X-ray inspection systems, X-ray imaging accessories, specimen supports, kits, and methods of using X-ray inspection systems

Abstract

The X-ray inspection system (100) includes an X-ray source (10), an X-ray detector (12), a specimen support (20) made of a flexible material, and a specimen support positioning assembly configured to position the specimen support (20) between the X-ray source (10) and the X-ray detector (12). The specimen support (20) is configured to removably clamp a specimen for inspection in a fixed position relative to the specimen support, and is configured such that, during use, at least one surface of the specimen is in contact with the flexible material. The specimen support positioning assembly includes a rotational drive (28) configured to rotate the specimen support about an axis of rotation, thereby rotating the specimen about the axis of rotation so that a series of two-dimensional images can be captured by the X-ray detector. The series of two-dimensional images can be used to create a three-dimensional reconstruction of the specimen.

Description

Technical Field

[0001] The present invention relates to an X-ray inspection system, an X-ray imaging accessory for an X-ray inspection system, a specimen support for an X-ray inspection system, a kit for an X-ray inspection system, and a method of using an X-ray inspection system.

[0002]

Reference to Related Applications

Background Art

[0003] An X-ray inspection system can be used to inspect a specimen. By placing the specimen between an X-ray source, such as an X-ray tube, and an X-ray detector, a two-dimensional image of a cross-section of the specimen can be captured. This image provides detailed information about the internal structure of the specimen. One industry where X-ray inspection is particularly useful is the manufacturing field of electronic components, including packaged semiconductor devices. It is useful to be able to inspect electronic components for voids, cracks, and misalignment in the applied conductive elements.

[0004] Some X-ray inspection systems can be used to perform computed tomography. In computed tomography, a series of two-dimensional images of several cross-sections of the specimen are captured, and the specimen is rotated relative to the X-ray source and the X-ray detector between the images, and vice versa. Next, it is preferable to computationally calculate a three-dimensional reconstructed image of the specimen by combining the two-dimensional images. Based on the three-dimensional reconstruction result of the specimen, three-dimensional analysis of the internal structure of the specimen is possible. For example, virtual micro-sectioning and internal dimension measurement are possible. Also, such three-dimensional reconstruction can reduce the need for time-consuming micro-section analysis of the specimen and additionally or alternatively help identify where micro-section preparation and investigation should be concentrated.

[0005] In an X-ray inspection system that rotates a specimen with respect to an X-ray source and an X-ray detector, the X-ray inspection system preferably includes a rotating stage having a rotation driving device that rotates the specimen around a rotation axis. In order to make the three-dimensional visualization as accurate as possible, it is desirable that the specimen moves only around the rotation axis. For example, it is desirable that when the specimen is rotated to different positions, the specimen does not move with respect to the rotation axis under the action of gravity.

[0006] Currently, for example, by using a hot glue gun or a clamp to fix one end of the specimen to the rotation driving device, unwanted movement of the specimen is reduced. However, fixing the specimen in this way may require a large amount of labor and time. For example, in order to enable accurate three-dimensional visualization, it is desirable that the rotation axis passes through the center of the specimen. It may be difficult to accurately position the specimen within the X-ray inspection system.

[0007] Furthermore, replacing the first specimen with a second specimen for inspection may be time-consuming and require a large amount of labor, especially when the first specimen is fixed using a hot glue gun. There is also a risk of damaging the specimen by the glue of the hot glue gun or by the clamp. Furthermore, in the current method, the specimens have to be inspected one by one. When a large number of specimens are to be inspected, the technician has to be prepared to replace the specimen after each specimen is inspected.

[0008] Another drawback when one end of the specimen is fixed to the rotation driving device is that when rotating a large and heavy specimen, for example, some movement of the free end with respect to the fixed end may occur due to bending of the specimen. This bending reduces the accuracy of the three-dimensional visualization obtained by the computer along the length of the specimen.

[0009] When inspecting a specimen, for example, an electronic component, it may be desirable to maximize the magnification of the two-dimensional image captured by the X-ray detector, especially when inspecting electronic components. The magnification can be maximized by positioning the specimen as close as possible to the X-ray source. However, each specimen for inspection may have different dimensional shapes. The specimen may have an irregular shape. In order to avoid collisions between the specimen and the X-ray source or some other component of the X-ray inspection system while the specimen is being rotated, the user must ensure that the X-ray inspection system is accurately set up for each specimen. This increases the complexity when using the X-ray inspection system.

Summary of the Invention

Problems to be Solved by the Invention

[0010] It is desirable to provide an X-ray inspection system that is simple and quick to use, can produce high-quality and accurate three-dimensional reconstructed images even when the specimen is large or heavy, further reduces the risk of collision between the specimen and the X-ray inspection system while allowing for high magnification, and can inspect multiple specimens simultaneously or in one operation.

Means for Solving the Problems

[0011] The present invention provides an X-ray inspection system, a specimen support assembly for an X-ray inspection system, a specimen support assembly for an X-ray inspection system, a kit, and a method of using an X-ray inspection system as described in the independent form claims in the appended claims to be referred to. Preferred or advantageous features of the present invention are described in the dependent form claims.

[0012] In a first aspect, an X-ray source, an X-ray detector, FlexibleAn X-ray inspection system is provided that includes a specimen support including a [material] and a specimen support positioning assembly. The specimen support positioning assembly is configured to position the specimen support between an X-ray source and an X-ray detector. The specimen support is configured to removably clamp a specimen for inspection in a fixed position relative to the specimen support, and during use, at least one surface of the specimen is Flexible configured to be in contact with the [material].

[0013] In use, a two-dimensional image of the specimen clamped by the specimen support and Flexible in contact with the [material] may be captured by the X-ray detector of the X-ray inspection system. Preferably, a series of two-dimensional images may be captured by the X-ray detector, and for the specimen, each two-dimensional image is positioned at a different rotation angle about an axis. This can be achieved by rotating the specimen support about the axis. Thus, the specimen clamped by the specimen support is also rotated about the axis. The axis advantageously extends in a direction perpendicular to a straight line extending between the X-ray source and the X-ray detector. The series of two-dimensional images may be used to create a three-dimensional reconstructed image of the specimen. The clamped specimen is preferably held in a fixed position within the specimen support when the specimen is being rotated. Thus, movement of the specimen relative to the specimen support can be prevented. This advantageously allows for the generation of an accurate three-dimensional reconstructed image of the specimen. The specimen that is removably clamped is preferably made such that the specimen can be easily removed from the specimen support and replaced.

[0014] Flexible The [material] may be a material that deforms without breaking. Flexible The [material] is preferably significantly more Flexible [property] than one or more specimens to be inspected, and thus, such Flexible [material] can take the same shape as at least one surface of the specimen with which it is in contact. Thus, the specimen support can advantageously accommodate a range of specimen dimensions and shapes, and in each case, FlexibleThe sample can be in contact with the property material at least on one surface of the sample. The sample Flexible is preferably fixed in the sample support as a result of the contact between the property material and the sample. In a preferred embodiment, the sample Flexible may be surrounded by the property material during use, so that all sides of the sample Flexible are in contact with the property material and are supported by this Flexible property material. As a variant, one side of the sample may be in contact with a rigid material while the opposite side is Flexible in contact with the property material, so that the sample Flexible is clamped between the property material and the rigid material.

[0015] The sample support is preferably configured to clamp a plurality of samples simultaneously for inspection. The sample support can clamp each of the plurality of samples, so that the samples are positioned at intervals along the axis of rotation. Thereby, advantageously, a large number of samples can be inspected using an X-ray inspection system without the need to attach new samples between imaging operations. This simplifies the operation of the X-ray inspection system and enables automation of the detection of a large number of samples.

[0016] Flexible The property material is preferably an elastic material. The elastic material preferably returns to its original shape after the sample is removed from the sample support. Flexible The property material is preferably a compressible foam. The compressible foam is preferably elastic. The compressible foam preferably has a low density and advantageously a low X-ray attenuation coefficient. The compressible foam with a low X-ray attenuation coefficient preferably consists of a material having a small atomic number or a low density or both.

[0017] The specimen support should preferably be configured to completely surround the specimen during use. X-rays generated by the X-ray source and passing through the specimen, even if only in a small amount, should preferably be attenuated by the specimen support. By providing a specimen support that completely surrounds the specimen during use, the specimen support can attenuate the X-rays to a similar extent regardless of the orientation of the specimen support with respect to the X-ray source. This can be said to be advantageous for creating a high-quality and accurate three-dimensional visualization image of the specimen without generating imaging artifacts unrelated to the specimen.

