Molded Bodies and Methods for Producing a Molded Body

Description

[0001] The present invention relates to a shaped body, in particular for a pressure sensor, a pressure sensor with such a shaped body and a method for producing a shaped body.

[0002] Ceramic or metallic pressure sensors can be used to measure the pressure of gaseous or liquid media. Ceramic pressure sensors with a ceramic sensor body containing a membrane are particularly suitable for measuring the pressure of aggressive media.

[0003] However, the production of ceramic pressure sensors is associated with a relatively high level of effort. For example, ceramic sensor bodies manufactured using pressing processes often require complex post-processing steps. This is because the pressing processes used only allow for relatively thick and uneven layers. The respective diaphragm of the sensor body must therefore be mechanically reworked after pressing, for example, by grinding or lapping, in order to create a sufficiently thin diaphragm and ensure the required diaphragm accuracy. Finally, production using the pressing process imposes restrictions on the geometric shapes and dimensions of ceramic pressure sensors.

[0004] The publication by LM FALLER ET AL entitled "Rapid prototyping of force / pressure sensors using 3D- and inkjet-printing" discloses a 3D-printed ceramic membrane for pressure sensors.

[0005] Against the background outlined above, the object of the present invention was to provide a molded body, in particular for a pressure sensor, that can be produced with reduced effort and increased flexibility. The object was also to provide a method for producing a molded body.

[0006] With regard to the molded body, this object has been achieved according to the invention by the subject matter of claim 1. A method for producing a molded body is the subject matter of claim 15. Advantageous embodiments are the subject matter of the dependent claims.

[0007] A molded body according to the invention is particularly suitable for a pressure sensor. Such a pressure sensor with a molded body according to the invention can be used in particular for measuring the pressure of fluids. A molded body according to the invention can therefore be a sensor body, in particular a sensor body for a pressure sensor.

[0008] A molded body according to the invention comprises a membrane and a support section supporting the membrane, wherein the membrane is produced at least in sections from a ceramic material by additive manufacturing, in particular 3D screen printing. According to the invention, the greatest possible distance between two points on the outer circumference of the membrane is less than 10 mm.

[0009] With such a small-sized membrane, compact designs can be realized and the application possibilities for such a molded body can be improved. In particular, such a molded body can be used in particularly small pressure sensors. The use of additive manufacturing, in particular 3D screen printing, also enables the production of the membrane with the desired external dimensions, in particular with external dimensions according to which the greatest possible distance between two points on the outer circumference of the membrane is less than 10 mm, in a particularly advantageous manner with only minimal effort. The overall manufacturing effort can thus be reduced. At the same time, the use of additive manufacturing, in particular 3D screen printing, can avoid or keep to a negligible extent any losses in component quality or manufacturing accuracy.

[0010] In the present case, a membrane can be understood as a material section that exhibits compliance during operation, in particular during measurement operation, and in particular ensures measurable flexibility during operation. The deformation behavior of the membrane as a whole is important here. It is possible for individual sections of the membrane itself to exhibit less deformability than other sections. It is also possible for individual sections of the membrane to be completely stiffened. In the sense of the present invention, a membrane can be delimited on the outside by dimensionally stable structures or material sections, in particular by the support section carrying the membrane. The outward boundary of a membrane can accordingly be defined by structures or material sections that do not exhibit sufficient or suitably measurable compliance behavior during operation, in particular during measurement operation.The supporting section carrying the membrane can therefore be designed to be sufficiently rigid.

[0011] According to a preferred embodiment of the present invention, the membrane, at least in sections, has a thickness of less than 0.5 mm, preferably less than 0.4 mm, preferably less than 0.35 mm, preferably less than 0.3 mm, more preferably less than 0.25 mm, even more preferably less than 0.225 mm, in particular less than 0.2 mm. By dimensioning the membrane thickness in this way, a particularly high measurement accuracy or sensitivity can be achieved when using a respective pressure sensor.

[0012] In a further advantageous manner, the membrane can have a thickness of more than 0.1 mm, preferably more than 0.15 mm, more preferably more than 0.175 mm or more than 0.2 mm, at least in sections. Such a minimum thickness can ensure sufficient stability and / or gas tightness of the membrane and thus guarantee a relatively high degree of operational reliability.

[0013] By using additive manufacturing, particularly 3D screen printing, the production of the membrane with the desired dimensions, especially with the desired thickness, can be achieved in a particularly advantageous manner with minimal effort. Any post-processing steps required to achieve the desired membrane thickness or the uniformity and / or accuracy of the membrane thickness can be reduced to a minimum or even eliminated entirely.

[0014] Preferably, in addition to the membrane, the support section supporting the membrane can also be made, at least in part, of a ceramic material. In particular, the support section supporting the membrane can also be produced using additive manufacturing, preferably 3D screen printing. This further reduces manufacturing costs and improves the media resistance of the molded body produced in this way.

[0015] In a further preferred manner, the membrane and / or the support section can each be made entirely of a ceramic material. This can further improve media resistance.

[0016] The membrane and / or the support section supporting the membrane can advantageously be made of aluminum oxide or contain aluminum oxide. The membrane and / or the support section can be made, at least in sections, of aluminum oxide or a material composition containing aluminum oxide. Likewise, the membrane and / or the support section can be made entirely of aluminum oxide or a material composition containing aluminum oxide. Aluminum oxide is particularly suitable for use in aggressive media and thus ensures a particularly high degree of durability during operation.

[0017] As mentioned above, the ceramic material for the membrane and / or the support section can be aluminum oxide or a material composition containing aluminum oxide. However, other ceramic materials can also be used to manufacture the membrane and / or the support section.

[0018] According to an advantageous embodiment, the membrane and the support section can be made of an identical material or of materials with an identical composition, thereby enabling particularly efficient production.

