Valve

Abstract

To provide a valve that can guide charged particles or a charged particle beam through passage openings of flanges with as little disturbance as possible.SOLUTION: A valve comprises a valve housing (2), valve openings (3), a closing mechanism (5), a valve drive (6), and two flanges (9, 10) having passage openings (11). The flanges (9, 10) can be moved towards and away from one another by the valve drive (6), are force-coupled to the closing mechanism with respect to movements of the closing mechanism along first movement directions (7), and, in the maximally released position of the closing mechanism, are pressed against wall regions (4) of the valve housing, and thus the passage openings (11) of the flanges connect the valve openings together. The two flanges (9, 10) each include a sequence of fingers and recesses arranged therebetween, the fingers surround the passage openings, and the fingers of the one flange (9) engage the respective recesses of the other flange (10).SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a valve, in particular a vacuum valve, comprising a valve housing and valve openings in mutually opposing wall regions of the valve housing, a closing mechanism and at least one valve actuator, wherein the closing mechanism closes at least one of the valve openings in a closed position, is lifted from and positioned between both valve openings in an intermediate position, and fully opens the valve openings in a maximum open position, wherein the closing mechanism is reciprocable by the at least one valve actuator in first directions of movement opposite to each other between the maximum open position and the intermediate position, and between the intermediate position and the closed position. The valve is reciprocally movable in a second direction of movement opposite to each other, wherein the valve additionally has two flanges arranged opposite each other, each flange having a through opening, wherein the flanges are movable toward and away from each other by at least one valve drive and are force-coupled and interlockingly connected to the closing mechanism with respect to movement of the closing mechanism along the first direction of movement, wherein the flanges are pressed against mutually opposing wall regions of the valve housing in the maximum release position of the closing mechanism, whereby the through openings in the flanges communicate the valve openings with each other.

[0002] Valves of this type are used in practice, for example, in particle accelerators, where, in the maximum open position of the closing mechanism, charged particles, in particular charged particle beams, can be guided through the valve opening and the through-opening in the flange. It is important here that the valve of the present invention deflects the charged particles or charged particle beams as little as possible. Valves of this type are known from well-known prior art, in which an elastic tension plate is arranged between the flanges and elastically deforms when the flanges move toward and away from each other. The tension plate's opening cross section changes in the direction of extension of the through-opening, which can lead to undesired deflection of the charged particles guided through the through-opening in the flange.

[0003] The object of the invention is to improve a valve of the type mentioned at the beginning in such a way that the charged particle or the charged particle beam can be guided through the through-opening in the flange with as little disturbance as possible.

[0004] For this purpose, the invention proposes a valve as claimed in claim 1.

[0005] Therefore, according to the present invention, it is envisaged that the two flanges each have a series of fingers and a recess arranged between two adjacent fingers, wherein the fingers of each flange surround the through opening of each flange and the fingers of one flange each engage in the recess of the other flange.

[0006] The configuration of the two flanges according to the invention, each with a finger and a recess arranged between them, allows the opening cross section of the flange's through-hole to be kept constant or essentially the same everywhere. Surprisingly, this has been shown to very effectively prevent undesired deflection of charged particles or charged particle beams as they pass through the through-hole and the valve opening. Preferably, in this context, it is assumed that the opening cross section of the flange's through-hole is the same everywhere, at least in the region of the fingers. This is also preferably true when the flanges are pressed against opposing wall regions of the valve housing in the maximum open position of the closing mechanism.

[0007] The through openings of the two flanges are preferably arranged flush with one another at all points on the flanges, and the valve openings in the opposing wall regions of the valve housing are also preferably arranged flush with one another.

[0008] The valve actuator according to the invention may have only one valve actuator that moves the closing mechanism and the flange in a first, opposite direction of movement, but also moves the closing mechanism in a second, opposite direction of movement and also moves the flange toward and away from each other during this movement. However, the valve according to the invention may alternatively be configured with two or more valve actuators, for example, a first valve actuator for moving the closing mechanism and the flange in a first, opposite direction of movement and at least one further valve actuator for moving the closing mechanism in a second, opposite direction of movement and / or moving the flange toward and away from each other. Various means exist in the prior art for designing such valve actuators, which can be used in a correspondingly adapted form for the valve according to the invention.

[0009] The mutually facing wall areas of the valve housing in which the valve openings are present may preferably be embodied as valve seats, each surrounding one of the valve openings, in a manner known per se.

