TRANSPORT ROBOTS

Abstract

A transport robot comprises a first hand with a clamping mechanism that grips and holds an outer circumferential end section of a workpiece, and a first motion mechanism for moving the first hand to a forward position, in which the workpiece can be held in a cassette housing, and to a retracted position that is farther from the cassette housing than the forward position. If a direction connecting the retracted position and the forward position is defined as the X-direction, a direction from the retracted position to the forward position as the X1-direction, and a direction from the forward position to the retracted position as the X2-direction, the clamping mechanism has a clamping section that can open and close upwards and downwards, and a motion mechanism that moves the clamping section in the X-direction.

Description

Technical field

[0001] At least one embodiment of the present invention relates to a transport robot. State of the art

[0002] Japanese unexamined patent application no. 2019-111614 (hereinafter referred to as patent document 1) describes a workpiece reversing device that transfers a workpiece between a plurality of holding devices. The workpiece reversing device of patent document 1 has a plurality of holding devices, each equipped with a suction section. While one surface of the workpiece is being suctioned, another surface of the workpiece is simultaneously suctioned by the suction section of another holding device, thereby transferring and conveying the workpiece between the plurality of holding devices.

[0003] Thin, plate-shaped workpieces, such as semiconductor wafers, are generally placed on carrier plates within a cassette housing for storage. Japanese Unexamined Patent Publication No. 2013-030703 (hereinafter referred to as Patent Document 2) describes a transport robot that removes and transports a wafer held by a wafer ring within a cassette. A transfer hand includes a clamping mechanism for gripping and securing an end section of the wafer ring.

[0004] When a workpiece, such as a wafer housed in a cassette casing, is removed from the cassette and transferred to a processing platform, it is sometimes necessary to place the workpiece onto the platform from above. However, if, as in patent document 2, an end section of the workpiece is clamped by a clamping mechanism during removal from the cassette casing, the workpiece cannot be placed onto the platform from above in this state.

[0005] Therefore, it is conceivable that after the workpiece has been removed from the cassette by a hand equipped with a clamping mechanism, it is suctioned from above and transported by a hand equipped with a suction section. However, if the clamping mechanism is simply opened after the workpiece has been gripped by the suction mechanism, the workpiece will come into conflict with the clamping mechanism when the hand that gripped the workpiece is raised or lowered.

[0006] In view of the circumstances described above, an object of at least one embodiment of the present invention is to prevent the workpiece from coming into conflict with the clamping mechanism after an end section of a workpiece has been clamped by a clamping mechanism and the workpiece has been removed from a cassette, when the workpiece is suctioned and moved up and down. Brief description of the invention

[0007] To solve the problems described above, one aspect of a transport robot according to at least one embodiment of the present invention comprises a first hand with a clamping mechanism for clamping and holding an outer circumferential end section of a workpiece, and a first movement mechanism for moving the first hand into a forward position in which the first hand can hold the workpiece housed in a workpiece receiving section, and into a retracted position that is further away from the workpiece receiving section than the forward position, wherein a direction connecting the retracted position and the forward position is defined as a first direction, a direction from the retracted position to the forward position as one side in the first direction, and a direction from the forward position to the retracted position as another side in the first direction.The clamping mechanism has a clamping section that can be opened and closed upwards and downwards, and a movement mechanism that moves the clamping section in the first direction. Brief description of the drawings

[0008] Embodiments are now described only by way of example with reference to the accompanying drawings, which are to be understood as exemplary and not limiting, and in which identical elements in several drawings are provided with the same reference numerals, wherein: Fig. 1 is a perspective view of a transport robot; Fig. 2 is a front view of the transport robot; Fig. 3 is an explanatory view of a process for removing a workpiece from a cassette housing by the transport robot; Fig. 4 is a perspective exploded view of a first hand unit and a second hand unit; Fig. 5 is a perspective exploded view of a state in which a workpiece is held by the first hand unit and the second hand unit; Fig. 6. An explanatory view of a process when a workpiece is transferred from the first hand unit to the second hand unit; Fig. 7 is a top view of a state in which a clamping mechanism is open; Fig. 8 is a top view of a state in which the clamping mechanism is closed; Fig. 9 is a perspective view of a clamping mechanism and a support element; Fig. 10 is a perspective exploded view of the clamping mechanism and the support element; Fig. 11 is a side view of a clamping section and a cam mechanism; and Fig. 12 is an explanatory view of the operation of the clamping section and the cam mechanism. Description of the embodiments

[0009] In the following, with reference to the drawings, an embodiment of a transport robot is described to which at least one embodiment of the present invention is applied. Overall structure

[0010] Fig. Figure 1 is a perspective view of a transport robot. Fig. Figure 2 is a front view of transport robot 1. Fig. Figure 3 is an explanatory view of a process for removing a workpiece W from a cassette housing 2 by the transport robot 1. Fig. Figure 4 is a perspective exploded view of a first hand unit 3 and a second hand unit 4. Fig. Figure 5 is a perspective exploded view showing a state in which the workpiece W is held by the first hand unit 3 and the second hand unit 4.

[0011] In this description, the three directions—X, Y, and Z—are orthogonal to each other. One side of the X direction is defined as the X1 direction, and the other side as the X2 direction. One side of the Y direction is defined as the Y1 direction, and the other side as the Y2 direction. One side of the Z direction is defined as the Z1 direction, and the other side as the Z2 direction. The XY plane is a horizontal plane. The Z direction corresponds to an up-down direction (vertical direction). The Z1 direction points upwards. The Z2 direction points downwards.

[0012] In the following description, the Z-direction in the drawings is referred to as the "top-bottom direction," the Z1-direction as "top," and the Z2-direction as "bottom." The X-direction is a first direction. The X1-direction is one side of the first direction. The X2-direction is the other side of the first direction. The Y-direction is a second direction.

