Device for forming a hot process gas stream

Abstract

In the device, a process gas flows through a housing (2) at a predeterminable volume flow from an inlet (5) to an outlet (6). Arranged inside the housing (2) is at least one heating element (1) formed from a material that can be heated by means of electrical induction, the material being a carbide formed from a transition metal from groups 4, 5, and 6 of the Periodic Table of Elements and / or a nitride formed from a transition metal from group 4 and / or a silicide formed from a transition metal from groups 4, 5, and 6, in particular an intermetallic compound of molybdenum and silicon and / or molybdenum, silicon, and tungsten and / or further additives and / or a compound of silicon and carbon and / or further additives, and on which at least one flow channel (11) is present.The housing (2) is enclosed by at least one electrical coil (3) and the at least one electrical coil (3) is connected to an electrical voltage source.

Description

[0001] The invention relates to a device for generating a hot process gas stream, which provides a hot gas flare for heating products and for use in production processes. It can be used, for example, for melting metal or glass, for heat treatment of various components or materials, and for preheating tools and equipment.

[0002] The core of the invention lies in the inductive heating of a heater, the transfer of heat to the surrounding process gas, and the use of this hot process gas. In this respect, the invention serves as a potential decarbonized replacement for a gas burner.

[0003] The invention enables the provision of thermal energy and sufficient heating of a process gas up to very high temperatures using electrical energy alone, and also replaces conventional gas burners. It thus contributes to the decarbonization of heating systems. The device is particularly suitable for use in metallurgical processes. However, it can also be used in many other applications. Metallurgical processes preferably include the melting and holding of metals or glass, the heating of heat treatment furnaces, and the thermal treatment of any material, including bulk materials.

[0004] Hot gas generators based on electrical resistance heating (hot air guns - hot air cannons) are also commonly used on the market, but their performance is currently limited to gas temperatures of approximately 1000 °C and to power outputs of approximately 100 kW.

[0005] These performance limits can be significantly extended to temperatures of over 1000 °C and power levels in the MW range by using inductive energy input.

[0006] Burners are also in use, where the desired heat is achieved by oxidizing a fuel. These use a variety of hydrocarbon compounds as fuel, which release CO2 during oxidation.

[0007] When operating inductively heated devices that heat fluids to higher temperatures, thermally induced mechanical stresses can occur. The large temperature differences between the inlet and outlet sides have a detrimental effect on the fluid in question.

[0008] It is therefore an object of the invention to provide possibilities for heating a process gas stream in which temperatures of at least 1000 °C are reached and no CO2 is released, an efficiency of at least 30% can be achieved and the process gas is heated as homogeneously as possible in a heating device.

[0009] According to the invention, this object is achieved with a device having the features of claim 1. Advantageous embodiments and further developments of the invention can be realized with features defined in the appended claims.

[0010] In the device according to the invention, a process gas flows through a preferably hollow-cylindrical housing made of a refractory material with a predeterminable volume flow from an inlet to an outlet to form a hot process gas stream. After the outlet, a flare of the hot process gas forms. Arranged inside the housing is at least one heating element made of a material that can be heated by electrical induction and on which at least one flow channel is present through which the process gas flows. By means of a material, it should be understood that the material of the heating element contains at least 90 mass% of a material that can be heated by electrical induction.

[0011] The internally hollow housing is enclosed by at least one preferably non-linearly wound electrical coil, in which the number of turns is reduced over the length of the electrical coil, starting from the inlet towards the outlet.

[0012] The at least one electrical coil is connected to an electrical voltage source with which alternating voltage or a pulsed direct voltage is applied to the electrical coil.

[0013] The number of turns of the electrical coil should be selected such that in the first third of the length of at least one heating element, starting from the inlet for the process gas, at least 25% more power can be inductively coupled into the heating element than in the area of ​​the outlet for the process gas. For this purpose, in the area of ​​the electrical coil arranged directly or close to the inlet for the process gas, there can be at least 20%, preferably greater than 30% more turns per length of the electrical coil than in the area of ​​the outlet and areas close to the outlet. At least 20%, preferably greater than 30% more turns should be present over at least 30% of the length of the respective electrical coil, starting from the inlet.If there is more than one electrical coil, at least the electrical coil that surrounds the radiator in the inlet area should have at least 20%, preferably more than 30%, more turns than at least one electrical coil arranged downstream in the flow direction.

[0014] In addition to changing the winding density of the coil, this effect can also be achieved by changing the cross-section or profile of the coil, or by changing the orientation of the coil profile. For example, an electrical coil can also have windings that are not rotationally symmetrical, but rather windings with a polygonal cross-section. An electrical coil can also have different edge lengths, so that each electrical coil, for example, has a different height and width on its sides.

