Substrate handling in modular polishing system with single substrate cleaning chamber

Abstract

To provide a polishing system and a cleaning system, causing no undesirable reintroduction of contaminants to the surfaces of a cleaned and dried substrate before the substrate is removed from the polishing system.SOLUTION: A modular polishing (CMP) system 200a used in the manufacturing of semiconductor devices includes a first portion 205 having a plurality of polishing stations disposed therein, and a second portion 220 coupled to the first portion, the second portion including a substrate cleaning system 232. The substrate cleaning system includes substrate cleaning modules 230, 234-236 each including a chamber housing which defines a chamber volume. The CMP system further includes substrate handlers 224, 226a located in the second portion. The substrate handler 226a is positioned to transfer substrates 180 to or from the wet-in / dry-out substrate cleaning module through one or more openings formed in one or more sidewalls of the chamber housing.SELECTED DRAWING: Figure 2A

Description

[Technical field]

[0001]

[0001] The embodiments described herein relate generally to equipment used in the manufacture of electronic devices, and more specifically to systems used to clean and dry substrate surfaces following chemical mechanical polishing (CMP) of the substrate in a semiconductor device manufacturing process. [Background technology]

[0002] Chemical mechanical polishing (CMP) is commonly used in the manufacture of high density integrated circuits to planarize or polish a layer of material deposited on a substrate. In a typical CMP process, the substrate is held by a carrier head that presses the backside of the substrate against a rotating polishing pad in the presence of a polishing fluid. The combination of chemical and mechanical action caused by the polishing fluid and the relative motion of the substrate and the polishing pad removes material from the entire surface of the substrate material layer that contacts the polishing pad. Typically, after one or more CMP processes are completed, the polished substrate is further processed in one or more post-CMP substrate processing steps, such as one or a combination of cleaning, inspection, and measurement steps. Once the post-CMP steps are completed, the substrate can then be sent from the CMP processing area to the next device manufacturing process, such as a lithography, etching, or deposition process.

[0003]

[0003] To conserve valuable manufacturing floor space and reduce labor costs, CMP systems generally include a first part (e.g., a backside part) that includes multiple polishing stations, and a second part (e.g., a frontside part) integrated with the first part to form a single polishing system. The first part may include one or a combination of a post-CMP substrate cleaning system, a substrate surface inspection station, and / or a pre-CMP or post-CMP metrology station. The post-CMP cleaning system is used to clean and dry the surface of the substrate following the polishing process. Typically, the substrate is moved between modules of the post-CMP system using one or more substrate handlers (e.g., robots).

[0004]

[0004] Unfortunately, undesirable contaminants, such as residual water, polishing fluids, polishing by-products, and cleaning fluids, are often left behind and / or are often reintroduced to the substrate handling surfaces of substrate handlers. Cross-contamination and / or reintroduction of contaminants to the substrate handling surfaces can result in the reintroduction of undesirable contaminants to the surfaces of substrates that have been cleaned and dried before the substrates are removed from the polishing system. Such contamination of the working surfaces of the substrates can adversely affect device performance and / or cause device failure, inhibiting the yield of usable devices formed on the substrates.

[0005] Therefore, what is needed in the art is a cleaning system and method that overcomes the above problems. Summary of the Invention

[0006]

[0006] Embodiments of the present disclosure generally relate to chemical mechanical polishing (CMP) systems, including an integrated cleaning system used to clean and dry a substrate surface after polishing the substrate, and associated methods. In one embodiment, the polishing system includes a first portion having a plurality of polishing stations disposed therein and a second portion coupled to the first portion including a substrate cleaning system. The substrate cleaning system includes a wet-in / dry-out substrate cleaning module including a chamber housing defining a chamber region. The polishing system further includes a substrate handler located in the second portion, the substrate handler positioned to transfer substrates into and out of the wet-in / dry-out substrate cleaning module through one or more openings formed in one or more sidewalls of the chamber housing.

[0007]

[0007] In order that the above-mentioned features of the present disclosure may be understood in detail, the present disclosure summarized above will now be more particularly described with reference to embodiments, some of which are illustrated in the accompanying drawings. It should be noted, however, that the accompanying drawings merely illustrate exemplary embodiments and therefore should not be considered as limiting the scope thereof, as other equally effective embodiments may be permitted. [Brief description of the drawings]

[0008] [Figure 1] It is a schematic side view of a polishing station according to an embodiment, and can be used as one or more polishing stations among a plurality of polishing modules of the modular polishing system described in this specification. [Figure 2A] It is a schematic overall cross-sectional view of a modular polishing system according to an embodiment. [Figure 2B] It is a schematic perspective view of the modular polishing system of FIG. 2A. [Figure 2C] It is a schematic top view of a modular polishing system according to another embodiment. [Figure 2D] It is a schematic side view of a horizontal pre-cleaning (HPC) module according to an embodiment, which can be used with the modular polishing system of FIGS. 2A to 2C. [Diagram 3] A to B are schematic perspective views of an embodiment of a single substrate cleaning (SSC) module that can be used with the modular system polishing system of FIGS. 2A to 2B. [Figure 4] A is a schematic top view of one of the substrate handlers shown in FIGS. 2A to 2B, and B is a top view of a substrate handler according to another embodiment that can be used with the modular system polishing system of FIGS. 2A to 2B. [Diagram 5] A to B are schematic perspective views of an alternative embodiment of the wet cleaning chamber shown in FIG. 3A. [Figure 6A] It is a schematic overall cross-sectional view of an alternative embodiment of a single substrate cleaning (SSC) module that can be used with the modular polishing system of FIGS. 2A to 2B. [Figure 6B] It is a schematic overall cross-sectional view of an alternative embodiment of a single substrate cleaning (SSC) module that can be used with the modular polishing system of FIGS. 2A to 2B. [Figure 6C] It is a schematic perspective view of the outer portion of the chamber of FIG. 6A according to an embodiment.

