X-RAY EXAMINATION DEVICE AND X-RAY EXAMINATION PROCEDURES

Abstract

X-ray inspection device (1; 11), comprising: an X-ray source (10) that generates X-rays which are emitted onto a test object (S), an X-ray camera (20) for taking X-ray images by means of X-rays emitted from the X-ray source (10) onto the test object (S), and a holder (40) for holding the test object (S), wherein by a pivoting movement of one of the X-ray source (10), the X-ray camera (20) and the holder (40) as a pivoting part (10, 20, 40) the X-ray image is taken while changing the direction of the recording, and a three-dimensional image of the test object is obtained and checked, where a control element (100) is provided for controlling the movement of the swivel element (10, 20, 40), which is configured to control the movement of the swivel element (10, 20, 40) in such a way as that the pivoting part (10, 20, 40) successively performs a pivoting movement at several points and undertakes a movement to move from a pivoting endpoint of one pivoting movement to a pivoting startpoint of the next pivoting movement, and that the pivoting part (10, 20, 40) does not have a stop section for stopping in the path between the pivoting movement and the movement, wherein the control part (100) for controlling the movement of the swivel part (10, 20, 40) is arranged such that when the swivel part (10, 20, 40) moves from a swivel endpoint of one swivel movement to a swivel startpoint of the next swivel movement, one of the X-ray source (10), the X-ray camera (20) and the holder (40) moves along a specific path of movement which is a path which smoothly connects a swivel circle of one swivel movement and a swivel circle of the next swivel movement at the swivel endpoint and at the swivel startpoint, wherein the specific motion path is a path in which the linear velocity of the pivoting part (10, 20, 40) is continuous at the pivoting end point and / or at the pivoting start point.

Description

TECHNICAL FIELD

[0001] The present invention relates to an X-ray inspection device that acquires multiple X-ray images of an object to be inspected and creates three-dimensional data, as well as a corresponding X-ray inspection method. JP 2019-15615 A ​​and US 2008 / 0240344 A1 disclose an X-ray inspection device comprising: an X-ray source that generates X-rays that are radiated onto an inspection object, an X-ray camera for capturing X-ray images using X-rays radiated from the X-ray source onto the inspection object, and a holder for holding the inspection object.

[0002] From JP 2019-15615 A ​​it is also known that the swivel part performs a swivel movement in succession at several points and a forward movement for moving from a swivel end point of one swivel movement to a swivel start point of the next swivel movement. BACKGROUND TECHNOLOGY

[0003] Conventionally, there is a technique for acquiring X-ray images of an object to be inspected, such as a substrate surface, from multiple directions, generating three-dimensional data from the acquired multiple X-ray images, and inspecting the internal structure of the inspection site. Examples of such techniques include tomosynthesis and CT. In these techniques, X-rays are irradiated from an X-ray source onto an inspection site of an object to be inspected, and the penetrating X-rays are captured by an X-ray camera. Then, multiple X-ray images are acquired while relatively changing the positional relationship between the X-ray source, the object to be inspected, and the X-ray camera.

[0004] In this process, a pivoting movement of at least one of the X-ray source, the object to be inspected, and the X-ray camera changes their relative positions. Once a pivoting movement and the acquisition of the respective inspection point are completed, the system moves to the acquisition position for the next inspection point, and another pivoting movement is performed. Therefore, to shorten the inspection time of the object to be inspected, it is necessary to perform the aforementioned pivoting and acquisition movements efficiently.

[0005] Techniques for this problem are well known, in which, based on the image acquisition conditions for acquiring fluoroscopy images, an image acquisition path on which the time required for acquiring the plurality of fluoroscopy images is shortened is determined by solving a combination / optimization problem of the time for each processing (e.g., the time required to stabilize the radiation radiated from a radiation generator, the time required to move the radiation generator, the time required to move a substrate holder parallel to a plane spanning the substrate rotational trajectory, and the time required for a detector drive to move the detector and, in conjunction, the substrate holder) (see, for example, Patent Document 1).

[0006] However, in conventional techniques, the motion methods for moving the X-ray source, the object to be inspected and the X-ray camera as well as the optimization of the motion path have not been sufficiently investigated. IDENTIFIED PATENT DOCUMENTS Patent Document 1: JP Patent Laid-Open No. 2011-209054 Patent Document 2: JP Patent Laid-Open No. 2013-247228 OVERVIEW OF THE INVENTION OBJECT TO BE SOLVED BY THE INVENTION

[0007] The present invention has been made in view of the above-mentioned problem and aims to provide a technique for shortening the inspection time of an object to be inspected in an X-ray inspection apparatus. MEANS FOR SOLVING THE TASK

[0008] The present invention for solving the above object is an X-ray inspection apparatus comprising: an X-ray source that generates X-rays that are radiated onto an inspection object, an X-ray camera for taking X-ray images using X-rays emitted from the X-ray source onto the test object, and a holder for holding the test object, whereby the X-ray image is recorded by a pivoting movement of one of the X-ray source, the X-ray camera and the holder as a pivoting part, changing the recording direction, a three-dimensional image of the test object is obtained and examined, characterized in that the swivel part performs a swivel movement in several places in sequence and a forward movement to move from a swivel end point of one swivel movement to a swivel start point of the next swivel movement, and the pivoting part does not have a stop section for stopping in the way between the pivoting movement of the movement.

[0009] That is, in the X-ray inspection device of the present invention, one of the X-ray source, the X-ray camera, and the holder pivots as a pivoting part, thereby capturing X-ray images at an inspection location while changing the imaging direction, obtaining a three-dimensional image at the inspection location, and inspecting the image. Then, the pivoting part performs a pivoting movement at different locations one after the other to obtain three-dimensional images of multiple inspection locations.

[0010] The pivoting part also performs a forward motion during each pivoting movement and from a pivot end point of one pivoting movement to a pivot start point of the next pivoting movement. Furthermore, the transition from the pivoting movement to forward motion takes place without stopping.

[0011] Here, according to the conventional art, the pivoting part must stop once during the transition from the pivoting movement to the forward movement or from the forward movement to the pivoting movement. Furthermore, a starting section and a braking section are required for acceleration and deceleration movements along the pivoting movement. In contrast, the pivoting part in the present invention does not require any acceleration or deceleration movement to stop between the pivoting movement and the forward movement. As a result, it is not necessary to perform additional pivoting movements for acceleration and deceleration before and after the pivoting movement for taking X-ray images. Consequently, the total movement time of the multiple pivoting and forward movements can be reduced, and the inspection time can be shortened.

[0012] Further, in the present invention, when the swing part moves from a swing end point of one swing movement to a swing start point of the next swing movement, one of the X-ray source, the X-ray camera, and the holder, which are the swing part, moves along a specific movement path, which is a path that smoothly connects a swing circle of one swing movement and a swing circle of the next swing movement at the swing end point and the swing start point, wherein the specific movement path may also be a path in which the linear velocity of the swing part is continuous at at least one of the swing end point and the swing start point.

[0013] Furthermore, in the present invention, the specific movement trajectory may be one in which the linear velocity and acceleration of the pivoting part are continuous at the pivoting end point and / or the pivoting start point, or one in which the linear velocity, acceleration, and jerk of the pivoting part are continuous at the pivoting end point and / or the pivoting start point. Furthermore, in this case, the acceleration of the pivoting part at the pivoting end point and / or the pivoting start point may be zero.

[0014] That is, the specific trajectory of the present invention requires that the linear velocity of the pivoting part be continuous at the pivot end point and / or the pivot start point. Furthermore, it is desirable that the linear velocity and acceleration be continuous. Furthermore, the linear velocity, acceleration, and jerk are ideally continuous. When the acceleration is continuous, it is ideal that the acceleration be zero.

[0015] In this way, the acceleration and shocks acting on the swivel part during the transition from swivel movement to forward movement or from forward movement to swivel movement can be mitigated. As a result, it is possible to further shorten the test time.

