Improved abatement apparatus head units

Abstract

A head unit 10 suitable for an abatement apparatus comprises a head plate 12 to cap a combustion chamber. Effluent flow conduits 14a-14f have an effluent flow contact surface 16 which conveys an efflu

Description

Field

[001] The present invention relates to head units for abatement apparatus, to abatement apparatus, and to methods for manufacturing the same. Background

[002] Abatement apparatus treat effluent gas streams from various manufacturing processes, e.g. semiconductor or flat panel display manufacturing. Components of those effluent gas streams must be treated, to remove selected gases and solids, before being vented to the atmosphere.

[003] Typically, abatement apparatus treat an effluent gas stream via combustion. A fuel and other reagents and / or purge gases are mixed with the effluent gas stream and supplied, via an head unit, to an abatement chamber for abatement.

[004] There is an ongoing need to reduce downtime associated with the maintenance of head units. Current head units have many complex fluid (e.g. gas) connections which must each be separately serviced, all within the confined space of an abatement apparatus cabinet.

[005] The present invention aims to solve these and other problems with the prior art. Summary

[006] Accordingly, in a first aspect, the present invention provides a head unit for arrangement at an inlet of a combustion chamber of an abatement apparatus. The head unit comprises: a head plate configured to cap a combustion chamber; an effluent flow conduit having an effluent flow contact surface for conveying an effluent flow towards a combustion chamber of an abatement apparatus; and an inject flow conduit having an inject flow contact surface for conveying an inject fluid towards the effluent flow. The effluent flow contact surface and / or the inject flow contact surface is defined by the head plate.

[007] In other words, the effluent flow conduit and / or inject flow conduit may be substantially internally routed within the head plate.

[008] The inventors of the present invention have found that this configuration provides several advantages.

[009] In particular, by providing a head plate which defines the effluent flow contact surface and / or the inject flow contact surface, a substantial proportion of previous potential leak points are eliminated.

[010] For existing head units, a large number of separate fluid (e.g. gas) lines are provided, which must be disconnected, reconnected and leak checked during regular maintenance and prior to recommissioning the head unit for use. Additionally, separate quadrants of known head units must be removed from the remainder of the unit to service inlet nozzles. Proper reinstallation of the quadrants is then required to ensure a fluid-tight seal is achieved. In short, known head units comprise a large number of separable components which presents a greater leak risk and maintenance burden. The configuration of the present invention provides a significant reduction in downtime for the head unit.

[011] By contrast, where a fluid contact surface (either effluent or inject fluid) is defined by the head plate of the present invention, fewer distinct components, including connections, seals or gaskets, (i.e. potential failure points) are provided.

[012] Where the head plate defines an inject flow conduit, and the head plate thus comprises substantially internally routed fluid (e.g. gas) flow paths, the various fluid flow paths, e.g. effluent flow conduits, can be positioned more effectively, allowing improved access to other components of the head unit.

[013] For example, in embodiments, an inject flow conduit may be at least partially located in a different region, e.g. sector, of the head unit to the effluent flow conduit it is associated with, when the head unit is viewed from above. By contrast, known head units typically have distinct inject flow conduits which extend directly from the corresponding effluent flow conduit, away from a head plate, and which are typically arranged within the same sector of the head unit as the corresponding effluent flow conduit, when the head unit is viewed from above.

[014] In the present invention, where the inject flow contact surface is defined by the head plate, more free space is provided around the corresponding effluent flow conduit. In other words, the head unit is less cluttered.

[015] The two improvements above lead to a significant reduction in downtime for a head unit because: i) more efficient maintenance is made possible and, in particular, fewer leak checks are required, and ii) an engineer has better access to components of the head unit and can therefore work more swiftly.

[016] In known head units, at least one inject may typically be provided further towards a corresponding effluent inlet than the combustion chamber of the abatement apparatus. The configuration of the present invention eliminates or at least reduces the need for such an inject further upstream, e.g. further towards an effluent flow inlet, or allows repurposing of such an inject, thereby reducing the complexity of the head unit. Reducing complexity makes manufacturing a head unit, e.g. by additive manufacture, easier.

