PSEUDO-STRENGTH MODE MEMS RING GYROSCOPE

Abstract

MEMS gyroscope (300), featuring: a vibrating ring structure; at least one pair of control electrodes (510) configured to electrostatically apply a voltage to the vibrating ring structure in order to excite the vibrating ring structure into a strain mode, wherein the at least one pair of control electrodes (510) comprises a first control electrode and a second control electrode arranged on opposite sides of the vibrating ring structure; and a first support structure (320a) configured to suspend the oscillating ring structure, wherein the first support structure (320a) is arranged on an inside of the oscillating ring structure; wherein the oscillating ring structure comprises a composite lattice ring (310) having several concentric rings, and the MEMS gyroscope further comprises: a second support structure (320b) configured to suspend the oscillating ring structure, wherein the second support structure (320b) is arranged on an outside of the oscillating ring structure, wherein the first and second support structures (320a, 320b) are configured to allow a movement of substantially the same amplitude of at least one innermost ring and one outermost ring of the composite lattice ring (310) when excited in the strain mode.

Description

AREA OF REVELATION

[0001] The present application relates to MEMS (Microelectromechanical Systems) gyroscopes. GENERAL STATE OF THE ART

[0002] MEMS gyroscopes are used to detect rotation. Some MEMS gyroscopes use a disk or ring as a probe mass. These gyroscopes operate the probe mass in a wine glass mode, where the probe mass deforms without any changes in its in-plane width or thickness.

[0003] US 2005 / 0104675A1 discloses microelectromechanical systems with an oscillator ring.

[0004] US 2016 / 0 153 779 A1 describes the dual use of a ring structure as a gyroscope and accelerometer.

[0005] US 2016 / 0 123 735 A1 describes structural features of a ring gyroscope.

[0006] US 2013 / 0 319 116 A1 discloses an XY-axis shell-type gyroscope with reduced crosstalk sensitivity and / or mode matching. BRIEF SUMMARY

[0007] The claimed subject matter is defined in the independent claims. Advantageous further developments are described in the dependent claims.

[0008] A MEMS gyroscope operating in a strain mode is described. In some embodiments, the MEMS gyroscope can have an oscillating ring structure that is excited in a strain mode, and signals generated based on such excitation are only detected in this strain mode.

[0009] In certain embodiments, a MEMS gyroscope is provided comprising: an oscillating ring structure; at least one pair of drive electrodes configured to electrostatically apply a voltage to the oscillating ring structure in order to excite the oscillating ring structure into a strain mode, wherein the at least one pair of drive electrodes comprises a first drive electrode and a second drive electrode arranged on opposite sides of the oscillating ring structure; and a first support structure configured to suspend the oscillating ring structure, wherein the first support structure is arranged on an inside of the oscillating ring structure.

[0010] In certain embodiments, a strain mode gyroscope is provided comprising: a composite grid ring having several first bend sections; at least one pair of drive electrodes configured to electrostatically apply a voltage to the composite grid ring to excite the composite grid ring into a strain mode; and one or more support structures configured to permit movement of substantially the same amplitude of two or more bend sections of the several first bend sections of the composite grid ring when excited in the strain mode.