[0016] In the present invention, the specific trajectory can be defined by a polynomial equation. After this, it is possible to obtain the specific trajectory by a general mathematical solution method.

[0017] In the present invention, the pivot start point and pivot end point on the pivot circle of one pivot movement may be the center of a shorter circular arc on the pivot circle of one pivot movement between two intersection points of a straight line connecting the center of the pivot circle of the previous pivot movement and the next pivot movement with the center of the pivot circle of one pivot movement, and the pivot circle of one pivot movement. Therefore, it is possible to select the pivot start point and pivot end point on the pivot circle of the pivot movement through a simple calculation such that the specific trajectory is the shortest.

[0018] That is, although several possible paths are conceivable that smoothly connect the pivoting circle of one pivoting movement and the pivoting circle of the next pivoting movement at the pivoting end point and the pivoting start point, the effect of shortening the test time is limited when the path length is long. In contrast, in the present invention, the specific movement path can be the shortest path among the paths that smoothly connect the pivoting circle of one pivoting movement and the pivoting circle of the next pivoting movement at the pivoting end point and the pivoting start point, so that the test time can be shortened more reliably.

[0019] If the shorter circular arc cannot be identified in the above diagram on the swing circle of one swing movement, the swing end point of one swing movement and the swing start point of the next swing movement can be arranged at a predetermined angular position on the swing circle of each swing movement. Therefore, even if the shorter circular arc cannot be specified in the above diagram, for example, when the swing circles are lined up in a horizontal row, it is possible to specify the swing end point of one swing movement and the swing start point of the next swing movement at any angle, so that the specific trajectory can be easily calculated.

[0020] Furthermore, in the present invention, the pivot end point of one pivoting movement and the pivot start point of the next pivoting movement can be arranged at the same angular position on the pivot circle of each pivoting movement. For example, the pivot end point of one pivoting movement and the pivot start point of the next pivoting movement can be set at the 0° position on the pivot circle of each pivoting movement, or at any angular position other than 0°, regardless of the case.

[0021] In the present invention, the swing part may be any two parts of the X-ray source, the X-ray camera, and the holder, and the specific movement path may be a path that smoothly connects the swing circle of one swing movement and the swing circle of the next swing movement of a part that makes a swing movement with a larger radius among any two parts of the X-ray source, the X-ray camera, and the holder, at the swing end point and the swing start point.

[0022] If the swing part consists of any two parts consisting of the X-ray source, the X-ray camera, and the holder, the swing circle of the swing movement drawn by one swing part and the swing circle of the swing movement drawn by the other swing part to obtain a three-dimensional image of the inspection site are often different. Furthermore, in the present invention, for any of the two parts consisting of the X-ray source, the X-ray camera, and the holder as the swing part that performs a swing movement with a larger radius, the specific movement trajectory is defined as a trajectory that smoothly connects the swing circle of one swing movement and the swing circle of the next swing movement at the swing end point and the swing start point.Furthermore, the pivot start point and pivot end point on the pivot circle of one pivot movement are considered to be the center of the shorter circular arc on the pivot circle of one pivot movement between two intersection points of the straight line connecting the center of the pivot circle of the previous and next pivot movements with the center of the pivot circle of one pivot movement, and the pivot circle of one pivot movement. After intensive research by the inventors, it was found that this can reduce the total time of multiple pivoting and forward movements. This makes it possible to shorten the test time more reliably.

[0023] Furthermore, in the present invention, a part among any two parts of the X-ray source, the X-ray camera, and the holder that makes a swing movement with a smaller radius can reach the swing start point on the swing circle of the next swing movement at the same time as a part among any two parts of the X-ray source, the X-ray camera, and the holder that makes a swing movement with a larger radius.

[0024] This allows any two parts (X-ray source, X-ray camera, and holder) performing a swivel movement with a smaller radius to reach the swivel start point on the swivel circle of the next swivel movement at the same time as any two parts (X-ray source, X-ray camera, and holder) performing a swivel movement with a larger radius. As a result, it is possible for the swivel part to start the next swivel movement early.

[0025] In the present invention, the specific trajectory can be determined within a range where a linear velocity, an axis velocity, and an acceleration of any of the X-ray source, the X-ray camera, and the holder, which are the pivoting part, do not exceed predetermined allowable values ​​(allowable velocity or allowable acceleration). Therefore, the speed or acceleration of the X-ray source, the X-ray camera, the holder, etc., can be suppressed from being excessive when the pivoting part travels along the specific trajectory, thus preventing device failure and improving reliability.

[0026] In the present invention, the specific trajectory can also be determined such that the movement range of any one of the X-ray source, the X-ray camera, and the holder, which constitute the pivoting part, does not exceed a predetermined allowable movement range. Alternatively, the movement time of the pivoting part in the specific trajectory can be determined such that the movement range of any one of the X-ray source, the X-ray camera, and the holder, which constitute the pivoting part, does not exceed the predetermined allowable movement range. This can prevent inconveniences such as collision of the X-ray source, the X-ray camera, the holder, etc., with structures in the device or the occurrence of an error due to exceeding the software-defined limit range when the pivoting part moves along the specific trajectory, thereby improving reliability.

[0027] Furthermore, in the present invention, the pivoting part may be the X-ray source and the X-ray camera, and the holder may be held at a predetermined position in the X-ray inspection apparatus. In this case, the inspection can be performed by fixing the inspection object, and the X-ray camera and the X-ray source can perform pivoting and moving movements above and below the inspection object, thereby simplifying the movement mechanism, transport mechanism, etc. of the object to be inspected in the X-ray inspection apparatus.

[0028] The present invention may further be an X-ray inspection method using an X-ray inspection apparatus comprising: an X-ray source that generates X-rays that are radiated onto an inspection object, an X-ray camera for taking X-ray images using X-rays emitted from the X-ray source onto the test object, and a holder for holding the test object, whereby the X-ray image is recorded by a pivoting movement of one of the X-ray source, the X-ray camera and the holder as a pivoting part, changing the recording direction, a three-dimensional image of the test object is obtained and examined, characterized in that the swivel part performs a swivel movement in several places in sequence and a forward movement to move from a swivel end point of one swivel movement to a swivel start point of the next swivel movement, and one of the X-ray source, the X-ray camera and the holder, which are the pivoting part, changes from the pivoting movement to the forward movement without stopping.

[0029] Here, when the swivel part moves from a swivel end point of one swivel movement to a swivel start point of the next swivel movement, one of the X-ray source, the X-ray camera and the holder, which are the swivel part, is moved along a specific movement path, which is a path that smoothly connects the swivel circle of one swivel movement and the swivel circle of the next swivel movement at the swivel end point and the swivel start point, wherein the specific movement path can also be a path in which the linear velocity of the swivel part is continuous at the swivel end point and / or at the swivel start point.

[0030] In this case, the specific trajectory can also be a trajectory in which the linear velocity and acceleration of the pivoting part are continuous at the pivoting start point and / or pivoting start point, or in which the linear velocity, acceleration, and jerks of the pivoting part are continuous at the pivoting end point and / or pivoting start point. If the acceleration is continuous at the pivoting end point and / or pivoting start point, the acceleration can be zero.

[0031] The specific trajectory can also be defined by a polynomial equation.

[0032] In this case, the swivel start point and the swivel end point on the swivel circle of one swivel movement can be the center of a shorter circular arc on the swivel circle of one swivel movement between two intersection points of a straight line that connects the center of the swivel circle of the previous swivel movement and the next swivel movement with the center of the swivel circle of one swivel movement, and the swivel circle of one swivel movement.

[0033] The present invention may further be a program that causes a computer to calculate the specific movement path and output a drive signal to one of the X-ray source, the X-ray camera, and the holder, which are the pivoting part, to move along the specific movement path.

