METHOD FOR APPLYING A DIMENSION TO A SURFACE OF A GUIDE CARRIER OF A LINEAR PROFILE RAIL GUIDE, DIMENSION FOR A LINEAR ENCODER AND LINEAR ENCODER

Description

Technisches Gebiet

[0001] The present invention relates generally to scales for linear encoders and to an optimized method for applying a scale to a surface of a guide carriage of a linear profile rail guide. Stand der Technik

[0002] Mass media are known in principle from the prior art. They are used particularly in incremental encoders. These are sensors for detecting changes in position (linear) or angle (rotational), which can measure distance and direction or angle change and direction of rotation. The known mass media of incremental encoders exhibit periodically repeating scattering or absorption regions, which are counted by a sensor device to detect the change in position.

[0003] For example, German patent DE 2 515 574 discloses a metal scale which has scattering zones composed of a large number of line elements. The line elements are parallel and narrow, their width and depth being dimensioned such that the line elements of a scattering zone are not individually distinguishable in visible light, but are only recognizable by their diffraction pattern.

[0004] In other words, each of the scattering areas known from DE 2 515 574 consists of a multitude of line-like depressions (line elements) arranged directly next to each other with a width on the order of 1 µm (preferably 0.5 to 1.5 µm) and a depth which is about 1.5 µm and is therefore on the order of a wavelength of the light with which the known standard is illuminated in the reflected light method, for example under a photoelectric microscope.

[0005] As can be seen, for example, in publication DE 10 2007 007 311, in the reflected light method a light beam is directed by a collimator onto a surface provided with a reflective scale, so that the surface or the scale is illuminated with essentially parallel bundled light, whereby the light is incident at an angle to the surface normal. The scale comprises structured areas, which are structured with diffractive phase grating structures in the form of line gratings, and unstructured areas, which are each formed by a smooth (reflective) surface.

[0006] The angle of incidence of the light incident on the surface is preferably selected such that, at the diffractive phase-grating structures in structured regions, the light is diffracted in such a way that a diffraction order of the diffracted light leaves the material perpendicularly. Under these circumstances, the light incident on the unstructured regions is reflected at the surface, so that it leaves the unstructured regions (hereinafter also referred to as "mirror regions") at an angle of reflection to the surface normal that is equal to the angle of incidence. The light diffracted substantially perpendicular to the surface at the structured regions is then imaged onto the photosensors of a sensor device, the sensor device preferably being arranged such that the light reflected at the unstructured regions (mirror regions) is not detected by the photosensors of the sensor device.

[0007] According to this, the structured areas can be detected as bright fields and the unstructured areas (mirror areas) as dark fields using the sensor device.

[0008] When the sensor device is moved along the incremental track, it primarily detects the light diffracted by the structured areas (dark-field measurement of the structured areas). The structured areas and the unstructured areas (mirror areas) are arranged alternately in a row, forming an incremental track. The structured areas are spaced at constant intervals and separated from each other by the mirror areas. Consequently, each structured area forms a so-called marker, and the sensor device can count these markers of the incremental track and convert them into a periodically changing sensor signal if the sensor device is moved along the length of the incremental track relative to the markers.

[0009] The periodic sensor signal can be used by a computer unit to calculate the displacement along the physical object. Since the sensor signal changes periodically when the sensor device moves along the incremental track, it is possible to measure the respective sensor signal at different positions along the incremental track and thus assign different sensor signal values ​​to different positions. Interpolation between these sensor signal values, each assigned to a specific predefined position of the sensor device relative to the incremental track, ultimately allows for the highly accurate determination of any position of the sensor device (between any two predefined positions).

[0010] To increase the sensor signal, it is possible to illuminate the physical object simultaneously with light from two different light sources arranged next to each other, so that light falls on the surface or the physical object from two different directions (each at an angle to the surface normal).

[0011] The material representations known from the prior art have the disadvantage that the sensor signal detected by the sensor device often has only a low contrast. d.h. The sensor device generates sensor signals by scanning the scattering or absorption areas and the mirror areas in such a way that a sensor signal generated by scanning a scattering or absorption area and a sensor signal generated by scanning a mirror area differ relatively little and accordingly exhibit a relatively small difference (contrast).

[0012] This, in turn, can lead to individual scattering or absorption regions not being adequately detected and the displacement of the sensor device relative to the scale being insufficiently recorded. Furthermore, with scales known from the prior art, it is considered problematic that the sensor signals obtained through reflection from the scale exhibit insufficient interpolability.

[0013] In particular, there is a need to specify a displacement measurement system that operates on the principle of bright-field measurement, whereby a change in position can be reliably detected by means of a detector arranged "in the bright field." Bright-field measurement means that the detector is directly reached by the radiation reflected from the mirror areas when there is no scattering or absorption area of ​​a massing element within the measurement range of the displacement measurement system.

[0014] This means, in particular, that the light source illuminates the scale on the scale parallel to the sensor's beam path, which differs from dark-field illumination where the scale is illuminated at approximately a 45° angle. The operation of the encoder used in the bright-field measurement system requires a regular (mirror-like) reflection of the light emitted by the light source at mirrored areas on the scale. Ideally, every ray incident on the surface of the scale should be reflected at the same angle to the surface normal in the respective mirrored areas.

[0015] Linear profile rail guides typically comprise a (linear) guide rail and at least one movable carriage, which is guided along the guide rail in such a way that it can move linearly in the longitudinal direction of the guide rail. With such profile rail guides, there is usually an interest in measuring the position of the carriage, which is guided along the guide rail and can move linearly in the longitudinal direction of the guide rail.

[0016] For the metrological determination of the position of the guide carriage, a linear encoder can be used in this case. This encoder comprises a scale extending in the longitudinal direction of the guide rail and a sensor device movable relative to the scale in the longitudinal direction of the scale for scanning the respective markings on the scale. To enable metrological determination of the position of the guide carriage of the linear profile rail guide, the sensor device can be arranged on the guide carriage in such a way that it is movable along with the guide carriage in the longitudinal direction of the guide rail.

[0017] To enable simplified installation of a linear profile rail guide in combination with a linear encoder for metrological detection of the position of a guide carriage movable in the longitudinal direction of the guide rail of the linear profile rail guide, it was proposed, among other things, to provide the guide rail of the linear profile rail guide together with the scale in the form of a single workpiece and, for this purpose, to form the respective markings of the scale directly on a surface of the guide rail by means of machining the surface of the guide rail, for example by machining the surface with a laser beam.

[0018] From publication EP 3060887 B1, a scale for an incremental encoder and a method for producing a scale on a metal surface using a pulsed laser are known, wherein this method is in principle suitable for realizing a corresponding scale on a surface of a guide rail of a linear profile rail guide. The method disclosed in publication EP 3060887 B1 is designed for an incremental encoder with a scale having an incremental track with scattering areas and mirror areas arranged alternately in a longitudinal direction, wherein the incremental encoder includes a sensor device configured to optically scan the incremental track.and for this purpose comprises a measuring head movable relative to the scale, with an optical imaging device for generating an image of the incremental track and a plurality of photosensors for capturing the image. To enable optical scanning of the incremental track, the incremental track is illuminated by two light sources, which generate light that falls on the scattering and mirror areas of the scale at an angle chosen such that light reflected directly from the mirror areas of the scale does not reach the optical imaging device and thus cannot be detected by the photosensors. The sensor device is instead designed to detect only light that is scattered at the scattering areas of the scale substantially perpendicular to the metal surface.on which the standard is formed (which corresponds to optical detection of the scattering areas of the standard according to the principle of dark-field measurement). In order to ensure that the scattering areas of the standard can be detected by the sensor device with the greatest possible contrast compared to the mirror areas, it is proposed in publication EP 3060887 B1 to produce the scattering areas of the standard on the metal surface by processing the surface with a pulsed laser in such a way that each of the scattering areas has at least two line-like depressions which extend substantially perpendicular to the longitudinal direction of the incremental track and are arranged one behind the other in the longitudinal direction of the incremental track and are designed to diffusely reflect incident light.wherein each of the linear depressions of the scattering zones is formed from a plurality of essentially circular depressions, which are arranged in an overlapping manner. Regarding the dimensions of the linear depressions of a scattering zone and the arrangement of the linear depressions of a scattering zone relative to each other, it is proposed in publication EP 3060887 B1 that the width of the linear depressions in the longitudinal direction of the incremental track and / or the respective distances between two adjacent linear depressions can be suitably selected to achievethat the spatial intensity distribution of the light diffusely reflected by the line-like depressions of a single scattering area can be relatively homogeneous, and that the scattering areas of the mass measure can be detected by the sensor device with a relatively high contrast compared to the mirror areas when optically detecting the scattering areas of the mass measure according to the principle of dark-field measurement, as implemented in this case, if each of the line-like depressions – in the longitudinal direction of the incremental track – has a width of 3.5 µm to 12 µm, preferably 6 µm to 9 µm, and particularly about 7 µm, and the distance between two adjacent parallel, line-like depressions is greater than zero. In this regard, it is specifically proposed in EP 3060887 B1 that the scattering areas each have at least three parallel, line-like depressions.which are oriented perpendicular to the longitudinal direction of the incremental track and spaced apart by 6 to 9 µm, preferably about 7.5 µm.

[0019] A physical embodiment known from publication EP 3060887 B1 proves to be problematic in the case of optical scanning of the physical embodiment according to the principle of brightfield measurement.In this case, the light shining onto the material is reflected at the mirror areas and scattered at the individual scattering areas (each formed from several line-like and spaced-apart depressions) in such a way that the scattering areas of the material can only be detected by the sensor device with a low contrast compared to the mirror areas when optically detecting the scattering areas of the material according to the principle of a bright-field measurement, which makes it difficult to evaluate the measurement signals generated by the sensor device and, if the sensor device is moved in the longitudinal direction of the material, significantly impairs the accuracy of determining the path traveled by the sensor device in the longitudinal direction of the material.

[0020] The profile rail guides known from the prior art with a scale known from publication EP 3060887 B1 are therefore not very suitable for optical scanning of the scale according to the principle of brightfield measurement.

[0021] An implementation of the above-described embodiment of a profile rail guide, in which the position of the guide carriage is measured with respect to the longitudinal direction of the guide rail by providing the guide rail with a dimension extending in the longitudinal direction of the guide rail and, in addition, attaching a sensor device suitable for scanning the dimension to the guide carriage, can have disadvantages with regard to a number of applications. For example, attaching a sensor device to the guide carriage of a profile rail guide requires that sufficient space be available for the sensor device to be attached to the guide carriage in a suitable manner so that the sensor device is capable of scanning the dimension.This requirement limits the design of the profile rail guide, for example, with regard to the geometric dimensions of the guide carriage. For instance, profile rail guide designs are known in which a sensor device intended for scanning a physical dimension is arranged on an end face of a guide carriage. In this case, the guide carriage and the sensor device form a physical unit which—compared to the guide carriage—can require a relatively large amount of space.In this case, scanning a scale mounted on a guide rail using a sensor device arranged on the end face of the guide carriage can be problematic, for example, if the longitudinal extent of the guide rail must be relatively short (for example, not significantly longer than the longitudinal extent of the guide carriage) due to space constraints. Furthermore, in this case, the guide carriage and the sensor device form a single physical unit, which—compared to the guide carriage—can have a relatively large mass. This latter point is particularly disadvantageous in dynamic applications where the guide carriage frequently needs to be moved with relatively high acceleration along the guide rail.

[0022] Document US 2007 / 240325 A1 discloses a method for manufacturing an optical measuring scale for use with an optical encoder, comprising: creating a marking on the scale by irradiating the surface of a reflective, flexible metal substrate at a predetermined marking position with a series of spatially overlapping pulses from a laser, each pulse having a two-dimensional pulse intensity distribution; changing the relative position of the laser and the substrate by a displacement that defines a next marking position on the substrate at which the next marking on the scale is to be created; and repeating the marking creation and position change steps for successive markings of a plurality of markings on the scale.To create markings of varying widths using this method, it is possible to use laser pulses whose pulse intensity distribution on the surface of the metal substrate exhibits different widths. Alternatively, to create a wider marking on the measuring scale, several narrower markings can be created in such a way that the multiple narrower markings are placed directly next to each other. Zusammenfassung der Erfindung

[0023] Based on this problem, the invention aims to provide an optimized method for applying a physical dimension to a surface area of ​​a linear profile rail guide, wherein the physical dimension is suitable for use as a component of a linear encoder, which is based on optical scanning of the physical dimension according to the principle of bright-field measurement and is designed to reliably enable the detection of a change in position of a guide carriage of the profile rail guide with respect to a guide rail of the profile rail guide.

[0024] Furthermore, a corresponding physical mass and a corresponding linear encoder should be specified.

[0025] With regard to the method, the problem underlying the invention is solved by the subject matter of independent claim 1. With regard to the physical embodiment, the problem underlying the invention is solved by claim 10, and with regard to the linear encoder by claim 12.