[0015] Alone or in addition, at least two electrical coils can be arranged one after the other on the outside of the housing in the direction of flow of the process gas, each connected to an electrical voltage source with which alternating voltage or a pulsed direct voltage is applied to the electrical coil. The first electrical coil, arranged in the inlet region, is operated with a higher electrical power than at least one further electrical coil arranged downstream of the first electrical coil in the direction of flow of the process gas. Here, too, at least 25% more power should be able to be coupled into the heater in the inlet region than in the outlet region.

[0016] The introduction of more energy into the inlet side of the heater than into the outlet side is advantageous because here the colder incoming process gas has a greater cooling effect on the at least one heater than at the outlet where the heated process gas has reached the operating temperature. In order to keep the temperature of the at least one heater at least almost homogeneous despite the cooling effect of the warming process gas decreasing over the length, a different energy supply and thus different inductive heating of the body over the length is advantageous. This allows the entire length of the heater to be fully utilized and the operating temperature to be reached more quickly, and temperature-related mechanical stresses in the heater can be reduced or even completely avoided.

[0017] The process gas flows along the inner wall of the housing and the surface of at least one heating element to heat it. The process gas can flow both around and through the at least one heating element, thereby heating the process gas along the flow path from inlet to outlet.

[0018] The housing and the at least one heating element should each be made of a material whose melting point is greater than the maximum temperature of the heated process gas. The device is intended to transfer the thermal energy inductively introduced into the at least one heating element to a process gas.

[0019] The at least one heating element should be formed from a high-temperature-resistant and electrically conductive material which advantageously has a high specific electrical resistance and a passivating oxide layer on the surface.

[0020] The at least one heating element can also be formed from a carbide with a transition metal from group 4, 5 and 6 of the Periodic Table of Elements and / or from a nitride which is formed with a transition metal from group 4, and / or a silicide which is formed with a transition metal from group 4, 5 and 6 - in particular an intermetallic compound of molybdenum and silicon, and / or molybdenum, silicon and tungsten and / or further additives and / or a compound of silicon and carbon and / or further additives and / or from zirconium and / or its alloys and / or a nickel-based alloy and / or an alloy with the main component of a refractory metal - in particular tantalum, tungsten, niobium or molybdenum and further alloying elements, in particular chromium and / or titanium and / or aluminum and / or hafnium and / or rhenium.A base alloy contains the metals named as the base metal in a concentration of at least 50% by mass.

[0021] For example, molybdenum, silicon, and / or tungsten, and especially molybdenum and silicon, may contain such additives. These can include, in particular, 1% to 2% aluminum by mass and < 1% by volume of other elements.

[0022] On surfaces of a heater that come into contact with process gas, a material-specific passivating oxide layer and / or another oxidation-resistant layer can advantageously be formed. In addition to oxide layers, nitride layers or carbonitrided layers, for example, can be formed.

[0023] A protective layer can be formed on the surface of the at least one heating element outside the device prior to use. This can be achieved by treating the at least one heating element in an oxygen-containing atmosphere, or even better, in an oxygen-containing atmosphere heated to several hundred degrees, or by treating it in a corrosive solution. A protective layer on the surface of the at least one heating element should be continuous and cover all surfaces that come into contact with the process gas. This particularly applies to internal or external flow channels.

[0024] The protective oxide layer on the surfaces of the at least one heating element can be formed outside the device prior to use or during commissioning of the heating element in the device. This can be achieved by treating the at least one heating element in an oxygen-containing atmosphere, better still in an oxygen-containing atmosphere heated to several hundred degrees, or by treating it in a corrosive solution, or by targeted electrical heating. The oxide layer on the surfaces of the at least one heating element should be continuous and cover all surfaces that are in contact with the process gas. This particularly applies to internal or external flow channels and the outer surface.

[0025] For heating purposes, the process gas can flow along the inner wall of the housing and the outer surface of the heating element and / or through at least one flow channel of the at least one heating element.

[0026] The number of turns of the at least one electrical coil can be continuously reduced over the length of the at least one electrical coil in the flow direction of the process gas.

[0027] Controlled inductive heating of the heater and the process gas can also be achieved by at least two electrical coils with different numbers of turns along their length, whereby the first electrical coil arranged in the inlet region has a greater number of turns than an electrical coil arranged downstream in the flow direction of the process gas or in the outlet region. In addition, the first electrical coil can be operated with a higher power than other electrical coils arranged downstream in the flow direction of the process gas through the heater.