[0034] As described above, the present invention can be regarded as an X-ray inspection apparatus comprising at least some of the above-mentioned means. The present invention can also be regarded as an X-ray inspection method comprising at least part of the processing performed by the above-mentioned means. The present invention can also be regarded as a computer program that causes a computer to execute each of the steps of these methods, and as a computer-readable storage medium in which the program is not temporarily stored. Any of the above-mentioned configurations and processing can be combined with each other to constitute the present invention as long as no technical contradiction occurs. EFFECTS OF THE INVENTION

[0035] According to the present invention, it is possible to shorten the inspection time of an object to be inspected in the X-ray inspection apparatus. BRIEF EXPLANATION OF THE DRAWINGS Fig. 1 shows the overview of an X-ray inspection apparatus in Embodiment 1 of the present invention. Fig. 2(a) and Fig. 2(b) shows the relationship between the swing movement and the travel of an X-ray source or an X-ray camera in Embodiment 1 of the present invention. Fig. 3(a) and Fig. 3(b) shows an example of a trajectory of the swinging movement and the traveling movement of the X-ray source or the X-ray camera in Embodiment 1 of the present invention. Fig. 4 is a view illustrating a method for deriving the shortest path of travel in Embodiment 1 of the present invention. Fig. 5(a) and Fig. 5(b) shows a second example of the trajectory of the swinging movement and the traveling movement of the X-ray source or the X-ray camera in Embodiment 1 of the present invention. Fig.6(a) and Fig. 6(b) shows a third example of the trajectory of the swinging movement and the traveling movement of the X-ray source or the X-ray camera in Embodiment 1 of the present invention. Fig. 7(a) and Fig. 7(b) shows a fourth example of the trajectory of the swinging movement and the traveling movement of the X-ray source or the X-ray camera in Embodiment 1 of the present invention. Fig. 8(a) and Fig. 8(b) shows a fifth example of the trajectory of the swinging movement and the traveling movement of the X-ray source or the X-ray camera in Embodiment 1 of the present invention. Fig. 9 shows a program showing a movement control routine of the X-ray source and the X-ray camera in Embodiment 1 of the present invention. Fig. 10(a) and Fig. 10(b) shows the overview of an X-ray inspection apparatus in Embodiment 2 of the present invention. Fig. 11(a) and Fig. 11(b) shows an example of a trajectory of swinging movement and traveling of an X-ray camera and an object to be inspected in Embodiment 2 of the present invention. Fig. 12(a) and Fig. 12(b) shows a second example of a trajectory of the swinging movement and the traveling movement of the X-ray camera and the object to be inspected in Embodiment 2 of the present invention. EMBODIMENT OF THE INVENTION[Application Example]

[0036] An example of application of the present invention is explained below with reference to some drawings. The present invention is based on a Fig.1 is used. In the X-ray inspection device 1, X-rays are radiated from an X-ray source 10 onto an object S to be inspected, and X-ray images are captured by an X-ray camera 20 through penetrating light. The X-ray source 10 and the X-ray camera 20 each pivot on the pivot circles 121 and 122, respectively, and capture X-ray images of the object S to be inspected at multiple positions along the path. The X-ray source 10 and the X-ray camera 20 then both move to the next pivot circle and capture X-ray images while moving along the pivot circle to inspect another inspection point.

[0037] When the X-ray source 10 and the X-ray camera 20 transition from a pivoting movement to a forward movement, a stop section is provided here to stop the X-ray source 10 and the X-ray camera 20 once, as shown in Fig.2(a). Accordingly, acceleration and deceleration movements are added on the swivel circle before and after the swivel movement. In the present application example, as shown in Fig. As shown in Figure 2(b), the stopping section is eliminated when the X-ray source 10 and the X-ray camera 20 transition from the panning motion to the forward motion. The additional stopping state and the additional panning motion are eliminated, and the X-ray source 10 and the X-ray camera 20 can move more quickly from one panning circle to the next.

[0038] In this application example, as in Fig. 3(a) and Fig.As shown in Figure 3(b), the path of travel used when moving from the swing circle to the next swing circle is a path that smoothly connects the swing circle and the next swing circle at the swing end point and the swing start point. This enables faster movement of the X-ray source 10 and the X-ray camera 20 without excessive acceleration or shock. It is possible to keep the distance between the swing end point on the swing circle and the swing start point on the next swing circle as short as possible, and to position the swing end point and the swing start point in the Fig. 4 to connect smoothly.

[0039] As in Fig.1, the present invention can be applied to the X-ray inspection apparatus 1 in which an object S to be inspected is fixed, and an X-ray source 10 and an X-ray camera 20 are brought into a swinging movement above and below the object to be inspected, and at the same time, the present invention, as shown in Fig. 10(a) and Fig. 10(b), can be applied to an X-ray inspection device 11 in which the X-ray source 10 is fixed and the X-ray camera 20 and the object S to be inspected are brought into a pivoting movement.

[0040] An embodiment of the present invention will be explained in more detail below with reference to the drawings (including the drawings explained above in the application examples). However, the specific embodiments explained in the embodiments are not intended to limit the scope of the invention to them alone, unless otherwise stated. [Example 1]

[0041] The X-ray inspection apparatus for Embodiment 1 of the present invention is, for example, an apparatus for assessing the good or bad condition of the soldering or bumps of a Ball Grid Array (BGA), etc., of electronic components soldered on a printed circuit board. Specifically, the X-ray source and the object to be inspected are moved relative to each other, and multiple X-ray images are taken to obtain the internal condition of the location to be inspected, generate a cross-sectional image at an appropriate position, and assess whether it is good or bad based on the cross-sectional image. <Geräteausbildung>

[0042] Fig.1 shows an arrangement of an X-ray source 10, a holder 40 holding an object S to be inspected, and an X-ray camera 20 in an X-ray inspection apparatus 1 according to Embodiment 1 of the present invention. In the X-ray inspection apparatus 1, X-ray images are acquired at multiple acquisition positions for each inspection point of the object S to be inspected, which is transported by a transport roller (not shown) and held in the holder 40, to obtain three-dimensional data. Specifically, X-rays are irradiated from the X-ray source 10 onto the object S to be inspected, and X-ray images are acquired by penetrating light from the X-ray camera 20. Both the X-ray source 10 and the X-ray camera 20 are movable by a table (not shown). The X-ray source 10 and the X-ray camera 20 are moved by these tables on a swing circle 121 and 122, respectively, and image acquisition is performed at multiple positions on the swing circle.

[0043] Each part in the X-ray inspection device 1 is controlled based on control signals from a control part 100. The X-ray inspection device 1 is equipped with an XY table control part 101 for the camera, a camera control part 102, and an XY table control part 107 for the X-ray source as the control part 100. Additionally, it is equipped with a height measuring part 103, a control part for the position of the test object 104, an X-ray source control part 105, and an image acquisition height control part 106. Furthermore, the X-ray inspection device 1 is equipped with a computer 111, a main memory 112, an auxiliary memory 113, an input 114, and an output 115.

[0044] The camera XY table control section 101 sends control signals to drive the camera XY table (not shown) and to move the X-ray camera 20 horizontally. The camera control section 102 sends a control signal to capture an X-ray image by the X-ray camera 20. The height measuring section 103 receives signals from a displacement sensor 30 to measure the height of the inspected position of the object S. The object position control section 104 sends control signals to the transport roller and the object S holder 40 to control the horizontal and vertical positions of the object S to the optimal positions for imaging.

[0045] The X-ray source control part 105 sends signals for adjusting the X-ray intensity and for starting and stopping the X-ray irradiation by the X-ray source 10. The image recording height control part 106 sends signals for controlling the height of the X-ray source 10 and the X-ray camera 20. The X-ray source XY table control part 107 sends signals for controlling the X-ray source XY table (not shown) and for moving the X-ray source 10 in the horizontal direction. The signals output from the camera XY table control part 101, the camera control part 102, the object position control part 104, the X-ray source control part 105, the image pickup height control part 106, and the X-ray source XY table control part 107 are determined based on the calculation results of the computer 111 and the information stored in the main memory 112 and the auxiliary memory 113.