DETAILED DESCRIPTION OF THE INVENTION

[0009]

[0019] To facilitate understanding, wherever possible, the same reference numerals have been used to designate identical elements common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.

[0010]

[0020] FIELD OF THE DISCLOSURE Embodiments of the present disclosure relate generally to chemical mechanical polishing (CMP) systems used in the semiconductor device manufacturing industry. More specifically, embodiments herein relate to an improved cleaning module for a CMP system.

[0011]

[0021] Typically, individual cleaning modules of the cleaning system are used to clean and dry the surface of the polished substrate. A typical cleaning system includes multiple wet cleaning stations, such as one or more buffing stations, one or more spray stations, and one or more brush boxes, and a dry station. The polished substrate is transferred from the polishing station located in a first part of the polishing system to the cleaning system located in a second part of the polishing system using a substrate handler. Typically, the polished substrate has polishing liquid, water, and other polishing contaminants remaining on its surface and is therefore transferred from the first part to the second part in a "wet" state. The substrate handler used to transfer the substrate is configured to handle the substrate in a wet state and is commonly known as a "wet" substrate handler or robot. Once in the front part, the substrate is transferred between the individual cleaning modules of the multiple cleaning modules using one or more wet substrate handlers before being transferred to the dry station. The substrate is transferred to the dry station using a wet substrate handler and removed from the dry station using another substrate handler configured to handle dry substrates, i.e., a "dry" substrate handler.

[0012]

[0022] 1 is a schematic side view of an exemplary polishing station 100 that may be used as a polishing station for one or more of the polishing modules of the modular polishing system described herein. Herein, the polishing station 100 features a platen 104 having a polishing pad 102 fixed thereto and a substrate carrier 106. The substrate carrier 106 faces the platen 104 and the polishing pad 102 mounted thereon. The substrate carrier 106 is used to press the material surface of a substrate 180 disposed therein against the polishing surface of the polishing pad 102 while rotating about a carrier axis 110. Typically, the platen 104 rotates about a platen axis 112 while the rotating substrate carrier 106 sweeps back and forth from the inner diameter to the outer diameter of the platen 104, partially reducing uneven wear of the polishing pad 102.

[0013]

[0023] The polishing station 100 further includes a fluid delivery arm 114 and a pad conditioner assembly 116. The fluid delivery arm 114 is positioned over the polishing pad 102 and is used to deliver a polishing fluid, such as a polishing slurry having an abrasive suspended therein, to the surface of the polishing pad 102. Typically, the polishing fluid includes a pH adjuster and other chemically active components, such as an oxidizer, to enable chemical mechanical polishing of the material surface of the substrate 180. The pad conditioner assembly 116 is used to condition the polishing pad 102 before, after, or during polishing of the substrate 180 by pressing a fixed abrasive conditioning disk 118 against the surface of the polishing pad 102. Pressing the conditioning disk 118 against the polishing pad 102 includes rotating the conditioning disk 118 about an axis 120 and sweeping the conditioning disk 118 from the inner diameter of the platen 104 to the outer diameter of the platen 104. The conditioning disk 118 is used to polish and regenerate the polishing surface of the polishing pad 102 and to remove polishing by-products or other debris from the polishing surface.

[0014]

[0024] FIG 2A is a schematic overall cross-sectional view of a modular polishing system 200 having an integrated cleaning system 232 formed in accordance with embodiments described herein. FIG 2B is a schematic perspective view of the modular polishing system of FIG 2A. As used herein, the modular polishing system 200 is characterized by a first portion 205 and a second portion 220 coupled to the first portion 205. The first portion 205 includes multiple polishing stations 100a,b, such as the polishing station 100 described in FIG 1, which are not shown here to reduce visual clutter.

[0015]

[0025] The second section 220 includes a number of system loading stations 222, one or more substrate handlers 224, 226, one or more metrology stations 228, one or more location specific polishing (LSP) modules 229 (FIG. 2B), and a substrate cleaning system 232. The one or more substrate handlers 224, 226, alone or in combination, are used to transfer the substrate 180 between the first section 205 and the second section 220, move the substrate within the second section 220, including between its various modules, stations, and systems, and transfer the substrate to and from the system loading station 222. The LSP module 229 is configured to polish only a portion of the substrate surface, typically with a polishing member (not shown) having a surface area smaller than the surface area of ​​the substrate to be polished. The LSP module 229 is often used to touch up the substrate after it has been polished in the polishing module, e.g., to remove additional material from a relatively small portion of the substrate.