[0018] The magnification of the image captured by the X-ray detector may depend on the distance between the X-ray source and the specimen. In particular, the magnification can increase when the specimen is brought closer to the X-ray source. When the specimen is completely surrounded by the specimen support, the specimen support should preferably be positioned close to the X-ray source in a state where it is known that the specimen support does not collide with the features of the X-ray inspection system. Therefore, a specimen of any shape or size that can be completely surrounded by the specimen support can be reliably positioned at a high magnification position, in which case there is no need to calibrate the X-ray inspection system, and there is no risk of the specimen colliding with the X-ray source or any other component of the X-ray inspection system. This can advantageously simplify the user operation of the X-ray inspection system, especially the loading of the specimen into the X-ray inspection system. Being able to capture a high-magnification X-ray image can be said to be particularly advantageous when inspecting electronic components including packaged semiconductor devices.

[0019] The specimen support should Flexible preferably have an outer shell made of a material having a higher rigidity than the specimen material. The outer shell can preferably provide dimensional stability to the specimen support and also reduce bending or deformation of the outer surface of the specimen support. The outer shell can also FlexibleIt can hold the sex material, thereby providing a clamping force to one or more specimens held within the specimen support. The specimen support is preferably connected at its two ends to the specimen support positioning assembly. By providing an outer shell, the specimen support can be prevented or reduced from bending in the region between the two ends. The outer shell can Flexible completely surround the sex material. In use, Flexible the specimen clamped by the sex material is preferably completely received within the outer shell.

[0020] The outer shell may preferably consist of at least one of carbon fiber or aramid fiber. Alternatively or additionally, the outer shell may consist of polyetheretherketone (PEEK). As a variant, the outer shell may consist of a low-density metal, such as aluminum. An outer shell consisting of carbon fiber, aramid fiber, PEEK or low-density metal preferably has high rigidity while having low density and low X-ray attenuation. Such materials can preferably be said to be resistant to degradation by the X-ray beam passing through the outer shell.

[0021] The specimen support preferably has a longitudinal axis, and the outer shell can define a shape with a cross-section extending along the longitudinal axis. Preferably, the cross-section of the outer shell is substantially circular, so that the X-ray passing through the specimen support passes through substantially the same depth of the same material of the specimen support regardless of the rotation angle of the specimen support. The specimen support with a circular cross-section can have a cylindrical shape. The specimen support preferably has a diameter of 15 millimeters to 130 millimeters.

[0022] If the outer shell is not substantially circular, the cross-section preferably has a rotational symmetry order high enough that each two-dimensional image used to create the three-dimensional reconstruction image can be taken through the axis of symmetry of the specimen support. The cross-section preferably has a rotational symmetry order of at least 16, at least 32, at least 64, at least 128, at least 256, at least 512 or at least 720.

[0023] The outer shell can define an internal space. The internal space Flexible may be filled with a material. In this context, the expression "filled" means that the material within the outer shell must be compressed within the outer shell to correspond to one or more specimens, and the one or more specimens have a volume within the expected specimen volume range. Advantageously, when the specimen support is rotated about its axis, Flexible the material applies to the specimen a clamping force sufficient to hold the specimen in a fixed position relative to the outer shell when compressed between the specimen and the outer shell. Flexible

[0024] The specimen support preferably has a first part and a second part. The first part can preferably move relative to the second part between an open position and a closed position. In the open position, the specimen support can receive a specimen. In the closed position, the specimen support can clamp the specimen received within the specimen support between the first part and the second part of the specimen support.

[0025] The first part Flexible may consist of a first part of the material. The second part Flexible may consist of a second part of the material. The material of the second part Flexible is preferably the same as or at least has a substantially the same X-ray attenuation coefficient as the material of the first part. When the specimen is received within the closed specimen support, Flexible FlexibleThe first and second portions of the property material each contact at least one surface of the specimen and take the same shape as the shape of this at least one surface. As a result, the specimen is Flexible fixed in a fixed position relative to the specimen support while being supported by the property material.

[0026] The first portion of the specimen support may be separable from the second portion of the specimen support. As a modification, the first portion of the specimen support may be connected to the second portion of the specimen support by a hinge. The first portion of the specimen support may be able to move relative to the second portion of the specimen support by the hinge. The hinge may be made of a flexible resin or a soft adhesive tape fixed to the first and second portions of the specimen support. As a modification, the hinge may be composed of one or a plurality of strips of Mylar, and each strip or the plurality of strips of Mylar is fixed to the first and second portions of the specimen support using, for example, an adhesive tape. As a modification, the first portion of the specimen support may be able to slide relative to the second portion of the specimen support.

[0027] The specimen support may have means for holding the first and second portions in a closed position. This can advantageously enable the specimen support to remain in the closed position in any orientation state.

[0028] The means for holding the first and second portions in the closed position may include an adhesive tape configured to be removably fixed to the first and second portions of the specimen support. As a variant, the second portion of the specimen support may engage the second portion of the specimen support in the closed position. As a variant, the means for holding the first and second portions of the specimen support in the closed position may be a clip configured to engage both the first and second portions of the specimen support when the specimen support is in the closed position. The specimen support may be two or more clips configured to engage both the first and second portions of the specimen support. The clip may engage or clip releasably to the specimen support. The clip may be removable from the specimen support so that the specimen support can be moved from the closed position to the open position. The clip may be slidable along the specimen support. The clip may be slidable from a first position where the clip engages both the first and second portions of the specimen support to a second position where the clip engages only the first or second portion of the specimen support. The clip may be in the first position when the specimen support is in the closed position. The user may slide the clip to the second position, thereby being able to move the specimen support from the closed position to the open position.

[0029] The means for holding the first and second portions in the closed position includes one or more clips, and such means can be said to be particularly suitable when the first portion of the specimen support is not connected to the second portion of the specimen support.

[0030] The specimen support should be removably connectable to the specimen support positioning assembly. Thereby, advantageously, instead of the specimen support, another specimen support having different cross-sectional dimensions, preferably different cross-sectional diameters, can be used. The user can select a specimen support sized to fit the size of the specimen for the examination. The smaller the specimen support, the closer the specimen can be positioned to the X-ray source, and thus the higher the magnification that can be achieved. However, the specimen support is preferably selected to be large enough to completely surround the specimen for the examination.

[0031] The specimen support may be removably coupled to the specimen support positioning mechanism using a fixing mechanism. For example, using a C-clamp, the specimen support can be removably coupled to the specimen support positioning assembly. The C-clamp is advantageously easy to use and securely fixes the specimen support to the specimen support positioning assembly.

[0032] The specimen support positioning assembly may include a base. The base can be accommodated within the X-ray inspection system. Specifically, the base can be placed on the stage of the X-ray inspection system. The base may take the form of a tray. The specimen support positioning assembly preferably includes a frame attached to the base, and the specimen support is connected to this frame. The X-ray source is preferably positioned on the opposite side of the base as viewed from the specimen support, so that the X-rays generated by the X-ray source pass through the base and then reach the X-ray detector. Thus, it can be said that the magnification of the image captured by the X-ray detector increases as the gap between the specimen support and the base decreases. The gap between the specimen support and the base is preferably 1 millimeter or less, more preferably 0.5 millimeter or less.

[0033] The base preferably has a window such that X-rays pass through the window when the specimen support is positioned between the X-ray source and the X-ray detector. The window is preferably made of a low attenuation rate material. Such a material preferably has a small atomic number or low density, or both. The window is preferably made of carbon fiber. As a variant, the window may be an opening provided in the base.

[0034] The X-ray inspection system preferably includes one or more X-ray filters provided between the X-ray source and the X-ray detector and configured to absorb parasitic low-energy X-rays. The one or more X-ray filters are preferably made of copper or zinc. The X-ray filter made of copper preferably has a thickness of about 100 microns. The X-ray filter made of zinc preferably has a thickness of about 150 microns.

[0035] The first X-ray filter is preferably positioned between the X-ray source and the specimen. The first X-ray filter can provide beam hardening of the X-rays emitted by the X-ray source. The first X-ray filter is preferably supported by the base, and this first X-ray filter preferably extends over the window of the base. The first X-ray filter preferably takes the form of a coating adhered to the window of the base. The X-ray inspection system preferably includes a first X-ray filter positioned between the specimen and the X-ray detector. The second X-ray filter is preferably configured to absorb parasitic low-energy scattered X-rays and prevent such X-rays from reaching the detector.

