Planar drive system and use of the planar drive system

Abstract

Planar drive system (10) comprising a stator (100) and at least one movable element (200), in particular a transport body (200), wherein the planar drive system (10) is configured to drive the at least one movable element (200) in a controlled manner relative to the stator (100), wherein: - the stator has a plurality of movably arranged actuating magnets (26), each of which is connected to the stator (100) via an actuating element (114), wherein the actuating element (114) is configured to change a position and / or an orientation of the actuating magnets (26) connected thereto relative to the stator (100) in a controlled manner; - the at least one movable element (200) has at least two stationary magnets (22) which are connected to the movable element (200) in such a way that the at least two stationary magnets (22) are immovable relative to the movable element (200); - the stator (100) and the at least one movable element (200) are magnetically coupled by means of the at least two stationary magnets (22) and the plurality of actuating magnets (26); and - the planar drive system (10) is configured to drive the at least one movable element (200) by means of the actuating elements (114) relative to the stator (100) by means of a controlled positioning and / or orientation of the plurality of actuating magnets (26) of the stator (100), or - the at least one movable element (200) has a plurality of movably arranged actuating magnets (26), each of which is connected to the movable element (200) via an actuating element (114), wherein the actuating element (114) is configured to change a position and / or an orientation of the actuating magnet (26) connected thereto relative to the movable element (200) in a controlled manner; - the stator (100) has at least two stationary magnets (22) which are connected to the stator (100) in such a way that the at least two stationary magnets (22) are immovable relative to the stator (100); - that the at least one movable element (200) and the stator (100) are magnetically coupled by means of the at least two stationary magnets (22) and the plurality of actuating magnets (26); and - the planar drive system (10) is configured to drive the at least one movable element (200) by means of the actuating element (114) relative to the stator (100) through a controlled positioning and / or orientation of the plurality of actuating magnets (26) of the movable element (200).

Description

[0001] The present invention relates to a planar drive system. A planar drive system enables the precise and controlled movement and positioning of transport bodies in a workspace that extends predominantly along a single plane (planar). The movement and positioning preferably occur in six degrees of freedom (three translational, three rotational).

[0002] The invention also relates to applications of the planar drive system. The partially unique technical features open up a wide range of applications and enable advantageous machine concepts and solutions. State of the art

[0003] The applicant's published application DE 10 2016 224 951 A1 describes a conveying device for the controlled, suspended movement of a transport body (e.g., workpiece carrier) relative to a stator. In contrast to existing systems, which often have limited freedom of movement and are susceptible to power outages, the conveying device enables full magnetic levitation with six degrees of freedom (three translational degrees of freedom and three rotational degrees of freedom) according to a specified target. The conveying device comprises a stator with movably arranged actuating magnets and a transport body with permanently connected stationary magnets. The stator forms the basis of the system and is a stationary, predominantly flat platform across whose surface the workspace extends. The position of the actuating magnets in the stator is precisely controlled by actuating elements with drive, sensor, and control elements.

[0004] To maximize the magnetic coupling between the magnet arrangements in the stator and the transport body, Halbach arrays are often used. A Halbach array is a special planar arrangement of permanent magnets whose field is amplified on one side of the array and almost canceled out on the other.

[0005] By controlled changes in the position and / or orientation of the positioning magnets, the transport body is moved and positioned without contact. The magnetic coupling between the positioning and stationary magnets enables contactless transmission of forces and torques, enabling both levitation and the movement and positioning of the transport body.

[0006] A position determination unit records the current position and orientation of the transport body relative to the stator and sends this information to an electronic controller. This controller executes a position control algorithm. It receives a target position from a higher-level system and moves the transport body to this target position by controlling the position of the actuators, thereby exerting a target force and torque on the transport body.

[0007] The algorithm is executed cyclically and comprises several steps. Among other things, the target force and torque to be applied to the transport body are determined to minimize the positional deviation. Furthermore, using a physical model of the magnet arrangement, the actual force and torque acting on the transport body are determined. The target position of the actuators is then calculated to minimize the difference between the actual force and the target force, as well as between the actual torque and the target torque.

[0008] An algorithm referred to as an “observer” can use the position, force and moment information available as a time series to determine the loading state of the transport body, in particular with the help of a physical model, for example the determination of the mass or the determination of the center of gravity of the transport body, including the transported goods.

[0009] The stator of the planar drive system has a modular design. Each individual stator module is referred to as a tile. By arranging several tiles in a flat grid, a coherent planar working space for the transport bodies is created over the effective surface of the tiles.

[0010] The stator can be operated in any direction relative to gravity, for example, horizontally in tabletop mode (the transport body hovers above the stator's effective surface), vertically in wall-mounted mode (the transport body hovers next to the stator's effective surface), or in ceiling-mounted mode (the transport body hovers below the stator's effective surface). The planar drive system can also be operated in an accelerated reference frame or in zero gravity.

[0011] Another published patent application, DE 10 2018 209 401 A1 by the applicant, describes a method for transporting goods using at least one transport body on a stator, whereby the system is transferred to a safe state in the event of a power failure. The transport body and stator are equipped with permanent magnets. The permanent magnets in the stator are rotatably mounted on the axis of an actuating element. When de-energized, the frictional and cogging forces of the actuating element are so low that the permanent magnets in the stator align under the influence of the magnetic field of the transport body, thereby maximizing the force of attraction between the transport body and stator. This leads to a strong attraction of the transport body to the stator, so that it briefly lands on the stator and is decelerated to a standstill by the frictional forces.The transport body then remains attached to the surface and is thus protected from uncontrolled falling.

[0012] The applicant's published patent application DE 10 2020 212 641 A1 discloses a conveying device with transport bodies that are magnetically levitated and can be moved and positioned in six degrees of freedom above the surface of a stator, wherein an optical device for position detection is provided. The position detection device comprises at least one camera module, which is preferably integrated in the transport body, and a flat code arrangement, which is preferably attached to the surface of the stator. The camera module captures a section of the code arrangement and uses this to determine the absolute position of the transport body relative to the stator in six degrees of freedom (X, Y, Z, rot_X, rot_Y, rot_Z). The determined position data is transmitted to the controller of the planar drive system. The controller uses this information to execute the position control algorithm and guide the transport body to the target position.

[0013] The applicant's published patent application DE 10 2018 006 259 A1 discloses the use of the conveying device in semiconductor manufacturing. The prior art conveying device is used to transport a wafer using a transport body. The transport body carries or holds the wafer and is moved across a conveying surface. The application enables flexible and precise wafer handling in semiconductor manufacturing through the contactless, magnetically levitated movement of the transport body.