[0013] As in Fig. As shown in Figure 3, the transport robot 1 performs a process to remove the workpiece W housed in the cassette housing 2. As shown in Figure 3, the transport robot 1 performs a process to remove the workpiece W housed in the cassette housing 2. Fig. As shown in Figure 5, each of the workpieces W is a semiconductor disk 10 (hereinafter referred to as "wafer 10") held by a wafer ring 11, which is shaped as a flat plate. The wafer 10 is centrally attached to an adhesive film 13, which covers a circular opening section 12 provided in the center of the wafer ring 11. As shown in Fig. As shown in Figure 5, the wafer ring 11 has straight sections 14 at four points on an outer circumferential edge, which are cut out in a straight line.

[0014] One of the straight sections 14 of the wafer ring 11 corresponds to a first straight section 14A with cut-out sections 15 on both sides in the circumferential direction. One of the remaining three straight sections 14 is located opposite the first straight section 14A in the radial direction and extends parallel to the first straight section 14A. The remaining two straight sections 14 extend in a direction orthogonal to the first straight section 14A and are located opposite each other in the radial direction.

[0015] As in Fig. As shown in Figure 3, the cassette housing 2 has a workpiece holding section 2a in which the aforementioned workpieces W are arranged at a constant distance in the top-bottom direction. Inside the cassette housing 2, placement sections (not shown), such as support plates onto which the wafer rings 11 of the workpieces W are placed, are arranged at a constant distance in the top-bottom direction. The workpieces W are each positioned in the cassette housing 2 such that the first straight section 14A of the wafer ring 11 faces the side of the opening section of the cassette housing 2.

[0016] The transport robot 1 is used in a semiconductor manufacturing system. The semiconductor manufacturing system includes, for example, a processing unit (not shown) for processing the wafer 10, the transport robot 1, and a control device (not shown) for controlling the transport robot 1. The transport robot 1 moves the workpiece W based on instructions from the control device. For example, the transport robot 1 performs an operation in which it places the workpiece W, removed from the cassette housing 2, onto a platform of a processing unit. The transport robot 1 also performs operations such as moving the workpiece W from the platform on which the workpiece W is placed to another platform and moving the workpiece W away from the platform on which the workpiece W is placed.

[0017] As in Fig. 1, Fig. 2 and Fig. As shown in Figure 3, the transport robot 1 comprises the first hand unit 3, the second hand unit 4, and a support base 5 that carries the first hand unit 3 and the second hand unit 4. As shown in Fig. As shown in Figure 2, the first hand unit 3 and the second hand unit 4 are arranged side by side in the Y direction. The first hand unit 3 is located on the Y1 side and the second hand unit 4 is located on the Y2 side.

[0018] As in Fig. As shown in Figure 3, the first hand unit 3 performs a process to remove the workpiece W housed in the cassette housing 2. The transport robot 1 performs a process in which the workpiece W, held by the first hand unit 3, is transferred to the second hand unit 4. The second hand unit 4 performs a process in which it transports the workpiece W while suctioning and holding it from above, and places the workpiece W from above onto the platform of the machining device.

[0019] The support base 5 includes a rotary mechanism (not shown) that rotates the first hand unit 3 and the second hand unit 4 as a whole about a pivot axis extending in the up-down direction. The support base 5 may have a lifting and lowering mechanism that raises or lowers the first hand unit 3 and the second hand unit 4 as a whole. Furthermore, the support base 5 may be attached to a base that supports the support base 5, or it may be equipped with a mechanism that moves the support base 5 horizontally along rails provided on the base. First hand unit

[0020] As in Fig. 1 and Fig. As shown in Figure 2, the first hand unit 3 comprises a first hand 30 and a first movement mechanism 31 for moving the first hand 30. The first movement mechanism 31 comprises a first multi-joint arm 32 that moves the first hand 30 within a horizontal plane, and a first drive mechanism 33 that drives the first multi-joint arm 32. As shown in Fig. As shown in Figure 2, the first drive mechanism 33 is provided inside the support base 5. The first drive mechanism 33 comprises, for example, a motor as a drive source and a drive force transmission mechanism that slows down the rotation of the motor and transmits it to the first multi-joint arm 32.

[0021] As in Fig. 2 and Fig. As shown in Figure 4, the first multi-joint arm 32 comprises a first arm 34 coupled to an output shaft of the first drive mechanism 33, and a second arm 35 coupled to the first arm 34. When the first arm 34 rotates about a pivot axis L1 oriented in the top-bottom direction, the second arm 35 rotates together with the first arm 34, and the first multi-joint arm 32 as a whole forms a linkage mechanism that extends and retracts in the X-direction. As the first multi-joint arm 32 extends and retracts in the X-direction, the first hand 30 moves linearly in the X-direction while maintaining a posture in which a front end of the first hand 30 points in the X1 direction.

[0022] The first hand unit 3 extends the first multi-joint arm 32 in the X1 direction towards the cassette housing 2 to transport the workpiece W out. As in Fig. As shown in Figure 3, the first movement mechanism 31 moves the first hand 30 into a forward position 30A, in which a front end section of the first hand 30 is inserted into the cassette housing 2, or into a retracted position 30B, in which the first hand 30 is retracted beyond the support base 5. The retracted position 30B is a position that is further away from the cassette housing 2 than the forward position 30A.

[0023] As in Fig. 4 and Fig. As shown in Figure 5, the first hand 30 comprises a first hand main body 36 coupled to the front end of the first multi-jointed arm 32, a clamping mechanism 37 arranged at an end section of the first hand main body 36 in the X1 direction, and a pair of first plates 38 extending in the X1 direction from both sides of the clamping mechanism 37 in the Y direction. The pair of first plates 38 are workpiece support sections that support the workpiece W from below. For example, each of the first plates 38 consists of a ceramic plate. A circular damping element 39 is attached to the front ends of each pair of first plates 38. The damping element 39 consists of an insulating resin such as polyetheretherketone (PEEK). The clamping mechanism 37 will be described in detail later.