[0011] In certain embodiments, a method for operating a MEMS (Microelectromechanical Systems) gyroscope with a composite grid ring, comprising a closed-contour inner rim and a closed-contour outer rim, at least one pair of drive electrodes and at least one pair of sensing electrodes, is provided, comprising: electrostatic excitation, via the at least one pair of drive electrodes, of the composite grid ring into an in-plane strain mode, wherein the closed-contour inner rim and the closed-contour outer rim of the composite grid ring move with substantially the same amplitude in the in-plane strain mode when the composite grid ring is excited; and electrostatic sensing, via at least one pair of sensing electrodes, one or more signals generated by the composite grid ring in response to the composite grid ring being excited in the in-plane strain mode. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Various aspects and embodiments of the application are described with reference to the following figures. It is understood that the figures are not necessarily drawn to scale. Elements appearing in several figures are indicated by the same reference number in all figures in which they appear. Fig. Figure 1 illustrates an exemplary strain mode of the oscillation of a gyroscope, wherein the ring width varies over its circumference, according to a non-limiting embodiment. Fig. Figure 2A illustrates a wine glass mode of a gyroscope in which angular accelerations are not rejected, according to a non-restrictive embodiment. Fig. Figure 2B illustrates a rejection of angular accelerations in a strain mode gyroscope according to a non-restrictive embodiment. Fig.Figure 3A illustrates an exemplary layout of a MEMS ring gyroscope showing a composite lattice ring oscillator structure according to a non-limiting embodiment. Fig. Figure 3B illustrates an example layout of the MEMS ring gyroscope from Fig. 3A, which further shows a placement of electrodes designed to electrostatically control and detect a strain mode of the composite grid ring, according to a non-limiting embodiment. Fig. Figure 4 illustrates a disassembled view of the composite lattice ring vibration structure of Fig. 3B according to a non-restrictive embodiment. Fig. Figure 5A illustrates an exemplary arrangement of control and detection electrodes in the MEMS ring gyroscope of Fig. 3A according to a non-restrictive embodiment. Fig.Figure 5B illustrates an alternative exemplary arrangement of drive and acquisition electrodes in the MEMS ring gyroscope of Fig. 3A according to a non-restrictive embodiment. Fig. 6A and Fig. 6B illustrates degenerate eigenmodes of the composite lattice ring vibration structure of Fig. 3A in a strain mode according to a non-restrictive embodiment. Fig. Figure 7A illustrates mode shifts and vibrational energy for a wine glass mode according to a non-limiting embodiment. Fig. Figure 7B illustrates mode shifts and vibrational energy for a strain mode according to a non-restrictive embodiment. Fig. Figure 8 illustrates a frequency sweep of vibration modes according to a non-limiting embodiment. Fig.Figure 9 illustrates a log-linear curve of Ring-Bottom showing Q-factors for strain modes according to a non-restrictive embodiment. Fig. Figure 10 illustrates a motor vehicle which may have a MEMS ring gyroscope of the types described herein, according to a non-limiting embodiment. DETAILED DESCRIPTION

[0013] Aspects of the present application provide a strain-mode electrostatic MEMS gyroscope. The MEMS gyroscope operates using a strain mode without relying on a wine glass mode. The MEMS gyroscope can have an oscillating ring structure that is electrostatically excited and detected in an in-plane strain mode. In one non-limiting embodiment, the oscillating ring structure can comprise a composite lattice ring test material. In another non-limiting embodiment, the oscillating ring structure can comprise a solid ring test material with an annular shape.

[0014] Conventional ring gyroscopes typically utilize wine-glass vibration modes. These modes are classified into fundamental, n=2 modes by the number of nodes—the points of zero displacement—using a common approach to operating the ring gyroscope. Some higher-node modes (n=3, 4) exhibit tolerance for manufacturing defects but lower angular gain (Bryan factor K, 0 < K ≤ 1), and thus degradation in noise power. However, the applicant has recognized that this only applies to modes where the in-plane ring width remains constant during vibration (e.g., a wine-glass mode). On the other hand, strain modes of vibration are higher-order modes where a ring width varies around its circumference (i.e., stretches and contracts). As in Fig.As shown in Figure 1, the ring width varies such that the width w2 is larger than the width w1. Strain modes can have n = 2, 3, or 4 variants. Aspects of the present application provide the operation of the MEMS gyroscope in a higher-order mode without compromising the angular gain. In some embodiments, the MEMS gyroscope, which has a ring structure 110, is operated in a strain mode with a similar or substantially the same angular gain as a conventional ring gyroscope of substantially the same size / footprint operating in a wine-glass mode. In some embodiments, the operating mode of the MEMS gyroscope can be selected by changing an excitation frequency.

[0015] Conventional electrostatic transduction MEMS and BAW gyroscopes suffer from the effects of changes in the electrostatic sensing of gap distances introduced by external stresses such as thermal gradients, external shocks, mechanical stress, and torque. Changes in the gap distance result in changes in sensitivity (scale factor) and ultimately a zero-rate offset for these sensors, making them susceptible to external vibrations that have a negative impact on navigation applications. Aspects of the present application utilize a strain mode of vibration with inherent vibration rejection properties while maintaining a SWaP+C (size, weight, power, and cost) metric associated with electrostatically transduced MEMS gyroscopes.For example, the strain mode allows a local rejection of linear accelerations as well as angular accelerations 210 (such as those caused by forces 220 in . Fig. 2B shown) compared to the fundamental wine glass, n=2 mode, of linear accelerations, but no angular accelerations 210 (as caused by forces 230 in Fig. (shown in 2A) by tuning electrodes over the diameter of the ring.