[0014] One advantage lies in the flexible, multi-dimensional movement of the at least one transport body, which, in contrast to conventional handling systems, allows the simultaneous transport of multiple wafers, as well as overtaking of wafers and frictionless movement without particle ingress. This is achieved by magnetic levitation, which is enabled by the interaction of actuating magnets in the stator and stationary magnets on the transport body. The published application describes various embodiments of the conveying device, including various arrangements of stationary magnets on the transport body (e.g., linear, square, hexagonal, circular arrangements, Halbach arrays) and actuating magnets in the stator (e.g., regular and irregular grids, different dipole moments). Various designs of the transport body with different options for wafer fixation and holding are also presented.A detailed control method for precise control of the transport bodies, based on an iterative optimization procedure using a force / moment model, is also presented. Overall, the paper presents a wafer conveying device that enables improved handling in semiconductor manufacturing through flexible, multidimensional motion based on magnetic levitation.

[0015] Another published application by the applicant, DE 10 2021 202 915, also discloses the use of the prior art conveying device for transporting wafers. The core component is a transport body that can be positioned suspended above the transport surface of a stator and has a manipulator. This manipulator, which has at least one degree of freedom, extends the functionality of the transport body by enabling the handling, positioning, fixing, processing, and / or testing of the wafer. The system is designed for use under various environmental conditions (e.g., vacuum, clean room). The conveying device enables complex motion sequences with high efficiency and cost-effectiveness. The combination of transport and manipulation eliminates the need for additional stationary handling equipment.The use of permanent magnets enables energy-saving operation and reduces maintenance requirements. The manipulator allows the payload to be processed during transport. The document discloses various manipulator designs (linear kinematics, articulated arm kinematics, kinematics with multiple degrees of freedom), various magnet arrangements in the stator and transport body, and various integration options in manufacturing systems for the semiconductor industry.

[0016] Another published application by the applicant, DE 10 2020 212 223 A1, describes a contactless conveying device for the simultaneous transport of multiple payloads, in particular wafers, in a special environment (e.g., vacuum, clean room). The advantage lies in the combination of contactless, magnetic levitation and the possibility of handling and processing the payloads using an integrated manipulator on the transport body. This manipulator can move the transport body over a greater distance to the process stations (e.g., by bridging locks) and offers additional degrees of freedom for complex movement sequences (e.g., tilting, rotating, positioning the payload). The document describes various embodiments of the system, including different arrangements of permanent magnets in the stator and the transport bodies for generating the levitation forces, as well as various methods for precise position determination (e.g.,The transport bodies feature an encapsulated, sealed housing to ensure functionality even in demanding environments. Safety mechanisms are integrated into the system to ensure safe shutdown in the event of a power failure.

[0017] The applicant's published patent application DE 10 2022 209 590 A1 describes a transport body for a contactless conveying device according to the prior art. The transport body is fully capable of levitation. It comprises a mechanically rigid chassis and a housing consisting of a housing cover and a housing base, which encloses the chassis and thus protects it from external influences. All components and functions for executing movements are integrated into the chassis, for example, the permanent magnet array, at least one camera for determining the position of the transport body in all six degrees of freedom, an inertial sensor for recording acceleration and angular rate in three dimensions, a coil for wireless communication, a control unit, and an energy storage unit for powering the electronics.The housing and chassis are preferably circular in shape so that the outer contour of the transport body does not change when rotating around its vertical axis, allowing the maneuvering of multiple transport bodies in a small area, and the maximum tilt angle is independent of the tilt direction. The transport surface on the top of the housing cover provides an application interface for the mechanical, electrical, and data connection of an application. Blind threads are used to mechanically secure the application, and an electrical connection provides power and a communication interface for operating the application. The energy for the application is drawn from the energy storage unit on the chassis. The energy storage unit can be charged using contactless inductive energy transfer.

[0018] The object of the present invention is to open up and protect further applications for the conveying device both with actuating magnets in the stator and permanent magnets in the transport body, as well as with actuating magnets in the transport body and permanent magnets in the stator, and to ensure its exclusive use by the applicant.

[0019] The transport device is referred to in the following application as a planar drive system. The transport body carries a payload, which is referred to in the following application as a transport object. A transport body with or without a transport object is referred to in the following application as a movable element. Disclosure of the invention

[0020] The planar drive system according to the invention comprises a stator and at least one movable element, in particular a transport body. The planar drive system is also configured to drive the at least one movable element in a controlled manner relative to the stator.

[0021] In a first preferred embodiment, the stator has a plurality of movably arranged actuating magnets, each of which is connected to the stator via an actuating element. The actuating element is configured to change a position and / or an orientation of the actuating magnets connected thereto relative to the stator in a controlled manner. The at least one movable element has at least two stationary magnets which are connected to the movable element in such a way that the at least two stationary magnets are immovable relative to the movable element. The stator and the at least one movable element are magnetically coupled by means of the at least two stationary magnets and the plurality of actuating magnets, and the planar drive system is configured to drive the at least one movable element by means of the actuating elements through a controlled positioning and / or orientation of the plurality of actuating magnets of the stator relative to the stator.In a second preferred embodiment, the at least one movable element comprises a plurality of movably arranged actuating magnets, each of which is connected to the movable element via an actuating element. The actuating element is configured to change a position and / or orientation of the connected actuating magnet relative to the movable element in a controlled manner. The stator comprises at least two stationary magnets, which are connected to the stator in such a way that the at least two stationary magnets are immovable relative to the stator.The at least one movable element and the stator are magnetically coupled by means of the at least two stationary magnets and the plurality of actuating magnets, and the planar drive system is configured to drive the at least one movable element by means of the actuating element relative to the stator through a controlled positioning and / or orientation of the plurality of actuating magnets of the movable element.

[0022] According to the invention, the planar drive system is used in an application to transport, position, handle, or process transport objects. For example, these are industrial applications in various manufacturing sectors such as production engineering, automation technology, laboratory automation, process engineering, packaging technology, intralogistics, the semiconductor industry, the food industry, the pharmaceutical industry, or the chemical industry. Other applications are also conceivable, such as in research, science and teaching, as well as in crafts, arts, and entertainment.

[0023] Depending on the application, the transport object can have different designs and functions and include multiple components. Examples of transport object components include: • Goods (product, assembly, component, workpiece, material, liquid, film, textile, bulk material, granulate, powder, biological object); • Container (crate, box, can, bottle, tray, pallet, nest, bag, pouch, container); • Tools and devices (clamping device, manipulator, end effector, processing device, dosing device, cleaning device); • Sensors and detectors (button, distance sensor, load cell, test needle, camera); • Structural components (beam, bracket, holder, cover); • Electronic devices (circuit boards, controls, cables, IT equipment); • Control elements (handle, switch, operating device, indicator, display).

