TRAINING DEVICE FOR A PROTECTIVE ELEMENT

Abstract

Training device (1) for a protective element (210) which forms a protective element (210) on a surface (203) of a plate-shaped workpiece (200), wherein the training device for a protective element (210) comprises: an application table (10) for ultraviolet radiation, which supports the workpiece (200) on a support surface (121) of a support plate (12) of the application table (10) for ultraviolet radiation, wherein the support plate (12) is designed such that ultraviolet radiation from an ultraviolet radiation source (13) arranged in the application table (10) for ultraviolet radiation can be transmitted through the support plate (12); a film placement unit (50) which places a film (213) on the carrier surface (121) which is larger than the workpiece (200) and through which the ultraviolet radiation can be transmitted; a plastic supply unit (20) that supplies an ultraviolet curable liquid plastic (214) to the film (213) which is placed on the carrier surface (121); a pressure unit that presses the workpiece (200) from another surface of the workpiece (200) towards the liquid plastic (214) that has been supplied to the film (213) which is placed on the carrier surface (121); a removal unit that holds the film to which the workpiece (200) with the liquid plastic cured by the ultraviolet rays, which is located between the film and the workpiece (200), is fixed, and removes the workpiece (200) from the application table (10) for ultraviolet radiation; and an ionization unit (60) that emits ionized air to the carrier surface (121) of the application table (10) for ultraviolet radiation, wherein, when the film (213) is spaced away from the support surface (121) by the extraction unit, the ionized air (61) ejected by the ionization unit (60) is introduced along the support surface (121) into a gap between the film and the support surface (121).

Description

BACKGROUND OF THE INVENTION Technical field

[0001] The present invention relates to a training device for a protective element. Description of the state of the art

[0002] Processes for manufacturing semiconductor device chips and various types of electronic components involve the steps of thinning a flat workpiece, such as a wafer, with various components formed on it, and dividing such flat workpieces into device chips. The workpiece is processed while held on a clamping table. To prevent breakage during processing, the workpiece has its flat surface protected by a plastic film, such as an adhesive tape or a substrate, applied to the flat surface.

[0003] If a workpiece to be machined has surface irregularities, such as raised areas from metal electrodes on its flat surface, it is difficult to apply the adhesion promoter tape in close contact with these irregularities. Contaminants and machining fluid tend to penetrate the gaps between the surface irregularities and the adhesion promoter tape. Therefore, the adhesion promoter tape is simply detached from the surface irregularities. Furthermore, since the adhesion promoter tape is not suitable for adequately compensating for surface irregularities when the back of the workpiece is ground to thin it, such irregularities tend to be transferred to the workpiece.As a solution to this problem, a processing method has been proposed in which a liquid plastic, which can be cured by external excitation such as ultraviolet radiation, is applied to form a flat layer as a protective element (see, for example, Japanese patent JP 6 312 343 B2 and Japanese publication JP 2017-168 565 A).

[0004] JP 2017-168565A concerns a training device for a protective element.

[0005] DE 10 2015 216 619 B4 relates to a method for processing a wafer.

[0006] DE 602 23 208 T2 relates to a method and a device for manufacturing a plate-like body.

[0007] US 2018 / 0253012A1 concerns an exposure device.

[0008] US 2010 / 0 154 558 A1 concerns an exposure process. PRESENTATION OF THE INVENTION

[0009] The liquid plastic, as described in the processing method disclosed in Japanese Patent No. 6312343 or Japanese Publication No. 2017-168565, is fed to a protective plastic film placed on a glass application table for ultraviolet radiation and distributed through the workpiece. Ultraviolet radiation is then applied to cure the liquid plastic. The protective film and the cured liquid plastic thus form a protective element (in effect, a protective film is held in close contact with the surface of the workpiece, preventing direct contact between the liquid plastic and the workpiece).

[0010] When the protective film is held with the workpiece attached to it and removed from the ultraviolet radiation application table, a high detachment charge occurs between the glass of the ultraviolet radiation application table and the plastic of the protective film, and a subsequent protective film placed over the ultraviolet radiation application table is forced into close contact with the ultraviolet radiation application table and therefore cannot be lifted from the ultraviolet radiation application table.

[0011] Therefore, an objective of the present invention is to provide a training device for a protective element which is suitable for reducing the difficulty of removing the workpiece with a protective element formed on a surface.

