Probe

Abstract

To provide a probe that can be positioned accurately even if a guide plate having an opening in which a corner section is in an arc shape is used.SOLUTION: A probe includes: a foot section 1 having a long shape; a support member 2 in a flat plate shape that is connected to one end of the foot section 1, extends in a first direction, and has a first plate thickness t1; an arm member 3 one end of which is connected to the support member 2 and which extends in a longitudinal direction of the foot section 1; a distal end member 4 in a flat plate shape that is connected to the other end of the arm member 3, extends in a first direction, and has the first plate thickness t1; and a contact section 6 projecting toward the first direction from the distal end member 4. Projections 5A, 5B that are narrower than the first plate thickness are formed along the first direction in an outer side of the support member 2 and in an outer side of the distal end member 4.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a probe for use in an electrical connecting device. [Background technology]

[0002] An electrical connection device having a probe that is brought into contact with an object under test, such as an integrated circuit, is used for testing. In testing using the electrical connection device, one end of the probe is brought into contact with an electrode terminal of the object under test. The other end of the probe is electrically connected to a connection terminal arranged on a circuit board of the electrical connection device. The connection terminal is electrically connected to a testing device such as a tester. Signals can be transmitted and received between the object under test and the testing device via the probe (see, for example, Patent Document 1).

[0003] The probe is stored in a predetermined position using a fixture for fixing the probe. The fixture includes a flat first guide plate and a flat second guide plate, each of which has a rectangular opening.

[0004] The first guide plate and the second guide plate are stacked and arranged so that their openings coincide with each other in an initial state. The openings are slightly larger in size than the cross section of the probe.

[0005] Therefore, in the initial state, the probe can be easily inserted into the opening. After the probe is inserted into the opening, the first guide plate is slid in the surface direction. More specifically, the first guide plate is slid a small distance in the long side direction and short side direction of the rectangular opening. The inner surfaces of each opening constrain the four sides of the probe, making it possible to fix the probe in a desired position. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Patent Publication No. 2021-63782 Summary of the Invention [Problem to be solved by the invention]

[0007] However, the corners of the openings formed in the first guide plate and the second guide plate described above are formed in an arc shape rather than a right angle. That is, when manufacturing each guide plate, it is difficult to form the corners of the openings at a right angle, and they are inevitably formed in an arc shape.

[0008] This caused a problem that when the first guide plate was slid, it was difficult to accurately contact and restrain the four faces of the probe with the inner surface of the opening, making it impossible to accurately position the probe.

[0009] The present invention has been made to solve such conventional problems, and its object is to provide a probe that can be accurately positioned even when a guide plate having an opening with arc-shaped corners is used. [Means for solving the problem]

[0010] A probe according to one embodiment of the present invention comprises a foot portion having an elongated shape, a flat support member connected to one end of the foot portion, extending in a first direction and having a first thickness, an arm member having one end connected to the support member and extending toward the longitudinal direction of the foot portion, a flat tip member connected to the other end of the arm member, extending in the first direction and having the first thickness, and a contact portion protruding from the tip member in the first direction, and wherein protrusions narrower than the first thickness are formed along the first direction on the outer periphery of the support member and the outer periphery of the tip member. Effect of the Invention

[0011] According to the present invention, accurate positioning is possible even when a guide plate having an opening with arc-shaped corners is used. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a perspective view of a probe according to the first embodiment. [Diagram 2] FIG. 2 is a side view of the probe according to the first embodiment. [Diagram 3] FIG. 3 is an explanatory diagram showing the positional relationship between the perimeter of the support member and the protrusions. [Figure 4A] FIG. 4A is a front view that shows a schematic view of a probe inserted into an opening formed in two guide plates of a fixing jig. [Figure 4B] FIG. 4B is a side view showing a state in which the probes are inserted into the openings formed in the two guide plates of the fixing jig. [Figure 4C] FIG. 4C is a plan view showing a state in which the probes are inserted into the openings formed in the two guide plates of the fixing jig. [Figure 5A] FIG. 5A is a front view that typically shows a state of the probe within the opening when the first guide plate is slid. [Figure 5B] FIG. 5B is a side view that typically illustrates the state of the probe within the opening when the first guide plate is slid. [Figure 5C] FIG. 5C is a plan view that illustrates a state of the probe in the opening when the first guide plate is slid. [Figure 6] FIG. 6 is an explanatory diagram showing in detail the positional relationship between the support member and the opening when a probe according to a comparative example is used. [Figure 7] FIG. 7 is an explanatory diagram showing in detail the positional relationship between the support member and the opening when the probe according to the embodiment is used. [Figure 8] FIG. 8 is a perspective view of a probe according to a first modified example. [Figure 9] FIG. 9 is a side view of the probe according to the first modified example. [Figure 10] FIG. 10 is a side view of a probe according to the second modified example. [Figure 11] FIG. 11 is a side view of a probe according to a third modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Next, an embodiment of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the dimensional ratios of each part are different from the actual ones. In addition, the drawings naturally include parts with different dimensional relationships and ratios. The embodiments shown below are examples of devices for embodying the technical ideas of the present invention, and the embodiments of the present invention do not specify the materials, shapes, structures, arrangements, etc. of the components as described below.

