SUBSTRATE DELIVERY DEVICE

Abstract

A substrate conveying device (102) is provided which can ensure the safety of an operator without interrupting the power supply to a conveying robot (230). An operator-side flap (104) is provided between a storage container installation section (220) and the outside of the device, and a conveying robot-side flap (105) is provided between the conveying robot (230) and the storage container installation section (220).

Description

Technical area

[0001] The present invention relates to a substrate conveying apparatus, and more particularly, to a technology effective when applied to a substrate conveying apparatus that conveys, for example, semiconductor substrates. State of the art

[0002] JP6822953B (PTL 1), JP2016-58481A (PTL 2) and JP5825948B (PTL 3) describe technologies that include a mechanism that prevents a conveyor robot from accessing a storage bin installation section while an operator is accessing the storage bin installation section. Citation listPatent literature PTL1: JP6822953B PTL2: JP2016-58481A PTL3: JP5825948B Summary of the inventionTechnical problem

[0003] For example, in a substrate conveying device that conveys substrates such as semiconductor wafers and reticles, an operation of placing a storage bin that stores the substrates on the storage bin installation section is performed by the operator. On the other hand, the operations of taking out substrates from the storage bin placed in the storage bin installation section and conveying the substrates into a processing device that processes the substrates, or the operations of conveying the substrates from the processing device and storing the substrates in the storage bin are performed by a conveying robot.

[0004] Thus, the storage bin installation section is a location accessible by both operators and the conveying robot. However, the conveying robot is, for example, an industrial robot with a rated power of 80W or more. To ensure operator safety, it is necessary to prevent contact between the operators and the conveying robot at the storage bin installation section. Therefore, in the substrate conveying device, measures must be taken to prevent contact between the operator and the conveying robot.

[0005] In this regard, for example, when the operator performs the operation of placing the storage container on the storage container installation section by cutting off a driving power supply of the conveyor robot, it is possible to prevent the conveyor robot from coming into contact with the operator.

[0006] However, if the conveyor robot's drive power supply is interrupted, it takes time to restore the conveyor robot's functionality. Furthermore, while the operator is performing the process of placing the storage bin on the storage bin installation section, the conveyor robot cannot perform any work, reducing the working efficiency of the substrate conveying device.

[0007] Therefore, it is desirable to take measures to prevent contact between the operator and the conveyor robot and ensure the safety of the operator without interrupting the drive power supply of the conveyor robot. Solution to the problem

[0008] In one embodiment, a substrate conveying apparatus includes: a conveying robot that conveys a substrate; a first installation section in which a storage container for storing the substrate can be placed; a first shutter mechanism provided so as to be capable of blocking a first access path when the storage container or the first installation section is accessed from outside the apparatus; a second shutter mechanism provided so as to be capable of blocking a second access path when the conveying robot accesses the storage container; and a control unit that controls opening and closing operations of the first shutter mechanism and the second shutter mechanism. Advantageous effects of the invention

[0009] According to one embodiment, it is possible to provide a substrate conveying device that can ensure the safety of an operator without interrupting the power supply of a conveying robot. Short description of the drawings Fig. 1 is a perspective view schematically illustrating a semiconductor inspection apparatus. Fig. 2 is a plan view schematically illustrating a configuration of a substrate conveying device. Fig. 3 is a side view schematically illustrating the configuration of the substrate conveying device. Fig. 4 is a diagram illustrating a state in which a shutter is closed. Fig. 5 is a diagram illustrating a state where the shutter is open. Fig. 6 is a diagram illustrating a basic idea of ​​an embodiment. Fig. 7 is a flowchart illustrating the flow of operations of the substrate conveying device when an operator accesses a storage container installation section. Fig. 8 is a flowchart illustrating the flow of operations of the substrate conveying device when a conveying robot accesses the storage container installation section. Fig. 9 is a flowchart showing the operation of the substrate conveying device according to Fig. 8 and illustrates a process of transitioning to a state in which an operator can access the storage bin installation section after the conveyor robot has accessed the storage bin installation section. Fig. 10 is a diagram schematically illustrating a configuration of the substrate conveying device according to an embodiment. Fig. 11 is a diagram illustrating features of the embodiment. Fig. Figure 12 is a diagram illustrating a storage container referred to as an “open cassette.” Fig. 13 is a diagram illustrating a configuration example of a locking mechanism. Fig. 14 is a diagram illustrating a locking mechanism in Modification Example 1. Fig. 15 is a diagram illustrating an example in which a light curtain is provided to detect that an operator accesses a storage bin installation section, and an example in which a light curtain is provided to detect that a conveyor robot accesses a storage bin installation section. Fig. 16 is a diagram illustrating substrate conveying devices according to Modification Examples 4 and 5. Description of embodiments

[0010] In all drawings used to describe the embodiments, the same elements are generally designated by the same reference numerals, and repeated descriptions thereof are omitted. To facilitate understanding of the drawings, hatching may also be used in plan views. (Embodiment)

[0011] First, an overview of a substrate conveying apparatus will be described. Specifically, in the present embodiment, a semiconductor inspection apparatus including a substrate conveying apparatus will be described as an example of the substrate conveying apparatus. However, the substrate conveying apparatus in the present embodiment is not limited to this example and can be widely applied to substrate conveying apparatuses associated with substrate processing apparatuses that process substrates. Further, examples of the substrate conveyed by the substrate conveying apparatus include semiconductor wafers (semiconductor substrates) and reticles, but in the present embodiment, the substrate will be described by taking a semiconductor substrate as an example. <Overview of a substrate inspection device>

[0012] Fig. 1 is a perspective view schematically showing a semiconductor inspection apparatus 100.

[0013] In Fig. 1, the semiconductor inspection apparatus 100 includes a semiconductor substrate processing unit 101 provided at the rear of the apparatus, and also includes a substrate conveying device 102 provided at the front of the apparatus.

[0014] The semiconductor substrate processing unit 101 includes a main function as the semiconductor inspection apparatus 100 for inspecting or measuring a semiconductor substrate, and a control unit including a computer system for controlling the function and a power supply. For example, when the semiconductor inspection apparatus 100 is a scanning electron microscope (SEM) with critical dimensions, the semiconductor substrate processing unit 101 includes an electron gun section, a stage section, a vacuum exhaust section, and a power supply section. On the other hand, the control unit is configured to control the operations of these components and is configured to perform dimensional measurement of a fine pattern formed on a semiconductor substrate by controlling these components. <Konfiguration der Substratfördervorrichtung>

[0015] Fig. 2 is a plan view schematically showing a configuration of the substrate conveying device 102.