[0016]

[0026] The substrate cleaning system 232 facilitates removing residual polishing fluid and polishing by-products from the surface of the substrate 180 after it has been polished. As used herein, the substrate cleaning system 232 includes one or more first cleaning modules, such as one or more horizontal pre-clean (HPC) modules 230 (further described in FIG. 2D), one or more second cleaning modules 234, such as a brush box and / or a spray station, and one or more third cleaning modules, such as one or more single substrate cleaning (SSC) modules 236 (three shown). In some embodiments, the substrate cleaning system 232 further includes one or more fourth cleaning modules 235 configured to clean polishing fluid residues from the surface of the substrate using a solution of sulfuric acid (H2SO4) and hydrogen peroxide (H2O2).

[0017]

[0027] In some embodiments, as shown in FIG. 2B, the multiple SSC modules 236 are arranged in a vertically stacked arrangement. The stacked arrangement of the SSC modules 236 facilitates simultaneous processing of multiple individual substrates disposed in each of the SSC modules 236. Each of the SSC modules 236 is configured to both clean a substrate with one or more "wet" cleaning and / or rinsing fluids and subsequently dry the substrate, thus eliminating the need for time-consuming substrate transfer handling operations between the individual wet cleaning and drying stations of a conventional multi-station cleaning system. The use of multiple SSC modules 236 in a vertically stacked arrangement advantageously increases the substrate processing throughput density of the modular polishing system 200 compared to conventional polishing systems.

[0018]

[0028] As used herein, the operations of the modular polishing system 200 are directed by a system controller 270. The system controller 270 includes a programmable central processing unit (CPU) 271 operable with memory 272 (e.g., non-volatile memory) and support circuits 273. The support circuits 273 are conventionally coupled to the CPU 271 and include cache, clock circuits, input / output subsystems, power supplies, etc., and combinations thereof coupled to the various components of the modular polishing system 200 to facilitate its control. The CPU 271 is one of any type of general-purpose computer processor used in industrial environments, such as a programmable logic controller (PLC), to control the various components and sub-processors of the processing system. The memory 272 coupled to the CPU 271 is non-transient and is typically one or more of readily available memory, such as random access memory (RAM), read-only memory (ROM), a floppy disk drive, a hard disk, or any other form of digital storage, local or remote.

[0019]

[0029] Typically, the memory 272 is in the form of a non-transitory computer-readable storage medium (e.g., non-volatile memory) that contains instructions that, when executed by the CPU 271, facilitate the operation of the modular polishing system 200. The instructions in the memory 272 are in the form of a program product, such as a program that performs the methods of the present disclosure. The program code may conform to any one of a number of different programming languages. In one example, the present disclosure may be implemented as a program product stored on a computer-readable storage medium for use with a computer system. The program(s) of the program product define the functions of the embodiments (including the methods described herein).

[0020]

[0030] Exemplary non-transitory computer readable storage media include, but are not limited to, (i) non-writable storage media in which information may be permanently stored (e.g., a CD-ROM disk readable by a CD-ROM drive, a flash memory, a ROM chip, or any type of solid-state non-volatile semiconductor memory device, e.g., a read-only memory device in a computer such as a solid-state drive (SSD)), and (ii) a writable storage medium in which changeable information is stored (e.g., a floppy disk in a diskette drive or hard disk drive or any type of solid-state random access semiconductor memory, etc.). Such computer readable storage media, when carrying computer readable instructions that direct the functions of the methods described herein, are embodiments of the present disclosure. In some embodiments, the methods described herein, or portions thereof, are performed by one or more application specific integrated circuits (ASICs), field programmable gate arrays (FPGAs), or other types of hardware implementations. In some other embodiments, the substrate processing and / or handling methods described herein are performed by a combination of software routines, ASIC(s), FPGAs, and / or other types of hardware implementations. One or more system controllers 270 may be used with one or any combination of the various modular polishing systems described herein and / or their individual polishing modules.

[0021]

[0031] In some embodiments, as shown in FIG. 2C, the individual SSC modules 236 are positioned on opposite sides of the second portion 220 with one or more substrate handlers 226 positioned therebetween. In some embodiments, the modular polishing system 200 further includes one or more substrate holding stations 225a-b positioned between the substrate handler 224 and the one or more substrate handlers 226, between the individual substrate handlers 226, and / or between different modules and systems of the second portion 220, such as holding station 225b. In some embodiments, the modular polishing system 200 includes a substrate holding station 225a positioned between the first portion 205 and the second portion 220 to facilitate staging and transport of substrates therebetween. As used herein, the substrate holding stations 225a-b are each configured to hold multiple substrates and may be used for wet or dry substrate staging to provide increased flexibility in substrate handling steps and / or substrate processing sequences.

[0022]

[0032] In some embodiments, the modular polishing system 200 further includes one or more first load lock chambers 240A disposed between the SSC module 236 and the substrate handler 224 and / or one or more second load lock chambers 240B disposed between the respective substrate handlers 226A,B and between the "wet" substrate processing areas. Typically, each of the load lock chambers 240A includes a chamber body or chamber walls defining a load lock area having a holding station 225b disposed therein. Access to the load lock area from the substrate handling area 221 in which the substrate handler 224 resides, the SSC module 236, and / or the area in which the substrate handler 226A resides is provided through openings disposed therebetween through the respective chamber walls, each opening being sealable by a door 241.