[0014] [First embodiment] Fig. 1 is a perspective view showing the configuration of a probe according to a first embodiment of the present invention, and Fig. 2 is a side view. As shown in Figs. 1 and 2, a probe 100 according to the first embodiment includes a foot portion 1, a support member 2, two arm members 3, and a tip member 4. In the following, in Figs. 1 and 2, the longitudinal direction of the foot portion 1 is defined as the X-axis direction, the thickness direction of the probe 100 as the Y-axis direction, and the direction perpendicular to the YY plane as the Z-axis direction.

[0015] The probe 100 is formed of a conductive flat plate having a thickness t1 (first plate thickness) as a whole. The material of the probe 100 is, for example, a Ni-B (nickel boron) alloy.

[0016] 1 and 2, the foot portion 1 has an elongated shape extending in the X-axis direction, and one end of the foot portion 1 is connected to one end of a support member 2 extending in the Z-axis direction perpendicular to the longitudinal direction of the foot portion 1. In other words, the Z-axis direction is a first direction in which the support member 2 extends.

[0017] One end of two arm members 3 extending in the X-axis direction is connected to the other end of the support member 2. A tip member 4 extending in the Z-axis direction is connected to the other end of each arm member 3. A contact portion 6 is formed at the tip of the tip member 4 in the Z-axis direction. The material of the contact portion 6 is, for example, Rh (rhodium).

[0018] The probe 100 inspects an object under test by bringing the contact portion 6 formed on the tip member 4 into contact with an electrode terminal of the object under test.

[0019] A protrusion 5A extending along the Z-axis direction is formed on the outer periphery 4a of the tip member 4. Similarly, a protrusion 5B extending along the Z-axis direction is formed on the outer periphery 2a of the support member 2. That is, the protrusions 5A and 5B are arranged parallel to each other. In addition, the surface (outer surface) of each of the protrusions 5A and 5B is formed in a smooth flat shape. The width t2 of each of the protrusions 5A and 5B in the Y-axis direction is narrower than the thickness t1 (first plate thickness) of the probe 100. The protrusions 5A and 5B can be formed of, for example, the same Rh (rhodium) as the contact portion 6.

[0020] Fig. 3 is an explanatory diagram showing the positional relationship between the perimeter 2a of the support member 2 and the protrusion 5B. As shown in Fig. 3, the center of the perimeter 2a and the center of the protrusion 5B coincide with the center line CL. Therefore, spatial regions Q1 and Q2 are formed on the side surfaces 5B1 and 5B2 in the Y-axis direction of the protrusion 5B due to a step between the support member 2 and the side surfaces 5B1 and 5B2. By forming the spatial regions Q1 and Q2, it is possible to avoid interference between the support member 2 and the tip member 4 and a circular arc-shaped corner portion R1 described later.

[0021] The centers of the protrusions 5A, 5B and the center of the contact portion 6 approximately coincide with a center line extending in the X-axis direction. The width t2 of the protrusions 5A, 5B in the Y-axis direction approximately coincides with the width of the contact portion 6 in the Y-axis direction. In other words, the center in the thickness direction of the contact portion 6 coincides with the center in the thickness direction of the protrusions 5A, 5B.

[0022] Next, an operation for positioning the probe 100 using a fixture for fixing the probe will be described. Figures 4A to 4C are explanatory diagrams that show a state in which the probe is inserted into the fixture, where Fig. 4A is a side view, Fig. 4B is a cross-sectional view along II, and Fig. 4C is a plan view. Figures 5A to 5C are explanatory diagrams that show a state in which the first guide plate is slid relative to the second guide plate, where Fig. 5A is a side view, Fig. 5B is a cross-sectional view along II-II, and Fig. 5C is a plan view.

[0023] 4A and 4B, the fixing jig has a first guide plate 21 and a second guide plate 22, and the guide plates 21, 22 are arranged in a stacked manner. Also, in the initial state, as shown in Fig. 4C, an opening 31 formed in the first guide plate 21 and an opening 32 formed in the second guide plate 22 coincide with each other in a plan view (Z-axis direction).

[0024] As shown in Fig. 4C, each of the openings 31, 32 has a rectangular shape, and the four corners are formed in an arc shape. Each of the openings 31, 32 is slightly larger in size than the cross-sectional area of ​​the probe. Therefore, in the initial state, as shown in Fig. 4A and Fig. 4B, it is possible to easily insert the probe 100 into the openings 31, 32.

