Rotary cathode end block

Abstract

The present application discloses a rotary cathode end block. It comprises an end block housing in which a drive shaft is rotatably mounted via a bearing, one end of the drive shaft projecting from the end block housing and being rigidly connected to a target mounting flange; the end block housing being rigidly connected to a central support having a one-piece formed connecting shaft, one end of which coaxially penetrates the drive shaft and the target mounting flange; an electrical contact being coaxially slid onto the connecting shaft, with which the central support is electrically connected, the electrical contact being in contact with the drive shaft and the contact surface being configured as a conical surface. The present application is advantageously characterized by higher power transmission and a more reliable design.

Description

A rotating cathode terminal

[0001] Cross-references

[0002] This application claims priority to Chinese patent application No. 202211032345.6, filed on August 26, 2022, entitled “A Rotating Cathode Terminal Head for Conical Power Transmission,” all disclosures of which are incorporated herein by reference in their entirety. Technical Field

[0003] The present application relates to the technical field of vacuum coating equipment, and in particular to a rotating cathode end head. Background Art

[0004] Magnetron sputtering rotary large-area vacuum coating equipment features a rotating target during operation, resulting in high target utilization, a clean target surface, and minimal arcing. Because the target rotates, the vacuum coating equipment must have functions such as dynamic power transmission, cooling water dynamic seals, and vacuum dynamic seals.

[0005] In recent years, the development of this industry has placed an increasingly strong demand on achieving high-power, long-term, stable operation. Therefore, rotating magnetron sputtering cathodes are generally used in vacuum coating equipment to achieve dynamic transmission of electric power, dynamic sealing of cooling water, and dynamic vacuum sealing components. Therefore, rotating magnetron sputtering cathodes have become the core components of vacuum coating equipment.

[0006] In existing rotating magnetron sputtering cathodes, carbon brushes are used to achieve dynamic rotational transmission of electric power. That is, the carbon brushes are electrically contacted with the electric ring on the drive shaft that drives the target material to rotate, thereby achieving electrical connection between the target material and the external power supply through the carbon brushes. The characteristics of carbon brushes are complex structure, small electrical contact area, inability to transmit larger currents, and carbon powder generated by wear will damage the dynamic seal and insulation of the end.

[0007] Application Contents

[0008] In order to solve the technical problems existing in the background technology, the present application proposes a rotating cathode terminal to solve the problem of low transmission current in the electric power dynamic transmission component in the rotating magnetron sputtering cathode of the prior art.

[0009] The present application proposes a rotating cathode end head, comprising an end head housing, in which a conductive drive shaft is rotatably mounted via a bearing, one end of the drive shaft extending from the end head housing and fixedly connected to a conductive target material mounting flange;

[0010] The end housing is fixedly connected to a conductive central support, the central support has an integrally formed connecting shaft, one end of the connecting shaft coaxially passes through the drive shaft and the target mounting flange, and is connected to a magnetic rod;

[0011] A non-rotating electric contact is coaxially mounted on the connecting shaft. The central support is electrically connected to the electric contact. The central support and the electric contact are connected via a conductive belt. The electric contact contacts the driving shaft, and the contact surface is a conical surface.

[0012] A conductive strip is connected between the central support and the electrical contacts.

[0013] The connecting shaft is also provided with a spring located between the electric contact and the central support, and the spring provides force to keep the electric contact in close contact with the drive shaft.

[0014] The connecting shaft is provided with a pin hole along its radial direction, and a limit pin is installed in the pin hole. Both ends of the limit pin pass through the pin hole; the electric contact is provided with a guide groove along its axial direction, and the electric contact can slide with the limit pin through the guide groove.

[0015] The end of the electric contact is a tapered surface, a tapered hole is formed inside the drive shaft, the electric contact is arranged in the drive shaft, and the tapered surface of the end of the electric contact contacts the tapered inner hole wall of the tapered hole in the drive shaft.

[0016] The terminal shell is conductive, a conductive plate is fixedly connected to the terminal shell, an insulating plate and a connection block are fixedly connected to the conductive plate, a terminal base is fixedly connected to the insulating plate, and the connection block passes through the insulating plate and the terminal base.