[0016] In. Fig. 2, the substrate conveying device 102 includes a control unit 210, a pre-aligner 211, a storage container installation section 220, and a conveying robot 230.

[0017] The control unit 210 is configured to control the operation of conveying the semiconductor substrate 201 by the conveying robot 230.

[0018] The pre-aligner 211 is a unit configured to measure the eccentricity amount of the semiconductor substrate 201 and correct the eccentricity amount, and to detect an alignment plane and a notch of the semiconductor substrate 201 and align the alignment plane and the notch.

[0019] The storage container installation section 220 is configured to place a storage container 200 thereon and includes a storage container stand 221 on which the storage container 200 is placed. The substrate conveying device 102 is provided with at least one storage container stand 221, and for example, as shown in Fig. 2, a storage container stand 221a and a storage container stand 221b are provided. The storage containers 200 can be placed simultaneously on the storage container stand 221a and the storage container stand 221b.

[0020] Although not shown in the figure, the storage container installation section 220 is provided with sensors, switches, and readers for checking whether the storage container 200 is properly placed on the storage container stand 221, for storing the placement history of the storage container 200, and for checking whether the semiconductor substrate 201 protrudes from the storage container 200 placed on the storage container stand 221.

[0021] The conveying robot 230 is configured to convey the semiconductor substrate 201 and is configured to operate under the control of the control unit 210.

[0022] Fig. 3 is a side view schematically showing a configuration of the substrate conveying device 102.

[0023] As in Fig. 3, it can be seen that in the substrate conveying device 102, the storage container 200 is placed on the storage container stand 221, and a plurality of semiconductor substrates 201 are stored within the storage container 200. The conveying robot 230 is arranged in a space between an upper opening 240 provided in the semiconductor substrate processing unit 101 and the storage container 200 placed on the storage container stand 221 of the substrate conveying device 102. <Betrieb der Substratfördervorrichtung>

[0024] The operation of the substrate conveying device 102 will be described below with reference to Fig. 2 described.

[0025] First, an operator manually places the storage container 200 storing the plurality of semiconductor substrates 201 on the storage container stand 221 of the storage container installation section 220. Thereafter, the conveying robot 230, under the control of the control unit 210, takes out the semiconductor substrate 201 from the storage container 200 placed on the storage container stand 221, and then places the taken out semiconductor substrate 201 on the pre-aligner 211. Next, in the pre-aligner 211, the eccentricity amount of the semiconductor substrate 201 is corrected, and the alignment plane and the notch are aligned.

[0026] Thereafter, the conveying robot 230, under the control of the control unit 210, takes out the semiconductor substrate 201 from the pre-aligner 211 and conveys the semiconductor substrate 201 to the upper opening 240 for delivery to the semiconductor substrate processing unit 101.

[0027] The semiconductor substrate 201 placed in the upper opening 240 is processed in the semiconductor substrate processing unit 101. Subsequently, the semiconductor substrate 201 processed in the semiconductor substrate processing unit 101 is placed back in the upper opening 240. After that, the conveying robot 230, under the control of the control unit 210, picks up the semiconductor substrate 201 placed in the upper opening 240 and then stores the semiconductor substrate 201 in the storage container 200 placed on the storage container stand 221 of the storage container installation section 220. Then, the operator manually conveys the storage container 200, which stores the processed semiconductor substrates 201, to the outside of the substrate conveying device 102.

[0028] The substrate conveying device 102 operates as described above. <Berücksichtigung von Verbesserungen>

[0029] For example, the Conveyor Robot 230 is an industrial robot with a rated power of 80 W or more and requires that a physical barrier be provided to protect the operator from contact with the Conveyor Robot 230 according to “SEMI” standards.

[0030] In this regard, the conveyor robot 230 accesses the storage container installation section 220. On the other hand, the storage container installation section 220 is also a location accessible to the operator to place the storage container 200 on the storage container stand 221 of the storage container installation section 220. Therefore, unless measures are taken, there is no physical barrier between the operator and the conveyor robot 230 at the storage container installation section 220. Since there is no physical barrier between the operator and the conveyor robot 230, for example, when the operator accesses the storage container installation section 220 and the conveyor robot 230 accesses the storage container installation section 220, there is a risk of contact between the operator and the conveyor robot 230.For this reason, for example, a technique for providing a locking mechanism (sometimes referred to as a shutter) at the boundary between the operator and the storage container installation section 220 may be considered.

[0031] Fig. 4 is a diagram showing a state in which a shutter 103 is closed. As in Fig. 4, the operator (outside the device) and the storage bin installation section 220 are blocked by the shutter 103. Therefore, operators are unable to access the storage bin installation section 220, but the conveyor robot 230 is protected by a physical barrier (shutter 103) and can therefore access the storage bin installation section 220.

[0032] Fig. 5 is a diagram showing a state in which the shutter 103 is open. As in Fig. 5, conveying openings 222a and 222b, through which the conveying robot 230 takes out the semiconductor substrate 201 from the storage container 200 and stores the semiconductor substrate 201 in the storage container 200, are provided between the storage container installation section 220 and the conveying robot 230. Therefore, it can be seen that even if the shutter 103 is closed, as shown in Fig. 4, the conveyor robot 230 can access the storage container installation section 220 via the conveyor opening 222a or the conveyor opening 222b.

[0033] In Fig. 5, when the shutter 103 is open, there is no physical barrier (shutter 103) between the operator and the conveyor robot 230. For this reason, there is a risk of contact between the operator and the conveyor robot 230. However, for example, an interlock circuit associated with the opening of the shutter 103 interrupts the drive power supply of the conveyor robot 230. As a result, since the conveyor robot 230 cannot operate, the operator can safely access the storage container installation section 220.

[0034] In this regard, when the drive power supply of the conveying robot 230 is interrupted, it takes time to restore the conveying robot 230 to its operational state. Furthermore, while the operator is performing the operation of placing the storage container 200 on the storage container installation section 220, the conveying robot 230 cannot perform any work, which reduces the working efficiency of the substrate conveying device 102. That is, with regard to the technology of providing the shutter 103 as a physical barrier and interrupting the drive power supply of the conveying robot 230, there is room for improvement from the viewpoint of ensuring the safety of operators while suppressing a reduction in the working efficiency of the substrate conveying device 102.

[0035] Therefore, in the present embodiment, some measures are taken to overcome the above-described room for improvement. The technical concept of the present embodiment based on these measures will be described below. <Grundgedanke der Ausführungsform>

[0036] Fig. 6 is a diagram illustrating a basic idea of ​​the present embodiment.

