Spectral analysis system for recording a spectrum

Abstract

Spectral analysis system (100) for recording a spectrum, comprising an inlet opening (110), a dispersive optical element (120) and an at least partially reflective imaging or beam-shaping optic (130) with at least one optical functional element (132; 132a, 132b), which defines a beam path (142) from the inlet opening (110) via the dispersive optical element (120) to an outlet opening (150; 150b) and / or detector surface (150; 150a) of the spectral analysis system (100), and a support component (160) defining a flat beam path volume (140) with at least one lateral opening, where at least one the inlet opening (110), the outlet opening (150; 150b) and / or detector surface (150; 150a), of the at least one optical functional element (132; 132a, 132b) and the dispersive optical element (120) is integrated in at least one component (300), wherein the at least one component (300) is fastened to the support component (160) at the at least one lateral opening, so that the beam path (142) runs largely transversely to a thickness direction of the beam path volume (140); wherein the at least one component (300) is arranged on a side of the carrier component (160) facing away from the beam path volume (140); wherein the beam path is a crossed beam path which, projected along the thickness direction of the beam path volume, has intersecting beam path sections; and wherein the dispersive optical element is designed to be movable and / or rotatable.

Description

Technical area

[0001] Embodiments according to the invention relate to a spectral analysis system for recording a spectrum of electromagnetic radiation. Background of the invention

[0002] In spectroscopy, so-called spectral instruments are often used to record / measure the spectrum of electromagnetic radiation, particularly in the ultraviolet (UV), visible (VIS), and infrared (IR) spectral ranges. The dispersive element required for the spectral splitting of the electromagnetic radiation is usually designed as a diffraction grating. New applications in which spectral analytical measurements play a key role, such as environmental measurement technology and food analysis, require small, robust, and cost-effective spectral instruments, sometimes in very large quantities. It should be noted that some of these applications require powerful instruments comparable to today's commercially available compact spectrometers. One example is the spectral resolution of such instruments of 10 nm half-width in the near-infrared spectral range from 1000 nm to 1900 nm.

[0003] The above-mentioned requirements cannot all be met simultaneously with the current state of technology. The three factors of small size, low cost, and high volume production are at least partially at odds with each other. While maintaining the same device performance, miniaturization leads to complex components and / or assembly processes. This increased complexity, in turn, results in increased manufacturing costs, which may have a negative impact on the production of very large quantities. Solutions that can be manufactured in large quantities at low cost do not achieve the required performance.

[0004] MEMS-based spectrometers are already known from the state of the art. MEMS spectrometers are understood to be those designs equipped with a movable diffraction grating. These components are manufactured using appropriate microtechnology and feature an integrated drive for deflecting a grating mirror plate. By selecting a suitable material system, e.g., silicon, and the appropriate drive type, e.g., electrostatic, deflectable diffraction gratings with large deflection amplitudes can be produced, which are ideally suited for the construction of miniaturized spectral devices. A detailed description of such systems can be found in US Pat. No. 8,045,159 B2, on hybrid spectrometers.

[0005] Laboratory and compact spectrometers are already known. These include Czerny-Turner spectrometer / spectrographs in standard and crossed variants. Furthermore, MEMS grating spectrometers with a stacked design featuring complex optical components are already known, which can be manufactured in miniaturized form, among other things.

[0006] For miniature and precise spectrometers, for example, very small entrance and exit apertures may be required. MEMS slits in various substrate configurations are well known.

[0007] The document DE 10 2016 118 135 A1 discloses a spectral analysis system with an optical arrangement which is arranged on a side of a housing facing the beam path volume, at a lateral opening of the housing.

[0008] Document US 2018 / 0 017 441 A1 discloses a spectrometer module with at least one positioning side on a substrate. A slit element, a dispersive optical element, or a photodetector can be positioned on the positioning sides.

[0009] Document US 2009 / 0 103 088 A1 discloses a spectrometer that, in one embodiment, includes a dispersive element and a concave element. Components are arranged in lateral recesses of a support component facing the beam path volume.

[0010] The document US 2016 / 0 245 693 A1 discloses a monolithic spectrometer comprising a body made of solid material with optical surfaces arranged to guide the light along an optical path in the body.

[0011] In view of this, there is a need for a concept that enables a better compromise between reducing the size, reducing costs, and large-scale production of a spectral device. Thus, a miniaturized spectral device that, for example, incorporates all of the above-mentioned features should be provided. Summary of the invention

[0012] One embodiment relates to a spectral analysis system, also referred to herein as a spectrometer for short, for recording a spectrum. The spectrometer comprises an entrance opening, a dispersive optical element, and an at least partially reflective imaging or beam-shaping optic with at least one optical functional element, which defines a beam path from the entrance opening via the dispersive optical element to an exit opening and / or detector surface of the spectrometer, and a support component that defines a flat beam path volume with at least one lateral opening. The at least one lateral opening does not have to be an opening that completely penetrates the support component, but can also be, for example, a blind hole or countersunk hole that is open at least towards the beam path volume.The flat beam path volume is defined, for example, such that a first plane of the beam path volume, to which the dispersive optical element and the reflective imaging optics are perpendicular or nearly perpendicular, has a greater extent than a second plane that is aligned parallel to the dispersive optical element and the reflective imaging optics and perpendicular or nearly perpendicular to the first plane. In other words, the beam path volume has a thickness direction (along a z-axis) that forms a normal to the first plane (extension in the xy direction), wherein the beam path volume has a smaller extent in the thickness direction than an extension within the first plane (e.g., an extension in the x- or y-direction, or an extension of the size of the clear dimension of the first plane).In the spectrometer, at least one of the entrance opening, the exit opening and / or detector surface, the at least one optical functional element and the dispersive optical element is also integrated into at least one component. The at least one component is attached to the support component at the at least one lateral opening, so that the beam path runs largely transversely to the thickness direction, i.e. primarily laterally. For example, more than 50% of the path of the beam path runs at an angle between 70° and 110°, 80° and 100°, or 85° and 95°, both inclusive, relative to the thickness direction, such as at an angle of 90°, although more than 75% is also possible. In other words, the projected beam path transversely to the thickness direction has an angle between the principal section normal of the beam path transversely to the thickness direction and the thickness direction of between 0° and 20°, or between 0° and 10°, or 0° and 5°.The ratio of the optical path in the beam path not transverse / transverse to the thickness direction is, for example, at least 0 (no deflecting mirrors) and at most 1:1.3, or 1:1.2 or 1:1.1. The at least one opening is, for example, an opening that completely penetrates the support component. In this case, the at least one component is mounted on the support component from the outside, i.e., on a side of the support component facing away from the beam path volume or the outside. However, the opening can also be open not only towards the beam path volume, but also transversely to it, such as upwards or downwards in the figures. In this case, the at least one component could be inserted into the opening from there and fastened in the opening, i.e., along the thickness direction. It would also be possible for the opening not to be designed as a through-opening, but rather a shaft or a recess, such as, for example,a blind hole, which is open to the beam path volume and optionally also perpendicular to it, and into which at least one component is inserted. Insertion is carried out, for example, using a robot or a "pick-and-place" process. This enables a compact design while simultaneously allowing the use of spherical optics and thus lowering manufacturing costs. Projected along a thickness direction of the beam path volume, the beam path can also be designed such that it has intersecting beam path sections. This enables an even more compact design.

[0013] Embodiments of the spectrometer are based on the finding that individual elements (e.g., the entrance aperture, the exit aperture and / or detector surface, the at least one optical functional element, and the dispersive optical element) or components of the spectrometer can be easily and quickly arranged on a support component, for example, using a "pick-and-place" method, thereby enabling large-scale production of the spectrometer. Furthermore, the individual elements and components can be manufactured quickly, easily, and cost-effectively using processes such as injection molding, molding, laser manufacturing, etc.