[0019] It is also possible for the materials and / or material compositions of the membrane and the support section to differ from one another, at least in certain sections. It is preferably possible for the materials of the membrane and the support section to comprise an identical base material and / or other auxiliary materials. The desired operating properties of the membrane and the support section can thus be advantageously influenced.

[0020] It is also possible for the membrane to be made entirely of a single material or a single material composition, and for the supporting section to be produced from a plurality of different materials or material compositions. In particular, the supporting section, in an area adjacent to the membrane in the circumferential direction, can be produced from a material that is identical to the material of the membrane. The further layers of the supporting section, which are applied to the area surrounding the membrane in the circumferential direction, can consist of a different material or a material composition. In this way, manufacturing flexibility can be further improved, and the operating properties of the molded body can be tailored particularly flexibly to the respective application.

[0021] In a further preferred embodiment, the membrane and the support section can be produced in one piece and / or form a monolithic body. This avoids subsequent connection of the membrane to the support section. Any transition between the membrane and the support section can thus be resistant to damage.

[0022] It can also be advantageous if the membrane and / or the support section are produced entirely using 3D screen printing. In particular, the membrane and the support section can be produced using 3D screen printing in the same process, enabling efficient production overall. It is also possible for only part of the membrane and / or the support section to be produced using 3D screen printing. Thus, material sections can initially be produced using other processes and supplemented with additional material layers using the 3D screen printing process to achieve the desired final shape of the membrane or support section. This can further improve production flexibility.

[0023] According to a further embodiment of the present invention, the membrane can be produced without any mechanical post-processing, in particular without any machining. Mechanical post-processing is understood here to mean that existing contours or surfaces are subjected to a mechanical processing process to change the geometry or surface accuracy. The drying and sintering processes typically used for 3D screen printing technology are not considered mechanical post-processing here.

[0024] By avoiding mechanical post-processing, manufacturing costs can be reduced in a particularly advantageous way. It is also possible to perform mechanical post-processing before any sintering process, especially after a drying process. In other words, the not-yet-sintered green compact is subjected to mechanical post-processing, which can be accomplished with relatively little effort.

[0025] Advantageously, the membrane can be produced exclusively by 3D screen printing. Thus, a membrane could be produced by 3D screen printing, in particular by creating multiple layers using the 3D screen printing process, and the final membrane could be obtained after completion of the 3D screen printing steps. Production by 3D screen printing can advantageously be carried out in such a way that mechanical post-processing, in particular machining, can be avoided. Likewise, the supporting section can also be produced exclusively by 3D screen printing.

[0026] The membrane can advantageously be produced from a plurality of layers. Particularly preferably, the membrane is produced from at least three layers and / or at most fifteen layers. Likewise, the membrane can be produced from more than four and fewer than twelve layers. In particular, the membrane can be produced from five to fifteen layers, or from ten to fifteen, or from three to twelve, or from three to ten, or from five to ten, or from six to eight layers.

[0027] According to a further advantageous embodiment of the molded body according to the invention, the support section can be produced from a plurality of printed layers. In particular, both the membrane and the support section can each be produced from a plurality of printed layers. At least one printed layer of the membrane can have a smaller thickness than a printed layer of the support section.

[0028] By producing the membrane from a plurality of relatively thin layers, a total membrane thickness can be achieved with relatively high precision. In contrast, producing the support section from a plurality of relatively thick layers enables rapid production. Relatively thick layers allow the desired overall height of the support section to be achieved in just a few process steps. This can improve manufacturing efficiency.

[0029] It may also be advantageous if the support section, in a region adjacent to the membrane in the circumferential direction, has layer thicknesses that correspond to the layer thicknesses of the membrane. Likewise, the support section, in a region adjacent to the membrane in the circumferential direction, can be created from layers that seamlessly transition into layers of the membrane. It is therefore possible for the membrane and the regions of the support section adjacent to the membrane in the circumferential direction to each be created from continuously printed layers. Printing such continuous layers can be accomplished with minimal effort using 3D screen printing.

[0030] The support section can be constructed entirely from layers of varying thicknesses. In particular, the printed layers, which are produced continuously with the membrane layers by 3D screen printing, can be designed differently in terms of thickness from subsequently printed layers to achieve the desired overall height of the support section.

[0031] More preferably, the membrane is fluid-tight, in particular gas-tight and / or liquid-tight. It is particularly possible for the thickness and / or material of the membrane and / or the number and / or thickness of the membrane layers to be selected to achieve fluid-tight, in particular gas-tight and / or liquid-tight, properties. The passage of gaseous or liquid media through the membrane of the molded body can thus be reliably prevented, thus ensuring a high degree of operational reliability.

[0032] According to a further preferred embodiment, the membrane can have a rounded, in particular circular, outer peripheral shape, at least in sections. With such a membrane design, the support section can have a rounded or circular inner peripheral shape. For example, the support section can be substantially annular and, at its circular inner peripheral shape, border the membrane or merge into the membrane. Such a design of the membrane or support section ensures uniform material stress in the transition area between the membrane and the support section, which in particular can prevent load peaks.

[0033] It is also possible for the membrane to have an outer peripheral shape with at least one corner, in particular with a plurality of corners. Preferably, the membrane can have a quadrangular or rectangular, in particular square, outer peripheral shape. Likewise, the membrane can have a triangular, pentagonal, or hexagonal outer peripheral shape.

[0034] Diaphragm shapes with a rectangular outer perimeter can enable improved pressure measurement of fluids during operation. In particular, the deformation of rectangles can be advantageous for pressure measurement of fluids and enable increased measurement accuracy.

[0035] More preferably, at least one corner on the outer circumference of the membrane is free of any radii of curvature or has a radius of curvature of less than 0.1 mm, in particular less than 0.05 mm, less than 0.025 mm, or less than 0.02 mm. Likewise, a corner can have a maximum radius of curvature of 0.25 mm or less than 0.5 mm.