[0017] A belt is wound around the shaft body of the driving shaft, the belt passes through the end shell, and is connected to the external motor through a pulley.

[0018] The rotary cathode terminal also includes a workbench, the terminal base is fixedly connected to the workbench, and the belt and the power connection block pass through the workbench.

[0019] A vacuum rotary dynamic seal is installed between one end of the driving shaft passing through the outside of the end head shell and the end head shell.

[0020] A first target locking clamp is installed on the outer edge of the target mounting flange.

[0021] The rotating cathode end head is also used to be installed on a head at one end of the target material.

[0022] Two water joints are fixedly connected to the end shell, and there is an annular gap between the drive shaft and the connecting shaft. One of the water joints is connected to the annular gap. A first water channel connected to the annular gap is provided on the drive shaft, and a through hole connected to the first water channel is provided on the target mounting flange; a second water channel is provided in the head, the connecting shaft is a hollow shaft, and an orifice connected to the inside of the connecting shaft is provided on the circumferential surface of the central support, and the other water joint is connected to the orifice; a cooling water dynamic seal is installed between one end of the drive shaft located inside the end shell and the inner wall of the end shell.

[0023] A second target material locking clamp is installed on the outer edge of the head.

[0024] The rotary cathode end head also includes a supporting end, and the sealing head is rotatably mounted on the supporting end.

[0025] The present application proposes a rotating cathode terminal, which is used to rotate a target material with a magnetic rod inside and electrically connect it to an external power supply. The terminal includes a drive shaft for connecting the target material to drive the target material to rotate. The drive shaft is made of a conductive material and also includes an electric contact for achieving electrical connection. One of the electric contact and the drive shaft is formed with a conical hole portion and the other is formed with a conical surface. The electric contact and the drive shaft maintain electrical contact with the conical hole portion through the conical surface, and the electric contact does not rotate with the drive shaft. The external power supply is electrically connected to the target material through the electric contact and the drive shaft in sequence.

[0026] The end of the electric contact is formed into a conical surface. The interior of the drive shaft is hollow and formed with a conical hole. The electric contact is arranged in the drive shaft, and the conical surface of the electric contact maintains electrical contact with the hole wall of the conical hole of the drive shaft.

[0027] The electric contacts and the drive shaft are both made of conductive metal materials, wherein the hardness of the drive shaft material is greater than that of the electric contacts.

[0028] The rotating cathode terminal also includes a conductive terminal housing, the drive shaft is rotatably mounted in the terminal housing, one end of the drive shaft passes through the terminal housing and is fixedly connected to one end of the target material, and the other end of the target material is mounted with an end seal, the end seal and the other end of the target material are relatively rotated, or the end seal rotates with the target material;

[0029] A conductive central support is also fixed in the end shell, and a connecting shaft is fixedly connected to the center of the central support. The connecting shaft passes through the drive shaft and the end of the connecting shaft is fixedly connected to one end of the magnetic rod inside the target material; the electric contact is non-rotatingly mounted on the connecting shaft, and the electric contact is electrically connected to the central support, and the external power supply is electrically connected to the target material through the end shell, the central support, the electric contact, and the drive shaft in sequence.

[0030] The electrical contacts are electrically connected to the central support via a plurality of conductive strips.

[0031] A spring is sheathed outside the connecting shaft between the central support and the electric contact, and the spring provides force to keep the conical surface of the electric contact in electrical contact with the wall of the conical hole portion of the drive shaft.

[0032] The connecting shaft is a hollow shaft, and the central support side is provided with an orifice connected to the interior of the connecting shaft; there is an annular gap between the outer wall of the connecting shaft and the inner wall of the driving shaft, and a first water channel is provided in the shaft wall of the driving shaft, one end of the first water channel is connected to the annular gap between the connecting shaft and the driving shaft, and the other end of the first water channel is connected to the interior of the target material; a second water channel is provided in the end seal, one end of the second water channel is connected to the interior of the target material, and the other end of the second water channel is connected to the interior of the hollow magnetic rod, and the interior of the magnetic rod is also connected to the interior of the connecting shaft; a pair of water joints are installed on the end head shell, one end of one water joint is connected to the annular gap between the connecting shaft and the driving shaft, and the other water joint is connected to the orifice on the central support side.