[0012] In accordance with one aspect of the present invention, a forming device for a protective element is provided, which forms a protective element on a surface of a plate-shaped workpiece. The forming device for a protective element comprises an ultraviolet radiation application table, which supports the workpiece on a carrier surface of a carrier plate, through which ultraviolet rays from an ultraviolet radiation source arranged in the ultraviolet radiation application table can be transmitted; a film placement unit, which places a film on the carrier surface that is larger than the workpiece and through which ultraviolet rays can be transmitted; a plastic feed unit, which feeds an ultraviolet-curing plastic to the film placed on the carrier surface; and a pressure unit, which presses the workpiece from another surface onto the liquid plastic.The system consists of a dispensing unit that holds the film, which is placed on the substrate surface; a dispensing unit that holds the film, to which the workpiece with the liquid plastic cured by ultraviolet rays is attached. The workpiece is inserted between the workpiece and the film and is removed from the ultraviolet radiation application table; and an ionization unit that emits ionized air onto the substrate surface of the ultraviolet radiation application table. When the film is spaced from the substrate surface by the dispensing unit, the ionized air emitted by the ionization unit is expelled along the substrate surface into a gap between the film and the substrate surface.

[0013] Preferably, the forming device for a protective element further comprises a light-blocking cover, which includes a light-blocking element that covers a space above the substrate surface of the application table for ultraviolet radiation, and a light-blocking closure that opens and closes a section of the light-blocking cover to allow the sampling unit to enter the space. When the light-blocking closure opens the section of the light-blocking cover, a portion of the ionized air from the ionization unit is expelled in such a way that an end region of the film near the light-blocking closure is pressed against the substrate surface.

[0014] The training device for a protective element according to the present invention is advantageous in that it is suitable for reducing the difficulty of removing a workpiece with a protective element that has a formed protective element on a surface.

[0015] The above and further aims, features and advantages of the present invention and the way in which they are realized will become more apparent, and the invention itself will best be understood by studying the following description and the attached claims with reference to the attached drawings, which show a preferred embodiment of the invention. BRIEF DESCRIPTION OF THE FIGURES Fig. 1 is a side view, partly in cross-section, which schematically represents an assembly example of a training device for a protective element according to an embodiment of the present invention; Fig. 2 is a perspective view of a workpiece on which a protective element is attached by the training device for a protective element, which is in Fig. 1 is shown, is to be trained; Fig. 3 is an enlarged partial view in cross-section of the workpiece, which is in Fig. 2 is shown, with a protective element attached to it; Fig. 4 is a perspective view of a frame unit containing the workpiece that is in Fig. 2 is shown; Fig. 5 is a cross-sectional view of the frame unit, which is in Fig. 4 is shown; Fig. 6 is a supervisor, partially in cross-section of a section of the training device for a protective element, which is in Fig. 1 is shown; Fig. 7 is a side view, partly in cross-section, which schematically shows the way in which a plastic feed unit of the training device for a protective element, which is in Fig. 1 is shown, which has applied a liquid plastic to a surface of a plastic film on a support surface; Fig. Figure 8 is a side view, partly in cross-section, which schematically illustrates the way in which the pressure unit is installed in the training device for a protective element, which is in Fig. 1 shows the workpiece pressing against the liquid plastic; Fig. 9 is a side view, partly in cross-section, which schematically shows the way in which an ionization unit of the training device for a protective element, which is in Fig. Figure 1 shows ionized air being expelled onto one end of the plastic film at the support surface; and Fig. Figure 10 is a side view, partially in cross-section, which schematically illustrates the way in which a distribution unit of the training device for a protective element, which is in Fig. As shown in Figure 1, the workpiece is removed by holding the plastic film against the carrier surface. DETAILED DESCRIPTION OF THE PREFERRED VERSION

[0016] One embodiment of the present invention is described in detail below with reference to the figures. The present invention is not limited to the details of the embodiment described below. In addition, the components described below include those that can be readily assumed by a person skilled in the art and those that are essentially identical to those described above. Furthermore, the arrangements described below can be combined in suitable ways. Various omissions, substitutions, or modifications of the arrangements can also be made without departing from the scope of the present invention.

[0017] A training device for a protective element according to the embodiment of the present invention is described in detail below with reference to the figures. Fig. Figure 1 schematically shows, in a side view and partially in cross-section, an example of the construction of a training device for a protective element according to the embodiment of the present invention. Fig. 2 represents, from a perspective viewpoint, a workpiece to which a protective element is attached by the training device for a protective element, which is in Fig. 1 is shown, and is to be trained. Fig. Figure 3 shows an enlarged cross-section of the workpiece that is in Fig. 2 is shown, with a protective element formed on it, and Fig. 4 represents, from a perspective standpoint, a frame unit that holds the workpiece, which is in Fig. 2 is shown, includes. Fig. 5 represents the frame unit in cross-section, which in Fig. 4 is shown. Fig. Figure 6 shows, in a top view and partly in cross-section, a section of the training device for a protective element, which is in Fig. 1 is shown.