[0010] The second direction of movement, preferably in which the flanges can be moved toward and away from each other, is also preferably oriented at an angle, preferably perpendicular to the first directions of movement which are opposite to each other.

[0011] It can also be said that the through-openings in the flanges put the valve openings in fluid communication with one another when the flanges are pressed against mutually opposing wall areas of the valve housing in the maximum open position of the closure mechanism, whereby fluid communication is understood to mean that at least charged particles and / or charged particle beams can be guided through the through-openings and the valve openings.

[0012] The closure mechanism can be a valve plate, but also other molded closure mechanisms. Basically, various embodiments according to the prior art can be used here. The fingers of the flange can be pin-shaped, but also plate-shaped. They are ultimately longitudinally extending elements with protruding free ends and corresponding recesses between them. Instead of calling them fingers, they could also be called comb elements or forks.

[0013] Preferably, in any case, it is assumed that the fingers of one flange engage with the recesses of the other flange, respectively, relative to one another at all positions of the flanges. Even more preferably, it is assumed that the fingers of one flange do not contact the fingers of the other flange. This is preferably true relative to one another at all positions of the flanges. Alternatively, it can be said that the fingers of one flange are arranged in the recesses between the fingers of the other flange, without contacting one another, preferably relative to one another, at all positions of the flanges. Preferably, in any case, the fingers of each flange annularly surround the through opening of the respective flange. The fingers of each flange are preferably formed to extend linearly and / or longitudinally in a direction toward the other flange.

[0014] A preferred variant of the invention provides for the flanges to be arranged in the region of the fingers in the bushes connecting the flanges to one another, which has also proven to be suitable for even better preventing undesired deflection of the charged particles or charged particle beams guided through the valve opening and the through openings in the flanges. The bush is preferably slidably supported on at least one of the flanges.

[0015] The flanges are preferably electrically conductively connected to one another. This applies particularly preferably to all positions of the flanges relative to one another, but especially when the flanges are pressed against opposing wall regions of the valve housing in the maximum open position of the closing mechanism, where the through-openings of the flanges connect the valve openings to one another. In particular, preferred embodiments of the invention are those in which the flanges are electrically conductively connected to one another using contact plates, with the flange fingers arranged in the interior space enclosed by the contact plates. The contact plates are preferably circumferentially closed and / or tubular. To ensure particularly good electrically conductive contact between the two flanges and the contact plates, a preferred variant provides for each flange to have a bead protruding outward in the circumferential direction on its outer surface facing the through-openings. The contact plates are then preferably placed on the bead of each flange, respectively. This ensures a permanent and reliable electrical contact between the beads via the contact plates.

[0016] In a preferred embodiment of the present invention, a removal socket is arranged on one outer surface of each flange or on the outer surface facing the through-opening, and a contact plate is guided between each removal socket and each flange. The removal socket is preferably configured as a tube socket, at least in a certain region. Preferably, each removal socket has a bead protruding inward in the circumferential direction, and together with the bead, the removal socket is pressed against the contact plate. That is, the contact plate is preferably clamped between the flange beads on the one hand and the removal socket beads on the other hand. From the viewpoint of a reliable electrical contact connection, an elastically deformable or resilient contact plate is preferred. Here, the removal socket bead is preferably pressed against the contact plate in the region between the flange beads.

[0017] Further features and details of preferred embodiments of the present invention are explained, by way of example, in the following description of the drawings. [Brief explanation of the drawings]

[0018] [Figure 1] 1 is a perspective view of the outside of a valve according to the present invention; FIG. [Figure 2] FIG. 2 is a view of the valve of FIG. 1 with the valve housing removed. [Figure 3] 2 is a longitudinal section through the valve of FIG. 1 with the closure mechanism in a closed position. [Figure 4] 2 is a longitudinal section through the valve according to the invention of FIG. 1 when the closure mechanism is in the maximum open position. [Figure 5] 5 is an exploded view of the flange, contact plate, and removal socket of the present example according to FIGS. 1 and 4. FIG. [Figure 6] FIG. 5 is an enlarged view of area A in FIG.