[0036] Alternatively or additionally, the specimen support preferably has an X-ray filter. The X-ray filter of the specimen support preferably takes the form of a coating applied to the outer shell of the specimen support. The X-rays passing through the specimen support preferably pass through the X-ray filter of the specimen support twice. Thus, the X-rays passing through the specimen support can cause beam hardening and can absorb parasitic low-energy scattered X-rays.

[0037] The frame may be movable about a pivot fixed to the base. Thereby, advantageously, the position of the frame relative to the base can be adjusted. In some embodiments, this advantageously allows the specimen support to be moved closer to or further away from the base, and as a result, the magnification of the image of the specimen captured by the X-ray detector can be adjusted. The frame may be positioned relative to the base in another way, for example, translated linearly towards or away from the base along a track.

[0038] A movable frame can be particularly advantageous for removably connecting specimen supports of various sizes to the specimen support positioning assembly. A portion of the frame may be adjustable to enable connection of specimen supports having different diameters to the specimen positioning support. Thus, it can be said that the gap between the specimen support and the base is 1 millimeter or less, preferably 0.5 millimeter or less, and it is advantageous to maintain this gap regardless of the size of the specimen support.

[0039] The specimen support positioning assembly may include a prop for holding the frame in a predetermined position relative to the base.

[0040] When specimen supports of different sizes are coupled to the specimen support positioning assembly, it may be beneficial to use props of different sizes.

[0041] As a variant, the specimen support positioning assembly may include a prop for holding the frame in one of a plurality of predetermined positions relative to the base. The frame may be held at different distances from the base at each of the predetermined positions. Thereby, advantageously, the user can select a predetermined position of the frame suitable for a particular size of the support coupled to the specimen support positioning assembly without replacing the prop. The prop may have a plurality of slots or holes.

[0042] Each of the plurality of slots or holes may be configured to removably receive an engagement element of the frame and hold the frame in one of a predetermined number of positions. The engagement element may include a spring-loaded bolt configured to be removably receivable within each of the plurality of slots or holes. As a variant, the prop may have a plurality of engagement elements each configured to be removably receivable within a slot or hole of the frame at one of a predetermined number of positions.

[0043] The first end of the prop may be fixed to the base. The prop may extend upwardly from the first end. The plurality of slots may be distributed along the length of the prop. The specimen support positioning assembly may preferably have a second prop including a slot or engagement element corresponding to the first prop. The first prop and the second prop may be positioned on opposite sides of the frame. The first and second props may be fixed to the base at their respective first ends. The first prop and the second prop may support the frame from opposite sides. Thereby, advantageously, improved mechanical stability is obtained compared to a configuration including a single prop.

[0044] The specimen support positioning assembly may further include means in the form of a screw for adjusting the pitch of the frame relative to the base. Fine adjustment can be made by turning the screw.

[0045] The specimen support positioning assembly may include an encoder configured to measure the position of the frame relative to the base. Thereby, the distance between the specimen support and the base can be determined, and thus, advantageously, calibration of the image to be captured by the X-ray detector or magnification calculation to be performed is possible.

[0046] The X-ray inspection system preferably includes a controller including an image processor. The image processor is preferably connected to the X-ray detector so as to receive data from the X-ray detector. The image processor is preferably configured to perform computed tomography calculations to generate a three-dimensional reconstructed image of the specimen based on a series of two-dimensional images captured by the X-ray detector.

[0047] The specimen support positioning assembly further includes a rotation drive device configured to rotate the specimen support about the axis of rotation. The rotation drive device is preferably fixed to the frame of the specimen support positioning assembly.

[0048] The rotation drive device preferably includes a motor. The motor is preferably connected to the image processor, and this motor can output position information to the image processor. Changes in the position of the specimen relative to the X-ray source and the X-ray detector between images, particularly changes in the rotational position, can be used in computed tomography calculations. Accurate position information is required when generating a three-dimensional reconstructed image of the specimen. The more accurate the position information about the specimen, the better the image resolution will be.

[0049] The motor is preferably offset from the axis of rotation. The rotation drive device preferably has a link device between the motor and the specimen support. The offset motor is preferably positioned on the opposite side of the axis of rotation as viewed from the X-ray source during use. For example, when the X-ray source is located below the axis of rotation during use, the motor is preferably positioned above the axis of rotation. This advantageously allows for providing a larger motor or link device in the direction perpendicular to the specimen support without increasing the minimum distance between the specimen and the X-ray source and without limiting the maximum magnification of the X-ray inspection system. By offsetting the motor from the axis of rotation, a more powerful motor can be used without limiting the magnification. Alternatively or additionally, a large gear device can be used for the link device. This advantageously enables accurate control of the rotation of the specimen support.

[0050] The linking device preferably includes a drive gear connected to the motor. The drive gear may be connected to a gear directly or indirectly coupling the specimen support. The drive gear may be connected to the specimen support by one or more backlash-preventing gears. The one or more backlash-preventing gears can advantageously reduce or eliminate backlash so as to ensure stable rotation of the specimen support and thus ensure good image quality captured at the X-ray detector. This can be said to be particularly advantageous when the center of mass of the specimen received within the specimen support is offset from the center of rotation. In the case where no backlash-preventing gear is provided, due to the mass of the specimen, backlash may act disadvantageously in the rotational direction in a specific orientation state. As a modification, the drive gear may be connected to the specimen support by a toothed belt.

[0051] The specimen support preferably clamps the specimen for examination, so that the specimen is positioned on the axis of rotation. Thus, when a series of images of the specimen in different orientations with respect to the X-ray source are captured, each image can overlap along the axis. This can advantageously reduce the complexity regarding computer calculations for creating a three-dimensional reconstructed image of the specimen from a series of two-dimensional images.

[0052] The X-ray inspection system preferably includes a specimen support positioning assembly and thus a vertical positioning mechanism for moving the specimen support vertically towards or away from the X-ray source. As described above, the magnification of the image captured by the X-ray detector is determined by the distance between the X-ray source and the specimen. Thus, by moving the specimen support closer to or away from the X-ray source, magnification control can advantageously be achieved. The vertical positioning mechanism can move the specimen support by moving the specimen support positioning assembly. If the specimen support positioning assembly has a base, the vertical positioning mechanism is preferably configured to move the base.

[0053] The X-ray inspection system preferably includes a specimen support positioning assembly, a first horizontal positioning mechanism for moving the specimen support in a first horizontal direction, and a second positioning mechanism for moving the specimen support in a second horizontal direction. The first and second horizontal directions are preferably perpendicular to the vertical direction, and these horizontal directions can define a horizontal plane. The first and second horizontal positioning mechanisms can move the specimen support by moving the specimen support positioning assembly. When the specimen support positioning assembly has a base, the first and second horizontal positioning mechanisms are preferably configured to move the base.

[0054] The X-ray inspection system preferably includes a specimen support position detection assembly provided with a non-contact position measuring device positioned adjacent to the specimen support positioning assembly and configured to detect the position of the specimen support positioning assembly or a change in its position. The non-contact position measuring device can measure the position of the specimen support positioning assembly in the vertical direction. The non-contact position measuring device can include, for example, a laser interferometer, an optical linear encoder, a magnetic encoder, or a capacitive sensor.

[0055] The X-ray inspection system preferably includes another non-contact position measuring device that measures the position of the specimen support positioning assembly in each of the first and second horizontal directions. Any non-contact position device can output position information regarding the specimen to an image processor.

[0056] Changes in the position of the specimen in the vertical direction and the first and second horizontal directions with respect to the X-ray source and the X-ray detector between images can be used in computed tomography calculations.

[0057] The specimen support is preferably suitable for removably clamping an electronic component. The specimen preferably has a length of 12 millimeters to 250 millimeters. The width of the specimen is preferably 15 millimeters to 130 millimeters.

[0058] In a second aspect of the present invention, an X-ray imaging accessory for an X-ray inspection system is provided. The X-ray imaging accessory includes a specimen support positioning assembly including a specimen support and a rotation drive device configured to rotate the specimen support about a rotation axis. The specimen support Flexible contains a [material property], and the specimen support is configured to removably clamp a specimen for inspection at a fixed position relative to the specimen support, and during use, at least one surface of the specimen Flexible is configured to be in contact with the [material property].