[0046] Specifically, an image acquisition command section 111a of the computer 111 sends the information required for X-ray image acquisition to each of the sections, including the camera control section 102. Furthermore, a trajectory calculation section 111b calculates a trajectory to be followed by the X-ray source 10 and the X-ray camera 20 using a method described later. Information such as setting information and inspection results are exchanged with the user via the input 114 and the output 115.

[0047] The X-ray camera 20 is a two-dimensional X-ray detector that detects the X-rays emitted by the X-ray source 10 and penetrating the object S to be inspected. An II-tube (Image Intensifier) ​​or an FPD (Flat Panel Detector) can be used as the X-ray camera 20. Although only one X-ray camera 20 is used here, multiple X-ray cameras can also be used.

[0048] The displacement sensor 30 measures the distance to the object S to be inspected for multiple positions of the object S to be inspected. Therefore, the displacement sensor 30 can measure the curvature or inclination of the object S to be inspected. Curvature or inclination may occur during the manufacturing process of the object S to be inspected, and the amount of this curvature or inclination varies depending on the piece. Therefore, the curvature or inclination of each object S to be inspected is measured, and the height position of the holder 40 is adjusted so that an appropriate X-ray image can be taken.

[0049] With the above configuration, the positions of the X-ray source 10 and the X-ray camera 20 can be controlled in the X-ray inspection device 1 to image the substrate from different directions. In this embodiment, based on the results of such image acquisition from different directions, three-dimensional data of the location to be inspected on the object S is generated using a three-dimensional data generation method called CT (Computed Tomography).

[0050] A general-purpose computer, a so-called CPU (Central Processing Unit), can be used as the computer 111. A memory such as RAM can be used as the main memory 112. A ROM, a hard disk, etc., can be used as the auxiliary memory 113. Input 114 is any device, such as a keyboard, a key, a switch, and a mouse, with which a user can enter instructions into the computer 111. Output 115 is any device, such as a display or a speaker, that can present the output of the computer 111 to the user in the form of images, sounds, etc. In other words, a general computer system can be used to implement these functional parts. By reading and executing a program stored in the auxiliary memory 113 by the computer 111, the movement of the X-ray source 10 and the X-ray camera 20 is controlled, as described below.

[0051] As in Fig.As shown in Figure 1, the X-ray source 10 and the X-ray camera 20 move on the pivoting circles 121 and 122, respectively, based on control signals from the XY table control section 107 for the X-ray source and the XY table control section 101 for the camera, and X-ray images are acquired at multiple positions along the path. By pivoting the X-ray source 10 and 122 for each inspection point on the object to be inspected, three-dimensional images of the inspection point can be created.Since there are multiple positions of the inspection site when inspecting the object S to be inspected, the X-ray source 10 and the X-ray camera 20 perform a 360-degree sweep movement (hereinafter referred to as the n-th sweep movement) once to obtain an X-ray image of the inspection site, and then move to a position where the next inspection site can be acquired, and from this position, the next 360-degree sweep movement (hereinafter also referred to as the n+1-th sweep movement) is started.

[0052] Fig. 2(a) and Fig. 2(b) show the trajectory of the X-ray source 10 or the X-ray camera 20 when the X-ray source 10 or the X-ray camera 20 performs the n-th pivoting movement, the forward movement and the n+1-th pivoting movement. In this case, more precisely as in Fig.As shown in Figure 2(a), an acceleration movement is performed before the nth swivel movement, the nth swivel movement is performed at a constant speed, and after the nth swivel movement (360 degrees) is completed, a deceleration movement is performed and the movement is stopped once. Afterward, a forward movement is performed along a predetermined path. This is because during the swivel movement of the X-ray source 10 or the X-ray camera 20, it is necessary to perform a circular movement at a constant high speed in order to acquire high-quality, high-speed X-ray images.

[0053] Similarly, after stopping the X-ray source 10 or the X-ray camera 20, after the movement is completed, the acceleration movement is performed again, accelerating the X-ray source 10 or the X-ray camera 20 to a predetermined speed before reaching the starting point of the swing movement, and then starting the n+1th swing movement (360 degrees). That is, the X-ray source 10 or the X-ray camera 20 stops once before and after the swing movement to acquire X-ray images at a stop section. Then, an additional swing movement for acceleration and deceleration is performed before and after the stop. Since the conventional control requires the X-ray source 10 or the X-ray camera 20 to be stopped and the swing movement for acceleration and deceleration is necessary before and after the stop, the inspection time is cumbersome.

[0054] In contrast, in the present embodiment, as shown in Fig. 2(b), during the travel from the n-th swing to the n+1-th swing, the stop section is eliminated, and the swing for acceleration and deceleration before and after the stop is not performed in addition to the swing for taking X-ray images.

[0055] Then, in this example, the path of movement is defined as the shortest path among the paths that smoothly connect the swivel circle of the nth swivel movement and the swivel circle of the n+1th swivel movement at the swivel end point and the swivel start point. The path that smoothly connects the swivel circle of the nth swivel movement and the swivel circle of the n+1th swivel movement can be a path in which the linear velocity of the X-ray source 10 or the X-ray camera 20 is continuous at the swivel end point and / or the swivel start point. Alternatively, a path is desirable in which the linear velocity and acceleration of the X-ray source 10 or the X-ray camera 20 are continuous at the swivel end point and / or the swivel start point. Alternatively, it is ideal that the linear velocity, acceleration, and jerks of the X-ray source 10 or the X-ray camera 20 are continuous at the swivel end point and / or the swivel start point.If the acceleration is continuous, it is ideal that the acceleration is zero.

[0056] Fig. 3(a) and Fig. Figure 3(b) shows an example of the trajectory in this case. The arrows and the numbers in circles 1 to 3 in the figure correspond to the nth pivoting movement, the forward movement, and the n+1th pivoting movement, respectively. Fig. 3(a) shows an example of the path of movement of the X-ray camera 20. As in Fig. 3(a), the path 123a of travel of the X-ray camera 20 is the shortest curve among the curves smoothly connecting the swing circle 122a of the n-th swing movement and the swing circle 122b of the n+1-th swing movement at the uppermost point of the two (hereinafter, this point is also referred to as the 0° position or 360° position).

[0057] Fig. 3(b) also shows an example of the trajectory of the X-ray source 10. As in Fig.As shown in Figure 3(b), the path 123b of travel of the X-ray source 10 is the shortest curve among the curves that smoothly connect the swing circle 121a of the n-th swing movement and the swing circle 121b of the n+1-th swing movement at the lowest point of the two (hereinafter, this point is also referred to as the 180° position). The reason why the path of travel and the swing circle of each swing movement in Fig. 3(a) and Fig. 3(b) by 180 degrees is that the X-ray source 10 and the X-ray camera 20 must be positioned in a point-symmetric position over the inspection location of the object S to be inspected and, when the X-ray camera 20 is positioned in the 0° or 360° position, the X-ray source 10 must be positioned in the 180° position.

[0058] Since the Fig. 3(a) and Fig.Since the curve shown in Figure 3(b), which smoothly connects the swing circle of the nth swing motion and the swing circle of the n+1st swing motion at a given point, can be derived as a polynomial equation by a known mathematical method, the method for deriving the curve will not be specifically explained here. Regarding the method for deriving the shortest curve among the curves that smoothly connect the swing circle of the nth swing motion and the swing circle of the n+1st swing motion at a given point, the mathematical parameters such as the coefficient of each term of the curve can be distributed as a polynomial equation obtained by a known method, and the one with the shortest length can be selected by an iterative operation.

[0059] In order to minimize the movement time when the X-ray camera 20 moves along the Fig.3(a) with the movement time when the X-ray source 10 moves along the path 123a shown in Fig. 3(b) shown path 123b, can be Fig. 3(a) and Fig. 3(b) The speed of the two animals' movement during the longer movement time can be increased so that they both finish their movement at the same time. This makes it possible for them to finish their movement at the same time and move on to the next pivoting movement.