[0014] In one embodiment, the support component defines a flat beam path volume with at least two lateral openings. The at least two lateral openings can be inclined to one another without this causing any significant problems. The support component can, for example, be produced by injection molding, i.e. be an injection-molded component, and can, above all, implement all preferred orientations of the at least two components that are preferred for a compact design. For example, the spectrometer can have two components, with a first component e.g. integrating an optical functional element, such as a concave mirror, and a second component integrating a further optical functional element, such as a concave mirror, or the dispersive optical element and, optionally, the exit opening and / or the detector surface.In the latter case, the dispersive optical element as well as the exit opening and / or the detector surface could be arranged next to one another in the second component such that, when the second component is arranged at one of the at least two lateral openings, they point in the direction of the beam path volume. Even if, in this example, two elements (two of the entrance opening, the exit opening and / or detector surface, the at least one optical functional element, and the dispersive optical element) are integrated into one component, the spectrometer can also have only components in which only one element (e.g., the entrance opening, the exit opening and / or detector surface, the at least one optical functional element, and the dispersive optical element) is integrated, or more than two elements.

[0015] Furthermore, the at least two lateral openings of the support component are freely alignable. As mentioned, they can be arranged at an angle to each other, for example, inclined relative to each other around an axis parallel to the thickness direction, whereby the orientation can be selected to minimize the required beam path volume. Furthermore, it is easily possible to create a crossed beam path, which allows the beam path volume to be reduced even further. This freely alignable, possibly "skewed" design, combined with an optionally intersecting beam path, allows the spectrometer to be realized in a very small size with minimal manufacturing effort.

[0016] It can therefore be stated that the elements and components of the spectrometer are designed and arranged in such a way that the spectrometer can be produced in large quantities and / or as a very small system while reducing costs. Character description

[0017] Embodiments according to the present invention are explained in more detail below with reference to the accompanying figures. They show: Fig. 1 is a schematic representation of a spectrometer according to an embodiment of the present invention; Fig. 2 shows a schematic representation of a spectrometer with two optical functional elements according to an embodiment of the present invention; Fig. 3 is a schematic representation of a dispersive optical element for the spectrometer according to an embodiment of the present invention; Fig. 4 is a schematic representation of a MEMS gap for the spectrometer manufactured using silicon microtechnology according to an embodiment of the present invention; Fig. 5 is a schematic representation of a gap for the spectrometer produced in metal by laser material processing according to an embodiment of the present invention; Fig. 6 is a schematic representation of a component of the spectrometer according to an embodiment of the present invention; Fig. 7 is a schematic representation of a component of the spectrometer in which both an exit slit and a dispersive element are integrated, according to an embodiment of the present invention; Fig. 8 is a schematic representation of two components of the spectrometer arranged one above the other, according to an embodiment of the present invention; Fig. 9 is a schematic representation of three components of the spectrometer arranged one above the other, according to an embodiment of the present invention; Fig. 10 is a schematic representation of the spectrometer, without illustration of the support component according to an embodiment of the present invention; Fig. 11 is a schematic representation of the course of the beam path of the spectrometer according to an embodiment of the present invention; Fig. 12 is a schematic representation of the spectrometer comprising three deflection mirrors according to an embodiment of the present invention; Fig. 13 a schematic representation of a base of the spectrometer from Fig. 12 according to an embodiment of the present invention; Fig. 14 a schematic representation of a cover of the spectrometer from Fig. 12 according to an embodiment of the present invention; Fig. 15 a schematic representation of a cover of the spectrometer from Fig. 12 without the entrance slit and without the exit slit according to an embodiment of the present invention; Fig. 16 a schematic representation of a cover of the spectrometer from Fig. 12 with deflecting mirrors according to an embodiment of the present invention; Fig. 17 is a schematic representation of the spectrometer comprising two deflection mirrors according to an embodiment of the present invention; Fig. 18 a schematic representation of a base of the spectrometer from Fig. 17 according to an embodiment of the present invention; Fig. 19 a schematic representation of a cover of the spectrometer from Fig. 17 with a substrate according to an embodiment of the present invention; Fig. 20 a schematic representation of a cover of the spectrometer from Fig. 17 with a substrate and two deflection mirrors according to an embodiment of the present invention; Fig. 21 is a schematic representation of the spectrometer with only one optical functional element according to an embodiment of the present invention; and Fig. 22 a schematic representation of the spectrometer from Fig. 21 with only one optical functional element and no crossed beam path according to an embodiment of the present invention. Detailed description of the embodiments according to the figures

[0018] Before exemplary embodiments of the present invention are explained in more detail below with reference to the drawings, it is pointed out that identical, functionally equivalent or equivalent elements, objects and / or structures in the different figures are provided with the same reference numerals, so that the description of these elements shown in different exemplary embodiments is interchangeable or can be applied to one another.

[0019] Fig. Figure 1 shows a schematic representation of a spectral analysis system 100, also referred to herein as spectrometer 100 for short, for recording a spectrum according to an embodiment of the present invention. The spectrometer comprises an entrance opening 110, a dispersive optical element 120, and a reflective imaging optic 130 with at least one optical functional element 132, which defines a self-intersecting beam path 142 from the entrance opening 110 via the dispersive optical element 120 to an exit opening and / or detector surface 150 of the spectrometer 100, and a support component 160, which defines a flat beam path volume 140 with at least one lateral opening. Fig. 1, for example, four openings are shown. One opening corresponds to the entrance opening 110, the exit opening and / or detector surface 150 is arranged at another opening, the reflective imaging optics 130 is arranged at a third opening, and the dispersive optical element 120 is arranged at a fourth opening. In the spectrometer 100, at least two of the entrance opening 110, the exit opening and / or detector surface 150, the at least one optical functional element 132, and the dispersive optical element 120 are integrated into at least two components. For example, the reflective imaging optics 130 is integrated into a first component, and the dispersive optical element 120 is integrated into a second component. In other words, the reflective imaging optics 130 forms a first component, and the dispersive optical element 120 forms a second component.The two components are attached to the support component 160 at two of the four lateral openings, so that the beam path 142, projected along a thickness direction (z-axis, perpendicular to the paper plane) of the beam path volume 140, has intersecting beam path sections. The at least two lateral openings are inclined to each other. This means that the two openings are not arranged parallel or perpendicular to each other, for example.

[0020] The support component 160 can be a single component, e.g., made from a single casting. Fig. 1, for example, shows a top view, and the individual hatched elements of the support component are connected to one another, for example, via a base plate. The base plate, for example, limits the beam path volume on one side and can be perpendicular to the thickness direction. The extent of the beam path volume 140 in the thickness direction is, for example, in a range from 3 mm to 30 mm, 3 mm to 20 mm, 3 mm to 10 mm, or 3 mm to 5 mm, such as 4.5 mm.

[0021] In one embodiment, the inlet opening and the outlet opening can be integrated into a common component or arranged on it.

[0022] In one embodiment, the carrier component 160 has a lateral dimension / thickness aspect ratio of typically 1.5 or 2.5 or 3.5 or 5, but at least 1.25. Absolute values for the dimensions of the carrier component 160 can be, for example, less than 20×20×10 mm. 3 , 10×10×6 mm 3 , 12×8×5 mm3 , 8×8×6 mm 3 , 10×10×5 mm 3 or 8×6×4 mm 3 These values are exemplary; they represent different applications and designs (focal lengths, resolutions, etc.). Thus, the Spectrometer 100 can be considered miniaturized.