[0016] In some embodiments, the MEMS gyroscope can comprise an oscillating ring structure, at least one pair of drive electrodes, and at least one pair of sensing electrodes. The at least one pair of drive electrodes and the at least one pair of sensing electrodes can be arranged on opposite sides of the oscillating ring structure without directly connecting the oscillating ring structure. In other words, the drive and sensing electrodes can be positioned such that a gap exists between the electrodes and the oscillating ring structure to provide electrostatic operation.

[0017] In some embodiments, the drive electrodes electrostatically excite an in-plane strain mode of the oscillating ring structure, and the sensing electrodes electrostatically detect only the in-plane strain mode of the oscillating ring structure. In some implementations, one drive electrode of the at least one pair of drive electrodes is electrically connected to another drive electrode of the at least one pair of drive electrodes. Similarly, one sensing electrode of the at least one pair of drive electrodes is electrically connected to another sensing electrode of the at least one pair of sensing electrodes.

[0018] In a non-restrictive embodiment, the oscillating ring structure includes a solid ring test mass that is excited into a strain mode. Electrodes (e.g., the drive and detection electrodes) can be arranged to drive the solid ring into the strain mode and to detect only the strain mode of the solid ring.

[0019] Fig.Figure 3A illustrates an exemplary layout 300 of a MEMS ring gyroscope showing a composite lattice ring vibrating structure. In a non-restrictive embodiment, the vibrating ring structure has a composite lattice ring 310 that is excited into a strain mode. In some embodiments, the composite lattice ring 310 can have multiple bend sections 315 that define a closed-contour inner edge 340 and a closed-contour outer edge 350. In a non-restrictive embodiment, the multiple bend sections 315 can have multiple concentric rings. In a non-restrictive embodiment, the composite lattice ring 310 has multiple closely spaced rings that float freely (i.e., individual rings move in unison upon excitation), so that vibrational energy is concentrated in the composite lattice ring 310.In another non-limiting embodiment, the composite lattice ring 310 can have a connected ring structure comprising a number of bending members or elements connecting a number of concentric rings. The composite lattice ring 310 described herein can exhibit a lower resonant frequency compared to conventional ring structures. In another non-limiting embodiment, the composite lattice ring 310 can have 40 individual rings for an n=2 strain mode, connected by 8 bending members / elements (e.g., in ). Fig.The four cones shown (410) are connected to each other with an offset of 22.5 degrees in every second ring to lower the resonant frequency and increase the Q-factor due to thermoplastic vapors. It is understood that for higher-order modes (e.g., n=3, 4, or higher), composite lattice rings with a different number of rings and cones with offsets of a different degree can be used without departing from the scope of protection of this disclosure.

[0020] As in Fig.As shown in Figure 3A, the MEMS ring gyroscope can have one or more support structures 320 configured to suspend the composite grid ring 310 relative to a substrate (not shown) via one or more anchors 330. In a non-limiting embodiment, a first support structure 320a of the one or more support structures 320 can be arranged on an inner surface of the composite grid ring 310. In a non-limiting embodiment, a second support structure 320b of the one or more support structures 320 can be arranged on an outer surface of the composite grid ring 310. In a non-limiting embodiment, the one or more anchors 330 have an inner anchor located on an inner surface of the first support structure 320a. In another non-limiting embodiment, the one or more anchors 330 have an outer anchor located on an outer surface of the second support structure 320b.In yet another non-restrictive embodiment, the one or more anchors 330 have the inner anchor and the outer anchor.