[0018] The training device for a protective element, which is designated with reference numeral 1 in Fig. 1, according to the present embodiment, is a device which forms a protective element 210 which is in Fig. 3 is shown, in a desired thickness on a surface side 203 as one of the surfaces of a workpiece 200, which is in Fig. 2 is shown. As in Fig. 2 and Fig. As shown in Figure 3, the workpiece 200 includes a semiconductor wafer, an optical component wafer or the like, which is shaped as a circular plate, which includes a substrate 201 formed from silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs), silicon carbide (SiC) or the like.

[0019] As in Fig. As shown in Figure 2, the workpiece 200 comprises several components 204, which are formed in respective areas that are divided on a surface side 203 by a grid of intersecting planned division lines 202. As shown in Fig. As shown in Figure 3, the components 204 have protrusions 205 that project from the surface 203 and are connected to electrodes of the components 204. The components 204 include, for example, circuits such as integrated circuits (ICs) or large-scale integration circuits (LSIs), image sensors such as charge-coupled devices (CCDs) or complementary metal-oxide semiconductors (CMOS), or microelectromechanical systems (MEMS). The protrusions 205 are made of electrically conductive metal and have a spherical shape in the present embodiment.

[0020] The raised sections 205 are used to electrically connect the components 204 to electrodes on printed circuit boards or the like, in which the components 204 are to be installed. According to the present embodiment, the raised sections 205, which project from the surface 203 of the workpiece 200, form surface irregularities on the surface 203. Furthermore, according to the present embodiment, while the workpiece 200 is shown to have surface irregularities provided by the raised sections 205 on the surface 203 in the present embodiment, the workpiece can also have no raised sections 205. According to the present invention, the workpiece 200 is also not limited to a wafer and can be a rectangular plastic packing substrate, a ceramic plate, a glass plate, or the like, which encapsulates several components.

[0021] According to the present embodiment, the workpiece 200 includes a functional layer 206 arranged on a surface of the substrate 201. The functional layer 206, whose outer surface forms the face 203, comprises an insulating film with a low dielectric constant (hereinafter referred to simply as a "low-k" film) and an electrically conductive film. The low-k film comprises an inorganic film of SiOF, BSG (SiOB), or the like, or an organic film, also referred to as a polymer film, formed from a polyimide, parylene, or the like. The electrically conductive film is formed from an electrically conductive metal. The low-k film and the electrically conductive film are stacked to form the components 204. The electrically conductive film provides circuitry for the components 204.More precisely, components 204 comprise low-k films layered together and an electrically conductive film sandwiched between the low-k films. It should be noted that the functional layer 206 in the planned parting lines 202 comprises low-k layers, but does not contain an electrically conductive film except for a test element group (TEG). The test element group includes evaluation elements for identifying design and manufacturing problems that may occur in components 204.

[0022] According to the present embodiment, the protective element 210 is formed on the surface 203 of the workpiece 200. While the surface 203 of the workpiece 200 is held on a clamping table of a grinding device with the protective element 210 positioned between them, the grinding device grinds a rear side 207 of the workpiece 200, which is opposite the surface 203, thereby thinning the workpiece 200 to a predetermined finished thickness. After it has been thinned, the workpiece 200 is divided along the planned division lines 202 into individual component chips, each containing the respective components 204.

[0023] According to the present embodiment, as in Fig. As shown in Figure 3, the protective element 210 comprises a plastic film 211, a plastic layer 212, and a plastic foil 213 (which corresponds to a film) and thus includes two or more plastic layers. According to the present embodiment, the plastic film 211 is designed as a thin, flexible film made of a synthetic plastic (polyolefin (PO) in the present embodiment) and is configured as a foil. The plastic film 211 is applied in close contact with and to the surface 203 of the workpiece 200 and the surfaces of the protrusions 205.

