are shown, as in Fig. 6 shown air bearing device 1. Thus, the Fig. 6 shown air bearing device 1 the production of the two in Fig. 7 shown mechanical connections with the holding device 16.

[0104] Fig. Figure 8 shows a schematic cross section through a holding device 16 with air bearing devices 1 according to the invention mounted thereon in a further embodiment. Fig. The embodiment shown in Figure 8 is essentially the same as that shown in Fig. 7. Therefore, reference is made to the explanations regarding Fig. 7.

[0105] In contrast to the Fig. In the embodiment shown in Figure 7, the first side wall section 27a and the top wall section 28 each have through-openings 35 for receiving / arranging an air bearing device 1. A dimension, in particular a radius or a width and length, of the through-openings 35 is selected such that an air bearing device 1 can be arranged in the through-openings 35 such that an air gap is still present between the side walls 13 of the air bearing device 1 and the inner walls of the through-openings 35.

[0106] Adhesive material can then be filled into this air gap, e.g. from a side of the wall sections 27a, 28 facing away from the receiving volume 30.

[0107] The adhesive material can then flow into the receiving sections 21 of the base body 2. It can flow from the rear side to the front side in the receiving sections 21 and thus be distributed along the side walls 13 of the air bearing device 1. At the front side, the receiving sections 21 on the side wall 13 of the base body 2 open into the further receiving section 23, causing the adhesive material to flow into the receiving section 23 and be distributed there. This minimizes the risk of adhesive material reaching the front side of the base body 2 and, for example, blocking air outlet openings.

[0108] Thus, the air bearing devices 1 bonded to the first side wall section 27a and the ceiling wall section 28 in this way are individually mechanically rigidly fastened to the holding device 16. List of reference symbols 1 air bearing device 2 basic bodies 3 honeycomb with rectangular cross-section 4 central axis 5 Longitudinal web 6 crossbar 7 honeycomb with triangular cross-section 8 Recording section 9 Diagonal bar 10 Diagonal web section 11 honeycomb 12 thickened section 13 Side wall section of the base body 14 Back 15 Connection device 16 Holding device 17 Connecting element 18 spherical section 21 Recording section 22 Front 23 Recording section 27, 27a, 27b side wall section 28 Ceiling wall section 29 Floor wall section 30 recording volume 31 carrier bodies 32 spring element 33 recess 34 Filling opening 35 through openings x longitudinal direction y transverse direction z Vertical direction

Claims

[1] Air bearing device, wherein the air bearing device (1) has or forms at least one receiving section (8) for a connecting element (17) for mechanically connecting the air bearing device (1) to a holding device (16), wherein the air bearing device (1) has or forms at least one receiving section (21, 23) for adhesive material for bonding the air bearing device (1) to the holding device (16), characterized by that the receiving section (21, 23) for adhesive material is arranged on a side wall (13) of the air bearing device (1). [2] Air bearing device according to claim 1, characterized by that the receiving section (8) for the connecting element is arranged on a rear side (14) of the air bearing device (1). [3] Air bearing device according to one of the preceding claims, characterized by that a receiving section (21) for adhesive material is arranged on a rear side (14) of the air bearing device (1). [4] Air bearing device according to one of the preceding claims, characterized by that the receiving section (21) on the side wall (13) extends from a rear side (14) to a front side (22). [5] Air bearing device according to one of the preceding claims, characterized by that the receiving portion (23) extends along a circumferential direction. [6] Air bearing device according to claim 5, characterized by that a receiving portion (21) which extends on the side wall (13) from the rear side (14) to the front side (22) opens at a front end into the receiving portion (23) which extends along the circumferential direction. [7] Air bearing device according to one of the preceding claims, characterized by that a receiving section (21, 23) for adhesive material is designed as a groove. [8] Air bearing device according to one of the preceding claims, characterized bythat a width of the receiving section (21, 23) changes. [9] Holding device with at least one air bearing device (1) according to one of claims 1 to 8, wherein the air bearing device (1) is connected to the holding device (16) via a connecting element (17) for mechanical connection and / or wherein the air bearing device (1) is glued to the holding device (16). [10] Coordinate measuring machine, wherein the coordinate measuring machine comprises at least one holding device (16) and at least one air bearing device (1) according to one of claims 1 to 8, wherein the coordinate measuring machine comprises at least one carrier body (31), wherein the carrier body (31) is arranged in a receiving section (30) or volume of the holding device (16), wherein the air bearing device (1) is connected to the holding device (16) via a connecting element (17) for mechanical connection and / or wherein the air bearing device (1) is adhesively bonded to the holding device (16). [11] Method for producing an air bearing device (1) according to one of claims 1 to 8, wherein the air bearing device (1) is provided with at least one receiving section (8) for a connecting element (17) for mechanically connecting the air bearing device (1) to a holding device (16), wherein the air bearing device (1) is provided with at least one receiving section (21, 23) for adhesive material for bonding the air bearing device (1) to the holding device (16), characterized by , that the receiving section (21, 23) for adhesive material is arranged on a side wall (13) of the air bearing device (1).

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