[0033] There is an annular gap between the inner wall of the end head shell and the drive shaft. A vacuum rotating dynamic seal is fixed at one end of the annular gap, and a cooling water dynamic seal is fixed at the other end of the annular gap. The cooling water dynamic seal and the vacuum rotating dynamic seal form a seal for the annular gap between the end head shell and the drive shaft.

[0034] A belt is wound around the driving shaft, and the belt passes through the end shell and is connected to an external pulley.

[0035] In the present application, the drive shaft and the electric contact are in contact with each other through a conical surface, and are both made of conductive metal materials. The preload force of the spring is used to make the electric contact and the conical surface of the conical hole of the drive shaft in close contact. The electric contact is used as the input of electric power, and the drive shaft and the target material are connected and rotated synchronously. Since the electrical contact area of ​​the conical surface is much larger than that of the flat surface, it can transmit a larger current, so that dynamic rotation of the target material can be powered by high power. In addition, the taper has good guidance and the contact surface will not be worn off. The friction surfaces of the two are in flowing cooling water, and the heat generated will be taken away by the cooling water in time.

[0036] The electrical contacts are made of wear-resistant metal, such as copper, which exhibits less wear than carbon brushes and prolongs their lifespan. The drive shaft and its tapered bore are made of a harder metal. Furthermore, the cooling water in the present invention flows through the annular gap between the drive shaft and the electrical contacts to the rotating interface between them. Any material generated by wear is carried away by the cooling water, eliminating pollution.

[0037] In this application, the dynamic transmission of electrical power, the dynamic sealing of cooling water, and the dynamic vacuum seal are all integrated into the end housing. An end seal can be fixed to the other end of the target, which rotates with the target, thus forming a cantilevered rotating structure. Alternatively, the other end of the target can be mounted on the end seal for relative rotation, while the end seal remains stationary, also forming a rotating structure. Regardless of the rotating structure, only the cooling water supply, sealing, drive, and electrical connections need to be made at the end housing, simplifying the overall structure.

[0038] Compared with the existing technology, the advantages of this application are greater transmission power and more reliable structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] FIG1 is a schematic structural diagram of a rotating cathode terminal in an embodiment of the present application.

[0040] FIG2 is a schematic structural diagram of a rotating cathode end head according to another embodiment of the present application.

[0041] FIG3 is an assembly diagram of the central support and electrical contacts of the present application.

[0042] FIG4 is a partial schematic diagram of a rotating cathode terminal of the present application. DETAILED DESCRIPTION

[0043] 1-4 , a rotating cathode tip according to an embodiment of the present application is used to rotate a hollow target 26 and electrically connect the target 26 to an external power source during rotation. A hollow magnetic rod 25 is disposed within the target 26 to provide the magnetic force required for magnetron sputtering.

[0044] As shown in Figure 1, this embodiment is fixed as a whole to the bottom of the workbench 11 (the workbench 11 can also be called a cover or door panel), and specifically includes a conductive terminal housing 17. The terminal housing 17 is cylindrical with its axis arranged horizontally in the left-right direction, and the left and right ends of the terminal housing 17 are both cylindrical openings. A conductive plate 15 is fixed to the top of the terminal housing 17 by mounting screws. An insulating plate 14 is fixed to the conductive plate 15. A terminal base 13 is fixed to the insulating plate 14. The terminal base 13 is fixed to the bottom of the workbench 11 by connecting screws. A power connection block 9 is electrically connected and fixed to the conductive plate 15. The power connection block 9 passes through the insulating plate 14, the terminal base 13, and the workbench 11 in sequence and is electrically connected to an external power source. Two water connectors 10 are also fixed to the terminal housing 17. The upper ends of the two water connectors 10 pass through the conductive plate 15, the insulating plate 14, the terminal base 13, and the workbench 11 in sequence and are connected to an external water source.