[0024] As in Fig. As shown in Figure 3, the first hand unit 3 extends the first multi-jointed arm 32 while a front end of the clamping mechanism 37 is open to move the first hand 30 into the advanced position 30A. This inserts the first plates 38 under the workpiece W held in the cassette housing 2. Furthermore, an outer circumferential end section of the workpiece W is inserted between the front ends of the clamping mechanism 37. When the front ends of the clamping mechanism 37 close in this state, the outer circumferential end section of the workpiece W is clamped and held by the clamping mechanism 37. Subsequently, the first multi-jointed arm 32 is bent to retract the first hand 30 into the retracted position 30B. This conveys the workpiece W out of the cassette housing 2.

[0025] As in Fig. As shown in Figure 5, the workpiece W, which is ejected from the cassette housing 2, is held by the first hand 30 by the first plates 38 supporting both end sections of the wafer ring 11 in the Y-direction, and the first straight section 14A of the wafer ring 11 being clamped by the clamping mechanism 37. The wafer ring 11 is supported by the first plates 38 via the damping element 39, which is attached to the front end of each of the first plates 38. Second hand unit

[0026] As in Fig. 1 and Fig. As shown in Figure 2, the second hand unit 4 comprises a second hand 40 and a second movement mechanism 41 for moving the second hand 40. The second movement mechanism 41 comprises a second multi-joint arm 42, which moves the second hand 40 within a horizontal plane, and a second drive mechanism 43, which drives the second multi-joint arm 42. As shown in Fig. As shown in Figure 2, the second drive mechanism 43 is provided inside the support base 5. The second drive mechanism 43 comprises, for example, a motor as a drive source and a drive force transmission mechanism that slows down the rotation of the motor and transmits it to the second multi-joint arm 42.

[0027] As in Fig. 2 and Fig. As shown in Figure 4, the second multi-link arm 42 comprises a first arm 44 coupled to an output shaft of the second drive mechanism 43, a second arm 45 coupled to the first arm 44, a third arm 46 coupled to the second arm 45, and a second hand support section 47 coupled to a front end of the third arm 46. When the first arm 44 rotates about a pivot axis L2 extending in the Z direction, the second arm 45 and the third arm 46 rotate together with the first arm 44, and the second multi-link arm 42 as a whole forms a linkage mechanism that extends and retracts in the X direction. When the second multi-joint arm 42 extends and retracts in the X direction, the second hand 40 moves linearly in the X direction while maintaining a posture in which a front end of the second hand 40 points in the X1 direction.When the second hand 40 is moved to the platform of the machining device, the second multi-jointed arm 42 can also perform an operation in which its front end extends in a direction other than the X direction within the XY plane.

[0028] As in Fig. 1, Fig. 2 and Fig. As shown in Figure 3, the second hand (40) is positioned above the first hand (30). As shown in Figure 3. Fig. As shown in Figure 1, the second movement mechanism 41 can bend the second multi-joint arm 42 to move the second hand 40 into a transmission position 40B in which the second hand 40 overlaps from above with the first hand 30, which has been moved into the retracted position 30B.

[0029] The second hand support section 47 comprises a lifting and lowering mechanism 48 and a hand adjustment mechanism 49. The second hand 40 is coupled to a front end of the second multi-jointed arm 42 via the lifting and lowering mechanism 48 and the hand adjustment mechanism 49. The lifting and lowering mechanism 48 moves the second hand 40 in an up-down direction. The lifting and lowering mechanism 48 is, for example, a linear motion mechanism such as a cylinder. As described above, the second hand 40 is positioned above the first hand 30. Therefore, when the second hand 40 is lowered, it moves closer to the first hand 30, and when the second hand 40 is raised, it moves away from the first hand 30.

[0030] As in Fig. 1 and Fig. As shown in Figure 4, the second hand 40 comprises a second hand main body 50 positioned in the X1 direction of the second hand support section 47, a second frame 51 extending in the X1 direction from the second hand main body 50, and a plurality of suction sections 56 arranged on the second frame 51. Each of the plurality of suction sections 56 is connected via an air hose 58 running over the second frame 51 to a suction device, which is not shown in the drawings.

[0031] As in Fig. As shown in Figure 4, the suction section 56 has a suction cup 57 that protrudes downwards from the second frame 51. The suction cup 57 is made of a resin such as fluororubber. When the second hand 40 suctions the workpiece W held by the first hand 30, a front end face of the suction cup 57 is brought into close contact with the surface of the wafer ring 11, and then the suction device is driven. This causes the workpiece W to be suctioned to the suction cup 57, as shown in Figure 4. Fig. 5 shown. The hand adjustment mechanism 49 is a mechanism for adjusting the position and inclination of the second hand 40 taking into account the curvature of the workpiece W held by the first hand 30, so that the workpiece W can be held firmly by the multitude of suction sections 56.

[0032] As in Fig. As shown in Figure 4, the second frame 51 comprises a hand base section 52 projecting from the second hand main body 50 in the X1 direction and extending on both sides in the Y direction; a first frame section 53 extending from an end section in the Y1 direction of the hand base section 52 in the X1 direction; a second frame section 54 extending from an end section in the Y2 direction of the hand base section 52 in the X1 direction; and a third frame section 55 extending in the Y direction and connecting the first frame section 53 and the second frame section 54. The third frame section 55 is connected to the midpoint of the first frame section 53 and the second frame section 54 in the X direction. The second frame 51 consists, for example, of a ceramic plate.

[0033] The second hand 40 has the suction section 56 at four locations. Two of the four suction sections 56 are arranged at the two ends of the first frame section 53 in the X-direction, and the other two of the four suction sections 56 are arranged at the two ends of the second frame section 54 in the X-direction. Consequently, two of the four suction sections 56 are arranged at the front ends of the first frame section 53 and the second frame section 54. The other two suction sections 56 are arranged at positions where the first frame section 53 and the second frame section 54 are connected to the hand base section 52. Two of the four suction sections 56 are arranged at positions where they overlap from above with the front end of the first plate 38 when the first hand 30 moves into the retracted position 30B and the second hand 40 into the transmission position 40B, as shown in Fig. Figure 1 shows that, as described above, the damping element 39, on which the workpiece W is placed, is located at the front end of the first plate 38. Consequently, two of the four suction sections 56 are arranged in positions that each overlap the damping element 39 from above.

