Conveyance system, method for controlling the same, film forming device, and method for manufacturing article

Abstract

To provide a conveyance system capable of achieving high response performance in position control of a movable element even when the movable element and a conveyance path are enlarged.SOLUTION: A conveyance system includes: a stator; a movable element movable along a first direction; a plurality of magnets arranged along the first direction on one of the movable element and the stator; a plurality of coils arranged along the first direction so as to face the plurality of magnets on the other of the movable element and the stator; a first control unit connected to the plurality of coils and configured to control a current to be applied to the plurality of coils to control force acting between the plurality of magnets and the plurality of coils; and a second control unit connected to the plurality of coils and configured to control a current to be applied to the plurality of coils to control force acting between the plurality of magnets and the plurality of coils. The first control unit can control attitude of the movable element in a second direction crossing the first direction. The second control unit can control a position or the attitude of the movable element in the first direction.SELECTED DRAWING: Figure 1

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