[0028] Through controlled inductive heating of the heater, the incoming process gas can be heated at a higher heating rate near the inlet and thereafter, while the heating rate decreases toward the outlet. This prevents large temperature differences between the inlet and outlet areas of the process gas on at least one heater.

[0029] If only one non-linear electrical coil is used in the device according to the invention, at least one additional electrical power supply for additional electrical coils can be dispensed with. If at least two equally linear electrical coils are used, this has the advantage of being able to use standardized coils.

[0030] The at least one heating element can be formed from a nickel-based alloy and / or zirconium and / or its alloys and / or a refractory metal-based alloy—in particular a tantalum-, tungsten-, niobium-, or molybdenum-based alloy. The respective metal or alloy comprises a minimum proportion of 95% by mass of the heating element material.

[0031] The at least one heating element can be formed from a carbide formed with a transition metal from group 4, 5, and 6 of the Periodic Table of Elements and / or a nitride formed with a transition metal from group 4 and / or a silicide formed with a transition metal from group 4, 5, and 6 - in particular an intermetallic compound of molybdenum and silicon and / or molybdenum, silicon, and tungsten and / or further additives and / or a compound of silicon and carbon and / or further additives and / or from zirconium and / or its alloys and / or a nickel-based alloy and / or a refractory metal-based alloy - in particular a tantalum-, tungsten-, niobium-, or molybdenum-based alloy. The respective chemical compound, or the metal, or the alloy has a minimum proportion of 95% by mass of the heating element material.

[0032] One or more heating elements can be arranged inside the housing as a bundle with at least three, preferably more than four, flow channels or as a composite body. Flow channels can preferably be tubular or hollow-cylindrical.

[0033] Several heating elements can also be arranged in a layered, contactless and electrically insulated arrangement with at least three, preferably more than four elements, such as tubes, inside the housing. The flow channels through which the flow passes and, if appropriate, the outer surface around which the flow passes, can preferably be tubular.

[0034] The at least one heating element can be designed in the form of a straight tube bundle with at least three, preferably more than four flow channels, in which the individual flow channels are electrically insulated from one another and the spaces between the individual flow channels are filled with electrically non-conductive material, and in which the process gas to be heated flows around the outer surface of the bundle and through the inner flow channels.

[0035] A heating element can also be designed in the form of a bundle of at least three, preferably more than four flow channels rotated as a helix, in which the individual flow channels are electrically insulated from one another, and the spaces between the individual flow channels are filled with electrically non-conductive material, and in which the process gas to be heated flows around the outer surface of the bundle and through the inner flow channels.

[0036] A radiator can also be in the form of a cylinder which is traversed by at least three, preferably more than four internal flow channels whose diameter is greater than 2 mm and the flow channels are designed to run in a straight line.

[0037] A radiator can also be in the form of a cylinder which is traversed by at least three, preferably more than four internal flow channels whose diameter is greater than 2 mm and the flow channels are designed to run in a straight line.

[0038] It is also possible to have a radiator in the form of a cylinder which is traversed by at least three, preferably more than four internal flow channels whose diameter is greater than 2 mm and which rotate as a helix or are designed as turns.

[0039] Alternatively, a radiator can be designed in the form of several assembled discs which are traversed by at least three, preferably more than four, internal flow channels which have a minimum diameter of 2 mm and which can run at a right angle or at an angle to the end face.

[0040] The at least one heating element can also be designed in the form of an arrangement of at least three, preferably more than four straight tubes, each with a flow channel, which is layered within the housing by an electrically non-conductive, preferably ceramic structure, in which the individual tubes are electrically insulated from one another and without contact, and the spaces between the individual tubes are filled with electrically non-conductive material, and in which the process gas to be heated flows around the free outer surface of the tubes and through the inner flow channel. Individual tubes of the arrangement can have other media flowing through them that differ from the process gas. The media can be in any state of matter.The electrically non-conductive, preferably ceramic, structure does not have to be present over the entire length of the radiator arrangement; it is advantageous to have as few structural elements as possible over the length, for example 5 structures per meter of length.

[0041] The diameter of a single inner flow channel should be greater than 2 mm. The contactless layered arrangement of the radiator, consisting of at least three, preferably more than four, tubes, can almost completely fill the cross-sectional area of ​​the first inner casing.

[0042] If flow channels are not designed in a straight line, but for example in the form of a helix, the length of the inner flow channels of at least one heating element can be increased by the windings, which can be advantageously used for the heat transfer to the process gas and makes it possible to reduce the length of the heating element accordingly.

[0043] A housing can be made of quartz glass, Al2O3, ZrO2 or MgO or a chemical compound and / or a mixture of these materials.