[0023]

[0033] Typically, substrates are transferred in and out of the load lock chambers 240A and 240B by opening and closing each door 241 individually in a sequence that ensures that no more than one of the doors 241 to the load lock regions is open at one time. Thus, the load lock chambers 240A-B may be used to fluidly isolate the atmospheres of the individual modules and / or portions of the polishing system 200 from one another and prevent and / or substantially reduce the flow of contaminants therebetween. Thus, clean, dry substrates processed in the SSC module 236 may be transferred from the SSC module 236 to the load lock chamber 240A and from the load lock chamber 240A to the substrate handling area 221 without exposure to the atmosphere of the "wet" substrate processing region 220B.

[0024]

[0034] In some embodiments, clean dry air (CDA) or an inert gas (e.g., N2) is supplied to the load lock region using a gas source 242 fluidly coupled thereto. In some embodiments, the atmosphere in the substrate handling area 221 is maintained at a higher pressure than the first portion 205, and the load lock chambers 240A-B and the SSC module 236 are maintained at a pressure therebetween. Maintaining a gradient from higher to lower pressure from the substrate handling area 221 through the chambers disposed therebetween to the first portion 205 ensures that air flow in the system moves from the substrate handling area 221 to the first portion 205 by opening and closing the doors of the various chambers and modules therebetween. Thus, the pressure gradient prevents undesired contaminants from flowing from the first portion 205, the processing region 220B, and the SSC module 236 into the load lock chambers 240A-B and / or into the substrate processing region 221. In one example, the pressure drop between sequentially positioned processing chambers or processing regions, such as between the SSC module 236 and the load lock chambers 240A-B, or between the substrate handling area 221 and the load lock chambers 240A-B, is about 0.1 to about 5 inches of water.

[0025]

[0035] In some embodiments, the load lock chamber may remain closed during the substrate transfer process until the relative humidity on one or both sides of the door 241 falls below a predetermined reference relative humidity (RH) value. The RH may be lowered by initiating a flow of an appropriate amount of inert gas from an inert gas supply to a desired area on one side of the door 241. For example, it may be desirable to initiate a flow of an appropriate amount of inert gas into the load lock chamber 240 (FIG. 2C or FIG. 6B) before opening the door 241 separating the load lock chamber 240 and the SSC module 236, 600b. Alternatively, for example, it may be desirable to initiate a flow of an appropriate amount of inert gas into the SSC module 236, 600b before opening the door 241 separating the load lock chamber 240 and the SSC module 236, 600b to lower the RH therein, thereby forming a desired pressure gradient between the chambers.

[0026]

[0036] The arrangement of the load lock chambers 240A,B, substrate handlers 226A,B, and single substrate cleaning SSC module 236 in FIG. 2C allows for a defined substrate handling path (shown as sequentially numbered arrows 1-17) that advantageously reduces exposure between wet and dry substrates and substrate handling surfaces, reducing cross-contamination events that may otherwise be associated therewith.

[0027]

[0037] An individual HPC module 230 is shown in FIG. 2D and includes a chamber body 281 defining a chamber region 282, a cleaning station 283, a pad carrier arm 284, and a pad conditioner station 285 arranged together in the chamber region 282. The cleaning station 283 includes a vacuum chuck 291 used to support the substrate 180 in a horizontal orientation and rotate the substrate 180 about axis A, and a fluid dispensing arm 288 for dispensing cleaning fluid onto the surface of the substrate 180. The pad carrier arm 284 is rotatable about axis B and sweeps a cleaning pad 286 secured to a pad carrier 287 across the surface of the substrate 180 and exerts a down force thereon. As used herein, the pad carrier arm 284 is configured to move the pad carrier 287, and thus the cleaning pad 286, between the substrate 180 and the pad conditioner station 285. The pad conditioner station 285 includes a pad conditioner 289, e.g., a brush or abrasive disk, that is used to clean and regenerate the surface of the cleaning pad 286. The horizontal orientation of the vacuum chuck 291 and the substrate 180 secured thereon allows the cleaning pad 286 to apply a greater force to the substrate 180, and thus more efficiently clean the polishing fluid by-products, e.g., polishing fluid residue, that are difficult to remove from its surface. Herein, the cleaning fluid is collected using a drain 293 disposed through the base 290 of the chamber body 281 such that the HPC module 230 is positioned at the top of the second portion 220, below which other modules or systems may be advantageously positioned.

[0028]

[0038] 3A-3B are schematic isometric views of respective single substrate cleaning (SSC) modules 300a,b according to some embodiments that may be used as part of or in place of the SSC module 236 shown in FIGS. 2A-2B.

[0029]

[0039] As used herein, each individual SSC module 300a,b includes a chamber housing 303 defining a chamber region 340 and a cleaning station (not shown) disposed in the chamber region 340, such as one of the cleaning stations shown in Figures 6A-6B. Generally, the SSC modules 300a,b are configured for both wet processing of a substrate to remove residual polishing contaminants therefrom, for example by using one or more cleaning fluids, and for subsequently drying the substrate. Thus, each of the SSC modules 300a,b provides an individual single-substrate wet-in dry-out cleaning system.