[0034] Process for transferring the workpiece W Fig. Figure 6 is an explanatory view of a process when the workpiece W is transferred from the first hand unit 3 to the second hand unit 4. The transport robot 1 performs a process in which it removes the workpiece W from the cassette housing 2 with the first hand unit 3 and then transfers the workpiece W from the first hand unit 3 to the second hand unit 4. In particular, the first hand unit 3 and the second hand unit 4 are transferred in the sequence of steps S1, S2, S3 and S4 in Fig. 6 served.

[0035] First, in step S1, the first hand 30, which holds the workpiece W, is moved to the retracted position 30B, and the second hand 40 is moved to the transfer position 40B. During this process, the lifting and lowering mechanism 48 raises the second hand 40 into a position 30B. Fig. 6 shown raised position 40H. The raised position 40H is a position in which the suction cup 57 of the second hand 40 is separated from the workpiece W.

[0036] Next, in step S2, the second hand 40 is moved into a Fig. In the lowered position 40L shown in Figure 6, the suction cups 57 of the suction sections 56 provided at four locations come into close contact with the surface of the workpiece W. In the present embodiment, four of the suction cups 57 are brought into close contact with the surface of the wafer ring 11. Subsequently, the suction device is driven to draw in the wafer ring 11. This allows the workpiece W to be held by both the first hand 30 and the second hand 40.

[0037] Next, in step S3, a front end section of the clamping mechanism 37 of the first hand 30 is opened upwards and downwards, and the front end section of the clamping mechanism 37 is moved in the X2 direction to be retracted into the first hand main body 36. This prevents the clamping mechanism 37 from overlapping the outer circumferential end section of the workpiece W in the top-bottom direction. The workpiece W is not held by the clamping mechanism 37, but is placed on the first plate 38 and suctioned in place by the second hand 40.

[0038] Finally, in step S4, the lifting and lowering mechanism 48 is driven to raise the second hand 40, which holds the workpiece W in place with suction, to the raised position 40H. Since the front end section of the clamping mechanism 37 is retracted in the X2 direction at this point, the workpiece W can be lifted without interfering with the clamping mechanism 37. This completes the transfer of the workpiece W from the first hand 30 to the second hand 40.

[0039] After the workpiece W has been transferred to the second hand unit 4, the transport robot 1 performs an operation in which it places the workpiece W onto the platform of the machining device from above. For example, a combination of some or all of the following operations can be performed: an operation to rotate the entire second hand unit 4 relative to the support base 5, an operation to extend and retract the second multi-jointed arm 42, and an operation to raise and lower the second hand 40 relative to the second multi-jointed arm 42 using the lifting and lowering mechanism 48. These operations can also be combined with an operation to raise and lower the entire second hand unit 4 relative to the support base 5. Tensioning mechanism

[0040] Fig. Figure 7 is a top view of a state in which the clamping mechanism 37 is open. Fig. Figure 8 is a top view of a state in which the clamping mechanism 37 is closed. Fig. Figure 9 is a perspective view of the clamping mechanism 37 and a support element 63. Fig. Figure 10 is a perspective exploded view of the clamping mechanism 37 and the support element 63. Fig. Figure 11 is a side view of a clamping section 70 and a cam mechanism 73. Fig. Figure 12 is an explanatory view of the operation of the clamping section 70 and the cam mechanism 73.

[0041] As in Fig. 4 and Fig. As shown in Figure 5, the first hand main body 36 of the first hand 30 comprises a hand housing 61 which accommodates the clamping mechanism 37 inside it, a cover 62 which is attached to an upper end of the hand housing 61, and the support element 63 which is attached to an end section of the hand housing 61 in the X1 direction. Fig. 7 and Fig. Figure 8 shows top-down views of the first hand 30, with the cover 62 removed from the hand housing 61. The clamping mechanism 37 comprises the clamping section 70, the front end of which can be opened and closed upwards and downwards in the X1 direction, a movement mechanism 64 that moves the clamping section 70 in the X direction relative to the hand housing 61, and an opening and closing mechanism 65 that opens and closes the clamping section 70.

[0042] As in Fig. 7, Fig. 8, Fig. 9 and Fig. As shown in Figure 10, the movement mechanism 64 comprises a cylinder 67 with a rod 66 projecting in the X1 direction and a sliding piece 68 coupled to a front end of the rod 66. As shown in Fig. As shown in Figure 10, the clamping section 70 comprises a support shaft 69 extending in the Y direction, and a first clamping element 71 and a second clamping element 72 rotatably coupled to the support shaft 69.

[0043] The support shaft 69 of the clamping section 70 is attached to the sliding piece 68 and projects from the sliding piece 68 on both sides in the Y-direction. A set of clamping sections 70 is arranged at each end of the support shaft 69 in the Y-direction. Consequently, the set consisting of the first clamping element 71 and the second clamping element 72 is coupled to the respective ends of the support shaft 69 in the Y-direction. The first clamping element 71 and the second clamping element 72 rotate about an axis of rotation L0, which passes through the center of the support shaft 69 and extends in the Y-direction.