[0023] In one embodiment of the spectrometer 100, an angle 143, 144, 145, which is between 10° and 120°, 10° and 110°, or 10° and 100°, lies between a first central ray of a beam bundle directed onto an optical functional element 132 of the reflective imaging optics 130 or the dispersive optical element 120, and a second central ray of a beam bundle emitted by the optical functional element 132 or the dispersive optical element 120. A central ray is understood, for example, to be a ray of a beam bundle that lies on an axis of symmetry of the beam bundle or is approximately the same distance from the outermost rays of the beam bundle, i.e., is located centrally in the beam bundle. This makes it possible to minimize the beam path volume and to realize the spectrometer with a small size.

[0024] In one embodiment of the spectrometer, the optical functional element 132 is a mirror, a lens, or a combination of these, such as a Mangin mirror. This allows electromagnetic radiation to be directed, focused, and / or expanded in a beam path 142 using simple tools. Since mirrors and lenses can be mass-produced and manufactured cost-effectively, the spectrometer can also be manufactured in large quantities at low prices.

[0025] In one embodiment of the spectrometer, the optically effective surface of the optical functional element 132 is a spherical, aspherical, toric, and / or biconic surface and / or freeform surface consisting of an axial or off-axis surface piece, but an otherwise symmetrical surface. Spherical and cylindrical surfaces for the optical functional element 132 in particular can be manufactured easily and cost-effectively, for example, by injection molding or molding, allowing the spectrometer to be manufactured cost-effectively in large quantities.

[0026] In one embodiment of the spectrometer, the dispersive optical element 120 has an electrostatic, a piezoelectric, an electromagnetic, or a magnetostrictive drive for deflecting the dispersive optical element 120. The drive makes it possible to adjust the dispersive optical element 120 such that electromagnetic radiation of different wavelengths can be examined, since, depending on the angle of the dispersive element 120 relative to the optical functional element 132, beams of different wavelengths strike the exit opening and / or detector surface 150. An electrostatic, piezoelectric, or electromagnetic drive can be very finely controlled, making it possible to spectrally split light and analyze it with high precision using a miniaturized spectrometer.

[0027] In one embodiment of the spectrometer, the dispersive optical element 120 has an optical or electrical sensor for determining a deflection position of the dispersive optical element 120. The sensor enables the deflection of the dispersive optical element 120, for example, to always be determined precisely, thus allowing the recorded data to be analyzed very precisely with the miniaturized spectrometer.

[0028] In one embodiment of the spectrometer, the dispersive optical element 120 is a diffraction grating and / or is designed to be movable and / or rotatable. Diffraction gratings can be mass-produced and manufactured cost-effectively, and a rotatable design allows electromagnetic radiation to be variably split.

[0029] In one embodiment, the diffraction grating (dispersive optical element 120) is aberration-corrected. This improves the spectral resolution of the spectrometer 100.

[0030] In one embodiment, the inlet opening 110, the outlet opening and / or detector surface 150, the at least one optical functional element 132, and the dispersive optical element 120 are arranged directly or indirectly on the carrier component 160. For example, the inlet opening 110 and the outlet opening and / or detector surface 150 can be considered indirectly arranged here, since they are, for example, directly integrated into the carrier component. For example, the reflective imaging optics 130 and the dispersive optical element 120 can be considered indirectly arranged, since they are, for example, arranged as independent components on the carrier component.

[0031] Fig. Figure 2 shows a schematic representation of a spectrometer 100 with two optical functional elements according to an embodiment of the present invention. The spectrometer 100 comprises an entrance opening 110, a dispersive optical element 120, and a reflective imaging optic 130 with two optical functional elements 132a and 132b, which define a self-intersecting beam path 142 from the entrance opening 110 via the dispersive optical element 120 to an exit opening 150 of the spectrometer 100. The two optical functional elements 132a and 132b can have the same features and functionalities as the optical functional element 132 in Fig. 1. However, the first optical functional element 132a does not have to have the same features and functionalities as the second optical functional element 132b. For example, the first optical functional element 132a can have the function of a collimator, and the second optical functional element 132b can have the function of focusing a beam. Furthermore, the spectrometer 100 has a support component 160 that defines a flat beam path volume 140 with four lateral openings.A first component corresponding to the inlet opening 110 is arranged at a first opening, a second component into which the second optical functional element 132b is integrated is arranged at a second opening, a third component into which the first optical functional element 132a is integrated is arranged at a third opening, and a fourth component into which the outlet opening 150 and the dispersive optical element 120 are integrated is arranged at the fourth opening.

[0032] In one embodiment of the spectrometer 100, the entrance opening 110 is designed to allow electromagnetic radiation to enter a beam path 142 of the spectrometer 100 and to direct it onto a first optical functional element 132a of the reflective imaging optics 130. The first optical functional element 132a is designed, for example, to collimate the electromagnetic radiation and direct it onto the dispersive optical element 120. The dispersive optical element 120 is, for example, B. designed to spectrally split the electromagnetic radiation and to direct it onto a second optical functional element 132b of the reflective imaging optics 130, wherein the electromagnetic radiation directed by the dispersive optical element 120 onto the second optical functional element 132b crosses the electromagnetic radiation directed by the entrance opening 110 onto the first optical functional element 132a.The second optical functional element is designed, for example, to focus the electromagnetic radiation within an optical depth of field and to direct it onto the exit opening 150 and / or detector surface, wherein the spectrally split electromagnetic radiation directed by the second optical functional element 132b onto the exit opening 150 and / or detector surface crosses both the electromagnetic radiation directed from the entrance opening 110 onto the first optical functional element 132a and the electromagnetic radiation directed from the first optical functional element 132b onto the dispersive optical element. The advantage of this crossed beam path 142 is that the spectrometer can be realized with a small beam path volume and thus can be manufactured with a small overall size.

[0033] In one embodiment of the spectrometer 100, an angle 143 between a first beam bundle, which comprises electromagnetic radiation directed from the entrance opening 110 onto a first optical functional element 132a of the reflective imaging optics 130, and a second beam bundle, which comprises electromagnetic radiation directed from the first optical functional element 132a onto the dispersive optical element 120, is between 10° and 100°. This minimizes the beam path volume, allowing for the realization of small-sized spectrometers.

[0034] In one embodiment of the spectrometer 100, the exit aperture 150 or the detector surface and the dispersive optical element 120 are monolithically designed as a single component. By integrating multiple components into one component, the spectrometer is simple and cost-effective to manufacture, as fewer components need to be manufactured and greater precision is achieved, as in Fig. As shown in Figure 2, two elements can be manufactured exactly next to each other in a single component, eliminating the need for subsequent precision positioning. Thus, a common component for several elements of the spectrometer is advantageous for mass production.

[0035] In other words, Fig. Figure 2 shows a cross-sectional view of a crossed Czerny-Turner monochromator with the optical functional elements and a support component for holding the components. The slits and the MEMS grating are manufactured using silicon microtechnology. Furthermore, the exit slit and the grating are integrated into a single chip. The support component features appropriate contact surfaces for precise placement and fixation of the optical components.

[0036] Fig. Figure 3 shows a schematic representation of a dispersive optical element 120 for the spectrometer according to an embodiment of the present invention. The dispersive optical element 120 is rotatably mounted and implemented as a diffraction grating. In other words, Fig. 3 a cross-sectional view of a MEMS grating mirror manufactured using silicon microtechnology.

[0037] Fig. Figure 4 shows a schematic representation of a MEMS gap 200 manufactured using silicon microtechnology for the spectrometer according to an embodiment of the present invention. The MEMS gap 200 can, for example, be used as an entrance opening (such as the entrance opening 110 in Fig. 1 and Fig. 2) or as an outlet opening (such as the outlet opening 150 in Fig. 1 and Fig. 2).

[0038] Fig. 5 shows a schematic representation of a gap 200 produced in metal by laser material processing for the spectrometer according to an embodiment of the present invention.

[0039] In one embodiment, the entrance aperture and / or the exit aperture are manufactured using laser material processing or a replicating technology. This allows precise apertures to be created, thereby increasing the resolving power of the spectrometer.