[0030]

[0040] As used herein, each of the SSC modules 300a,b features one or more slot-like openings, e.g., a first opening 301 and an optional second opening 302, disposed through one or more side walls 310 of the chamber housing 303. The first and second openings 301, 302 provide substrate handler access to the chamber region 340, thus facilitating substrate transfer to and from the cleaning station. For example, in FIG. 3A, the SSC module 300a includes a first opening 301 disposed through one of the side walls 310 and an optional second opening 302 disposed in the same side wall 310 as the first opening 301. As shown in FIG. 3A, the second opening 302 is located in a portion of the side wall 310 below (in the Y direction) the first opening 301. In some embodiments, a "wet" substrate to be processed is transferred into the chamber region 340 through the second opening 302, and a processed "dry" substrate is transferred out of the chamber region 340 through the first opening 301. Alternatively, the first opening 301 and the second opening 302 may be disposed through different sidewalls, for example, as shown in FIG. 3B, the first opening 301 is disposed through a first sidewall 320 of the plurality of sidewalls 310, and the second opening 302 is disposed through a second sidewall 330 of the plurality of sidewalls 310. In embodiments where the first and second openings 301, 302 are disposed through different sidewalls, the first and second openings 301, 302 may be positioned at different or substantially the same positions in the Y direction.

[0031]

[0041] In Fig. 3B, the first and second side walls 320, 330 are located on opposite sides of the SSC module 300b. In other embodiments, the first and second openings 301, 302 may be located through respective side walls that are perpendicular to one another. Advantageously, the first opening 301 and the second opening 302 may be located on different side walls 320, 330 and / or on the same side wall 310 (Fig. 3A) and each opening may be dedicated to the transfer of wet or dry substrates, which desirably minimizes cross-contamination between wet substrates entering the SSC module 236 and dry substrates exiting the SSC module 236. The first and second openings 301, 302 may be positioned at substantially the same or different vertical heights relative to the floor, i.e., in the Y direction.

[0032]

[0042] 4A and 4B are schematic top views of substrate handlers 226a and 226b that may be used as one or more of the substrate handlers 226 shown in FIGS. 2A-2C. The substrate handlers 226a,b are configured to move substrates in the X, Y, and Z directions and, in some embodiments, change the orientation of the substrate from a vertical orientation to a horizontal orientation or vice versa to facilitate transfer of the substrate between the various modules and systems of the modular polishing system 200. Herein, the substrate handlers 226a,b include one or more arms 401, each having an end effector 403 (shown in phantom) coupled thereto. In FIG. 4A, the substrate handler 226a features a single end effector 403 that may be used both to transfer wet substrates into and remove dry substrates from the SSC modules 300a,b.

[0033]

[0043] In Figure 4B, the substrate handler 226b features first and second arms 401a,b and corresponding first and second end effectors 403a,b (shown in phantom) coupled thereto. Herein, the first end effector 403a is dedicated to handling wet substrates, i.e., substrates being transferred into the SSC modules 300a,b, and the second end effector 403b is dedicated to handling dry substrates, i.e., substrates being transferred out of the SSC modules 300a,b. The use of end effectors 403a,b dedicated to transferring substrates into and out of the SSC modules 300a,b desirably reduces unwanted transfer of contaminants from the surface of a wet substrate being transferred into the SSC modules 300a,b to the surface of a dry substrate being transferred out of the SSC modules 300a,b. In some embodiments, the first end effector 403a is used to transfer the substrate into the SSC modules 300a,b through the first opening 301, and the second end effector 403b is used to transfer the substrate out of the SSC modules 300a,b through the second opening 302.

[0034]

[0044] 5A-5B are schematic perspective views of alternative embodiments of respective single substrate cleaning (SSC) modules 500a-b, each of which may be used as part of or in place of the SSC module 236 shown in FIGS. 2A-2C. Herein, the SSC module 500a includes a chamber housing 303 defining a chamber region 340. The chamber housing 303 includes a plurality of sidewalls 310, one of which has a first opening 301 formed therein, and a tunnel 501 disposed in alignment with the first opening 301 and extending outwardly from the sidewall 310 to define a substrate transfer tunnel 505a. In some embodiments, the tunnel 501 is coupled to an actuator 507 configured to move the tunnel away from the first opening 301, for example, by moving the tunnel up and down (in the Y direction) relative to the sidewall 310. In those embodiments, the tunnel 501 may move away from the first opening 301 when a dry substrate is transferred out of the chamber region 340 and move back into alignment with the first opening 301 when a wet substrate is transferred into the chamber region 340. Thus, in those embodiments, the tunnel 501 may be used to prevent the transfer of contaminants from the wet substrate to the opening 301 and / or surfaces of the sidewalls 310 of the SSC module 500a when the substrate is loaded therein.

[0035]

[0045] In some embodiments, such as shown in FIG. 5B, the tunnel 503 is fixedly coupled to the SSC module 500b, e.g., fixedly coupled to the sidewall 310 of the SSC module 500b, and aligned with the first opening 301 to define therewith a substrate transfer tunnel 505b. In those embodiments, the tunnel may extend outwardly from the sidewall 310, may extend inwardly from the sidewall 310 and be at least partially disposed in the chamber region 340, or may be both (as shown). In other embodiments, the tunnel 503 is aligned with the second opening 302. In some embodiments, the SSC module 500b includes multiple tunnels 503, each aligned with a respective opening 301, 302 to define therewith a corresponding substrate transfer tunnel 505b. Typically, in each of these embodiments, one of the openings 301, 302 is used to transfer a wet substrate into the chamber region 340 and the other of the two openings 301, 302 is used to transfer a dry substrate out of the chamber region 340, thereby minimizing the reintroduction of contaminants and / or fluids to the surface of the dry substrate.

