Covering

Abstract

This item is a cover ring that is placed on the outer ring in semiconductor manufacturing equipment. When this type of item is in use, a gap is created between the item and the outer ring. Unintended objects can use this gap as a path to get into the susceptor. As shown in the "enlarged AA cross-sectional view," this item has projections and recesses along its outer edge. This creates a complex path, as shown by the arrow in the "reference cross-sectional view showing the state of use," making it difficult for unintended objects to get into the susceptor.

Images