[0024] According to the present embodiment, the plastic layer 212 is made of a liquid plastic 214 (see Fig. 1) formed, which can be cured by external excitation, and is attached to the plastic film 211. The liquid plastic 214, which will form the plastic layer 212, comprises an ultraviolet-curing liquid plastic that can be cured by ultraviolet radiation as the external excitation. According to the present invention, however, the liquid plastic 214 is not limited to such an ultraviolet-curing plastic and can be a liquid plastic that, for example, cures when heated. The liquid plastic 214 can, for example, be ResiFlat, manufactured by DISCO Corporation, or TEMPLOC, manufactured by Denka Company Limited.

[0025] The plastic film 213 is in the form of a thin, flexible film made of a synthetic plastic (polyolefin (PO) in the present embodiment) through which ultraviolet radiation can be transmitted. The plastic film 213 is layered on the plastic layer 212. The plastic layer 212 is formed when the liquid plastic located between the plastic film 211 and the plastic film 213 is cured by an external excitation applied to it. The combined thickness of the protective element 210 and the workpiece 200 remains uniform across the surface 203.

[0026] Additionally, according to the present embodiment, the protective element 210 on the workpiece 200 is formed by the training device 1 for a protective element in such a way that the workpiece 200 is held in a frame unit 215, which is in Fig. 4 and Fig. Figure 5 shows the following: It should be noted that the frame unit 215 includes the plastic film 211, which is shaped as an annular plate with a larger diameter than the workpiece 200 and is held in close contact with the surface 203 of the workpiece 200 and the surfaces of the protrusions 205 without any gap between them. The plastic film 211 has an outer circumferential edge section to which an annular frame 216 is attached.

[0027] As in Fig. As shown in Figure 1, the training device 1 according to the present embodiment includes an application table 10 for ultraviolet radiation, a plastic feed unit 20, a pressure unit 30, a light-blocking cover 40, a light-blocking closure 41, a feed unit 50, an ionization unit 60 and a control unit 100.

[0028] The application table 10 for ultraviolet radiation has a rectangular shape, the planar shape of which is larger than the planar shape of the frame unit 215. As in Fig. As shown in Figure 1, the application table 10 for ultraviolet radiation comprises a frame body 11, a support plate 12, and an ultraviolet radiation source 13. The frame body 11 includes a lower plate 111, which has a rectangular shape and a planar shape larger than that of the frame unit 215, and a frame section 112 projecting from an outer edge of the lower plate 111. The frame body 11 is made of a metal such as stainless steel, for example.

[0029] The carrier plate 12 has a rectangular shape, the planar shape of which is larger than that of the frame unit 215, and is attached to an inner side of the frame section 112 of the frame body 11. The carrier plate 12 is designed as a flat plate with a constant thickness. The carrier plate 12 has a top surface, which serves as a support surface 121, and is flat along the horizontal direction. The carrier plate 12 is made of a translucent material such as glass and allows ultraviolet radiation to be transmitted. The plastic film 213, which has a rectangular shape, the planar shape of which is larger than that of the frame unit 215, i.e., the workpiece 200, is placed on the support surface 121 of the carrier plate 12. The carrier plate 12 supports the plastic film 213 on the support surface 121.

[0030] The ultraviolet radiation source 13 is arranged above the lower plate 111 of the frame body 11 and below the support plate 12 in the ultraviolet radiation application table 10. The ultraviolet radiation source 13 includes an ultraviolet lamp for emitting ultraviolet radiation. The application table 10 for ultraviolet radiation has a plastic film 213 attached to the support surface 121 of the support plate 12, through which ultraviolet rays emitted by the ultraviolet radiation source 13, which is arranged in the application table 10 for ultraviolet radiation, are transmitted.

[0031] The plastic feed unit 20 supplies the liquid plastic 214 from the liquid plastic supply source (not shown) to the surface of the plastic film 213, which is positioned on the support surface 121. The plastic feed unit 20 includes a feed tube 21, used to supply the liquid plastic 214 from the liquid plastic supply source, and a nozzle 22, attached to a distal end of the feed tube 21, which has an outlet opening to expel the liquid plastic 214 onto the plastic film 213. The plastic feed unit 20 is movable between a plastic feed position and a retracted position by a movement mechanism (not shown). The plastic feed position is a position in which the nozzle 22 is vertically oriented towards a central area of ​​the support surface 121 of the ultraviolet radiation application table 10.The retracted position is a position in which the nozzle 22 is retracted from a space above the support surface 121 of the application table 10 for ultraviolet radiation. The plastic feed unit 20 feeds the liquid plastic 214 from the nozzle 22, which is positioned in the plastic feed position, onto the surface of the plastic film 213, which is supported on the support surface 121 of the application table 10 for ultraviolet radiation.