[0044] A fireproof closure element can be arranged at the process gas inlet to prevent backflow of heated process gas. This is particularly advantageous when the process gas is routed through several housings, as explained below, which are arranged one inside the other and enclose at least one heating element. This reduces energy and, in particular, heat losses, and ensures that the process gas enters exclusively through the appropriately dimensioned inlet.

[0045] The housing in which the heating element is arranged can be enclosed by a second and / or a third housing, so that process gas flows through a gap between the first housing and the second housing and / or through a gap between the second housing and the third housing in countercurrent or cocurrent to the process gas flow to preheat the process gas.

[0046] A second housing and / or a third housing can be provided on their surfaces facing the heating element with a reflective surface coating made of titanium nitride, or aluminum chromium nitride, or titanium aluminum nitride, or another coating reflecting electromagnetic radiation in the wavelength range of infrared light, which does not serve, or serves only to a very small extent, for inductive heating.

[0047] For this purpose, a second or third housing can be assembled from at least two parts, for example half shells, which can facilitate the formation of a reflective surface coating on the inner surfaces facing the radiator.

[0048] The temperature of the process gas exiting the outlet can be controlled by adjusting the process gas volume flow and / or the electrical power with which the at least one electrical coil is operated.

[0049] The geometry of the at least one heating element and / or the inlet can be designed geometrically and / or by means of additional equipment in such a way that the heat transfer between the at least one heating element and the process gas can be maximized, in particular by turbulence in the process gas flow. For this purpose, surfaces on the heating element that are subject to and / or flow around the process gas can be provided with contour elements.

[0050] The outlet can be designed geometrically and / or by means of a device such that the flow of the hot process gas exiting the device is modified in such a way that the heat transfer to any solid and / or melt and / or liquid and / or gas and / or plasma located in the exiting process gas stream is maximized. This can be achieved by a design with at least one nozzle-shaped outlet opening.

[0051] The outlet can be designed geometrically and / or by an apparatus in such a way that the average flow velocity of the process gas and / or the geometry of the process gas flow can be modified, in particular by means of a correspondingly geometrically designed nozzle.

[0052] Due to the windings of the tubes, the length of the inner flow channels of at least one heater can be increased, which can be advantageously used for heat transfer to the process gas.

[0053] A radiator can be designed in the form of at least one cylinder traversed by at least three, preferably more than four, internal flow channels. The internal flow channels can be straight or, to increase their length, rotated as a helix, or formed as a coil.

[0054] The diameter of a single internal flow channel should be greater than 2 mm.

[0055] A radiator can be designed in the form of at least two assembled discs traversed by at least three, preferably more than four, flow channels. The flow channels can be straight or angled to the face of the disc. The diameter of a single inner flow channel should be greater than 2 mm.

[0056] The ratio of the area of ​​the cross section of the inner flow channels of the at least one radiator to the area of ​​the annular gap present between the outer surface of the at least one radiator and the inner wall of the first housing should be between 1:2 and 4:1.

[0057] At least one heating element and the flow channels should be tubular. The element(s) could also have other geometries of their internal free cross-sectional areas and / or their surfaces. However, the tubular shape offers advantages in terms of flow and due to the relatively large surface area, which contributes to heating the process gas.

[0058] It is also possible to use the aforementioned heater geometries with additional contour elements (elevations, depressions) to increase the total surface area of ​​at least one heater. These can also achieve a beneficial turbulence in the process gas flow.

[0059] The process gas can be air, but also any other gas or gas mixture that may be beneficial for the respective heating process. This particularly includes inert gases that can prevent any influence on the elements, materials, and objects to be heated.

[0060] In the invention, the temperature of the process gas exiting the outlet can be controlled by adjusting the process gas volume flow and / or the electrical power with which the at least one electrical coil is operated. For this purpose, the temperature of the process gas at the outlet can be determined, thus establishing a control loop.

[0061] The amount of heat transferred is determined by the surface area of ​​the at least one heating element around which the process gas flows, the surface area of ​​the internal flow channels, the number and length of the at least one heating element and the internal flow channels, as well as the temperature of the at least one heating element. The heat transfer from the heating element(s) to the flowing process gas is crucial for efficiency.

[0062] The heat output of the device can be controlled via the electrical power supplied, the quantity and pressure of the process gas flowing into the device, and the flow temperature of the process gas entering the device. Additionally, as already mentioned, process gas can be preheated in or upstream of the device. External preheating of the process gas upstream of the device can be achieved, for example, using a resistance-heated device. However, it is also possible to recirculate process gas into the device using the heat it contains. For this purpose, the slightly cooled process gas already used for heating can be sucked in from the heating zone after use and returned to the inlet of the device.