[0036] More preferably, the support section has an inner peripheral shape that corresponds to the outer peripheral shape of the membrane. Thus, with a circular membrane, the inner peripheral shape of the support section can also be circular, thus ensuring a uniform force transmission from the membrane to the support section, as mentioned above. In contrast, with a rectangular, in particular square, outer peripheral shape of the membrane, the inner peripheral shape of the support section can be rectangular or square.

[0037] It may also be advantageous if the support section, in particular a cross-section of the support section, has a rounded, in particular circular and / or cylindrical, outer peripheral shape at least in sections. It is also possible for the support section, in particular a cross-section of the support section, to have an outer peripheral shape with at least one corner.

[0038] The support section advantageously extends all the way around the membrane, in particular completely around the membrane. The support section can completely and / or continuously enclose and / or support the membrane. The support section can be annular.

[0039] According to a further embodiment, the outer circumferential shape of the support section can correspond to the inner circumferential shape of the support section, resulting in substantially constant wall thicknesses of the support section in the circumferential direction around the membrane. It is also possible for the outer circumferential shape of the support section to differ from the inner circumferential shape of the support section. For example, the inner circumferential shape of the support section can be square in cross-section and the outer circumferential shape can be round in cross-section, which can be advantageous, for example, with regard to installation space limitations. The shape of the inner circumference can thus be selected independently of the shape of the outer circumference, thereby achieving a greater degree of design flexibility.

[0040] Finally, the support section may have sections with different inner circumferential shapes along a longitudinal extent.

[0041] The support section can therefore advantageously have sections with different inner circumferential shapes and / or inner circumferential dimensions along a longitudinal extension. A first section of the support section can represent the outer circumference of the membrane. A second section with a different inner circumferential shape and / or dimension than the first section and constant along the longitudinal extension can preferably form at least 25% of the longitudinal extension of the support section.

[0042] Longitudinal extension here refers to the vertical direction of the molded body. The longitudinal extension or vertical direction of the molded body can run perpendicular to the extension of the membrane.

[0043] Advantageously, a change in the shape of the inner circumference of the support section can be formed in the vertical direction or longitudinal extension of the shaped body. A first section can thereby represent the outer circumference of the membrane and / or surround it at least in sections. The first section can also protrude beyond the membrane in the longitudinal extension or vertical direction. A second section can be provided adjacent to or spaced from this first section, with an inner circumference shape and / or dimension that differs from the first section and is constant in the longitudinal extension. This second section can form at least 25% of the longitudinal extension of the support section, i.e., can be relatively high.

[0044] By varying the inner circumference shapes and / or inner circumference dimensions of the support section, or by changing the contour of the inner circumference of the support section, the functionality of the molded body can be particularly advantageously adapted to the respective application conditions. For example, a section of the support section surrounding the membrane can define or replicate the outer geometry of the membrane. Another section of the support section can be designed for rapid production, particularly due to a minimum extension of 25% along a vertical direction of the support section. This improves manufacturing flexibility.

[0045] For example, the inner circumference can be formed by a square section and an adjoining round section. The square section can, in particular, be adjacent to the membrane of the molded body.

[0046] Possible receptacles for sealing elements should not be considered a variation of the inner peripheral shape and / or dimensions in this case, as these only extend over a small height of the support section. In particular, a section defining a sealing receptacle forms less than 25% of the longitudinal extent of the support section.

[0047] According to a preferred embodiment, the second section of the support section can form at least 30%, preferably 35%, more preferably 40%, more preferably 45%, more preferably 50%, even more preferably 55%, and even more preferably 60%, of the longitudinal extent of the support section. Manufacturing efficiency can be improved in this way.

[0048] According to a particularly preferred embodiment, the greatest possible distance between two points located on the outer circumference of the membrane can be less than 8 mm, preferably less than 6 mm, preferably less than 5 mm, preferably less than 4.5 mm or less than 4 mm.

[0049] Furthermore, it is possible that the greatest possible distance between two points on the outer circumference of the membrane is greater than 2 mm, preferably greater than 3 mm, more preferably greater than 4 mm, even more preferably greater than 5 mm or greater than 8 mm.

[0050] Such membrane dimensions ensure a relatively small design. At the same time, membranes with such dimensions can be manufactured reproducibly and with high quality.

[0051] The greatest possible distance between two points on the outer circumference of the membrane can, in particular, be a diameter or a diagonal of the membrane, in particular a diameter or a diagonal of the membrane in a plan view of the membrane. The greatest possible distance between two points on the outer circumference of the membrane particularly refers to points that lie on a plane of the membrane, in particular a plane running on or parallel to a membrane surface.

[0052] According to a further advantageous embodiment, in a cross-section of the support section, the greatest possible distance between two points lying on the outer circumference of the support section can be less than 25 mm, preferably less than 22 mm, preferably less than 20 mm, more preferably less than 15 mm, more preferably less than 12 mm, more preferably less than 10 mm, even more preferably less than 9.5 mm, even more preferably about 9 mm or less than 9 mm.

[0053] Furthermore, in a cross-section of the support section, the greatest possible distance between two points lying on the outer circumference of the support section can advantageously be greater than 5 mm, preferably greater than 7 mm, preferably greater than 8 mm or greater than 10 mm.

[0054] A support section dimensioned in this way can ensure sufficient stability while simultaneously ensuring a compact design. The greatest possible distance between two points on the outer circumference of the support section can be a diameter or a diagonal. The greatest possible distance between two points on the outer circumference of the support section particularly applies to points that lie on a plane of the support section, in particular a plane that runs orthogonal to the longitudinal extent of the support section. Such a plane can also run on and / or parallel to a membrane surface.

[0055] According to a further preferred embodiment, the membrane can have a height and / or thickness structuring. This can be understood as variations in the thickness or the extension of the membrane in the vertical direction of the molded body. The membrane can therefore have sections with different thicknesses or with different strengths and / or extensions in the vertical direction of the molded body. The deformation behavior of the membrane can thereby be influenced in a suitable manner.