[0059] The specimen support may be coupled to the specimen support positioning assembly. Specifically, the specimen support may be coupled to the rotation drive device. The specimen support may be removably coupled to the rotation drive device.

[0060] The X-ray imaging accessory may be configured to fit within an X-ray inspection system including an X-ray source and an X-ray detector, and as a result, the specimen support will be positioned between the X-ray source and the X-ray detector. In use, the rotation drive device can advantageously rotate the specimen support about the rotation axis, and as a result, a series of two-dimensional images of the specimen are captured by the X-ray detector, and for the specimen, each two-dimensional image is located at a different rotation angle about the axis. The rotation axis advantageously extends in a direction perpendicular to a straight line extending between the X-ray source and the X-ray detector. Using a series of two-dimensional images, a three-dimensional reconstructed image of the specimen can be created for computed tomography applications.

[0061] The rotation drive device may include a motor. The motor may be offset from the rotation axis. The rotation drive device may have a link device between the motor and the specimen support. The link device may include a drive gear coupled to the motor. The drive gear may be coupled to a gear coupled to the specimen support. The drive gear may be coupled by one or more backlash-preventing gears.

[0062] FlexibleThe malleable material is preferably a substance that can be easily bent without breaking, and thus, Flexible it can assume the same shape as at least one surface of the specimen with which the malleable material comes into contact. In a preferred embodiment, the specimen is, during use, Flexible preferably surrounded by the malleable material, such that all sides of the specimen Flexible are in contact with the malleable material and are thereby Flexible supported by the malleable material. As a variant, the specimen may have one side in contact with a rigid material and the opposite side in Flexible contact with the malleable material, such that the specimen is Flexible clamped between the malleable material and the rigid material.

[0063] Flexible The malleable material is preferably an elastic material. Flexible The malleable material is preferably a compressible foam. The compressible foam is preferably elastic. The compressible foam preferably has a low density and, advantageously, a low X-ray attenuation coefficient. The compressible foam with a low X-ray attenuation coefficient preferably consists of a material having a small atomic number or a low density or both.

[0064] The specimen support is preferably configured to completely surround the specimen during use.

[0065] The specimen support Flexible preferably has an outer shell made of a material having a higher rigidity than the malleable material. The outer shell can advantageously provide dimensional stability to the specimen support and can reduce bending or deformation of the outer surface of the specimen support. The outer shell can also Flexible hold the malleable material and thereby provide a clamping force to one or more specimens held within the specimen support. The outer shell can Flexible completely surround the malleable material. In use, FlexibleThe specimen clamped by the clamping material may be fully received within the outer shell. The outer shell may preferably consist of at least one of carbon fiber or aramid fiber. Alternatively or additionally, the outer shell may consist of polyetheretherketone (PEEK). As a variant, the outer shell may consist of a low-density metal, such as aluminum. The outer shell consisting of carbon fiber, aramid fiber, PEEK or low-density metal preferably has high rigidity while having low density and low X-ray attenuation. Such a material can preferably be said to be resistant to degradation by the X-ray beam passing through the outer shell.

[0066] The specimen support may preferably have a longitudinal axis, and the outer shell can define a shape with a cross-section extending along the longitudinal axis. Preferably, the cross-section of the outer shell is substantially circular, so that the X-rays passing through the specimen support pass through substantially the same depth of the same material of the specimen support regardless of the rotation angle of the specimen support. The specimen support having a circular cross-section can have a cylindrical shape. The specimen support may preferably have a diameter of 15 millimeters to 130 millimeters.

[0067] If the outer shell is not substantially circular, the cross-section preferably has a rotational symmetry order high enough to be able to take each two-dimensional image used to create a three-dimensional reconstructed image at the symmetry line of the specimen support. The cross-section preferably has a rotational symmetry order of at least 16, at least 32, at least 64, at least 128, at least 256, at least 512 or at least 720.

[0068] The outer shell can define an internal space. The internal space Flexible may preferably be filled with the clamping material.

[0069] The specimen support may have a first part and a second part. The first part may be able to move relative to the second part between an open position and a closed position. In the open position, the specimen support may be able to receive a specimen. In the closed position, the specimen support may clamp the specimen received within the specimen support between the first part and the second part of the specimen support.

[0070] The first part Flexible may consist of a first part of a material. The second part Flexible may consist of a second part of a material. The Flexible material of the second part preferably has the same X-ray attenuation coefficient as, or at least substantially the same X-ray attenuation coefficient as, the Flexible material of the first part. When the specimen is received within the closed specimen support, Flexible the first and second parts of the material each contact at least one surface of the specimen and take the same shape as the shape of this at least one surface, such that the specimen Flexible is fixed in a fixed position relative to the specimen support while being supported by the material.

[0071] The first part of the specimen support may be connected to the second part of the specimen support by a hinge. The first part of the specimen support may be able to move relative to the second part of the specimen support by means of the hinge. The hinge may consist of a flexible resin or a soft adhesive tape fixed to the first and second parts of the specimen support. As a variant, the hinge may consist of one or more strips of Mylar, and each strip or the plurality of strips of Mylar may be fixed to the first and second parts of the specimen support using, for example, an adhesive tape. As a variant, the first part of the specimen support may be able to slide relative to the second part of the specimen support.

[0072] The specimen support may have means for holding the first part and the second part in the closed position.

[0073] The means for holding the first and second parts in the closed position may include an adhesive tape configured to be removably fixed to the first and second parts of the specimen support. As a variant, the second part of the specimen support may engage the second part of the specimen support in the closed position.

[0074] The specimen support may be removably connectable to the specimen support positioning assembly. Thereby, advantageously, instead of the specimen support, another specimen support having different cross-sectional dimensions, preferably different cross-sectional diameters, can be used. The user can select a specimen support of a size suitable for the size of the specimen for inspection. The smaller the specimen support, the closer the specimen can be positioned to the X-ray source, and thus the higher the magnification can be achieved. However, the specimen support is preferably selected to be large enough to completely surround the specimen for inspection.

[0075] The specimen support may be removably coupled to the specimen support positioning mechanism using a fixing mechanism. For example, using a C-clamp, the specimen support can be removably coupled to the specimen support positioning assembly. The C-clamp is advantageously easy to use and securely fixes the specimen support to the specimen support positioning assembly. As a variant, the fixing element may consist of a quick-release mechanism. The quick-release mechanism may include a spring-pressed element, for example a spring-pressed bolt. The spring-pressed element may be part of the specimen support, and such a spring-pressed element may be configured to releasably engage the specimen support positioning assembly to fix the specimen support to the specimen support positioning assembly. As a variant, the spring-pressed element may be part of the specimen support positioning assembly, and such a spring-pressed element may be configured to releasably engage the specimen support to fix the specimen support to the specimen support positioning assembly.

[0076] The simple detachment mechanism preferably includes an engagement clutch. The specimen support preferably includes the first part of the engagement clutch. The specimen support positioning assembly preferably includes the second part of the engagement clutch. Thus, the specimen support can be engaged with the specimen support positioning assembly via the two parts of the engagement clutch. By using the engagement clutch, advantageously, the slippage between the specimen support and the specimen support positioning assembly is reduced. The spring pressing element preferably includes one of the first and second parts of the engagement clutch, and as a result, the two parts of the engagement clutch are pressed against each other. Each of the first and second parts of the engagement clutch preferably has corresponding teeth configured to engage with each other. The teeth are preferably tapered.

[0077] The specimen support positioning assembly preferably includes a base. The base can be accommodated in the X-ray inspection system. Specifically, the base can be placed on the stage of the X-ray inspection system. The base preferably takes the form of a tray. The specimen support positioning assembly preferably includes a frame attached to the base, and the specimen support is connected to this frame. The gap between the specimen support and the base is preferably 1 millimeter or less, more preferably 0.5 millimeter or less. The frame preferably has a rotation drive device. The frame can preferably move around a pivot fixed to the base. Thereby, advantageously, the position of the frame relative to the base can be adjusted. The specimen support positioning assembly preferably includes a detector configured to measure the position of the frame relative to the base.

[0078] The base preferably has a window, and as a result, X-rays can pass through the window when the specimen support is positioned between the X-ray source and the X-ray detector. The window is preferably made of a low attenuation rate material. Such a material preferably has a small atomic number or low density, or both. The window is preferably made of carbon fiber. As a modification, the window may be an opening provided in the base.

