Humidifier and humidifying method

Abstract

To provide a humidifier and a humidifying method for effectively adjusting a spray particle diameter.SOLUTION: A double-fluid spray type humidifier A1 which mixes and sprays gas and liquid, includes: a gas supply device M1 supplying pressurized gas; and a catch tank 14 for storing the liquid. This humidifier A1 further includes: a double-fluid nozzle 10 for sucking in the liquid from the catch tank 14 by negative pressure generated by the compression of the gas and mixing and spraying the air and liquid; and a water pipe 12 for supplying liquid to a plurality of double-fluid nozzles 10. The humidifier A1 further includes: a tube 13 for connecting the catch tank 14 and the water pipe 12 and having flexibility for supplying liquid; and a position control device 18 for varying the relative positions in a height direction of the catch tank 14 and the double-fluid nozzle 10.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a humidification device and a humidification method for use in clean rooms, factories, warehouses, and the like. [Background technology]

[0002] In clean rooms of semiconductor factories, liquid crystal factories, and the like, humidifiers are sometimes used for the purpose of controlling the environment, such as dust. In such humidifiers, a two-fluid nozzle may be used. A humidifier using a two-fluid nozzle mixes water and air and sprays the water at high speed to turn the water into mist. Therefore, a technology for improving the controllability and reliability of humidification has been considered (see, for example, Patent Document 1). The technology disclosed in this document includes a high-pressure air supply line that pressurizes and supplies air, and a water tank that stores pure water. Then, the pure water is sucked from the water tank by negative pressure generated by pressurizing the air. Furthermore, the device includes a mixing nozzle that mixes and sprays air and pure water, and a variable mechanism that changes the relative position of the water tank and the mixing nozzle in the height direction. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-258404 A Summary of the Invention [Problem to be solved by the invention]

[0004] As described in Patent Document 1, the size of the spray droplets of humidifying water varies depending on the suction height, which is the distance between the pure water surface and the height position of the two-fluid nozzle. That is, when the distance is changed, the mixture ratio of water and air changes, and the size of the spray droplets changes. For example, when the water level is lowered by increasing the distance, the mixture ratio of water and air decreases, and the size of the spray droplets becomes finer. On the other hand, when the water level is raised by decreasing the distance, the mixture ratio of water and air increases, and the size of the spray droplets becomes coarser.

[0005] However, in the technology described in Patent Document 1, the horizontally laid water supply header pipe is fixed to the water supply tank (liquid tank). Therefore, in order to change the suction height position, it was necessary to change the arrangement of the water supply header pipe along with the water supply tank. For this reason, it was not possible to change the suction height efficiently. [Means for solving the problem]

[0006] The humidifier for solving the above problems is a two-fluid spray type humidifier that mixes and sprays a gas and a liquid, and includes a gas supply unit that pressurizes and supplies the gas, a liquid tank that stores the liquid, a mixing nozzle that sucks the liquid from the liquid tank by negative pressure generated by pressurizing the gas and mixes and sprays the gas and liquid, horizontal piping that supplies the liquid to a plurality of the mixing nozzles, a flexible tube that connects the liquid tank and the horizontal piping and supplies the liquid, and a variable mechanism that varies the relative vertical position of the mixing nozzle and the liquid tank.

[0007] A humidification method for solving the above problems uses a two-fluid spray type humidifier that mixes and sprays a gas and a liquid. The humidifier includes a gas supply unit that pressurizes and supplies the gas, a liquid tank that stores the liquid, a mixing nozzle that sucks the liquid from the liquid tank by negative pressure generated by pressurizing the gas and mixes and sprays the gas and the liquid, a horizontal pipe that supplies the liquid to a plurality of the mixing nozzles, and a flexible tube that connects the liquid tank and the horizontal pipe and supplies the liquid, and changes the relative position of the liquid tank with respect to the horizontal pipe to change the relative position in the height direction between the mixing nozzle and the liquid tank. Effect of the Invention