[0019] The valve 1 according to the invention, as in the embodiment shown here, is preferably a so-called vacuum valve. Vacuum valves are usually used when working in special atmospheres or at special pressure levels. They are particularly called valves when they work at pressure differences of less than 0.001 mbar (millibar) or 0.1 Pascal. However, they can also be called vacuum valves when they are designed for pressure differences below atmospheric pressure, i.e., less than 1 bar.

[0020] 1 shows a variant embodiment of a valve 1 according to the invention implemented as a vacuum valve, which comprises a valve housing 2 and a valve opening 3 arranged in opposing wall regions 4 of the valve housing 2. In the illustrated embodiment as well as in other embodiments, the wall region 4 surrounding the valve opening 3 can be configured as a housing flange 23, by means of which the valve 1 can be fixed to a corresponding pipeline and / or to the outer chamber wall of a process chamber. This is known per se and does not require further explanation. A closing mechanism 5 of the valve 1 according to the invention closes at least one of the valve openings 3 in the closed position, as can also be seen in FIG. 1.

[0021] In FIG. 2, the valve housing 2 is not shown. This allows, among other things, the valve rod 24, which is driven by the valve driver 6 in the first, opposing direction of movement 7, to be seen. In the illustrated embodiment, the valve driver 6 is a purely linear drive, which may be configured in a manner known per se, for example as a hydraulically or pneumatically driven piston-cylinder assembly, but also as an electric linear drive, as shown in the cross-sectional views of FIGS. 3 and 4. It is also clear in FIG. 2 how the valve rod 24 connects the closing mechanism 5 to the valve driver 6. Below the closing mechanism 5, one of the two flanges 9 can be seen with its through-opening 11. In contrast, the second flange 10 is located on the rear side, not visible in FIG. 2. These flanges 9 and 10 can be moved toward and away from each other by at least one valve driver 6 and are force-coupled to the closing mechanism 5 with respect to the movement of the closing mechanism along the first, opposing direction of movement 7. This means that whenever the closing mechanism 5 is moved by the valve driver 6 in the first direction of movement 7 opposite to one another, the flanges 9, 10 are coupled to the first direction of movement 7.

[0022] Both the flanges 9 and 10 and the closing mechanism 5 are guided on a guide rod 26 via a spring element 25. There is also a stop 28 on the guide rod 26, the function of which will be explained in more detail subsequently below.

[0023] FIG. 3 shows a longitudinal section through the valve 1, in which the closing mechanism 5 is in the closed position, thereby closing one of the valve openings 3. Comparing FIGS. 3 and 4, it can be seen that the closing mechanism 5 is moved back and forth in opposing first directions of movement 7 between the maximum open position according to FIG. 4 and an intermediate position by the valve drive 6, which is implemented as a linear drive, as is known per se. In the intermediate position, the closing mechanism 5 is lifted from both valve openings 3 but is located between them. From this intermediate position, the closing mechanism 5 moves in one of the second directions of movement 8 toward the wall region 4 surrounding the corresponding valve opening 3, or in other words, toward the valve seat. The valve drive 6 then travels up to a stop 28, causing the inclined plate 27 to expand accordingly, thereby ensuring that the closing mechanism 5 is pressed against the valve seat or the wall region 4 of the valve housing 2 surrounding the valve opening 3. This brings the closure mechanism 5 into a closed position, closing one of the valve openings 3, as shown in FIG.

[0024] To return the closing mechanism 5 to the intermediate position from this closed position, the valve drive 6 pulls the valve rod 24 upward by one block in one of the first directions of movement 7, thereby tilting the tilting plate 27 back to the position shown in FIG. 4 . A further upward pull of the valve rod 24 in one of the first directions of movement 7 then pulls the closing mechanism 5 together with the flanges 9, 10 into the maximum open position according to FIG. 4 . The flanges 9, 10 are then coupled to the closing mechanism 5 by their forced connection in the first direction of movement 7. By correspondingly abutting on the stops 28, the flanges 9, 10 are spread apart in one of the spreading directions 29 by means of the tilting plate 27 arranged thereon, so that in the maximum open position of the closing mechanism 5, the flanges 9, 10 are pressed against the opposing wall regions 4 of the valve housing 2, with the through-openings 11 of the flanges 9, 10 communicating with each other the valve openings 3, as shown in FIG. 4 . All of this is achieved by a single valve drive 6, which in this embodiment is configured as a linear drive. The expansion using the stop 28 and the inclined plate 27, and the resetting using the spring element 25 as well as the closing mechanism 5 in the second, opposing direction of movement 8 and the flanges 9, 10 in the opposing expansion direction 29 are per se known prior art and therefore do not require further explanation. Deviating from the illustrative embodiment shown here, it is merely noted that the valve 1 according to the present invention can, of course, also have two closing mechanisms, each closing one of the valve openings 3 on opposite sides in the closed position. This can be achieved in a simple manner by replacing the support plate 30 realized here with a second closing mechanism 5. In any case, this or these closing mechanisms 5 are embodied as a valve plate in a preferred embodiment.