[017] Further advantageously, the inventors have also found that by routing an effluent flow path and / or inject flow path internally within the head plate, improved thermal control of the head unit, e.g. thermal uniformity, and fluids that are conveyed thereby can be provided.

[018] For example, for existing head units, thermal heating jackets must typically be installed around inlets, which is time consuming and difficult due to the location and number of inlets. If a jacket is not provided, cold spots cause unwanted gas condensation and buildup of contaminants within the head unit.

[019] By contrast, the head unit of the present invention provides improved flow conditioning due to the internally routed flow conduit(s) defined by the head plate.

[020] More specifically, providing a head plate which defines, and thereby routes, fluid flow paths internally within the head plate allows heat generated by a downstream combustor to be utilised. Heat is conducted through the head plate material to heat the head unit and keep the internally routed conduits, and fluids conveyed therein, sufficiently warm. Thus, the internally routed flow conduits are configured to provide a last-stage flow conditioning, in particular by pre-heating inject gases prior to the inject gases interacting with the effluent flow. Known head units have, by contrast, relatively flexible externally routed gas paths that connect to inject entry points on the head unit and do not function as last-stage flow conditioning elements.

[021] Moreover, components of known head units must typically be provided with a ceramic protective layer to provide thermal protection. Due to the improved thermal properties of the head unit of the present invention, this is not required or is required to a significantly lesser extent.

[022] A further advantage associated with the configuration of the present invention is that less material is required to form the head unit. As a result, the head unit is reduced in weight. Reducing the material and weight of the head unit improves the ease with which an engineer can remove the head unit from an abatement cabinet.

[023] As used herein, the term “head plate” refers to a part of the head unit which caps a combustion chamber of an abatement apparatus. Typically, the head plate is the last stage of gas flow conditioning (e.g. mixing, redirecting and / or realignment) prior to the fluid conveyed therein reaching a combustion chamber. Typically, the head plate may be configured such that effluent fluid and / or inject fluid enters a downstream combustion chamber in a generally coaxial flow direction, the flow direction being substantially coaxial with a longitudinal axis of the head unit.

[024] As used herein, the term “inject” may refer to a reagent such as a fuel and / or oxygen, or a purge fluid, or an inert fluid configured to maintain a forward flow of the effluent gas flow. The term “inject” may also refer to a fluid configured to provide ambient pressure sensing data.

[025] For example, the head plate may define an inject flow conduit configured to convey a fuel, and / or a fluid comprising, oxygen, nitrogen, water, hydrogen or ammonia.

[026] The head unit may have a generally cylindrical body. When arranged at an inlet of a combustion chamber of an abatement apparatus, the head unit may define a portion of the combustion chamber. The head unit may have an upstream side that faces generally away from the combustion chamber when in use, and a downstream side that faces towards the combustion chamber when in use.

[027] For the purposes of the present invention, the terms “upstream” and “downstream” may refer to the relative positioning of components along a flow path of the effluent fluid flow.

[028] The head unit may be configured to receive incoming effluent fluid from one or more sources. For example, the effluent fluid flow may be the exhaust flow from one or more process tools. The head unit may be configured to direct the flow(s) into the combustion chamber of an abatement apparatus.

[029] In embodiments, a said effluent flow contact surface and / or a said inject flow contact surface may be defined substantially entirely by the head plate. In embodiments, both the effluent flow contact surface and the inject flow contact surface may be defined, preferably substantially entirely, by the head plate. In other words, the effluent flow conduit and the inject flow conduit may be integrally formed by the head plate.

[030] In embodiments, a said effluent flow conduit or inject flow conduit may be defined by a single effluent flow contact surface or inject flow surface, respectively. [031 ] For the avoidance of doubt, the effluent flow contact surface(s) and inject flow contact surface(s) defined by the head plate directly contact the effluent fluid flow and inject flow, respectively, during use. Preferably, a surface of the head plate defining an effluent flow contact surface or an inject flow contact surface may be an internal surface. Head units of prior art apparatus typically have an aperture through which a nozzle is inserted, with the nozzle and / or a distinct effluent flow component defining a flow path for an effluent flow (rather than the head plate itself including a fluid flow contact surface).