[0036]

[0046] In some embodiments, the first opening 301 and / or the second opening 302 include a door (not shown) and a door actuator (not shown) that can be used to seal the first opening 301 and / or the second opening 302 when in a closed position and to allow transfer of substrates in and out of the first opening 301 and / or the second opening 302 when in an open position. When the door is in the closed position, the interior of the SSC module 500b, e.g., the chamber region 340, is desirably isolated from the environment of the second portion 220 to limit contaminants from the second portion from entering therein.

[0037]

[0047] FIG. 6A is a schematic overall cross-sectional view of a portion of an SSC module 600a according to another embodiment that may be used as part of or in place of the SSC module 236 shown in FIGS. 2A-2B. The SSC module 600a is shown herein as being integrated as part of a modular polishing system 200b substantially similar to the modular polishing system 200 of FIGS. 2A-2B. In one embodiment that may be combined with other embodiments disclosed herein, such as having any combination of features shown in FIGS. 3A-3B and 5A-5B, the SSC module 600a features two separate sections, a wet region 610 and a dry region 620, and the modular polishing system 200b uses the second substrate handler 226b shown in FIG. 4B for substrate transfer therein and therein. As mentioned above, the second substrate handler 226b has two substrate handler arms 401, 402, each of which may be dedicated to wet or dry substrate handling, to reduce cross-contamination between the wet region 610 and the dry region 620.

[0038]

[0048] In some embodiments, an end effector cleaning and / or drying system 603 is disposed adjacent to the second substrate handler 226b. The end effector cleaning and / or drying system 603 cleans and / or dries the substrate handler arm 401 during substrate transfer operations, thereby allowing the same substrate handler arm 401 to be used for transporting both wet and dry substrates 180. Typically, the end effector cleaning and / or drying system 603 includes one or more spray nozzles coupled to a fluid source. During a cleaning operation, the cleaning and / or drying system 603 directs a flow of cleaning fluid (e.g., deionized (DI) water) to one or more portions of the substrate handler arm or end effector to remove undesired contamination. During a drying operation, the cleaning and / or drying system 603 may direct a gas (e.g., N2, CDA) and / or other types of fluids (e.g., alcohol-containing vapor) across one or more portions of the substrate handler arm or end effector to facilitate drying of these components.

[0039]

[0049] Several components may be included in the wet region 610 to clean the substrate 180 and to prevent the substrate 180 from being dried sufficiently, which may result in debris or other undesirable particles remaining on the substrate 180. For example, the wet region 610 may include a set of wet lift pins 612a that are part of the substrate support 621 and are disposed in a wet processing module 611. The wet processing module 611 includes a wet processing cup 616 configured to collect any fluids applied to the surface of the substrate during a wet cleaning process performed in the wet region 610 of the SSC module 600a. The wet processing cup 616 may be connected to an exhaust system (not shown) and a drain (not shown).

[0040]

[0050] The wet area 610 includes one or more spray bars 614 (three shown), such as two or more spray bars 614, or three or more spray bars 614. Each of the spray bars 614 includes a number of nozzles that direct a fluid (e.g., DI water) onto the substrate 180 when the spray bar is positioned thereover. As used herein, each of the one or more spray bars 614 includes a number of nozzles. In some embodiments, a first fluid source 681 and a second fluid source 682 are fluidly coupled to individual spray bars 614 of the multiple spray bars 614. In one embodiment, the first fluid source 681 supplies DI water to the spray bar 614. In one embodiment, the second fluid source 682 supplies one or more cleaning fluids (e.g., an acid, a base, a solvent, a drying agent (e.g., alcohol), etc.) to the spray bar 614. The system controller 270 controls the first fluid source 681 and / or the second fluid source 682. In one embodiment, a wet substrate placement sensor (not shown) is positioned in the wet region 610 to detect whether the substrate 180 transported into the wet region 610 is sufficiently wet. If it is determined that the substrate 180 is not sufficiently wet before or during wet processing in the wet region 610, a spray bar may be activated to deliver fluid to the surface of the substrate. Upon completion of the wet cleaning process performed in the wet region 610 of the SSC module 600a, a desiccant and / or gas may be applied to the substrate before it is transported to the dry region 620.

[0041]

[0051] Additionally, the SSC module 600a may include a separate third substrate handler 615 configured to transfer the substrate 180 between the wet region 610 and the dry region 620. The third substrate handler 615 may separate the wet region 610 and the dry region 620 within the SSC module 600a. The SSC module 600a may include a substrate handler cleaning and / or drying system (not shown) disposed therein. The substrate handler cleaning and / or drying system may be similar to the system described above for use with the end effector cleaning and / or drying system 603.