[0037] In Fig. 6, the basic idea is to provide an operator-side door 104 (first locking mechanism) between the outside of the device and the storage bin installation section 220, and to provide a conveyor robot-side door 105 (second locking mechanism) between the conveyor robot 230 and the storage bin installation section 220. Specifically, the basic idea is that the substrate conveying device 102 is provided with the operator-side door 104 arranged to block a first access path when the storage bin installation section 220 is accessed from outside the device, and the conveyor robot-side door 105 arranged to block a second access path when the conveyor robot 230 accesses the storage bin installation section 220.In other words, the basic idea is that the substrate conveying device 102 is provided with a double locking mechanism consisting of the operator-side door 104 and the conveying robot-side door 105.

[0038] According to this principle, for example, when an operator accesses the storage bin installation section 220, the operator-side door 104 is opened and the conveyor robot-side door 105 is closed. Consequently, since the conveyor robot-side door 105 is in a closed state, the conveyor robot 230 cannot access the storage bin installation section 220. On the other hand, since the operator-side door 104 is in the open state, the operator can access the storage bin installation section 220.

[0039] In other words, according to the basic idea, there is always a physical barrier, referred to as the conveyor robot side door 105, between the operator and the conveyor robot 230 when the operator accesses the storage bin installation section 220, so that the operator can safely access the storage bin installation section 220 without worrying about contact with the conveyor robot 230.

[0040] Thus, according to the principle, the conveying robot side door 105 prevents the conveying robot 230 from accessing the storage bin installation section 220 when the operator accesses the storage bin installation section 220. Therefore, according to the principle, when the operator accesses the storage bin installation section 220, it is no longer necessary to cut off the drive power of the conveying robot 230 to prevent contact between the conveying robot 230 and the operator. Therefore, according to the principle, it is not necessary to turn on the drive power of the conveying robot 230 that has been cut off, and as a result, it is possible to save time for making the conveying robot 230 operational. Therefore, according to this principle, a significant effect can be achieved in ensuring the safety of the operators while suppressing a reduction in the working efficiency of the substrate conveying device 102.

[0041] On the other hand, according to the basic idea, for example, when the conveyor robot 230 accesses the storage bin installation section 220, the operator-side door 104 is closed and the conveyor robot-side door 105 is opened. Thus, the operator cannot access the storage bin installation section 220 because the operator-side door 104 is in the closed state. On the other hand, since the conveyor robot-side door 105 is in an open state, the conveyor robot 230 can access the storage bin installation section 220 while reliably preventing contact with the operator.

[0042] In the basic idea in which the substrate conveying device 102 is provided with the double-lock mechanism consisting of the operator-side door 104 and the conveying robot-side door 105, the operation of the substrate conveying device 102 to reliably prevent contact between the operator and the conveying robot 230 will be described below.

[0043] Fig. 7 is a flowchart illustrating the flow of operations of the substrate conveying device 102 when an operator accesses the storage container installation section 220.

[0044] In Fig. 7, it is first assumed that the operator-side door 104 is in a closed state. It is also assumed that the substrate conveying device 102 is provided with an opening switch that serves as a trigger for opening the operator-side door 104.

[0045] When the operator accesses the storage bin installation section 220, the operator presses the open switch, which serves as a trigger for opening the operator-side door 104 (S101). Then, the control unit 210 of the substrate conveying device 102 determines whether the conveying robot 230 is accessing the storage bin installation section 220 (S102). If the control unit 210 determines that the conveying robot 230 is accessing the storage bin installation section 220, the control unit 210 waits until the conveying robot 230 finishes accessing the storage bin installation section 220. On the other hand, if the control unit 210 determines that the conveying robot 230 is not accessing the storage bin installation section 220, the control unit 210 closes the conveying robot-side door 105 (S103).

[0046] Subsequently, the control unit 210 opens the operator-side door 104 (S104). Since the conveyor robot-side door 105 is in a closed state, access by the conveyor robot 230 to the storage container installation section 220 is blocked, while the operator can safely access the storage container installation section 220 (S105).

[0047] In this way, the control unit 210 is configured to perform control to perform a transition from a phase in which the operator-side door 104 is in a closed state to a first phase in which the operator-side door 104 is in an open state and the conveyor robot-side door 105 is in a closed state, thereby allowing the operator to access the storage container installation section 220.

[0048] Fig. 8 is a flowchart illustrating the flow of operations of the substrate conveying device 102 when the conveying robot 230 accesses the storage container installation section 220.

[0049] In Fig. 8, it is first assumed that the operator-side door 104 is in an open state. It is also assumed that the substrate conveying device 102 is provided with a closing switch that serves as a trigger for closing the operator-side door 104.

[0050] When the operator completes the operation at the storage bin installation section 220, the operator presses the close switch, which serves as a trigger for closing the operator-side door 104 (S201). Then, the control unit 210 of the substrate conveying device 102 determines whether the operator is accessing the storage bin installation section 220 (S202). If the control unit 210 determines that the operator is accessing the storage bin installation section 220, the control unit 210 waits until the operator completes accessing the storage bin installation section 220. On the other hand, if the control unit 210 determines that the operator is not accessing the storage bin installation section 220, the control unit 210 closes the operator-side door 104 (S203).

[0051] Subsequently, the control unit 210 opens the conveyor robot-side door 105 (S204). Since the operator-side door 104 is in a closed state, the operator's access to the storage container installation section 220 is blocked, while the conveyor robot 230 can access the storage container installation section 220 (S205).

[0052] In this way, the control unit 210 is configured to perform control to perform a transition from the first phase in which the operator-side door 104 is in an open state and the conveyor robot-side door 105 is in a closed state to a second phase in which the operator-side door 104 is closed and then the conveyor robot-side door 105 is opened, thereby allowing the conveyor robot 230 to take out the substrate from the storage container.

[0053] Fig. 9 is a flowchart showing the operation of the substrate conveying device 102 according to Fig. 8 and illustrates a process of transitioning to a state in which the operator can access the storage container installation section 220 after the conveyor robot 230 has accessed the storage container installation section 220.

[0054] In the second phase, with the operator-side door 104 closed and the conveyor-robot-side door 105 open, the conveyor robot 230 accesses the storage container installation section 220 and removes the semiconductor substrate 201 from the storage container 200 (S301). Then, under the control of the control unit 210, the conveyor robot 230 conveys the semiconductor substrate 201 removed from the storage container 200 into the semiconductor substrate processing unit 101 (S302). Next, after the semiconductor substrate 201 is processed in the semiconductor substrate processing unit 101 (S303), the conveying robot 230, under the control of the control unit 210, takes out the semiconductor substrate 201 processed in the semiconductor substrate processing unit 101 from the semiconductor substrate processing unit 101.Then, under the control of the control unit 210, the conveying robot 230 accesses the storage container installation section 220 and stores the semiconductor substrate 201 in the storage container 200 (S304).

