Substrate holder for substrate processing apparatus

JP1731670SActive Publication Date: 2025-12-15KOKUSAI DENKI KK
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Patent Information

Application Number
JP2022004465D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2022-03-04
Publication Date
2025-12-15
Estimated Expiration
2047-03-04

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Abstract

The present article is a substrate holder for horizontally holding a plurality of substrates in a vertical reaction chamber of a substrate processing apparatus.
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