Reaction tube

JP1713188SActive Publication Date: 2025-04-28KOKUSAI DENKI KK
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Patent Information

Application Number
JP2021019930D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2021-09-15
Publication Date
2025-04-28
Estimated Expiration
2046-09-15

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Patent Text Reader

Abstract

The article of the present application is a reaction tube in a substrate processing apparatus that accommodates a plurality of substrates arranged in multiple stages and processes the substrates in a predetermined gas atmosphere.
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