[0024] With regard to their mechanical, electrical, optical or information technology properties and capabilities, the components • be active or passive, • be connected to or separated from the transport platform, • be connected or separated from each other.

[0025] In a particularly preferred embodiment, the planar drive system and / or the system in which the drive system is used comprises at least one safety function. The purpose of the safety function is to protect persons, components, systems, or the surrounding area from hazards resulting from a malfunction in the drive system or the system.

[0026] It is conceivable that the security function includes the following elements: • Elements for detecting malfunctions (e.g. sensors, diagnostic functions, condition monitoring, process control functions), • a safety control, • Transmission paths for reporting the error status to the safety controller, • a shutdown device which immediately switches the system and / or the drive system to a safe state when a fault is detected.

[0027] Preferably, these elements are designed redundantly, for example, through a dual-channel configuration. Preferably, both channels function independently of each other and are monitored. If at least one channel fails, the safety function is triggered. This ensures that a single error never leads to a dangerous condition.

[0028] The planar drive system is preferably designed with a safety function for shutting down the system. A two-channel input is provided for this purpose (usually referred to as "Safe Torque Off", or STO for short), which, when activated, immediately transfers the drive system to the safe state by • the energy supply to the drive system is physically switched off, • ongoing movements are brought to a standstill and • parts at risk of falling are secured.

[0029] Another advantage is what is known as safe control and monitoring of the movement (commonly referred to as "Safe Motion"). This involves safely limiting and monitoring the movement, for example, with regard to speed, position, energy, or torque, in order to avoid collisions and ensure safety in the workspace. The definition of safe areas within the workspace of the planar drive system is particularly advantageous. For this purpose, areas within the workspace of the drive system are marked as safe, and the moving element, such as a transbody, must not enter these areas. Due to its innovative technical features, the planar drive system offers a wide range of innovative application possibilities and designs in the areas of a) transportation, b) feeding technology, c) handling technology, d) process execution, e) Machinery and equipment.

[0030] The following is a list of possible advantageous applications of the planar transport system in the areas mentioned. a) Transportation

[0031] The use of the planar drive system is particularly advantageous when transporting objects.

[0032] For this purpose, one or more moving elements carry at least one transport object. For example, in a flexible and dynamic production process, workpieces can be transported precisely and quickly to one or more assembly locations. In a production process with a wide range of variants, the sequence of assembly locations can be flexibly controlled. This is particularly advantageous for the production of customized products or small batches.

[0033] In logistics, movable elements can transport containers to loading or unloading stations.

[0034] For quality control, movable elements that serve as workpiece carriers can automatically transport workpieces to inspection stations and position them precisely there.

[0035] In semiconductor manufacturing, wafers can be transported and positioned precisely and without contact using so-called cluster tools. The simultaneous operation of several moving elements in a system can increase throughput and thus improve the system's economic efficiency.

[0036] In laboratory automation, samples and reagents can be transported automatically between different analytical devices.

[0037] In pharmaceutical manufacturing, sensitive medicines or vaccines can be transported gently and precisely.

[0038] Small and sensitive components can be transported in an automated assembly process.

[0039] In the food industry, food can be transported in a hygienic and controlled environment.

[0040] It is advantageous to couple several movable elements, particularly transport bodies, in order to transport a heavy payload or a large-volume object whose weight or size exceeds the capacity of a single movable element. A software-based temporary coupling of several movable elements is conceivable, so that they can be controlled as a convoy synchronously and without relative movement. The convoy behaves like a single rigid "virtual transport port body" whose position encompasses six degrees of freedom. The software-based, temporary coupling can be established and released at any time, so that the movable elements can be used for different purposes in chronological order.

[0041] Additional software functions for coordinating the movement of multiple moving elements, such as a main / satellite control system or fleet management for moving elements, are advantageous. With a main / satellite control system, one moving element acts as the main element and follows a path specified by the user, while one or more satellite elements follow the main element according to predefined rules. For example, the satellite elements follow the main element along its path of movement at defined intervals or in a specific formation. This enables the transport of larger or more flexible objects (such as hoses, wires, foils, textiles) that cannot be handled by a single moving element.

[0042] "Fleet management for moving elements" refers to a complex scenario in which several moving elements, for example 2 - 10,000 units, operate simultaneously on the transport area. Different tasks are assigned to the moving elements, as well as constraints that must be taken into account when executing the tasks. For example, several moving elements must reach individual target positions in a timely manner. A software function handles movement planning (fleet management) by calculating the paths for the moving elements and outputting them to the transport bodies. The paths take the specified constraints into account, avoid collisions, and optimize the system's throughput. Fleet management uses so-called "Multi-Agent Path Finding" (MAPF) algorithms based on mathematical optimization methods.It coordinates the movements of the moving elements, thus ensuring a smooth and efficient transport process. Dynamic path planning records the current status of the moving elements or their surroundings during movement. Unforeseen events, such as interfering objects in the path of movement, lead to a replanning of the movement paths, allowing for an appropriate response and the desired goals to be achieved.

[0043] In a comprehensive production or logistics process, it may be necessary to implement the entire material flow across different transport systems and processes. The necessary coupling of the material flow between the planar drive system and other transport systems can be achieved in various ways. For example, the transfer of a transport object from one moving unit to a second transport system can be achieved using at least one of the following mechanisms: gripping and setting down, driving over, pulling, pushing, sliding, shaking, falling, spinning, blowing, or flushing. The transport object can be transferred with or without the moving element. For example, it may be advantageous to transfer a fragile transport object together with the moving element for the purpose of gentle handling, with the moving element serving as a workpiece carrier in the second transport system.It is conceivable, for example, that a robot arm or similar handling device grasps a movable element and places it on a second transport system (e.g. a conveyor belt, a storage and retrieval machine, an automated guided vehicle (AGV). In the second transport system, the movable element is mechanically fixed and no longer hovers; the transport body merely serves as a passive carrier for the transport object. This concept makes it possible to combine the advantages of the planar drive system (6 degrees of freedom, flexibility, precision, etc.) with the advantages of the second transport system (long transport distances, storage volume, etc.). It is also conceivable that the movable element is moved by the planar drive system to a defined transfer point and there transferred to a second system (e.g. conveyor belt, roller conveyor).To do this, the movable element hovers above the transfer point and is then lowered by the planar drive system until it rests, for example, force-fitting and / or form-fitting on the second system. The second system then conveys the movable element.