[0032] The pressure unit 30 presses the workpiece 200 from its rear side 207, which is opposite the surface side 203, towards the liquid plastic 214, which is fed to the surface of the plastic film 213 placed on the carrier surface 121. The pressure unit 30 includes a holding element 31, a lifting and lowering element 32 attached to the holding element 31, and a feed unit 33.

[0033] The holding element 31 has a lower surface 311 that lies flat along horizontal directions and has a rectangular shape, the planar shape of which is equal in size to the planar shape of the application table 10 for ultraviolet radiation. The holding element 31 is arranged above the application table 10 for ultraviolet radiation, with the lower surface 311 facing vertically towards the support surface 121. The holding element 31 has several suction holes formed within it. The suction holes are connected to a suction source (not shown) and are open on the lower surface 311. When the suction holes are evacuated by the suction source, the holding element 31 attracts the workpiece 200 by suction on the lower surface 311 and supports it.According to the present embodiment, the retaining element 31 attracts and supports the annular frame 216 of the frame unit 215 and the rear side 207 of the workpiece 200 by suction on the lower surface 311.

[0034] The lifting and lowering element 32 is fixed to an upper surface of the holding element 31. The feed unit 33 includes a known ball screw 34, an electric motor 35, and known guide rails. The ball screw 34 extends parallel to vertical directions, is rotatable about a central vertical axis, and is screwed into the lifting and lowering element 32 through an internally threaded hole. The electric motor 35 is connected to a device body (not shown) and is coupled to one end of the ball screw 34 to rotate the ball screw 34 about its central axis, thereby raising and lowering the holding element 31 along the vertical directions. The guide rails (not shown) are attached to the device body to guide the lifting and lowering element 32, which is movably supported on them, during movement along the vertical directions.

[0035] When the feed unit 33 rotates the ball screw 34 about its central axis, the pressure element 30 presses the workpiece 200, which is held under suction, against the lower surface 311 of the holding element 31 towards the liquid plastic 214, which has been fed to the plastic film 213, which is held on the application table 10 for ultraviolet radiation.

[0036] According to the present embodiment, the light-blocking cover 40 includes a light-blocking element having a C-shaped planar form, as shown in Fig. Figure 6 shows that the light-blocking cover 40 encloses the application table 10 for ultraviolet radiation, which is positioned within it, and covers a space 42 above the support surface 121. Therefore, the light-blocking element, as the light-blocking cover 40, covers the space 42 above the support surface 121 of the application table 10 for ultraviolet radiation. The light-blocking cover 40 is made of a light-blocking material (which is particularly suitable for limiting the transmission of ultraviolet radiation through it). It should be noted that the space 42 is also defined as a space within the light-blocking cover 40.

[0037] According to the present embodiment, as in Fig. As shown in Figure 1, the light-blocking cover 40 covers an area between the support surface 121 of the ultraviolet application table 10 and the lower surface 311 of the retaining element 31 of the printing unit 30, which is spaced apart from the ultraviolet application table 10. Furthermore, since the light-blocking cover 40 has a C-shaped planar form, it has an opening 43 (defined in a section of the cover), as shown in Figure 1. Fig. Figure 6 shows the opening 43. The opening 43 establishes a fluid connection between the outer and inner surfaces of the light-blocking cover 40.

[0038] The light-blocking shutter 41 is designed as a flat plate whose thickness is equal to the thickness of the light-blocking cover 40 and is made of a light-blocking material (particularly suitable for limiting the transmission of ultraviolet radiation through it). The light-blocking shutter 41 is movable between a closed position and an open position by a movement mechanism, which is not shown. The closed position is a position in which the light-blocking shutter 41 covers the opening 43, as shown in Fig. 8 shown, etc. The open position is a position in which the light-blocking shutter 41 closes the opening 43, as shown in Fig. 1 shown, etc. opens. The light-blocking shutter 41 selectively opens and closes the opening 43 of the light-blocking cover 40 when the light-blocking shutter 41 is moved between the open position and the closed position by the movement mechanism.

[0039] According to the present embodiment, the light-blocking shutter 41 is arranged parallel to a wall 401 of the light-blocking cover 40 that is furthest from the opening 43. The light-blocking shutter 41 is movable between the open and closed positions when it is pushed vertically by the movement mechanism. When in the open position, the light-blocking shutter 41 allows the feed unit 50 to enter the space 42 near the support surface 121 in the light-blocking cover 40.