[0045] Two bearings 19 are coaxially mounted on the left and right sides of the end housing 17. Specifically, the outer rings of the bearings 19 are fixed to the inner wall of the end housing 17. A drive shaft 20 is coaxially mounted in the end housing 17 via the bearings 19. This electrically conductive drive shaft 20 is rotatably mounted therein. Specifically, portions of the drive shaft 20 are fixed to the inner rings of the two bearings 19. A gap is defined between the drive shaft 20 and the end housing 17. A cooling water dynamic seal 18, which fits around the drive shaft 20, is fixed to the left end of the gap. A vacuum rotary dynamic seal 21, which fits around the drive shaft 20, is fixed to the right end of the gap. The cooling water dynamic seal 18 and the vacuum rotary dynamic seal 21 form a seal between the end housing 17 and the drive shaft 20. The drive shaft 20 is located between two bearings 19 and has a belt 12 wound around it. The belt 12 passes through the terminal housing 17, the conductive plate 15, the insulating plate 14, the terminal base 13, and the workbench 11 in sequence and is connected to the belt 12 pulley driven by an external motor. The external motor can drive the drive shaft 20 to rotate through the belt 12.

[0046] It is worth mentioning that the drive shaft 20 can also be driven by other methods that can be obtained by those skilled in the art without any creative work. For example, the rotation of the drive shaft 20 can be controlled by an external motor linked to a gear transmission.

[0047] The right end of the drive shaft 20 passes through the right opening of the end housing 17 and is fixedly connected to a target mounting flange 22. A first target locking clamp 23 is elastically and rotatably mounted on the outer edge of the target mounting flange 22. The target 26 is arranged horizontally along the left-right axis. The target 26 is hollow and has openings on both the left and right ends. The target mounting flange 22, connected to the right end of the drive shaft 20, is installed in the left opening of the target 26, sealing it. The first target locking clamp 23 then clamps the outer edge of the left opening of the target 26 to secure it. A conical hole portion 20.1 is formed on the right side of the driving shaft 20, and the left side of the conical hole portion 20.1 is a conical inner hole. A first water channel is formed on the right side wall of the driving shaft 20, and the left end of the first water channel is connected to the interior of the driving shaft 20 on the left side of the conical hole portion 20.1. A through hole is provided in the target mounting flange 22 that passes through the left and right sides. The right end of the first water channel is connected to the left end opening 1.2 of the through hole of the target mounting flange 22, and the right end opening 1.2 of the through hole of the target mounting flange 22 is connected to the left end opening of the target 26, thereby connecting the interior of the driving shaft 20 with the interior of the target 26 through the first water channel and the through hole of the target mounting flange 22.

[0048] As shown in Figure 1, a support end 28 is fixed at the bottom of the workbench 11 corresponding to the opening position of the right end of the target material 26. A head 30 is installed to seal the right end opening of the target material 26. The head 30 is rotatably installed on the support end 28, and a second target locking clamp 27 is elastically rotatably installed on the outer edge of the head 30. The outer edge of the opening of the right end of the target material 26 is clamped by the second target locking clamp 27 to form a fixation. At this time, the end sealing part of the right end of the target material 26 is formed by the support end 28, the head 30, and the second target locking clamp 27, and the end sealing part cooperates with the right end of the drive shaft 20 to jointly support the rotation of the target material 26.

[0049] The interior of the seal 30 is hollow, forming a second water channel. One end of the second water channel communicates with the interior of the target 26, and the other end of the second water channel is located in the center of the seal 30, forming a central through-hole. The magnetic rod 25 inside the target 26 is also arranged horizontally along the left-right axis, with openings at both the left and right ends. The right end of the magnetic rod 25 is rotatably mounted in the central through-hole of the seal 30, thereby supporting the right end of the magnetic rod 25. The magnetic rod 25 communicates with the second water channel in the seal 30 through its right end opening, and can then communicate with the interior of the target 26 through the second water channel.

[0050] As another alternative embodiment, as shown in Figure 2, the difference is that the supporting end 28 is eliminated, and only a head 30 with a second water channel inside is plugged into the right end opening of the target material 26, thereby supporting and fixing the target material 26 only at the left end of the target material 26, thereby forming a cantilever structure of the target material 26.