[0021] Fig. Figure 4 illustrates an expanded view 400 of a section of the composite grid ring 310. As in Fig. As shown in Figure 4, the concentric rings of the composite grid ring 310 are arranged with a first distance 420 between sections of the rings. In some embodiments, each of the one or more support structures 320 has several bending sections (e.g., rings) 415, which are arranged with a second distance 420, as shown in Figure 4. Fig.Figure 4 shows that in a non-restrictive embodiment, the second distance 420 associated with the support structures 320 is larger than the first distance 402 associated with the composite lattice ring 310. In a non-restrictive embodiment, the second distance can be 5 times larger than the first distance, or between 3 and 10 times larger than in non-restrictive examples. The larger distance provides a flexible suspension structure for the composite lattice ring 310, allowing movement of substantially the same amplitude between the closed-contour inner edge 340 and the closed-contour outer edge 350 of the composite lattice ring 310. In a non-restrictive embodiment, support structures 320 on both sides of the composite lattice ring allow movement of substantially the same amplitude between at least one innermost ring and one outermost ring of the composite lattice ring 310.The user understands that, although vibrational energy in conventional devices operating with a wine-glass mode is concentrated either on the outermost ring or the innermost ring depending on the anchor location, the vibrational energy of the strain mode device described herein is concentrated essentially equally on the inside and outside of the composite lattice ring 310, allowing for localized differential transduction when electrodes are placed on opposite sides of the composite lattice ring 310. The support structures 320 ensure that the vibrational energy is concentrated within the ring and away from the anchors, thereby decoupling vibrational motion from a substrate and improving the Q-factor due to anchor losses.In embodiments where both inner and outer anchors are provided, the anchors stiffen the translational modes that are sensitive to external vibrations, thereby reducing the susceptibility to shock / G sensitivity.

[0022] Various geometric parameters for a non-restrictive embodiment of a composite lattice ring are shown in Table 1 below. Table 1 - Composite Ring Parameters Setup diameter (mm) 1,78 Setup layer thickness (µm) 40 Capacitive gap (µm) 1,5 Individual ring width (µm) 5 Number of individual rings 40

[0023] Fig. Figure 3B illustrates an example layout of the MEMS ring gyroscope from Fig.Figure 3A further shows the placement of electrodes 360 configured to electrostatically drive and detect a strain mode of the composite lattice ring 310. Electrodes 360 can include drive and detection electrodes arranged to drive the composite lattice ring 310 into the strain mode and detect only the strain mode of the composite lattice ring 310. In some embodiments, a strain mode of the vibration can be referred to as a pseudo-strain mode, with the excitation appearing as two superimposed n=2 wine-glass modes driven out of phase relative to each other. The composite lattice ring 310 in the strain / pseudo-strain mode can be driven at a much lower frequency than conventional ring structures. The pseudo-stretch mode of the oscillation can be used to detect rates with Q-factors of 110,000 and a noise level of 0.06° / √hr (for a 2×2 mm 2A large gyroscope (as an example) can be used. In a non-restrictive embodiment, the strain / pseudo-strain mode is viewed as a common-mode mode with respect to the electrodes 360°.

[0024] In some embodiments, the electrodes 360 are arranged on opposite sides of the composite grid ring 310. Fig.Figure 5A illustrates an exemplary arrangement of drive and sensing electrodes according to a non-limiting embodiment. The electrodes 360 can comprise at least one pair of drive or forcer electrodes 510 arranged on opposite sides of the composite grid ring 310, and at least one pair of sensing or pick-off electrodes 520 arranged on opposite sides of the composite grid ring 310. The drive electrodes (D1, D2) in the pair 510 are electrically connected, and the sensing electrodes (S1, S2) in the pair 520 are electrically connected. The pair of drive electrodes 510 can be configured to electrostatically apply a voltage to the composite grid ring 310 to excite the ring into an in-plane strain mode.The pair of sensing electrodes 520 can be configured to detect the in-plane strain mode of the composite lattice ring 310 and output signals that can be used to determine a rotation. In a non-limiting embodiment, a first support structure 320a of one or more support structures 320 can be arranged on an inner surface of a first electrode (e.g., D1, S1) of the pair of sensing electrodes. In a non-limiting embodiment, a second support structure 320b of one or more support structures 320 can be arranged on an outer surface of a second electrode (e.g., D2, S2) of the pair of sensing electrodes.

[0025] In a non-restrictive embodiment of Fig.In Figure 5B, the electrodes 360 comprise four pairs (510, 512, 514, 516) of inner / outer control (F) electrodes, four pairs (520, 522, 524, 526) of inner / outer sensing (P) electrodes, and eight quadrature tuning (Q) electrodes. Frequency tuning (T) electrodes may also be provided, sharing the control and sensing electrodes. In a non-limiting embodiment, a first support structure 320a of one or more support structures 320 may be arranged on an inner surface of the set of inner electrodes in the pairs of control / sensing electrodes, as shown in Figure 5B. Fig. 3B. In a non-restrictive embodiment, a second support structure 320b of the one or more support structures 320 can be arranged on an outside of a set of outer electrodes of the pair of drive / detection electrodes, as shown in Fig. 3B can be seen.