[0040] The feed unit 50 acts as a film placement unit, which, while holding the plastic film 213, enters the space 42 near the carrier surface 121 and the light-blocking cover 40 through the opening 43 from outside the cover 40, and then places the plastic film 213 on the carrier surface 121. The feed unit 50 also acts as a removal unit, holding the plastic film 213, which is held by the workpiece 200, by the liquid plastic 214, cured by ultraviolet radiation supplied to it, and removes the plastic film 213 from the ultraviolet radiation application table 10 through the opening 43 in the light-blocking cover 40.

[0041] According to the present embodiment, the feed unit 50 includes several suction pads 51, a retaining element 52 that holds the suction pads 51, and a movement unit (not shown) that moves the retaining element 52 in vertical and horizontal directions. The suction pads 51 include non-contact Bernoulli pads, or the like, arranged at respective corners of the retaining element 52, and emit a pressurized gas to hold the plastic film 213 under negative gas pressure without contact. According to the present embodiment, the feed unit 50 includes a frame holder (not shown) that, under suction, holds the annular frame 216 of the frame unit 215, which is fixed to the plastic film 213.

[0042] The ionization unit 60 emits ionized air 61 (in Fig. 6 shown) to the support surface 121 of the application table 10 for ultraviolet radiation in order to neutralize the electrical charge of the support surface 121, thereby removing the static electricity from the support surface 121. According to the present embodiment, the ionization unit 60 is a bar-type device that includes an ionizer for expelling ionized air 61 to the upper surface of an end section 217 (see Figure 6). Fig. 6 or the like) of the plastic film 213 on the carrier surface 121, which is near the light-blocking closure 41, over the entire length of the end section 217 in the wide direction of the plastic film 213.

[0043] According to the present embodiment, the ionization unit 60 includes an exhaust opening for expelling ionized air 61, the exhaust opening extending parallel to the light-blocking shutter 41, which is positioned in the open position. The ionization unit 60 is arranged at a height equal to the vertical directions of the light-blocking shutter 41, which is positioned in the open position, and expels ionized air 61 to the upper surface of the end section 217 of the plastic film 213 on the support surface 121. The ionization unit 60 expels the ionized air 61 in a downward direction, inclined vertically increasingly into the space 42, in a lateral view.Therefore, a portion of the ionized air 61 emitted by the ionization unit 60 is oriented such that it presses the end section 217 of the plastic film 213 against the side of the support surface 121. It should be noted that the end section 217 of the plastic film 213 on the support surface 121 refers to an end region of the plastic film 213 that is near the light-blocking closure 41.

[0044] The control unit 100 controls various components of the training device 1 for a protective element in order to cause the training device 1 for a protective element to perform the training step for a protective element of training the protective element 210 on the surface 203 of the workpiece 200. The control unit 100 includes a computer which contains a processing element that has a microprocessor such as a central processing unit (CPU), a memory element that has memory such as read-only memory (ROM) or main memory (RAM), and an input / output interface element. The computer is capable of executing computer programs.

[0045] The processing unit of control unit 100 executes computer programs stored in ROM in its main memory to generate control signals for controlling the training device 1 for a protective element. The processing unit of control unit 100 outputs the generated control signals to the input / output interface of the components of training device 1 for a protective element.

[0046] Furthermore, the control unit 100 is connected to a display unit (not shown), such as a liquid crystal display unit, which shows the states and images of an operating operation, and to an input unit (not shown) used by the operator to enter operating condition information. The input unit includes at least one touch-sensitive panel integrated into the display unit, a keyboard, etc.

[0047] A training step for a protective element, which is carried out by the training device 1 for a protective element, which is designed as above, is described below with reference to the figures. Fig. Figure 7 schematically illustrates, in a side view and partially in cross-section, the manner in which the plastic feed unit of the training device for a protective element, which is in Fig. Figure 1 shows a liquid plastic being applied to the surface of a plastic film on a support surface. Fig. Figure 8 schematically illustrates, in a side view and partially in cross-section, the manner in which the pressure unit of the training device for a protective element, which is in Fig. As shown in 1, the workpiece is pressed against the liquid plastic. Fig. Figure 9 schematically illustrates, in a side view and partially in cross-section, the manner in which the ionization unit of the training device for a protective element, which is in Fig. Figure 1 shows the ionized air being expelled to one end of the plastic film at the carrier surface. Fig. Figure 10 schematically illustrates, in a side view and partially in cross-section, the manner in which the feed unit of the training device for a protective element, which is in Fig. As shown in Figure 1, the workpiece is removed by holding the plastic film against the carrier surface.