[0026] The method serves to apply a dimensioned representation to a surface of a guide carriage of a linear profile rail guide, wherein the guide carriage is guided on a guide rail of the profile rail guide so that the guide carriage is linearly movable in the longitudinal direction of the guide rail, and wherein the guide carriage has a first side surface extending in the longitudinal direction of the guide rail, wherein the dimensioned representation comprises at least one track extending linearly in the longitudinal direction of the guide rail with several mirror areas and marking areas arranged alternately one after the other, each of the marking areas extending linearly transversely to the longitudinal direction of the at least one track, and wherein the method comprises the following process steps: Providing a pulsed laser for generating a laser beam; and providing at least one of the marking areas by introducing a microstructure into a first area of ​​the first side surface of the guide carriage corresponding to the at least one marking area, by: the laser generating the laser beam with a sequence of several light pulses and the laser beam being directed onto the first area of ​​the first side surface in such a way that each individual light pulse of the generated sequence of several light pulses irradiates only a sub-area of ​​the first area in such a way that the first side surface in the sub-area of ​​the first area irradiated by the respective individual light pulse is altered as a result of the irradiation with the respective individual light pulse in such a way that the first side surface exhibits a spatial modulation of the first side surface after irradiation with the respective individual light pulse.which extends over the sub-area of ​​the first region illuminated by the respective individual light pulse, wherein the spatial extent of the sub-area of ​​the first region illuminated by the respective individual light pulse in the longitudinal direction of the at least one track is smaller than the spatial extent of the first region in the longitudinal direction of the at least one track, and that the spatial extent of the sub-area illuminated by the respective individual light pulse transversely to the longitudinal direction of the at least one track is smaller than the spatial extent of the first region transversely to the longitudinal direction of the at least one track; the laser beam is moved relative to the guide carriage, such that at least several of the light pulses of the generated sequence of several light pulses successively illuminate several different sub-areas of the first region, which are spatially distributed relative to each other.

[0027] For each of the several different irradiated sub-areas, there is at least one other of the several different irradiated sub-areas which is offset to the respective individual of the several different irradiated sub-areas in the longitudinal direction of the at least one track and / or transversely to the longitudinal direction of the at least one track such that the respective individual of the several different irradiated sub-areas and the at least one other of the several different irradiated sub-areas have an overlap, wherein the several different irradiated sub-areas together form an area of ​​the first side surface which is congruent with the first area.

[0028] In particular, for each of the several different irradiated sub-areas, there are at least two other of the several different irradiated sub-areas which are spatially offset from the respective individual of the several different irradiated sub-areas in such a way that one of the at least two other of the several different irradiated sub-areas is offset relative to the respective individual of the several different irradiated sub-areas transversely to the longitudinal direction of the at least one track, and one of the at least two other of the several different irradiated sub-areas and the respective individual of the several different irradiated sub-areas (transversely to the longitudinal direction of the at least one track) have an overlap.and that the other of the at least two other of the several different irradiated sub-areas is offset relative to the respective individual of the several different irradiated sub-areas in the longitudinal direction of the at least one track, and that the other of the at least two other of the several different irradiated sub-areas and the respective individual of the several different irradiated sub-areas (in the longitudinal direction of the at least one track) have an overlap.

[0029] In the inventive method, the laser beam is moved two-dimensionally over a first region of the first side surface of the guide carriage, corresponding to a marking area of ​​the scale to be applied, so that different sub-regions of the first region of the first side surface are irradiated successively. The irradiation of a sub-region with one of the light pulses causes a local, slight ablation and / or a spatial redistribution of the material forming the first side surface of the guide carriage, so that the shape of the surface in the irradiated sub-region is changed after irradiation with a light pulse.

[0030] In this context, the term "sub-area of ​​the first surface irradiated with the respective individual light pulse" refers to that sub-area of ​​the first surface in which the shape of the surface in the irradiated sub-area exhibits a change in the form of a spatial modulation due to the irradiation with the respective individual light pulse (compared to the surface before irradiation with the respective individual light pulse). It should be noted that the spatial extent of a sub-area of ​​the first surface in which the shape of the surface in the irradiated sub-area is changed due to the irradiation with the respective individual light pulse can depend on the intensity of the respective light pulse.

[0031] By moving the laser beam across the first region of the first side surface of the guide carriage in such a way that each of the various irradiated sub-regions must overlap with at least one other irradiated sub-region, the first side surface of the guide carriage exhibits a spatial modulation in the first region after irradiation with the light pulses. This results in an increased roughness of the first side surface in the first region compared to its state before irradiation. Irradiation of the first region with the light pulses enables microstructuring of the first side surface such that a surface that was smooth before irradiation exhibits an arrangement of protrusions ("microstructure") across the entire first region after irradiation, representing an essentially uniform roughening of the surface.

[0032] This roughening of the surface changes the reflectivity of the surface in the irradiated first area in such a way that light arriving perpendicularly to the surface in the irradiated first area of ​​the surface is essentially not reflected back perpendicularly to the surface, but is scattered and absorbed many times between the individual elevations created in the irradiated first area.

[0033] The sub-areas of the first region, each illuminated by a single light pulse, are spatially distributed such that each sub-area overlaps with at least two other sub-areas, each also illuminated by a single light pulse. The respective sub-areas are spatially offset relative to one another such that each of the light-pulse-illuminated sub-areas overlaps with another sub-area offset along the longitudinal direction of the at least one track, and also overlaps with another sub-area offset perpendicular to the longitudinal direction of the at least one track. The sub-areas of the first region, each illuminated by a single light pulse, therefore exhibit overlaps in two dimensions (i.e., both along the longitudinal direction of the at least one track and perpendicular to the longitudinal direction of the at least one track).Due to the overlaps in two dimensions, the reflectivity of the surface in the irradiated first area is particularly strongly reduced.

[0034] The physical embodiment produced by the method according to the invention therefore has the advantage that the individual marking areas of the physical embodiment essentially absorb light incident perpendicular to the surface. Under these circumstances, a sensor device of a linear encoder provided for optical scanning is able to detect essentially only light that has been reflected by the mirror areas.

[0035] The marking areas of the physical embodiment could therefore advantageously be detected by the sensor device using optical detection of the marking areas according to the principle of bright-field measurement with a relatively high contrast compared to the mirror areas.

[0036] According to the invention, microstructures are introduced into the first side surface of the guide carriage, particularly in the respective marking areas of the scale, using a pulsed laser, such that this results in a dark, high-contrast surface without material removal. Extremely short light pulses create structures with numerous nanometer-scale elevations on the surface of the guide carriage. The microstructured surface reduces light scattering, resulting in a permanently deep and stable blackening of the surface in the respective marking areas of the scale.

[0037] In other words, according to the invention, the highly reflective metal surface of the guide carriage is partially roughened by high-energy radiation (laser radiation) in order to provide absorption areas within the metal surface.

[0038] Specifically, the metal surface is melted by short laser pulses of high-energy laser radiation. In particular, the roughened areas are melted by short laser pulses lasting less than 15 nanoseconds, after which the surface immediately resolidifies during the pulse intervals.

[0039] If the light pulses used to introduce the microstructures into the marking areas are ultrashort (i.e., with a pulse duration of 20 picoseconds or less), the color change remains corrosion-resistant within certain parameter ranges. This is because the heat-affected zone is extremely small when using ultrashort pulse lasers, allowing a self-healing oxide layer to form in the roughened area.

[0040] The advantage of the inventive method for applying a physical embodiment to a surface of the guide carriage lies particularly in the fact that the introduced microstructure exhibits so-called viewing angle stability. The very high, uniform contrast from all viewing angles is due to the nanostructures that are created when the microstructure is introduced into the first side surface of the guide carriage, and which reflect and absorb the light in a multiply scattered manner.

[0041] Furthermore, the introduction of the microstructure into the first side surface of the guide carriage using the pulsed laser causes a significant color change on the metal - up to a deep dark black tone in the marked areas.

[0042] The use of ultrashort pulse lasers also makes it possible to introduce very small and intricate roughened areas into the first side surface. The pulse durations are approximately 10,000 times shorter and more energetic when using ultrashort pulse lasers than with other marking lasers, and the roughened areas can be applied with a very small spot size. Therefore, the method according to the invention is particularly suitable for creating delicate roughened areas in the first side surface of the guide carriage and, in particular, for creating delicate absorption areas on the first side surface of the guide carriage.

[0043] Due to the short exposure time when using an ultrashort pulse laser, the chemical integrity of the surface is maintained, thus enabling corrosion-resistant application of the roughened areas and therefore corrosion-resistant formation of the marking areas of the physical embodiment.

[0044] Thus, according to preferred implementations of the method according to the invention, it is particularly provided that the laser is configured as a short-pulse laser for generating pulsed laser light with light pulses having pulse durations of less than 15 nanoseconds or as an ultrashort-pulse laser for generating pulsed laser light with light pulses having pulse durations of less than 20 picoseconds. The pulse parameters of the laser and / or a laser focus are selected such that, when the microstructure is introduced into the first side surface of the guide carriage, a material roughening in the nanometer range is formed along the surface paths without material removal or at least without significant material removal.

[0045] The use of an ultrashort pulse laser makes it possible to process the side surface of the guide carriage virtually without thermal or mechanical influence. The light pulse—and thus the duration of the energy input—is so short that heat transfer to the adjacent atoms does not occur, thereby preventing thermal stress cracks that can arise with unsuitable parameter selection. For this reason, the introduction of the microstructure into the first side surface of the guide carriage using an ultrashort pulse laser can also be considered a "cold processing" process, in which the laser structures the material at the nanometer scale.

[0046] The laser beam can, for example, have a substantially round beam bundle with a diameter selected such that it has a diameter of 3.5 µm to 12 µm, preferably 6 µm to 9 µm and particularly about 8 µm, on the first side surface of the guide carriage.

[0047] To introduce the microstructure into the first area of ​​the first side surface of the guide carriage corresponding to a marking area, the laser beam can be directed onto the first area of ​​the first side surface in such a way that the overlap between the respective individual of the several different irradiated sub-areas and the at least one other of the several different irradiated sub-areas in the longitudinal direction of the at least one track has a spatial extent which is 20-50% of the spatial extent of the sub-area of ​​the first area irradiated by the respective individual light pulse in the longitudinal direction of the at least one track.Accordingly, the laser beam can be directed onto the first area of ​​the first side surface in such a way that the overlap between each individual of the several different irradiated sub-areas and at least one other of the several different irradiated sub-areas transverse to the longitudinal direction of the at least one track has a spatial extent which is 20-50% of the spatial extent of the sub-area of ​​the first area irradiated by the respective individual light pulse transverse to the longitudinal direction of the at least one track.Due to the aforementioned overlap between the various irradiated sub-areas, it is ensured that the microstructure introduced into the first area of ​​the first surface comprises a multitude of small protrusions, which are spatially distributed essentially uniformly across the entire surface of the first area and represent a particularly finely structured and homogeneous roughening of the surface across the entire area of ​​the first area. In this way, it is achieved that light incident on the respective marking area can be absorbed essentially uniformly across the entire surface of the first area.

[0048] In order to further optimize the contrast achievable with the mass embodiment, it is planned that, prior to the introduction of the microstructure into the first side surface of the guide carriage, at least the first side surface is subjected to a surface treatment such that, in particular, a small amount of material is removed from the first side surface using the pulsed laser beam.

[0049] Alternatively or additionally, it is planned that after the microstructure has been introduced into the first side surface of the guide carriage with the laser beam, at least the first side surface of the workpiece will be subjected to surface cleaning.

[0050] These measures make it possible to create highly reflective mirror areas of the mass embodiment.

[0051] In this context, it is particularly important that, prior to introducing the microstructures into the first side surface of the guide carriage with the pulsed laser beam, at least the first side surface should undergo surface treatment by polishing. It is preferred that, after treatment, the first side surface has a mean roughness (Ra) of max. 0.3 µm, preferably a mean roughness (Ra) of max. 0.1 µm, and even more preferably a mean roughness (Ra) in the range of approximately 0.007 µm to 0.1 µm. It is particularly conceivable that, in this context, at least the first side surface is subjected to surface treatment using polishing wheels, laser polishing, and / or electropolishing. This ensures that the first side surface exhibits a particularly high reflectivity of light after polishing.Accordingly, it is achieved that after the mass embodiment is applied to the polished first side surface with the pulsed laser beam, the mirror areas of the mass embodiment have a particularly high reflectivity for light.

[0052] After polishing the first surface of the guide carriage, the microstructure can be introduced into the surface using light pulses in such a way that, after the microstructure is introduced, the surface of the first surface in one of the marking areas of the scale has a mean roughness (Ra) that is more than ten times greater than the mean roughness of the surface in one of the mirror areas of the scale. This allows the marking areas of the scale to be detected by a sensor device for optical detection of the marking areas, based on the principle of bright-field measurement, with a particularly high contrast compared to the mirror areas.

[0053] As previously stated, after the respective microstructures have been introduced into the first surface with the pulsed laser beam, the first surface should preferably be subjected to surface cleaning. This cleaning can be carried out using laser treatment and / or vibration cleaning or ultrasonic cleaning. Such surface cleaning is particularly advantageous when the microstructures are applied to the respective marking areas using a short-pulse laser that generates pulsed laser light with pulse durations in the nanosecond range.When the first surface is treated with light pulses with durations in the nanosecond range, the impact of one of these pulses on the surface causes local thermal stress. This alters the surface structure in the area irradiated by the pulse, resulting in the formation of numerous small particles from the atoms of the material forming the first surface. These particles are not firmly bound to the surface but merely adhere loosely. The formation of these loosely adhering particles locally impairs the mechanical and chemical stability of the surface in the area irradiated by the pulse.By subjecting the first surface to surface cleaning with a pulsed laser beam after the respective microstructures have been introduced, it is possible to completely remove the loosely adhering particles that formed in the areas irradiated by the light pulses. In this way, the mechanical and chemical stability of the first surface can be improved in the areas irradiated by the incident light pulses.

[0054] The mass embodiment can be designed such that the at least one track extending linearly in the longitudinal direction of the guide rail is designed as an incremental track with a plurality of equidistantly arranged marking areas.

[0055] Alternatively, the physical embodiment can be designed such that the at least one track extending linearly in the longitudinal direction of the guide rail is designed as a reference track with at least one marking area for encoding at least one reference position or as a reference track with several marking areas arranged one behind the other in the longitudinal direction of the guide rail for encoding several different reference positions.

