Gas Diffuser

JP1791519SActive Publication Date: 2025-02-19CHUNG KING ENTERPRISE CO LTD
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Patent Information

Application Number
JP2024019506D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-08-23
Filing Date
2024-09-24
Publication Date
2025-02-19
Estimated Expiration
2049-09-24

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Abstract

The article of the design of this application, the "gas diffuser," is a hollow tube having a porous diffusing surface that is installed within a wafer carrier and allows gas to flow from the inside of the article to the outside, thereby filling the wafer carrier with gas.
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