[0055] Subsequently, the control unit 210 determines whether the conveyor robot 230 is accessing the storage bin installation section 220 (S305). If the control unit 210 determines that the conveyor robot 230 is accessing the storage bin installation section 220, the control unit 210 waits until the conveyor robot 230 finishes accessing the storage bin installation section 220. On the other hand, if the control unit 210 determines that the conveyor robot 230 is not accessing the storage bin installation section 220, the control unit 210 closes the conveyor robot-side door 105 (S306).

[0056] Then, the control unit 210 opens the operator-side door 104 (S307). Since the conveyor robot-side door 105 is in a closed state, access by the conveyor robot 230 to the storage bin installation section 220 is blocked, while the operator can safely access the storage bin installation section 220 (S308).

[0057] In this way, the control unit 210 is configured to perform a transition from the second phase to a third phase in which the conveyor robot side door 105 is closed and then the operator side door 104 is opened when the semiconductor substrate 201 is conveyed into the storage container 200 by the conveyor robot 230 in the second phase.

[0058] That is, as in Fig. 9, the operation of opening the operator-side door 104 can be performed automatically under the control of the control unit 210 without the operator pressing the open switch after all processes in the semiconductor substrate processing unit 101 for the semiconductor substrate 201 stored in the storage container 200 specified by the operator have been completed and the semiconductor substrate 201 has been stored in the storage container 200 again by the conveying robot 230.

[0059] This eliminates the need for the operator to press the open switch after processes (inspection, measurement, or the like) of the semiconductor substrate 201 are completed, thereby improving the usability of the substrate conveying device 102 for the operator.

[0060] According to the above-described concept, by providing the substrate conveying device 102 with the double-lock mechanism consisting of the operator-side door 104 and the conveying robot-side door 105, it is no longer necessary to interrupt the drive power supply of the conveying robot 230 to prevent contact between the conveying robot 230 and the operator. As a result, according to this concept, it is possible to ensure the safety of the operators while suppressing a reduction in the working efficiency of the substrate conveying device 102. <Berücksichtigung weiterer Verbesserungen>

[0061] The basic idea is a technical idea that is useful in that the operator's safety can be reliably ensured without interrupting the drive power supply of the conveying robot 230. In this regard, the inventor has further investigated this basic idea and found that there is room for improvement in terms of improving the working efficiency of the substrate conveying device 102. Therefore, this room for improvement will be described.

[0062] In Fig. 6, the substrate conveying device 102 is provided with the operator-side door 104 and the conveying robot-side door 105. For example, when the operator accesses the storage bin installation section 220, the control unit 210 controls the operator-side door 104 to be in an open state and the conveying robot-side door 105 to be in a closed state. This allows the operator to access the storage bin installation section 220 while blocking the conveying robot 230 from accessing the storage bin installation section 220. This means that according to the basic idea, contact between the operator and the conveyor robot 230 is prevented, which ensures the safety of the operator, but it also means that the conveyor robot 230 cannot access the storage container installation section 220 to perform work when the operator accesses the storage container installation section 220.

[0063] In Fig. 6, the storage bin installation section 220 of the substrate conveying device 102 includes, for example, the storage bin stand 221a and the storage bin stand 221b. Therefore, for example, when the operator-side door 104 is in an open state and the operator accesses the storage bin stand 221a, the operator does not access the storage bin stand 221b.

[0064] Here, if the conveying robot 230 can access the storage container stand 221b which the operator does not access, the conveying robot 230 can work on the storage container stand 221b while the operator works on the storage container stand 221a, which is considered to improve the working efficiency of the substrate conveying device 102.

[0065] However, according to the principle, when the operator-side door 104 is in an open state, the conveyor robot-side door 105 is in a closed state. Therefore, according to the principle, the conveyor robot 230 cannot access the storage container stand 221b that the operator does not access. In other words, there is room for improvement in the principle from the perspective of improving the working efficiency of the substrate conveyor device 102.

[0066] Therefore, in one embodiment, some measures are taken to address the room for improvement that exists in the basic idea. The embodiment will be described below based on these measures. <Ausführungsform> <<Konfiguration der Substratfördervorrichtung> >

[0067] Fig. 10 is a diagram schematically showing a configuration of the substrate conveying device 102 according to the embodiment.

[0068] As in Fig. 10, the substrate conveying device 102 includes the storage container stand 221a and the storage container stand 221b, and a partition wall 400 is provided between the storage container stand 221a and the storage container stand 221b to separate the storage container stand 221a and the storage container stand 221b.

[0069] Then, an operator-side door 401a is provided between the storage container stand 221a, which is separated by the partition wall 400, and the outside of the device. On the other hand, an operator-side door 401b is provided between the storage container stand 221b, which is separated by the partition wall 400, and the outside of the device.

[0070] In addition, a conveyor robot side flap 402a is provided between the storage container stand 221a and the conveyor robot 230 (in Fig. 10 not shown). On the other hand, a conveyor robot side door 402b is provided between the storage container stand 221b and the conveyor robot 230.

[0071] The operator-side door 401a, the operator-side door 401b, the conveyor robot-side door 402a, and the conveyor robot-side door 402b are each configured to perform opening and closing operations under the control of the control unit 210 (in Fig. 10 not shown). Specifically, the substrate conveying device 102 is provided with a switch 410 and configured such that the switch 410 serves as a trigger for performing the opening and closing operations of the operator-side doors 401a and 401b. On the other hand, the conveying robot-side door 402a and the conveying robot-side door 402b are provided with a function for detecting an open state and a closed state, and opening and closing operations are performed under the control of the control unit 210 based on this function.

[0072] Thus, in the embodiment, the substrate conveying device 102 includes a first installation section (storage container stand 221a) and a second installation section (storage container stand 221b) on which the storage container 200 (in Fig. 10 not shown). Here, the first installation section and the second installation section are separated by the partition wall 400. The substrate conveying device 102 has the operator-side flap 401a, which is arranged so that it can block a first access path when the storage container 200 or the first installation section is accessed from outside the device, the conveyor robot-side flap 402a, which is arranged so that it can block a second access path when the conveyor robot 230 accesses the storage container 200, the operator-side flap 401b, which is arranged so that it can block a third access path when the storage container 200 or the second installation section is accessed from outside the device, and the conveyor robot-side flap 402b, which is arranged so that it can block a fourth access path when the conveyor robot 230 accesses the storage container 200.Further, the substrate conveying device 102 includes a control unit configured to control the opening and closing operations of each of the operator-side door 401a, the operator-side door 401b, the conveying robot-side door 402a, and the conveying robot-side door 402b.