[0056] According to a further preferred embodiment, a plurality of membranes can be provided. The membranes can be designed, in particular, to be separate and / or spaced apart from one another. The different membranes can be separated from one another by a material section of the support section. The different membranes can run along a common plane and / or be spaced apart from one another transversely to the vertical direction of the shaped body. The membranes can be used for different measuring purposes during operation, in particular for different measuring ranges.

[0057] In a further preferred embodiment, the membrane and / or the support section can be printed with at least one conductor track. A conductor track produced by 3D screen printing can be arranged on the membrane and / or the support section. This further reduces manufacturing costs, since 3D screen printing not only produces the membrane or the support section but also a conductor track required for sensor operation.

[0058] The present invention further relates to a pressure sensor, in particular for measuring the pressure of fluids, comprising a molded body as described above and an electrical arrangement by which a deformation of the membrane can be detected. Such an electrical arrangement can be arranged, for example, on the membrane or the support section.

[0059] Finally, the present invention also relates to a method for producing a shaped body, in particular a shaped body and / or sensor body as described above, in which a membrane and a support section carrying the membrane are produced at least in sections by means of 3D screen printing and the greatest possible distance between two points on the outer circumference of the membrane is less than 10 mm.

[0060] Advantageously, the membrane and / or the support section can be post-processed, particularly mechanically, before a sintering process. Accordingly, the molded body can be printed first, then dried, and then mechanically post-processed before any sintering. The not-yet-sintered green body can therefore be mechanically post-processed, which can be accomplished with minimal effort due to its still low hardness.

[0061] The details described above with regard to the shaped body also apply equally to the method according to the invention, to the pressure sensors described above and also to shaped bodies and / or sensor bodies according to the further independent aspects of the present invention also mentioned above.

[0062] The invention is described below by way of example using advantageous embodiments with reference to the accompanying figures. Each of these figures shows schematically: Fig. 1 a perspective view of a molded body according to the invention from a top side, Fig. 2 a perspective view of a molded body according to the invention from a bottom side, Fig. 3 a bottom view of a molded body according to Fig. 1 and 2 , Fig. 4 a plan view of a molded body according to Fig. 1 to 3 , Fig. 5 a longitudinal section of a molded body according to Fig. 1 to 4 , Fig. 6a detailed view of the vein Fig. 5, Fig. 7 a perspective view of a molded body according to the invention from a bottom side according to a further embodiment, Fig. 8 a bottom view of a molded body according to Fig. 7 , Fig. 9 a perspective view of a molded body according to the invention from a bottom side according to yet another embodiment, Fig. 10 a bottom view of a molded body according to Fig. 9 , Fig. 11 a perspective view of a molded body according to the invention from a bottom side according to yet another embodiment, Fig. 12 a bottom view of a molded body according to Fig. 11 , Fig. 13 a longitudinal section of a molded body according to Fig. 11 and 12 , Fig. 14 a perspective view of a molded body according to the invention from a bottom side according to yet another embodiment, Fig. 15 a bottom view of a molded body according to Fig. 14 , Fig. 16 a longitudinal section of a molded body according to Fig. 14 and 15, Fig. 17 a perspective view of a molded body according to the invention from a bottom side according to yet another embodiment, Fig. 18 a bottom view of a molded body according to Fig. 17 , Fig. 19 a longitudinal section of a molded body according to Fig. 17 and 18 , Fig. 20 a perspective view of a molded body according to the invention from a bottom side according to yet another embodiment, Fig. 21 a bottom view of a molded body according to Fig. 20 , Fig. 22 a longitudinal section of a molded body according to Fig. 20 and 21 , Fig. 23 a perspective view of a molded body according to the invention from a bottom side according to yet another embodiment, Fig. 24 a bottom view of a molded body according to Fig. 23 , Fig. 25 a longitudinal section of a molded body according to Fig. 23 and 24, Fig. 26 a perspective view of a molded body according to the invention from a bottom side according to yet another embodiment, Fig. 27 a bottom view of a molded body according to Fig. 26 , Fig. 28 a longitudinal section of a molded body according to Fig. 26 and 27 , Fig. 29 a perspective view of a molded body according to the invention from a bottom side according to yet another embodiment, Fig. 30 a bottom view of a molded body according to Fig. 29 , Fig. 31 a longitudinal section of a molded body according to Fig. 29 and 30 , Fig. 32 a perspective view of a molded body according to the invention from a bottom side according to yet another embodiment, Fig. 33 a bottom view of a molded body according to Fig. 32 , Fig. 34 a longitudinal section of a molded body according to Fig. 32 and 33 .

[0063] The Fig. 1 and 2show perspective views of a molded body 10 according to an embodiment of the invention. Fig. 3 to 6 show further representations of the molded body 10 according to the embodiment in Fig. 1 and 2 . Further embodiments of the molded body 10 are described in the Fig. 7 to 13 as well as in the Figures 14 to 34 shown.

[0064] One in the Fig. 1 to 34 The molded body 10 shown is particularly suitable for use in pressure sensors for measuring fluid pressures. The molded body 10 is advantageously a sensor body, in particular a sensor body for a pressure sensor.

[0065] Like the Fig. 1 to 34 can be removed, the molded body 10 has a membrane 12 and a support section 14 carrying the membrane. In the exemplary embodiment according to Fig. 1 to 6 The membrane 12 is circular. The embodiments according to Fig. 7 to 34differ from the embodiment according to Fig. 1 to 6 essentially by the shape of the membrane 12 and / or by the number of membranes, which will be explained in more detail below. For example, according to the Figures 7 to 16 a membrane 12 with a square outer circumference is provided. According to the Figures 17 to 34 Further membrane shapes or membrane designs are planned.

[0066] The membrane 12 can be manufactured at least in sections by additive manufacturing, in particular by 3D screen printing. The support section 14 can also be manufactured by additive manufacturing, in particular by 3D screen printing. The membrane 12 and the support section 14 are preferably formed in one piece and / or form a monolithic body.