[0026] In a non-restrictive embodiment, it shows Fig.5B the electrode configuration only for the excitation of the strain / pseudo-strain mode. The strain / pseudo-strain mode is less sensitive to a difference gap change because the electrode configuration of Fig. 5B is more sensitive to common-mode gap changes, which in turn makes the strain / pseudo-strain mode less sensitive to shock / vibrations and therefore ideal for applications with harsh, high-G environments.

[0027] In some embodiments, to permit strain mode excitation and detection, the drive electrodes in each pair (510, 512, 514, 516) are electrically connected, and the detection electrodes (520, 522, 524, 526) in each pair are electrically connected. Furthermore, all quadrature tuning electrodes are electrically connected to each other, and all frequency tuning electrodes are electrically connected to each other.

[0028] It goes without saying that Fig. 3A and Fig.3B represents a gyroscope design with a stretch mode driven at 125 kHz, but gyroscopes that meet aspects of the present application can be driven at other frequencies (for example, 85 kHz or another frequency). Fig. 6A and Fig. Figure 6B illustrates the composite lattice ring 310 oscillating in a strain mode in an FEA (Finite Element Analysis) simulation run. Simulation and results

[0029] It is understood that although the MEMS ring gyroscope is described here as operating with a strain / pseudo-strain mode, for the purpose of comparing the wine glass mode with strain mode excitation, the simulation was performed for the MEMS ring gyroscope operating in both wine glass and strain modes. The operating mode of the MEMS ring gyroscope was selected by changing the excitation frequency and the electrode configuration. Differential versus common-mode combinations of inner and outer electrostatic electrodes determine whether the wine glass or strain mode is excited and detected. Fig. 7A and Fig. Figure 7B shows the results of an FEA simulation of the MEMS ring gyroscope (for clarity, the supporting structure has been omitted).

[0030] Fig. Figure 7A illustrates a mode shift and vibrational energy for the wine glass mode. Fig.Figure 7B illustrates a mode shift and vibrational energy for the strain mode. For clarity, the anchors and support structures are shown in Fig. 7A, Fig. 7B was omitted but included in the simulation. As shown in Table 2 below, the angular gain and mode mass of the strain mode (n = 2) were similar to those of the wine glass mode (n = 2). As in Fig. As can be seen in Figure 7A, the vibrational energy in the wine glass mode is concentrated in the outermost ring, as shown by regions 1010, whereas in the extension mode (as shown in Figure 7A) the vibrational energy is concentrated in the outermost ring. Fig. (as can be seen in 7B) is concentrated essentially evenly on the inside and outside of the ring, as shown by areas 1020. Table 2 - Wine glass vs. stretching mode wine glass Stretching Mode mass (kg) 2,35e-8 2,25e-8 Angle gain k, (0 <k≤1) 0,76 0,78 Quality factor (measured) 160 000 109 000

[0031] The mode mass was extracted from the natural frequency analysis by taking the ratio of the kinetic energy to the square of the mean velocity for each mode. The angular gain was calculated using frequency domain analysis by harmonically driving the strain mode near its resonant frequency and extracting the amplitude of the degenerate strain mode in response to the applied rotation.

[0032] A DC bias of 20 V and an AC voltage of 20 mV were used for an initial experimental characterization. Fig. Figure 8 illustrates a frequency sweep of the MEMS ring gyroscope showing wine glass modes (n=2, n=3 and n=4) followed by the stretch mode (n=2).

[0033] Fig.Figure 9 illustrates a log-linear curve from Ring-Unten showing Q-factors of 108,000 and 109,000 for the degenerate strain (S11, S22) modes. S11 refers to a drive mode for the pair of drive electrodes (e.g., pair 510 of Fig. 5A), and S22 refers to a sensing mode for the pair of sensing electrodes (e.g., pair 520 of Fig. 5A). In a non-restrictive embodiment, the on-axis frequency tuning electrodes (e.g., T) 0° and T 45° , as in Fig. 5B) are used to tune the frequencies of the degenerate modes, and off-axis quadrature tuning electrodes (e.g., Q) - and Q + ) can be used to eliminate the squaring.