[0063] The process gas supply to the device can be achieved with a compressor system for multiple devices or with a compressor associated with the device according to the invention, which is preferably controllable or regulatable. Furthermore, a flow condition particularly favorable for heat transfer from the at least one heating element to the process gas can be set in the process gas supply.

[0064] The geometry of the at least one heating element and / or the inlet for the process gas to be heated into the device can be designed geometrically and / or by means of an apparatus in such a way that the heat transfer between the at least one heating element and the process gas flow is maximized. This can be achieved in particular by turbulence in the process gas flow. Contour elements that extend the path of the process gas along a surface of the at least one heating element used for heating and / or lead to turbulence can also be used for this purpose.

[0065] The device may include an additional housing made of a fireproof material that externally encloses the electrical coil(s). This additional housing can serve as protection against the high temperatures.

[0066] The process gas outlet from the device can also be optimized for specific applications. The outlet can be designed geometrically and / or by means of a movable device to modify the flow of the process gas in such a way that the heat transfer to any solid, melt, liquid, gas, and / or plasma located in the exiting process gas stream can be maximized.

[0067] Furthermore, the outlet for hot process gas can be configured with an appropriate geometric design or device to modify the velocity and / or shape of the process gas flow or the process gas flare. This can be achieved, for example, by means of at least one appropriately geometrically designed nozzle that can influence the cross-section, flow velocity, and / or direction of the hot process gas flow exiting the device.

[0068] The selection of at least one electrical coil (construction, electrical conductivity, and number of turns) as well as the frequency of the electrical voltage at which it is operated can be optimized by considering the geometry and material of the radiator(s). For the optimal frequency for heating the at least one radiator, a ratio of three to five of the total diameter of the radiator to the current penetration depth δ can be assumed (d / δ = 3-5). The frequency and the electromagnetic properties of the material of the radiator(s) are incorporated into the formula for the current penetration depth [according to Fasholz 1984] as follows: δ=503×ρμr×f δ [mm] = current penetration depth ρ[Ω mm2m]=specific electrical resistance µ r = relative permeability f [Hz] = frequency

[0069] The above formula describes the current penetration depth. This number indicates the thickness up to which 86% of the induced energy is converted into heat. The remaining 14% is absorbed by deeper layers. Due to this fact, there is an optimized relationship between the total diameter of the heater and the current penetration depth for inductive heating. In addition to the frequency, this formula also takes into account the temperature-dependent material properties of the body to be heated, such as the specific electrical resistance and the relative permeability. To achieve better heat transfer to the flowing fluid to be heated, it is possible to deviate from the optimal frequency for heating at least one heater to a certain extent.

[0070] Compared to other electrical heating systems, the performance limits of the invention can be extended to applications at temperatures above 1000 °C and power outputs in the MW range.

[0071] The invention will be explained in more detail below by way of example.

[0072] Showing: Fig. 1 an example of a device according to the invention with a non-linear electrical coil and a cylindrical heating element with a surface structure Fig. 2 a second example with two different electrical coils and a cylindrical heater and a possibility for preheating process gas Fig. 3 an example of a radiator made of a tube bundle Fig. 4 an example of a radiator made of a twisted tube bundle Fig. 5 an example of a radiator made of a cylinder with internal flow channels Fig. 6 an example of a radiator consisting of a cylinder with internal flow channels that are rotated. Fig. 7 an example of a radiator made up of several assembled discs with internal flow channels Fig. 8 an example of a non-linear wound electrical coil Fig. 9 an example of two electrical coils with different power Fig. 10 an example of a radiator variant consisting of a contactless layered arrangement of tubes in a square profile as a housing and Fig. 11 an example of a radiator variant consisting of a contactless layered arrangement of tubes in a round tube as a housing

[0073] In the Fig. In the example shown in Figure 1, process gas flows into an inlet 5 from a compressor (not shown) of the device. Along the outer surface, which has an exemplary spiral-shaped structure, and through the internal flow channels of the at least one heating element 1, the process gas flows through a housing 2 made of refractory material toward the outlet 6 of the device, where it can be used for subsequent further heating downstream of the outlet 6, utilizing the high temperature of the heating element 1. A structure on the surfaces over which the process gas flows can be advantageous for heat transfer compared to a smooth surface.