[0025] In the exploded view according to Fig. 5, it can be clearly seen that in this embodiment, too, according to the invention, both flanges 9 and 10 each have a series of fingers 12 and a recess 13 arranged between two adjacent fingers 12. Then, in Fig. 6, but also in Figs. 3 and 4, it can again be seen that the fingers 12 of each flange 9 or 10 surround the through-opening 11 of the respective flange 9 or 10, and that the fingers 12 of one flange 9 respectively engage in one of the recesses 13 of the other flange 10. This preferably applies, as realized here, in all positions of the flanges 9 and 10 relative to one another. Furthermore, it is also preferred here that the fingers 12 of one flange 9 do not come into contact with the fingers 12 of the other flange 10. In Fig. 5, it can be clearly seen that the fingers 12 of the two flanges 9 and 10 realized here are formed in the form of plates, more precisely wedge-shaped plates. They are preferably formed so as to extend linearly in the longitudinal direction, with their protruding free ends oriented towards the respective other flange 9 or 10. Furthermore, it can be clearly seen in Figure 5 that the fingers 12 of each flange 9 and 10 now annularly surround the through opening 11 of each flange 9 and 10.

[0026] However, as already explained at the beginning, embodiments according to the invention can also be provided with fingers 12 that are more or less configured as pins rather than as plates. As can be seen in Figures 3 and 4, it is preferably assumed that the opening cross sections 14 of the through openings 11 in the flanges 9 and 10, respectively, are everywhere the same, at least in the region of the fingers 12.

[0027] Also visible in Figure 5 are bushing 15 and the circumferentially outwardly projecting beads 17 formed on flanges 9 and 10, respectively. Also shown in Figure 5 are withdrawal sockets 20 and 21, each having an inwardly oriented circumferential bead 22.

[0028] The assembled operating state will now be described with reference to FIG. 6, which shows an enlarged view of section A of FIG. 4. A joint examination of FIGS. 5 and 6 clearly shows that the flanges 9 and 10 are arranged in the region of the fingers 12 within the bushing 15 that connects the flanges 9 and 10 to one another. The bushing 15 is slidably supported in at least one of the flanges 9 or 10 so as not to impede the relative movement of the flanges 9 and 10 toward and away from one another. However, the flanges 9 and 10 are electrically conductively connected to one another using a contact plate 18, which in this embodiment is embodied as a circumferentially closed tube. The fingers 12 of the flanges 9 and 10 are arranged in an interior space 19 surrounded by the contact plate 18. It can also be clearly seen in FIG. 6 that the contact plate 18 rests on the beads 17 of the flanges 9 and 10, respectively, for optimal electrical contact between the flanges 9 and 10. This is preferably true in all positions of the flanges 9 and 10 relative to one another. 6 also shows how the removal sockets 20, 21 are arranged on the outer faces of the flanges 9 and 10, respectively, facing the through opening 11. In this embodiment, the contact plate 18 is also guided between each removal socket 20 and 21 and each flange 9 and 10, respectively, as shown in FIG.

[0029] The inwardly projecting beads 22 of the removal sockets 20 and 21 press against the contact plate 18 from the outside, respectively. As a result, the two flanges 9 and 10 are permanently and electrically conductively connected via the contact plate 18. Due to the certain elasticity of the contact plate 18 and the arrangement between the beads 17 of the flanges 9 and 10 and the beads 22 of the removal sockets 20 and 21, a particularly reliable contact connection is ensured in all positions of the flanges 9 and 10 relative to one another. Preferably, the beads 22 of the removal sockets 20 and 21 are arranged in the region between the beads 17 of the flanges 9 and 10, as also shown in FIG. 6 . Overall, in this embodiment of the invention, too, a valve 1 is created in which the deflection or obstruction of charged particles or beams guided through the valve opening 3 and the through-opening 11 is minimized. [Explanation of symbols]