[0044] The transfer of a movable element from a planar drive system to a second transport system can also be achieved by moving the entire stator or at least one stator module of the planar drive system, a so-called tile. At least one tile, which transports the movable element, is transported by another drive system to the transfer location and transferred there to the second transport system. The transport of the at least one tile can include translational and rotational movements, so that the movable element has the intended orientation during the transfer.

[0045] If the second transport system is also a planar drive system, the transfer can be carried out in a suspended position throughout. This allows for a particularly gentle and clean transfer of delicate goods.

[0046] For example, the at least one moving tile acts as a "lift" that transports the movable element vertically between a first and a second planar drive system, with the two drive systems located at different heights. The moving tile either forms an independent third planar drive system or is alternately assigned to the first or second planar drive system. b) Feeding technology

[0047] The planar drive system also finds numerous advantageous applications in feeding technology, e.g. for palletizing / depalletizing, order picking or for bulk material feeding according to various principles (e.g. vibratory spiral conveyors, centrifuges).

[0048] The use of the moving elements of the planar transport system as feeding units enables flexible and efficient feeding processes that can be quickly adapted to the respective applications by changing software, parameters or modular hardware.

[0049] For example, moving elements with integrated kinematics and a gripper pick up parts from a pallet and place them at the assembly location. Multiple moving elements can work on a pallet simultaneously to achieve high part throughput (high-speed palletizing / depalletizing).

[0050] A pallet is transported on a movable element. This enables quick pallet changes. If both the pallet and the gripper are transported on a movable element, the entire palletizing function can be moved as a unit and positioned close to the assembly site, for example, to minimize transport distances and assembly times.

[0051] In another application, one or more moving elements equipped with kinematics and a gripper load a picking pallet with the required parts. This enables flexible and automated picking of individual parts.

[0052] Another method uses the moving element to separate and feed bulk material parts. A moving element ejects small parts with a sudden lifting movement. A camera checks the orientation of the parts after they land on the moving element. Correctly oriented parts are automatically removed. The process is repeated until all parts have been fed.

[0053] The planar drive system, for example, performs the function of a vibratory spiral conveyor. A moving element carries a vibrating bowl filled with bulk material. This creates periodic jerky movements. The direction and amplitude of movement are selected so that the bulk material pieces are separated and conveyed along a vibrating rail to the discharge point.

[0054] A moving element supports a centrifuge bowl containing bulk material. The planar drive system generates a rotational movement of the centrifuge bowl. The rotation of the bowl causes the parts to be separated and transported to the edge, from where they are removed.

[0055] Granules or powders are transported in a trough with a V-shaped outlet opening on a movable element. A vibrating movement of the element conveys the material through the outlet opening.

[0056] A further advantageous design uses a movable element as a rotating magazine (revolving magazine) to hold workpieces. The workpieces are arranged in holding positions (e.g. nests, clamping devices) around the circumference of the movable element. By gradually rotating the movable element in front of a feeding device, the revolving magazine is quickly and efficiently loaded with workpieces. The movable element then transports the workpieces and unloads them at a destination (e.g. into packaging). The use of a movable element as a revolving magazine represents an innovative and efficient solution for the transport and handling of small, lightweight workpieces in high-throughput systems, particularly in sectors with high quality and hygiene requirements such as the pharmaceutical industry. For example, this can be used to transport and handle cylindrical glass containers (vials) in the pharmaceutical packaging industry. c) Handling technology

[0057] The planar drive system also enables a wide range of new solutions in handling technology.

[0058] In the semiconductor industry, a moving element is equipped with a so-called end effector, for example a 300-600 mm long support arm, which is used to transport wafers. The wafer rests on the end effector and is transported and positioned by the moving element. In this way, the wafer can, for example, be placed in or removed from the processing nest of a process chamber, with the process chamber located to the side of the stator. The end effector bridges the distance from the stator to the process nest. Due to its flat design, it is also capable of removing wafers from or placing them in a storage container (FOUP) in which several wafers are stacked on top of each other with a distance of just a few millimeters.

[0059] The advantage is the ability to position the wafer in the process chamber without the moving element having to enter the process chamber.

[0060] Particularly advantageous is the use of kinematics with a gripper on the movable element, allowing it to be used like a mobile robot arm. This extends the transport function of the movable element to include a handling function. Objects in the vicinity of the planar drive system can be grasped and manipulated.

[0061] Several movable elements can be connected to one another via a rod kinematics system. The rod kinematics system has a tool center point (TCP). The TCP has a larger working area than the individual movable elements. This allows, for example, the construction of a lifting-scissor table consisting of two movable elements that operate a lifting-scissor kinematics system. By changing the distance between the two movable elements, the lifting-scissor kinematics system is actuated, thus changing the height of the TCP. The working area of ​​the scissor kinematics system can exceed the working area of ​​the individual movable elements.

[0062] The planar drive system can also be used as a teleoperated system. An observer connected to the drive system via a communication line controls the movements of the moving elements.

[0063] Moving elements can share the workspace with a human. The human can collaborate with the planar drive system, with both performing a task together, each taking on subtasks. Preferably, each performs the subtasks they are most skilled at. For example, in an assembly task, the planar drive system transports the assembly parts to the workstation, while the human performs a complex joining task. This is ideal for implementing semi-automated production processes with a high degree of variation: part mix-ups are reduced, the assembly process is standardized and secured, and cost-effectiveness is increased. d) Process execution

[0064] The use of the planar drive system is particularly advantageous when carrying out manufacturing processes.

[0065] The movable element moves the tool and / or workpiece relative to each other.

[0066] In many manufacturing processes, the relative movement of tools and workpieces is crucial. A planar drive system offers significant advantages here, as at least one tool or workpiece is positioned on a moving element. Precise control of the moving element in six degrees of freedom enables complex motion sequences.

[0067] Possible applications include laser processing, dispensing liquids or adhesives, joining components, testing, and assembly. In laser processing, the moving element supports the workpiece, while the laser optics remain stationary or perform their own movement. This enables high-precision processing methods such as laser cutting, welding, drilling, structuring, and marking.

[0068] In a material dispensing system, the moving element precisely positions the workpiece under a dispensing needle to ensure controlled application of adhesive, sealant, reagents, or liquids. A dispensing needle is a fine, hollow needle used for the precise dosing and application of small amounts of liquid. It is often combined with a dispenser that delivers the liquid in a controlled manner.

[0069] When joining components, at least one component is placed on a movable element and moved relative to at least one other joining partner in order to enable complex joining processes with demanding paths.