[0042]

[0052] Residue and other unwanted particles may remain on the outer edge of the substrate 180, and therefore an apparatus for cleaning the outer edge of the substrate 180 is desired. For example, a wheel 619 may be moved and selectively positioned by an actuator (not shown) to clean the edge of the substrate 180 during different times of the substrate cleaning process performed in the SSC module 600a. Alternatively, or in combination with the wheel 619, a spray nozzle 618 may be positioned to clean the edge of the substrate 180 by spraying a cleaning liquid (e.g., DI water) along the edge of the substrate 180. The substrate 180 rotates on the substrate support 621 such that the spray nozzle 618 or the wheel 619 cleans the entire outer edge of the substrate 180. A motor 622 powers the rotation of the substrate support 621.

[0043]

[0053] To prevent accumulation of fluid on the exposed surface of the wet region 610 of the SSC module 600a, the exposed inner surface 630 may be angled or sloped to direct fluid towards a drain 605. The drain is positioned in a relatively low portion of the SSC module 600a. In one embodiment, which can be combined with other embodiments disclosed herein, the SSC module 600a includes a seal (not shown) to prevent fluid from leaking out of the wet region 610 and impinging on the dry region 620 and / or other portions of the chamber.

[0044]

[0054] The dry region 620 of the SSC module 600a includes a set of dry lift pins 613 configured to support the substrate 180 as it is dried. The dry region 620 further includes an ionizer bar 678 disposed adjacent to the substrate support 621 on the dry region 620. The ionizer bar 678 may direct a flow of air to form an air curtain that impinges on the substrate 180 as it is transferred from the wet region 610 to the dry region 620. Using a power supply 679, gas exiting the ionizer bar 678 is ionized. The resulting ionized gas is used to remove any residual charge that may have formed on the substrate 180 during processing.

[0045]

[0055] In some embodiments, a physical divider 631 is disposed between the wet region 610 and the dry region 620. The physical divider 631 may include a slot-like opening sized to allow transfer of substrates between the wet region 610 and the dry region 620 by the third substrate handler 615.

[0046]

[0056] To further mitigate unwanted airflow, the SSC module 600a may include an airflow management system (not shown). In one embodiment, which may be combined with other embodiments disclosed herein, the airflow management system includes a HEPA filter positioned above at least a portion of the processing area of ​​the SSC module 600a and a local exhaust system. In one embodiment, the airflow management system is a device for maintaining a positive pressure within the SSC module 600a during transfer of at least one or more substrates 180 into and out of the SSC module 600a. In one embodiment, the airflow management system includes one or more load locks coupled to an opening in the SSC module 600a.

[0047]

[0057] In other embodiments, as shown in FIG. 6B, the SSC module 600b may feature a single processing station in the chamber region 340 configured for subsequent sequential wet processing and drying of the substrate. In FIG. 6B, the SSC module 600b is integrated with a modular polishing system substantially similar to the modular polishing system 200 of FIG. 2A-2B or 200b of FIG. 6A. Herein, the SSC module 600b may include any one or combination of features described in FIG. 3A-3B, FIG. 5A-5B, and FIG. 6A. Herein, the SSC module 600b is configured for both wet processing, e.g., cleaning using one or more fluids, and drying in the region of the chamber region 340 using the same substrate support 621. Herein, the substrate is transferred to the substrate support using a first set of lift pins, here wet lift pins 612a. Once the substrate has been cleaned and dried, the second set of lift pins, here dry lift pins 612b, are used to lift the substrate from the substrate support 621 to facilitate access to the substrate by the substrate handler arm. In this way, the wet lift pins 612a, which may have residual fluid thereon, do not come into contact with the dry substrate and desirably reintroduction of residual fluid from the wet lift pins 612a to the substrate surface can be avoided.

[0048]

[0058] 6C is a schematic perspective view of an exterior portion of the SSC module 600a of FIG. 6A according to an embodiment. In an embodiment that can be combined with other embodiments disclosed herein, the tunnel 501 is aligned with the first opening 301 to define a substrate transfer tunnel 505c registered therewith. The tunnel 505c desirably prevents fluids and / or other contaminants disposed on the surface of the wet substrate 180 entering the SSC module 600c through the first opening 301 from dripping or transferring onto the surface of the dry substrate 180 exiting the SSC module 600a through the second opening 302. The wet substrate 180 enters the tunnel 505c at the entrance 660 in the direction A, and the dry substrate exits the second opening 302 in the direction B before being transported to other processing areas of the modular polishing system 200b, such as one of the multiple system loading stations 222.

[0049]

[0059] Herein, each of the tunnels 505a-c has a width that is greater than the diameter of the substrate to be processed, for example, greater than 320 mm, greater than about 350 mm, or from about 300 mm to about 400 mm. The tunnels 505a-c have a height sufficient to accommodate the thickness of the substrate and the end effectors of the substrate handler, such as about 2.5 cm or more, about 5 cm or more, about 7.5 cm or more, or about 10 cm or more, or about 2.5 cm to about 20 cm, for example, about 2.5 cm to about 15 cm, or about 2.5 cm to about 10 cm. In some embodiments, such as when the tunnel extends outward from the sidewall 310 or inward into the chamber region 340, the length of the tunnel may be greater than about 100 mm, e.g., greater than about 150 mm, greater than about 200 mm, greater than about 250 mm, or greater than about 300 mm, or from about 100 mm to about 1000 mm, e.g., from about 100 mm to 750 mm, or from about 100 mm to about 500 mm, etc. In some embodiments, the aspect ratio (length to height, height measured in the Y direction) is greater than 5:1, e.g., greater than about 10:1. The above tunnel sizes may be used in SSC modules sized to process 300 mm substrates. Appropriate scaling may be used in SSC modules sized to process substrates having different diameters.