[0034] Fig. Figure 10 illustrates a non-restrictive example in which at least one MEMS ring gyroscope of the types described herein is used in a vehicle. In the example of Fig.10. A motor vehicle 1400 includes a control unit 1402, which is coupled to an on-board computer 1404 of the vehicle by a wired or wireless connection. The control unit 1402 can comprise at least one MEMS ring gyroscope of the type described herein. As a non-limiting example, the at least one MEMS ring gyroscope can detect rotation based on signals picked up by sensing electrodes (e.g., sensing electrodes 520-526). The control unit 1402 can receive current and control signals from the on-board computer 1404 and supply output signals of the type described herein to the on-board computer 1404.

[0035] A strain-mode electrostatic MEMS (microelectromechanical systems) gyroscope is described. The MEMS gyroscope can operate using a strain mode. The MEMS gyroscope can have an oscillating ring structure that is electrostatically excited into the strain mode or can be designed to be electrostatically excited into it.

[0036] Having thus described several aspects and embodiments of the technology of this application, it is understood that various modifications and improvements would readily occur to the person skilled in the art. Such modifications and improvements are intended to be within the scope and protected scope of the technology described in the application. It is therefore understood that the preceding embodiments are presented merely as examples and that, within the scope of protection of the appended claims and equivalents thereof, embodiments according to the invention may be practiced in ways other than those specifically described.Furthermore, any combination of two or more features, systems, articles, materials and / or processes described herein is included within the scope of protection of this disclosure, provided that such features, systems, articles, materials and / or processes are not mutually inconsistent.

[0037] Furthermore, as described, some aspects can be embodied as one or more procedures. The actions performed as part of the procedure can be ordered in any suitable manner. Accordingly, embodiments can be constructed in which actions are performed in an order other than that shown, which may involve the simultaneous execution of some actions, although shown as sequential actions in illustrative embodiments.

[0038] All definitions, as defined and used herein, shall take precedence over dictionary definitions, definitions in documents incorporated by reference, and / or ordinary meanings of the defined terms.

[0039] The terms "approximately", "essentially", and "about" can be used to mean within ±20% of a target value in some embodiments, within ±10% of a target value in some embodiments, within ±5% of a target value in some embodiments, and still within ±2% of a target value in some embodiments. The terms "approximately" and "about" can include the target value.