[0070] During testing, the movable element positions a workpiece to be tested within a testing process. For example, in an automated visual inspection system, a test piece is positioned in front of a camera, which captures images of the test piece and checks them for defect characteristics using industrial image processing. Application in an in-circuit test system is also conceivable, where the test piece, for example, a printed circuit board, is automatically contacted with electrical test probes at measuring points to perform electrical measurements. Precise positioning is a prerequisite for performing the test.

[0071] Assembly is supported by the movement of the movable element in three translational and three rotational degrees of freedom. Complex positioning, joining movements, and handling steps can be automated.

[0072] The synchronous movement of a first moving element carrying a process tool and a second moving element carrying the workpiece enables process execution during transport ("on the fly"). The parallelization of transport and process times increases throughput.

[0073] The movements of the moving elements can be synchronized with the movement of machines, devices, or process sequences that are not part of the planar drive system. For example, a cutting machine can be synchronized with a moving element so that the moving element receives the cut material from the cutting process in a defined manner. In another example, a moving element transports a workpiece or product to a machine and, together with the machine, performs a time-critical operation. The movement of the moving element is precisely synchronized with the machine's work process. For this purpose, an additional low-delay communication interface can be installed between the machine and the planar drive system.

[0074] It is conceivable that a planar drive system carries out tasks or processes in several work steps or variants, for which numerous different tools are required in a changing sequence. The tools are provided in a so-called tool station, which enables automatic tool changing and has an interface for tool transfer to a moving element. The at least one moving element carries out the various process tasks one after the other. Before a work step, it can change its tool by placing the current tool in the tool station and removing a new tool, which is required for the next work step, from the tool station. The change takes place automatically, e.g. through a defined positioning and movement sequence (such as lifting and rotating movement, bayonet lock). This enables the flexible automation of process variants with changing tools.

[0075] The installation of additional sensors on moving elements enables comprehensive process monitoring and control. Real-time feature detection enables adaptive control and optimization of the production process and quality assurance. The selection of sensors depends on the specific application.

[0076] The sensors require a power supply and a communication connection to the planar transport system. Both are achieved by connecting the sensor to an integrated interface on the moving element. The interface enables both the data exchange between the sensors and the control system and the continuous supply of power to the sensors.

[0077] Various sensors and detectors can be mounted on the moving element to measure different parameters, for example a load cell, a temperature sensor, a button, a light barrier, a camera, etc.

[0078] A load cell on the moving element measures the weight of a transported object. This may be necessary for process control and quality assurance, but it can also be used to check that a pallet is fully loaded with goods (principle: completeness check by weighing).

[0079] For example, a temperature sensor on the moving element measures the temperature of the transported object or the moving element itself. This can be used for process control or monitoring, particularly when carrying out heat treatment processes or when processing heat-sensitive materials.

[0080] A camera on the moving element, possibly with an image processing system, enables automatic visual inspection of objects or the transport system. This can be used for quality control, defect detection, or navigation.

[0081] Other process examples include the sorting of objects and automatic sample preparation in the chemical industry.

[0082] In object sorting, objects of different sizes, shapes, or materials are transported by moving units. The objects are first detected by sensors and then classified or identified by a computer system according to their characteristics. Sorting then takes place as the moving units transport the objects to transfer points assigned to the object classes. Using appropriate movements, the moving units deposit the objects at the transfer point.

[0083] During automated sample preparation, numerous samples are prepared in sample containers in laboratories for analysis and testing, e.g., by mixing, diluting, or adding reagents. The planar drive system automatically performs the necessary steps with the sample containers. It handles both transport and processing movements. The six degrees of freedom enable precise manipulations, e.g., opening and closing containers, dosing liquids, or mixing samples. Applications can be found, for example, in biological and chemical laboratories, in pharmaceutical research, and in food and environmental analysis. e) Machinery and equipment

[0084] The planar drive system enables innovative machine and plant concepts that offer numerous advantages, such as reducing plant space and costs, increasing adaptability, simplified setup through adaptation of the software or configuration parameters, increased throughput, improved cost-effectiveness and improved cleanliness through reducing particle pollution.

[0085] The use of a planar drive system is particularly advantageous when integrated into a process chamber.

[0086] The moving elements of the planar drive system float within a process chamber, while the tiles of the transport system remain outside. The levitation field penetrates the floor, wall, or cover plate of the process chamber. This enables processes that take place under controlled environmental conditions, such as a vacuum chamber for processes under vacuum, an aseptic chamber for a sterile environment in the pharmaceutical and food industries, a chamber with low particle load for the assembly of sensitive components, a liquid-filled process chamber for processes in liquids (e.g., coating, EDM, ultrasonic treatment), or a chamber for ABC applications for handling atomic, biological, or chemical substances in a closed, contamination-free environment. For applications with changing pressure conditions (e.g.,For applications where the pressure is too high (e.g., transition from vacuum to atmosphere), the housing of the movable element can be designed either to be gas- and liquid-tight, ensuring that the internal pressure remains nearly constant, or to ensure pressure equalization between the interior and exterior of the housing. A pressure sensor can be installed inside the housing to continuously monitor the tightness of a closed housing. A control system monitors the pressure value and reports any critical deviation to the higher-level application control system, which initiates the necessary responses.

[0087] A combination of process stations with the planar drive system is particularly advantageous in order to increase the functionality, the degree of automation or the availability of the system.

[0088] One possible solution is a cooling station for the moving elements of the planar drive system. This station serves to cool the moving elements of the planar drive system, particularly in applications where passive cooling by convection is difficult or impossible, such as under vacuum. Various cooling methods are conceivable, such as flowing a cooling medium around or onto the transport body, thermal contact of the transport body with a cooled surface, or replacing a heat accumulator on the moving element.

[0089] A cleaning station for the outer surfaces of the moving elements is also conceivable in order to prevent contamination of the system by contaminated moving elements. For example, mechanical, chemical or thermal cleaning processes can be used, with dry, liquid, adhesive or gaseous cleaning agents or without cleaning agents. The cleaning can cover the entire outer surface of the moving element or only parts of it. Inherent movements of the moving element can enable the cleaning process (e.g. spinning, wiping, throwing off) or can advantageously support it. Active cleaning tools can be used, for example rotating brushes, spray mist dispensers, a vacuum cleaner for removing loose dirt or an air shower for removing dust.

[0090] A charging station for electrically charging the moving elements is also conceivable. This station transmits the charging current to the moving elements, for example, through galvanic contacting of electrical contacts on the moving element, through contactless energy transfer using induction coils, or by changing the energy storage device on the moving element.

