Method and apparatus for separating overlapping peaks of spectral confocal thin-film thickness measurement signal
GB202511050D0Pending Publication Date: 2025-08-20HUAZHONG UNIV OF SCI & TECH
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Patent Information
- Application Number
- GB2025011050
- Authority / Receiving Office
- GB · GB
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-08-05
- Filing Date
- 2025-07-09
- Publication Date
- 2025-08-20
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