Semiconductor substrate holder

JP1818031SActive Publication Date: 2026-01-28TOKYO ELECTRON LTD
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Patent Information

Application Number
JP2025015334D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-08-01
Publication Date
2026-01-28
Estimated Expiration
2050-08-01

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Abstract

This product is a semiconductor substrate holder used to hold substrates such as semiconductor wafers. As shown in the reference diagram showing the state of use, this product is attached to the processing chamber of a substrate processing apparatus, and holds the substrate with its protrusions.
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