[0008] The present invention can effectively adjust the spray particle size. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a perspective view of a humidifier according to an embodiment. [Diagram 2] FIG. 2 is an explanatory diagram of the function of the humidifier according to the embodiment. [Diagram 3] FIG. 2 is an explanatory diagram of a hardware configuration of the embodiment. [Figure 4] 5A and 5B are explanatory diagrams of spray condition information according to an embodiment, where FIG. 5A is a diagram illustrating the relationship between the suction height and the spray particle size, and FIG. 5B is a diagram illustrating the relationship between the suction height and the spray amount. [Diagram 5] 5A and 5B are explanatory diagrams of the operation of the humidification process in the embodiment, in which FIG. 5A is an explanatory diagram when the suction height is low, and FIG. 5B is an explanatory diagram when the suction height is high. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] An embodiment of a humidifier and a humidification method will be described below with reference to Figures 1 to 5. In this embodiment, it is assumed that the humidity in a controlled area such as a clean room is adjusted. 1, in this embodiment, the humidifier A1 includes a plurality of two-fluid nozzles 10. Each two-fluid nozzle 10 is a two-fluid spray mixing nozzle that uses negative pressure generated by pressurizing gas to suck water from a catch tank 14 (described later), mixes air and water, and sprays the mixture.

[0011] Each two-fluid nozzle 10 is connected to an air pipe 11 and a water pipe 12 as a horizontal pipe via stainless steel pipes. The air pipe 11 and the water pipe 12 are horizontally laid and fixed. In this embodiment, the height position of the two-fluid nozzle 10 is fixed relative to the air pipe 11 and the water pipe 12 by the stainless steel pipe.

[0012] The air piping 11 is connected to an air supply device M1 including a pipe including a manual valve, a pressure reducing valve, a pressure gauge, a control valve, etc. The air supply device M1 as a gas supply section pressurizes and supplies the gas. Air at a predetermined pressure is supplied from the air supply device M1 to the air piping 11. The air supply device M1 is connected to a management device 20 via a network.

[0013] The water pipe 12 is connected to the catch tank 14 via a tube 13. The tube 13 is made of a flexible material. The catch tank 14 is a liquid tank that stores water to be supplied to the water pipe 12. The size of the mist sprayed is determined according to the suction height, which is the difference between the water surface position in the catch tank 14 and the height position of the two-fluid nozzle 10. Water is supplied to the catch tank 14 by a water supply device M2. The catch tank 14 is equipped with an overflow pipe, a water drain pipe, an air bleeder (not shown), etc. The water drain pipe is normally closed by a water drain valve. The water tank is kept at atmospheric pressure by the air bleed valve.

[0014] The catch tank 14 is attached so that its position in the height direction can be changed relative to the support frame P1, which is set upright in the vertical direction, by a position control device 18 serving as a variable mechanism. This position control device 18 is equipped with a linear motion mechanism having a motor and a screw mechanism. The rotational motion of the motor is converted into linear motion by the screw mechanism, and the catch tank 14 slides up and down along the support frame P1.

[0015] 2, the amount of water in the catch tank 14 is detected by a water level sensor 15. A float-type sensor, which is a contact-type water level sensor, is used for this water level sensor 15. When the amount of water in the catch tank 14 decreases, this water level sensor 15 supplies water from the water supply device M2 to maintain the water level within a certain range. The position control device 18 is connected to a management device 20 via a network.

[0016] (Explanation of the Hardware Configuration of Management Device 20) 3, a hardware configuration of an information processing device H10 constituting the management device 20 will be described. The information processing device H10 includes a communication device H11, an input device H12, a display device H13, a storage device H14, and a processor H15. Note that this hardware configuration is an example, and it is also possible to realize the information processing device H10 using other hardware.

[0017] The communication device H11 is an interface that establishes a communication path with other devices and transmits and receives data. The input device H12 is a device that accepts input of various information. The display device H13 is a display or the like that displays various information.

[0018] The storage device H14 is a storage device that stores data and various programs for executing various functions of the management device 20. The processor H15 uses the programs and data stored in the storage device H14 to control each process in the management device 20. Examples of the processor H15 include a CPU and an MPU. The processor H15 loads a program stored in a ROM or the like into a RAM and executes various processes for each process.

[0019] (Configuration of management device 20) 2 includes a control unit 21 and a storage unit 22. Furthermore, the management device 20 is connected to a humidity sensor S1 that measures the humidity in an area to be managed.

[0020] The control unit 21 acquires information about the humidity of the management target area from the humidity sensor S1. Furthermore, the control unit 21 executes a process of instructing the position control device 18 to move to a desired height position. Furthermore, the control unit 21 executes a process of instructing the air supply device M1 to a desired air pressure.