[032] Typically, the head unit may be arranged above the combustion chamber of an abatement apparatus to which the head unit is coupled. In embodiments, the effluent flow may have a generally downward primary flow direction. The primary flow direction may be substantially towards the combustion chamber of the abatement apparatus. In other words, the effluent flow may be substantially parallel to a major axis of the head unit.

[033] In embodiments, the effluent flow conduit may have an effluent inlet through which the effluent fluid flow enters the effluent flow conduit. The effluent inlet may be arranged on an upstream side of the head unit. The effluent flow conduit may have an effluent outlet through which effluent fluid exits the effluent flow conduit, in use. The effluent outlet may be arranged on a downstream side of the head unit.

[034] In embodiments, the effluent flow conduit may be substantially non-linear.

[035] In embodiments, the head plate may have a substantially planar portion which is configured to couple with a combustion chamber of an abatement apparatus. In embodiments, the or each inject flow conduit may be substantially internally routed within the substantially planar portion of the head plate.

[036] In embodiments, an inject flow may have a generally lateral primary flow direction. In other words, an inject flow conduit may extend substantially perpendicularly to a major axis of the head unit. Therefore, an inject flow conveyed by the inject flow conduit may be substantially perpendicular to a major axis of the head unit. In embodiments, the or each inject flow conduit extends substantially laterally within the head plate.

[037] In embodiments, the head plate may be substantially monolithic. Therefore, where the head plate defines one or more effluent flow conduits and / or one or more inject flow conduits, fewer potential leak points are provided because there are fewer separable components of the head unit. As used herein, the term “monolithic” may be defined as the head plate being in the form of a single, unitary component. In other words, the monolithic head plate may be in the form of a single piece of material. The monolithic head plate may include components that are welded or otherwise permanently fixed to one another.

[038] In embodiments, the head unit may be substantially monolithic. For example, with the exception of one or more inlet nozzles, the head unit may be substantially monolithic. The head unit may include a channel for receiving an inlet nozzle. An inlet nozzle may be configured to at least partially direct fluid flow. In other embodiments, substantially the entire head unit may be substantially monolithic, including, for example, one or more inlet nozzles. In embodiments, the head unit may comprise one or more effluent flow conduits which extend substantially vertically from the planar portion and which may be substantially unitarily formed therewith.

[039] In embodiments, the monolithic head unit may not include components that are removably attached thereto. For example, components that are fastened, bolted, screwed, or otherwise connected via removable fixing(s) may not form part of the monolithic head unit. Furthermore, the monolithic head unit may not include components that are removably inserted within the monolithic head unit.

[040] In embodiments, the head unit may comprise a plurality of inject flow conduits associated with a said effluent flow conduit. For example, the head unit may comprise a plurality of effluent flow conduits each having a plurality of inject flow conduits associated therewith. In embodiments, a said inject flow contact surface of each inject flow conduit may be defined by the head plate. In embodiments, a said inject flow contact surface of each inject flow conduit may be substantially entirely defined by the head plate. [041 ] In embodiments, the or each inject flow conduit may include one or more bends. Bends in the conduits improves pre-mixing of the effluent and inject fluids prior to combustion. In embodiments, a said bend may be a substantially lateral bend.

[042] In embodiments, the or each inject flow conduit may have a bend radius which is at least 1: x, where x is the orifice diameter of the same inject flow conduit. In other words, an inject flow conduit is substantially devoid of any bends which are too sharp, i.e. which would lead to a build up of contaminants or create pressure drops within the inject flow conduit during otherwise normal use conditions. In embodiments, the or each inject flow conduit may have a bend radius which is greater than 1: x. For example, the or each inject flow conduit may have a bend radius which is at least 1.5 times greater, for example 1.5 times greater, than the orifice diameter of the same inject flow conduit. Potential pressure drops within an inject flow conduit are therefore eliminated or at least significantly reduced.

[043] In embodiments, at least two of the plurality of inject flow conduits may be arranged substantially concentrically within the head plate.