[0044] The movement mechanism 64 drives the cylinder 67 to extend the rod 66 in the X1 direction, thereby moving the sliding piece 68 forward in the X1 direction. This causes the two sets of clamping sections 70 to move simultaneously in the X1 direction. As in Fig. As shown in Figure 8, the movement mechanism 64 moves the two sets of clamping sections 70 forward into a gripping position 70A, in which the front ends of the clamping sections 70 overlap the outer circumferential end section of the workpiece W in the top-bottom direction. Conversely, when the cylinder 67 is driven to retract the rod 66 in the X2 direction, the two sets of clamping sections 70 are retracted in the X2 direction via the sliding piece 68. As shown in Fig. As shown in Figure 7, the movement mechanism 64 retracts the two sets of clamping sections 70 into an open position 70B, in which the front ends of the clamping sections 70 are positioned further towards the X2 direction than the outer circumferential end section of the workpiece W.

[0045] The opening and closing mechanism 65 opens and closes the two sets of clamping sections 70 simultaneously. As in Fig. As shown in Figure 9, the opening and closing mechanism 65 comprises the cam mechanism 73 and a spring 79 attached to an outer circumference of the rod 66 of the movement mechanism 64. The function of the spring 79 is described later. The cam mechanism 73 causes the clamping section 70 to perform an opening and closing operation as the clamping section 70 moves in the X-direction. Specifically, the cam mechanism 73 causes the clamping section 70 to perform a closing operation on its front end section when it moves in the X1 direction, and to open its front end section when it moves in the X2 direction. Therefore, when the clamping section 70 moves into the gripping position 70A, its front end is in a most closed state.When the clamping section 70 moves into the open position 70B, the front end of the clamping section 70 is in its most fully open state. Fig. Figure 9 shows the state in which the front end of the clamping section 70 is most open.

[0046] As in Fig. 10 and Fig. As shown in Figure 11, the cam mechanism 73 comprises a first cam groove 74 formed in the first clamping element 71, a second cam groove 75 formed in the second clamping element 72, and a cam pin 76 that moves inside the first cam groove 74 and the second cam groove 75. As shown in Fig. 9 and Fig. As shown in Figure 10, the cam pin 76 is positioned such that it penetrates the support element 63, which is attached to the front end of the hand housing 61. The support element 63 is arranged between the two sets of clamping sections 70. The two ends of the cam pin 76, which protrude from the support element 63 on both sides in the Y-direction, are inserted into the first cam groove 74 and the second cam groove 75, respectively.

[0047] As in Fig. 10 and Fig. As shown in Figure 11, both the first cam groove 74 and the second cam groove 75 extend along the X-direction and are inclined in opposite directions relative to the X-direction. The first cam groove 74 is inclined downwards (in the Z2 direction) towards the X1 direction. The second cam groove 75, on the other hand, is inclined upwards (in the Z1 direction) towards the X1 direction.

[0048] When the cylinder 67 is driven to extend the rod 66 and move the clamping section 70 forward in the X1 direction, the cam pin 76 moves inside the first cam groove 74 and the second cam groove 75 in the X2 direction. This causes the first clamping element 71 to rotate in a Fig. As the first clamping element 71 rotates in the first direction of rotation R1 shown in Figure 11, a first claw section 77, located at a front end of the first clamping element 71 in the X1 direction, lowers. The second clamping element 72, on the other hand, rotates in a second direction of rotation R2, opposite to the first direction of rotation R1, and a second claw section 78, located at a front end of the second clamping element 72 in the X1 direction, raises in the Z1 direction. Therefore, as the clamping element 70 moves forward in the X1 direction, its front end closes, and the first claw section 77 and the second claw section 78 approach each other.When the cylinder 67 retracts the rod 66 and pulls the clamping section 70 backwards in the X2 direction, the opposite operations of the above operations are carried out, causing the front end of the clamping section 70 to open and the first jaw section 77 and the second jaw section 78 to separate from each other. Shape of the cam groove

[0049] As in Fig. As shown in Figure 11, the first cam groove 74 comprises a first region 74A, which is provided at one end of the first cam groove 74 in the X2 direction, and a second region 74B, which is one region further towards the X1 direction than the first region 74A. Similarly, the second cam groove 75 comprises a first region 75A, which is provided at one end of the second cam groove 75 in the X2 direction, and a second region 75B, which is one region further towards the X1 direction than the first region 75A.

[0050] As from Fig. As can be seen in Figure 11, the second region 74B and the second region 75B have a constant angle of inclination with respect to the X-direction and extend in a straight line. The first region 74A, however, has a larger angle of inclination with respect to the X-direction than the second region 74B. More precisely, the first region 74A is curved in such a way that the angle of inclination with respect to the X-direction increases towards the end of the first cam groove 74 in the X2 direction. Similarly, the first region 75A has a larger angle of inclination with respect to the X-direction than the second region 75B. More precisely, the first region 75A is curved in such a way that the angle of inclination with respect to the X-direction increases towards the end of the second cam groove 75 in the X2 direction.

[0051] The inclination angles of the first cam groove 74 and the second cam groove 75 correspond to the speed at which the clamping section 70 opens and closes; in other words, the speed at which the first claw section 77 and the second claw section 78 approach and separate from each other. If the inclination angles of the first cam groove 74 and the second cam groove 75 are large with respect to the X-direction, the speed at which the first claw section 77 and the second claw section 78 approach and separate from each other is high. In the present embodiment, as described above, the first cam groove 74 and the second cam groove 75 are each shaped such that the inclination angle with respect to the X-direction increases towards the end in the X2-direction.When the clamping section 70 closes, this therefore initially happens slowly, but in the final phase of clamping the workpiece W, the clamping section 70 performs the process at the highest closing speed.

[0052] Fig. Figure 12 is an explanatory view of the operation of the clamping section 70 and the cam mechanism 73. In Fig. 12 designates W a workpiece that is to be clamped by the clamping section 70. W1 and W2 designate upper and lower workpieces above and below workpiece W, respectively. Fig.Figures 12, P0 to P8, show a sequence in which the cam pin 76 moves through the entire path of the first cam groove 74 and the second cam groove 75. P0 denotes a state in which the clamping section 70 is in the open position 70B. The path from P0 to P3 is a path in which the cam pin 76 moves through the second section 74B and the second section 75B. The path from P3 to P8 is a path in which the cam pin 76 moves through the first section 74A and the first section 75A.