[0021] Information regarding the target humidity to be maintained in the management target area is recorded in the memory unit 22. Furthermore, information regarding the required spray amount and required particle size of the mist used for spraying to maintain the target humidity is recorded in the memory unit 22. The target humidity, required spray amount, and required particle size are values ​​input in advance by the input device H12. Furthermore, spray condition information according to the relationship between the suction height and the air pressure with respect to the spray amount and the spray particle size is recorded in the memory unit 22. The spray condition information records the relationship between the suction height and the spray particle size, and the relationship between the suction height and the spray amount. As shown in Fig. 4(a), the droplet size decreases monotonically with increasing suction height. Moreover, the droplet size decreases when the air pressure is high. As shown in Fig. 4(b), the spray amount also monotonically decreases with increasing suction height. Moreover, the spray amount increases with increasing air pressure.

[0022] (humidification method) Next, the humidification method will be described.

[0023] The control unit 21 of the management device 20 acquires the humidity of the area to be managed from the humidity sensor S1. When it is determined that the humidity in the management area is lower than the target humidity, the control unit 21 acquires the spray particle diameter recorded in the storage unit 22.

[0024] In this case, the control unit 21 uses the spray condition information recorded in the storage unit 22 to determine the required spray amount, the air pressure corresponding to the required particle diameter, and the height position. For example, to satisfy the required spray volume at a certain pressure, the position of the catch tank 14 is raised to lower the suction height. In this case, the spray droplet size becomes larger. Therefore, to reduce the spray droplet size to meet the required droplet size, the air pressure is increased. Then, the control unit 21 instructs the air supply device M1 to use the determined air pressure. Furthermore, the control unit 21 instructs the position control device 18 to use the determined height position.

[0025] In this case, the air supply device M1 supplies air at the commanded air pressure. Also, the position control device 18 moves the catch tank 14 to a specified height position. Furthermore, the suction height changes depending on the height position of the two-fluid nozzle 10 connected to the fixed horizontal air pipe 11 and water pipe 12 and the water surface position in the catch tank 14. Then, from the air and water mixed in the two-fluid nozzle 10, a mist with a spray particle size according to this suction height is generated.

[0026] As shown in Fig. 5(a), when the suction height is h1, mist with a spray particle size of r1 is generated. On the other hand, as shown in Fig. 5(b), when the suction height is h2, mist with a spray particle size of r2 is generated. Here, when the suction height is "h1 < h2", the spray particle size becomes "r1 > r2". When the humidity in the area to be controlled reaches the target humidity, the control unit 21 instructs the air supply device M1 and the water supply device M2 to stop supplying air and water.

[0027] (Function) Since the water pipe 12 and the catch tank 14 are connected by a flexible tube 13, the spray particle size can be changed by only changing the arrangement of the catch tank 14.

[0028] According to this embodiment, the following effects can be obtained. (1) In this embodiment, the plurality of two-fluid nozzles 10 are connected to the horizontally drawn air pipe 11 and water pipe 12. Thereby, mist can be generated over a wide range. (2) In this embodiment, the horizontally drawn air pipe 11 and water pipe 12 are fixed in position. And the water pipe 12 is connected to the catch tank 14 via a flexible tube 13. Thereby, even when the water pipe 12 is fixed, the suction height can be adjusted by changing the height position of the catch tank 14. That is, even when the suction height is changed, the water pipe 12 does not move, and the spray particle size can be adjusted only by changing the height position of the catch tank 14.

[0029] (3) In this embodiment, the catch tank 14 is attached to the support frame P1 so that its height position can be changed by the position control device 18. This position control device 18 is controlled by the management device 20. Thereby, using the management device 20, mist can be generated with a spray particle size corresponding to the suction height. (4) In this embodiment, spray condition information according to the relationship between the suction height and air pressure with respect to the spray amount and spray particle size is recorded in the memory unit 22. This makes it possible to determine the air pressure and suction height with respect to the required spray amount and required particle size.