[0040] Fig. 6 shows a schematic representation of a component 300 of the spectrometer according to an embodiment of the present invention. A detector surface 150a, an exit opening 150b, and a dispersive optical element 120 are integrated into the component 300. The exit opening 150b, the detector surface 150a, and the dispersive optical element 120 are arranged, for example, on a common wiring carrier 310, whereby the three elements can be advantageously connected to one another and precisely positioned relative to one another. However, in one embodiment, it is also possible for the exit opening 150b or the detector surface 150a and the dispersive optical element 120 to be arranged, for example, on a common wiring carrier 310.

[0041] In one embodiment, the detector surface 150a detects the electromagnetic radiation that emerges spectrally split from the beam path 142 of the spectrometer through the exit aperture 150b. By combining the exit slit with the detector surface, beams with wavelengths different from the wavelength to be analyzed can be easily filtered out.

[0042] In one embodiment, the detector surface has an active surface, which can act as an exit slit. In this case, the active surface has, for example, a rectangular shape of a suitable size, which would make a separate exit slit unnecessary. If, for example, no exit slit is used but only a detector surface 150a, the detector surface 150a must be designed such that its extension does not also detect beams with a different wavelength than the one to be analyzed.

[0043] In other words, Fig. 6 shows a cross-sectional view of a MEMS grating mirror (dispersive optical element 120) manufactured using silicon microtechnology, next to an exit slit 150b produced in metal by laser material processing. Both components are mounted on the same wiring carrier 310. A detector (detector surface 150a) for detecting the spectrally split electromagnetic radiation passing through the exit slit 150b is also located in a recess on the wiring carrier 310.

[0044] Fig. Figure 7 shows a schematic representation of a component 300 of the spectrometer, into which an exit slit 150b, a detector surface 150a, and a dispersive element 120 are integrated, according to an embodiment of the present invention. The exit slit 150b, the detector surface 150a, and the dispersive element 120 are arranged on a wiring carrier 310.

[0045] In other words, Fig. 7 shows a sectional view of a MEMS grating mirror (dispersive element 120) manufactured using silicon microtechnology, in which the exit slit 150b is integrated into the same substrate 320. The MEMS component 200 is mounted on the wiring carrier 310. A detector (detector surface 150a) for detecting the spectrally split electromagnetic radiation 146 passing through the exit slit 150b is additionally located on the wiring carrier 310.

[0046] Fig. 8 shows a schematic representation of two components, a dispersive optical element 120 and an exit slit 150b, which together with a wiring carrier 310 and a detector surface 150a form a component 300 of the spectrometer and which are arranged one above the other, according to an embodiment of the present invention.

[0047] In other words, Fig. 8, for example, shows a cross-sectional view of a MEMS grating mirror (dispersive optical element 120) manufactured using silicon microtechnology, which is mounted on a MEMS exit slit 150b manufactured using silicon microtechnology. The component with exit slit 150b is mounted on a wiring carrier 310. A detector (detector surface 150a) for detecting the spectrally split electromagnetic radiation 146 passing through the exit slit 150b is also located on the wiring carrier 310.

[0048] Fig. 9 shows a schematic representation of three components, a dispersive optical element 120, an exit slit 150b and a component 200 with integrated detector surface 150a, which together with a wiring carrier 310 form a component 300 of the spectrometer, wherein the three components are arranged one above the other on the wiring carrier 310, according to an embodiment of the present invention.

[0049] In other words, Fig. 9 shows, for example, a sectional drawing of a MEMS grating mirror (dispersive optical element 120) manufactured using silicon microtechnology, which is mounted on an exit slit 150b produced in metal by laser material processing. The component with exit slit 150b is mounted, for example, on the component 200, and the component 200 is arranged, for example, on the wiring carrier 310. In one exemplary embodiment, the substrate 210 of the component 200 is monolithically connected to the wiring carrier 310 to form a component, "from a single mold." In this exemplary embodiment, therefore, for example, B. the component with exit slit 150b is mounted on the wiring carrier 310 and in a pit on the wiring carrier 310 there is additionally a detector (detector surface 150a) for detecting the spectrally split electromagnetic radiation 146 passing through the exit slit 150b.

[0050] The components 300 from Fig. 6, Fig. 7, Fig. 8 and Fig. 9 can, for example, have the same features and functionalities and be attached to a support component of a spectrometer described herein at one of the at least two lateral openings, so that the beam path projected along a thickness direction of the beam path volume has intersecting beam path sections.

[0051] Fig. 10 shows a schematic representation of the spectrometer 100, without illustration of the support component according to an embodiment of the present invention. Fig. Figure 10 shows the schematic diagram of a crossed Czerny-Turner monochromator, e.g., with the corresponding beam bundles from the entrance slit 110 via the optical functional elements to the exit slit 150. The spectrometer 100 has a dispersive optical element 120, a first optical reflective element 132a and a second optical reflective element 132b.

[0052] Fig. 11 shows a schematic representation of the course of the beam path of the spectrometer 100 according to an embodiment of the present invention. Fig. Figure 11 shows a schematic diagram of a crossed Czerny-Turner monochromator with, for example, the main or central rays 148 of the beams indicated. The spectrometer 100 has an entrance slit 110, a dispersive optical element 120, a first optical reflective element 132a, a second optical reflective element 132b, and an exit aperture and / or a detector surface 150.

[0053] In one embodiment, an angle 149 between a first central ray 148a, a beam passing through the entrance opening, and a second central ray 148b, a beam impinging on the exit opening, is between 10° and 120°. The angle 149 between the principal rays of the beam path portions between the entrance slit and the first mirror and the second mirror and the exit slit can also be in a range from 10° to 120°, 10° to 100°, or 10° to 90°. Thus, the spectrometer 100 can be a Czerny-Turner MEMS spectrometer. Due to the special design, a miniaturized MEMS spectrometer 100 can be realized.

[0054] All angles 143, 144, 145 and 149, which are in the Fig. 1, Fig. 2 and Fig. 11 can, in one embodiment, also be in a range of 10° to 90°, 10° to 80°, 10° to 70° or 10° to 60°, such as 45°.

[0055] Further embodiments of the spectrometer are described below, in which the beam path has a greater extension in the thickness direction of the spectrometer than in previous embodiments due to the use of deflecting mirrors. The deflecting mirrors allow the beam path to lie in multiple planes.

[0056] Fig. 12 shows a schematic representation of the spectrometer 100, which includes three deflection mirrors 400a-400c, according to an embodiment of the present invention. Fig. 12, for example, shows a crossed Czerny-Turner spectrometer 100 in a quasi-planar design. The spectrometer 100 comprises a support component comprising two parts, a base 312 and a cover 314. The base 312 is designed, for example, as a trough with cutouts 315, 316 on the sides for pick-and-place mounting of a reflective imaging optic 130 with a first optical functional element 132a and a second optical functional element 132b from above. The first optical functional element 132a and / or the second optical functional element 132b can be a mirror. The cutouts 315, 316 form at least two lateral openings in the support component, to which the at least two components, e.g., the first optical functional element 132a and the second optical functional element 132b, are attached.

[0057] In one embodiment, the spectral analysis system 100 comprises a cover. At least one of the inlet opening, the outlet opening and / or detector surface, the at least one optical functional element, and the dispersive optical element is integrated into the cover. The cover 314 of the spectrometer 100 is made of Fig. 12 comprises, for example, an inlet opening 110, an outlet opening 150b, a detector surface 150a and a dispersive element 120. This allows the spectrometer to be realized very small, since fewer elements of the spectrometer 100 increase or influence the extension perpendicular to the thickness direction 500.