[0053] Since, as described above, the inclination angle of the second section 74B and the second section 75B with respect to the X-direction is small, the speed at which the first claw section 77 and the second claw section 78 close is low compared to the extent of the movement in the X-direction. Therefore, as can be seen from the state in P3, the outer circumferential end section of the workpiece W is inserted between the first claw section 77 and the second claw section 78 while the gap between the first claw section 77 and the second claw section 78 is still wide. The first claw section 77 and the second claw section 78 are positioned in such a way that a predetermined distance to the upper and lower workpieces W1 and W2 can be ensured.

[0054] Since, on the other hand, the first section 74A and the first section 75A are curved in a direction where the angle of inclination with respect to the X-direction increases, the first claw section 77 and the second claw section 78 close abruptly in the section from P3 to P8, even if the extent of the movement in the X-direction is small. P7 denotes a state in which the workpiece W is clamped between the first claw section 77 and the second claw section 78. P8 denotes a state in which, if no workpiece W is located between the first claw section 77 and the second claw section 78, the clamping section 70 is closed until the first claw section 77 and the second claw section 78 come into contact with each other.

[0055] Since the workpiece W is clamped between the first claw section 77 and the second claw section 78, the clamping section 70 does not actually close in state P8. As described above, the opening and closing mechanism 65 is equipped with the spring 79, which is attached to the outer circumference of the rod 66 of the movement mechanism 64. When the workpiece W is clamped, the first claw section 77 and the second claw section 78 are pressed by the elastic force of the spring 79 in a direction that brings them closer together. Therefore, the workpiece W is gripped by the first claw section 77 and the second claw section 78 by the elastic force of the spring 79. Function and effect

[0056] As described above, the transport robot 1 of the present embodiment comprises the first hand 30 with the clamping mechanism 37, which clamps and holds an outer circumferential end section of the workpiece W, and the first movement mechanism 31 for moving the first hand 30 into the advanced position 30A, in which the workpiece W received in the cassette housing 2 can be held, and into the retracted position 30B, which is further away from the cassette housing 2 than the advanced position 30A.The clamping mechanism 37 has the clamping section 70, which can open and close upwards and downwards, and the movement mechanism 64, which moves the clamping section 70 in the X direction, wherein a direction connecting the retracted position 30B and the advanced position 30A is defined as the X direction, a direction from the retracted position 30B to the advanced position 30A as the X1 direction and a direction from the advanced position 30A to the retracted position 30B as the X2 direction.

[0057] In this way, the transport robot 1 of the present embodiment can not only open and close the clamping mechanism 37, which clamps the outer circumferential end section of the workpiece W, but also move it in the X-direction. When the workpiece W is transferred to a hand other than the first hand 30, the clamping mechanism 37 can therefore be retracted into a position in which it does not overlap the workpiece W in the top-bottom direction. This prevents the workpiece W from coming into conflict with the clamping section 70 of the first hand 30 when, for example, the other hand is raised or lowered to move the workpiece W.

[0058] In the present embodiment, the clamping mechanism 37 comprises the opening and closing mechanism 65, which opens and closes the clamping section 70.

[0059] The opening and closing mechanism 65 causes the clamping section 70 to perform a closing operation when the clamping section 70 moves in the X1 direction, and causes the clamping section 70 to perform an opening operation when the clamping section 70 moves in the X2 direction.

[0060] In this way, by jointly performing the operation to extend or retract the clamping section 70 with the opening or closing operation of the clamping section 70, it is possible to perform an operation in which the clamping section 70 is closed while the clamping section 70 is inserted into the cassette housing 2 to clamp the outer circumferential end section of the workpiece W, and to perform an operation in which the clamping section 70 is retracted while it is opened when the workpiece W is transferred to another hand.

[0061] In the present embodiment, the first hand 30 comprises the first hand main body 36, which carries the clamping mechanism 37. The opening and closing mechanism 65 is the cam mechanism 73, which has the cam pin 76 arranged on the first hand main body 36 and the cam groove provided in the clamping section 70. By appropriately adjusting the shape of the cam groove, the clamping section 70 can thus be opened and closed at the appropriate time.

[0062] If a cam mechanism is used as the opening and closing mechanism 65, the arrangement of the cam groove and the cam pin can be reversed. That is, it is sufficient if the cam mechanism is a mechanism comprising a cam pin arranged either on the first hand main body 36 or on the clamping section 70, and a cam groove provided on the other side of the first hand main body 36 and the clamping section 70.

[0063] In the present embodiment, the first hand 30 comprises the first hand main body 36, which carries the clamping mechanism 37. The clamping section 70 comprises the support shaft 69, which is moved in the X-direction by the movement mechanism 64, as well as the first clamping element 71 and the second clamping element 72, which are rotatably coupled to the support shaft 69. The opening and closing mechanism 65 comprises the first cam groove 74 provided in the first clamping element 71 and the second cam groove 75 provided in the second clamping element 72. The opening and closing mechanism 65 also comprises the cam mechanism 73, which has the cam pin 76 that moves within the first cam groove 74 and the second cam groove 75. The cam pin 76 is arranged in the first hand main body 36. The first cam groove 74 and the second cam groove 75 extend in directions that are inclined in opposite orientations relative to the X direction.Consequently, when the clamping section 70 is moved in the X1 direction, the first clamping element 71 and the second clamping element 72 can be rotated in opposite directions, thereby closing the front end of the clamping section 70. Furthermore, when the clamping section 70 is moved in the X2 direction, the first clamping element 71 and the second clamping element 72 can be rotated in a direction opposite to the direction of closure, thereby opening the front end of the clamping section 70.