[0074] The housing 2 is made of ceramic, e.g. Al2O3 or ZrO2, and is enclosed by at least one electrical coil 3, so that the at least one heating element 1 arranged in its interior can be heated by electrical induction. In this case, the electrical coil 3 is designed to be non-linear in order to introduce a different amount of energy into the at least one heating element 1 over its length. In the area of ​​the inlet side of the at least one heating element 1, more energy is introduced inductively than in the area of ​​the outlet side. The heating element 1 has, on its surfaces which come into contact with the process gas, a durable, passivating oxide layer formed prior to use and, in this case, is formed, for example, from a nickel-based alloy or from zirconium or a zirconium alloy or an alloy with a refractory metal as the base element - in particular a tantalum-, tungsten-, niobium-, or molybdenum-based alloy.A base alloy contains at least 50% by mass of the aforementioned metals. These materials can also be used in the examples described below. In a non-linear electrical coil, the number of turns of the electrical coil 3 varies along its length. In the invention, the number of turns of the electrical coil 3 is greater in the region of the heater 1 closest to the inlet 5 for the process gas than in regions of the electrical coil 3 further downstream toward the outlet 6.

[0075] The at least one electrical coil 3 is connected to an electrical voltage source (not shown), whose power and frequency can be controlled or regulated, preferably depending on the desired final temperature of the process gas after the outlet 6. The frequency of the electrical voltage should be matched to the geometry and material of the heater 1.

[0076] A fireproof closure element 4 is arranged at the inlet 5 to prevent backflow of heated process gas.

[0077] The Fig. The example shown in Figure 2 shows a device that enables preheating of the process gas while simultaneously providing additional thermal insulation. In this example, two electrical coils with different winding densities and different power ratings are used. The first electrical coil 3a, located close to the inlet 5, has a higher winding density and is operated with a higher electrical power than a second electrical coil 3b or another electrical coil located closer toward the outlet 6.

[0078] After passing through the inlet 5, the process gas flows for preheating and insulating the electrical coils 3a and 3b, first in the gap between the second housing 7 and the third housing 8, then in the opposite direction in the gap between the second housing 7 and the first housing 2. From the aforementioned gap, the process gas now flows into the space between the surface of the heating element 1, which in the example is a cylindrical body, and the first housing 2, as well as through the internal flow channels of the heating element 1. Heating to the desired process temperature of the process gas takes place at these surfaces. The process gas reaches the outlet 6 through the intermediate space and the flow channels 11. In this example, the electrical coils 3a and 3b are enclosed by a ceramic housing 9. Such a housing 9 can in principle be present in the invention and thus also in the other examples.

[0079] In the devices already shown, different types of inductively heated heaters 1 can be used to heat a process gas. Fig. The example shown in Figure 3 has an exemplary heater 1. Several straight tubes as flow channels 11 are combined in a bundle and can be heated by electrical induction. Process gas flows over the outer surface 10 of the bundle, which forms the heater 1, and through the inner flow channels 11.

[0080] Another example is the Fig. 4 shows the heater 1. In the heater 1, several tubes are bundled as flow channels 11 and additionally rotated in a helix. The process gas flows along the outer surface 10 of the bundle and through the tubes to be heated. The extended path of the inner flow channels 11 and the turbulence generated by the windings enable improved heat transfer from the heater 1 to the process gas.

[0081] The Fig. The example shown in Figure 5 has a heater 1 designed as a cylinder. The cylinder is traversed by several internal, straight-line flow channels 11. In addition to the outer surface 10, the internal surfaces of the flow channels 11 also represent a surface on which the process gas is heated. In comparison to the first two heater examples, the heater 1 consists of Fig. 5 only from one body which is advantageous for the heat conduction in the radiator 1.

[0082] The example according to Fig. 6 also depicts a cylindrical heater 1, the outer surface 10 of which is surrounded by the process gas. The internal flow channels 11 in this example are configured as a helix or coils. The extended flow path and the turbulence generated by the coils allow for improved heat transfer from the heater 1 to the process gas. This type of heater 1 can be manufactured, for example, by casting or additive manufacturing.

[0083] Another example of a cylindrical radiator 1 is shown in Fig. 7 depicts several assembled discs traversed by straight or angled holes serving as flow channels. The assembled discs, with the internal flow channels 11 used for heat transfer and the outer surface 10, form a cylinder whose overall length can be extended as desired by adding additional discs.

[0084] An example of a non-linear wound electrical coil 3 is shown in Fig. 8. The electrical coil 3 has a greater winding density (number of turns per length of the electrical coil) in the area at the inlet 5 than in the area at the outlet 6. The amount of induced energy can be controlled by compressing and stretching the windings of the electrical coil 3. The number of turns per length is greater in the area of ​​the inlet 5 than in the direction of the outlet 6. This enables greater heating of the at least one heating element 1 located inside the housing 2 in the areas where the cooling effect of the heated process gas is greater.