[0050]

[0060] Advantageously, the above-described wet cleaning system and associated substrate handling and transfer schemes can significantly reduce and / or eliminate the unwanted reintroduction of fluids and / or other contaminants onto a dry substrate surface after a wet-in-dry-out cleaning process in a single wafer wet cleaning chamber. By preventing the reintroduction of contaminants onto a substrate surface after a post-CMP cleaning process, increased defects, reduced yield of usable devices, and / or associated device performance and reliability issues can be desirably avoided.

[0051]

[0061] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof, as determined by the following claims.

Claims

1. 1. A polishing system comprising: a first portion having a plurality of polishing stations disposed therein; a second portion coupled to the first portion and including a substrate cleaning system, the substrate cleaning system including a wet-in / dry-out substrate cleaning module, the wet-in / dry-out substrate cleaning module comprising: a chamber housing defining a chamber region, the chamber housing having a first sidewall with a first opening formed therethrough; a substrate support disposed in the chamber region; a first door or a first valve operable to cover or seal the first opening; and a second portion comprising: a substrate handler located at the second portion and positioned to transfer a substrate through the first opening into the chamber area; A polishing system comprising:

2. 2. The polishing system of claim 1, wherein the first side wall or the second side wall of the chamber housing has a second opening formed therethrough, and a second door or a second valve is operable to cover or seal the second opening.

3. The polishing system of claim 2 , further comprising a load lock chamber adjacent to the substrate cleaning module, the opening of the load lock chamber being aligned with the second opening.

4. The polishing system of claim 2 , wherein the second opening is disposed through the second sidewall, the second sidewall being adjacent to the first sidewall.

5. The polishing system of claim 2 , wherein the second opening is disposed through the first sidewall above the first opening.

6. The substrate handler includes: a first end effector coupled to the first arm; a second end effector coupled to the second arm; Including, the first end effector is used to transfer a wet substrate into the chamber region through the first opening, and the second end effector is used to transfer a dry substrate out of the chamber region through the second opening. The polishing system of claim 5 .

7. 6. The polishing system of claim 5, further comprising a tunnel extending outwardly from the chamber housing, the tunnel being aligned with the first opening or the second opening to enable transfer of a substrate therethrough.

8. 8. The polishing system of claim 7, wherein the tunnel is coupled to an actuator operable to move the tunnel away from the first or second opening during transfer of a substrate into and out of the chamber region.

9. 1. A substrate cleaning system comprising: a chamber housing defining a chamber region, a first sidewall of the chamber housing having a first opening formed therethrough for receiving a substrate within the chamber region; a substrate support disposed in the chamber region; a first lift pin assembly including a plurality of first pins for receiving a substrate from a substrate handler and positioning the substrate on the substrate support; a second lift pin assembly including a plurality of second pins positioned to lift the substrate from the substrate support to allow access to the substrate by the substrate handler, the plurality of second pins being different from the plurality of first pins; A system comprising:

10. a tunnel extending outwardly from the chamber housing and positioned in alignment with the first opening to allow transfer of a substrate therethrough; a substrate handler positioned to transfer a substrate through the tunnel and into the chamber region; a load lock chamber adjacent to the chamber housing, an opening of the load lock chamber aligned with a second opening disposed through a second sidewall of the chamber housing, the second sidewall adjacent to the first sidewall; The substrate cleaning system of claim 9 further comprising:

11. 10. The substrate cleaning system of claim 9, further comprising one or more first nozzles positioned to direct drying fluid onto the first plurality of lift pins.

12. The substrate cleaning system of claim 9 , further comprising a tunnel disposed in alignment with the first opening and defining a substrate transfer path together with the first opening.

13. 10. The substrate cleaning system of claim 9, wherein the second sidewall of the chamber housing has a second opening formed therethrough, and a door or valve is operable to cover or seal the second opening.

14. 14. The substrate cleaning system of claim 13, further comprising a load lock chamber adjacent to the substrate cleaning system, an opening of the load lock chamber being aligned with the second opening.

15. The system for cleaning a substrate of claim 14 , wherein the second sidewall is adjacent to the first sidewall.

16. The substrate cleaning system of claim 12 , wherein a second opening is disposed through the first sidewall above the first opening.

17. The substrate cleaning system of claim 12 , wherein the tunnel extends into the chamber area.

18. 20. The substrate cleaning system of claim 16, further comprising a tunnel extending outwardly from the chamber housing, the tunnel positioned in alignment with the first opening or the second opening to enable transfer of a substrate therethrough.

19. 20. The substrate cleaning system of claim 16, wherein the tunnel is coupled to an actuator operable to move the tunnel away from the first or second opening during transfer of a substrate into and out of the chamber area.

20. 12. The substrate cleaning system of claim 11, further comprising one or more second nozzles disposed proximate to the substrate support and positioned to direct fluid toward a periphery of a substrate disposed on the substrate support.

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