[0051] As shown in Figure 3, a conductive central support 1 is coaxially fixed within the left opening of the end housing 17. A connecting shaft 1.1 is coaxially formed in the center of the right side of the central support 1. This connecting shaft 1.1 is hollow, with an opening at its right end. This opening extends coaxially rightward through the interior of the drive shaft 20 and its tapered hole 20.1, then through the target mounting flange 22 and into the left opening of the magnetic rod 25. This not only supports the left end of the magnetic rod 25 but also connects the left opening of the magnetic rod 25 to the interior of the connecting shaft 1.1. A hole 1.2 is provided on the side of the central support 1. One end of this hole 1.2 connects to the interior of the connecting shaft 1.1, and the other end connects to the interior of the end housing 17. Through the hollow connecting shaft 1.1 and the hole 1.2 on the side of the central support 1, the interior of the magnetic rod 25 is connected to the interior of the end housing 17 at the position corresponding to the hole 1.2.

[0052] An electrical contact 2 is coaxially mounted on the connecting shaft 1.1. The right end of the electrical contact 2 is configured as a tapered surface. Multiple conductive strips 3 are positioned between the central support 1 and the electrical contact 2. Each conductive strip 3 is secured to the central support 1 at one end and to the electrical contact 2 at the other end via a set screw. Each conductive strip 3 exhibits a certain degree of elastic deformation. A spring 4 is sleeved around the outer ring of the connecting shaft 1.1 between the electrical contact 2 and the central support 1. One end of the spring 4 contacts or is secured to the surface of the central support 1, while the other end of the spring 4 contacts or is secured to the left end of the electrical contact 2. The tapered surface at the right end of the electrical contact 2 matches the tapered inner wall of the tapered hole 20.1 within the drive shaft 20, maintaining electrical contact between the two surfaces. The elastic force of the spring 4 compresses the tapered surface of the electrical contact 2 against the inner wall of the tapered hole 20.1, ensuring consistent electrical contact.

[0053] As a preferred technical solution, the electric contact 2 is located on the drive shaft 20, which can help save space and make the structure compact. Those skilled in the art will understand that as long as the electric contact 2 and the drive shaft 20 are in contact through a tapered surface, the purpose of increasing the transmission current can be achieved. In a specific embodiment, the specific position of the contact between the electric contact 2 and the drive shaft 20 can also adopt other implementations. For example, the end of the electric contact 2 can be in contact with the end of the drive shaft 20, one end of which is a convex tapered surface and the other end is a concave tapered hole, which can also achieve the effect of contact through the tapered surface.

[0054] Referring to Figure 4, in order to prevent the electric contact 2 on the connecting shaft 1.1 from rotating, the connecting shaft 1.1 is provided with a pin hole 1.3 along its radial direction, and a limit pin 6 is installed in cooperation with the connecting shaft 1.1 through the pin hole 1.3, and both ends of the limit pin 6 pass through the pin hole 1.3; the electric contact 2 is provided with a guide groove 7 along its axial direction, and the electric contact 2 can slidably cooperate with the limit pin 6 passing through the two ends of the pin hole 1.3 through the guide groove 7, thereby preventing the electric contact 2 from rotating on the connecting shaft 1.1 through the limit pin 6, thereby preventing the electric contact 2 from rotating under the action of friction when the drive shaft 20 rotates.

[0055] As another alternative embodiment, a pin hole extending through the side wall of the electrical contact is threaded within the inner wall. A retaining pin is inserted into the pin hole, and a flat washer is provided between the cap of the retaining pin and the pin hole. The head of the retaining pin presses against a corresponding position on the outer wall of the connecting shaft. This retaining pin prevents the electrical contact from rotating on the connecting shaft, thereby preventing the electrical contact from rotating due to friction when in contact with the tapered hole of the drive shaft.