[0064] In the present embodiment, the first cam groove 74 and the second cam groove 75 have the first region 74A and the first region 75A, respectively, at one end in the X2 direction, and the second region 74B and the second region 75B, respectively, which are located further in the X1 direction than the first region 74A and the first region 75A. The first region 74A and the first region 75A have a larger inclination angle with respect to the X direction than the second region 74B and the second region 75B, respectively. Increasing the inclination angle of the cam groove increases the closing speed of the clamping section 70. Due to the cam groove shape described above, the clamping section 70 initially closes slowly; however, in the final phase of clamping the workpiece W, the clamping section 70 can close at a high speed.By such a process, when removing the workpiece W from the cassette housing 2, the risk can be reduced that the outer circumferential end section of the workpiece W cannot be inserted between the first clamping element 71 and the second clamping element 72 due to a decrease in the positional accuracy of the workpiece W in the top-bottom direction relative to the clamping section 70.

[0065] In the present embodiment, it is preferable that the inclination angle of the first region 74A with respect to the X-direction increases towards the X2-direction. This allows for a process in which the closing speed is gradually increased during the final stage of clamping the workpiece W. This further reduces the risk that the outer circumferential end section of the workpiece W cannot be inserted between the first clamping element 71 and the second clamping element 72 due to a decrease in the positional accuracy of the workpiece W in the top-bottom direction relative to the clamping section 70.

[0066] In the present embodiment, the first hand 30 comprises the pair of first plates 38, which extend in the X1 direction from both sides in the Y direction of the clamping mechanism 37, and the pair of first plates 38 support the workpiece W from below. In this way, the combination of the first plates 38 with the clamping mechanism 37 allows the workpiece W to be supported even if the length of the first plates 38 is kept short. Therefore, even if the stacking distance between workpieces W is small when stored in the cassette housing 2, the first plates 38 are prevented from bending and interfering with another workpiece W when the workpiece W is removed.

[0067] In the present embodiment, the second hand 40 with suction sections 56 for suctioning the surface of the workpiece W, the second movement mechanism 41, which moves the second hand 40 into a transfer position 40B that overlaps with the retracted position 30B in the top-bottom direction, and the lifting and lowering mechanism 48, which raises and lowers the second hand 40 moved into the transfer position 40B, are provided. In this way, by combining the second hand 40, which suctions the surface of the workpiece W, with the lifting and lowering mechanism, an outer circumferential end section of the workpiece W can be clamped with the first hand 30 in order to remove the workpiece W from the cassette housing 2, and then the workpiece W can be suctioned and held from above by the suction sections 56 of the second hand 40.Therefore, the workpiece W removed from the cassette housing 2 can be placed on the platform of the machining device from above without being turned over.

[0068] In the present embodiment, the second movement mechanism 41 is the second multi-joint arm 42, which moves the second hand 40 in a horizontal plane, and the lifting and lowering mechanism 48 is provided at the front end of the second multi-joint arm 42 and raises and lowers the second hand 40 relative to the second multi-joint arm 42. In this way, the combination of the multi-joint arm and the lifting and lowering mechanism enables a process in which the workpiece W is suctioned and held from above, then conveyed to the platform of the machining device and placed onto the platform from above. Other embodiments (1) The transport robot 1 described above is equipped with a first hand 30, which clamps and holds an outer circumferential end section of the workpiece W, and with a second hand 40, which suctions the surface of the workpiece W. However, it is not necessary for the transport robot 1 to be equipped with the second hand 40. In this case, when the transport robot 1 transfers the workpiece W to the hand of another robot, it can retract the clamping section 70 after the hand of the other robot has suctioned the surface of the workpiece W. Furthermore, the second hand 40 or the hand of the other robot can be equipped with an edge-gripping clamping mechanism that grips the workpiece W from its outer circumferential side, instead of with the suction sections 56 that grip the workpiece W from above. (2) The transport robot 1 described above uses the cam mechanism 73 to jointly perform the movement of the clamping section 70 in the X-direction and the opening and closing operation of the clamping section 70. However, the opening and closing mechanism and the movement mechanism can be configured to be controlled to operate together. Summary

[0069] At least one embodiment of the present invention can be designed as described below. (1) A transport robot comprises a first hand with a clamping mechanism for clamping and holding an outer circumferential end section of a workpiece, and a first movement mechanism for moving the first hand into a forward position in which the first hand can hold the workpiece housed in a workpiece holding section, and into a retracted position which is further away from the workpiece holding section than the forward position, wherein If a direction connecting the withdrawn position and the advanced position is defined as a first direction, a direction from the withdrawn position to the advanced position as one side in the first direction, and a direction from the advanced position to the withdrawn position as another side in the first direction, The clamping mechanism has a clamping section that can be opened and closed upwards and downwards, and a movement mechanism that moves the clamping section in the first direction. (2) The transport robot described above in (1), wherein the clamping mechanism has an opening and closing mechanism for opening and closing the clamping section, and The opening and closing mechanism causes the clamping section to perform a closing operation when the clamping section moves to one side in the first direction, and causes the clamping section to perform an opening operation when the clamping section moves to the other side in the first direction. (3) The transport robot described above in (2), wherein the first hand has a first hand body which carries the clamping mechanism, and The opening and closing mechanism comprises a cam mechanism comprising a cam pin located either on the first hand main body or on the clamping section, and a cam groove provided on the other side of the first hand main body and the clamping section, respectively. (4) The transport robot described above in (2), wherein the first hand has a first hand body which carries the clamping mechanism, the clamping section has a support shaft which is moved in the first direction by the movement mechanism, as well as a first clamping element and a second clamping element which are rotatably coupled to the support shaft, The opening and closing mechanism comprises a cam mechanism with a first cam groove provided in the first clamping element, a second cam groove provided in the second clamping element, and a cam pin moving inside the first cam groove and the second cam groove, the cam pin being located in the first hand main body, and the first cam groove and the second cam groove extend in directions that are inclined in opposite orientations relative to the first direction. (5) The transport robot described above in (4), wherein the first cam groove and the second cam groove each have a first area at one end on the opposite side in the first direction and a second area which is further towards one side in the first direction than the first area, and The first area has a greater angle of inclination in relation to the first direction than the second area. (6) The transport robot described above in (5), wherein the first area has an angle of inclination with respect to the first direction which increases in the first direction towards the other side. (7) The transport robot described above in (1) to (6), wherein the first hand has a pair of first plates extending from both sides of the clamping mechanism to one side in the first direction, and the pair of first plates supporting the workpiece from below. (8) The transport robot described above in (1) to (7), comprising a second hand with a suction section that suctions a surface of the workpiece, a second movement mechanism that moves the second hand into a transmission position that overlaps the withdrawn position in an up-down direction, and a lifting and lowering mechanism for raising and lowering the second hand moved into the transmission position. (9) The transport robot described above in (8), wherein the second movement mechanism is a second multi-jointed arm which moves the second hand in a horizontal plane, and the lifting and lowering mechanism is provided at a front end of the second multi-joint arm and raises and lowers the second hand relative to the second multi-joint arm. Reference symbol list