[0073] The substrate conveying device 102 in the embodiment is configured as described above. <<Betrieb der Substratfördervorrichtung> >

[0074] Next, the operation of the substrate conveying device 102 will be described with reference to Fig. 10 described.

[0075] For example, consider a case where an operator accesses the storage bin stand 221a. In this case, the operator first presses an open switch included in the switch 410 to open the operator-side door 401a. Thus, pressing the open switch serves as a trigger for the control unit 210 to open the operator-side door 401a. In this case, the control unit 210 closes the conveyor robot-side door 402a facing the operator-side door 401a. Further, the control unit 210 closes the operator-side door 401b and opens the conveyor robot-side door 402b facing the operator-side door 401b.In this way, when the operator-side door 401a is in the open state and the conveyor robot-side door 402a is in the closed state, the operator-side door 401b is placed in the closed state and the conveyor robot-side door 402b is placed in the open state. This allows the operator to access the storage bin rack 221a and allows the conveyor robot 230 to access the storage bin rack 221b.

[0076] Next, consider a case where the operator accesses the storage bin stand 221b. In this case, the operator first presses an open switch included in the switch 410 to open the operator-side door 401b. Thus, pressing the open switch serves as a trigger for the control unit 210 to open the operator-side door 401b. In this case, the control unit 210 closes the conveyor robot-side door 402b facing the operator-side door 401b. Further, the control unit 210 closes the operator-side door 401a and opens the conveyor robot-side door 402a facing the operator-side door 401a.In this way, when the operator-side door 401b is in the open state and the conveyor robot-side door 402b is in the closed state, the operator-side door 401a is placed in the closed state and the conveyor robot-side door 402a is placed in the open state. This allows the operator to access the storage bin rack 221b and allows the conveyor robot 230 to access the storage bin rack 221a. <<Merkmale der Ausführungsform> >

[0077] Features of the specific embodiment are described below.

[0078] The features of the specific embodiment are that, for example, as in Fig. 10, the partition wall 400 is provided between the storage bin stand 221a and the storage bin stand 221b, and a door provided on the storage bin stand 221a side and a door provided on the storage bin stand 221b side are separately provided. In other words, the features are that the operator-side door 401a is provided between the storage bin stand 221a on the left side of the partition wall 400 and the outside of the device, and the conveyor robot-side door 402a is provided between the storage bin stand 221a and the conveyor robot 230, while the operator-side door 401b is provided between the storage bin stand 221b on the right side of the partition wall 400 and the outside of the device, and the conveyor robot-side door 402b is provided between the storage bin stand 221b and the conveyor robot 230.Based on this configuration, when the operator-side door 401a is in the open state and the conveyor robot-side door 402a is in the closed state, the control unit 210 controls the operator-side door 401b to be in the closed state and the conveyor robot-side door 402b to be in the open state, whereas when the operator-side door 401a is in the closed state and the conveyor robot-side door 402a is in the open state, the control unit 210 controls the operator-side door 401b to be in the open state and the conveyor robot-side door 402b to be in the closed state.

[0079] As a result, for example, as in Fig. 11, in the storage container stand 221a, when the operator-side door 401a is in an open state and the conveyor robot-side door 402a is in a closed state, an operator 420 can access the storage container 200 placed on the storage container stand 221a. In this case, the control unit 210 performs controls such that in the storage container stand 221b, the operator-side door 401b is in a closed state and the conveyor robot-side door 402b is in an open state. As a result, as shown in Fig. 11, the conveying robot 230 can access the storage container 200 placed on the storage container stand 221b. Thus, according to the features of the specific embodiment, the access of the operator 420 to the storage container stand 221a and the access of the conveying robot 230 to the storage container stand 221b can be performed simultaneously. Therefore, according to this feature, the working efficiency of the substrate conveying device 102 can be improved. According to the features, the partition wall 400 is provided between the storage container stand 221a and the storage container stand 221b. Therefore, the partition wall 400 can prevent contact between the operator 420 and the conveying robot 230, even if the operator 420 simultaneously accesses the storage container stand 221a and the conveying robot 230 simultaneously accesses the storage container stand 221b.From the above, according to the features of the specific embodiment, a significant effect can be obtained in that the working efficiency of the substrate conveying device 102 can be improved while the safety of the operator 420 can be reliably ensured. <<Anwendung auf offene Kassette> >

[0080] The technical idea described above is particularly effective when applied to the case where an "open cassette" is used as the storage container. For example, there is a configuration in which a storage container is placed in an enclosed space (e.g., a chamber), and a conveyor robot accesses the storage container within the enclosed space. Since the conveyor robot accesses the storage container within the enclosed space in this configuration, the enclosed space, which acts as a physical barrier, is necessarily present between the operator and the storage container. Therefore, it is assumed that the operator's safety is unlikely to be compromised due to contact between the operator and the conveyor robot.

[0081] For example, Fig. 12 is a diagram illustrating a storage bin referred to as an "open cassette 450." Such an "open cassette 450" is not placed in the enclosed space and accessed by the conveying robot, but is placed on the storage bin stand 221 of the substrate conveying device 102 and accessed by the conveying robot. Moreover, this "open cassette 450" is manually placed on the storage bin stand 221 by an operator. Therefore, when the "open cassette 450" is used as a storage bin, both the operator and the conveying robot can access the "open cassette 450" on the storage bin stand 221 without any physical barrier. This means that when the "open cassette 450" is used as a storage bin, contact between the operator and the conveying robot is likely to occur, making it important to ensure operator safety.Therefore, when the "open cassette 450" is used as a storage container, operator safety can be reliably ensured by using the substrate conveying device 102 embodying the technical concept described above. In other words, the substrate conveying device 102 embodying the technical concept described above has particularly great technical significance when applied to the substrate conveying technology that uses the "open cassette 450" as a storage container. <<Konfigurationsbeispiel des Verschlussmechanismus> >

[0082] In this section, the shutter and the mechanism for opening and closing the shutter are collectively referred to as the shutter mechanism.

[0083] The shutter mechanism can be any mechanism as long as the shutter mechanism can move the shutter in the vertical direction. For example, there is a shutter mechanism that uses an air cylinder and a linear guide. Fig. 13, the air cylinder is a component that allows a cylinder block 311 to move linearly on a cylinder rod 310 by air pressure. On the other hand, the linear guide is a component that allows a linear guide block 321 to move smoothly on a linear guide rail 320.