[0056] According to a further embodiment, the physical embodiment according to the invention has a first track extending linearly in the longitudinal direction of the guide rail, which is designed as an incremental track with a plurality of equidistantly arranged marking areas, and furthermore a reference track, which is arranged parallel to the first incremental track and has one or more marking areas for encoding one or more reference positions. The reference track is designed, in particular, to indicate an absolute position of a measuring head along the physical embodiment. To determine the respective absolute position of the measuring head at any given location, for example, a change in the relative position (measured via the first incremental track) of the measuring head with respect to a specific reference marking of the reference track can be measured.Thus, the reference track makes it possible for the linear encoder to detect not only a change in the position of the measuring head, but also the absolute position of the measuring head with respect to the longitudinal direction of the physical medium.

[0057] As already mentioned, the scale according to the invention is particularly designed to be used in conjunction with a linear encoder, which enables optical scanning of the scale. Such a linear encoder comprises at least one scale according to the invention and a sensor device designed to optically scan the at least one track of the scale.

[0058] The at least one sensor device of the linear encoder can comprise a measuring head fixed to the guide rail, with an optical imaging device for generating an image of the at least one track, and a plurality of photosensors for capturing the image. The sensor device can be configured such that the photosensors generate an output signal when capturing the image. When the position of the guide carriage changes relative to the longitudinal direction of the guide rail, the output signal generated by the photosensors varies according to the respective arrangement of the different marking areas of the scale in the longitudinal direction of the guide rail. Kurze Beschreibung der Zeichnungen

[0059] In the following, aspects of the present invention are described in more detail with reference to the accompanying drawings. These show: FIG. 1A Schematic of a profile rail guide comprising a guide rail and a guide carriage, with a scale applied to a side surface of the guide carriage, in a perspective view; FIG. 1B the profile rail guide according to Fig. 1A in combination with a displacement measuring system for measuring the distance traveled by the guide carriage in the longitudinal direction of the guide rail, in a perspective view; FIG. 1C the profile rail guide according to Fig. 1A in combination with the distance measuring system according to Fig. 1B , in a front view in the longitudinal direction of the guide rail; FIG. 2 schematically the operation of a displacement measuring system according to Fig. 1B und Fig. 1C with a linear encoder operating on the principle of bright-field measurement for measuring a distance traveled in the longitudinal direction of a guide rail of a linear profile rail guide (shown in a cross-section perpendicular to the longitudinal direction of the guide rail); FIG. 3 schematically shows an exemplary embodiment of an arrangement of marking areas of a scale applied to the surface of a guide carriage of a profile rail guide for a linear encoder according to Fig. 2 ; FIG. 4A a schematic representation of a first marking area of ​​the physical embodiment according to Fig. 3 and an arrangement of surface areas of the guide carriage which are to be irradiated with light pulses of a pulsed laser beam in order to enable the provision of the first marking area on the surface of the guide carriage according to the invention; FIG. 4 Analogous to Fig. 4A a schematic representation of a second marking area of ​​the physical embodiment according to Fig. 3 and an arrangement of surface areas of the guide carriage which are to be irradiated with light pulses of a pulsed laser beam in order to enable the provision of the second marking area on the surface of the guide carriage according to the invention; FIG. 5 Top view through a microscope of a scale applied to a surface of a guide carriage of a profile rail guide by means of the method according to the invention; FIG. 6 Schematic representation of marking areas introduced into the side surface of a guide carriage of a profile rail guide by means of the method according to the invention before surface cleaning; FIG. 7 Schematic representation of the marking areas according to FIG. 6 after surface cleaning; FIG. 8 a section of the illustration according to Fig. 5 for an enlarged representation of the surface of the guide rail in the area of ​​a marking area with a magnification which makes a roughening of the surface of the guide rail visible in the shown marking area. Beschreibung von Ausführungsformen

[0060] Unless otherwise stated, the same reference symbols are used for the same elements in the figures.

[0061] Fig. 1A, 1B und 1C Figure 1 shows a profile rail guide 1 comprising a guide rail 3 and a guide carriage 2 movable in the longitudinal direction of the guide rail 3, in combination with a displacement measuring system 10 for measuring a distance traveled by the guide carriage 2 in the longitudinal direction of the guide rail 3. In the illustrations according to Fig. 1A, 1B und 1C is assumed to be the x-axis of a in Fig. 1A, 1B or 1C shown Cartesian coordinate system with three orthogonal axes X, Y or Z (X-axis, Y-axis or Z-axis) extends in the longitudinal direction of the guide rail 3 and the guide carriage 2 is thus linearly movable in the direction of the X-axis.

[0062] As in Fig. 1A-1C As indicated, the guide carriage 2 is shaped such that, in a cross-section perpendicular to the longitudinal direction of the guide rail 3, it has a U-shaped profile with two legs – a first leg U1 and a second leg U2 – wherein this U-shaped profile extends around the guide rail 3 such that the two legs U1 and U2 are arranged on opposite side surfaces 3.1 and 3.2 of the guide rail 3, respectively: The first leg U1 of the U-shaped profile of the guide carriage 2 extends along the side surface 3.1 of the guide rail 3 essentially parallel to the side surface 3.1 in the longitudinal direction of the guide rail 3, and the second leg U2 of the U-shaped profile of the guide carriage 2 extends along the side surface 3.2 of the guide rail 3 essentially parallel to the side surface 3.2 in the longitudinal direction of the guide rail 3.

[0063] The guide carriage 2 of the profile rail guide 1 is supported by means of a plurality of rolling elements 2A (in the present example in the form of balls), which are arranged in a space 4 formed between the guide rail 3 and the guide carriage 2, so that each of the rolling elements 2A is in contact with both the guide rail 3 and the guide carriage 2 and the rolling elements 2A roll on a region of the surface of the guide rail 3 as well as on a region of the surface of the guide carriage 2 when the guide carriage 2 moves in the longitudinal direction of the guide rail 3.

[0064] As in Fig. 1C As indicated, the rolling elements 2A are arranged in the space 4 such that a first subset of all rolling elements 2A are arranged one behind the other in a first row R1 extending linearly in the longitudinal direction of the guide rail 3, and a second subset of all rolling elements 2A are arranged one behind the other in a second row R2 extending linearly in the longitudinal direction of the guide rail 3.

[0065] As in Fig. 1C As indicated, the first row R1 of the rolling elements 2A and the second row R2 of the rolling elements 2A extend parallel to each other and at a distance from each other in the longitudinal direction of the guide rail 3 such that the first row R1 of the rolling elements 2A is arranged in the space 4 between the first leg U1 of the U-shaped profile of the guide carriage 2 and the first side surface 3.1 of the guide rail 3 and the second row R2 of the rolling elements 2A is arranged in the space 4 between the second leg U2 of the U-shaped profile of the guide carriage 2 and the second side surface 3.2 of the guide rail 3.

[0066] As from Fig. 1A-1C As can be seen, all rolling elements 2A of the first row R1 and all rolling elements 2A of the second row R2 are held relative to each other in predetermined positions in the space 4: For this purpose, a cage is located in the space 4 between the guide carriage 2 and the guide rail 3. fig 5 arranged, which extends in the longitudinal direction of the guide rail 3 and has a U-shaped profile in a cross-section perpendicular to the longitudinal direction of the guide rail 3. In order to hold the rolling elements 2A of the first row R1 and the rolling elements 2A of the second row R2 in predetermined positions relative to each other in the space 4, the guide rail has a U-shaped profile. fig 5 a plurality of bores (not shown in the figures) extend transversely to the longitudinal direction of the guide rail 3 and are shaped such that each bore serves to receive one of the rolling elements 2A and each of the rolling elements 2A is arranged in one of the bores such that the respective rolling element is in contact with both the guide rail 3 and the guide carriage 2. The guide rail 3 is shaped such that each rolling element is in contact with both the guide rail 3 and the guide carriage 2. fig 5 Therefore, when the guide carriage 2 moves longitudinally along the guide rail 3, the effect is that all rolling elements 2A of the first row R1 and all rolling elements 2A of the second row R2 are in one of the bores of the carriage due to the arrangement of the individual rolling elements 2A. figs 5 only synchronously with each other on the surface of the guide rail 3 and the surface of the guide carriage 2, each in the longitudinal direction of the guide rail 3, and all rolling elements 2A of the first row R1 and all rolling elements 2A of the second row R2 only together with the carriage fig 5 relative to the guide rail 3 and relative to the guide carriage 2, each in the longitudinal direction of the guide rail 3, they can move.

[0067] The cheese fig 5 is designed such that the cage extends in the space 4 in the longitudinal direction of the guide rail 3 by a distance (hereinafter referred to as "longitudinal extent of the cage"). figs 5 ") extends, which is shorter than the longitudinal extent LF of the guide carriage 2 in the longitudinal direction of the guide rail 3.

[0068] Under these circumstances, the guide carriage 2 – supported on the guide rail 3 by all rolling elements 2A of the first row R1 and all rolling elements 2A of the second row R2 – can only be moved longitudinally along the guide rail 3 over a finite distance (hereinafter referred to as "maximum movement distance of the guide carriage 2 in the longitudinal direction of the guide rail 3"), which is essentially the difference between the longitudinal extent LF of the guide carriage 2 in the longitudinal direction of the guide rail 3 and the longitudinal extent of the guide carriage 2. figs 5 in the longitudinal direction of the guide rail 3. Since the maximum movement distance of the guide carriage 2 in the longitudinal direction of the guide rail 3 is limited in this way, it is possible in the case of the profile rail guide 1 to limit the length of the guide rail 3 in the longitudinal direction of the guide rail 3 in relation to the longitudinal extent LF of the guide carriage 2 in the longitudinal direction of the guide rail 3: The length of the guide rail 3 in the longitudinal direction of the guide rail 3 can, for example, be chosen such that it is equal to the longitudinal extent LF of the guide carriage 2 in the longitudinal direction of the guide rail 3.

[0069] In the case of profile rail guide 1 according to Fig. 1A-1C It is assumed by way of example that the length of the guide rail 3 in the longitudinal direction of the guide rail 3 is equal to the longitudinal extent LF of the guide carriage 2. In the case of the profile rail guide 1 according to Fig. 1A-1C It appears problematic to apply a suitable physical dimension to the surface of the guide rail 3 for measuring the distance traveled by the guide carriage 2 in the longitudinal direction of the guide rail 3. This is because, in the present example, the length of the guide rail 3 in the longitudinal direction is equal to the longitudinal extent LF of the guide carriage 2, and furthermore, at least a large part of the gap 4 between the guide rail 3 and the guide carriage 2 is filled by the guide carriage 2. fig 5 and the rolling elements 2A are filled, in the present example it is a problem for space reasons to implement a sensor device on the guide carriage 2 which on the one hand is moved along with the guide carriage when the guide carriage 2 is moved in the longitudinal direction of the guide rail and on the other hand is positioned in such a way that it would be suitable for scanning a mass embodiment arranged on the surface of the guide rail 3 (for any positions into which the guide carriage 2 can be moved in the longitudinal direction of the guide rail 3).

[0070] To solve the aforementioned problem, the displacement measuring system 10 is used to measure the distance traveled by the guide carriage 2 in the longitudinal direction of the guide rail 3 according to Fig. 1A-1C The guide carriage 2 is designed such that a dimension 15 extending in the longitudinal direction of the guide rail 3 is applied to a side surface 2.1 of the guide carriage 2 extending in the longitudinal direction of the guide rail 3. Furthermore, a sensor device 20 for scanning the dimension 15 is provided, which in this example is held in a fixed position relative to the guide rail 3 by means of a holding device 20A, such that the sensor device 20 has a distance from the dimension 15 and, when the guide carriage 2 moves in the longitudinal direction of the guide rail 3, can scan different areas of the dimension 15 depending on the position of the guide carriage 2.

[0071] It should be noted that in the present example according to Fig. 1 The side surface 2.1, onto which the physical embodiment 15 is applied, is an outer surface area of ​​the guide carriage 2 (facing away from the guide rail 3), which extends parallel to the longitudinal direction of the guide rail 3 (i.e., parallel to the X-axis) and parallel to the Y-axis. Alternatively, for applying the physical embodiment 15, another surface area of ​​the guide carriage 2 would also be suitable as the "first side surface" within the meaning of the invention, which extends on the one hand parallel to the longitudinal direction of the guide rail 3 and on the other hand parallel to any other direction transverse to the X-axis, for example, a surface area (on a top side of the guide carriage 2 or on a bottom side of the guide carriage 2 in the region of one of the legs U1 or U2) which extends parallel to the X-axis and parallel to the Z-axis.Depending on the spatial position of the "first side surface" of the guide carriage 2, on which the mass embodiment 15 is applied, the sensor device 20 may have to be positioned differently from the one shown in . Fig. 1 The position shown is arranged with reference to the guide carriage in order to be suitable for scanning the mass embodiment 15.

[0072] Further details regarding the mass embodiment 15, the sensor device 20 and the displacement measuring system 10 are described below with reference to the Fig. 2 und 3 explained.

[0073] In FIG. 2 und 3 The schematic diagram shows the operation of a displacement measuring system 10 for measuring the distance traveled in the longitudinal direction of the guide rail 3 of the linear profile rail guide 1 by the movable guide carriage 2 of the profile rail guide 1, which is guided on the guide rail 3.