[0058] In one embodiment, the deflecting mirrors 400a-400c are designed to direct a beam path 142, e.g., toward the entrance and exit slits. For example, the beam path 142 can impinge on the deflecting mirror 400a from an entrance slit 110, from there be redirected toward the first optical functional element 132a, and from there further via the deflecting mirror 400b to a dispersive optical element 120, from which the beam path impinges on a detector surface 150a via the deflecting mirror 400b, the second optical functional element 132b, and the deflecting mirror 400c through an exit slit 150b. The detector surface 150a can be designed, e.g., as a photodetector. The deflection mirrors 400a-400c can be integrated either as discrete components for pick & place assembly into the base 312 from above or monolithically into the base 312 and subsequently mirrored.

[0059] In one embodiment, the beam path 142 runs largely transversely to the thickness direction 500 and only a part of the beam path runs parallel to the thickness direction 500. Thus, the beam path 142 in Fig. 12, for example, four short paths, between elements arranged on the cover 314 and the deflecting mirrors 400a-400c on the base 312, parallel to the thickness direction 500, and four long paths, between the deflecting mirrors 400a-400c and the first optical reflective element 132a or the second optical reflective element 132b, at an angle between 80° and 100° relative to the thickness direction 500. Thus, more than 50% of the path runs transversely to the thickness direction. However, it is also possible for more than 60%, 70%, or even 75% of the path to run largely transversely to the thickness direction 500.

[0060] In one embodiment, the base 312 or the cover 314 can contain integrated structures for suppressing stray light. The base 312 and / or the cover 314 can be made, for example, from plastic or ceramic (possibly also metal and composite materials). In one embodiment, the cover 314 and / or the base 312 can be realized directly as a (stiffened) printed circuit board or designed as a wiring carrier. In principle, all common circuit board technologies are possible for the base 312 and / or the cover 314, including 3D MID technologies and ceramic technologies (if the beam cone for the exit slit 150b is folded downward, the base 312 can also be manufactured using a 3D MID or ceramic technology).

[0061] In one embodiment, the optical functional elements (e.g., first optical functional element 132a and second optical functional element 132b) may have different surface shapes, e.g., spherical, aspherical, cylindrical, toric, biconic, generally asymmetric (off-axis surface portions of various symmetric or asymmetric surfaces) and / or be implemented as mirrors.

[0062] In one embodiment, gaps, e.g., the inlet gap 110 and the outlet gap 150b, can be designed as separate components or integrated into the cover. The gaps can be manufactured from any suitably machinable material, e.g., plastic, ceramic, metal, composite materials, silicon, or similar materials known from semiconductor technology, by molding or removing. For example, the gap can be produced by laser structuring. In addition, the gaps can be mounted, e.g., using pick & place, possibly with high precision in a planar manner on the underside of the cover 314, which is directed towards the base 312.

[0063] In one embodiment, the detector / detector surface 150a (photodiode or photoconductor, etc.) can be mounted and contacted directly on the cover underside (underside of the cover 314) if the cover 314 is designed as a wiring carrier.

[0064] In one embodiment, electronic components 410, 412, 414 for the spectrometer electronics can be implemented directly on the cover 314, either facing outward or inward, or facing outward and inward (both). An advantageous space gain can be achieved with internally located electronic components 410, 412, 414. The electronic components 410, 412, 414 can be, for example, surface-mounted devices (SMDs), which, for example, regulate a deflection of the dispersive optical element 120 or control the detector surface 150a.

[0065] In one embodiment, a MEMS, e.g., the dispersive optical element 120, has similar features to the detector 150a, e.g., mounting on the underside of the cover, if a third deflecting mirror 400b is present in the beam path 142. Advantages of this variant include, among others, that the essential optical components (e.g., the optical functional elements 132a and 132b) can be manufactured by injection molding (mass production), that a greatly simplified assembly process using standard planar pick & place technology can be used, that only one final assembly step is required when joining the cover 314 and base 312, for example, and that the entrance slit 110 and the circuit board (e.g., the cover 314) are conveniently located for use in mobile devices.

[0066] In one embodiment, the exit slit 150b can be eliminated by an adapted shape of the active detector surface 150a, which, for example, simultaneously functions as the exit slit 150b with a mostly rectangular shape, which, for example, simplifies the Fig. 12. A further simplification of the spectrometer could be achieved by integrating the entrance slit 110 into the cover 314 (or base 312), thereby minimizing the number of components.

[0067] Even if in the schematic representation of the spectrometer 100 in Fig. 12, the base 312 and the cover 314 are shown spatially separated from each other, the base 312 and the cover 314 are connected to each other. Furthermore, the base 312 and the cover 314 can be formed of a hexagonal base instead of a hexagonal base, as in Fig. 12, also have more or fewer corners, or side surfaces, or round side surfaces or even wavy side surfaces.

[0068] In the following Fig. 13 to 16 are magnifications from different perspectives, including the bottom 312 and the cover 314 of the spectrometer 100 from Fig. 12. All elements with the same reference numerals as elements in Fig. 12 may have the same features and functionalities as the corresponding elements in Fig. 12.

[0069] Fig. 13 shows a schematic representation of the base 312 of the spectrometer 100 of Fig. 12 with the same elements as in Fig. 12 according to an embodiment of the present invention.

[0070] Fig. Figure 14 shows a schematic representation of a surface of the cover 314 of the spectrometer 100 of Fig. 12, which points towards the bottom 312, with the same elements as in Fig. 12 according to an embodiment of the present invention.

[0071] Fig. 15 shows a schematic representation of a surface of the cover 314 of the spectrometer 100 of Fig. 12, pointing towards the bottom 312, without the entrance slit 110 and without the exit slit 150b according to an embodiment of the present invention. A first pit 111 and a second pit 151 are integrated into the cover 314. The first pit 111 is formed towards the bottom of the spectrometer 100. Fig. 12 is bounded by the entrance slit 110, and the second pit by the exit slit 150b. The detector surface 150a is integrated into the second pit 151.

[0072] Fig. 16 shows a schematic representation of a surface of the cover 314 of the spectrometer 100 of Fig. 12, which points towards the bottom 312, with the deflection mirrors 400a-400c according to an embodiment of the present invention. The deflection mirrors 400a-400c as well as the first optical functional element 132a and the second optical functional element 132b are arranged on a Fig. 16 not shown bottom 312 of the spectrometer 100, as in Fig. 12 shown, arranged.

[0073] Even if in the Fig. 12 to 16 a crossed beam path 142 is shown, the spectrometer 100 can also be realized with a non-crossed beam path.

[0074] Fig. 17 shows a schematic representation of the spectrometer 100, which includes two deflection mirrors 400a and 400c, according to an embodiment of the present invention.

[0075] In one embodiment, the spectrometer 100 comprises at least one deflection mirror 400a, 400c.

[0076] Fig. 17 shows a slightly modified version of the spectrometer 100 from Fig. 12. An additional circuit board / substrate 318 is arranged, for example, on a side surface for receiving the dispersive optical element 120 (MEMS). This means, for example, that the dispersive optical element 120 is arranged on a surface of the substrate 318 that faces the beam path volume 140. As a result, for example, no third folding mirror, e.g., the deflection mirror 400b of Fig. 12, more is needed, resulting in fewer tolerance problems. However, a side wall of the base 312 includes, for example, a third cutout 317.

[0077] In one embodiment, the substrate 318 comprises electronic components 416, 418 that have the same features and functionalities as the electronic components 410, 412 and 414 of Fig. 12 can have.

[0078] In one embodiment, the cover 314 of the spectrometer 100 has a flexible connection 420 to the side plate (substrate 318) with MEMS. During final assembly, the substrate 318 can thus be folded over, and the dispersive optical element 120 fits into the third cutout 317. For example, a flexible plate can be used for the cover 314 with the substrate 318.

[0079] In one embodiment, the spectrometer 100 may be composed of Fig. 1, Fig. 2, Fig. 10, Fig. 11, Fig. 12 and Fig. 17 contain a temperature sensor for measuring the temperature on or in the spectrometer 100, which represents a supplement.