[0084] As in Fig. As shown in Figure 6, the air cylinder and the linear guide are mounted in parallel on a base 300, and a shutter 350, the air cylinder, and the linear guide are connected by a bracket 330. Here, when upward air flow is sent to the lower part of the air cylinder, the cylinder block 311 moves linearly toward the upper end of the cylinder rod 310, and the linear guide block 321 and the shutter 350, which are connected by the bracket 330, also move linearly toward the upper end of the cylinder rod 310.

[0085] At this time, the linear guide block 321 smoothes the linear movement of the cylinder block 311, so that the shutter 350 opens smoothly.

[0086] On the other hand, when downward air flow is sent to the upper part of the air cylinder, the cylinder block 311 moves linearly toward the lower end of the cylinder rod 310, and the linear guide block 321 and the shutter 350 connected by the bracket 330 also move linearly toward the lower end of the cylinder rod 310.

[0087] At this time, the linear guide block 321 smoothes the linear movement of the cylinder block 311, so that the shutter 350 closes smoothly.

[0088] Furthermore, the other side of the shutter 350 may be provided with a mechanism for linearly moving the shutter 350, which is similar to the mechanism described above, but if a shutter mechanism on only one side is sufficient to implement a linear movement of the shutter 350, the other side of the shutter 350 may simply be provided with a mechanism for guiding the linear movement of the shutter 350.

[0089] In addition, the shutter mechanism is provided with a function for detecting the opening and closing of the shutter 350, but the detecting function may be any function.

[0090] For example, a configuration that implements the sensing function includes a configuration that uses a non-contact door sensor. The non-contact door sensor is a sensor in which the output of a sensor head turns "ON" when an actuator approaches within a certain distance of the sensor head, and the output of the sensor head turns "OFF" when the actuator moves away from the sensor head by a certain distance.

[0091] As in Fig. As shown in Figure 13, a sensor head 340a and a sensor head 340b are mounted on the base 300, while an actuator 341a and an actuator 341b are mounted on the bracket 330. Here, the actuator 341a corresponds to the sensor head 340a, and the actuator 341b corresponds to the sensor head 340b. When the door 350 is in a closed state, the output of the sensor head 340a is "ON" and the output of the sensor head 340b is "OFF."

[0092] The outputs of the sensor head 340a and the sensor head 340b are input to the control unit 210 (in Fig. 13 not shown). When the shutter 350 is opened, the actuator 341a moves away from the sensor head 340a, and as a result, the output of the sensor head 340a becomes "OFF." On the other hand, the actuator 341b approaches the sensor head 340b, so that the output of the sensor head 340b turns "ON" near the time when the opening of the shutter 350 is completed.

[0093] When the output of the sensor head 340b turns ON, the control unit 210 detects that the door 350 is in an open state. However, if the outputs of both sensor heads 340a and 340b are ON, or if the output of the sensor head 340b does not turn ON within a certain period of time after the door 350 starts the opening operation, the control unit 210 is configured to determine that the operation of the door 350 is abnormal and display an error message.

[0094] When the door 350 is closed, the actuator 341b moves away from the sensor head 340b, and as a result, the output of the sensor head 340b becomes "OFF." On the other hand, the actuator 341a approaches the sensor head 340a, and as a result, the output of the sensor head 340a becomes "ON" near the time when the closing operation of the door 350 is completed. When the output of the sensor head 340a becomes "ON," the control unit 210 detects that the door 350 is in a closed state. However, when the output of the sensor head 340b is "ON" or when the output of the sensor head 340a is "OFF" even after a certain period of time has elapsed since the door 350 started the closing operation, the control unit 210 is configured to determine that the operation of the door 350 is abnormal and display an error message.

[0095] The locking mechanism is configured as described above. <Modifikationsbeispiel 1>

[0096] Next, the substrate conveying device 102 in Modification Example 1 will be described.

[0097] For example, there are Fig. 6, when the operator-side door 104 is in a closed state, or when the conveyor robot-side door 105 is in a closed state, in the event of the operator-side door 104 or the conveyor robot-side door being forcibly opened by a force from outside the device, there is no physical barrier between the operator and the conveyor robot 230.

[0098] Therefore, in Modification Example 1, a locking mechanism is provided to forcibly maintain the closed state when the operator-side door 104 or the conveyor robot-side door 105 is in the closed state. Consequently, even if the operator-side door 104 or the conveyor robot-side door is forcibly opened by a force from outside the device, the closed state can be forcibly maintained by the locking mechanism. Therefore, according to Modification Example 1, it is possible to prevent a situation where there is no physical barrier between the operator and the conveyor robot 230.

[0099] The locking mechanism may be any locking mechanism that can lock the operator-side door 104 or the conveyor robot-side door 105 in the closed state.

[0100] For example, Fig. 14 is a diagram showing an example of the locking mechanism.

[0101] Fig. Figure 14 shows a magnetic locking mechanism 500 as an example of the locking mechanism. The magnetic locking mechanism 500 is a mechanism in which a shaft 501 protrudes when power is supplied, and the shaft 501 retracts when the power is interrupted. As shown in Fig. As shown in Figure 14, the operator-side door 104 is provided with a hole into which the shaft 501 can be inserted. In this case, the hole into which the shaft 501 is inserted may be provided in a component attached to the operator-side door 104.

[0102] For example, when the operator-side door 104 is closed, the magnetic locking mechanism 500 is configured to be energized so that the shaft 501 protrudes from the magnetic locking mechanism 500 and is inserted into the hole provided in the operator-side door 104. This causes the operator-side door 104 to be locked.

[0103] On the other hand, when the operator-side door 104 is opened, the power supply to the magnetic locking mechanism 500 is interrupted, so that the shaft 501 is drawn into the magnetic locking mechanism 500, thereby unlocking the operator-side door 104.

[0104] In this way, according to Modification Example 1, by providing a locking mechanism in the operator-side door 104, the operator-side door 104 can be forcibly held in the closed state. Consequently, according to Modification Example 1, it is possible to prevent a situation where there is no physical barrier between the operator and the conveyor robot 230.

[0105] The conveyor robot side door 105 is also provided with a locking mechanism having a similar configuration to the locking mechanism provided in the operator side door 104. Thus, even in the conveyor robot side door 105, the conveyor robot side door 105 can be forcibly held in the closed state. Therefore, by providing locking mechanisms on both the operator side door 104 and the conveyor robot side door 105, it is possible to reliably prevent a situation where there is no physical barrier between the operator and the conveyor robot 230. <Modifikationsbeispiel 2>

[0106] For example, in Fig. 10, the operation of opening the operator-side door 401a is performed under the condition that the conveyor robot-side door 402a is in a closed state. Similarly, the operation of opening the operator-side door 401b is performed under the condition that the conveyor robot-side door 402b is in a closed state.