[0091] In general, a maintenance and service station is conceivable that is integrated into a system and is intended for the maintenance, servicing, inspection, or removal of the moving elements of the planar drive system or its components. Examples include the inspection of a gripper, the cleaning and calibration of the camera systems in the moving element, the calibration of position sensors or other sensors, and the changing, cleaning, or maintenance of tools.

[0092] The process stations described can be semi-automated or fully automated. The integration of these stations increases the functionality or level of automation of the system, improves availability, and simplifies maintenance. This is particularly beneficial for complex and demanding industrial applications.

[0093] Further advantageous machine concepts arise from the combination of multiple planar drive systems in different orientations (e.g., horizontal, vertical, overhead). For example, in a production plant, a first horizontally oriented stator can serve as a transport path for workpieces on horizontally moving elements, while a second vertically oriented stator serves as a transport path for process tools on vertically moving elements. Both stators are arranged in the plant so that the process tools can process the workpieces.

[0094] Another machine concept involves using a movable element as a rotary indexing table. Nests are arranged around the circumference of the movable element, preferably at equidistant angular intervals, each of which can accommodate a workpiece. Rotating the movable element by one angular interval moves all nests simultaneously to the next processing position on the rotary indexing table. Processing devices are arranged at the processing stations, each of which performs a processing or inspection step. The simultaneous processing of several workpieces at different processing positions results in short cycle times and high throughput.

[0095] Another machine concept involves the use of a planar drive system, which can feature variably adjustable gaps between the rows and columns of the tile arrangement. Machine parts or process equipment can be integrated into a gap. The movable element can move across the gap, enabling a flexible design and simplifying the integration of additional processes.

[0096] It is also conceivable to use the planar drive system on multiple levels, one above the other, with a stator with moving elements on each level. This can reduce the system footprint and increase throughput. For example, one level serves to transport the moving elements to the outbound conveyor, while the return conveyor takes place on another level. A tile with a "lift" function can enable the floating transfer of the moving elements between levels.

[0097] Another machine concept includes an automatic cleaning function in a system with a planar drive system by utilizing at least one moving element of the planar drive system to perform the cleaning. For example, the stator surface is cleaned to reduce particle pollution and increase system availability.

[0098] For this purpose, a movable element carries a cleaning device designed to perform the necessary cleaning tasks. Examples of cleaning procedures were given for the cleaning station for the movable elements.

[0099] Cleaning can be performed cyclically, at the operator's request, or only when contamination is detected, depending on the need. To determine the state and location of contamination, a camera system can be used, for example, either stationary or mounted on a mobile unit that regularly scans the stator surface. The tasks of contamination detection and localization, as well as the execution of the cleaning process, can be performed by one or more different moving elements, with a higher-level controller, such as the application controller, coordinating and monitoring the cleaning process according to a cleaning algorithm.

[0100] The stator, constructed from multiple tiles, has gaps between the tiles. The invention aims to prevent dust and liquids from penetrating these gaps. One advantageous option is to completely cover the tile surface of the planar drive system with a plate or film. This prevents dust and liquids from penetrating the gaps between the tiles. The covering material should be non-conductive to ensure that energy and data transmission between the stator and the moving element is not disrupted. Examples include glass, plastic, and ceramic. The covering plate can be optically transparent to enable the reading of a dot code underneath the cover. The covering plate can be optically opaque and covered with a dot code to enable the reading of the dot code above the cover.In any case, the information from the dot code is used to locate the moving elements.

[0101] Adaptive manufacturing requires flexible and modular production cells that can be quickly adapted to changing product needs, quantities, and requirements. The planar drive system ideally supports the implementation of flexible production cells.

[0102] In a flexible manufacturing cell, the stator serves as a universally usable transport and processing area. Docking positions for process modules and additional manufacturing cells are provided on the stator, allowing a new production line to be created quickly from a pool of manufacturing cells and process modules. The systems' operating software is also modular: the transport and process functions are available as applications (apps) in a library. By setting up and configuring the apps, the required functionality of the production line can be provided in a short time.

[0103] By arranging several manufacturing cells in a row, a continuous transport area is created for the moving elements. Workpieces are moved on the system and positioned precisely in six degrees of freedom. This high degree of freedom of movement enables both complex processing steps, e.g., for component assembly, laser processing, and automatic inspection, as well as the implementation of flexible process chains, so that each product variant undergoes individual processing. Numerous variants of a product can be manufactured in a mix on one production line. This enables the production of customized samples at the cost of mass production. The simultaneous operation of several moving elements parallelizes the processing of workpieces, thereby increasing throughput and improving cost-effectiveness.

[0104] The modularity of the hardware and software supports the entire lifecycle of the production line (construction, commissioning, ramp-up, operation, conversion and expansion, dismantling) and reduces investment costs, as the production cells can be reconfigured and reused after the end of the product lifecycle. Applications include small-batch production and prototype construction, as well as flexible, automated production with high volumes and short cycle times.

[0105] Many other innovative fields of application for the planar drive system are conceivable.

[0106] A planar drive system can be advantageously used in 3D printing processes, for example, for printing plastics, metals, food, and biomaterials (artificial organs, implants, etc.). A movable element serves as the printing platform, while the extruder is fixed in place. Movement in six degrees of freedom can be used to open up new possibilities for printing complex geometries. Planar drive systems are ideal for automating laboratory processes and for high-throughput experimentation in the chemical industry. Moving elements transport samples, reagents, and other materials precisely and quickly between different analytical instruments and process stations. This increases efficiency and throughput.

[0107] This opens up many applications in science and research. For example, the precise and variable positioning of optical components on an optical bench can be simplified. Applications for vibration decoupling of an experimental platform are also conceivable, where the experimental platform is supported by at least one moving element and the control system is parameterized so that hardly any vibrations are transmitted from the stator to the experimental platform.