[0074] The distance measuring system 10 according to Fig. 2 und 3 The device features an optical linear encoder 11 operating on the principle of bright-field measurement, which enables the measurement of the distance traveled by the guide carriage 2 in the longitudinal direction of the guide rail 3. For this purpose, the linear encoder 11 comprises a measuring body 15 extending in the longitudinal direction of the guide rail 3, with at least one linear track extending in the longitudinal direction of the guide rail 3, and with several alternating mirror areas and marking areas arranged one behind the other, and at least one sensor device 20 configured to optically scan the at least one track of the measuring body 15.

[0075] As in Fig. 1 and 2As indicated, the physical embodiment 15 is formed on a first side surface 2.1 of the guide carriage 2. To enable optical scanning of the physical embodiment 15, the sensor device 20 comprises a measuring head 21 arranged in a fixed position with respect to the guide rail 3, which is arranged opposite the side surface 2.1 of the guide carriage 2 provided with the physical embodiment 15, so that when the guide carriage 2 moves in the longitudinal direction of the guide rail 3, the physical embodiment 15 moves with the guide carriage 2 and is moved, in particular, relative to the measuring head 21.

[0076] As in Fig. 2 und 3 As indicated, the physical embodiment 15 comprises two different tracks arranged on the first side surface 2.1 and extending parallel to each other in the longitudinal direction of the guide rail 3 with several mirror areas and marking areas arranged alternately one behind the other: a first track SP1, which is designed as an incremental track with a plurality of equidistantly arranged marking areas, and a second track SP2, which is designed as a reference track and has at least one marking area for encoding at least one reference position or alternatively can also have several marking areas arranged one behind the other in the longitudinal direction of the guide rail 3 for encoding several different reference positions.

[0077] As in Fig. 3 As indicated, each of the marking areas of the first track SP1 and the second track SP2 of the mass body 15 extends in a line-like manner on the first side surface 2.1 of the guide carriage 2 in the direction of the Fig. 2 und 3 depicted Y-axis, i.e. perpendicular to the longitudinal direction of the mass embodiment 15 or perpendicular to the longitudinal direction of the guide rail 3.

[0078] As in Fig. 3 As indicated, the first track SP1 (incremental track) comprises a plurality of marking areas M, which are identical with respect to their geometric shape and their spatial extent in the direction of the X-axis and in the direction of the Y-axis. Between each pair of adjacent marking areas M, arranged directly one behind the other in the direction of the X-axis, a mirror area S is formed, with all mirror areas S of the first track SP1 being identical with respect to their spatial extent in the direction of the X-axis and in the direction of the Y-axis.

[0079] As in Fig. 3 As further indicated, the second track SP2 (reference track) in the present example comprises several (here, for example, a total of fourteen) marking areas M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13 or M14 arranged in a row in the longitudinal direction of the guide rail 3.

[0080] In the case of the second lane SP2, a mirror area is also formed between each pair of adjacent marking areas arranged directly one behind the other in the direction of the X-axis, so that the aforementioned marking areas M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, and M14 are arranged alternately with mirror areas S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14, and S15 in a row. However, the marking areas M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, and M14 of the second lane SP2 are not all identical with respect to their spatial extent in the direction of the X-axis. Likewise, the mirror areas S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14 and S15 are not all identical with respect to their spatial extent in the direction of the X-axis.In this way, the various marking areas and mirror areas of the second track SP2 allow for the encoding of several different reference positions, which each uniquely define several different absolute positions.

[0081] The measuring head 21 has a light source 22 (for example, an LED) which emits light in the form of a light beam 22.1 directed substantially perpendicular to the side surface 2.1 of the guide carriage 2, such that part of the light emitted by the light source 22 strikes the first track SP1 of the scale 15 and another part of the light emitted by the light source 22.1 strikes the second track SP2 of the scale 15. The operation of the linear encoder 11 requires a regular (mirror-like) reflection of the light 22.1 emitted by the light source 22 at the side surface 2.1 of the guide carriage 2, whereby each incident beam should be reflected at the same angle to the surface normal, if possible.

[0082] As in Fig. 2 As indicated, the part of the light 22.1 emitted by the light source 22 that strikes the first track SP1 of the massing body 15 is reflected at the first track SP1; the light reflected at the first track SP1 of the massing body 15 is in Fig. 2 represented by light rays designated "RL1". Accordingly, the portion of the light 22.1 emitted by the light source 22 that strikes the second track SP2 of the massing body 15 is reflected at the second track SP2; the light reflected at the first track SP1 of the massing body 15 is in Fig. 2 represented by light rays, which are labelled "RL2".

[0083] As in Fig. 2 As further indicated, the measuring head 21 includes an electronic light sensor chip 25, which is designed to detect the light RL1 reflected at the first track SP1 and the light RL2 reflected at the second track SP2 and to analyze the spatial distribution of the intensity of the reflected light RL1 and the spatial distribution of the intensity of the reflected light RL2.

[0084] For this purpose, the light sensor chip 25 comprises a first arrangement 25.1 of a plurality of photosensors for detecting the light RL1 reflected at the first track SP1 of the material 15 and a second arrangement 25.2 of a plurality of photosensors for detecting the light RL2 reflected at the second track SP2 of the material 15 and also (not shown in the figures) further electronic elements which are configured to evaluate corresponding output signals of the first arrangement 25.1 of photosensors and / or output signals of the second arrangement 25.2 of photosensors.

[0085] According to the invention, the scale body 15 is designed such that the individual marking areas, i.e., the marking areas M of the first track SP1 and the marking areas M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, and M14 of the second track SP2, substantially absorb the light 22.1 emitted by the light source 22 and incident on the respective marking areas and do not reflect it towards the first arrangement 25.1 of photosensors and / or towards the second arrangement 25.2 of photosensors. In this case, the light RL1 reflected at the first track SP1 of the scale body 15 consists essentially of light that was reflected at the mirror areas S of the first track SP1.Accordingly, the light RL2 reflected at the second track SP2 of the massing 15 consists essentially of light which was reflected at the mirror areas S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14 and S15 of the second track SP2.

[0086] Under the aforementioned circumstances, the spatial distribution of the intensity of the light RL1 reflected from the first track SP1 of the scale body 15 along the longitudinal direction of the guide rail 3 exhibits a spatial variation that corresponds to the spatial arrangement of the mirror areas S of the first track SP1 along the longitudinal direction of the guide rail 3. Similarly, the spatial distribution of the intensity of the light RL2 reflected from the second track SP2 of the scale body 15 along the longitudinal direction of the guide rail 3 exhibits a spatial variation that corresponds to the spatial arrangement of the mirror areas S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14, and S15 of the second track SP2 along the longitudinal direction of the guide rail 3.

[0087] The first arrangement 25.1 of photosensors comprises a (in the Fig. 2 (not shown) a multitude of photosensors arranged in a row along the longitudinal direction of the guide rail 3. Accordingly, the second arrangement 25.2 of photosensors comprises a (in the Fig. 2 (not shown) a multitude of photosensors arranged in a row in the longitudinal direction of the guide rail 3.

[0088] When the guide carriage 2 is moved longitudinally along the guide rail 3, the arrangement 25.1 of photosensors and the arrangement 25.2 of photosensors of the measuring head 21 are also moved relative to the guide carriage 2 longitudinally along the first track SP1 and the second track SP2 of the mass body 15, respectively. In this case, the intensity of the light RL1 reflected from the first track SP1, as detected by the individual photosensors of the first arrangement 25.1 of photosensors, varies as a function of the position of the guide carriage 2 with respect to the longitudinal direction of the guide rail 3.

[0089] Since the first track SP1 is designed as an incremental track and the marking areas M of the first track SP1 are arranged equidistantly one behind the other in the longitudinal direction of the guide rail 3, the intensity of the light RL1 reflected from the first track SP1, as detected by the individual photosensors of the first arrangement 25.1 of photosensors, exhibits a periodic variation as a function of the position of the guide carriage 2 with respect to the longitudinal direction of the guide rail 3 when the guide carriage 2 moves in the longitudinal direction of the guide rail 3. Accordingly, the individual photosensors of the first arrangement 25.1 of photosensors each generate output signals when the guide carriage 2 moves in the longitudinal direction of the guide rail 3, which vary periodically as a function of the position of the guide carriage 2 with respect to the longitudinal direction of the guide rail 3.

[0090] In principle, it is possible to design the photosensors of the first arrangement 25.1 such that each individual photosensor of the first arrangement 25.1 generates output signals when the guide carriage 2 moves longitudinally along the guide rail 3. The periodic variation of these output signals, as a function of the position of the guide carriage 2 with respect to the longitudinal direction of the guide rail 3, corresponds to the shape of a mathematical sine or cosine function. Accordingly, an evaluation of the output signals of the photosensors of the first arrangement 25.1 allows the determination of the distance traveled by the guide carriage 2 during its longitudinal movement along the guide rail 3.

[0091] As mentioned, the second track SP2 is designed as a reference track, whereby the marking areas M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13 and M14 of the second track SP2 are not all identical with respect to their spatial extent in the direction of the X-axis, and the mirror areas S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14 and S15 of the second track SP2 are also not all identical with respect to their spatial extent in the direction of the X-axis.

[0092] In this case, the intensity of the light RL2 reflected at the second track SP2, detected by the individual photosensors of the second arrangement 25.2 of photosensors, shows a variation as a function of the position of the guide carriage 2 with respect to the longitudinal direction of the guide rail 3 when the guide carriage 2 moves in the longitudinal direction of the guide rail 3, but this variation does not have a periodic course as a function of the position of the guide carriage 2 with respect to the longitudinal direction of the guide rail 3.

[0093] Accordingly, the individual photosensors of the second arrangement 25.2 of photosensors each generate output signals when the guide carriage 2 moves longitudinally along the guide rail 3. These output signals do not vary periodically as a function of the position of the guide carriage 2 with respect to the longitudinal direction of the guide rail 3. An evaluation of the output signals of the photosensors of the second arrangement 25.2 of photosensors therefore enables the determination of an absolute position of the measuring head 21 with respect to the respective positions of the marking areas and mirror areas of the second track SP2 of the massing element 15.

[0094] Steel, particularly stainless steel, is typically used as the material for guide rails and carriages in linear profile rail systems. Standard ground (i.e., unpolished) surfaces of such guide rails and carriages generally have a profile that deviates from a flat surface in such a way that these surfaces tend to reflect light diffusely.

[0095] If the light 22.1 emitted by the light source 22 were diffusely reflected at the respective mirror areas of the massing body 15, this could impair the measuring accuracy of the displacement measuring system 10.

[0096] Regarding the realization of a mass embodiment 15 on a first side surface of a guide carriage 2 according to Fig. 2 und 3 It is therefore advantageous that, before applying the physical embodiment 15 to the side surface 2.1 of the guide carriage 2 by means of the method according to the invention, the side surface 2.1 is first subjected to a surface treatment such that, in particular, a small amount of material is removed from the first side surface 2.1 of the guide carriage 2 in order to reduce any roughness originally present on the side surface 2.1 and accordingly to make the side surface 2.1 as smooth or flat as possible.

[0097] For surface treatment of the profile rail guide, the surface of the guide carriage 2 in the area of ​​the side surface 2.1 is preferably polished. Polishing can be carried out in various ways, but in particular by means of pre-polishing with a ceramic grinding wheel with a very fine grit size (400 or finer) and subsequent polishing with a polishing wheel bonded to a rubber or synthetic resin base. Alternative manufacturing methods to polishing with a polishing wheel include laser polishing, electropolishing, or polishing with polishing brushes.

[0098] Following such surface treatment of the side surface 2.1, the individual marking areas of the physical embodiment 15 are finally applied to the first side surface 2.1 of the guide carriage 2 using a pulsed laser. Examples of the application of the individual marking areas of the physical embodiment 15 according to the inventive method are given below, inter alia, with reference to the Fig. 4A und 4B explained.

[0099] Fig. 4A Figure 1 shows (in a top view of the side surface 2.1) a first area B1 of the side surface 2.1, in which the side surface 2.1 is to be processed using a pulsed laser in order to form a microstructure in the first area B1 which represents one of the marking areas of the first track SP1 or the second track SP2 of the mass embodiment 15.

[0100] Since the respective marking areas of the first track SP1 or the second track SP2 of the mass embodiment 15 are each linearly transverse to the longitudinal direction of the mass embodiment 15 (i.e. in the direction of the X-axis according to Fig. 2 und 3 ) extends, in the example according to Fig. 4A Assuming that the first area B1 is essentially in the shape of a rectangle, which has an extent DBX in the longitudinal direction of the dimension body 15 and transversely to the longitudinal direction of the dimension body 15 (i.e. in the direction of the Y-axis according to Fig. 2 und 3 ) has an extension DBY.

[0101] To introduce a microstructure in area B1, representing one of the marking areas of the first track SP1 or the second track SP2 of the mass embodiment 15, a pulsed laser is provided to generate a laser beam, the laser generating the laser beam with a sequence of several light pulses. The laser beam is directed onto the first area B1 of the first side surface 2.1 in such a way that each individual light pulse of the generated sequence of several light pulses illuminates only a sub-area of ​​the first area B1.

[0102] In the example according to Fig. 4A It is assumed that the laser beam has a substantially circular beam profile with a diameter DL in a plane perpendicular to the direction of propagation of the laser beam, such that a single light pulse of the laser beam, upon striking the side surface 2.1, irradiates an area of ​​the side surface 2.1 with laser light which has the shape of a circle, wherein the diameter of this area irradiated by a single light pulse in the present example corresponds substantially to the diameter DL of the laser.

[0103] In the present example, it is assumed that when a single light pulse of the laser beam strikes the side surface 2.1, it is irradiated such that the side surface 2.1 is altered in a circular area, which has the shape of a circle with a diameter D, due to the irradiation with the single light pulse. This alteration results in a change in the side surface 2.1 in the aforementioned circular area with diameter D in the form of a spatial modulation (compared to the shape of the surface before irradiation with the respective single light pulse). Accordingly, in the example, according to Fig. 4A a "partial area of ​​the first area B1 irradiated by the respective individual light pulse" is represented as an area of ​​the side surface 2.1, which is bounded by a circle with diameter D.