[0085] Another example of a possible coil arrangement for homogeneous heating of the at least one heating element 1 is shown in Fig. 9 is shown as a combination of two electrical coils 3a and 3b. In this example, a higher power is applied to the first electrical coil 3a than to the second electrical coil 3b. As a result, the at least one heating element 1 arranged in the housing 2 is heated homogeneously despite the varying cooling effect of the process gas flowing from the inlet 5 to the outlet 6.

[0086] The Fig. The example shown in Figure 10 for a plurality of heating elements 1 in a housing 2 is designed as a contactless layered arrangement of straight tubes. In the heating elements 1, a plurality of tubes, each with a flow channel 11 and a jacket surface 10, are layered without contact to one another and arranged in a defined manner separated from one another by an electrically non-conductive structure 12. The process gas flows through the flow channels 11 for heating and along the jacket surface 10 without contact with contact points of the structure 12 for the defined arrangement. For optimized utilization of the cross-section, a rounded square tube can be used as the surrounding housing 2. The structure 12 serves for electrical insulation as well as the defined arrangement of the individual tubes and, in the example shown, is represented as a grid-like structure made up of perpendicularly connected insulation elements, the electrically non-conductive structure.

[0087] Another example is the Fig. 11. A plurality of heaters 1 are arranged as straight tubes in a tubular housing 2, without contact with one another, through an electrically non-conductive structure 12. The process gas flows through the flow channels 11 for heating and along the outer surface 10 without contact with the electrically non-conductive structure 12. In the example shown, the structure 12 for the defined arrangement of the heaters 1 in the housing is a uniform stacking of elements with a hexagonal cross-section; however, other arrangements with polygons in various housing geometries are also possible. In a form not shown, the flow channels 11 can also have polygonal cross-sections.

[0088] In tests, with an effective power of approximately 9 kW used for inductive heating, a heating of a non-preheated process gas to a temperature of over 1100 °C was achieved.

[0089] In the figures, identical elements are identified by the same reference numerals.