[0108] The planar drive system enables full magnetic levitation with six degrees of freedom. A transport body with a transport object can be transported and precisely positioned according to a target specification. The novel permanent magnet operating principle leads to unique features such as the simultaneous use of all six degrees of freedom, a large levitation distance, large tilt angles, safe operation in all orientations (horizontal, vertical, overhead), safe handling of the transport bodies, low energy consumption due to the use of permanent magnets, and the provision of a power supply and data interface on the transport body. These features open up a wide range of applications in various industries. The planar drive system performs tasks in the areas of transport, material flow, component handling and feeding, as well as process execution.Novel machine and plant concepts with technical and economic advantages become possible, and innovative manufacturing and process facilities can be implemented. These include systems with modular designs and flexible conversion capabilities, systems with low energy and space requirements, high operator safety, and transport bodies that can hover vertically or overhead, hover in a closed process chamber, move large or heavy objects as a swarm, execute processes during transport, process individual process chains in a highly variable production environment, and be quickly adapted to changing requirements using software. Character description Fig. 1 shows a planar transport system according to the state of the art

[0109] Fig. 1 shows a planar transport system 10 according to the prior art in a schematic representation with associated coordinate systems 900 and 920. The illustrated planar drive system 10 is arranged on a machine table 12 and has a stator 100 and one or more movable elements 200, in particular transport bodies. A levitation field 14 is schematically shown between the stator 100 and the movable element 200, which in this case is an actively controlled magnetic field. The levitation field 14 is generated by actuating magnets and stationary magnets (not shown) on the active surface 102 of the stator 100, which are formed in the stator 100 and the movable element 200, respectively. The levitation field 14 is located between the stator 100 and the movable element 200, with the movable element 200 floating in the levitation field 14.The dashed line schematically shows an optionally attachable hermetic seal 16, which allows the stator 100 outside the hermetic seal 16 to drive the movable element 200 inside the hermetic seal 16. Furthermore, connections 18 are schematically shown, by means of which the planar drive system 10 can be supplied with electrical energy and via which communication data can be supplied and / or discharged.

[0110] While Fig. 1A shows a planar drive system 10 according to the prior art in table operation, ie arranged or resting in a plane, so that the movable element 200 is accelerated by the gravitational force 940 in the direction of the stator 100, Fig.1B shows a planar drive system 10 in wall-mounted operation according to the prior art, in which gravity accelerates the movable element substantially parallel to the conveying surface. The magnetic coupling between the stator 100 and the movable element 200 is adjusted such that the forces for compensating gravity also act parallel to the conveying surface. The levitation field 14 prevents the movable element 200 from slipping and / or falling. If the actuating magnets and stationary magnets (not shown) comprise permanent magnets, a safe landing of the movable element 200 can be achieved even if the electrical power supply is interrupted.

[0111] The position and orientation of the movable element relative to the stator can be represented in a stator coordinate system 900, which is spanned by an x-direction 902, a y-direction 904, and a z-direction 906. The movable element has its own coordinate system 920, which is spanned by an x1-direction 922, a y1-direction 924, and a z1-direction 926 and has a roll angle 932, a pitch angle 934, and a yaw angle 936.

[0112] The planar drive system 10 is preferably controlled such that the movable element 200 stably levitates and is guided on a predetermined target curve with respect to translation and rotation. QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] DE 10 2016 224 951 A1

[0003] DE 10 2018 209 401 A1

[0011] DE 10 2020 212 641 A1

[0012] DE 10 2018 006 259 A1

[0013] DE 10 2021 202 915

[0015] DE 10 2020 212 223 A1

[0016] DE 10 2022 209 590 A1

[0017]