[0030] 1 valve 2 Valve housing 3 Valve opening 4 Wall area 5 Closing mechanism 6 Valve drive unit 7 First movement direction 8 Second movement direction 9 flange 10 flange 11 Through opening 12 Fingers 13 Recess 14 Opening cross section 15 Bush 16 Exterior 17 Bead 18 Contact plate 19 Interior Space 20 Removal socket 21 Removable socket 22 Bead 23 Housing flange 24 Valve rod 25 Spring elements 26 Guide rod 27 Inclined plate 28 Stopper 29 Spreading direction 30 Support plate

Claims

1. A valve (1), in particular a vacuum valve, comprising: a valve housing (2) and a valve opening (3) in opposing wall regions (4) of the valve housing (2); a closing mechanism (5) and at least one valve driver (6); The closing mechanism (5) closes at least one of the valve openings (3) in a closed position, is lifted from both valve openings (3) and positioned between the valve openings (3) in an intermediate position, and completely opens the valve openings (3) in a maximum release position. the closing mechanism (5) is reciprocable by at least one valve driver (6) in first directions of movement (7) opposite to each other between the maximum open position and the intermediate position, and in second directions of movement (8) opposite to each other between the intermediate position and the closed position; The valve (1) additionally has two flanges (9, 10) arranged opposite each other, each having a through opening (11), the flanges (9, 10) are movable toward and away from each other by at least one of the valve actuators (6) and are force-coupled and operatively connected to the closure mechanism (5) with respect to movement of the closure mechanism (5) along the first movement direction (7); a valve (1) in which, in the maximum open position of the closing mechanism (5), the flanges (9, 10) are pressed against the mutually opposing wall areas (4) of the valve housing (2), and the through openings (11) of the flanges (9, 10) thereby interconnect the valve openings (3), The two flanges (9, 10) each have a series of fingers (12) and a recess (13) located between each two adjacent fingers (12), The fingers (12) of each of the flanges (9, 10) surround the through opening (11) of each of the flanges (9, 10), and the fingers (12) of one of the flanges (9) respectively engage with the recesses (13) of the other of the flanges (10).

2. 2. A valve (1) according to claim 1, wherein the fingers (12) of one of the flanges (9) respectively engage with the recesses (13) of the other of the flanges (10) relative to each other at all positions of the flanges (9, 10) and / or the fingers (12) of one of the flanges (9) preferably do not contact the fingers (12) of the other of the flanges (10) relative to each other at all positions of the flanges (9, 10).

3. 3. The valve (1) according to claim 1 or 2, wherein the fingers (12) of each flange (9, 10) are formed so as to annularly surround the through opening (11) of each flange (9, 10) and / or so as to extend linearly and / or longitudinally in a direction towards the other flange (9, 10).

4. 3. A valve (1) according to claim 1 or 2, wherein the opening cross section (14) of the through opening (11) in the flange (9, 10) is the same everywhere, at least in the region of the fingers (12).

5. 3. A valve (1) according to claim 1 or 2, wherein the flanges (9, 10) are arranged in the region of the fingers (12) in a bushing (15) which interconnects the flanges (9, 10).

6. 3. A valve (1) according to claim 1 or 2, wherein each of the flanges (9, 10) has a circumferentially outwardly projecting bead (17) on an outer surface (16) of each of the flanges (9, 10) facing the through opening (11).

7. 3. A valve (1) according to claim 1 or 2, wherein the flanges (9, 10) are electrically conductively connected to one another, preferably by means of circumferentially closed contact plates (18) and / or tubular contact plates (18), and the fingers (12) of the flanges (9, 10) are arranged in an internal space (19) surrounded by the contact plates (18).

8. 7. A valve (1) according to claim 6, wherein the contact plates (18) rest on the beads (17) of each of the flanges (9, 10), respectively.

9. 8. The valve (1) according to claim 7, wherein a removal socket (20, 21) is arranged on one outer surface (16) of each of the flanges (9, 10) or on the outer surface (16) facing the through opening (11), and the contact plate (18) is guided between each of the removal sockets (20, 21) and each of the flanges (9, 10).

10. 10. The valve (1) according to claim 9, wherein each of the removal sockets (20, 21) has a bead (22) projecting inwardly in the circumferential direction, with which each of the removal sockets (20, 21) is pressed against the contact plate (18).

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