[0104] In the example according to Fig. 4A It is further assumed in particular that the laser beam is directed onto the first region B1 of the first side surface 2.1 such that the spatial extent D of the subregion of the first region B1 irradiated by the respective individual light pulse in the longitudinal direction of the mass embodiment 15 (i.e. in the direction of the X-axis) is smaller than the spatial extent DBX of the first region B1 in the longitudinal direction of the mass embodiment 15 and that the spatial extent D of the subregion irradiated by the respective individual light pulse transverse to the longitudinal direction of the mass embodiment 15 (i.e. in the direction of the Y-axis) is smaller than the spatial extent DBY of the first region B1 transverse to the longitudinal direction of the mass embodiment 15.

[0105] In the example according to Fig. 4A The laser beam is moved relative to the guide carriage 2 such that at least several of the light pulses of the generated sequence of several light pulses irradiate several different sub-areas of the first area B1 in succession, which are spatially distributed relative to each other, wherein for each of the several different irradiated sub-areas there is at least one other of the several different irradiated sub-areas, which is related to the respective individual of the several different irradiated sub-areas in the longitudinal direction of the mass embodiment 15 (i.e. in the direction of the X-axis) and / or transversely to the longitudinal direction of the mass embodiment 15 (i.e.in the direction of the Y-axis) is offset such that each of the several different irradiated sub-areas and at least one other of the several different irradiated sub-areas overlap, and wherein the several different irradiated sub-areas together form an area of ​​the first side surface which is congruent with the first area B1.

[0106] Accordingly, the laser beam is moved two-dimensionally (i.e. in the direction of the X-axis and in the direction of the Y-axis) over the first area B1 of the first side surface 2.1 of the guide carriage 2, which corresponds to a marking area of ​​the mass embodiment 15 to be applied, so that different sub-areas of the first area B1 are irradiated successively.

[0107] Irradiation of a sub-area with one of the light pulses causes a local, slight ablation and / or a spatial redistribution of the material (steel) forming the first side surface 2.1 of the guide carriage 2, such that the shape of the surface in the irradiated sub-area is altered after irradiation with a light pulse. By moving the laser beam over the first area B1 in such a way that each of the different irradiated sub-areas must overlap with at least one other irradiated sub-area, it is achieved that the first side surface 2.1 of the guide carriage 2 in the first area B1 exhibits a spatial modulation after irradiation with the light pulses, such that the first side surface 2.1 in the first area B1 has an increased roughness compared to its state before irradiation with the light pulses.Irradiation of the first area with light pulses enables microstructuring of the first side surface such that a surface that was smooth before irradiation exhibits an arrangement of elevations ("microstructure") throughout the first area after irradiation, representing a substantially uniform roughening of the surface in the first area B1.

[0108] In the example according to Fig. 4A The diameter DL of the laser beam or the diameter D of the respective sub-areas of the first area B1 irradiated with a light pulse is chosen in relation to the extent DBX of the first area B1 in the longitudinal direction of the mass body 15 and in relation to the extent DBY of the first area B1 transverse to the longitudinal direction of the mass body 15 such that D < DBX < 2 D and D < DBY < n D , where n is a natural number (with n≥2).

[0109] Furthermore, it is assumed that the various sub-areas, each irradiated with a light pulse, are arranged in the first area B1 such that a first group of sub-areas of the entirety of all irradiated sub-areas is present, comprising a total of n sub-areas. The individual sub-areas of this first group are arranged in a row extending transversely to the longitudinal direction of the mass embodiment 15 (i.e., in the direction of the Y-axis) and are arranged relative to each other such that the centers of the different sub-areas are offset relative to each other by predetermined distances transversely to the longitudinal direction of the mass embodiment 15. As in Fig. 4A As shown, the aforementioned first group of sub-areas together form a structure that is Fig. 4A the first linear section of the first area B1 designated by the reference symbol "L1", the extent of which transverse to the longitudinal direction of the mass body 15 is identical to the extent DBY of the first area B1 and the extent of which in the longitudinal direction of the mass body 15 is identical to the diameter D of the respective sub-areas irradiated with a light pulse.

[0110] It should be noted that in Fig. 4A Not all of the sub-areas arranged in the first linear section L1 of the aforementioned first group of sub-areas are shown: For the sake of clarity, only four of the respective sub-areas of the aforementioned first group of sub-areas are shown graphically, with these four sub-areas being in Fig. 4A The sub-areas are designated with the reference symbols "TB11", "TB15", "TB16", and "TB1n". The two sub-areas "TB11" and "TB1n" are arranged relative to each other in the direction of the Y-axis such that sub-area "TB11" is located at one end of the first linear segment L1 with respect to the Y-axis, and sub-area "TB1n" is located at the other end of the first linear segment L1 (i.e., opposite sub-area "TB11"). The two sub-areas "TB15" and "TB16" are arranged relative to each other such that the center point of sub-area "TB16" is offset by a distance ΔY relative to the center point of sub-area "TB15" in the direction of the Y-axis.In the present example, the distance ΔY is chosen such that the distance ΔY is preferably greater than or equal to half the diameter D of the respective sub-areas irradiated with a light pulse, and the distance ΔY is preferably less than 80% of the diameter D of the respective sub-areas irradiated with a light pulse (i.e., D / 2 ≤ ΔY < 0.8 * D). The two sub-areas "TB15" and "TB16" therefore have an overlap, which is shown in . Fig. 4A The area is represented as a hatched surface, which is designated with the reference symbol "UY". The overlap UY has an extent DUY in the direction of the Y-axis, which preferably lies in the range of 20-50% of the spatial extent D of the sub-area illuminated by a single light pulse in the direction of the Y-axis.

[0111] The extent DUY is related to the diameter D of the respective sub-areas irradiated with a light pulse and to the aforementioned distance ΔY according to the following equation: DUY = D - ΔY.

[0112] Regarding those sub-areas of the aforementioned first group of sub-areas which are in the Fig. 4A Not shown, it should be noted that the centers of the various sub-areas can be arranged relative to each other transversely to the longitudinal direction of the mass embodiment 15 such that for each of the various sub-areas illuminated with a light pulse, there is another sub-area illuminated with a light pulse whose center point is offset transversely to the longitudinal direction of the mass embodiment 15 (i.e., in the direction of the Y-axis) relative to the center point of the respective individual sub-area illuminated with a light pulse by a distance which is the Fig. 4A The distance ΔY shown corresponds to the distance between the centers of sub-areas "TB15" and "TB16". Accordingly, each sub-area of ​​the aforementioned first group of sub-areas overlaps with at least one other sub-area of ​​the aforementioned first group of sub-areas, which corresponds to the distance shown in the Fig. 4A The overlap UY shown corresponds to the sub-areas "TB15" and "TB16".

[0113] As from Fig. 4A As can be seen, the various sub-areas, each irradiated with a light pulse, are arranged in the first area B1 such that, in addition to the first group of sub-areas described above, a second group of sub-areas comprising all irradiated sub-areas, with a total of n sub-areas, is present. The individual sub-areas of this second group are arranged in a row extending transversely to the longitudinal direction of the mass body 15 (i.e., in the direction of the Y-axis) and are arranged relative to each other such that the centers of the different sub-areas are also offset relative to each other by predetermined distances transversely to the longitudinal direction of the mass body 15. As in Fig. 4A As shown, the aforementioned second group of sub-areas together form a structure that is Fig. 4A the second linear section of the first area B1 designated by the reference symbol "L2", the extent of which transverse to the longitudinal direction of the mass body 15 is identical to the extent DBY of the first area B1 and the extent of which in the longitudinal direction of the mass body 15 is identical to the diameter D of the respective sub-areas irradiated with a light pulse.

[0114] As in Fig. 4A As indicated, the individual sub-areas of the second group of sub-areas irradiated with light pulses in the second linear section L2 of the first area B1 are arranged spatially distributed transversely to the longitudinal direction of the mass embodiment 15 in a manner analogous to the spatial distribution of the individual sub-areas of the first group of sub-areas irradiated with light pulses in the first linear section L1 in the direction of the Y-axis.

[0115] In Fig. 4A Not all of the sub-areas arranged in the second linear section L2 of the second group of sub-areas are shown: For the sake of clarity, only four of the respective sub-areas of the aforementioned second group of sub-areas are shown graphically, with these four sub-areas being in Fig. 4A The sub-areas are designated with the reference symbols "TB21", "TB25", "TB26" and "TB2n". The two sub-areas "TB21" and "TB2n" are arranged relative to each other in the direction of the Y-axis such that the sub-area "TB21" is located at one end of the second linear section L2 with respect to the Y-axis, and the sub-area "TB2n" is located at the other end of the second linear section L2 (i.e., opposite the sub-area "TB21").

[0116] Furthermore, the centers of the various sub-areas of the second group of sub-areas in the second linear section L2 of the first area B1 are arranged relative to each other transversely to the longitudinal direction of the mass embodiment 15 such that for each of the various sub-areas illuminated with a light pulse, there is another sub-area illuminated with a light pulse whose center point is offset transversely to the longitudinal direction of the mass embodiment 15 (i.e., in the direction of the Y-axis) relative to the center point of the respective individual of the various sub-areas illuminated with a light pulse by a distance which is the Fig. 4A The distance ΔY shown corresponds to the distance between the centers of sub-areas "TB15" and "TB16". Accordingly, each sub-area of ​​the second group of sub-areas overlaps with at least one other sub-area of ​​the second group of sub-areas, which corresponds to the distance shown in the Fig. 4A The overlap UY shown corresponds to the sub-areas "TB15" and "TB16".

[0117] As mentioned, in the example according to Fig. 4A The diameter DL of the laser beam, or the diameter D of the respective sub-areas of the first region B1 irradiated with a light pulse, is chosen in relation to the extent DBX of the first region B1 in the longitudinal direction of the mass embodiment 15 such that the relation D < DBX < 2D is satisfied. Since both the first linear section L1 of the first region B1 and the second linear section L2 of the first region B1 have an extent in the longitudinal direction of the mass embodiment 15 that is identical to the diameter D of the respective sub-areas irradiated with a light pulse, the sub-areas of the first group of sub-areas and the sub-areas of the second group of sub-areas are arranged relative to each other such thatthat the centers of the sub-areas of the first group of sub-areas lie on a first straight line extending in the direction of the Y-axis and the centers of the sub-areas of the second group of sub-areas lie on a second straight line also extending in the direction of the Y-axis, wherein the first straight line and the second straight line are arranged parallel to each other and have a distance ΔX in the longitudinal direction of the mass embodiment 15, which is smaller than the diameter D of the sub-areas illuminated by a light pulse in each case.

[0118] Accordingly, the first linear section L1 of the first region B1 and the second linear section L2 of the second region B1 have an overlap which extends in the direction of the Y-axis over a length corresponding to the extension DBY of the first region B1 in the direction of the Y-axis, and which extends in the longitudinal direction of the mass embodiment 15 over a (in Fig. 4A The length DUX (shown) extends. The extent DUX of the overlap of the first linear section L1 of the first region B1 and the second linear section L2 of the first region B1 in the longitudinal direction of the mass embodiment 15 is related to the diameter D of the respective sub-regions irradiated with a light pulse and to the aforementioned distance ΔX according to the following equation: DUX = D - ΔX.

[0119] Accordingly, the sub-areas of the first group of sub-areas and the sub-areas of the second group of sub-areas are arranged relative to each other such that, as a rule, each sub-area of ​​the first group of sub-areas has an overlap with at least one sub-area of ​​the second group of sub-areas, which has an extent in the longitudinal direction of the physical embodiment 15 that is identical to the aforementioned extent DUX of the overlap between the first linear section L1 of the first area B1 and the second linear section L2 of the second area B1 in the longitudinal direction of the physical embodiment 15.

[0120] In Fig. 4A It is accordingly shown by way of example that the sub-area TB11 and the sub-area TB21 are arranged offset in the longitudinal direction of the mass embodiment 15 such that the sub-area TB11 and the sub-area TB21 have an overlap which in Fig. 4A This is represented as a hatched area, which is labelled with the reference symbol "UX". This overlap UX has an extent in the direction of the X-axis that is identical to the extent DUX mentioned above.

[0121] In Fig. 4A It is further illustrated by way of example that the sub-area TB1n and the sub-area TB2n are arranged offset in the longitudinal direction of the mass embodiment 15 such that the sub-area TB1n and the sub-area TB2n have an overlap which in Fig. 4A This is represented as a hatched area, which is also labelled with the reference symbol "UX". This overlap UX has an extent in the direction of the X-axis that is identical to the extent DUX mentioned above.

[0122] In Fig. 4A It is further illustrated by way of example that the sub-area TB15 and the sub-area TB25 are arranged offset in the longitudinal direction of the mass embodiment 15 such that the sub-area TB15 and the sub-area TB25 have an overlap which in Fig. 4A is represented as a hatched area, which is also designated with the reference symbol "UX", and which accordingly has an extent in the direction of the X-axis that is identical to the extent DUX mentioned above.

[0123] As in Fig. 4A Furthermore, as shown, the sub-area TB16 and the sub-area TB26 are arranged offset in the longitudinal direction of the mass embodiment 15 such that the sub-area TB16 and the sub-area TB26 have an overlap which in Fig. 4A is represented as a hatched area, which is also designated with the reference symbol "UX", and which accordingly has an extent in the direction of the X-axis that is identical to the extent DUX mentioned above.