[044] In embodiments, at least one inject flow conduit associated with a said effluent flow conduit may be routed substantially closer to the perimeter of the head unit than the centre of the head unit. In embodiments, each inject flow conduit may be routed substantially closer to the perimeter of the head unit than the centre of the head unit.

[045] In embodiments, the head plate may define a plurality of inject flow conduits. In embodiments, the head plate may define a combination of substantially concentrically arranged inject flow conduits and substantially non-concentrically arranged inject flow conduits.

[046] In embodiments, the head unit may comprise a plurality of effluent flow conduits. In embodiments, the head unit may comprise 4 to 8 effluent flow conduits. For example, the head unit may comprise 6 effluent flow conduits. Preferably, each effluent flow conduit may be as defined hereinbefore.

[047] Each effluent flow conduit may be configured to be coupled to a process tool during operation. In some embodiments, each effluent flow conduit may be configured to be coupled to a separate process tool during operation. Typically, the effluent flow conduits may be arranged about a central axis of the head unit. The effluent flow conduits may be arranged in a generally circular array when viewed along a central axis of the head unit. The effluent flow conduits may be substantially uniformly separated about the circumference of the head unit. When in use, the central axis of the head unit may be substantially coaxial with a central axis of the combustion chamber.

[048] In embodiments, the head plate may comprise one or more channels configured to receive an inlet nozzle, or “plug”, associated with an effluent flow conduit.

[049] In embodiments, a said effluent flow contact surface of each effluent flow conduit may be defined by the head plate. In embodiments, a said effluent flow contact surface of each effluent flow conduit may be substantially entirely defined by the head plate.

[050] In embodiments, the or each inject flow conduit may extend from an inject flow port. The head unit may comprise a bank including the inject flow ports associated with more than one effluent flow conduit. The bank may include the inject flow ports associated with all of the effluent flow conduits of the head unit.

[051] In embodiments, an inject flow port may be defined by the head plate. In other words, a said inlet flow port may be substantially unitarily formed with the head plate.

[052] In embodiments, the head unit may be substantially symmetrically formed about a radial cross section which passes substantially through the centre of the bank of inject flow ports. This configuration provides an engineer with a more intuitive layout for servicing the head unit.

[053] In embodiments, the head unit may comprise a coolant flow conduit having a coolant flow contact surface for conveying a coolant flow. In embodiments, the coolant flow contact surface may be defined by the head plate.

[054] In embodiments, the coolant conduit may be routed such that, in use, the temperature of the head unit is controllable via a coolant flow rate through the coolant conduit.

[055] In embodiments, an outwardly facing surface of the head unit may define one or more hollows. As used herein, the term “hollow” may refer to a cut-out, depression or similar defined by the head unit. The one or more hollows not only reduce the material required to form the head unit and thus its weight, but they may also function as a heat sink so that heat from the abatement apparatus can be dissipated. In embodiments, one or more said hollows are arranged on an outwardly facing surface the head plate.

[056] In embodiments, a plurality of said hollows may be provided. In embodiments, the plurality of said hollows may be of a substantially similar depth. In embodiments, at least two of the plurality of said hollows may have substantially dissimilar depths. The depth of each hollow may be at least partially dependent on the region of the head unit on which they are located. For example, a hollow at a region which, in use, gets relatively hotter compared to other regions may have a greater depth than a hollow at a relatively cooler region.

[057] In embodiments, the head unit may define a region including a repeated pattern of hollows.

[058] In embodiments, a said hollow may have a substantially hexagonal transverse cross section.

[059] In embodiments, the head unit may comprise one or more relief cut outs. For example, a downstream side of the head unit may comprise one or more relief cut outs. The risk of deforming (e.g. warping) of the head unit is thereby reduced during manufacture and the weight of the head unit is further reduced.

[060] In embodiments, the head unit may be comprised of a metallic material. In embodiments, the head unit may be comprised of an aluminium alloy or a stainless steel alloy. In embodiments, the head unit may be comprise of a material which is additively manufactured, e.g. printed. [061 ] In embodiments, the effluent flow contact surface and / or the inject flow contact surface and / or the coolant flow contact surface may include a corrosion-resistant surface layer. In embodiments, each effluent flow contact surface, inject flow contact surface, and coolant flow contact surface may include a corrosion-resistant surface layer. In embodiments, the corrosion-resistant surface layer may be a nickel-based surface layer.