[0048] The training device 1 for a protective element, configured as described above, performs a training step for a protective element to train the protective element 210 when the control unit 100 controls the components of the training device 1 for a protective element. In the training step for a protective element, the pressure unit 30, on which the annular frame 216 of the frame unit 215 and the rear side 207 of the workpiece 200 are held by suction against the lower surface 311 of the holding element 31, is positioned at a distance from the support surface 121. The light-blocking closure 41 is positioned in the open position to open the opening 43, and the feed unit 50 feeds the plastic film 213, held by the suction pads 51, into the space 42.The plastic film 213 is placed on and supported by the carrier surface 121 of the carrier plate 12 of the application table 10 for ultraviolet radiation. At this point, the plastic film 213 has an outer circumferential section positioned on the upper surface of the frame section 112 of the frame body 111. The carrier surface 121 and the upper surface of the frame section 112 can together be referred to as a carrier surface for the plastic film 213. The nozzle 22 of the plastic feed unit 20 is placed in the plastic feed position and then, as shown in the figure, feeds the plastic film 213. Fig. Figure 7 shows a predetermined quantity of liquid plastic 214 being applied to the plastic film 213.

[0049] In the forming step for a protective element, the nozzle 22 of the plastic feed unit 20 is moved to the retracted position, and the light-blocking closure 41 is placed in the closed position to close the opening 43. The holding element of the pressure unit 30 is then lowered to draw the workpiece 200 against the holding element 31, to a position where the protective element 210 to be formed has a predetermined thickness. The surface 203 of the workpiece 200 is then brought into contact with the liquid plastic 214 on the plastic film 213, with the plastic film 211 inserted between them. As the workpiece 200 is lowered, the liquid plastic is distributed radially outward to an outer circumferential edge of the plastic film 213.When the workpiece 200 is lowered to reach the position where the protective element 210 to be formed has a predetermined thickness, as shown in . Fig. As shown in Figure 8, the liquid plastic is brought into close contact with the plastic sheet 213 and the plastic film 211 and covers the entire surface 203 of the workpiece 200 with the plastic film 211 inserted in between.

[0050] In the formation step for a protective element, the lowering of the holding element 31 is stopped at a position where the protective element 210 is formed with a predetermined thickness. Then, the ultraviolet radiation source 13 emits ultraviolet rays and transmits them through the carrier plate 12 and the plastic film 213 onto the liquid plastic 214 for a predetermined period. Upon exposure of the liquid plastic 214 to the ultraviolet rays, it cures to form the plastic layer 212, thereby forming the protective element 210 of the desired thickness on the surface 203 of the workpiece 200. The workpiece 200 is now bonded to the plastic film 213 by the cured liquid plastic 214, i.e., the plastic layer 212 and the plastic film 211. The holding element 31 then completes the holding of the frame unit 214 under suction.The application table 10 for ultraviolet radiation now carries the workpiece 200 on the carrier surface 121 of the carrier plate 12, through which the ultraviolet rays from the ultraviolet radiation source 13 are transmitted in the frame body 11.

[0051] In the training step for a protective element, the retaining element 31 of the pressure unit 30 is lifted and the light-blocking shutter 41 is placed in the open position to open the opening 43. Then, as in Fig. As shown in Figure 9, the ionization unit 60 expels ionized air 61 into the opening 53. Even if a gas flows through the opening 43 into the space 42 when the light-blocking shutter 41 opens the opening 53, the ionized air 61 expelled by the ionization unit 60 presses the end section of the plastic film 213 against the upper surface of the frame section 112, thereby pressing the end section 217 of the plastic film 213 against the upper surface of the frame section 112. Furthermore, even if the support surface 121 of the carrier plate 12 has been electrically charged, the expelled ionized air 61 neutralizes the electronic charge of the support surface 121, thereby removing the electrostatic charge from the support surface 121.

[0052] In the training step for a protective element, the feed unit 50 is inserted through the opening 43 into the space 42 of the light-blocking cover 40, and the suction pads 51 of the feed unit 50 hold the plastic film 213 to the carrier surface 121 under suction. As in Fig.As shown in Figure 10, in the training step for a protective film, the feed unit 50, whose suction pads 51 have held the protective film 213 to the carrier surface 121 under suction, is raised into the space 42 in the light-blocking cover 40 in order to lift the plastic film 213 from the carrier surface 121. The ionized air, which is expelled by the ionization unit 60, is introduced along the carrier surface 121 into the gap between the plastic film 213 and the carrier surface 121, and electrical charges on the carrier surface 121 are neutralized in their entirety, thereby removing the electrostatic charge from the carrier surface 121. In this way, at the time when the plastic film 213 is removed from the carrier surface 121 by the feed unit 50, the ionized air is introduced along the carrier surface 121 into the gap between the plastic film 213 and the carrier surface 121.