Claims

[1] Planar drive system (10) comprising a stator (100) and at least one movable element (200), in particular a transport body (200), wherein the planar drive system (10) is configured to drive the at least one movable element (200) in a controlled manner relative to the stator (100), wherein: - the stator has a plurality of movably arranged actuating magnets (26), each of which is connected to the stator (100) via an actuating element (114), wherein the actuating element (114) is configured to change a position and / or an orientation of the actuating magnets (26) connected thereto relative to the stator (100) in a controlled manner; - the at least one movable element (200) has at least two stationary magnets (22) which are connected to the movable element (200) in such a way that the at least two stationary magnets (22) are immovable relative to the movable element (200); - the stator (100) and the at least one movable element (200) are magnetically coupled by means of the at least two stationary magnets (22) and the plurality of actuating magnets (26); and - the planar drive system (10) is configured to drive the at least one movable element (200) by means of the actuating elements (114) relative to the stator (100) by means of a controlled positioning and / or orientation of the plurality of actuating magnets (26) of the stator (100), or - the at least one movable element (200) has a plurality of movably arranged actuating magnets (26), each of which is connected to the movable element (200) via an actuating element (114), wherein the actuating element (114) is configured to change a position and / or an orientation of the actuating magnet (26) connected thereto relative to the movable element (200) in a controlled manner; - the stator (100) has at least two stationary magnets (22) which are connected to the stator (100) in such a way that the at least two stationary magnets (22) are immovable relative to the stator (100); - that the at least one movable element (200) and the stator (100) are magnetically coupled by means of the at least two stationary magnets (22) and the plurality of actuating magnets (26); and - the planar drive system (10) is configured to drive the at least one movable element (200) by means of the actuating element (114) relative to the stator (100) through a controlled positioning and / or orientation of the plurality of actuating magnets (26) of the movable element (200). [2] Planar drive system according to claim 1, wherein the drive system comprises safety functions comprising at least one of the following features such as • Elements for detecting malfunctions such as sensors, diagnostic functions or condition monitoring functions, • safe transmission paths for reporting the error status to a safety controller, such as dual-channel or redundant transmission paths, • a safety control, • a shutdown device which immediately switches the drive system to a safe state when a fault is detected, • Have safety functions such as “Safe Torque Off”, “Safe Motion” or safe area monitoring. [3] Planar drive system according to claim 1 or claim 2, wherein the movable element (200) comprises at least one of the interfaces • Mechanical interface for attaching a device to the movable element (200), • electrical interface to supply the device with energy, • Communication interface for connecting the device to the planar drive system to accommodate an application. [4] Planar drive system according to one of claims 1 to 3, wherein the at least one movable element (200) comprises at least one of the components: • Goods (product, assembly, component, workpiece, material, liquid, film, textile, bulk material, granulate, powder, biological object) • Container (crate, box, can, bottle, bowl, pallet, nest, bag, pouch, container) • Tools and devices (clamping device, manipulator, end effector, processing device, dosing device, cleaning device) • Sensors and detectors (button, distance sensor, load cell, test needle, camera) • Structural components (support, bracket, mount, cover) • Electronic devices (circuit boards, controls, cables, IT equipment) • comprises operating elements (handle, switch, actuating device, display element, display), and wherein these components are transported and / or positioned and / or actuated by a drive of the at least one movable element (200). [5] Planar drive system according to one of claims 1 to 4, wherein a plurality of the movable elements (200) execute orders in a work space and a fleet management coordinates the operations of the movable elements (200) temporally and spatially so that efficient and collision-free operation is ensured and wherein a plurality of the movable elements (200) can be temporarily coupled in order to transport and / or position heavy payloads or large-volume objects. [6] Planar drive system according to one of claims 1 to 5, wherein a transfer of the movable element (200) or the movable elements (200) or their components from the planar drive system to a further transport system can be realized by at least one of the following mechanisms: Gripping and setting down, driving over, pulling, pushing, sliding, shaking, falling, spinning, blowing or rinsing and, wherein the transferred movable element (200) or the movable elements (200) are conveyed by the second transport system in a form-fitting or force-fitting or suspended manner. [7] Planar drive system according to claim 6, wherein the planar drive system is a first planar drive system and the further transport system is a second planar drive system, wherein the at least one movable element (200) is transferred from the first planar drive system to the second planar drive system, wherein the transfer is carried out by at least one of the additional devices • Handling device, • Lifting / swivelling device, • Slide device, • Device for moving the modules of the drive system (tiles) is realized and the orientation (horizontal, vertical, overhead) of the planar drive systems can be different. [8] Use of the planar drive system according to one of claims 1 to 7 for feeding components, wherein the feeding of the components with the movable element (200) is carried out by • Transport of a component, a stock of parts or a container for components such as a pallet, container, magazine, • Gripping a component at a transfer position or from a parts supply, • Placing a component at a transfer position or in a parts stock, • Testing and selection of a component, • Picking of components, • Separation, conveying or reorientation of at least one component by shaking, sliding, tilting, spinning or similar mechanisms. [9] Use of the planar drive system according to one of claims 1 to 7 for storing components, wherein the movable element (200) is designed to receive components into a storage device (container, pallet, magazine, nest, clamping device) and / or to release them from the storage device, wherein the locations of the storage device are preferably arranged linearly or in a circular shape as a revolver magazine on the movable element (200). [10] Use of the planar drive system according to one of claims 1 to 7 for handling objects, wherein the at least one movable element (200) is connected to at least one of the handling devices • End effector for transporting a substrate, wherein the end effector can project laterally beyond the movable element (200) in order to handle substrates located next to the planar drive system, • Grippers with different action mechanisms such as jaw grippers, suction grippers, magnetic grippers, adhesion grippers, adaptive grippers, • Kinematics with at least one degree of freedom, • Is equipped with an additional device to assist handling. [11] Use of the planar drive system according to one of claims 1 to 7 for handling objects, wherein several of the movable elements (200) jointly perform a handling function by means of synchronized movements. [12] Use of the planar drive system according to claims 1 to 7 in a semi-automatic application, wherein a human controls the movement of at least the at least one movable element (200) from a distance by means of operating elements or a human shares the work space with the at least one movable element (200) and carries out work collaboratively with the movable element (200). [13] Use of the planar drive system according to one of claims 1 to 7 for carrying out a manufacturing process such as assembling, joining, measuring, testing, adjusting, primary shaping, forming, separating, coating, knitting, dispensing, laser processing, wherein the at least one movable element (200) at least one of the process partners • Workpiece, • Tool, • Process device, • Feeding device, • Sensor and moves relative to a second process partner. [14] Use of the planar drive system according to claim 13 for carrying out a manufacturing process, wherein all process partners are guided synchronously by the movable elements (200) in order to jointly carry out a manufacturing process and simultaneously carry out a transport movement, in particular as "processing on the fly". [15] Use of the planar drive system according to claim 13 or claim 14 for carrying out a manufacturing process, wherein at least one process partner is a sensor which monitors and / or controls the execution of the process, for example a load cell, a temperature sensor, a button, a light barrier or a camera. [16] Use of the planar drive system according to one of claims 1 to 7 for handling tools, wherein the at least one movable element (200) moves into a so-called tool station in order to remove, change or deposit tools in an automated manner. [17] Use of the planar drive system according to claim 16, wherein the tool station comprises a mechanism for automated transfer of the tools, based on a clamping function or a lifting-rotating movement, in particular a bayonet lock. [18] Use of the planar drive system according to claims 1 to 7 for handling and processing liquid or powdery substances such as reagents by mixing, dispensing, shaking, vibrating, stirring, for example in the food, pharmaceutical, packaging or laboratory automation sectors. [19] Use of the planar drive system according to one of claims 1 to 7 for integration into a process chamber such as a vacuum chamber, an aseptic chamber, a chamber filled with liquid or gas, a chamber with low particle load or a chamber for ABC applications, wherein the at least one movable element (200) moves in a floating manner within the process chamber and the tiles are attached to the outside of the transport system so that the levitation field penetrates the chamber wall. [20] Use of the planar drive system according to one of claims 1 to 7 in a plant, wherein the at least one movable element (200) can move into a station of the plant which performs at least one of the following functions: cooling, cleaning, maintenance, electrical charging, checking, servicing, calibration, storage or introduction and removal of movable elements (200). [21] Use of a plurality of planar drive systems according to one of claims 1 to 7 in a plant, wherein these jointly carry out tasks in the field of transport, handling, feeding or process execution and wherein the planar drive systems can have different orientations (horizontal, vertical, overhead). [22] Use of a plurality of planar drive systems according to one of claims 1 to 7 in a system, wherein the planar drive systems are arranged one above the other in a plurality of levels. [23] Use of the planar drive system according to one of claims 1 to 7, wherein the at least one movable element (200) is used as a rotary indexing table, which has nests which are arranged on a circular circumference preferably in equidistant angular steps and the nests can each receive a workpiece, so that a rotation of the movable element (200) by an angular step width transports the nests simultaneously to the next position of the rotary indexing table and wherein work steps can be carried out on the workpieces stored in the rotary indexing table at the same time. [24] Use of the planar drive system according to one of claims 1 to 7, wherein existing gaps between the modules of the planar drive system or at the edge of the planar drive system are used to integrate machine parts or process equipment. [25] Use of the planar drive system according to one of claims 1 to 7 with an automatic cleaning function, wherein the at least one movable element (200) carries a device for cleaning such as • Brush, • Vacuum cleaner, • Wipers, • Adhesive film, • Dispenser for chemical agents for cleaning or disinfection, wherein a sensor can be provided for checking the state of contamination before and after cleaning, preferably a camera, and wherein the cleaning function can trigger cyclical cleaning or demand-dependent cleaning in order to clean selected areas of the system, in particular the stator (100). [26] Use of the planar drive system according to one of claims 1 to 7 with a protection against contamination of the stator, wherein the surface of the stator (100) is covered with a film or a plate which reduces or prevents contamination of the stator modules by dust, liquids or foreign bodies. [27] Use of the planar drive system according to one of claims 1 to 7 in a flexible manufacturing plant in which process modules and supply modules are installed on the stator (100), modular devices are installed on the movable elements (200) and modular software functions are available for setting up and operating the plant, so that the plant can be set up, commissioned or converted quickly and a wide range of products and variants can be produced.

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