[062] In a further aspect, the present invention provides a method of manufacturing an head unit according to any preceding aspect by additive manufacture. In embodiments, the method may include a powder bed fusion technique, for example direct metal laser sintering. In embodiments, the head unit may be substantially entirely produced via an additive manufacturing technique. Alternatively, a portion of the head unit may be produced via an additive manufacturing technique.

[063] Advantageously, the method beneficially enables highly reproducible manufacturing of components with complex geometries from a variety of materials, using minimal raw materials, and without requiring expensive tooling specific to each component produced.

[064] Typically, the method may further comprise the step of adding a surface layer to the surface defining the effluent flow conduit. Preferably, the step may comprise adding a nickel surface layer.

[065] In a further aspect, the present invention provides an abatement apparatus comprising an head unit according to any preceding aspect, or as manufactured in accordance with the immediately preceding aspect.

[066] The abatement apparatus may comprise a main body defining a combustion chamber having an inlet and an outlet. The head unit may be arranged at or towards the inlet of the combustion chamber and be configured to direct an effluent fluid flow not the combustion chamber.

[067] In a further aspect, the present invention provides a method of conveying an effluent gas flow into an abatement apparatus. The method comprises the steps of: a) providing an abatement apparatus as defined in an aspect set out above; b) conveying an effluent gas flow through the effluent flow conduit of the head unit; c) conveying the effluent gas flow into the combustion chamber of the abatement apparatus.

[068] It will be appreciated that the abatement apparatus may include further features that will be known to the skilled person.

[069] For the avoidance of doubt, features of aspects and embodiments described herein may be combined, and still fall within the scope of the present invention. Brief Description of Figures

[070] Preferred features of the present invention will now be described, by way of example, with reference to the accompanying drawings, in which:

[071] Figure 1 shows a perspective view of a head unit according to the present invention.

[072] Figure 2 shows a skeletonised perspective view of the head unit of Figure 1.

[073] Figure 3 shows a skeletonised plan view of a head unit according to the present invention. Detailed Description

[074] Figure 1 illustrates a generally cylindrical head unit referenced generally as 10. The head unit is for arrangement at an inlet of a combustion chamber of an abatement apparatus (not shown). When arranged at an inlet of a combustion chamber of an abatement apparatus, the head unit 10 defines a portion of the combustion chamber.

[075] The head unit 10 comprises a head plate 12 configured to cap a combustion chamber (not shown).

[076] The head unit 10 further comprises six effluent flow conduits 14a-14f for receiving incoming effluent flows from several sources, e.g. process tools. The effluent flows are received via an effluent inlet, such as 26, of each effluent conduit and exit via an effluent outlet, such as 34.

[077] Each effluent flow conduit 14 has an effluent flow contact surface, such as 16, which is configured to convey an effluent flow (from an upstream process tool) towards the combustion chamber of the abatement apparatus. Each effluent flow contact surface is defined by the head plate 12. In other words, the each effluent flow conduit 14 is an integral part of the head plate 12.

[078] The head unit 10 of Figure 1 is substantially monolithic. In the head unit 10 of Figure 1, the head unit 10 is monolithic with the exception of distinct nozzles (not shown) which, in use, are inserted in channels 36.

[079] As shown in Figures 2 and 3, the head unit 10 also comprises a plurality of inject flow conduits 18, 20, 22 associated with each effluent flow conduit 14. Each inject flow conduit terminates at an inject flow port, such as 24a-24c. In the embodiment of Figure 1, the inject conduits terminating an inject flow ports 24a-24c are associated with effluent flow conduit 14c.

[080] Each effluent flow conduit in Figure 1 has a fuel inject 18, an oxygen-based inject 20, and a nitrogen-based inject 22. Typically, the nitrogen-based inject 22 is configured, in use, to maintain a forward flow of the effluent gas flow.