[0079] The specimen support positioning assembly may include one or more X-ray filters configured to absorb parasitic low-energy X-rays. The one or more X-ray filters may be made of copper or zinc. The X-ray filter made of copper may desirably have a thickness of about 100 microns. The X-ray filter made of zinc may desirably have a thickness of about 150 microns.

[0080] The first X-ray filter may be positioned between the X-ray source and the specimen. The first X-ray filter can provide beam hardening of the X-rays emitted by the X-ray source. The first X-ray filter may desirably be supported by a base, and this first X-ray filter may desirably extend over the window of the base. The first X-ray filter may desirably take the form of a coating adhered to the window of the base. The X-ray inspection system may desirably include a first X-ray filter positioned between the specimen and the X-ray detector. The second X-ray filter may desirably be configured to absorb parasitic low-energy scattered X-rays and prevent such X-rays from reaching the detector.

[0081] Alternatively or additionally, the specimen support may desirably have an X-ray filter. The X-ray filter of the specimen support may desirably be in the form of a coating adhered to the outer shell of the specimen support. The X-rays passing through the specimen support may desirably pass through the X-ray filter of the specimen support twice. Thus, the X-rays passing through the specimen support can cause beam hardening and can absorb parasitic low-energy scattered X-rays.

[0082] The specimen support may desirably have an X-ray filter. The X-ray filter may desirably be in the form of a coating adhered to the outer shell of the specimen support. The X-ray filter may desirably be configured to absorb parasitic low-energy scattered X-rays and prevent these X-rays from passing through the specimen. The X-ray filter layer may desirably be made of copper. The specimen support may desirably have an X-ray filter. The X-ray filter may desirably be in the form of a coating adhered to the outer shell of the specimen support.

[0083] Alternatively or additionally, if the X-ray inspection system has a base, the base may have an X-ray filter. If the base has a window, the window may be the X-ray filter.

[0084] In a third aspect of the present invention, Flexible a specimen support for an X-ray inspection system is provided, which includes a conductive material and a mechanical interface connectable to a rotational drive device. The specimen support is configured to removably clamp a specimen for inspection at a fixed position relative to the specimen support, and during use, at least one surface of the specimen is Flexible configured to be in contact with the conductive material.

[0085] By providing the mechanical interface, the specimen support can be connected to the rotational drive device of the specimen support assembly, and the specimen support assembly may be part of the X-ray inspection system. Advantageously, the mechanical interface enables the specimen support to be removably connected to the rotational drive device, so that the specimen support can be easily connected to or removed from the rotational drive device. The mechanical interface may include a protrusion or an axle. The protrusion or the axle may be connectable to the axle of a rotational drive device, for example, a motor. The connection may be made by a clamping mechanism, for example, a C-clamp.

[0086] During use, the specimen support connected to the rotational drive device may be rotatable about the axis of rotation. The specimen support may clamp the specimen for inspection, and as a result, the specimen is positioned on the axis of rotation of the specimen support.

[0087] The specimen support may have a second mechanical interface provided on the opposite side of the specimen support as seen from the first mechanical interface. The second mechanical interface may be connectable to the second axle or protrusion of the specimen support positioning assembly.

[0088] The FlexibleThe compliant material is preferably a material that can be easily bent without breaking, and such Flexible compliant material can assume the same shape as at least one surface of the specimen it contacts. In a preferred embodiment, the specimen is, during use, Flexible preferably surrounded by the compliant material, such that all sides of the specimen Flexible are in contact with and supported by the compliant material.

[0089] Flexible The compliant material may be an elastic material. Flexible The compliant material may be a compressible foam. The compressible foam may be elastic. The compressible foam preferably has a low density and, advantageously, a low X-ray attenuation coefficient. A compressible foam with a low X-ray attenuation coefficient preferably consists of a material having a small atomic number or a low density or both.

[0090] The specimen support is preferably configured to completely surround the specimen during use.

[0091] The specimen support Flexible preferably has an outer shell made of a material having a higher rigidity than the compliant material. The outer shell can advantageously provide dimensional stability to the specimen support and can reduce bending or deformation of the outer surface of the specimen support. The outer shell can also Flexible retain the compliant material, thereby providing a clamping force to one or more specimens held within the specimen support. The outer shell can Flexible completely surround the compliant material. In use, Flexible the specimen clamped by the compliant material is preferably completely received within the outer shell.

[0092] The outer shell may preferably be made of at least one of carbon fiber or aramid fiber. Alternatively or additionally, the outer shell may be made of polyetheretherketone (PEEK). As a variant, the outer shell may be made of a low-density metal, such as aluminum. The outer shell made of carbon fiber, aramid fiber, PEEK or low-density metal preferably has high rigidity while having low density and low X-ray attenuation. Such a material can preferably be said to be resistant to degradation by the X-ray beam passing through the outer shell. The specimen support preferably has a longitudinal axis, and the outer shell can define a shape with a cross-section extending along the longitudinal axis. Preferably, the cross-section of the outer shell is substantially circular, so that the X-rays passing through the specimen support pass through substantially the same depth of the same material of the specimen support regardless of the rotation angle of the specimen support. The specimen support having a circular cross-section can have a cylindrical shape. The specimen support preferably has a diameter of 15 millimeters to 130 millimeters.

[0093] If the outer shell is not substantially circular, the cross-section preferably has a rotational symmetry order high enough to be able to take each two-dimensional image used to create a three-dimensional reconstructed image at the symmetry line of the specimen support. The cross-section preferably has a rotational symmetry order of at least 16, at least 32, at least 64, at least 128, at least 256, at least 512 or at least 720.

[0094] The specimen support preferably has an X-ray filter configured to absorb parasitic low-energy scattered X-rays. The X-ray filter may preferably be in the form of a coating deposited on the outer shell of the specimen support. The X-ray filter is preferably configured to absorb parasitic low-energy scattered X-rays and prevent these X-rays from passing through the specimen. The X-ray filter layer may preferably be made of copper.

[0095] The specimen support may have a first part and a second part. The first part may be able to move relative to the second part between an open position and a closed position. In the open position, the specimen support may be able to receive a specimen. In the closed position, the specimen support may clamp the specimen received within the specimen support between the first part and the second part of the specimen support.

[0096] The first part Flexible may consist of a first part of a conductive material. The second part Flexible may consist of a second part of a conductive material. The Flexible conductive material of the second part preferably has the same X-ray attenuation coefficient as, or at least substantially the same X-ray attenuation coefficient as, the Flexible conductive material of the first part. When the specimen is received within the closed specimen support, Flexible the first and second parts of the conductive material each contact at least one surface of the specimen and take the same shape as the shape of this at least one surface, so that the specimen Flexible is fixed in a fixed position relative to the specimen support while being supported by the conductive material.

[0097] The first part of the specimen support may be connected to the second part of the specimen support by a hinge. The first part of the specimen support may be able to move relative to the second part of the specimen support by means of the hinge. The hinge may consist of a flexible resin or a soft adhesive tape fixed to the first and second parts of the specimen support. As a variant, the hinge may consist of one or more strips of Mylar, and each strip or the plurality of strips of Mylar is fixed to the first and second parts of the specimen support using, for example, an adhesive tape. As a variant, the first part of the specimen support may be able to slide relative to the second part of the specimen support.

[0098] The specimen support may have means for holding the first part and the second part in the closed position. Thereby, advantageously, the specimen support can be kept in the closed position in any orientation state.

[0099] The means for holding the first part and the second part in the closed position may include an adhesive tape configured to be removably fixed to the first or second part of the specimen support. As a variant, the first part of the specimen support may engage the second part of the specimen support in the closed position.

[0100] The outer shell can define an internal space. The internal space may be filled with a suitable material. Flexible It may be filled with a suitable material.

[0101] The specimen support may be suitable for removably clamping electronic components. The specimen may desirably have a length between 12 millimeters and 250 millimeters. The width of the specimen may desirably be between 15 millimeters and 130 millimeters.

[0102] The specimen support may be configured to simultaneously clamp a plurality of specimens for inspection. The specimen support can clamp each of the plurality of specimens, such that the specimens are arranged spaced apart from each other along the axis of rotation.

[0103] According to a fourth aspect of the present invention, there is provided a kit for an X-ray inspection system including a plurality of specimen supports as defined in the third aspect of the present invention, characterized in that each of the plurality of specimens has a different diameter.