[0067] Preferably, the membrane 12 and / or the support section 14 are manufactured entirely by 3D screen printing. Furthermore, the membrane 12 and / or the support section 14 can be manufactured exclusively by 3D screen printing, in particular without any mechanical post-processing.

[0068] The membrane 12 has, at least in sections, a thickness of less than 0.5 mm, particularly preferably less than 0.4, less than 0.35, less than 0.3, less than 0.25, preferably less than 0.225 and in particular less than 0.2 mm. Likewise, the membrane can have, at least in sections, a thickness of more than 0.1 mm, preferably more than 0.15 mm, more preferably more than 0.175 mm or more than 0.2 mm. According to the embodiments in the Figures 23 to 31 Larger thicknesses can also be provided in some sections, which will be described below.

[0069] On an upper side 16 of the molded body 10, the support section 14 is flush with the membrane 12. In contrast, on an underside 18 of the molded body 10, the support section 14 protrudes beyond the membrane 12, forming a cavity 20 inside the support section 14. The cavity 20 is bounded by the membrane 12 at the upper side 16 of the molded body 10. The cavity 20 is open at the underside 18 of the molded body 10.

[0070] The upper side 16 can be a side facing away from the media. The lower side 18, on the other hand, can be a side facing the media or a media side of the molded body 10.

[0071] On the media-facing underside 18, a receptacle 21 for a sealing ring or O-ring can be formed, which corresponds to the longitudinal section of the Fig. 5can be removed. The receptacle 21 is preferably formed on an inner circumference of the support section 14. The receptacle 21 can in particular be formed as a bevel or chamfer running all the way around.

[0072] The membrane 12 can advantageously consist of at least three layers printed by means of the 3D screen printing process. Preferably, the membrane 12 can consist of a maximum of fifteen layers. According to the embodiments in the Figures 23 to 31 More than fifteen layers can be provided in some sections, as will be described below.

[0073] In Fig. 6Schematic representations of different layers 23 of the membrane 12 and of the support section 14 are shown. The thickness of the individual layers 23a of the membrane 12 can be less than the thickness of at least one layer 23b of the support section 14. This applies in particular to regions 22 of the support section 14 that protrude relative to the membrane 12 along a height direction 24 or along a longitudinal extension of the molded body 10.

[0074] In Fig. 6It can also be seen that regions 26 of the support section 14, which surround the membrane 12 in the circumferential direction, can have an identical layer thickness to the respective layer thicknesses of the membrane 12. In particular, the respective layers 23a of the membrane 12 can be produced continuously with the layers 23c to create the region 26 of the support section 14, which surrounds the membrane 12 in the circumferential direction. Although not shown in detail, such a formation of the layers can be provided in all embodiments.

[0075] As mentioned above, the support section 14 can surround the membrane 12, in particular surround it all the way around. The support section 14 can be circular, in particular have a circular outer peripheral shape, as shown, for example, in the Fig. 1 to 4 and 9 to 34The circular outer circumference shape can be interrupted by an indentation on the outer circumference. Likewise, the support section 14 can have a square outer circumference shape, as for example in Fig. 7 and 8 Although not shown in detail, the embodiments according to Fig. 1 to 4 and 9 to 34 also be provided with a square outer peripheral shape of the support section 14.

[0076] The inner circumferential shape of the support section 14 can correspond at least in sections to the outer circumferential shape of the membrane 12. If the outer circumferential shape of the membrane 12 is circular, the inner circumferential shape of the support section 14 can also be circular at least in sections, as shown, for example, in Fig. 1 to 4 shown. If the outer peripheral shape of the membrane 12 is angular, the inner peripheral shape of the support section 14 can also be angular, at least in sections, as for example in Fig. 7 to 12 shown.

[0077] The membrane 12 can be circular in accordance with Fig. 1 to 6 have a diameter which, according to the invention, is less than 10 mm, preferably less than 8 mm, more preferably less than 6 mm, more preferably less than 4.5 mm, even more preferably less than 4 mm.

[0078] For rectangular or square membrane outer circumference shapes according to Fig. 7 to 13 the above values ​​may refer to a possible

[0079] Diagonal of the membrane 12, in particular a diagonal in plan view of the membrane 12. This can also be applied accordingly to the other Fig. 14 to 34 shown membrane shapes may be the case.

[0080] In a cross-section or in a bottom view from the underside 18 of the support section, as for example in the Fig. 3 , 10 , 12 , 15 , 18 , 21 , 24 , 27 , 30 and 33shown, and / or in a top view from the top side 16, such as in Fig. 4 As shown, an outer diameter of the support portion may be less than 25 mm, preferably less than 22 mm, more preferably less than 20 mm, more preferably less than 15 mm, more preferably less than 12 mm, more preferably less than 10 mm, even more preferably less than 9.5 mm, even more preferably about 9 mm or less than 9 mm.

[0081] In the case of rectangular or square outer peripheral shapes of the support section 14, as in Fig. 7 and 8 As shown, the above values ​​may refer to a diagonal, in particular in a top view of the molded body 10 and / or in a bottom view of the molded body 10.

[0082] In the embodiment according to Fig. 7 and 8The membrane 12 has a square outer circumference. The support section 14 has both a square outer circumference and a square inner circumference. The square inner circumference runs consistently along the longitudinal extent of the support section 14.

[0083] In the embodiment according to Fig. 9 and 10 The membrane 12 also has a square outer circumference. The support section 14 has a square inner circumference but a circular outer circumference. The square inner circumference runs consistently along the longitudinal extent of the support section 14.

[0084] In the embodiment according to Fig. 11 to 13The membrane 12 also has a square outer circumference. The support section 14 has a circular outer circumference and different inner circumference shapes along its longitudinal extent. Thus, the inner circumference of the support section 14 is square in a section 28 surrounding the membrane 12. The section 28 with the square inner circumference protrudes above the membrane 12 in the vertical direction 24. Adjacent to the section 28 with the square inner circumference is a section 30 with a circular inner circumference. This creates a step 32 on the inner circumference of the support section 14.