[0053] In the training step for a protective element, the feed unit 50 is then inserted through the opening 43 from the chamber 42 into the light-blocking cover 40 in order to remove the workpiece 200 with the protective element 210 attached to it from the light-blocking cover 40. The training step for a protective element is now complete. It should be noted that the workpiece 200, which has been removed from the light-blocking cover 40, is processed in a cutting step in which the plastic film 211, the plastic layer 212 and the plastic foil 213, i.e., the protective element 210, are cut off along an outer edge of the workpiece 200.

[0054] The forming device 1 for a protective element according to the present embodiment is advantageous in that, when the plastic film 213 is spaced away from the support surface 121 by the feed unit 50, the ionized air is introduced into the gap between the plastic film 213 and the support surface 121, thus rendering the support surface 121 electrically neutral. This allows the workpiece 200 with the protective element 210 attached to it to be easily removed. As a result, the forming device 1 for a protective element is suitable for reducing the difficulty of removing the workpiece 200 with the protective element 210 attached to the surface 203.

[0055] Furthermore, the training device 1 for a protective element includes the light-blocking cover 40 and the light-blocking closure 41 for blocking the ultraviolet rays emitted by the ultraviolet radiation application table 10. To prevent a gas flowing into the light-blocking cover 40 from causing the end section 217 of the plastic film 213 to flutter when the light-blocking closure 41 opens the opening 43, and to prevent the feed unit 50 from lifting the plastic film 213, ionized air 61 is applied to the upper surface of the end section 217 of the plastic film 213 near the light-blocking closure 41, thereby keeping the end section 217 in contact with the frame section 112.In the case where the training device 1 for a protective element includes a fan filter unit (FFU) that supplies filtered clean air outside the light-blocking closure 41, it is likely to generate an airflow that flows into the light-blocking cover 40 at the time the light-blocking closure 41 opens the opening 43, causing an end section 217 of the plastic film 213 to flutter. However, according to the present embodiment, because the air ionization unit 60 supplies ionized air 61 to the upper surface of the end section 217 of the plastic film 213 near the light-blocking closure 41, the end section 217 is prevented from fluttering.

Claims

[1] Training device (1) for a protective element (210) which forms a protective element (210) on a surface (203) of a plate-shaped workpiece (200), wherein the training device for a protective element (210) comprises: an application table (10) for ultraviolet radiation, which supports the workpiece (200) on a support surface (121) of a support plate (12) of the application table (10) for ultraviolet radiation, wherein the support plate (12) is designed such that ultraviolet radiation from an ultraviolet radiation source (13) arranged in the application table (10) for ultraviolet radiation can be transmitted through the support plate (12); a film placement unit (50) which places a film (213) on the carrier surface (121) which is larger than the workpiece (200) and through which the ultraviolet radiation can be transmitted; a plastic supply unit (20) that supplies an ultraviolet curable liquid plastic (214) to the film (213) which is placed on the carrier surface (121); a pressure unit that presses the workpiece (200) from another surface of the workpiece (200) towards the liquid plastic (214) that has been supplied to the film (213) which is placed on the carrier surface (121); a removal unit that holds the film to which the workpiece (200) with the liquid plastic cured by the ultraviolet rays, which is located between the film and the workpiece (200), is fixed, and removes the workpiece (200) from the application table (10) for ultraviolet radiation; and an ionization unit (60) that emits ionized air to the carrier surface (121) of the application table (10) for ultraviolet radiation, wherein, when the film (213) is spaced away from the support surface (121) by the extraction unit, the ionized air (61) ejected by the ionization unit (60) is introduced along the support surface (121) into a gap between the film and the support surface (121). [2] Training device (1) for a protective element (210) according to claim 1, further comprising a light-blocking cover (40) comprising a light-blocking element that covers a space above the support surface (121) of the application table (10) for ultraviolet radiation; and a light-blocking shutter (41) that opens and closes a section of the light-blocking cover (40) to allow the extraction unit (50) to enter the space, wherein, when the light-blocking shutter (41) opens the section of the light-blocking cover (40), a portion of the ionized air (61) ejected by the ionization unit (60) is applied in such an orientation that it presses an end region of the film near the light-blocking shutter (41) against the substrate surface (121).

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