[0080] In the following Fig. 18 to 20 are magnifications from different perspectives, including the bottom 312 and the cover 314 of the spectrometer 100 from Fig. 17. All elements with the same reference numerals as elements in Fig. 17 may have the same features and functionalities as the corresponding elements in Fig. 17.

[0081] Fig. 18 shows a schematic representation of the base 312 of the spectrometer 100 of Fig. 17 with the same elements as in Fig. 17 according to an embodiment of the present invention. Additionally, a possible crossed beam path 142 is shown.

[0082] Fig. 19 shows a schematic representation of a surface of the cover 314 of the spectrometer 100 of Fig. 17, pointing toward the bottom 312, with a substrate 318 according to an embodiment of the present invention.

[0083] Fig. Figure 20 shows a schematic representation of a surface of the cover 314 of the spectrometer 100 of Fig. 17, which points towards the bottom 312, with a substrate 318 and two deflection mirrors 400a and 400c according to an embodiment of the present invention. Additionally, a possible crossed beam path 142 is shown. The two deflection mirrors 400a and 400c as well as the first optical functional element 132a and the second optical functional element 132b are arranged on a Fig. 20 not shown bottom 312 of the spectrometer 100, as in Fig. 17 shown, arranged.

[0084] Fig. Figure 21 shows a schematic representation of the spectrometer 100 with only one optical functional element 132 according to an embodiment of the present invention. This is, for example, a crossed Monk-Gillieson spectrometer. The difference from a Czerny-Turner spectrometer is, for example, that the spectrometer 100 only comprises an imaging mirror (optical functional element 132) and a grating (dispersive optical element 120) in the convergent or divergent beam path 142, whereby no collimation of the electromagnetic radiation is performed as in a Czerny-Turner spectrometer. Otherwise, the spectrometer 100 has almost all the features of the Czerny-Turner spectrometer (see Fig. 1, Fig. 2, Fig. 10, Fig. 11, Fig. 12 and Fig. 17). For example, the spectrometer 100 has an entrance slit 110, an exit slit and / or a detector surface 150, a reflective optic 130 with an optical functional element 132, and a dispersive optical element 120 that is rotatable. Fig. 21, the support component that connects the individual elements of the spectrometer 100 is not shown. The optical functional element 132 is, for example, a concave mirror.

[0085] A special feature of this variant of the spectrometer 100 is the diffraction grating 120. The grating is advantageously designed to be aberration-corrected, ie a targeted variation of the line spacing and / or a deviation from a straight line is induced to increase the spectral resolution.

[0086] In one embodiment, the dispersive optical element 120 is located in a convergent or divergent part of the beam path 142. In this case, the dispersive optical element 120 can, for example, have multiple functions, for example, to spectrally split the incoming electromagnetic radiation and, for example, to direct and focus the spectrally split radiation toward the exit slit and / or the detector surface 150. This reduces the number of components required for the spectrometer 100, thereby reducing manufacturing costs.

[0087] Fig. 22 shows a schematic representation of the spectrometer 100 of Fig. 21 with only one optical functional element 132 and no crossed beam path 142 according to an embodiment of the present invention. Because the beam path 142 is not crossed, the spectrometer can be used with the support component, which is Fig. 22 is not shown, can be produced in large quantities and at low cost. Furthermore, the spectrometer 100 can be realized in a small size, but not as miniaturized as with a crossed beam path. Another difference to the spectrometer 100 from Fig. 21 is that the spectrometer 100 from Fig. 22 has both an exit slit 150b and a detector surface 150a.

[0088] In other words, the invention is based on the finding that, although miniaturized spectral devices with quite good performance can be manufactured using the MEMS components described in the prior art, the designs known to date have a serious disadvantage that prevents economical production. The embodiments described in the prior art are stacked structures, i.e. the spectral device is composed of a stack of different substrates or subassemblies. This basic structure enables, in principle, the cost-effective production of a highly miniaturized spectrometer in large quantities using modern microassembly methods. A key prerequisite, however, is the cost-effective availability of all components in the substrate stack. This is not currently the case, however.Due to the geometry of the optical beam path involved, the stacked approach requires a complexly shaped component with multiple mirror surfaces. This component is subject to tight tolerances to ensure device functionality. Due to this, manufacturing is technically complex and currently not feasible using mass-production processes such as injection molding or molding.

[0089] The inventive solution, for example, avoids such complex components and thus enables economical production while maintaining the same performance. To achieve this, the previously used approaches and geometries of the optical beam path are deviated from and a design known as a crossed Czerny-Turner arrangement is chosen instead. While this is fundamentally known, it is new in a miniaturized form in combination with movable MEMS diffraction gratings. As a result, the complex two-mirror component "breaks down," for example, into two simple rotationally symmetric mirrors. These can be easily manufactured with high precision and in various quantities, from small series to enormous quantities, using currently available technologies. This is made possible, for example, by the significantly simplified shape (rotational symmetry) of the optical functional elements.Crossing the corresponding parts of the beam path also creates a greater separation between the two mirror surfaces, for example, for an optical functional element, thus creating the necessary installation space for process-reliable assembly. Another advantage of the crossed beam path compared to the state of the art for stacked MEMS spectrometers is a significantly greater distance between the entrance and exit slits, as these are now located on different sides of the spectral apparatus. This greatly simplifies the integration of an often optional coupling optics in front of the entrance slit.

[0090] The required MEMS grating mirrors can be adopted from the state of the art, for example. However, the invention includes a number of embodiments that also utilize new, adapted MEMS components. For example, the exit slit can be integrated into a MEMS substrate, thus reducing assembly effort and allowing some tolerances to be selected very tightly, which in turn benefits system performance.

[0091] Another important feature of the invention is the ability to mount all functional elements (e.g., entrance slit, exit slit, reflective imaging optics, dispersive optical element) directly to a support component. Due to their size, compact spectrometers typically require significantly more mechanical parts to hold the optical functional elements. Compared to stacked MEMS spectrometers, for example, when using only one component for mounting (e.g., the support component), no tolerance chains for the position of the optical functional elements build up. Due to the small size of the solution according to the invention, very different processes can be used to manufacture the support component, ranging from small series to volume production. Examples include machining, additive manufacturing, and injection molding.

[0092] Advances in system technology for automated microassembly (pick-and-place technology) now enable efficient assembly of the inventive solution, for example, even if a purely stacked approach is deviated from in favor of a multi-faceted approach. A further advantage of this approach is, for example, a significant increase in the mechanical and thermal stability of the overall system.

[0093] In addition, the spectrometer described herein can be used, for example, with folded substrates and the folding assembly method can be applied.

[0094] In other words, the spectrometer described herein can be described with the following embodiments.

[0095] In one embodiment, the spectral apparatus / spectrometer for performing a spectral analytical measurement comprises the following elements: • An entrance opening through which electromagnetic radiation can enter a beam path of the spectral apparatus; • A first optical functional element for collimating the radiation; • A dispersive optical element for the spectral splitting of electromagnetic radiation; • A second optical functional element for focusing the radiation; • An exit opening through which the spectrally split electromagnetic radiation can exit the beam path; wherein the elements are arranged in such a way that a beam path is formed in which the radiation passing through the entrance opening strikes the first optical functional element in the form of a beam, then the dispersive optical element, then the second optical functional element and then can leave the beam path through the exit opening and wherein the part of the beam extending between the entrance opening and the first optical element and the part of the beam extending between the second optical element and the exit opening intersect.

[0096] In one embodiment, the first optical functional element comprises a mirror or a lens.

[0097] In one embodiment, the second optical functional element comprises a mirror or a lens.

[0098] In one embodiment, the optically effective surfaces of the optical functional elements comprise spherical or aspherical or cylindrical or biconic surfaces.