[081] Each of the inject flow conduits has an inject flow contact surface which is defined by the head plate 12. In other words, each of the inject flow conduits 18, 20, 22 is an integral part of the head plate 12. The inject flow conduits are therefore substantially internally routed within the head plate 12.

[082] As shown in Figure 2, an inject flow port associated with an effluent flow conduit may be located in a different sector of the head unit 10 to the corresponding effluent flow conduit when the head unit is viewed from above. For example, effluent flow conduit 14c is located in a different minor sector of the head unit 10 to inject flow ports 24a-c.

[083] As shown in Figure 1, by each of the inject flow conduits being defined by the head plate 12, more space is provided at an upstream side of the head unit compared to known head units.

[084] More specifically, the head plate 12 has a substantially planar portion 28. The planar portion 28 of the head plate 12 is typically configured to couple to a combustion chamber. Each inject flow conduit 18, 20, 22 is substantially internally routed within the planar portion 28 of the head plate 12.

[085] Referring to Figure 2, it can be seen that each inject flow conduit 18, 20, 22 has a generally lateral primary flow direction. In other words, in use, an inject gas enters a said inject flow conduit via a corresponding inject flow port and the inject gas is conveyed substantially laterally within the head plate 12 towards a corresponding effluent flow.

[086] Each of the inject flow conduits 18, 20, 22 also includes one or more bends or laterally curved portions. An inject flow conduit 18, 20, 22 may also include one or more axial bends. More specifically, each inject flow conduit 18, 20 22, has a bend radius which is at least equivalent to or greater than, e.g. 1.5 times greater than, the orifice diameter of the same inject flow conduit.

[087] Referring still to Figure 2, several of the inject flow conduits 18, 20, 22, are arranged substantially concentrically within the head plate 12.

[088] In the head unit 10 of Figure 1, each of the inject flow ports 24 is arranged at a bank 32 of inject flow ports. The bank 32 of inject flow ports is typically arranged such that each of the inject flow ports is presented to an engineer upon opening a cabinet in which the abatement apparatus is situated. The internal routing of the inject flow conduits enables the positioning of each inject flow port at the bank 32 thereof.

[089] Figure 3 shows another head unit 10 in which inject flow ports are paired and located within a minor segment or sector of the head unit 10, when the head unit 10 is viewed from above. There are three pairs of inject flow ports which together form a bank of inject flow ports. The head unit 10 includes a combination of concentrically arranged inject flow conduits and non-concentrically arranged, e.g. point-to-point, inject flow conduits.

[090] In the head units 10 of both Figures 1 and 2, and of Figure 3, one or more of the inject flow conduits are typically arranged closer to the perimeter of the head unit 10 than the centre thereof. More space is therefore provided towards the centre of the head unit for other components, and / or for improved engineer access.

[091] The head units 10 of Figures 1 and 2, and of Figure 3 are substantially symmetrically formed about a radial cross section which passes through the centre of the bank of inject flow ports, as illustrated by dashed line ‘A’ in Figure 3.

[092] Referring back to Figure 1, an outwardly facing surface of the head plate 12 defines a pattern of hollows or depressions, such as 30, which each have a substantially hexagonal transverse cross section. The plurality of hollows have a substantially similar depth in Figure 1, although their depth may vary dependent on the corresponding arrangement of inject flow conduits within the head plate 12.

[093] It will be appreciated that various modifications may be made to the embodiments shown without departing from the spirit and scope of the invention as defined by the accompanying claims as interpreted under patent law. Head unit Head plate Effluent flow conduit Effluent flow contact surface Inject flow conduit Inject flow conduit Inject flow conduit Inject flow port Effluent inlet Planar portion Hollow Inject flow port bank Effluent outlet Channel

Claims

1. An head unit for arrangement at an inlet of a combustion chamber of an abatement apparatus, the head unit comprising:a head plate configured to cap a combustion chamber;an effluent flow conduit having an effluent flow contact surface for conveying an effluent flow towards a combustion chamber of an abatement apparatus; andan inject flow conduit having an inject flow contact surface for conveying an inject fluid towards the effluent flow;wherein the effluent flow contact surface and / or the inject flow contact surface is defined, preferably substantially entirely defined, by the head plate.