[0060] As explained above, in the present embodiment, the X-ray source 10 and the X-ray camera 20 are shifted from the nth swinging motion to the traveling motion, and the stop section at the transition from the traveling motion to the n+1th swinging motion is eliminated so that the X-ray source 10 and the X-ray camera 20 do not stop. This eliminates the need to add a swinging motion for acceleration and deceleration before and after the stop section in the swinging motion for taking an X-ray image, and allows transition to the next swinging motion immediately after the end of the swinging motion to the traveling motion, and to the next swinging motion immediately after the end of the traveling motion. This makes it possible to shorten the inspection time in the X-ray inspection device 1.

[0061] In the present embodiment, the path of movement during the transition from the nth swivel movement to the n+1st swivel movement is the shortest curve among the curves that define the swivel circle of the nth swivel movement and the swivel circle of the n+1st swivel movement at the swivel end point and the swivel start point (both at the 0° position in Fig. 3(a) and Fig. 3(b)). This allows the X-ray source 10 and the X-ray camera 20 to transition more smoothly (without excessive acceleration or shocks acting on the X-ray source 10 or the X-ray camera 20) from the pivoting movement to the forward movement or from the forward movement to the pivoting movement, and the acceleration and deceleration movement can be more reliably carried out even at high speed in the pivoting movement by means of

[0062] Movement can be performed. Furthermore, a faster transition of the X-ray source 10 and the X-ray camera 20 from the pivoting movement to the movement or from the movement to the pivoting movement is possible.

[0063] Table 1 shows the results of a comparison of the time required for the n-th swing movement, the locomotion and the n+1-th swing movement in an X-ray inspection device without the present invention and with the present invention. [Table 1] Panning time of circle before movement (s) Movement time (s) Panning time from circle to movement (s) Total time (s) Enlargement Acceleration time Panning time Delay time Acceleration time Panning time Delay time Conventional 0,3 2,6 0,3 0,90 0,3 2,6 0,3 7,30 1,00 shortest path on the X-ray camera side Image capture start time 0° 0,1 2,6 0,1 0,83 0,1 2,6 0,1 6,43 1,13

[0064] It can be seen that by applying the present invention to the X-ray inspection device, the elapsed time is improved by approximately 13%. Here, the path 123a corresponds to the movement of the X-ray camera 20 and the path 123b corresponds to the movement of the X-ray source 10 in Fig. 3(a) and Fig.3(b) shows the specific movement path in this embodiment. This point also applies to the following modified examples and embodiments. In the present embodiment, the path 123a of the X-ray camera 20 and the path 123b of the X-ray source 10 are the shortest curve among the curves that smoothly connect the swing circles. However, it is not necessarily the shortest curve. A curve that smoothly connects the two swing circles and has a length that can sufficiently shorten the inspection time is also possible. <Abgewandeltes Beispiel>

[0065] Next, a modified example of the present embodiment will be shown. In this modified example, an example of optimizing the pan end point in the nth panning movement and the pan start point in the n+1th panning movement will be explained. In this example, the pan end point in the nth panning movement and the pan start point in the n+1th panning movement are not fixed to the 0-degree position or the 180-degree position, but are determined such that the travel path becomes shorter when transitioning from the nth panning movement to the n+1th panning movement.

[0066] As in Fig.4, in this modified example, for example, when calculating the swivel end point of the swivel circle 122n of the nth swivel movement, the intersection point on the swivel circle 122n between the straight line connecting the center point of the swivel circle 122n-1 of the previous n-1th swivel movement and the center point of the swivel circle 122n and the swivel circle 122n is determined. In addition, the intersection point between the straight line connecting the center point of the swivel circle 122n and the center point of the swivel circle 122n+1 after 122n and the swivel circle 122n is determined. Then, the point Pn in the center of the shorter circular arc of the circular arcs lying between these two intersection points is set as the swivel end point of the swivel circle 122n of the nth swivel movement.

[0067] When calculating the swivel start point of the swivel circle 122n+1 of the n+1st swivel movement, the intersection point on the swivel circle 122n+1 between the straight line connecting the center of the swivel circle 122n of the previous nth swivel movement and the center of the swivel circle 122n+1 and the swivel circle 122n+1 is determined. Furthermore, the intersection point between the straight line connecting the center of the swivel circle 122n+1 and the center of the subsequent swivel circle 122n+2 and the swivel circle 122n+1 is determined. Then, the point Pn+1 at the center of the shorter circular arc of the circular arcs lying between these two intersection points is set as the swivel start point of the swivel circle 122n+1 of the n+1st swivel movement. Then, a curve 123n is used to smoothly connect Pn and Pn+1.This makes it possible to smoothly connect the swivel circle of the nth swivel movement and the swivel circle of the n+1th swivel movement with a shorter curve.

[0068] Fig. 5(a) and Fig. 5(b) shows an example of a path of movement determined using this method. In Fig. 5(b) shows the path 123b of movement between the swivel circle 121a of the n-th swivel movement and the swivel circle 121b of the n+1-th swivel movement of the X-ray source 10. Fig. 5(a) shows the path 123a of movement between the swivel circle 122a of the n-th swivel movement and the swivel circle 122b of the n+1-th swivel movement of the X-ray camera 20.

[0069] In Fig. 5(a) and Fig. 5(b), the swivel end point on the swivel circle 121a and the swivel start point on the swivel circle 121b are determined by the Fig. 4 is determined in such a way that the Fig.5(b) is the shortest, and further, the shortest of the curves that smoothly connect the swing circle 121a and the swing circle 121b at the swing end point and the swing start point is determined. Then, in Fig. 5(a), the path 123a is determined as the shortest curve among the curves that smoothly connect the swivel circle 122a of the n-th swivel movement and the swivel circle 122b of the n+1-th swivel movement of the X-ray camera 20 at the swivel end point and the swivel start point. The swivel end point and the swivel start point in Fig. 5(a) are points that result as points that are at an angle of 180 degrees from the end point of the pan or the start point of the pan in Fig. 5(b).

[0070] Table 2 shows the results of comparing the time required for the n-th swing movement, the locomotion and the n+1-th swing movement in the X-ray inspection apparatus without and with the present invention according to the modified example. [Table 2] Panning time of circle before movement (s) Movement time (s) Panning time from circle to movement (s) Total time (s) Enlargement Acceleration time Panning time Delay time Acceleration time Panning time Delay time Conventional 0,3 2,6 0,3 0,90 0,3 2,6 0,3 7,30 1,00 shortest path on the side of the X-ray source Optimization of image capture start time 0,1 2,6 0,1 0,69 0,1 2,6 0,1 6,29 1,16

[0071] It can be seen that by applying the present invention to the X-ray inspection device, the elapsed time is improved by about 16%. It should be noted that there are cases where the shorter of the circular arcs between two intersection points does not coincide with the Fig. 4, such as when the pan circles are arranged in a horizontal row. In the present embodiment, in such a case, the pan end point and the pan start point in the panning motion can be set to a predetermined angular position. In this case, it can be fixed at the 0° position or the 180° position, or it can be changed for each pan circle. In this way, a situation in which the pan end point and the pan start point in the panning motion cannot be calculated can be avoided.

[0072] Show next Fig. 6(a) and Fig. 6(b) the embodiments of paths 123a, 123b of the movement when the distance between the pivot circle of the nth pivot movement and the pivot circle of the n+1th pivot movement is relatively large (e.g., the distance between the centers of the pivot circles is more than three times the pivot circle diameter). In Fig. 6(a), the pan end point on the pan circle 122a of the n-th pan movement and the pan start point on the pan circle 122b of the n+1-th pan movement of the X-ray camera 20 are fixed at the 0° position, and the shortest curve among the curves smoothly connecting the pan circle 122a of the n-th pan movement and the pan circle 122b of the n+1-th pan movement at the 0° position is determined as a path 123a.

[0073] In Fig.6(b), furthermore, the swing end point of the swing circle 121a of the n-th swing movement and the swing start point of the swing circle 121b of the n+1-th swing movement of the X-ray source 10 are fixed at the 180° position, and the shortest curve among the curves smoothly connecting the swing circle 121a of the n-th swing movement and the swing circle 121b of the n+1-th swing movement at the 180° position is determined as the path 123b.