[0124] As from Fig. 4A As can be seen, the two sub-areas TB25 and TB26 are arranged relative to each other such that the center point of sub-area TB26 is offset relative to the center point of sub-area TB25 in the direction of the Y-axis by the distance ΔY, so that the two sub-areas TB25 and TB26 have an overlap in the direction of the Y-axis, which in Fig. 4A represented as a hatched area, which is labelled with the reference symbol "UY".

[0125] As from Fig. 4A As can be seen, the sub-areas TB15, TB16, TB25 and TB26 of the first area B1, each irradiated with a single light pulse, therefore exhibit overlaps UX and UY in two dimensions (i.e. both in the longitudinal direction of the at least one track and transversely to the longitudinal direction of the at least one track).

[0126] Accordingly, all sub-areas of the first area B1 irradiated with a single light pulse each exhibit overlaps UX and UY in two dimensions (i.e., both in the longitudinal direction of the at least one track and perpendicular to the longitudinal direction of the at least one track).

[0127] The distance ΔX is preferably chosen such that the extent DUX of the overlap UX in the direction of the X-axis is preferably in the range of 20-50% of the spatial extent D of the partial area irradiated by a single light pulse in the direction of the X-axis.

[0128] Fig. 4B shows - similar to Fig. 4A (in a top view of the side surface 2.1) a first area B2 of the side surface 2.1, in which the side surface 2.1 is to be processed using a pulsed laser in order to form a microstructure in the first area B2 which represents one of the marking areas of the first track SP1 or the second track SP2 of the mass embodiment 15.

[0129] Similar to the example according to Fig. 4A In the example, according to Fig. 4B Assuming that the first area B2 is essentially in the shape of a rectangle, which has an extent DBX in the longitudinal direction of the dimension body 15 and transversely to the longitudinal direction of the dimension body 15 (i.e. in the direction of the Y-axis according to Fig. 2 und 3 ) has an extension DBY.

[0130] Similar to the example according to Fig. 4A In the example, according to Fig. 4B For the production of a microstructure to be formed in area B2, a pulsed laser is provided to generate a laser beam, wherein the laser generates the laser beam with a sequence of several light pulses and the laser beam is directed onto the first area B2 of the first side surface 2.1 in such a way that with each individual light pulse of the generated sequence of several light pulses only a sub-area of ​​the first area B2 is irradiated.

[0131] Similar to the example according to Fig. 4A In the example, according to Fig. 4B Assuming that the laser beam has a substantially circular beam profile with a diameter DL in a plane perpendicular to the direction of propagation of the laser beam, such that a single light pulse of the laser beam, upon striking the side surface 2.1, irradiates an area of ​​the side surface 2.1 with laser light which has the shape of a circle, wherein the diameter of this area irradiated by a single light pulse in the present example corresponds substantially to the diameter DL of the laser.

[0132] Similar to the example according to Fig. 4A In the example, according to Fig. 4B Assume that when a single light pulse of the laser beam strikes the side surface 2.1, it is irradiated such that the side surface 2.1 is altered in a circular area, which has the shape of a circle with a diameter D, due to the irradiation with the single light pulse, such that the side surface 2.1 in the aforementioned circular area with diameter D exhibits a change in the form of a spatial modulation (compared to the shape of the surface before irradiation with the respective single light pulse). Accordingly, in the example according to Fig. 4B a "partial area of ​​the first area B2 irradiated by the respective individual light pulse" is represented as an area of ​​the side surface 2.1, which is bounded by a circle with diameter D.

[0133] Similar to the example according to Fig. 4A In the example, according to Fig. 4B Additionally, it is assumed that the laser beam is directed onto the first region B2 of the first side surface 2.1 such that the spatial extent D of the sub-region of the first region B2 illuminated by the respective individual light pulse in the longitudinal direction of the mass embodiment 15 (i.e. in the direction of the X-axis) is smaller than the spatial extent DBX of the first region B2 in the longitudinal direction of the mass embodiment 15, and that the spatial extent D of the sub-region illuminated by the respective individual light pulse transverse to the longitudinal direction of the mass embodiment 15 (i.e. in the direction of the Y-axis) is smaller than the spatial extent DBY of the first region B2 transverse to the longitudinal direction of the mass embodiment 15.

[0134] The example according to Fig. 4B differs from the example according to Fig. 4A essentially by the fact that the extension DBY of the first area B2 according to Fig. 4B transverse to the longitudinal direction of the mass embodiment 15 (i.e. in the direction of the Y-axis) identical to the extent of the first area B1 according to Fig. 4A perpendicular to the longitudinal direction of the physical embodiment 15, the spatial extent DBX of the first area B2 in the longitudinal direction of the physical embodiment 15 is significantly larger than the extent of the first area B1 according to Fig. 4A in the longitudinal direction of the scale body 15. The latter takes into account the requirement that the scale body 15 has different marking areas in the area of ​​the second track SP2, the extents of which differ considerably in the longitudinal direction of the scale body 15.

[0135] In the example according to Fig. 4A It is therefore assumed that the spatial extent DBX of the first region B2 in the longitudinal direction of the mass embodiment 15 is significantly larger than twice the spatial extent D of the sub-region of the first region B2 illuminated by the respective individual light pulse in the longitudinal direction of the mass embodiment 15 (i.e. DBX > 2 * D).

[0136] In the example according to Fig. 4B The laser beam is also moved relative to the guide carriage 2 such that at least several of the light pulses of the generated sequence of several light pulses irradiate several different sub-areas of the first area B2 in succession, which are spatially distributed relative to each other, wherein for each of the several different irradiated sub-areas there is at least one other of the several different irradiated sub-areas, which is related to the respective individual of the several different irradiated sub-areas in the longitudinal direction of the mass embodiment 15 (i.e. in the direction of the X-axis) and / or transversely to the longitudinal direction of the mass embodiment 15 (i.e.in the direction of the Y-axis) is offset such that each of the several different irradiated sub-areas and at least one other of the several different irradiated sub-areas overlap, and wherein the several different irradiated sub-areas together form an area of ​​the first side surface which is congruent with the first area B2.

[0137] In the example according to Fig. 4B The laser beam is therefore also moved two-dimensionally (i.e. in the direction of the X-axis and in the direction of the Y-axis) over the first area B2 of the first side surface 2.1 of the guide carriage 2, which corresponds to a marking area of ​​the mass embodiment 15 to be applied, so that different sub-areas of the first area B2 are irradiated successively.

[0138] In contrast to the example according to Fig. 4A is in the example according to Fig. 4B Assuming that, due to the relatively large spatial extent DBX of the first region B2 in the longitudinal direction of the mass embodiment 15 compared to the spatial extent D of the subregion irradiated by the respective individual light pulse, the various subregions irradiated by a light pulse are arranged in the first region B2 such that more than two different groups of subregions of the totality of all irradiated subregions are present, with each of these more than two different groups of subregions containing several of the subregions (with a number n of subregions as in the example according to Fig. 4A ) and the individual sub-areas of each of the more than two different groups are arranged in a row extending transversely to the longitudinal direction of the dimension body 15 (i.e., in the direction of the Y-axis) and are arranged relative to each other such that the centers of the different sub-areas are offset relative to each other transversely to the longitudinal direction of the dimension body 15 by predetermined distances. The more than two different groups of sub-areas differ in that the centers of the sub-areas of one of the different groups of sub-areas are offset relative to the centers of the sub-areas of each of the other different groups of sub-areas by predetermined distances in the longitudinal direction of the dimension body 15 (i.e., in the direction of the X-axis).

[0139] In the example according to Fig. 4B It is assumed that there are seven different groups of sub-areas (alternatively, there could be more or fewer different groups). As in Fig. 4B As shown, the respective sub-areas of each of the seven different groups of sub-areas each form a linear section of the first area B2, the extent of which transverse to the longitudinal direction of the mass embodiment 15 is identical to the extent DBY of the first area B2 and the extent of which in the longitudinal direction of the mass embodiment 15 is identical to the diameter D of the sub-areas each irradiated with a light pulse.

[0140] Since the centers of the sub-areas of one of the seven different groups of sub-areas are offset by predetermined distances relative to the centers of the sub-areas of each of the other seven different groups of sub-areas in the longitudinal direction of the mass embodiment 15 (i.e., in the direction of the X-axis), the sub-areas of the seven different groups together form seven linear segments of the first area B2, which in Fig. 4B are designated with the reference symbols "L1", "L2", "L3", "L4", "L5", "L6" or "L7".

[0141] In Fig. 4B The individual sections irradiated with a light pulse, each corresponding to one of the seven linear segments L1, L2, L3, L4, L5, L6, and L7 of the first area B2, are not shown. It is assumed that the arrangement of the individual sections irradiated with a light pulse within the seven linear segments L1, L2, L3, L4, L5, L6, and L7 is analogous to the arrangement of the individual sections irradiated with a light pulse in the first linear segment L1 and the second linear segment L2 of the first area B1, respectively. Fig. 4A is.

[0142] As in Fig. 4B As indicated, the centers of the individual sub-areas illuminated with a light pulse in each of the seven linear sections L1, L2, L3, L4, L5, L6, and L7 of the first area B2 each lie on a straight line extending in the direction of the Y-axis. In the example according to Fig. 4B Seven linear sections L1, L2, L3, L4, L5, L6, and L7 of the first region B2 are arranged relative to each other such that the centers of those sections irradiated with a light pulse, which are assigned to linear section L1, are separated from the centers of those sections irradiated with a light pulse, with respect to the longitudinal direction of the mass embodiment 15 (i.e., in the direction of the X-axis), by a distance ΔX which is smaller than the diameter D of the respective sections irradiated with a light pulse. Similarly, the centers of those sections irradiated with a light pulse, which are assigned to linear section L2, are separated from the centers of those sections irradiated with a light pulse, which are assigned to linear section L3, with respect to the longitudinal direction of the mass embodiment 15 (i.e., in the direction of the X-axis).in the direction of the X-axis) also the aforementioned distance ΔX. The remaining linear sections L4, L5, L6 and L7 of the first region B2 are arranged relative to the linear sections L1, L2 and L3 of the first region B2 in an analogous manner: The centers of the individual sub-regions of the seven linear sections L1, L2, L3, L4, L5, L6 and L7, each illuminated with a light pulse, lie on different straight lines extending in the direction of the Y-axis, which are arranged successively equidistant along the longitudinal direction of the mass embodiment 15, with the distance between any two adjacent of these straight lines corresponding to the aforementioned distance ΔX (as in . Fig. 4B (shown).

[0143] Since it is assumed that the distance ΔX is smaller than the diameter D of the respective sub-areas irradiated with a light pulse, the linear sections L1, L2, L3, L4, L5, L6 and L7 of the first area B2 are arranged offset in the longitudinal direction of the mass embodiment 15 such that each of the linear sections L1, L2, L3, L4, L5, L6 and L7 overlaps with another of the linear sections L1, L2, L3, L4, L5, L6 and L7 respectively, which in Fig. 4B The area is represented as a hatched surface and is designated by the reference symbol "UX". The respective overlap UX between any two of the linear segments L1, L2, L3, L4, L5, L6, and L7 accordingly has a length DUX in the direction of the X-axis, which is related to the aforementioned distance ΔX according to the following equation: DUX = D - ΔX.

[0144] Accordingly, each section irradiated with a light pulse, which is assigned to one of the linear segments L1, L2, L3, L4, L5, L6 or L7, has an overlap with at least one other section irradiated with a light pulse, which is assigned to another of the linear segments L1, L2, L3, L4, L5, L6 or L7, in the area of ​​one of the in Fig. 4B The overlapping UX shown is relevant.

[0145] In the example according to Fig. 4B The distance ΔX is preferably chosen such that the extent DUX of the overlap UX in the direction of the X-axis is preferably in the range of 20-50% of the spatial extent D of the partial area irradiated by a single light pulse in the direction of the X-axis.

[0146] The following are implementations of a Fig. 2 und 3 the depicted physical embodiment 15 on a side surface of a guide carriage (made of steel) with reference to Fig. 5-8 explained.

[0147] The Fig. 5-8 show realizations of a in Fig. 2 und 3 The depicted scale 15 is located on the side surface of a guide carriage of a profile rail guide. To introduce the microstructure into the respective marking areas of the scale 15 on the side surface of the guide carriage, a short-pulse laser with a wavelength of 355 nm, a maximum output power of 300 mW, a pulse duration of less than 15 nanoseconds, and an aperture of 16 mm was used. For the introduction of the microstructure, the laser beam could be moved relative to the guide carriage at a scan speed of 200 mm per second. The laser generated a sequence of light pulses with a repetition rate (pulse frequency) of 60 kHz, and the laser power was typically selected at 90% of the maximum output power.

[0148] The laser beam had a circular profile and was applied to the side surface of the guide carriage in such a way that a single light pulse of the laser beam irradiated a partial area with a diameter D of approximately 8 µm on the side surface of the guide carriage.

[0149] FIG. 5 shows a top view through a microscope of a physical embodiment 15 applied to a side surface of a guide carriage by means of the method according to the invention using the short pulse laser mentioned above. Fig. 3 The upper half of the Fig. 5 shows a top view of the first track SP1 (incremental track) of the scale body 15 and the lower half of the Fig. 5 shows a top view of the second track SP2 (reference track) of the scale body 15.

[0150] The bright areas in Fig. 5 correspond to the respective mirror areas of the mass embodiment 15, while the dark areas in Fig. 5 The respective marking areas of the mass embodiment 15 are shown, which were applied to the side surface of the guide carriage by means of the aforementioned short pulse laser.