Claims

[1] MEMS gyroscope (300), featuring: a vibrating ring structure; at least one pair of control electrodes (510) configured to electrostatically apply a voltage to the vibrating ring structure in order to excite the vibrating ring structure into a strain mode, wherein the at least one pair of control electrodes (510) comprises a first control electrode and a second control electrode arranged on opposite sides of the vibrating ring structure; and a first support structure (320a) configured to suspend the oscillating ring structure, wherein the first support structure (320a) is arranged on an inside of the oscillating ring structure; wherein the oscillating ring structure comprises a composite lattice ring (310) having several concentric rings, and the MEMS gyroscope further comprises: a second support structure (320b) configured to suspend the oscillating ring structure, wherein the second support structure (320b) is arranged on an outside of the oscillating ring structure, wherein the first and second support structures (320a, 320b) are configured to allow a movement of substantially the same amplitude of at least one innermost ring and one outermost ring of the composite lattice ring (310) when excited in the strain mode. [2] MEMS gyroscope according to claim 1, wherein the at least one pair of control electrodes (510) is configured to electrostatically excite an in-plane strain mode of the oscillating ring structure. [3] MEMS gyroscope according to claim 2, further comprising: at least one pair of sensing electrodes (520) arranged on opposite sides of the oscillating ring structure and configured to electrostatically sensing only the in-plane strain mode of the oscillating ring structure. [4] MEMS gyroscope according to one of the preceding claims, wherein the first support structure (320a) is configured to suspend the oscillating ring structure via an anchor (330). [5] MEMS gyroscope, featuring: a vibrating ring structure; at least one pair of control electrodes (510) configured to electrostatically apply a voltage to the oscillating ring structure in order to excite the oscillating ring structure into a strain mode, wherein the at least one pair of control electrodes (510) comprises a first control electrode and a second control electrode, which are arranged on opposite sides of the oscillating ring structure; and a first support structure (320a) configured to suspend the oscillating ring structure, wherein the first support structure (320a) is arranged on an inside of the oscillating ring structure; wherein the oscillating ring structure comprises a composite lattice ring (310) having several first concentric rings arranged with a first distance, and the first support structure (320a) has several second concentric rings arranged with a second distance, the second distance being greater than the first distance. [6] Stretch mode gyroscope (300), featuring: a composite lattice ring (310) comprising several first bending sections; at least one pair of control electrodes (510) configured to electrostatically apply a voltage to the composite lattice ring (310) in order to excite the composite lattice ring (310) into a strain mode; and one or more support structures (320a, 320b) configured to allow movement of substantially the same amplitude of two or more bending sections of the multiple first bending sections of the composite lattice ring (310) when excited in the strain mode, wherein a first support structure (320a) is arranged on an inner side of the composite lattice ring (310); wherein the composite grid ring (310) has several concentric rings, and the strain mode gyroscope further comprises: a second support structure (320b) configured to suspend the composite lattice ring (310), wherein the second support structure (320b) is arranged on an outer surface of the composite lattice ring (310), wherein the first and second support structures (320a, 320b) are configured to allow movement of substantially the same amplitude of at least one innermost ring and one outermost ring of the composite lattice ring (310) when excited in the strain mode. [7] Strain mode gyroscope according to claim 6, further comprising: at least one pair of sensing electrodes (520) designed to electrostatically sensing only the strain mode. [8] Strain mode gyroscope according to one of claims 6 to 7, wherein the multiple first bending sections are arranged with a first distance and each of the one or more support structures (320a, 320b) has multiple second bending sections arranged with a second distance, wherein the second distance is greater than the first distance. [9] Strain mode gyroscope according to any one of claims 6 to 8, wherein the at least one pair of control electrodes (510) is arranged on opposite sides of the composite grid ring (310). [10] Strain mode gyroscope according to claim 9, wherein the first support structure (320a) is arranged on an inside of a first electrode of the at least one pair of control electrodes (510) and the second support structure (320b) is arranged on an outside of a second electrode of the at least one pair of electrodes. [11] Strain mode gyroscope according to any one of claims 6 to 10, wherein the one or more support structures (320a, 320b) are configured to suspend the composite grid ring (310) over one or more anchors (330). [12] Method for operating a MEMS gyroscope with a composite grid ring (310) comprising an inner rim (340) with a closed contour and an outer rim (350) with a closed contour, at least one pair of control electrodes (510) and at least one pair of detection electrodes (520), wherein the method comprises: electrostatic excitation, via which at least one pair of control electrodes (510), of the composite lattice ring (310) into an in-plane extension mode, wherein the inner edge (340) with closed contour and the outer edge (350) with closed contour of the composite lattice ring (310) move with substantially the same amplitude in the in-plane extension mode when the composite lattice ring (310) is excited; and electrostatic detection, via which at least one pair of detection electrodes (520) of one or more signals generated by the composite grid ring (310) in response to the composite grid ring (310) being excited in the in-plane strain mode; wherein the composite grid ring (310) has several concentric rings, and the MEMS gyroscope (300) further comprises: a first support structure (320a) which is configured to suspend the composite grid ring (310), wherein the first support structure (320a) is arranged on an inner side of the composite grid ring (310). a second support structure (320b) configured to suspend the composite lattice ring (310), wherein the second support structure (320b) is arranged on an outer surface of the composite lattice ring (310), wherein the first and second support structures (320a, 320b) are configured to allow movement of substantially the same amplitude of at least one innermost ring and one outermost ring of the composite lattice ring (310) when excited in the strain mode. [13] Method according to claim 12, wherein the excitation of the composite lattice ring (310) comprises: Excitation of the composite grid ring (310) into an in-plane strain mode below 100 kHz. [14] Method according to claim 12 or 13, wherein a width of the composite lattice ring (310) changes over a circumference of the composite lattice ring (310) in response to the composite lattice ring (310) being excited into the in-plane strain mode. [15] Method according to any one of claims 12 to 14, wherein the excitation of the composite grid ring (310) comprises the in-plane strain mode: Excitation of the composite lattice ring (310) into an in-plane strain mode exhibiting an angle gain greater than or equal to 0.78.

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