[0074] Fig. 7(a) and Fig. 7(b) also show embodiments 123a, 123b of the path of movement when the distance between the pivot circle of the first pivoting movement and the pivot circle of the second pivoting movement is relatively large (e.g., the distance between the centers of the pivot circles is more than three times the pivot circle diameter). In Fig.7(b), the swivel end point on the swivel circle 121a of the n-th swivel movement and the swivel start point on the swivel circle 121b of the n+1-th swivel movement of the X-ray source 10 are determined by the method of Fig. 4, and the shortest curve among the curves that smoothly connect the swivel circle 121a of the n-th swivel movement and the swivel circle 121b of the n+1-th swivel movement at the optimized swivel end point and swivel start point is determined as path 123b.

[0075] In Fig. 7(a), the pan end point on the pan circle 122a of the n-th panning movement and the pan start point on the pan circle 122b of the n+1-th panning movement of the X-ray camera 20 are determined as positions at which the angle is 180 degrees with respect to the pan end point and the pan start point in Fig.7(b). Then, the shortest curve among the curves that smoothly connect the swing circle 122a of the n-th swing movement and the swing circle 122b of the n+1-th swing movement at the specified swing end point and swing start point is determined as path 123a. Table 3 shows the effects of the test time reduction in the Fig. 7(a) and Fig. 7(b) case. [Table 3] Panning time of circle before movement (s) Movement time (s) Panning time from circle to movement (s) Total time Enlargement Acceleration time Panning time Delay time Acceleration time Panning time Delay time (s) Conventional 0,3 2,6 0,3 1,79 0,3 2,6 0,3 8,19 1,00 shortest path on the X-ray camera side Image capture start time 0° 0,1 2,6 0,1 1,70 0,1 2,6 0,1 7,30 1,12 shortest path on the X-ray source side Optimization of image capture start time 0,1 2,6 0,1 1,34 0,1 2,6 0,1 9,94 1,18

[0076] As shown in Table 3, when the pan end point on the pan circle 122a of the n-th panning movement and the pan start point on the pan circle 122b of the n+1-th panning movement of the X-ray camera 20 are fixed to the 0° position, and the pan end point on the pan circle 121a of the n-th panning movement and the pan start point on the pan circle 121b of the n+1-th panning movement of the X-ray source 10 are fixed to the 180° position, an improvement of about 12% is observed.

[0077] An improvement of approximately 18% is observed when the swivel end points on the swivel circles 122a, 121a of the n-th swivel movement and the swivel start points on the swivel circles 122b, 121b of the n+1-th swivel movement of the X-ray camera 20 and the X-ray source 10 are optimized.

[0078] Show next Fig. 8(a) and Fig. 8(b) shows an example of the traveling trajectory when the distance between the n-th sweep circle and the n+1-th sweep circle is relatively large, and shows the case where the sweep end point on the n-th sweep circle and the sweep start point on the n+1-th sweep circle of the X-ray camera 20 and the X-ray source 10 are optimized.

[0079] Fig.Fig. 8(a) shows the paths 123a, 123b of the movement when the swivel end point is on the swivel circle of the n-th swivel movement and the swivel start point is on the swivel circle of the n+1-th swivel movement of the X-ray source 10 using the method of Fig. 4, and the swivel end point on the swivel circle of the nth swivel movement and the swivel start point on the swivel circle of the n+1th swivel movement of the X-ray camera 20 are each changed by 180 degrees in angle with respect to the swivel end point and the swivel start point of the X-ray source 10, respectively. In this case, the speed of the X-ray source 10 is adjusted during the movement such that the X-ray camera 20 reaches the swivel start point on the swivel circle 122b of the n+1th swivel movement and the X-ray source 10 reaches the swivel start point on the swivel circle 121b of the n+1th swivel movement simultaneously.

[0080] In Fig.Fig. 8(b) shows a case where the pan end point on the pan circle 122a of the n-th panning movement and the pan start point on the pan circle 122b of the n+1-th panning movement of the X-ray camera 20 are determined by the method of Fig. 4 are optimized and the swivel end point on the swivel circle 121a of the n-th swivel movement and the swivel start point on the swivel circle 121b of the n+1-th swivel movement of the X-ray source 10 are each changed by 180 degrees in angle with respect to the swivel end point and the swivel start point of the X-ray camera 20, respectively. As in Fig. 8(a) and Fig. 8(b), the movement time is 1.674 s in the case of Fig. 8(a) and Fig. 1, Fig. 552 s in the case of Fig. 8(b).

[0081] In this way, according to the inventors' intensive studies, it has been found that, in an example of the traveling trajectory, in the case where the distance between the swing circle of the nth swing movement and the swing circle of the n+1th swing movement is relatively large (e.g., the distance between the centers of the swing circles is more than three times the swing circle diameter), and the swing end point of the nth swing movement and the swing start point of the n+1th swing movement of the X-ray camera 20 and the X-ray source 10 are optimized, the effect of shortening the traveling time is greater when the swing end point in the nth swing movement and the swing start point in the n+1th swing movement are optimized for the one with the larger swing radius between the X-ray camera 20 and the X-ray source 10.

[0082] Therefore, when the distance between the swivel circle of the nth swivel movement and the swivel circle of the n+1th swivel movement is relatively large, it is better to optimize the swivel end point in the nth swivel movement and the swivel start point in the n+1th swivel movement for the one with the larger swivel radius between the X-ray camera 20 and the X-ray source 10.

[0083] Next, the flow of control by the computer 111 and the control part 100 in the present embodiment will be explained. Fig. Figure 9 shows a flowchart of a motion control routine of the X-ray source 10 and the X-ray camera 20 in the present embodiment. This routine is a program stored in main memory 112 and executed by the computer 111 and control section 100.

[0084] When this routine is executed, first, in step S01, the pan end point and the pan start point are optimized for the pan circle with a larger radius among the pan circle drawn by the X-ray source 10 and the pan circle drawn by the X-ray camera 20. More specifically, the pan end point and the pan start point, where the distance between them is shorter, are determined by the Fig. 4 is calculated. Here, the explanation further assumes that the sweep circle drawn by the X-ray camera 20 is larger than the sweep circle drawn by the X-ray source 10. When the processing of step S01 is completed, the processing proceeds to step S02.

[0085] In step S02, a path is calculated that smoothly connects the two above-mentioned swivel circles at the swivel end point and swivel start point calculated in step S01. Since this is done using a mathematically known method for calculating a polynomial equation, a detailed explanation is omitted here. After the processing of step S02 is completed, processing proceeds to step S03.

[0086] In step S03, a movement time is calculated from the movement trajectory and the movement speed of the X-ray camera 20 calculated in step S02. When the processing of step S03 is completed, the process proceeds to step S04. In step S04, it is determined whether either the linear velocity or the axis velocity of the X-ray camera 20 exceeds the allowable speed when moving at the movement time calculated in step S03, whether the acceleration acting on the X-ray camera 20 exceeds the allowable acceleration, and whether the movement range in the pivoting movement and movement of the X-ray camera 20 exceeds the allowable movement range.

[0087] Here, if it is determined that either the linear velocity or the axis velocity of the X-ray camera 20 exceeds the allowable velocity, or the acceleration acting on the X-ray camera 20 exceeds the allowable acceleration, or the moving range of the X-ray camera 20 exceeds the allowable moving range, it is judged that the allowable number of rotations of the motor or the ball screw is exceeded, or the X-ray camera 20 cannot withstand the acceleration and deteriorates, or the X-ray camera 20 may collide with a component in the X-ray inspection apparatus 1, as a result, the processing returns to step S02 after the mathematical parameters of the curve are changed so as to reduce the acceleration acting on the X-ray camera 20 or narrow the moving range of the X-ray camera 20.Then, the routine from step S02 to step S05 is repeatedly performed until it is determined in step S04 that either the linear velocity or the axis velocity of the X-ray camera 20 does not exceed the allowable velocity, the acceleration acting on the X-ray camera 20 does not exceed the allowable acceleration, and the movement range of the X-ray camera 20 does not exceed the allowable movement range.

