Substrate holding stage

JP1829776SActive Publication Date: 2026-06-22SCREEN HOLDINGS CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
SCREEN HOLDINGS CO LTD
Filing Date
2025-12-22
Publication Date
2026-06-22

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Abstract

This product is a substrate holding stage for holding substrates such as flat panel display substrates, panel-level package substrates, and semiconductor wafers by vacuum suction, and has suction grooves formed on its holding surface.
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