[0104] Each of the plurality of specimen supports may desirably have a shape with a cross-section extending along the longitudinal axis of the specimen support. Each of the specimen supports may desirably be cylindrical in shape. Each of the specimen supports may desirably have a diameter between 15 millimeters and 130 millimeters. Exemplary diameters of the specimen supports include 15 millimeters, 20 millimeters, 50 millimeters or 127 millimeters. For example, the kit may desirably include three specimen supports. The diameter of the first specimen support may desirably be 20 millimeters, the diameter of the second specimen support may desirably be 50 millimeters, and the diameter of the third specimen support may desirably be 127 millimeters.

[0105] The kit may further include a specimen support positioning assembly including a rotational drive device. Each of the plurality of specimen supports may be removably attachable to the rotational drive device. The specimen support positioning assembly may be configured to fit within an X-ray inspection system including an X-ray source and an X-ray detector, such that a specimen support coupled to the specimen support positioning assembly can be positioned between the X-ray source and the X-ray detector. In use, the rotational drive device can advantageously rotate the specimen support about an axis of rotation, such that a series of two-dimensional images of the specimen are captured by the X-ray detector. Using the series of two-dimensional images, a three-dimensional reconstructed image of the specimen can be created for computed tomography applications.

[0106] Since each specimen support is removably attachable to the specimen support positioning assembly, the user can select which of the plurality of specimen supports to couple. The user can thus select a specimen support sized to fit the size of the specimen to be examined.

[0107] In a fifth aspect of the present invention, a method of using an X-ray inspection system including an X-ray source, an X-ray detector, and Flexible a specimen support including a clamping the specimen to be examined within the specimen support such that the specimen is in a fixed position relative to the specimen support and at least one surface of the specimen is Flexible in contact with the a) positioning the specimen support between the X-ray source and the X-ray detector; b) recording an X-ray image of the specimen; c) rotating the specimen support relative to the X-ray source; d) recording a second X-ray image of the specimen, the method being characterized by including these steps.

[0108] The method may further include the step of repeating steps c) and d) multiple times. The method may further include the step of repeating steps c) and d) until at least 32 X-ray images of the specimen are recorded corresponding to at least 32 different rotational positions of the specimen. The method may further include the step of performing computed tomography calculations using the recorded X-ray images to generate a three-dimensional reconstructed image of the specimen.

[0109] The specimen support may have a first part and a second part, and the first part may be movable relative to the second part. In this case, the step of clamping the specimen to be inspected includes moving the first part of the specimen support relative to the second part of the specimen support and moving it to the open position, and placing the specimen inside the specimen support, and moving the first part of the specimen support relative to the second part of the specimen support and moving it to the closed position where the specimen is clamped by the specimen support.

[0110] It should be clear that the features described in relation to one aspect can be utilized in other aspects of the present invention.

[0111] Next, embodiments of the present specification will be described in detail below with reference to the accompanying drawings, which are merely illustrative.

Brief Description of the Drawings

[0112]

Figure 1

Figure 2

Figure 3

Figure 4a

Figure 4b

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

DETAILED DESCRIPTION OF THE INVENTION

[0113] FIG. 1 is a schematic diagram of an X-ray inspection system 100. The operation of such an X-ray inspection system 100 is described in detail in European Patent No. 1766381 (B1).

[0114] The X-ray inspection system 100 includes an X-ray source in the form of an X-ray tube 10 and an X-ray detector 12. A stage 14 is provided between the X-ray tube 10 and the X-ray detector 12, which can move in the X, Y, and Z directions by means of a suitable sliding or guiding surface and under the control of an electric motor. The stage 14 is formed by an open frame structure (not shown in FIG. 1), and this stage is adapted to support the base 19 of the specimen support positioning assembly 18.

[0115] A specimen support 20 is coupled to the frame 22 of the specimen support positioning assembly 18. The specimen to be inspected is preferably received within the specimen support 20. The specimen received within the specimen support 20 can be moved in the X-Y plane and in the Z-axis direction relative to the X-ray tube 10 and the X-ray detector by moving the stage 14. The specimen support positioning assembly 18 further includes a rotational drive device 28 coupled to the mechanical interface of the specimen support. The rotational drive device 28 can be used to rotate the specimen support 20 about a rotational axis perpendicular to the Z-axis.

[0116] The X-ray inspection system 100 further includes a controller including an image processor. The controller is not shown in the drawings. The image processor is coupled to the X-ray detector 12 to receive data. The image processor is configured to implement a computed tomography algorithm to generate a three-dimensional reconstructed image of the specimen based on a series of two-dimensional images captured by the X-ray detector with the specimen support in different rotational positions. The controller is also used to control the movement of the stage 14 in the X, Y, and Z directions and to control the rotation of the rotational drive device 28.

[0117] In this embodiment, the specimen support positioning assembly 18 is a sub-assembly that can be retrofitted to an existing X-ray inspection system 100. The specimen assembly positioning assembly 18 and the specimen support 20 form part of a kit that can be housed in and removed from the X-ray inspection system. The kit may include a plurality of different specimen supports. In use, the specimen support positioning assembly 18 is fixed to the stage 14 of the X-ray inspection system. As a variant, the specimen support positioning assembly 18 may be provided as an integral component of the X-ray inspection system.

[0118] FIG. 2 is a perspective view of the specimen support positioning assembly 18 housed within the X-ray inspection system 100. In FIG. 2, not all of the X-ray inspection system 100 is visible. FIG. 2 more clearly shows the stage 14 and the base 19 mounted on the stage 14.

[0119] FIG. 3 shows the specimen support positioning assembly 18 including the specimen support 20 in a coupled state separately from the remainder of the X-ray inspection system. As described, the specimen support positioning assembly 18 includes a base 19 and a frame 22. The specimen support 20 is coupled to the frame 22, and the frame 22 can move about a pivot 32 fixed relative to the base 19. Thereby, the position of the frame 22 can be adjusted relative to the base 19. The frame is held in a fixed position using a prop 30, and the prop 30 is configured to hold the specimen support 20 in a position such that the gap between the base 19 and the specimen support 20 is less than 1 millimeter. At this position, the magnification of the X-ray inspection system is preferably maximized, because the specimen support is positioned as close as possible to the X-ray source (positioned directly below the base 19) while avoiding collision between the specimen support 20 and the base 19.

[0120] The prop 30 shown in FIG. 3 is suitable for holding the frame in a single predetermined position relative to the base. The specimen support positioning assembly 18 may include a prop suitable for holding the frame in one of a plurality of predetermined positions relative to the base, with the frame as a modification example. In such a configuration example, the first end of the prop is fixed to the base 19. The prop extends upward, and a plurality of props or holes are formed in the prop in a state of being distributed along the length of the prop. The frame has spring push bolts configured to removably engage with a plurality of slots or holes. By engaging the spring push bolts with a specific slot or hole, the user can select one of a plurality of predetermined positions for the frame relative to the base. The specimen support positioning assembly 18 may preferably include two props each having a corresponding slot or hole. The two props are fixed to the base 19 at opposite sides of the frame. The frame has two spring push bolts configured to engage with the two props.

[0121] The specimen support positioning assembly 18 further includes a screw 36 connected to the frame 22 and the base 19. By turning the screw 36, fine adjustment can be performed on the pitch of the frame if necessary. Thereby, the gap between the base and the specimen support 20 can be adjusted.

[0122] The base 19 has a window 34 arranged in a state of the base positioned between the X-ray tube 10 and the specimen support 20 of the X-ray inspection system. This window is made of carbon fiber and thus has a low X-ray attenuation coefficient. The window 34 further has a coating made of copper and having a thickness of 100 microns, and this coating serves as an X-ray filter configured to absorb parasitic low-energy scattered X-rays and prevent these X-rays from passing through the specimen. In some embodiments, the specimen support 20 may additionally or alternatively have a coating made of copper.

[0123] The rotation drive device 28 is connected to the frame 22 and thus moves together with the frame when the frame moves around the pivot 32.

[0124] Figure 4 shows the specimen support 20 apart from the rest of the X-ray inspection system. The specimen support 20 has a first part 20a and a second part 20b, the first part being movable relative to the second part about a hinge made of a flexible plastic. The hinge is not shown in the drawing. Alternatively, the first part 20a is separate from the second part 20b without a hinge. The separate first and second parts may be held in position relative to each other in use by a retaining clip extending around the exterior of the first and second parts. The specimen support has a cylindrical outer shell 42 made of carbon fibre, which is also divided into two parts 42a, 42b.