[0088] If it is determined in step S04 that either the linear velocity or the axis velocity of the X-ray camera 20 does not exceed the allowable velocity, the acceleration acting on the X-ray camera 20 does not exceed the allowable acceleration, and the movement range of the X-ray camera 20 does not exceed the allowable movement range, the process proceeds to step S06. Here, the allowable velocity is a speed value specified as a threshold value that does not exceed the allowable rotational speed of the motor or ball screw. The allowable acceleration is an acceleration value specified as a threshold value that does not cause any deterioration of the X-ray camera even when acted upon. The allowable movement range is a movement range specified as a threshold value within which the X-ray camera 20 does not collide with other components in the device, etc.

[0089] In step S06, the calculation of the movement time is completed. After the processing of step S06 is completed, processing proceeds to step S07. The processing from step S01 to step S06 is executed in the computer 111.

[0090] Next, in step S07, the calculated movement time is received from the control part 100. Furthermore, in step S08, the information necessary for the movement of the X-ray source 10 and the X-ray camera 20, such as the position coordinates as the movement target, the panning speed, the panning center, and the panning radius, are received. After the processing of steps S07 and S08 is completed, the processing proceeds to step S09.

[0091] In step S09, the movement path to the next target, the pan start point, is calculated. Here, the movement path is recalculated according to the movement time received in step S07. When the processing of step S09 is completed, the process proceeds to step S10. In step S10, the output for moving the X-ray source 10 and the X-ray camera 20 along the path to the next pan start point is output to the drive motor (not shown) of the assisted XY stage for controlling the movement of the X-ray source 10 and the X-ray camera 20. The processing from step S07 to step S10 is executed in the control part 100.

[0092] In this routine, in steps S02 and S03, a trajectory smoothly connecting a pan end point and a pan start point and a movement time are calculated until it is determined in S04 that all values ​​of the speed (either linear velocity or axis velocity), acceleration, and movement position do not exceed the allowable values. However, the process may be such that the trajectory smoothly connecting the pan end point and the pan start point and the movement time are calculated until it is determined that any of the speeds (either linear velocity or axis velocity), acceleration, or movement position does not exceed the allowable value. <Ausführungsbeispiel 2>

[0093] Next, Embodiment 2 of the present invention will be explained. In Embodiment 1, an example will be explained in which the present invention is applied to the X-ray inspection apparatus 1 in which the position of an object S to be inspected is fixed, and an X-ray camera 20 and an X-ray source 10 are swung above and below the object to be inspected. In Embodiment 2, an example will be explained in which the present invention is applied to an X-ray inspection apparatus 11 in which the X-ray source 10 is fixed, and the object S to be inspected and the X-ray camera 20 are swung.

[0094] Fig. 10(a) and Fig. 10(b) shows an example of the arrangement of the X-ray camera 20, the object S to be inspected and the X-ray source 10 in the X-ray inspection device 11 in the present embodiment. Fig.10(a) shows an example in which the X-ray camera 20 is arranged above the object S to be inspected and the X-ray source 10 is arranged below the object S to be inspected, and Fig. 10(b) shows an example in which the X-ray source 10 is arranged above the object S to be inspected and the X-ray camera 20 is arranged below the object S to be inspected. In both cases, the X-ray source 10 is fixed, and the X-ray camera 20 and the object S to be inspected perform a pivoting movement.

[0095] Fig. 11(a) and Fig. 11(b) show the trajectories of the pivoting movement and the traveling movement of the X-ray camera 20 and the inspection object S in a case where the present invention is applied to the X-ray inspection apparatus 11 having the Fig. 10(a) and Fig.10(b) is used, and in which the panning end point on the panning circle of the nth panning movement and the panning start point on the panning circle of the n+1th panning movement of the X-ray camera 20 and the inspection object S are set to 0° positions. Unlike the case of Embodiment 1, the panning end point on the panning circle of the nth panning movement and the panning start point of the n+1th panning movement for the X-ray camera 20 and the inspection object S are both at the 0° position. Fig. 11(a) is the trajectory of the pivoting movement and the movement of the X-ray camera 20. Fig. 11(b) is the trajectory of the swinging movement and the movement of the object S to be tested.

[0096] Fig. 12(a) and Fig.12(B) show the trajectories of the swinging movement and the traveling movement of the X-ray camera 20 and the object S to be inspected in a case where the present invention is applied to the X-ray inspection apparatus 11 having the Fig. 10(a) is used, and in which the swivel end point on the swivel circle of the n-th swivel movement and the swivel start point on the swivel circle of the n+1-th swivel movement of the X-ray camera 20 and the test object S are optimized. Fig. 12(a) shows the trajectory of the pivoting movement and the movement of the X-ray camera 20. Fig. 12(b) shows the trajectory of the swinging movement and the traveling movement of the object S to be inspected. Table 4 shows the effects of the movement time reduction in the present embodiment. [Table 4] Panning time of circle before movement (s) Movement time (s) Panning time from circle to movement (s) Total time (s) Enlargement Acceleration time Panning time Delay time Acceleration time Panning time Delay time Conventional 0,3 2,6 0,3 1,79 0,3 2,6 0,3 8,19 1,00 shortest path on the X-ray camera side Image capture start time 0° 0,1 2,6 0,1 1,28 0,1 2,6 0,1 6,88 1,19 shortest path on the X-ray source side Optimization of image capture start time 0,1 2,6 0,1 1,08 0,1 2,6 0,1 6,68 1,23

[0097] It can be seen that even when the present invention is applied to the X-ray inspection apparatus 11 according to the arrangement of the present embodiment, a reduction effect of the movement time by 19% in the Fig. 11(a) and Fig. 11(b) and by 23% in the case shown in Fig. 12(a) and Fig. 12(b) is present.

[0098] In order to enable a comparison of the features of the present invention with those of the embodiments, the features of the present invention are indicated below with the symbols in the drawings. <Erfindung 1>

[0099] An X-ray inspection device (1, 11) comprising: an X-ray source (10) which generates X-rays which are radiated onto a test object, an X-ray camera (20) for taking X-ray images by X-rays emitted from the X-ray source (10) onto the test object, and a holder (40) for holding the test object, wherein by a pivoting movement of one of the X-ray source (10), the X-ray camera (20) and the holder (40) as a pivoting part (10, 20, 40), the X-ray image is recorded with a change in the recording direction, a three-dimensional image of the test object (S) is obtained and examined, characterized in that the pivoting part (10, 20, 40) successively performs a pivoting movement at a plurality of locations and a forward movement for moving from a pivoting end point of one pivoting movement to a pivoting start point of the next pivoting movement, and the pivoting part does not have a stop section for stopping in the way between the pivoting movement and the forward movement. <Erfindung 16>

[0100] An X-ray inspection method using an X-ray inspection device (1, 11) comprising: an X-ray source (10) which generates X-rays which are radiated onto a test object, an X-ray camera (20) for taking X-ray images by X-rays emitted from the X-ray source onto the test object, and a holder (40) for holding the test object, wherein by a pivoting movement of one of the X-ray source (10), the X-ray camera (20) and the holder (40) as a pivoting part (10, 20, 40), the X-ray image is recorded with a change in the recording direction, a three-dimensional image of the test object is obtained and examined, characterized in that the swivel part performs a swivel movement in several places in sequence and a forward movement to move from a swivel end point of one swivel movement to a swivel start point of the next swivel movement, and the pivoting part does not have a stop section for stopping the paths between the pivoting movement and the forward movement. EXPLANATION OF REFERENCE SYMBOLS 1, 11 X-ray inspection device 10 X-ray source 20 X-ray camera 40 holders 121 Swivel circle of X-ray source swivel movement 122 Swivel circle of X-ray camera swivel movement 123 Path of locomotion S Object to be tested (substrate)