[0151] The in Fig. 5 The depicted side surface was polished before the application of the scale 15, so that the mean roughness (Ra) of the side surface was Ra = 0.007 µm (measured with a laser scanning microscope). The individual marking areas of the in the upper half of the in Fig. 5 The first track SP1 (incremental track) shown has a longitudinal direction of the mass embodiment 15 (i.e., in the direction of the X-axis of a Fig. 5 (specified coordinate system) an extent of approximately 100 µm.

[0152] The in Fig. 5 The depicted marking areas of the physical embodiment 15 were determined according to the one shown in Fig. 4B The example shown is provided, where the parameters D and ΔX were chosen as follows: D = 8 µm and ΔX = 5 µm.

[0153] In the case of the in Fig. 5 The irradiation of the side surface shown with the laser pulses had the effect that the side surface in the respective marking areas experienced a homogeneous roughening over the entire area of ​​the respective marking area, with the mean roughness value (Ra) in the marking areas being Ra = 0.162 µm (measured with a laser scanning microscope).

[0154] As a result of this roughening, the respective marking areas of the in Fig. 5 The depicted scale does not directly reflect the light incident on the marking areas (e.g., perpendicular to the side surface) and is therefore in Fig. 5 In light incident essentially perpendicular to the side surface, they are recognizable as homogeneous dark (black) surface areas.

[0155] Fig. 6 shows a top view through a microscope of a physical embodiment 15 applied to a side surface of a guide carriage by means of the method according to the invention using the aforementioned short pulse laser, as shown in Fig.5 , however, with a greater magnification, so that the outer contours of the respective marking areas and the respective mirror areas of the scale 15 are more clearly visible. In Fig. 6 are in an upper range of Fig. 6 a total of five of the marking areas of the first track SP1 (incremental track) of the scale body 15 and at the lower edge of the Fig. 6 A total of two marking areas of the second track SP2 (reference track) of the scale 15 are visible. A detailed examination of the marking areas applied with the short-pulse laser reveals that the light pulses generated by the short-pulse laser cause material residues (in the form of small particles adhering to the surface) to form, which can protrude into the adjacent (polished) mirror areas at the outer edges of the marking areas. This results in the respective marking areas being visible at their edges in the view shown. Fig. 6 do not appear to have clean, straight boundaries. The latter can affect, among other things, the edges of the marked areas, which are not shown in the representation according to FIG. 6 each perpendicular to the longitudinal direction of the mass embodiment 15 (i.e. in the direction of the Y-axis of a Fig. 6 specified coordinate system) extend, and thus have an influence on the measurement accuracy of a linear encoder, which is based on an optical scanning of the material 15 in the longitudinal direction of the material 15.

[0156] Material residues of the aforementioned type, which may arise when applying the marking areas with a short pulse laser of the aforementioned type, can be completely removed by a surface cleaning process with a suitable cleaning agent.

[0157] Furthermore, it should be noted that irradiating the surface of a guide carriage made of steel or stainless steel with the light pulses of a short-pulse laser can induce chromium depletion (i.e., a reduction in the concentration of chromium contained in the steel) on the surface in the irradiated area. Such chromium depletion can reduce the corrosion resistance of the guide carriage surface (especially in the marking areas of the scale) and would therefore be detrimental to the desired, long-term durability of the scale. To counteract the aforementioned effect, passivation of the side surface of the guide carriage with a suitable passivating agent can preferably be carried out after the scale has been applied.

[0158] For example, a highly alkaline cleaner known as "deconex MT 19", manufactured and distributed by Borer Chemie AG, Gewerbestrasse 13, 4528 Zuchwil, is suitable as a cleaning agent for stainless steel surfaces for the aforementioned purpose.

[0159] For example, a highly acidic cleaner known as "deconex MT 41", which is also manufactured and distributed by the aforementioned company Borer Chemie AG, is suitable as a passivating agent for the passivation of stainless steel surfaces for the aforementioned purpose.

[0160] The following sequential cleaning process has proven particularly suitable for cleaning and passivating the side surface of the guide carriage after the application of the mass embodiment 15 to the side surface using a short pulse laser of the type mentioned above: 1. Cleaning with "deconex MT 19", 2% concentration at 55°C and 25 kHz; 15 W / L; 2. Passivation with "deconex MT 41", 8% concentration at 55°C and 40 kHz; 15 W / L; 3. Rinsing with DI water at room temperature and 40 kHz; 15 W / L; and 4. Drying at 100°C

[0161] FIG. 7 shows a view of the physical embodiment according to Fig. 6 after performing the ultrasonic cleaning process described above. Compared to the FIG. 6 It is clearly evident that the marked areas are essentially bounded in straight lines after the aforementioned cleaning process. No material residues extending into the adjacent mirror areas are visible at the outer edges of the marked areas.

[0162] Fig. 8 shows a section of the Fig. 7 The depicted marking areas are shown in an enlarged view, revealing structural details of the surface of each marking area after the ultrasonic cleaning process described above. A roughening of the surface is particularly visible, and this roughening is homogeneous across the entire area of ​​each marking.

[0163] As already mentioned, the roughness of a side surface 2.1 of a guide carriage 2 before the application of a scale 15 to the side surface 2.1 according to the described method significantly influences the intensity of the reflected light RL1 or RL2, which is received in a linear encoder 11 according to Fig. 2 The light RL1 is reflected at the respective mirror areas of the first track SP1 and the respective mirror areas of the second track SP2 of the scale body 15 applied to the side surface 2.1 according to the described method and is detected by the respective photosensors of the first arrangement 25.1 and the respective photosensors of the second arrangement 25.2, respectively. Accordingly, the roughness of the side surface 2.1 of the guide carriage 2 before the application of a scale body 15 to the side surface 2.1 according to the described method also significantly influences the magnitude of the respective output signals generated by the respective photosensors of the first arrangement 25.1 when detecting the light RL1 reflected at the first track SP1 of the scale body 15, and by the respective photosensors when detecting the light RL2 reflected at the second track SP2 of the scale body 15.Accordingly, the roughness exhibited by the side surface 2.1 of the guide carriage 2 before the application of a scale 15 to the side surface 2.1 according to the described method also significantly influences the amplitude of the variation shown by the output signals of the respective photosensors of the first arrangement 25.1 or the output signals of the respective photosensors of the second arrangement 25.2 when the guide carriage 2 is moved in the longitudinal direction of the guide rail 3 as a function of the respective position of the measuring head 21 with respect to the longitudinal direction of the scale 15.

[0164] In order to experimentally evaluate the aforementioned influence of the roughness exhibited by a side surface 2.1 of a guide carriage 2 before the application of a physical embodiment 15 to the side surface 2.1 according to the described method, a surface roughness of 15 was applied to the side surfaces 2.1 of several different guide carriages 2. Fig. 3 The illustrated physical embodiment 15 was applied according to the described method, wherein a side surface 2.1 of one of the guide carriages was ground according to standard procedure before the application of the physical embodiment 15, but (after the standard grinding) not polished, and a side surface 2.1 of other guide carriages 2 was first ground according to standard procedure and then (after the standard grinding) additionally polished, in particular by means of pre-polishing with a ceramic grinding wheel with a very fine grain size (400 or finer) and subsequent polishing with a polishing wheel bonded on a rubber or synthetic resin basis or alternatively by polishing using polishing brushes.

[0165] In this process, the mass embodiment 15 was applied to the side surface 2.1 of the respective guide carriage 2 using the same short-pulse laser, which was used to realize the in Fig. 5-8 The depicted physical embodiment 15 served (when using the same operating parameters of the short pulse laser).

[0166] The laser beam therefore had a circular profile and was applied to the side surface 2.1 of the respective guide carriage 2 such that a single light pulse of the laser beam irradiated a partial area with a diameter D of approximately 8 µm on the side surface 2.1 of the respective guide carriage. The marking areas of the respective physical embodiment 15 were defined according to the Fig. 4B The example shown is provided, with the parameters D and ΔX chosen as follows: D = 8 µm and ΔX = 5 µm. The first track SP1 of the respective scale body 15 was implemented such that the individual marking areas M and the individual mirror areas S of the scale body 15 each have a longitudinal extent of approximately 100 µm.

[0167] Each of the mass embodiments 15 provided in this way on side surfaces 2.1 of different guide carriages was subsequently equipped with a Fig. 2 The illustrated sensor device 20 is combined to form a sensor device that is in Fig. 2 to form the depicted path measuring system 10.

[0168] To characterize each of the mass embodiments 15 provided on the side surfaces 2.1 of different guide carriages 2, each of these mass embodiments 15 was optically scanned with the sensor device 20, wherein the sensor device 20 (as in connection with Fig. 2 described) relative to the respective physical embodiment 15, each in the longitudinal direction of the physical embodiment 15, the respective physical embodiment 15 being illuminated with a light beam 22.1 emitted from the light source 22, and the light RL1 reflected at the respective mirror areas of the first track SP1 being detected by photosensors of the electronic light sensor chip 25 using the photosensors of the first arrangement 25.1.

[0169] The first arrangement 25.1 of photosensors was configured such that, when the sensor device 20 was moved in the longitudinal direction of the respective physical body 15, each photosensor of the first arrangement 25.1 generated an output signal which, as a function of the position of the sensor device 20 with respect to the longitudinal direction of the physical body 15, varied periodically between a maximum signal value Smax and a minimum signal value Smin, with a periodic variation corresponding to the shape of a mathematical sine or cosine function. To characterize this periodic variation of the respective output signal of one of the photosensors of the first arrangement 25.1, it is advantageous to define a "signal contrast" K of the respective output signal of one of the photosensors of the first arrangement 25.1 of photosensors to determine which in this context can be defined as the ratio of the "amplitude" (Smax-Smin) / 2 of the variation of the respective output signal as a function of the position of the sensor device 20 with reference to the longitudinal direction of the mass body 15 and the difference between a "mean value" (i.e. (Smax+Smin) / 2) of the respective output signal and a "base output signal" S0 of the respective photosensor, i.e. the output signal of the respective photosensor measured under the condition that the light source 22 is switched off and thus does not generate a light beam to illuminate the mass body 15, i.e. the signal contrast K of the respective output signal of one of the photosensors of the first arrangement 25.1 is calculated as . K = Smax − Smin / Smax + Smin − 2 * S 0 .

[0170] The signal contrast K typically takes on a value between 0 and 1.

[0171] The roughness which a side surface 2.1 of a guide carriage 2 has before the application of a scale 15 to the side surface 2.1 according to the described method has a clearly measurable influence on the magnitude of the aforementioned "signal contrast" K of the respective output signal of one of the photosensors of the first arrangement 25.1 of photosensors of the sensor device 20.

[0172] In the case of the scale 15, which was applied to a side surface 2.1 of the guide carriage 2 according to the described method, which was only ground in the standard way before the application of the scale 15, but not polished (after the standard grinding), the respective output signals of the photosensors of the first arrangement 25.1 of photosensors of the sensor device 20 showed a signal contrast K=0.29 when optically scanning the first track SP1 of the scale 15.

[0173] In the case of the scale bodies 15, which were applied to a side surface 2.1 of guide carriages 2 according to the described method, which were first ground according to standard procedure before the application of the respective scale body 15 and then additionally polished (after the standard grinding), the respective output signals of the photosensors of the first arrangement 25.1 of photosensors of the sensor device 20 showed a signal contrast K in the range of 0.5 to 0.65 when optically scanning the first track SP1 of the respective scale body 15 (depending on the respective method used for polishing the side surface 2.1 of the respective guide carriage 2 and accordingly on the size of the reduction in roughness of the respective side surface 2.1 achieved by the polishing, onto which the respective scale body 15 was applied according to the described method).

[0174] Accordingly, by polishing the side surface 2.1 before applying the respective physical embodiment 15, the signal contrast K of the output signals of the photosensors of the first arrangement 25.1 of the photosensors of the sensor device 20 can be significantly increased during optical scanning of the first track SP1 of the respective physical embodiment 15. The respective magnitude of the aforementioned signal contrast K is relevant for the measurement accuracy of the in Fig. 2 depicted displacement measuring system 10 or of the in Fig. 2 Linear encoder 11 shown: The greater the signal contrast K is, the greater the accuracy with which the respective position of the sensor device 20 with reference to the longitudinal direction of the respective physical object 15 can be determined by evaluating the output signals of the photosensors of the first arrangement 25.1 of photosensors of the sensor device 20.

[0175] As mentioned above, in the embodiments of the mass embodiment 15 described above, the individual marking areas of the mass embodiment 15 are provided on a side surface 2.1 such that all sub-areas of the respective marking area M irradiated with a single light pulse exhibit overlaps UX and UY in two dimensions (i.e., both in the longitudinal direction of the at least one track and transversely to the longitudinal direction of the at least one track). The respective overlaps UX and UY between the different irradiated sub-areas influence the reflectivity of the respective marking areas M compared to the reflectivity of the individual mirror areas S.The reflectivity of the respective marking areas M can be minimized in particular by a suitable choice of the size of the respective overlaps UX and UY, which enables an increase in the respective signal contrast K of the output signals of the photosensors of the first arrangement 25.1 of photosensors of the sensor device 20 when optically scanning the first track SP1 of the respective material representation 15.

[0176] To characterize the influence of the size of the respective overlaps of the different irradiated sub-areas of a marking area M, the influence of the size of the overlap UX on the reflectivity of the respective marking areas M was evaluated as an example.

[0177] For this purpose, three examples (hereinafter "Example 1", "Example 2" and Example 3") for a first track SP1 of the mass embodiment 15 of the in were each printed side by side on a side surface 2.1 using the method according to the invention. Fig. 3 as shown, wherein the side surface 2.1 was uniformly polished over the entire area of ​​the side surface before providing the marking areas M of the various first tracks SP1.