[0085] The embodiment in the Fig. 14 to 16 differs from the embodiment in the Fig. 11 to 13 with respect to the outer peripheral shape of the membrane 12 or with respect to the inner peripheral shape of the section 28 of the support section 14. According to the embodiment in the Fig. 14 to 16The membrane 12 also has a square outer peripheral shape or an outer peripheral shape with corners 34. However, the boundary of the membrane 12 running between the corners 34 is curved or has a bent shape, as in particular the Fig. 15 The boundary of the membrane 12 extending between the corners 34 is designed according to the Fig. 14 to 16 curved inwards. Consequently, the section 28 of the support section 14 has inwardly curved wall sections 36. In a bottom view according to Fig. 15 This results in a membrane 12 with a square shape and lateral constrictions. This shape of the membrane 12 allows for advantageous properties specific to the application to be achieved.

[0086] The embodiment in the Fig. 17 to 19 differs from the embodiment in the Fig. 14 to 16with respect to the outer peripheral shape of the membrane 12 or with respect to the inner peripheral shape of the section 28 of the support section 14. According to the embodiment in the Fig. 17 to 19 The membrane 12 also has an angular outer peripheral shape or an outer peripheral shape with corners 34 or rounded corners 34. The boundary of the membrane 12 running between the corners 34 or rounded corners 34 is also curved or has a curved shape, as in particular the Fig. 18 can be removed.

[0087] The boundary of the membrane 12 running between the corners 34 is according to the Fig.17 to 19 However, unlike the embodiment according to Fig. 14 to 16 - curved outwards. Consequently, the section 28 of the support section 14 has outwardly curved wall sections 36. In a bottom view according to Fig. 18This results in a membrane 12 with a rounded, angular shape and lateral bulges. This shape of the membrane 12 allows for advantageous properties specific to the application.

[0088] The embodiment in the Fig. 20 to 22 differs from the embodiment in the Fig. 14 to 19 with respect to the outer peripheral shape of the membrane 12 or with respect to the inner peripheral shape of the section 28 of the support section 14. According to the embodiment in the Fig. 20 to 22 the membrane 12 also has a square outer peripheral shape or an outer peripheral shape with corners 34.

[0089] The boundary of the membrane 12 running between the corners 34 is according to the Fig. 20 to 22 however, is wavy or has a wavy shape, such as the Fig. 21can be removed. Consequently, the section 28 of the support section 14 has corrugated and / or wavy wall sections 36. In a bottom view according to Fig. 21 This results in a membrane 12 with an overall angular shape as well as a lateral wave limitation or lateral wave shaping.

[0090] Instead of the lateral wave boundary or lateral wave shape, serrated or jagged boundaries of the membrane 12 can also be provided. In this case, the membrane 12 is defined between the corners 34 by a serrated boundary. Such shapes can ensure advantageous properties for specific applications.

[0091] The embodiment in the Fig. 23 to 25 differs from the embodiment in the Fig. 1 to 6 in relation to the design of the membrane 12. According to the embodiment in the Fig. 23 to 25The membrane 12 also has a circular outer circumference, but is provided with a height or thickness structuring. This can be understood as variations in the thickness or the extension of the membrane 12 in the height direction 24. The membrane 12 according to Fig. 23 to 25 accordingly has sections with different thicknesses or with different strengths in the height direction 24 of the shaped body 10.

[0092] Membrane sections with greater thicknesses or greater strengths or extensions in the height direction 24 can accordingly be produced by a larger number of layers and / or by greater layer thicknesses than membrane sections with smaller thicknesses or smaller strengths or extensions in the height direction 24.

[0093] It can Fig. 23 to 25It can be seen that the membrane 12 has an inner section 38 of relatively small thickness. The inner section 38 is surrounded by a plurality of outer sections 40 and 42 of greater thickness. The inner section 38 can be seen in a bottom view according to Fig. 24 have a cloverleaf-like shape or a cloverleaf-like outer contour. The outer sections 40 and 42 with greater thickness can protrude into the inner section 38 and thus form a support structure. The compliance behavior of the membrane 12 can be influenced in this way.

[0094] The outer sections 40 and 42 can be dimensioned such that they exhibit compliance during operation or ensure measurable flexibility during operation. The outer sections 40 can have a constant thickness. The outer sections 42 can, in turn, be stepped and thus have two different thickness ranges. The regions of the outer sections 42 with greater thickness can each be formed by an extension 44 in the vertical direction 24. According to Fig. 23 to 25 The thickness of the membrane 12 can be gradually reduced from the outer circumference to the membrane center. The outer sections 40 and 42 can provide support for the inner section 38 in the manner of a leaf spring.

[0095] The embodiment in the Fig. 26 to 28 differs from the embodiment in the Fig. 11 to 13 in relation to the design of the membrane 12. According to the embodiment in the Fig. 26 to 28The membrane 12 also has a square outer peripheral shape, but is again provided with a height or thickness structuring. As mentioned above, this can be understood as variations in the thickness or the extension of the membrane 12 in the height direction 24. The membrane 12 according to Fig. 26 to 28 accordingly has sections with different thicknesses or with different strengths in the height direction 24 of the shaped body 10.

[0096] It can Fig. 26 to 28It can be seen that the membrane 12 has an outer section 46 with a relatively small thickness. The outer section 46 further surrounds an inner section 48 with a greater thickness. The inner section 48 can have different thicknesses. In particular, the inner section 48 can be provided with a further thickened central section 50. The central section 50 can be formed by a block-like projection in the vertical direction 24. The inner section 48 and / or the central section 50 can form a support structure for the entire membrane 12 or for the outer section 46 of the membrane 12. The compliance behavior of the membrane 12 can be influenced in this way.