Claims

[1] X-ray inspection device (1; 11), comprising: an X-ray source (10) which generates X-rays which are radiated onto a test object (S), an X-ray camera (20) for taking X-ray images by X-rays emitted from the X-ray source (10) onto the test object (S), and a holder (40) for holding the test object (S), wherein by a pivoting movement of one of the X-ray source (10), the X-ray camera (20) and the holder (40) as a pivoting part (10, 20, 40), the X-ray image is recorded with a change in the recording direction, and a three-dimensional image of the test object is obtained and examined, where a control part (100) is provided for controlling the movement of the pivoting part (10, 20, 40), which is arranged to control the movement of the pivoting part (10, 20, 40) in such a way, that the pivoting part (10, 20, 40) performs a pivoting movement in succession at several points and performs a forward movement for moving from a pivoting end point of one pivoting movement to a pivoting start point of the next pivoting movement, and that the pivoting part (10, 20, 40) has no stop section for stopping in the way between the pivoting movement and the forward movement, wherein the control part (100) is arranged to control the movement of the pivoting part (10, 20, 40) such that, when the pivoting part (10, 20, 40) moves from a pivoting end point of one pivoting movement to a pivoting start point of the next pivoting movement, one of the X-ray source (10), the X-ray camera (20) and the holder (40) moves along a specific movement path, which is a path that smoothly connects a pivoting circle of one pivoting movement and a pivoting circle of the next pivoting movement at the pivoting end point and the pivoting start point, wherein the specific movement path is a path in which the linear speed of the pivoting part (10, 20, 40) is continuous at the pivoting end point and / or at the pivoting start point. [2] X-ray inspection device (1; 11) according to claim 1, characterized by in that the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that the specific movement path is a path in which the linear speed and the acceleration of the pivoting part (10, 20, 40) are continuous at the pivoting end point and / or at the pivoting start point, or in which the linear speed, the acceleration and the jerk of the pivoting part (10, 20, 40) are continuous at the pivoting end point and / or at the pivoting start point. [3] X-ray inspection device (1; 11) according to claim 2, characterized bythat the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that the acceleration of the pivoting part (10, 20, 40) is zero at the pivoting end point and / or at the pivoting start point. [4] X-ray inspection device (1; 11) according to one of claims 1 to 3, characterized by that the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that the specific movement path is defined by a polynomial equation. [5] X-ray inspection device (1; 11) according to one of claims 1 to 4, characterized bythat the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is set up in such a way that the pivoting start point and / or the pivoting end point on the pivoting circle of one pivoting movement is the center point of a shorter circular arc on the pivoting circle of one pivoting movement between two intersection points of a straight line connecting the center point of the pivoting circle of the previous pivoting movement and the next pivoting movement with the center point of the pivoting circle of one pivoting movement, and the pivoting circle of one pivoting movement. [6] X-ray inspection device (1; 11) according to claim 5, characterized bythat the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that, if the shorter circular arc on the pivoting circle of one pivoting movement cannot be identified, the pivoting end point of one pivoting movement and the pivoting start point of the next pivoting movement are arranged in a predetermined angular position on the pivoting circle of each pivoting movement. [7] X-ray inspection device (1; 11) according to one of claims 1 to 4, characterized by that the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that the pivoting end point of one pivoting movement and the pivoting start point of the next pivoting movement are arranged in the same angular position on the pivoting circle of each pivoting movement. [8] X-ray inspection device (1; 11) according to one of claims 1 to 5, characterized byin that the pivoting part (10, 20, 40) is any two parts from the X-ray source (10), the X-ray camera (20) and the holder (40), and the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that the specific movement path is a path that smoothly connects the pivoting circle of one pivoting movement and the pivoting circle of the next pivoting movement of a part that performs a pivoting movement with a larger radius among the any two parts from the X-ray source (10), the X-ray camera (20) and the holder (40), at the pivoting end point and the pivoting start point. [9] X-ray inspection device (1; 11) according to claim 8, characterized byin that the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged in such a way that a part among any two parts from the X-ray source (10), the X-ray camera (20) and the holder (40) which performs a pivoting movement with a smaller radius arrives at the pivoting start point on the pivoting circle of the next pivoting movement at the same time as a part among any two parts from the X-ray source (10), the X-ray camera (20) and the holder (40) which performs a pivoting movement with a larger radius. [10] X-ray inspection device (1; 11) according to one of claims 1 to 9, characterized byin that the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that the specific movement path is determined in a range in which one of the linear speed and the axial speed of one of the X-ray source (10), the X-ray camera (20) and the holder (40) does not exceed the predetermined permissible speed. [11] X-ray inspection device (1; 11) according to one of claims 1 to 10, characterized by in that the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that the specific movement path is determined in a range in which the acceleration acting on one of the X-ray source (10), the X-ray camera (20) and the holder (40) does not exceed the predetermined permissible acceleration. [12] X-ray inspection device (1; 11) according to one of claims 1 to 11, characterized bythat the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that the specific movement path is determined such that the movement range of one of the X-ray source (10), the X-ray camera (20) and the holder (40) does not exceed the predetermined permissible movement range. [13] X-ray inspection device (1; 11) according to one of claims 1 to 11, characterized by that the control part (100) for controlling the movement of the pivoting part (10, 20, 40) is arranged such that the movement time of the pivoting part (10, 20, 40) in the specific movement path is determined such that the movement range of one of the X-ray source (10), the X-ray camera (20) and the holder (40) does not exceed the predetermined permissible movement range. [14] X-ray inspection device (1; 11) according to one of claims 1 to 13, characterized bythat the pivoting part is the X-ray source (10) and the X-ray camera (20), and the holder (40) is held at a predetermined position in the X-ray inspection device (1; 11). [15] X-ray inspection method using an X-ray inspection device (1; 11) comprising: an X-ray source (10) which generates X-rays which are radiated onto a test object (S), an X-ray camera (20) for taking X-ray images by X-rays emitted from the X-ray source (10) onto the test object (S), and a holder (40) for holding the test object (S), wherein by a pivoting movement of one of the X-ray source (10), the X-ray camera (20) and the holder (40) as a pivoting part (10, 20, 40), the X-ray image is recorded with a change in the recording direction, and a three-dimensional image of the test object is obtained and examined, where the pivoting part (10, 20, 40) performs a pivoting movement at a plurality of locations in succession and performs a forward movement for moving from a pivoting end point of one pivoting movement to a pivoting start point of the next pivoting movement, and the pivoting part (10, 20, 40) does not have a stop section for stopping the paths between the pivoting movement and the forward movement, wherein, when the pivoting part (10, 20, 40) moves from a pivoting end point of one pivoting movement to a pivoting start point of the next pivoting movement, one of the X-ray source (10), the X-ray camera (20), and the holder (40), which are the pivoting part (10, 20, 40), is moved along a specific movement path, which is a path that smoothly connects the pivoting circle of one pivoting movement and the pivoting circle of the next pivoting movement at the pivoting end point and the pivoting start point, wherein the specific movement path is a path in which the linear velocity of the swivel part is continuous at the swivel end point and / or at the swivel start point. [16] X-ray inspection method according to claim 15, characterized by that the specific movement path is a path in which the linear speed and the acceleration of the pivoting part (10, 20, 40) are continuous at the pivoting end point and / or at the pivoting start point, or in which the linear speed, the acceleration and the jerks of the pivoting part (10, 20, 40) are continuous at the pivoting end point and / or at the pivoting start point. [17] X-ray inspection method according to claim 16, characterized by that the acceleration of the swivel part (10, 20, 40) is zero at the swivel end point and / or at the swivel start point. [18] X-ray inspection method according to one of claims 15 to 17, characterized by that the specific trajectory is defined by a polynomial equation. [19] X-ray inspection method according to one of claims 15 to 18, characterized by that the swivel start point and the swivel end point on the swivel circle of one swivel movement is the center of a shorter circular arc on the swivel circle of one swivel movement between two intersection points of a straight line connecting the center of the swivel circle of the previous swivel movement and the next swivel movement with the center of the swivel circle of one swivel movement, and the swivel circle of one swivel movement.

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