Thermal detector comprising a suspended absorbent membrane with improved thermal insulation

Abstract

The invention relates to a thermal detector comprising: a reading substrate (10), comprising a reading circuit; an absorbent membrane (40), comprising a thermometer transducer (44) electrically connected to the reading circuit, anchoring pillars (20) and holding arms (30), ensuring: the holding of the absorbent membrane (40) suspended above the reading substrate (10); the thermal insulation thereof with respect to the reading substrate (10); and the electrical connection of the thermometer transducer (44) to the reading circuit; the holding arms (30) being formed from a stack of at least one portion (51b; 53b) of a thin insulating layer (51; 53) made of a thermally insulating material, and at least one portion (52b) of a thin conductive layer (52) made of an electrically conductive material. The thin insulating layer (51; 53) is made of amorphous boron. Figure for abstract: Fig.2A