[0056] In the embodiment of the present application, when the drive shaft 20 rotates, it drives the target 26 to rotate, while the connecting shaft 1.1, the electrical contact 2, and the magnetic rod 25 remain stationary. During rotation, the target 26 is electrically connected to the power connection block 9 through the drive shaft 20, the electrical contact 2, the central support 1, the end housing 17, and the conductive plate 15, and is then electrically connected to the external power supply through the power connection block 9.

[0057] Therefore, in this embodiment, the power cable supplying the cathode is connected to the power connection block 9. Current is statically transmitted to the electrical contact 2 through the power connection block 9, the conductive plate 15, the end housing 17, the central support 1, and the conductive belt 3. All of these components remain stationary during operation. During operation, the drive component drives the belt 12, which in turn rotates the drive shaft 20. The tapered surface of the drive shaft 20 mates with the tapered surface of the electrical contact 2, enabling dynamic rotational transmission of electrical power from the tapered electrical contact 2 to the drive shaft 20. The drive shaft 20 is fixedly connected to the target mounting flange 22, which is in turn connected to the target 26, thereby enabling dynamic rotational transmission of electrical power to the target 26.

[0058] In this embodiment, the tapered angles of the tapered electric contact 2 and the drive shaft 20 can be any angles according to the size of the space, so as to increase the electric power rotation contact area and achieve the guiding and positioning function of the electric contact 2.

[0059] On the left side of the tapered hole 20.1, there is an annular gap between the outer wall of the connecting shaft 1.1 and the inner wall of the driving shaft 20. The left end of the first water channel in the driving shaft 20 is specifically connected to the annular gap on the left side of the tapered hole 20.1.

[0060] Of the two water connectors 10 on the end housing 17, the lower end of one water connector 10 is connected to the annular gap through the interior of the end housing 17, and the lower end of the other water connector 10 is connected to the side opening 1.2 of the central support 1 through the interior of the end housing 17, thereby forming a water circuit.

[0061] In this embodiment, the cooling water enters the annular gap between the connecting shaft 1.1 and the driving shaft 20 through one of the water joints 10 (as shown by path A in FIG3 ), then enters the first water channel of the driving shaft 20 from the annular gap (as shown by path B in FIG3 ), then enters the interior of the target 26 from the through hole of the target mounting flange 22 (as shown by path C in FIG3 ), then enters the interior of the magnetic rod 25 through the second water channel in the head 30 (as shown by path D in FIG3 ), then enters the side opening 1.2 of the central support 1 through the interior of the connecting shaft 1.1 (as shown by path E in FIG3 ), and finally enters the other water joint 10 from the side opening 1.2 of the central support 1. Both water joints 10 are connected to an external cooling water source, thereby forming a circulating water path for the cooling water.

[0062] Those skilled in the art will understand that, one of the two water connectors 10 can be selected as the water inlet end and the other as the water outlet end. Therefore, when the two water connectors 10 switch the water inlet end and the water outlet end, the circulation direction of the cooling water will be opposite to the direction of the above-mentioned path (A→B→C→D→E).

[0063] In this embodiment, the conical surfaces of the electric contact 2 and the drive shaft 20 are both located in the flow path of the cooling water, so that the heat and materials generated by wear can be taken away by the cooling water.

[0064] In this embodiment, the cooling water dynamic seal 18 provides a dynamic rotary water seal between the cooling water channel and the bearing 19 on the atmosphere side. The vacuum rotary dynamic seal 21 provides a dynamic rotary vacuum seal between the bearing 19 on the atmosphere side and the target 26 on the vacuum side. The insulating plate 14 is made of a high-voltage-resistant insulating material and provides insulation between the tip base 13 and the conductive plate 15.

[0065] The above is only a preferred specific implementation method of the present application, but the scope of protection of the present application is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes based on the technical solution and application concept of the present application within the technical scope disclosed in the present application, and they should be covered by the scope of protection of the present application.

Claims

1. A rotary cathode end cap, comprising an end cap housing (17), a drive shaft (20) being rotatably mounted in the end cap housing (17) via a bearing (19), one end of the drive shaft (20) passing through the end cap housing (17) and being fixedly connected to a target material mounting flange (22); The end housing (17) is fixedly connected to a central support (1), and the central support (1) has an integrally formed connecting shaft (1.1), one end of which coaxially passes through the drive shaft (20) and the target mounting flange (22); An electric contact (2) is coaxially mounted on the connecting shaft (1.1), the central support (1) is electrically connected to the electric contact (2), the electric contact (2) is in contact with the driving shaft (20), and the contact surface is a conical surface.