2. The head unit according to claim 1, wherein the head plate is substantially monolithic; optionally, wherein the head unit is substantially monolithic.

3. The head unit according to claim 1 or claim 2, comprising a plurality of inject flow conduits associated with the effluent flow conduit; wherein a said inject flow contact surface of each inject flow conduit is defined, preferably substantially entirely defined, by the head plate.

4. The head unit according to claim 3, wherein at least two of the plurality of inject flow conduits are arranged substantially concentrically within the head plate.

5. The head unit according to any preceding claim, wherein at least one, preferably each, inject flow conduit associated with a said effluent flow conduit is routed substantially closer to the perimeter of the head unit than the centre of the head unit.

6. The head unit according to any preceding claim, comprising a plurality of effluent flow conduits, preferably 4 to 8 effluent flow conduits; optionally, wherein a said effluent flow contact surface of each effluent flow conduit is defined by the head plate.

7. The head unit according to any preceding claim, the or each inject flow conduit may have a bend radius which is greater than 1: x, where x is the orifice diameter of the same inject flow conduit.

8. The head unit according to any preceding claim, wherein the or each inject flow conduit extends from a inject flow inlet; and wherein each inject flow inlet is arranged at a inject flow port bank; optionally, wherein the inject flow port bank is defined by the head plate.

9. The head unit according to claim 8, wherein the head unit is substantially symmetrically formed about a radial cross section which passes substantially through the centre of the inject flow port bank.

10. The head unit according to any preceding claim, wherein an outwardly facing surface of the head unit defines one or more hollows; optionally, wherein the head unit defines a region including a repeated pattern of hollows; further optionally, wherein a said hollow has a substantially hexagonal transverse cross section.

11. The head unit according to any preceding claim, wherein the head unit is comprised of a metallic material, preferably wherein the head unit is comprised of an aluminium alloy or a stainless steel alloy.12.The head unit according to any preceding claim, further comprising a coolant flow conduit having a coolant flow contact surface; wherein the coolant flow contact surface is defined by the head plate; preferably, wherein the coolant conduit is routed such that, in use, the temperature of the head unit is controllable via a coolant flow rate through the coolant conduit.

13. The head unit according to any preceding claim, wherein the effluent flow contact surface and / or the inject flow contact surface and / or the coolant flow contact surface includes a corrosion-resistant surface layer; preferably, a nickel-based surface layer.

14. A method of manufacturing an head unit according to any of claims 1 to 13 by additive manufacture, preferably by direct metal laser sintering.

15. An abatement apparatus comprising an head unit according to any of claims 1 to 13 or as manufactured in accordance with claim 14.Application No: GB2316151.6Examiner: Dr Rhys WilliamsClaims searched: 1-15Date of search: 20 March 2024Patents Act 1977: Search Report under Section 17Documents considered to be relevant:Category Relevant to claims Identity of document and passage or figure of particular relevance X 1-6, 9 &11-15 US 2001 / 0055555 Al (HERMAN et al.) See Fig.

1. X 1-6, 9 &11-15 GB 2595748 A (CSK INC) Note head 141 in Fig.

1. X 1-6, 9 &11-15 US 2009 / 0214991 Al (CLARK et al.) See Figs 1, IB, IC, paragraphs [0024] &[0039], v A 1-6, 9 &11-15 KR 100711941 Bl (GLOBAL STANDARD TECHNOLOGY) See in particular Fig. 4a. A - US 2015 / 0184850 Al (EDWARDS LTD) Noting nozzles 12 located in bores 16. A - GB 2608821 A (EDWARDS LTD) Noting effluent stream inlet 60 and nozzle 830 inserted into apertures in head plate 50.Categories:X Document indicating lack of novelty or inventive step A Document indicating technological background and / or state of the art. Y Document indicating lack of inventive step if P Document published on or after the declared priority date but combined with one or more other documents of same category. before the filing date of this invention. & Member of the same patent family E Patent document published on or after, but with priority date earlier than, the filing date of this application.Field of Search:International Classification:Subclass Subgroup Valid From None

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