[0025] When positioning the probe 100, the first guide plate 21 is slid relative to the second guide plate 22 from the state shown in FIGS. 4A to 4C. Specifically, by sliding the first guide plate 21 in the X-axis direction, the side surface 31a of the opening 31 comes into contact with the protrusion 5B as shown in FIG. 5A, and the probe 100 moves in the X-axis direction (to the right in FIG. 5A). As a result, the side surface 32a of the opening 32 comes into contact with the protrusion 5A. As a result, the probe 100 is restrained in the X-axis direction. That is, the probe 100 can be positioned in the X-axis direction.

[0026] Furthermore, by sliding the first guide plate 21 in the Y-axis direction, the side surface 31b of the opening 31 comes into contact with the side surfaces of the support member 2 and the tip member 4 as shown in Fig. 5B, and the probe 100 slides in the Y-axis direction (leftward in Fig. 5A). As a result, the side surface 32b of the opening 32 comes into contact with the side surfaces of the support member 2 and the tip member 4. As a result, the probe 100 is restrained in the Y-axis direction. That is, the probe 100 can be positioned in the Y-axis direction.

[0027] That is, as shown in FIG. 5C, opening 31 slides a small distance in the X-axis direction and Y-axis direction relative to opening 32, whereby probe 100 can be positioned on the XY plane.

[0028] Next, the positional relationship between the protrusion 5B, the support member 2, and the opening 32 will be described with reference to FIG. 6 and FIG. 7. FIG. 6 is an explanatory diagram showing the positional relationship when a probe 101 (comparative example) not having the protrusions 5A and 5B shown in FIG. 1 and FIG. 2 is used. As shown in FIG. 6, the probe 101 slides in the X-axis direction (left direction in the figure), so that the outer periphery 2a of the support member 2 and the inner surface 31c of the opening 31 come into surface contact. When the probe 101 is further slid in the Y-axis direction (upward in the figure) from this state, the side surface 2b of the support member 2 and the corner portion R1 interfere with each other because the corner portion R1 of the opening 31 is formed in an arc shape. Therefore, the side surface 2b and the inner surface 31c of the opening 31 cannot come into surface contact with each other, and a space S is generated. As a result, the probe 101 cannot be positioned at an accurate position.

[0029] FIG. 7 is an explanatory diagram showing the positional relationship when the probe 100 (the present embodiment) shown in FIG. 1 and FIG. 2 is used. As shown in FIG. 7, the probe 100 slides in the X-axis direction (leftward in the figure), so that the protrusion 5B formed on the outer periphery 2a of the support member 2 comes into surface contact with the inner surface 31c of the opening 31. In addition, because spatial regions Q1 and Q2 are formed on the sides of the protrusion 5B, interference between the side surface 2b of the support member 2 and the corner portion R1 can be avoided even when the probe 100 is slid in the Y-axis direction (upward in the figure). Therefore, the side surface 2b of the support member 2 can be reliably brought into surface contact with the inner surface 31c of the opening 31, and thus the probe 100 can be positioned at an accurate position.

[0030] 7, the relationship between the protrusion 5B formed on the support member 2 and the openings 31, 32 is described, but the same applies to the protrusion 5A formed on the tip member 4. Therefore, even if the corner portions R1 of the openings 31, 32 are formed in an arc shape, the side surfaces of the support member 2 and the tip member 4 can be reliably brought into contact with the inner surfaces of the openings 31, 32.

[0031] Thus, the probe 100 of this embodiment comprises a foot portion 1 having an elongated shape, a flat support member 2 connected to one end of the foot portion 1, extending in a first direction (Z-axis direction) and having a thickness t1 (first plate thickness), an arm member 3 having one end connected to the support member 2 and extending toward the longitudinal direction of the foot portion 1, a flat tip member 4 connected to the other end of the arm member 3, extending in the first direction and having a first plate thickness, and a contact portion 6 protruding from the tip member 4 in the first direction, and has a structure in which protrusions 5A, 5B narrower than the first plate thickness are formed along the first direction on the outer periphery 2a of the support member 2 and the outer periphery 4a of the tip member 4.

[0032] Therefore, when the first guide plate 21 is slid to restrain the probe 100, the support member 2 and the tip member 4 of the probe 100 can be reliably brought into surface contact with the inner surfaces of the openings 31, 32 of the guide plates 21, 22. This makes it possible to accurately position the probe 100 even when using guide plates 21, 22 that have openings 31, 32 with arc-shaped corners.

[0033] Furthermore, in this embodiment, the material forming the contact portion 6 and the material forming the protrusions 5A and 5B are the same (e.g., Rh), so that the protrusions 5A and 5B can be produced in a simple manner by patterning using photolithography.