[0125] Figure 4a shows the specimen support in a closed position and Figure 4b shows the specimen support in an open position with a specimen 46 received within the specimen support 20. The specimen support 20 is in the form of a resilient compressible foam. Flexible As shown in FIG. 4b, Flexible a first portion of the reactive material 44 associated with a first portion of the analyte support; Flexible A second portion 44b of the reactive material 44 is associated with a second portion of the analyte support.

[0126] Flexible The material 44 is Flexible The porous material 44 is retained by the outer shell 42 filling the interior space defined by the outer shell 42. In the closed position, the surface of the specimen 46 received within the specimen support 20 is Flexible contacting the first and second portions of the conductive material, thereby Flexible The material is compressed and the purpose is Flexible The objective of the present invention is to ensure that the material assumes the same shape as the specimen. Flexible The elastic material then applies a clamping force to the specimen sufficient to hold the specimen in a fixed position relative to the outer shell. The specimen is immobilized within the specimen support 20.

[0127] FIG. 5 is a schematic cross-sectional view showing the specimen support 20 in the closed position, with the specimen 46 Flexible received between the first and second portions 44a, 44b of the Flexible specimen 46 is surrounded by the

[0128] As shown in FIGS. 4 and 5, the specimen support further has two mechanical interfaces 48, 49. These mechanical interfaces take the form of protrusions. The first mechanical interface 48 allows the specimen support to be coupled to the rotary drive device 28. The second mechanical interface 49 allows the specimen support 20 to be coupled to another axle or protrusion of the frame 22 of the specimen support positioning assembly. The manner of coupling the first mechanical interface 48 to the rotary drive device 28 will be described in detail below.

[0129] It is preferable that two or more specimens 46 are received in the specimen support 20 and clamped by the Flexible specimen 46 is positioned at intervals along the axis of rotation. By providing a number of specimens in the specimen support 20, the inspection operation can be carried out for each specimen, in which case the technician does not need to replace the specimen and restart the inspection system between specimens. In other words, the inspection of a number of specimens can be automated.

[0130] FIG. 7 is an enlarged view of the rotary drive device 28 with the housing removed. The rotary drive device 28 has an electric motor 47 coupled to a drive gear 50. The drive gear 50 is connected to a first backlash prevention gear 51, and the first backlash prevention gear 51 is coupled to a second backlash prevention gear 52. The second backlash prevention gear 52 drives another gear 54 coupled to the specimen support. Thus, rotation of the drive gear 50 causes rotation of the drive gear 52, and thus rotation of the specimen support 20. The backlash prevention gears 51, 52 reduce or eliminate backlash to ensure stable rotation of the specimen support 20.

[0131] Due to the structure of the rotary drive device 27 shown in FIG. 7, the electric motor 47 can be offset from the rotation axis of the specimen support 20. This offset allows the rotary drive device 28 to extend above the height position of the frame 22 (shown in FIG. 6), and thus a large electric motor 47 or a large gear device can be used without increasing the minimum gap between the specimen support 20 and the base 19. If the offset is not made, the rotary drive device 28 would also extend below the height position of the frame, thus increasing the minimum distance between the X-ray source and the base 19. This would result in a decrease in the maximum magnification achievable using the X-ray inspection system.

[0132] FIG. 8 shows the joint between the specimen support 20 and the rotary drive device 28. The first mechanical interface 48 of the specimen support 20 is connected to the protrusion 56 of the rotary drive device 28 using a C-clamp 58. The C-clamp 58 fixes the specimen support to the protrusion 56. In use, the protrusion 56 rotates as a result of being driven by the electric motor 47 as described above in connection with FIG. 7. The specimen support 20 is fixed to the protrusion in such a way that rotation of the protrusion rotates the specimen support 20 about the axis of rotation passing through the center of the cylindrical specimen support 20. Thereby, the specimen support 20 does not cause "wobbling (vibration)" when it is rotating, and as a result, the distance between the outer shell 42 and the base 19 remains constant. A similar C-clamp structure is used to clamp the second mechanical interface 49 to a second protrusion on the rotatable frame. This is not shown in the drawings.

[0133] Thanks to the C-clamp structure, advantageously, the user can remove the specimen support and use a different specimen support in its place. A simple detaching mechanism including a spring-loaded bolt for releasably fixing the specimen support can be used in place of the C-clamp. Similarly, this allows the user to remove the specimen support and use a different specimen support in its place. This is not shown in the drawings.

[0134] FIG. 9 shows an embodiment in which the specimen support 20 is replaced with a different specimen support 52. The specimen support 52 has a larger diameter than the specimen support 20. The diameter of the specimen support 20 is 50 millimeters, and the diameter of the specimen support 52 is 127 millimeters. These dimensions are exemplary. Specimen supports with a wider range of diameters can be used. Specifically, the user can select a specimen support of an appropriate size according to the size of the specimen to be inspected. Generally, it is beneficial to use the smallest possible diameter of the specimen support while ensuring that the specimen is completely contained within and surrounded by the specimen. This is because the smaller the specimen support, the closer the specimen can be brought to the X-ray source, and thus the higher the achievable magnification.

[0135] FIG. 10 shows a kit including three specimen supports 60, 62, 64 of different sizes and the specimen support positioning assembly 18 described above. Each of the specimen supports can be removably coupled to the specimen support positioning assembly as described above.

[0136] FIG. 11 is a flowchart schematically explaining a method of using the X-ray inspection system shown in FIG. 1.

[0137] In step 100, the specimen is clamped within the specimen support 20, the specimen support 20 is coupled to the specimen support positioning assembly 18, and the specimen support positioning assembly 18 is supported by the stage 14 of the X-ray inspection system.

[0138] The step of clamping the specimen 46 includes moving the first portion 20a of the specimen support about a hinge relative to the second portion 20b so that the specimen support is in the open position shown in the figure. Next, the specimen 46 is Flexible placed within the specimen support on the first portion of the conductive material 44a. This is shown in FIG. 3B. Of course, any number of specimens can be placed within the specimen support at intervals along the length of the specimen support 20. FIG. 5 shows three specimens FlexibleAn example disposed on the first portion 44a of the property material is shown.

[0139] Once the specimen is placed in the specimen support, move the first portion 20a of the specimen support relative to the second portion 20b in the closed position. This is shown in FIGS. 3a and 4. In the closed position, the surface of the specimen 46 received in the specimen support 20 Flexible is brought into contact with the first and second portions of the property material, thereby Flexible compressing the property material, the purpose of which is to Flexible make the property material take the same shape as the specimen. Flexible The property material then applies a clamping force to the specimen sufficient to hold the specimen in a fixed position relative to the outer shell 42. Fix the specimen in a fixed position within the specimen support. Fix the specimen in the specimen support.

[0140] In step 102, position the specimen support between the X-ray source and the X-ray detector. This step preferably includes using a controller to move the stage 14 under the control of a suitable motor in the X, Y, and Z directions to position the specimen support positioning assembly 18 as a whole between the X-ray source and the X-ray detector, provided that the specimen support positioning assembly 18 is not already positioned at this location. The specimen support of the specimen support positioning assembly 18 can also be adjusted in this step. For example, the position of the frame 22 relative to the base 19 can be adjusted. Using the prop 30, the frame 22 can be held in a predetermined position relative to the base 19. For example, other fine adjustments can be made by turning the screw 39.

[0141] In step 104, an image of the specimen (the first image) is recorded. The image of the specimen is recorded by the X-ray detector 12 and received by the controller. The image is a two-dimensional image of a cross-section of the specimen 46. The magnification of the image of the specimen is determined by the distance between the specimen and the X-ray source 10. Thus, if a large-magnification image is desired, this distance should be minimized. This can be achieved in step 100 by bringing the stage 14 as close as possible to the X-ray source 10 in the Z direction and reducing the gap between the specimen support 20 and the base 19 of the specimen support positioning assembly 18 to be as small as possible, preferably less than 1 millimeter, and more preferably less than 0.5 millimeter.

[0142] In step 106, the specimen support 20 is rotated with respect to the X-ray source 10. This rotation is achieved using the rotation drive device 28. The electric motor 47 of the rotation drive device is controlled by the controller.

[0143] In step 108, a second image of the specimen is recorded. Also in this case, this image is recorded by the X-ray detector 12 and received by the controller.

[0144] Steps 106 and 108 are repeatedly performed until finally the specimen can be rotated 360°. In other words, steps 106 and 108 are repeatedly performed until finally the specimen support is returned to the position where the first image was recorded. Thus, the controller receives a series of two-dimensional images captured by the X-ray detector throughout the X-ray inspection process.