[0070] 1... Transport robot, 2... Cassette housing, 2a... Workpiece holding section, 3... First hand unit, 4... Second hand unit, 5... Carrier base, 10... Semiconductor disc (wafer), 11... Wafer ring, 12... Opening section, 13... Adhesive film, 14... Straight section, 14A... First straight section, 15... Cut-out section, 30... First hand, 30A... Extended position, 30B... Retracted position, 31... First motion mechanism, 32... First multi-joint arm, 33... First drive mechanism, 34... First arm, 35... Second arm, 36... First hand main body, 37... Clamping mechanism, 38... First plate, 39... Damper element, 40... Second hand, 40B... Transfer position, 40H... Raised position, 40L... Lowered Position, 41... Second movement mechanism, 42... Second multi-joint arm, 43... Second drive mechanism, 44... First arm, 45... Second arm, 46... Third arm, 47... Second hand support section, 48... Lifting and lowering mechanism, 49...Hand adjustment mechanism, 50... Second hand main body, 51... Second frame, 52... Hand base section, 53... First frame section, 54... Second frame section, 55... Third frame section, 56... Suction section, 57... Suction cup, 58... Air hose, 61... Hand housing, 62... Cover, 63... Support element, 64... Movement mechanism, 65... Opening and closing mechanism, 66... ​​Rod, 67... Cylinder, 68... Sliding piece, 69... Support shaft, 70... Clamping section, 70A... Gripping position, 70B... Open position, 71... First clamping element, 72... Second clamping element, 73... Cam mechanism, 74... First cam groove, 74A... First area, 74B... Second area, 75... Second cam groove, 75A... First area, 75B... Second section, 76... Cam pin, 77... First claw section, 78... Second claw section, 79... Spring, L0, L1, L2... Axis of rotation, R1... First direction of rotation, R2... Second direction of rotation, W, W1, W2... Workpiece. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] JP 2019-111614

[0002] JP 2013-030703

[0003]

Claims

[1] Transport robots, including: a first hand with a clamping mechanism for clamping and holding an outer circumferential end section of a workpiece; and a first movement mechanism for moving the first hand into a forward position in which the first hand can hold the workpiece housed in a workpiece holding section, and into a retracted position which is further away from the workpiece holding section than the forward position, characterized by , that If a direction connecting the withdrawn position and the advanced position is defined as a first direction, a direction from the withdrawn position to the advanced position as one side in the first direction, and a direction from the advanced position to the withdrawn position as another side in the first direction, The clamping mechanism has a clamping section that can be opened and closed upwards and downwards, and a movement mechanism that moves the clamping section in the first direction. [2] Transport robot according to claim 1, characterized by , that the clamping mechanism has an opening and closing mechanism for opening and closing the clamping section, and the opening and closing mechanism causes the clamping section to perform a closing operation when the clamping section moves to one side in the first direction, and causes the clamping section to perform an opening operation when the clamping section moves to the other side in the first direction. [3] Transport robot according to claim 2, characterized by, that the first hand has a first hand main body which carries the clamping mechanism, and the opening and closing mechanism has a cam mechanism comprising a cam pin arranged either on the first hand main body or on the clamping section, and a cam groove provided on the other of the first hand main body and the clamping section, respectively. [4] Transport robot according to claim 2, characterized by , that the first hand has a first hand main body which carries the clamping mechanism, the clamping section has a support shaft which is moved in the first direction by the movement mechanism, as well as a first clamping element and a second clamping element which are rotatably coupled to the support shaft, The opening and closing mechanism comprises a cam mechanism with a first cam groove provided in the first clamping element, a second cam groove provided in the second clamping element, and a cam pin moving inside the first cam groove and the second cam groove, the cam pin being located in the first hand main body, and the first cam groove and the second cam groove extend in directions that are inclined in opposite orientations relative to the first direction. [5] Transport robot according to claim 4, characterized by , that the first cam groove and the second cam groove each have a first area at one end on the opposite side in the first direction and a second area that is further towards one side in the first direction than the first area, and the first area has a larger angle of inclination with respect to the first direction than the second area. [6] Transport robot according to claim 5, characterized by , that the first area has an angle of inclination with respect to the first direction, which increases in the first direction towards the other side. [7] Transport robot according to claim 1, characterized by , that the first hand has a pair of first plates extending from both sides of the clamping mechanism to one side in the first direction, and the pair of first plates supports the workpiece from below. [8] Transport robot according to claim 1, comprising: a second hand with a suction section that draws suction from a surface of the workpiece, a second movement mechanism that moves the second hand into a transmission position that overlaps the withdrawn position in an up-down direction, and a lifting and lowering mechanism for raising and lowering the second hand moved into the transmission position. [9] Transport robot according to claim 8, characterized by , that the second movement mechanism is a second multi-joint arm which moves the second hand in a horizontal plane, and the lifting and lowering mechanism is provided at a front end of the second multi-joint arm and raises and lowers the second hand relative to the second multi-joint arm.

Images