2. The rotating cathode terminal according to claim 1, wherein a conductive strip (3) is connected between the central support (1) and the electrical contact (2).

3. According to the rotating cathode terminal according to claim 1, a spring (4) is mounted on the connecting shaft (1.1) and is located between the electric contact (2) and the central support (1), and the spring (4) provides force to keep the electric contact (2) in close contact with the drive shaft (20).

4. According to the rotating cathode terminal according to claim 3, the connecting shaft (1.1) is provided with a pin hole (1.3) along its radial direction, and a limit pin (6) is installed in conjunction with the pin hole (1.3), and both ends of the limit pin (6) pass through the pin hole (1.3); the electric contact (2) is provided with a guide groove (7) along its axial direction, and the electric contact (2) can slide with the limit pin (6) through the guide groove (7).

5. According to the rotating cathode terminal according to claim 1, the end of the electric contact (2) is a conical surface, a conical hole portion (20.1) is formed inside the drive shaft (20), the electric contact (2) is arranged in the drive shaft (20), and the conical surface of the end of the electric contact (2) contacts the conical inner hole wall of the conical hole portion (20.1) in the drive shaft (20).

6. The rotating cathode terminal according to claim 1, the terminal shell (17) is conductive, a conductive plate (15) is fixedly connected to the terminal shell (17), an insulating plate (14) and a power connection block (9) are fixedly connected to the conductive plate (15), the insulating plate (14) is fixedly connected to the terminal base (13), and the power connection block (9) passes through the insulating plate (14) and the terminal base (13).

7. The rotary cathode terminal according to claim 6, wherein a belt (12) is wound around the shaft of the drive shaft (20), and the belt (12) passes through the terminal housing (17).

8. The rotary cathode terminal according to claim 7 further comprises a workbench (11), the terminal base (13) is fixedly connected to the workbench (11), and the belt (12) and the power connection block (9) pass through the workbench (11).

9. The rotary cathode terminal according to claim 1, wherein a vacuum rotary dynamic seal (21) is installed between one end of the drive shaft (20) passing through the outside of the terminal housing (17) and the terminal housing (17).

10. The rotary cathode terminal according to claim 1, wherein a first target locking clamp (23) is installed on the outer edge of the target mounting flange (22).

11. The rotating cathode tip according to claim 1, further comprising a sealing head (30) for mounting on one end of the target material (26).

12. The rotating cathode terminal according to claim 11, has two water joints (10) fixedly connected to the terminal housing (17), an annular gap is provided between the drive shaft (20) and the connecting shaft (1.1), one of the water joints (10) is connected to the annular gap, a first water channel connected to the annular gap is provided on the drive shaft (20), and a through hole connected to the first water channel is provided on the target mounting flange (22); a second water channel is provided in the head (30), the connecting shaft (1.1) is a hollow shaft, and the circumferential surface of the central support (1) is provided with an orifice (1.2) connected to the inside of the connecting shaft (1.1), and the other water joint (10) is connected to the orifice (1.2); a cooling water dynamic seal (18) is installed between one end of the drive shaft (20) located inside the terminal housing (17) and the inner wall of the terminal housing (17).

13. The rotary cathode end cap according to claim 11, wherein a second target material locking clamp (27) is installed on the outer edge of the end cap (30).

14. The rotary cathode terminal according to claim 11, further comprising a supporting end (28), wherein the sealing head (30) is rotatably mounted on the supporting end (28).

15. A rotating cathode terminal, used to rotate a target material (26) having a magnetic rod (25) inside and electrically connected to an external power supply, comprising a drive shaft (20) for connecting to the target material (26) to drive the target material (26) to rotate, the drive shaft (20) being made of a conductive material, and also comprising an electric contact (2) for achieving electrical connection, wherein one of the electric contact (2) and the drive shaft (20) is formed with a conical hole portion (20.1) and the other is formed with a conical surface, the electric contact (2) and the drive shaft (20) maintain electrical contact with the conical hole portion (20.1) through the conical surface, and the electric contact (2) does not rotate with the drive shaft (20), and the external power supply is electrically connected to the target material (26) through the electric contact (2) and the drive shaft (20) in sequence.