[0097] The inner section 48 and / or the central section 50 can be dimensioned such that they exhibit compliance during operation or ensure measurable flexibility during operation. It is also possible for the central section 50 to form a local stiffener of the membrane 12, and only the remaining part of the inner section 48 to be dimensioned and / or designed for compliance during operation. The compliance behavior of the membrane 12, in particular of the remaining part of the inner section 48 and the outer section 46, can be influenced in this way.

[0098] Accordingly, the thickness of the membrane 12 can be Fig. 26 to 28 be gradually increased from the outer circumference to the center of the membrane. In particular, the inner section 46 and / or the central section 50 can provide a supporting function for the outer section 46 in the manner of a leaf spring.

[0099] The embodiment in the Fig. 29 to 31differs from the embodiment in the Fig. 1 to 6 in relation to the design of the membrane 12. According to the embodiment in the Fig. 29 to 31 The membrane 12 also has a circular outer circumference, but is again provided with a height or thickness structuring. As mentioned above, this can be understood as variations in the thickness or the extension of the membrane 12 in the height direction 24. The membrane 12 according to Fig. 29 to 31 accordingly has sections with different thicknesses or different extensions in the height direction 24 of the shaped body 10.

[0100] It can Fig. 29 to 31It can be seen that the membrane 12 largely has a relatively small thickness along its surface extent. However, at a total of four defined locations, the membrane 12 has locally limited support structures 52. The support structures 52 form extensions in the vertical direction 24 of the shaped body 10, so that the membrane 12 has a greater extension in the vertical direction 24 in the region of the support structures 52. In the event of a deflection of the membrane 12, for example during a pressure measurement during operation, the support structures 52 can come into laterally contact with the inner circumferential surface of the support section 14 and thus ensure that the deflection is limited. The deflection behavior of the membrane 12 can be suitably influenced in this way, and operational reliability can be increased.

[0101] The embodiment in the Fig. 32 to 34 differs from the embodiment in the Fig. 11 to 13again with regard to the membrane design. According to the embodiment in the Fig. 32 to 34 two separate membranes 12a and 12b are provided. The support section 14 according to Fig. 32 to 34 has sections with different inner circumference shapes along its longitudinal extent, namely a section 28 that surrounds the membranes 12a and 12b, and a section 30 that adjoins the section 28 in the vertical direction 24. This again results in a step 32 on the inner circumference of the support section 14.

[0102] The section 30 of the support section 14 has a circular inner circumferential shape. In contrast, the section 28 of the support section has recesses that define the outer circumferential shapes of the membranes 12a and 12b. The membranes 12a and 12b can have different sizes, in particular in terms of surface area, and / or different thicknesses, which in particular Fig. 33 and 34can be removed. In the embodiment according to Fig. 32 to 34 The membranes 12a and 12b can each have a square or rectangular outer circumference. However, other outer circumference shapes are also possible for the membranes 12a and 12b, for example, the Fig. 14 to 22 The membrane outer circumference shapes described above are also suitable. Furthermore, a larger number of membranes can also be provided. Overall, a design with multiple membranes can expand the measurement functionality during operation, for example, to cover different measurement ranges.

[0103] The molded body 10 or the support section 14 can - according to all embodiments - have a total height, in particular in the height direction 24 or along the longitudinal extent of the molded body 10, of less than 15 mm, preferably less than 12 mm, more preferably less than 10 mm, more preferably less than 8 mm, more preferably less than 6 mm, even more preferably less than 4 mm or approximately 4 mm. According to the invention, the support section 14 has a total height, in particular in the height direction 24 or along a longitudinal extent of the molded body 10, of more than 2 mm, more preferably more than 3 mm.

[0104] The molded body 10 can—according to all embodiments—preferably be produced from a ceramic material, in particular from an aluminum oxide or a material containing aluminum oxide. In particular, the membrane 12 and / or the support section 14 can consist of such a ceramic material. The materials of the membrane 12 and the support section 14 can be identical or different from one another. It is possible for the membrane 12 and the support section 14 to have identical base materials but different additives and thus have a different material composition. Furthermore, the support section 14 can—according to all embodiments—be made of different materials or material compositions in different areas.The region 22 of the support section 14, which surrounds the membrane 12 in the circumferential direction, can consist of the same material or the same material composition as the membrane 12. In contrast, the support section 14 can be produced from a different material or a different material composition in a region 26, which protrudes in the height direction 24 or along the longitudinal extent of the shaped body 10 relative to the membrane 12.

[0105] The molded body 10 can be manufactured with minimal effort using additive manufacturing, in particular using 3D screen printing. Any post-processing, particularly mechanical post-processing, of the membrane 12 can be avoided or reduced to a minimum. Thus, the desired thickness or texture of the membrane 12 can be achieved directly using additive manufacturing, without the need for mechanical post-processing such as grinding or lapping.

[0106] By forming the membrane 12 and the support section 14 in one piece, subsequent joining steps between the membrane 12 and the support section 14 can be avoided. Overall, a molded body 10 can be manufactured in this way with minimal manufacturing effort while simultaneously meeting high quality requirements.

[0107] In a method for producing the shaped body 10, the membrane 12 with a thickness of less than 0.5 mm and the support section 14 carrying the membrane 12 can be produced at least in sections by means of 3D screen printing.

[0108] In this case, the membrane 12 and the region 22 of the support section 14, which surrounds the membrane 12 in the circumferential direction, can advantageously be printed in several layers. Subsequently, further layers of the support section 14, which protrude relative to the membrane 12 in the vertical direction 24 or along a longitudinal extension of the molded body 10, can be created by applying additional layers. This creates the region 26 of the support section 14.

[0109] The layer thicknesses in region 26 can be greater than in region 22 of the support section 14. In this way, a membrane 12 or a region 22 of the support section 14 surrounding the membrane 12 can be manufactured with high precision. In contrast, the required overall height of the support section 14 can be achieved at a high production speed due to the greater layer thicknesses in region 26.