[0145] In step 110, computed tomography calculations are performed using the recorded X-ray images to generate a three-dimensional reconstructed image of the specimen. The image processor of the controller is used to perform the computed tomography calculations.

[0146] The larger the number of images, and thus the larger the number of imaging positions of the specimen in the specimen support, the better the three-dimensional reconstructed image becomes. Typically, at least 16 images of the specimen are required, and thus steps 106, 108 are repeated at least 14 times. For example, the method may include steps of repeating steps 106, 108 14 times, 30 times, 62 times, 126 times, 254 times, 510 times or 718 times. Preferably, the rotational force between each image is equal.

[0147] As a result of the specimen 46 being clamped in the specimen support, the specimen 36 is held in a fixed position within the specimen support when the specimen support is rotated to each of the imaging positions. In other words, the movement of the specimen relative to the specimen support is blocked. As a result, an accurate three-dimensional reconstructed image of the specimen is created.

[0148] When clamping a number of specimens in the specimen support, it may only be possible to image one of the specimens at a time. In this case, after creating a three-dimensional reconstructed image of the first specimen, the method is repeated for the second specimen, and the method includes positioning the clamped second specimen between the X-ray source and the X-ray detector by moving the stage 14. This process can be automated, whereby a number of specimens can be automatically inspected, in which case there is no need to exchange specimens between imaging operations.

[0149] The specimen is Flexible adjustably clamped by a sex material and can be easily removed from the specimen support after the imaging operation of the specimen is completed. The method can then be repeated using different specimens in the specimen support.

[0150] As described above, the specimen support 20 is removably coupled to the specimen support positioning assembly 18, whereby different specimen supports can be coupled to the specimen support positioning assembly 18. In particular, different diameter specimen supports can be coupled to the specimen support positioning assembly 18 in this way. Therefore, step 100 may preferably include the step of selecting an appropriately sized specimen support for the specimen being examined. The smaller the specimen support, the closer the specimen can be positioned to the X-ray source, and thus the higher the achievable magnification. However, a specimen support large enough to completely surround the specimen for examination should be selected.

Claims

1. 1. An x-ray inspection system comprising: An X-ray source; An X-ray detector; a specimen support including a flexible portion; a specimen support positioning assembly configured to position the specimen support between the X-ray source and the X-ray detector; the specimen support is configured to releasably clamp a specimen for testing in a fixed position relative to the specimen support and is configured such that, in use, at least one surface of the specimen is in contact with the flexible portion; 11. An X-ray inspection system, wherein the specimen support comprises an outer shell, and wherein, in use, i) the outer shell completely surrounds the flexible portion, and ii) the specimen is completely received within the outer shell.

2. The x-ray inspection system of claim 1 , wherein the flexible portion is a resilient material.

3. The X-ray inspection system of claim 1 or 2, wherein the flexible portion is a compressible foam.

4. 3. An X-ray inspection system according to claim 1 or 2, wherein the specimen is surrounded by the flexible portion and, in use, all sides of the specimen are contacted and supported by the flexible portion.

5. The X-ray inspection system of claim 1 or 2, wherein the outer shell is made of a material that is stiffer than the flexible portion.

6. 3. The X-ray inspection system of claim 1 or 2, wherein the outer shell is made of carbon fiber or aramid fiber.

7. 3. The X-ray inspection system of claim 1, wherein the specimen support has a first portion and a second portion, the first portion being movable relative to the second portion between an open position in which the specimen support can accept the specimen and a closed position in which the specimen support clamps the specimen between the first portion and the second portion of the specimen support.

8. 3. The X-ray inspection system of claim 1, wherein the specimen support positioning assembly includes a base and a frame attached to the base, the specimen support being coupled to the frame.

9. The x-ray inspection system of claim 8 , wherein the frame is movable about a fixed pivot relative to the base.

10. The X-ray inspection system of claim 1 or 2, further comprising an X-ray filter disposed between the X-ray source and the X-ray detector.

11. 3. The X-ray inspection system of claim 1, wherein the specimen support positioning assembly includes a rotational drive configured to rotate the specimen support about an axis of rotation.

12. 3. The X-ray inspection system of claim 1, further comprising a vertical positioning mechanism for moving the specimen support vertically towards or away from the X-ray source.

13. 3. The X-ray inspection system of claim 1, further comprising a first horizontal positioning mechanism for moving the specimen support in a first horizontal direction and a second horizontal positioning mechanism for moving the specimen support in a second horizontal direction.

14. 1. An x-ray imaging accessory for an x-ray inspection system, comprising: a specimen support including a flexible portion; a specimen support positioning assembly including a rotational drive configured to rotate the specimen support about an axis of rotation; the specimen support is configured to releasably clamp a specimen for testing in a fixed position relative to the specimen support and is configured such that, in use, at least one surface of the specimen is in contact with the flexible portion; An X-ray imaging accessory, wherein the specimen support comprises an outer shell, and wherein, in use, i) the outer shell completely surrounds the flexible portion, and ii) the specimen is completely received within the outer shell.

15. The x-ray imaging accessory of claim 14 , wherein the flexible portion is a resilient material.

16. 16. An X-ray imaging accessory as claimed in claim 14 or 15, wherein the outer shell is made of a stiffer material than the flexible portion.

17. 16. An X-ray imaging accessory according to claim 14 or 15, wherein the specimen support positioning assembly includes a base and a frame attached to the base, the specimen support being coupled to the frame.

18. 20. An X-ray imaging accessory as claimed in claim 17, wherein the frame is movable about a fixed pivot relative to the base.

19. 1. A specimen support for an X-ray inspection system, the specimen support comprising: A flexible portion; a mechanical interface coupleable to a rotary drive; the specimen support is configured to releasably clamp a specimen for testing in a fixed position relative to the specimen support and is configured such that, in use, at least one surface of the specimen is in contact with the flexible portion; The analyte support comprises an outer shell, wherein in use i) the outer shell completely surrounds the flexible portion, and ii) the analyte is completely received within the outer shell.

20. 20. The specimen support of claim 19, wherein the mechanical interface comprises a protrusion or axle connectable to the rotational drive.

21. 21. A kit for an X-ray inspection system comprising a plurality of specimen supports, each of which is a specimen support according to claim 19 or 20, The kit, wherein each of the plurality of specimen supports has a different diameter.

22. 22. The kit of claim 21, further comprising a specimen support positioning assembly including a rotational drive, each of said plurality of specimen supports being removably coupleable to said rotational drive.

23. 1. A method of using an X-ray inspection system including an X-ray source, an X-ray detector, and a specimen support including a flexible portion and an outer shell, the method comprising: clamping a specimen to be tested within the specimen support such that the specimen is in a fixed position relative to the specimen support and at least one surface of the specimen is in contact with the flexible portion, such that i) the outer shell completely surrounds the flexible portion and ii) the specimen is completely received within the outer shell; positioning the specimen support between the X-ray source and the X-ray detector; recording an x-ray image of the specimen; rotating the specimen support relative to the X-ray source; and recording a second x-ray image of the specimen.

24. The specimen support has a first portion and a second portion, the first portion being movable relative to the second portion, and the step of clamping the specimen to be examined comprises: moving the first portion of the specimen support relative to the second portion of the specimen support and into an open position; placing a specimen within the specimen support; and moving the first portion of the specimen support relative to the second portion of the specimen support to a closed position in which the specimen is clamped by the specimen support.

25. The X-ray inspection system of claim 1, wherein the flexible portion is configured to clamp the specimen such that during use, the flexible portion completely surrounds the specimen and each side of the specimen contacts the flexible portion.

26. An X-ray imaging accessory as described in claim 14, wherein the flexible portion is configured to clamp the specimen such that during use, the flexible portion completely surrounds the specimen and each side of the specimen contacts the flexible portion.

27. The X-ray imaging accessory of claim 15, wherein the flexible portion is a compressible foam.

28. The X-ray imaging accessory of claim 16, wherein the outer shell is made of carbon fiber, aramid fiber, PEEK, or metal.

29. A specimen support as described in claim 19, wherein the flexible portion is configured to clamp the specimen such that during use, the flexible portion completely surrounds the specimen and each side of the specimen contacts the flexible portion.

30. The method of claim 23, wherein when the specimen is clamped, the flexible portion completely surrounds and clamps the flexible portion such that each side of the specimen contacts the flexible portion.

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