[0107] Here, in Modification Example 2, a logic circuit that invalidates a command from the control unit 210 to open based on the output of a sensor that detects the closed state is mounted in the substrate conveying device 102.

[0108] Specifically, in Modification Example 2, in a case where the control unit 210 outputs a control signal for opening the operator-side door 401a when the output of the sensor (for example, the sensor head 340b in Fig. 13) which detects the closed state of the conveyor robot side door 402a is "OFF", the control signal output from the control unit 210 is invalidated by the logic circuit described above.

[0109] In this case, in a state where the operator-side door 401a and the conveyor robot-side door 402a are in the closed state, if the control unit 210 outputs a control signal for opening both doors simultaneously, it may not be possible to prevent both doors from being opened.

[0110] Thus, the output (control signal) from the control unit 210 for opening both the operator-side door 401a and the conveyor-robot-side door 402a is always set to give priority to the control for opening the conveyor-robot-side door 402a. In other words, when there is an output (control signal) from the control unit 210 that opens both the operator-side door 401a and the conveyor-robot-side door 402a, the output (control signal) from the control unit 210 for opening the operator-side door 401a is invalidated by the logic circuit described above. Thus, for example, even if the conveyor robot 230 extends its arm, it is possible to prevent damage to the conveyor robot 230 due to contact between the conveyor robot 230 and the conveyor-robot-side door 402a. <Modifikationsbeispiel 3>

[0111] In modification example 3, for example, Fig. 6, an example is described in which a safety interlock circuit is implemented in the substrate conveying device 102 to cut off the drive power supply to the conveying robot 230 when both the operator-side door 104 and the conveying robot-side door 105 are in the open state.

[0112] Here, the safety interlock circuit may have any circuit configuration as long as it is capable of interrupting the drive power supply of the conveyor robot 230 in association with both the operator-side door 104 and the conveyor robot-side door 105 being in the open state.

[0113] For example, one example of a safety interlock circuit is a safety interlock circuit that uses a mechanical relay. The mechanical relay is a component in which contacts come into contact when a current is passed through an operating coil, turning the relay contacts "ON." Here, the drive power supply for the conveyor robot 230 is connected to the relay contact. The input of the operating coil is connected to the output of a sensor that detects the closed state and is provided on both the operator-side door 104 and the conveyor robot-side door 105.

[0114] Thus, power is supplied to the conveyor robot 230 only while either the operator-side door 104 or the conveyor robot-side door 105 is in a closed state, and the conveyor robot 230 is configured to operate. In other words, according to Modification Example 3, when both the operator-side door 104 and the conveyor robot-side door 105 are in an open state, the power supply to the conveyor robot 230 is cut off. <Modifikationsbeispiel 4>

[0115] For example, in Modification Example 4, as in Fig. 15, an example will be described in which a light curtain 900 is provided to detect that an operator accesses the storage container mounting section 220.

[0116] The light curtain 900 is a device configured to detect access to the storage bin mounting section 220 from outside the device that accommodates the operator. The substrate conveying device 102 according to Modification Example 4 is configured not to close the operator-side door 104 while the light curtain 900 detects access to the storage bin mounting section 220 from outside the device that accommodates the operator. Further, the substrate conveying device 102 according to Modification Example 4 is configured to interrupt the closing operation of the operator-side door 104 when the light curtain 900 detects access to the storage bin mounting section 220 from outside the device that accommodates the operator while the operator-side door 104 is performing a closing operation.

[0117] Below, as for example in Fig. As shown in Figure 16, when different storage bin stands 221a and 221b are provided, a light curtain 900a is provided on the storage bin stand 221a, and a light curtain 900b is provided on the storage bin stand 221b. Thus, access to the storage bin stand 221a can be detected by the light curtain 900a, and access to the storage bin stand 221b can be detected by the light curtain 900b, so that the closing operations of the operator-side door 401a and the operator-side door 401b can be restricted based on the detection results by the light curtain 900a and the light curtain 900b. Therefore, according to Modification Example 4, it is possible to prevent the operator from being caught between the operator-side door 401a or the operator-side door 401b, thereby ensuring the safety of the operator.

[0118] Furthermore, for example, even if the light curtain 900a detects access to the storage bin rack 221a, if the light curtain 900b does not detect access to the storage bin rack 221b, it is possible to continue the closing operation of the operator-side door 401b and maintain the operator-side door 401b in a closed state. In other words, even if the light curtain 900a detects access during the closing operation of the operator-side door 401b, the closing operation of the operator-side door 401b continues without being stopped.

[0119] In this way, when different storage container stands 221a and 221b are provided, by providing the light curtain 900a for the storage container stand 221a and the light curtain 900b for the storage container stand 221b, it is possible to prevent unnecessary interruptions of the closing operation while ensuring the safety of the operator. <Modifikationsbeispiel 5>

[0120] In Modification Example 5, as in Fig. 15, an example will be described in which a light curtain 901 is provided to detect that the conveyor robot 230 accesses the storage container mounting section 220.

[0121] The light curtain 901 is a device configured to detect access to the storage container mounting section 220 by the conveyor robot 230. For example, even in Modification Example 5, an example in which the light curtain 901 is provided is described, but since the path through which the conveyor robot 230 accesses the storage container mounting section 220 is fixed, a photoelectric sensor or the like may be used instead of the light curtain 901.

[0122] The substrate conveying device 102 according to Modification Example 5 is configured not to close the conveying robot-side door 105 while the light curtain 901 detects the access to the storage container mounting section 220 by the conveying robot 230. Furthermore, the substrate conveying device 102 according to Modification Example 5 is configured to interrupt the closing operation of the conveying robot-side door 105 when the light curtain 901 detects the access to the storage container mounting section 220 by the conveying robot 230 while the conveying robot-side door 105 is performing a closing operation.

[0123] Below, as for example in Fig.As shown in Figure 16, when different storage bin stands 221a and 221b are provided, a light curtain 901a is provided on the storage bin stand 221a, and a light curtain 901b is provided on the storage bin stand 221b. Thus, access to the storage bin stand 221a can be detected by the light curtain 901a, and access to the storage bin stand 221b can be detected by the light curtain 901b, so that the closing operations of the conveyor robot-side door 402a and the conveyor robot-side door 402b can be restricted based on the detection results by the light curtain 901a and the light curtain 901b.

[0124] Therefore, according to Modification Example 5, it is possible to prevent the conveyance robot 230 from being caught between the conveyance robot side door 402a or the conveyance robot side door 402b, and thus damage to the conveyance robot 230 can be prevented.

