Photonic device comprising a component layer arranged on a support substrate and method for preparing such a photonic device

FR3158372A1Active Publication Date: 2025-07-18SCINTIL PHOTONICS
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Patent Information

Application Number
FR2024000469
Authority / Receiving Office
FR · FR
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-01-17
Publication Date
2025-07-18
Estimated Expiration
2044-01-17

AI Technical Summary

Technical Problem

Existing methods for integrating photonic devices with hybrid waveguides are complex and sensitive to damage from etching processes, limiting the integration of components like germanium photodetectors and silicon nitride waveguides, and require precise control of dielectric thickness for optical coupling.

Method used

A method involving a component layer with an edge waveguide on a support substrate, a dielectric layer covering the waveguide's peripheral contour but not its central part, and a heterogeneous structure on the central part, allowing for simple integration of components like gain structures and electro-optical modulators while minimizing damage risk.

Benefits of technology

Enables efficient and less damaging integration of heterogeneous structures with silicon waveguides, maintaining optical coupling and allowing for the inclusion of additional photonic components, reducing complexity and sensitivity to etching damage.

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Abstract

The invention relates to a photonic device (PD) comprising a hybrid waveguide capable of propagating an optical mode. The device comprises a component layer (2) arranged by a first surface on a support substrate (1e) and comprising at least one edge waveguide (2a) formed of a base flush with a second surface of the component layer (2) and at least one edge oriented towards the support substrate (1e). A dielectric layer (1b) is arranged on and in contact with the second surface of the component layer (2). It is arranged to cover a peripheral contour (Zb) of the base of the edge waveguide (2a) without however extending over its central part. A heterogeneous structure (4) is arranged on and in contact with the central part (Zc) of the base of the waveguide (2a). The heterogeneous structure (4) and the edge waveguide (2a) form, in combination, the hybrid waveguide. Figure 1 h
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Citation Information

Patent Citations

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