[0099] In one embodiment, an angle between a main ray or central ray of the first beam and a main ray or central ray of the second beam is between 10° and 100°.

[0100] In one embodiment, the dispersive optical element is designed to be rotatable.

[0101] In one embodiment, the dispersive optical element comprises a diffraction grating, or the dispersive optical element is a diffraction grating.

[0102] In one embodiment, the diffraction grating is designed as a rotatable micromechanical component.

[0103] In one embodiment, the micromechanical component is manufactured using silicon microtechnology.

[0104] In one embodiment, the micromechanical component has an electrostatic or piezoelectric or electromagnetic drive for deflecting the diffraction grating.

[0105] In one embodiment, the micromechanical component has an optical or electrical sensor for determining a deflection position of the component.

[0106] In one embodiment, the inlet opening and / or the outlet opening is manufactured using silicon microtechnology or by laser material processing.

[0107] In one embodiment, the rotatable diffraction grating and the exit aperture are manufactured in a common substrate.

[0108] In one embodiment, the entrance opening, the exit opening, the two optical functional elements and the dispersive optical element are attached to a common mechanical carrier substrate or carrier component.

[0109] In one embodiment, a detector / detector surface for detecting electromagnetic radiation is arranged in the beam direction behind the exit opening.

[0110] In one embodiment, the micromechanical component and the detector for detecting electromagnetic radiation are arranged on a common wiring carrier.

[0111] In one embodiment, the micromechanical component and the exit opening are manufactured in a common substrate and this is arranged with a detector / detector surface for detecting electromagnetic radiation on a common wiring carrier.

[0112] In one embodiment, the focal length range of the at least one optical functional element of the optically reflective imaging optics lies in a range with a lower limit of 100 mm, 150 mm, 200 mm, 250 mm, 300 mm or 350 mm and an upper limit of 550 mm, 600 mm, 700 mm, 800 mm or 1000 mm.

[0113] In one embodiment, a monolithic buckling substrate is used for the carrier component.

[0114] The following describes additional embodiments and aspects of the invention that may be used individually or in combination with any of the features, functionality, and details described herein.

[0115] According to a first aspect, a spectral analysis system for recording a spectrum comprises an entrance opening, a dispersive optical element and an at least partially reflective imaging or beam-shaping optic with at least one optical functional element, which defines a beam path from the entrance opening via the dispersive optical element to an exit opening and / or detector surface of the spectral analysis system, and a carrier component which defines a flat beam path volume with at least one lateral opening, wherein at least one of the entrance opening, the exit opening and / or detector surface, the at least one optical functional element and the dispersive optical element is integrated in at least one component, and wherein the at least one component is fastened to the carrier component at the at least one lateral opening, such that the beam path runs largely transversely to a thickness direction of the beam path volume.

[0116] According to a second aspect with reference to the first aspect, the support component defines a flat beam path volume with at least two lateral openings.

[0117] According to a third aspect with reference to the second aspect, the at least two lateral openings are inclined to each other.

[0118] According to a fourth aspect with reference to at least one of the first to third aspects, the beam path is a crossed beam path which, when projected along the thickness direction of the beam path volume, has intersecting beam path sections.

[0119] According to a fifth aspect, with reference to at least one of the first to fourth aspects, the entrance opening is designed to allow electromagnetic radiation to enter a beam path of the spectral analysis system and to direct it onto a first optical functional element of the reflective imaging or beam-shaping optics; the first optical functional element is designed to collimate the electromagnetic radiation and direct it onto the dispersive optical element; the dispersive optical element is designed to spectrally split the electromagnetic radiation and direct it onto a second optical functional element of the reflective imaging or beam-shaping optics, wherein the electromagnetic radiation directed by the dispersive optical element onto the second optical functional element intersects the electromagnetic radiation directed by the entrance opening onto the first optical functional element;and the second optical functional element is designed to focus the electromagnetic radiation within an optical depth of field and to direct it onto the exit opening and / or detector surface, wherein the spectrally split electromagnetic radiation directed by the second optical functional element onto the exit opening and / or detector surface crosses both the electromagnetic radiation directed from the entrance opening onto the first optical functional element and the electromagnetic radiation directed from the first optical functional element onto the dispersive optical element.;

[0120] According to a sixth aspect with reference to at least one of the first to fifth aspects, the dispersive optical element is located in a convergent or divergent part of the beam path.

[0121] According to a seventh aspect, with reference to at least one of the first to sixth aspects, an angle between a first central ray of a beam bundle directed onto an optical functional element of the reflective imaging or beam-shaping optics or the dispersive optical element and a second central ray of a beam bundle emitted by the optical functional element or the dispersive optical element is between 10° and 120°.

[0122] According to an eighth aspect with reference to at least one of the first to seventh aspects, an angle between a first central ray, a beam passing through the inlet opening, and a second central ray, a beam striking the outlet opening, is between 10° and 120°.

[0123] According to a ninth aspect with reference to at least one of the first to eighth aspects, the spectral analysis system comprises a cover, wherein at least one of the inlet opening, the outlet opening and / or detector surface, the at least one optical functional element and the dispersive optical element is integrated into the cover.

[0124] According to a tenth aspect with reference to at least one of the first to ninth aspects, the beam path runs mostly transversely to the thickness direction and only a part of the beam path runs parallel to the thickness direction.

[0125] According to an eleventh aspect with reference to at least one of the first to tenth aspects, the inlet opening, the outlet opening and / or detector surface, the at least one optical functional element and the dispersive optical element are arranged directly or indirectly on the carrier component.

[0126] According to a twelfth aspect, with reference to at least one of the first to eleventh aspects, the at least one optical functional element comprises a mirror, a lens, or a combination thereof; and / or the optically effective surface of the at least one optical functional element is a spherical, aspherical, cylindrical, toric, and / or biconic surface and / or freeform surface.

[0127] According to a thirteenth aspect, with reference to at least one of the first to twelfth aspects, the dispersive optical element comprises an electrostatic, a piezoelectric, an electromagnetic, or a magnetostrictive drive for deflecting the dispersive optical element; and / or the dispersive optical element comprises an optical or electrical sensor for determining a deflection position of the dispersive optical element.

[0128] According to a fourteenth aspect with reference to at least one of the first to thirteenth aspects, the dispersive optical element comprises a diffraction grating, and the grating is aberration-corrected.

[0129] According to a fifteenth aspect with reference to at least one of the first to fourteenth aspects, the dispersive optical element comprises a diffraction grating and / or is designed to be movable and / or rotatable.

[0130] According to a sixteenth aspect with reference to at least one of the first to fifteenth aspects, the exit opening or the detector surface and the dispersive optical element are designed monolithically as a common component.

[0131] According to a seventeenth aspect with reference to at least one of the first to sixteenth aspects, the detector surface has an active surface, wherein the active surface can act as an exit slit.

[0132] According to an eighteenth aspect with reference to at least one of the first to seventeenth aspects, the exit opening or the detector surface and the dispersive optical element are arranged on a common wiring carrier.

[0133] According to a nineteenth aspect with reference to at least one of the first to eighteenth aspects, the inlet opening and the outlet opening can be integrated in or arranged on a common component.

[0134] According to a twentieth aspect with reference to at least one of the first to nineteenth aspects, the detector surface detects the electromagnetic radiation which emerges spectrally split from the beam path of the spectrometer through the exit opening.

[0135] According to a twenty-first aspect with reference to the twentieth aspect, the exit opening is arranged with the detector surface and the dispersive optical element on a common wiring carrier.

[0136] According to a twenty-second aspect with reference to at least one of the first to twenty-first aspects, the entrance opening, the exit opening and / or the dispersive optical element is manufactured using silicon microtechnology.

