Inner tubes for reaction tubes in semiconductor manufacturing equipment

JP1731673SActive Publication Date: 2025-12-15KOKUSAI DENKI KK
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Patent Information

Application Number
JP2022011409D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2022-05-30
Publication Date
2025-12-15
Estimated Expiration
2047-05-30

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Abstract

The article of the present invention is an inner tube that is attached to the inside of a reaction tube used in semiconductor manufacturing equipment.
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