Method for manufacturing a composite component with a hollow structure, composite component and semiconductor technology equipment

DE102025101436A1Undetermined Publication Date: 2026-07-16CARL ZEISS SMT GMBH
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Patent Information

Application Number
DE102025101436
Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-01-16
Publication Date
2026-07-16

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Abstract

The invention relates to a method for producing a composite component (25), comprising: providing a first component (26), providing a second component (27), and producing the composite component (25) by joining the first component (26) to the second component (27) to form a joining surface (31). The first component (26) has a first surface (29) with a curved inner surface region (29a) and a flat outer surface region (29b), and the second component (27) has a second surface (30) with a curved inner surface region (30a) and a flat outer surface region (30b). During joining, the first component (26) and the second component (27) are joined together, at least in the flat surface regions (29b, 30b), to form the joining surface (31).When the two components (26, 27) are joined, a hollow structure (32) is formed which extends at least partially along the curved surface areas (29a, 30a). The invention also relates to a composite component (25).
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Citation Information

Patent Citations

  • Method for producing a mirror substrate of an optical element, optical element and projection exposure system

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  • Composite structure for microlithography and optical arrangement

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  • Optical element for reflecting radiation, and optical assembly

    WO2022179735A1

  • Method for producing a mirror of a lithography system

    WO2022214289A1

  • Method for producing a mirror of a microlithographic projection exposure apparatus

    WO2022214290A1