METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT AND SEMICONDUCTOR COMPONENT
DE602021040578T2Active Publication Date: 2025-10-15SHIN ETSU HANDOTAI CO LTD
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Patent Information
- Application Number
- DE602021040578
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2020-07-07
- Filing Date
- 2021-05-26
- Publication Date
- 2025-10-15
- Estimated Expiration
- 2041-05-26
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