[0125] Furthermore, for example, even if the light curtain 901a detects access to the storage bin rack 221a, if the light curtain 901b does not detect access to the storage bin rack 221b, it is possible to continue the closing operation of the conveyor robot-side door 402b and maintain the conveyor robot-side door 402b in a closed state. In other words, even if the light curtain 901a detects access during the closing operation of the conveyor robot-side door 402b, the closing operation of the conveyor robot-side door 402b continues without being stopped.

[0126] In this way, when different storage container stands 221a and 221b are provided, by providing the light curtain 901a for the storage container stand 221a and the light curtain 901b for the storage container stand 221b, it is possible to prevent damage to the conveyor robot 230 while also preventing unnecessary interruptions of the closing operation. <Modifikationsbeispiel 6>

[0127] For example, in order to correct the tolerances due to the storage container 200 being a molded product and the gap errors caused by the assembly errors of the substrate conveying device 102 and the conveying robot 230 during conveying, it is necessary to perform a process called "teaching" in which conveying parameters of the conveying robot 230 are set using the substrate conveying device 102 and the storage container 200 to be used.

[0128] "Teaching" is performed by a visual inspection by a service technician and requires that both the operator-side door 104 and the conveyor robot-side door 105 are open.

[0129] Therefore, the substrate conveying device 102 in Modification Example 6 is provided with a "teaching mode" that allows the operator to arbitrarily select the open or closed state of the door. Furthermore, the substrate conveying device 102 in Modification Example 6 is provided with an operator-side door open / close switch 104 and a conveyor robot-side door open / close switch 105, which can only be used in the "teaching mode."

[0130] When switching from the "operation mode" to the "teaching mode," the safety interlock circuit described in Modification Example 3 described above is deactivated, and the operator-side door 104 and the conveyor robot-side door 105 can be opened simultaneously. On the other hand, the monitoring of access to the storage bin mounting section 220 by the light curtain 900 described in Modification Example 4 described above and the monitoring of access to the storage bin mounting section 220 by the light curtain 901 described in Modification Example 5 described above continue in the "teaching mode."

[0131] This prevents the operator from being caught by the operator-side flap 104 even in the "teaching mode", thereby ensuring the safety of the operator, and prevents the conveyor robot 230 from being caught by the conveyor robot-side flap 105, thereby preventing damage to the conveyor robot 230.

[0132] The invention made by the inventor has been specifically described above based on its embodiments. However, it should be understood that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the invention. List of reference symbols 100 semiconductor inspection device 101 Semiconductor substrate processing unit 102 Substrate conveyor device 103 flap 104 operator-side flap 105 conveyor robot side flap 200 storage containers 201 semiconductor substrate 210 control unit 211 Pre-arranger 220 storage tank installation section 221 storage container stands 221a Storage container stand 221b Storage container stand 230 conveyor robots 240 upper opening 300 Base 310 cylinder rod 311 cylinder block 320 linear guide rail 321 Linear guide block 330 bracket 340a sensor head 340b sensor head 341a Actuator 341b Actuator 350 flap 400 partition wall 401a operator-side flap 401b operator-side flap 402a conveyor robot side flap 402b conveyor robot side flap 410 switches 450 open cassette 500 magnetic locking mechanism 501 Wave 900 light curtain 900a light curtain 900b light curtain 901 Light Curtain 901a light curtain 901b light curtain QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] JP 6822953B

[0002] JP 2016-58481A

[0002] JP 5825948B

[0002]

Claims

[1] Substrate conveying device comprising: a conveyor robot that conveys a substrate; a first installation section in which a first storage container for storing the substrate can be placed; a first closure mechanism configured to block a first access path when accessing the first storage container or the first installation section from outside the device; a second locking mechanism adapted to block a second access path when the conveyor robot accesses the first storage container; and a control unit that controls opening and closing operations of the first locking mechanism and the second locking mechanism. [2] The substrate conveying device according to claim 1, further comprising: a second installation section in which a second storage container can be placed; a third closure mechanism adapted to block a third access route when accessing the second storage container or the second installation section from outside the device; a fourth locking mechanism adapted to block a fourth access path when the conveyor robot accesses the second storage container; and a partition wall separating the first installation section and the second installation section. [3] Substrate conveying device according to claim 1, wherein in a state in which the first storage container with the substrate stored therein is placed on the first installation section, the control unit is configured to perform control to perform a transition from a first phase in which the first shutter mechanism is in an open state and the second shutter mechanism is in a closed state to a second phase in which the first shutter mechanism is closed, and then the second shutter mechanism is opened, thereby allowing the conveying robot to take out the substrate from the first storage container. [4] Substrate conveying device according to claim 3, wherein in a state in which the first storage container is provided on the first installation section without the substrate stored therein, when the substrate is loaded into the first storage container by the conveyor robot in the second phase, the control unit is configured to perform a transition from the second phase to a third phase in which the second shutter mechanism is closed and then the first shutter mechanism is opened. [5] The substrate conveying device according to claim 3, further comprising: a first switch that triggers the transition from the first phase to the second phase. [6] Substrate conveying device according to claim 3, wherein the control unit is configured to perform a transition from the second phase to a third phase in which the second closure mechanism is closed and then the first closure mechanism is opened, and the substrate conveying device further comprises a second switch that triggers the transition from the second phase to the third phase. [7] The substrate conveying device according to claim 2, wherein the control unit is configured to close the third shutter mechanism and open the fourth shutter mechanism when the first shutter mechanism is in an open state and the second shutter mechanism is in a closed state. [8] The substrate conveying device according to claim 2, wherein the control unit is configured to open the third shutter mechanism and close the fourth shutter mechanism when the first shutter mechanism is in a closed state and the second shutter mechanism is in an open state. [9] The substrate conveying device according to claim 1, further comprising: a first locking mechanism for forcibly holding the first locking mechanism in a closed state when the first locking mechanism is in a closed state; and a second locking mechanism for forcibly holding the second locking mechanism in a closed state when the second locking mechanism is in a closed state. [10] The substrate conveying device according to claim 1, further comprising: a first detection sensor that detects that the first access path is accessed from outside the device, wherein the control unit is configured to stop a closing operation of the first closure mechanism when it is detected, based on an output from the first detection sensor, that the first access path is accessed from outside the device during the closing operation of the first closure mechanism. [11] The substrate conveying device according to claim 1, further comprising: a second detection sensor that detects that the conveyor robot accesses the second access path, wherein the control unit is configured to stop a closing operation of the second shutter mechanism when it is detected, based on an output from the second detection sensor, that the conveyor robot accesses the second access path during the closing operation of the second shutter mechanism. [12] The substrate conveying device according to claim 1, wherein the first storage container is an open cassette. [13] The substrate conveying apparatus according to claim 1, wherein the substrate is a semiconductor wafer or a reticle.

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