[0034] In this embodiment, the surfaces of each protrusion 5A, 5B (the surfaces that contact the inner surfaces of the openings 31, 32) are formed into a smooth planar shape, so that each protrusion 5A, 5B can be reliably brought into surface contact with the inner surfaces of each opening 31, 32, thereby improving the positioning accuracy of the probe 100.

[0035] Furthermore, as shown in FIG. 3, in the Y-axis direction, the center of the support member 2 and the center of the protrusion 5B coincide, and the center of the tip member 4 and the center of the protrusion 5A coincide, so that the spatial region Q1 can be secured to the same extent on both the left and right sides, thereby further improving the positioning accuracy of the probe 100.

[0036] Furthermore, by substantially matching the center of the protrusions 5A and 5B with the center of the contact portion 6 along the center line in the X-axis direction, the stress acting when the contact portion 6 contacts the element under test can be stably transmitted in the Z-axis direction. For example, when the protrusions 5A and 5B are formed of a material harder than the base material of the probe 1, if the arrangement of the protrusions 5A and 5B is offset from the center axis of the contact portion 6 in the X-axis direction, it is possible that the protrusions 5A and 5B may bend in the X-axis direction due to the stress acting during the inspection. By substantially matching the center of the protrusions 5A and 5B with the center of the contact portion 6 along the center line in the X-axis direction, it is possible to suppress the bias in the X-axis direction of the stress acting on the base material when contacting, and suppress the curvature in the X-axis direction that occurs when contacting.

[0037] In the first embodiment, the probe having the shape shown in Figures 1 and 2 has been described as an example, but the probe according to the present invention is not limited to the shape shown in Figures 1 and 2. For example, the present invention can be applied to a probe having three or more arm members 3.

[0038] [First Modification] Next, a first modified example of the present invention will be described. Fig. 8 is a perspective view of a probe 100A according to the first modified example, and Fig. 9 is a side view. The probe 100A shown in Figs. 8 and 9 differs from the probe 100 shown in Figs. 1 and 2 in that the contact portion 6 and the protrusion portion 5A are connected.

[0039] As described above, the contact portion 6 and the protrusion portion 5A are made of the same material, for example, Rh. Therefore, the contact portion 6 and the protrusion portion 5A can be formed simultaneously by photolithography, which can reduce the labor and cost during manufacturing.

[0040] [Second modified example] Fig. 10 is a side view of a probe 100B according to a second modified example. In the probe 100B shown in Fig. 10, the protrusion 5A formed on the outer periphery 4a of the tip member 4 is formed shorter than the probe 100 shown in Fig. 2. In this configuration, as in the first embodiment described above, even when using guide plates 21, 22 having openings 31, 32 whose corners are arc-shaped, it is possible to accurately position the probe 100B. In addition, the material for forming the protrusion 5A can be reduced, which allows costs to be reduced.

[0041] [Third Modification] Fig. 11 is a side view of a probe 100C according to a third modified example. In contrast to the probe 100 shown in Fig. 2, the probe 100C shown in Fig. 11 has intermittent protrusions 5B formed on the outer periphery 2a of the support member 2. As in the first embodiment described above, this configuration also makes it possible to accurately position the probe 100B even when using guide plates 21, 22 having openings 31, 32 with arc-shaped corners. In addition, the material used to form the protrusions 5B can be reduced, allowing costs to be reduced.

[0042] Although the present invention has been described by the above embodiment, the description and drawings forming a part of this invention should not be understood as limiting the present invention. From this disclosure, various alternative embodiments, examples and operating techniques will become apparent to those skilled in the art. [Explanation of symbols]

[0043] 1 Foot section 2 Supporting member 2a Perimeter 2b side 3 Arm parts 4 Tip member 4a Perimeter 5A, 5B protrusion 6 Contact Part 21 First guide plate 22 Second guide plate 31, 32 Opening 100, 100A, 100B, 100C Probes Q1, Q2 spatial domain R1 Corner

Claims

1. A foot portion having an elongated shape; a flat support member connected to one end of the foot portion, extending in a first direction, and having a first thickness; an arm member having one end connected to the support member and extending in a longitudinal direction of the foot portion; a flat-plate-shaped tip member connected to the other end of the arm member, extending in the first direction, and having the first plate thickness; a contact portion protruding from the tip member in the first direction; Equipped with A protrusion having a width narrower than the first plate thickness is formed along the first direction on an outer periphery of the support member and an outer periphery of the tip member. probe.

2. The center of the contact portion in the thickness direction coincides with the center of the protrusion in the thickness direction. The probe of claim 1 .

3. The protrusion is made of the same material as the contact portion. The probe according to claim 1 or 2.

4. The protrusion formed on the tip member is connected to the contact portion. The probe according to claim 3 .

5. The protrusions are formed intermittently in the first direction. The probe according to claim 1 or 2.

Images