[0178] The laser beam had a circular profile and was applied to the side surface 2.1 in such a way that a single light pulse of the laser beam irradiated a partial area on the side surface 2.1. The marking areas of the respective physical embodiment 15 were defined according to the Fig. 4B The example shown is provided, with the parameters D and ΔY chosen as follows: D = 15.2 µm and ΔY = 5 µm. The first track SP1 of the respective scale body 15 was implemented such that the individual marking areas M and the individual mirror areas S of the scale body 15 each have a longitudinal extent of approximately 100 µm.

[0179] The aforementioned embodiments of the first track SP1 according to Example 1, Example 2 and Example 3 are accordingly identical with respect to the distance ΔY, which decisively determines the extent DUY of the overlap UY of the partial areas irradiated with a laser pulse, respectively transverse to the direction of the X-axis or transverse to the longitudinal direction of the first track SP1 (in the present case DUY = D-ΔY = 10.2 µm).

[0180] The aforementioned embodiments of the first track SP1 according to Example 1, Example 2, and Example 3 differed with respect to the distance ΔX, which significantly determines the extent DUX of the overlap UX in the direction of the X-axis or in the longitudinal direction of the first track SP1. ΔX was chosen as follows: ΔX = 5 µm for Example 1; ΔX = 8 µm for Example 2; and ΔX = 15.2 µm for Example 3.

[0181] The aforementioned embodiments of the first track SP1 according to Example 1, Example 2, and Example 3 were each scanned using the sensor device 20 described above, and for each of these embodiments, the respective output signals of the photosensors of the first arrangement 25.1 of the sensor device 20 were measured during the optical scanning of the first track SP1 of the material 15. For each of the aforementioned embodiments of the first track SP1 according to Example 1, Example 2, and Example 3, the signal contrast K of the respective output signal of one of the photosensors of the first arrangement 25.1 of the sensor device 20 was determined.

[0182] In Table 1 below, the values ​​determined for the signal contrast K, the distance ΔX and the extent DUX of the overlap UX in the direction of the X-axis or in the longitudinal direction of the first track SP1 are given for the aforementioned embodiments of the first track SP1 according to Example 1, Example 2 and Example 3. Table 1: D [µm] ΔX[µm] DUX [µm] K (%) Beispiel 1 15.2 5 10.2 61.4 Beispiel 2 15.2 8 7.2 53.6 Beispiel 3 15.2 15.2 0 51.6

[0183] As can be seen from Table 1, in the case of example 3, the different sub-areas irradiated with a laser pulse in a marking area M are distributed in such a way that the different sub-areas keine The overlap UX in the longitudinal direction of the first track SP1 is present (i.e., DUX = 0). In contrast, in the case of Example 1 and Example 2, there is an overlap UX with DUX > 0.

[0184] As can be seen from Table 1, the signal contrast K for examples 1 and 2 is greater than the corresponding value for the signal contrast K for example 3. Compared to example 3 (with DUX = 0), increasing the extent DUX of the overlap UX in the longitudinal direction of the first track SP1 therefore leads to an increase in the signal contrast K and thus to a reduction in the reflectivity of a marking area M.

[0185] It should be noted that, as an alternative to the aforementioned short-pulse laser, it is also conceivable to use an ultrashort-pulse laser with a pulse duration in the picosecond range, for example, with a pulse duration of less than 10 picoseconds, to apply a physical embodiment according to the invention to the surface of a guide carriage. The use of such an ultrashort-pulse laser enables the physical embodiment to be applied with reduced thermal stress on the surface areas irradiated with light pulses. This results in the advantage that, after the physical embodiment has been applied, the cleaning and passivation process described above can be omitted.

Claims

1. A method for applying a measurement scale (15) to a surface of a guide carriage (2) of a linear profile rail guide (1), wherein the guide carriage (2) is guided on a guide rail (3) of the profile rail guide (1), so that the guide carriage (2) can be moved linearly in the longitudinal direction (X) of the guide rail (3), and wherein the guide carriage (2) has a first side surface (2.1), which extends in the longitudinal direction (X) of the guide rail (3), wherein the measurement scale (15) comprises at least one track (SP1, SP2), which extends linearly in the longitudinal direction (X) of the guide rail (3) and comprises several mirror regions (S; S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14, S15) and marking regions (M; M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, M14) arranged one behind another in an alternating manner, wherein each of the marking regions extends in a line-like manner transverse to the longitudinal direction (X) of the at least one track (SP1, SP2), and wherein the method has the following method steps: - providing a pulsed laser for generating a laser beam; and - providing at least one of the marking regions (M; M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, M14) by introducing a microstructure in a first region (B1), which corresponds to the at least one marking region, of the first side surface (2.1) of the guide carriage (2), in that: the laser generates the laser beam with a sequence of several light pulses, and the laser beam is directed at the first region (B1, B2) of the first side surface (2.1) in such a way that only a subregion (TB11, TB15, TB16, TB1n, TB21, TB25, TB26, TB2n) of the first region (B1) is irradiated by means of each individual light pulse of the generated sequence of several light pulses in such a way that the first side surface (2.1) in the subregion (TB11, TB15, TB16, TB1n, TB21, TB25, TB26, TB2n) of the first region (B1), which is irradiated by means of the respective individual light pulse, is changed due to the irradiation by means of the respective individual light pulse in such a way that after the irradiation by means of the respective individual light pulse, the first side surface (2.1) has a spatial modulation of the first side surface (2.1), which extends over the subregion (TB11, TB15, TB16, TB1n, TB21, TB25, TB26, TB2n) of the first region (B1), which is irradiated by means of the respective individual light pulse, wherein the spatial extension (D) of the subregion of the first region (B1), which is irradiated by means of the respective individual light pulse, in the longitudinal direction (X) of the at least one track is smaller than the spatial extension (DBX) of the first region (B1) in the longitudinal direction (X) of the at least one track (SP1, SP2), and the spatial extension (D) of the subregion irradiated by means of the respective individual light pulse transverse to the longitudinal direction (X) of the at least one track (SP1, SP2) is smaller than the spatial extension (DBY) of the first region (B1) transverse to the longitudinal direction (X) of the at least one track (SP1, SP2); the laser beam is moved relative to the guide carriage (2), so that at least several of the light pulses of the generated sequence of several light pulses irradiate several different subregions (TB11, TB15, TB16, TB1n, TB21, TB25, TB26, TB2n) of the first region, which are arranged spatially distributed to one another, sequentially in time, wherein for each individual one of the several different irradiated subregions (TB15), at least two other ones of the several different irradiated subregions (TB16, TB25) are present, which are offset to the respective individual one of the several different irradiated subregions (TB15) in such a way that one of the at least two other ones of the several different irradiated subregions (TB16) is offset relative to the respective individual one of the several different irradiated subregions (TB15) TB15) transverse to the longitudinal direction (X) of the at least one track (SP1, SP2) so that the one of the at least two other ones of the several different irradiated subregions (TB16) and the respective individual one of the several different irradiated subregions (TB15) have an overlap (UY), wherein the several different irradiated subregions together form a region of the first side surface, which is congruent with the first region (B1), characterized in that the other one of the at least two other ones of the several different irradiated subregions (TB25) is offset relative to the respective individual one of the several different irradiated subregions (TB15) in the longitudinal direction (X) of the at least one track (SP1, SP2) so that the other one of the at least two other ones of the several different irradiated subregions (TB25) and the respective individual one of the several different irradiated subregions (TB15) have an overlap (UX).

2. The method according to claim 1, wherein the method further has the following method steps: - prior to the introduction of the microstructure into the first side surface (2.1) of the guide carriage (2) by means of the pulsed laser beam, at least the first side surface is subjected to a surface treatment in such a way that little material is in particular removed from the first side surface of the guide carriage; and - after the introduction of the microstructure into the first side surface (2.1) of the guide carriage(2) by means of the laser beam, at least the first side surface of the guide carriage (2) is subjected to a surface cleaning.

3. The method according to claim 1 or 2, wherein the overlap (UX) between the respective individual one of the several different irradiated subregions (TB11, TB1n) and the at least one other one of the several different irradiated subregions (TB21, TB2n) in the longitudinal direction (X) of the at least one track (SP1, SP2) has a spatial extension (DUX), which is 20-50% of the spatial extension (D) of the subregion of the first region, which is irradiated by means of the respective individual light pulse, in the longitudinal direction (X) of the at least one track (SP1, SP2), and / or wherein the overlap (UY) between the respective individual one of the several different irradiated subregions (TB15) and the at least one other one of the several different irradiated subregions (TB16) transverse to the longitudinal direction (X) of the at least one track (SP1, SP2) has a spatial extension (DUY), which is 20-50% of the spatial extension (D) of the subregion of the first region, which is irradiated by means of the respective individual light pulse, transverse to the longitudinal direction (X) of the at least one track (SP1, SP2).

4. The method according to one of claims 1 to 3, wherein the laser is formed as short-pulse laser for generating pulsed laser light by means of light pulses with pulse durations of less than 15 nanoseconds or as ultra short-pulse laser for generating pulsed laser light by means of light pulses with pulse durations of less than 20 picoseconds; and / or wherein the pulse parameters of the laser and / or a laser focus are / is selected in such a way that a material roughening in the nanometer range is formed when introducing the microstructure into the first side surface (2.1) without material removal or at least without significant material removal along the surface paths.

5. The method according to one of claims 1 to 4, wherein prior to the introduction of the microstructure into the first side surface (2.1) of the guide carriage (2) by means of the pulsed laser beam, at least the first side surface (2.1) is subjected to the surface treatment by means of polishing; and / or wherein prior to the introduction of the microstructure into the first side surface (2.1) of the guide carriage (2) by means of the pulsed laser beam, at least the first side surface (2.1) is subjected to the surface treatment in such a way that the first side surface (2.1) has an average roughness value (Ra) of maximally 0.3 µm, preferably an average roughness value (Ra) of maximally 0.1 µm, and even more preferably an average roughness value (Ra) in a range of approximately 0.007 µm to 0.1 µm.

6. The method according to one of claims 1 to 5, wherein prior to the introduction of the microstructure into the first side surface (2.1) of the guide carriage (2) by means of the pulsed laser beam, at least the first side surface (2.1) is subjected to the surface treatment by means of polishing disks, by means of laser polishing and / or by means of electropolishing.

7. The method according to one of claims 1 to 6, wherein after the introduction of the microstructure into the first side surface (2.1) of the guide carriage (2), the first side surface (2.1) has, in one of the marking regions (M; M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, M14) of the measurement scale (15), an average roughness value (Ra), which is greater by more than a factor of 10 than the average roughness value of the side surface (2.1) in one of the mirror regions (S; S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14, S15) of the measurement scale (15).

8. The method according to one of claims 1 to 7, wherein after the introduction of the microstructure into the first side surface (2.1) of the guide carriage (2) by means of the laser beam, the first side surface (2.1) is subjected to a surface cleaning, wherein the surface cleaning is a laser treatment and / or a vibration cleaning or an application of the first side surface with ultrasound.

9. The method according to one of claims 1 to 8, wherein the laser beam has an essentially round beam bundle and is selected in such a way that the beam bundle on the first side surface (2.1) of the guide carriage (2) has a diameter of 3.5 µm bis 12 µm, preferably 6 µm to 9 µm, and in particular approximately 8 µm; and / or wherein the laser is operated with a pulse frequency of approximately 60 kHz.

10. A measurement scale (15) for a linear encoder (11), which linear encoder (11) comprises a guide carriage (2) of a linear profile rail guide (1), wherein the guide carriage (2) is guided on a guide rail (3) of the profile rail guide (1), so that the guide carriage (2) can be moved linearly in the longitudinal direction (X) of the guide rail (3), and wherein the guide carriage (2) has a first side surface (2.1), which extends in the longitudinal direction (X) of the guide rail (3), wherein the measurement scale (15) comprises at least one track (SP1, SP2), which extends linearly in the longitudinal direction (X) of the guide rail (3) and comprises several mirror regions (S; S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14, S15) and marking regions (M; M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, M14) arranged one behind another in an alternating manner, wherein each of the marking regions (M; M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, M14) extends linearly transverse to the longitudinal direction (X) of the at least one track (SP1, SP2) and is formed to absorb incident light and / or to reflect it diffusely, wherein the mirror regions (S; S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14, S15), have an at least essentially smooth surface, which is formed to reflect incident light in a reflective manner, characterized in that the measurement scale (15) is applied to the first side surface (2.1) of the guide carriage (2) according to the method according to one of claims 1 to 9.

11. The measurement scale (15) according to claim 10, wherein the at least one track (SP1) is formed as incremental track comprising a plurality of equidistantly arranged marking regions (M) or the at least one track (SP2) is formed as reference track with at least one marking region (M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, M14) for encoding at least one reference position.

12. A linear encoder (11), which has the following: - a measurement scale (15) according to one of claims 10 to 11; and - at least one sensor device (20), which is formed to optically scan the at least one track (SP1, SP2) of the measurement scale (15), wherein the at least one sensor device (22) has a measuring head (21), which is arranged in a stationary manner with respect to the guide rail (3): a light source (22) for emitting light (22.1) onto mirror regions (S; S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14, S15) and marking regions (M; M1, M2, M3, M4, M5, M6, M7, M8, M9, M10, M11, M12, M13, M14) of the measurement scale (15) and at least one arrangement of photo sensors (25.1, 25.2), which are formed to detect light (RL1, RL2) emitted by the light source (22) and reflected on mirror regions (S; S1, S2, S3, S4, S5, S6, S7, S8, S9, S10, S11, S12, S13, S14, S15) of the measurement scale (15).