Claims

[1] Device for forming a hot process gas flow, in which a process gas flows through a housing (2) made of a refractory material with a predeterminable volume flow from an inlet (5) to an outlet (6) and in the interior of the housing (2) at least one heating element (1) which is formed from material which can be heated by means of electrical induction, wherein the material a carbide formed with a transition metal from group 4, 5 and 6 of the Periodic Table of Elements and / or a nitride with a transition metal from group 4 and / or a silicide with a transition metal from group 4, 5 and 6, in particular an intermetallic compound of molybdenum and silicon and / or molybdenum, silicon and tungsten and / or further additives and / or a compound of silicon and carbon and / or further additives, and on the at least one heating element (1) there is at least one flow channel (11) through which the process gas flows or around and / or a jacket surface (10) is present around which the process gas flows and the internally hollow housing (2) is enclosed by at least one electrical coil (3), and the at least one electrical coil (3) is connected to an electrical voltage source with which alternating voltage or a pulsed direct voltage is applied to the electrical coil (3). [2] Device according to claim 1, characterized by that a material-specific passivating oxide layer and / or another oxidation-resistant layer is formed on surfaces of the heating element (1) which are in contact with process gas. [3] Device according to one of the preceding claims, characterized bythat the process gas flows along the inner wall of the housing (2) and / or along the structure (12) and the outer surface (10) of the at least one heating element (1) and / or through the at least one flow channel (11) of the at least one heating element (1) for its heating. [4] Device according to one of the preceding claims, characterized byin that the at least one electrically conductive coil (3) is wound non-linearly, in which the number of turns over the length of the electrical coil (3) is reduced starting from the inlet (5) in the direction of the outlet (6) and / or at least two electrical coils (3a, 3b) are arranged one after the other on the outside of the housing (2) in the flow direction of the process gas and each is connected to an electrical voltage source with which alternating voltage or a pulsed direct voltage is applied to the electrical coil (3a, 3b), wherein the first electrical coil (3a) arranged in the region of the inlet (5) is operated with a greater electrical power than at least one further electrical coil (3b) arranged downstream of the first electrical coil (3a) in the flow direction of the process gas. [5] Device according to one of the preceding claims, characterized bythat the number of turns of the at least one electrical coil (3) continuously decreases over the length of the at least one electrical coil (3) in the flow direction of the process gas. [6] Device according to one of claims 1 to 3, characterized by that a controlled inductive heating of the heating element (1) can be achieved and the process gas can be heated by at least two electrical coils (3a, 3b) with a different number of turns over their length, wherein the first electrical coil (3a) arranged in the region of the inlet (5) has a greater number of turns than an electrical coil (3b) arranged subsequently or in the region of the outlet (6). [7] Device according to claim 1, characterized bythat the at least one heating element (1) is formed from a nickel-based alloy and / or from zirconium and / or its alloys and / or a refractory metal-based alloy - in particular a tantalum-, tungsten-, niobium-, or molybdenum-based alloy. [8] Device according to one of the preceding claims, characterized by that one or more heating elements (1) are arranged as a layered arrangement with a total of at least three, preferably more than four heating elements (1), each with a flow channel (11) or as a bundle with at least three, preferably more than four flow channels (11) or as a composite body in the interior of the housing (2) or the at least one heating element (1) is designed in the form of a straight tube bundle with at least three, preferably more than four flow channels (11), in which the individual flow channels (11) are electrically insulated from one another and the spaces between the individual flow channels (11) are filled with electrically non-conductive material, and in which the process gas to be heated flows around the outer surface of the bundle and through the inner flow channels (11), or the heating element (1) is designed in the form of a bundle of at least three, preferably more than four, flow channels (11) rotated as a helix, in which the individual flow channels (11) are electrically insulated from one another and the spaces between the individual flow channels (11) are filled with electrically non-conductive material, and in which the process gas to be heated flows around the outer surface (10) of the bundle and through the inner flow channels (11), or the radiator (1) in the form of a cylinder, which is surrounded by at least three, preferably more than four inner flow channels (11) whose diameter is greater than 2 mm and the flow channels (11) are formed in a straight line, or the heating element (1) in the form of a cylinder which is traversed by at least three, preferably more than four, internal flow channels (11) whose diameter is greater than 2 mm and which rotate as a helix or are designed as turns or the heating element (1) is designed in the form of several assembled discs which are traversed by at least three, preferably more than four, inner flow channels (11) which have a minimum diameter of 2 mm and which can run at a right angle or at an angle to the end face. or the at least three, preferably more than four heating elements (1) are designed in the form of an arrangement of elements which are non-contacting to one another and which are layered in a defined pattern, with an internal flow channel (11), in which the individual heating elements (1) are electrically insulated from one another and arranged in a defined manner by an electrically non-conductive structure, preferably ceramic (12), and the spaces between the individual heating elements (1) are filled in an electrically non-conductive manner, and in which the process gas to be heated flows around the outer surface (10) of the heating elements (1) which is not in contact with the structure (12) and through the internal flow channels (11). [9] Device according to one of the preceding claims, characterized by that the housing (2) is made of quartz glass, Al2O3, ZrO2 or MgO or a chemical compound and / or a mixture of these materials. [10] Device according to one of the preceding claims, characterized bythat a fireproof closure element (4) is arranged at the inlet (5) for the process gas to prevent backflow of heated process gas. [11] Device according to one of the preceding claims, characterized by that the housing (2) is enclosed by a second (7) and / or a third housing (8), so that process gas flows through a gap between the first housing (2) and the second housing (7) and / or through a gap between the second housing (7) and the third housing (8) in countercurrent or cocurrent to the process gas flow to preheat the process gas. [12] Device according to one of the preceding claims, characterized bythat a second housing (7) and / or a third housing (8) is provided on its surfaces facing towards the heating element (1) with a reflective surface coating made of titanium nitride, or aluminium chromium nitride, or titanium aluminium nitride, or another coating which reflects electromagnetic radiation in the wavelength range of infrared light and which is not used for inductive heating. [13] Device according to one of the preceding claims, characterized by that the temperature of the process gas emerging from the outlet can be regulated by adjusting the process gas volume flow and / or the electrical power with which the at least one electrical coil (3, 3a, 3b) is operated. [14] Device according to one of the preceding claims, characterized bythat the geometry of the at least one heating element (1) and / or the inlet (5) is designed geometrically and / or by additional equipment in such a way that the heat transfer between the at least one heating element (1) and the process gas is maximized, in particular by swirling the process gas flow. [15] Device according to one of the preceding claims, characterized by that the outlet (6) is designed geometrically and / or by an apparatus such that the flow of the process gas is modified such that the heat transfer to any solid and / or melt and / or liquid and / or gas and / or plasma placed in the exiting process gas stream is maximized. [16] Device according to one of the preceding claims, characterized bythat the outlet (6) is designed geometrically and / or by an apparatus such that the average flow velocity of the process gas and / or the geometry of the process gas flow is modified, in particular by means of a correspondingly geometrically designed nozzle.

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