[0137] According to a twenty-third aspect with reference to at least one of the first to twenty-second aspects, the inlet opening and / or the outlet opening are manufactured by means of laser material processing or a replicating technology.

[0138] According to a twenty-fourth aspect with reference to at least one of the first to twenty-third aspects, the spectral analysis system is of the Czerny-Turner or Monk-Gillieson type spectrometer.

[0139] A twenty-fifth aspect is directed to a method for recording a spectrum using a spectrum analysis system according to any one of aspects one to twenty-four.

Claims

[1] Spectral analysis system (100) for recording a spectrum, comprising an inlet opening (110), a dispersive optical element (120) and an at least partially reflective imaging or beam-shaping optic (130) with at least one optical functional element (132; 132a, 132b), which defines a beam path (142) from the inlet opening (110) via the dispersive optical element (120) to an outlet opening (150; 150b) and / or detector surface (150; 150a) of the spectral analysis system (100), and a support component (160) defining a flat beam path volume (140) with at least one lateral opening, where at least one the inlet opening (110), the outlet opening (150; 150b) and / or detector surface (150; 150a), of the at least one optical functional element (132; 132a, 132b) and the dispersive optical element (120) is integrated in at least one component (300), wherein the at least one component (300) is fastened to the support component (160) at the at least one lateral opening, so that the beam path (142) runs largely transversely to a thickness direction of the beam path volume (140); wherein the at least one component (300) is arranged on a side of the carrier component (160) facing away from the beam path volume (140); wherein the beam path is a crossed beam path which, projected along the thickness direction of the beam path volume, has intersecting beam path sections; and wherein the dispersive optical element is designed to be movable and / or rotatable. [2] Spectral analysis system (100) according to claim 1, wherein the support member (160) defines a flat beam path volume (140) with at least two lateral openings. [3] Spectral analysis system (100) according to claim 2, wherein the at least two lateral openings are inclined to each other. [4] Spectral analysis system (100) according to one of claims 1 to 3, wherein the support member (160) has a bottom and side walls and wherein the at least one lateral opening is arranged in at least one of the side walls. [5] Spectral analysis system (100) according to one of claims 1 to 4, wherein the carrier component (160) is manufactured by means of machining, an additive manufacturing process or by means of injection molding. [6] Spectral analysis system (100) according to one of claims 1 to 5, wherein the entrance opening (110) is designed to allow electromagnetic radiation to enter a beam path (142) of the spectral analysis system (100) and to direct it onto a first optical functional element (132; 132a, 132b) of the reflective imaging or beam-shaping optics (130); wherein the first optical functional element (132; 132a, 132b) is designed to collimate the electromagnetic radiation and direct it onto the dispersive optical element (120); wherein the dispersive optical element (120) is designed to spectrally split the electromagnetic radiation and to direct it onto a second optical functional element (132; 132a, 132b) of the reflective imaging or beam-shaping optics (130), wherein the electromagnetic radiation directed by the dispersive optical element (120) onto the second optical functional element (132; 132a, 132b) crosses the electromagnetic radiation directed by the entrance opening (110) onto the first optical functional element (132; 132a, 132b); wherein the second optical functional element (132; 132a, 132b) is designed to focus the electromagnetic radiation within an optical depth of field and to direct it onto the exit opening (150; 150b) and / or detector surface (150; 150a), wherein the spectrally split electromagnetic radiation directed by the second optical functional element (132; 132a, 132b) onto the exit opening (150; 150b) and / or detector surface (150; 150a) crosses both the electromagnetic radiation directed from the entrance opening (110) onto the first optical functional element (132; 132a, 132b) and the electromagnetic radiation directed from the first optical functional element (132; 132a, 132b) onto the dispersive optical element (120). [7] Spectral analysis system (100) according to one of claims 1 to 6, wherein the dispersive optical element (120) is located in a convergent or divergent part of the beam path (142). [8] Spectral analysis system (100) according to one of claims 1 to 7, wherein an angle between a first central ray of a beam bundle directed onto an optical functional element (132; 132a, 132b) of the reflective imaging or beam-shaping optics (130) or the dispersive optical element (120) and a second central ray of a beam bundle emitted by the optical functional element (132; 132a, 132b) or the dispersive optical element (120) is between 10° and 120°. [9] Spectral analysis system (100) according to one of claims 1 to 8, wherein an angle between a first central ray, a beam passing through the entrance opening (110), and a second central ray, a beam impinging on the exit opening (150; 150b), is between 10° and 120°. [10] Spectral analysis system (100) according to one of claims 1 to 9, wherein the spectral analysis system (100) comprises a lid, wherein at least one the inlet opening (110), the outlet opening (150; 150b) and / or detector surface (150; 150a), of the at least one optical functional element (132; 132a, 132b) and the dispersive optical element (120). [11] Spectral analysis system (100) according to one of claims 1 to 10, wherein the beam path (142) runs mostly transverse to the thickness direction and only a part of the beam path (142) runs parallel to the thickness direction. [12] Spectral analysis system (100) according to one of claims 1 to 11, wherein the inlet opening (110), the outlet opening (150; 150b) and / or detector surface (150; 150a), the at least one optical functional element (132; 132a, 132b) and the dispersive optical element (120) are arranged directly or indirectly on the carrier component (160). [13] Spectral analysis system (100) according to one of claims 1 to 12, wherein the at least one optical functional element (132; 132a, 132b) comprises a mirror, a lens, or a combination thereof; and / or wherein the optically effective surface of the at least one optical functional element (132; 132a, 132b) is a spherical, aspherical, cylindrical, toric, and / or biconic surface and / or freeform surface. [14] Spectral analysis system according to one of claims 1 to 13, wherein the dispersive optical element comprises an electrostatic, a piezoelectric, an electromagnetic, or a magnetostrictive drive for a deflection of the dispersive optical element; and / or wherein the dispersive optical element comprises an optical or electrical sensor for determining a deflection position of the dispersive optical element. [15] Spectral analysis system (100) according to one of claims 1 to 14, wherein the dispersive optical element (120) comprises a diffraction grating and the grating is aberration corrected. [16] Spectral analysis system (100) according to one of claims 1 to 15, wherein the exit opening (150; 150b) or the detector surface (150; 150a) and the dispersive optical element (120) are designed monolithically as a common component (300). [17] Spectral analysis system (100) according to one of claims 1 to 16, wherein the detector surface (150; 150a) has an active surface, the active surface acting as an exit slit. [18] Spectral analysis system (100) according to one of claims 1 to 17, wherein the exit opening (150; 150b) or the detector surface (150; 150a) and the dispersive optical element (120) are arranged on a common wiring carrier. [19] Spectral analysis system (100) according to one of claims 1 to 18, wherein the inlet opening (110) and the outlet opening (150; 150b) are integrated in or arranged on a common component (300). [20] Spectral analysis system (100) according to one of claims 1 to 19, wherein the detector surface (150; 150a) detects the electromagnetic radiation which emerges spectrally split from the beam path (142) of the spectral analysis system (100) through the exit opening (150; 150b). [21] Spectral analysis system (100) according to claim 20, wherein the exit opening (150; 150b) is arranged with the detector surface (150; 150a) and the dispersive optical element (120) on a common wiring carrier. [22] Spectral analysis system (100) according to one of claims 1 to 21, wherein the inlet opening (110), the outlet opening (150; 150b) and / or the dispersive optical element (120) is manufactured using silicon microtechnology. [23] Spectral analysis system (100) according to one of claims 1 to 22, wherein the inlet opening (110) and / or the outlet opening (150; 150b) are manufactured by means of laser material processing or a replicating technology. [24] Spectral analysis system (100) according to one of claims 1 to 23, wherein the spectral analysis system (100) is of the Czerny-Turner or Monk-Gillieson type spectrometer. [25] A method for recording a spectrum using a spectral analysis system (100) according to any one of the preceding claims.

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