16. The rotating cathode terminal according to claim 15, wherein the end of the electric contact (2) is formed into a conical surface, the interior of the drive shaft (20) is hollow and formed with a conical hole portion (20.1), the electric contact (2) is arranged in the drive shaft (20), and the conical surface of the electric contact (2) maintains electrical contact with the hole wall of the conical hole portion (20.1) of the drive shaft (20).

17. The rotating cathode terminal according to claim 15, wherein the electric contact (2) and the drive shaft (20) are both made of conductive metal materials, wherein the hardness of the drive shaft (20) material is greater than the hardness of the electric contact (2) material.

18. The rotating cathode terminal according to claim 16, further comprising a conductive terminal housing (17), wherein the drive shaft (20) is rotatably mounted in the terminal housing (17), one end of the drive shaft (20) passes through the terminal housing (17) and is fixedly connected to one end of the target material (26), and an end seal is mounted on the other end of the target material (26), wherein the end seal and the other end of the target material (26) are relatively rotatably matched, or the end seal rotates with the target material (26); A conductive central support (1) is also fixed in the end housing (17), and a connecting shaft (1.1) is fixedly connected to the center of the central support (1), the connecting shaft (1.1) passes through the drive shaft (20), and the end of the connecting shaft (1.1) is fixedly connected to one end of a magnetic rod (25) inside the target material (26); the electric contact (2) is non-rotatably mounted on the connecting shaft (1.1), and the electric contact (2) is electrically connected to the central support (1), and an external power supply is electrically connected to the target material (26) through the end housing (17), the central support (1), the electric contact (2), the drive shaft (20) in sequence.

19. The rotating cathode terminal according to claim 18, wherein the electrical contacts (2) are electrically connected to the central support (1) via a plurality of conductive strips (3).

20. The rotating cathode terminal according to claim 18, wherein a spring (4) is sheathed around the connecting shaft (1.1) between the central support (1) and the electrical contact (2), and the spring (4) provides force to keep the conical surface of the electrical contact (2) in electrical contact with the wall of the conical hole portion (20.1) of the drive shaft (20).

21. The rotary cathode terminal according to claim 18, wherein the connecting shaft (1.1) is a hollow shaft, and a hole (1.2) is provided on the side of the central support (1) and is connected to the interior of the connecting shaft (1.1); there is an annular gap between the outer wall of the connecting shaft (1.1) and the inner wall of the drive shaft (20), and a first water channel is provided in the shaft wall of the drive shaft (20), one end of the first water channel is connected to the annular gap between the connecting shaft (1.1) and the drive shaft (20), and the other end of the first water channel is connected to the interior of the target material (26); a second water channel is provided in the end seal portion, one end of the second water channel is connected to the interior of the target material (26), and the other end of the second water channel is connected to the interior of the hollow magnetic rod (25), and the interior of the magnetic rod (25) is also connected to the interior of the connecting shaft (1.1); A pair of water connectors (10) are mounted on the end housing (17), one end of one of the water connectors (10) being connected to the annular gap between the connecting shaft (1.1) and the drive shaft (20), and the other water connector (10) being connected to a side opening (1.2) of the central support (1).

22. According to the rotating cathode terminal according to claim 18, there is an annular gap between the inner wall of the terminal shell (17) and the drive shaft (20), a vacuum rotating dynamic seal (21) is fixed at one end of the annular gap, and a cooling water dynamic seal (18) is fixed at the other end of the annular gap, and the cooling water dynamic seal (18) and the vacuum rotating dynamic seal (21) form a seal on the annular gap between the terminal shell (17) and the drive shaft (20).

23. The rotary cathode terminal according to claim 18, wherein a belt (12) is wound around the drive shaft (20), and the belt (12) passes through the terminal housing (17).

Images