Claims

1. Shaped body (10), in particular for a pressure sensor, with a membrane (12) and with a supporting section (14) supporting the membrane (12), wherein the membrane (12) is produced at least in sections from a ceramic material by means of additive manufacturing, characterized in that the greatest possible distance between two points lying on the outer circumference of the membrane (12) is less than 10 mm and in that the supporting section (14) has a total height of more than 2 mm.

2. Shaped body (10) according to claim 1, characterized in that the membrane (12) has, at least in sections, a thickness of less than 0.5 mm, preferably of less than 0.4 mm, preferably of less than 0.35 mm, preferably of less than 0.3 mm, more preferably of less than 0.25 mm, further preferably of less than 0.225 mm, in particular of less than 0.2 mm, and / or in that the membrane (12) has, at least in sections, a thickness of more than 0.1 mm, preferably of more than 0.15 mm, further preferably of more than 0.175 mm or more than 0.2 mm.

3. Shaped body (10) according to claim 1 or 2, characterized in that the supporting section (14) is produced, at least in sections, from a ceramic material by means of additive manufacturing, in particular 3D screen printing, and / or in that the membrane (12) and the supporting section (14) are each produced completely from a ceramic material and / or in that the materials of the membrane (12) and of the supporting section (14) differ from one another and / or in that the materials of the membrane (12) and of the supporting section (14) have an identical base material and / or other auxiliary materials.

4. Shaped body (10) according to at least one of the preceding claims, characterized in that the membrane (12) and the supporting section (14) are produced in one piece and / or form a monolithic body and / or in that the membrane (12) and / or the supporting section (14) are produced entirely by means of 3D screen printing and / or in that the membrane (12) is produced free of mechanical post-processing, in particular free of machining post-processing, and / or in that the membrane (12) and / or supporting section (14) is produced exclusively by means of 3D screen printing.

5. Shaped body (10) according to at least one of the preceding claims, characterized in that the membrane (12) is produced from a number of at least 3 layers and / or 15 layers at most, preferably from a number of more than 4 and less than 12 layers, in particular 5 to 15, 10 to 15, 3 to 12, 3 to 10, 5 to 10 or 6 to 8 layers.

6. Shaped body (10) according to at least one of the preceding claims, characterized in that the membrane (12) and the supporting section (14) are each produced from a plurality of printed layers and / or in that at least one printed layer of the membrane (12) has a smaller thickness than a printed layer of the supporting section (14).

7. Shaped body (10) according to at least one of the preceding claims, characterized in that the supporting section (14) has, in a region (22) adjacent to the membrane (12) in the circumferential direction, layer thicknesses which correspond to the layer thicknesses of the membrane (12), and / or in that the supporting section (14) is produced, in a region adjacent to the membrane (12) in the circumferential direction, from layers which merge into layers of the membrane (12) without interruption.

8. Shaped body (10) according to at least one of the preceding claims, characterized in that the membrane (12) is designed to be fluid-tight, in particular gas-tight, and / or in that the thickness and / or the material of the membrane (12) and / or the number and / or thickness of the layers of the membrane (12) is selected to achieve fluid-tight, in particular gas-tight, properties.

9. Shaped body (10) according to at least one of the preceding claims, characterized in that the membrane (12) has a rounded, in particular circular, outer peripheral shape at least in sections and / or in that the membrane (12) has an outer peripheral shape with at least one corner, in particular with a plurality of corners, and / or in that the membrane (12) has a quadrangular, rectangular, in particular square, triangular, pentagonal or hexagonal outer peripheral shape.

10. Shaped body (10) according to at least one of the preceding claims, characterized in that the supporting section (14) has an inner circumferential shape which corresponds to the outer circumferential shape of the membrane (12), and / or in that the supporting section (14) has an inner circumferential shape which corresponds to the outer circumferential shape of the supporting section (14), and / or in that the inner circumferential shape of the supporting section (14) differs from the outer circumferential shape of the supporting section (14), and / or in that the supporting section (14), along a longitudinal extent, has sections with different inner circumferential shapes.

11. Shaped body (10) according to at least one of the preceding claims, characterized in that the greatest possible distance between two points lying on the outer circumference of the membrane (12) is less than 8 mm, preferably less than 6 mm, more preferably less than 4.5 mm, still more preferably less than 4 mm, and / or in that the greatest possible distance between two points lying on the outer circumference of the membrane (12) is defined by a diameter or by a diagonal of the membrane (12).

12. Shaped body (10) according to at least one of the preceding claims, characterized in that in a cross-section of the supporting section (14), the greatest possible distance between two points lying on the outer circumference of the supporting section (14) is less than 25 mm, preferably less than 22 mm, more preferably less than 20 mm, more preferably less than 15 mm, further preferably less than 12 mm, further preferably less than 10 mm, still further preferably less than 9.5 mm, still further preferably about 9 mm or less than 9 mm, and / or that the greatest possible distance between two points lying on the outer circumference of the supporting section (14) is defined by a diameter or by a diagonal.

13. Shaped body (10) according to at least one of the preceding claims, characterized in that the membrane (12) has a height and / or thickness structuring and / or that the membrane (12) has variations in thickness and / or in extension in the height direction (24) and / or that the membrane (12) has sections with different thicknesses and / or with different thicknesses and / or in extensions in the height direction and / or that a plurality of membranes (12a, 12b) separated from one another are provided.

14. Pressure sensor, in particular for measuring the pressure of fluids, having a shaped body (10) according to one of the preceding claims and having an electrical arrangement by means of which a deformation of the membrane (12) of the shaped body (10) can be detected.

15. Method for producing a shaped body (10), in particular according to one of claims 1 to 13, in which a membrane (12) and a supporting section (14) supporting the membrane (12) are produced, at least in sections, by means of 3D screen printing, the greatest possible distance between two points lying on the outer circumference of the membrane (12) is less than 10 mm and the supporting section (14) has a total height of more than 2 mm.