[0030] This embodiment can be modified as follows: This embodiment and the following modifications can be combined with each other to the extent that there is no technical contradiction. In the above embodiment, it is assumed that the humidity of a controlled area such as a clean room is adjusted. The controlled area whose humidity is adjusted by the humidifier is not limited to a clean room. The humidifier may be used in a factory, a warehouse, etc.

[0031] In the above embodiment, air is supplied from the air supply device M1 to the air piping 11. The gas supplied to the two-fluid nozzle 10 to generate mist is not limited to air, and for example, nitrogen gas may be supplied. In the above embodiment, in order to satisfy the required spray amount, the position of the catch tank 14 is raised to lower the suction height, and in order to correspond to the required particle size, the air pressure is increased if the spray particle size is to be reduced. The control procedure is not limited to this. For example, the required spray amount, the air pressure that satisfies the required particle size, and the suction height may be calculated at the same time.

[0032] In the above embodiment, the catch tank 14 accumulates the water to be supplied to the water pipe 12. In this case, the liquid to be supplied to the water pipe 12 may be pure water that does not contain impurities. In the above embodiment, a float-type sensor, which is a contact-type water level sensor, is used as the water level sensor 15. As long as the water level in the catch tank 14 can be maintained within a predetermined range, the type of water level sensor 15 is not limited. As a contact-type water level sensor, a guide rope type, a capacitance type, a pressure type, an electrode type, etc. may be used. Also, a non-contact type water level sensor, such as a radio wave type or an ultrasonic type, may be used.

[0033] In the above embodiment, the water level in the catch tank 14 is maintained within a predetermined range. Alternatively, the position of the catch tank 14 may be controlled taking into account the water level in the catch tank 14. In this case, the management device 20 obtains information on the water surface position from the water level sensor 15. Then, the management device 20 calculates the position of the catch tank 14 so that the water surface position is at the suction height for generating mist with the desired spray particle size, and instructs the position control device 18.

[0034] In the above embodiment, the control unit 21 uses the spray condition information recorded in the memory unit 22 to specify the required spray amount, the air pressure corresponding to the required particle size, and the height position. In addition, the spray particle size may be adjusted depending on the situation. For example, the management device 20 may determine the spray particle size of the mist depending on the humidity of the managed area obtained from the humidity sensor S1, and control the position of the catch tank 14 depending on the suction height corresponding to this spray particle size. In this case, it is possible to supply mist with a spray particle size suitable for the humidity.

[0035] In the above embodiment, the position control device 18 is used as the variable mechanism. This position control device 18 has a motor inside. Then, the rotational motion of the motor using a screw mechanism is converted into linear motion, and the position control device 18 slides vertically along the support frame P1. The variable mechanism is not limited to sliding, as long as the height position can be changed. For example, the catch tank 14 may be hung from a hook on a support stand to change the hanging height. In addition, a crank mechanism that converts rotational motion into linear motion using a crank and a rod, a lever mechanism that converts rotational motion into linear motion using a lever and a fulcrum, a lever mechanism that converts rotational motion into linear motion using a lever and a fulcrum, etc. can be used.

[0036] Next, the technical ideas that can be understood from the above-described embodiment and other examples will be described below. (a) The humidifier according to claim 1, characterized in that the variable mechanism is a device that slides up and down relative to a support frame.

[0037] (b) the management device, Identifying a level of the liquid stored in the liquid tank; 3. The humidifier according to claim 2 or (a), wherein a relative position at which a desired spray particle size is achieved is determined according to the water level.

[0038] (c) the management device, 3. The humidifier according to claim 2, further comprising: a humidifier that acquires information about the humidity of a control area, and determines a relative position at which a desired spray particle size is achieved according to the humidity.

[0039] (d) A humidification method according to claim 2, characterized in that the humidification device according to any one of (a) to (c) above is used. [Explanation of symbols]

[0040] A1...humidifier, S1...humidity sensor, M1...air supply device, M2...water supply device, 10...two-fluid nozzle, 11...air supply pipe, 12...water supply pipe, 13...tube, 14...catch tank, 15...water level detection sensor, 20...management device, 21...control unit, 22...memory unit.

Claims

1. A two-fluid spray type humidifier that mixes and sprays gas and liquid, A gas supply unit that pressurizes and supplies the gas; A liquid tank for storing the liquid; a mixing nozzle that sucks the liquid from the liquid tank by a negative pressure generated by pressurizing the gas, mixes the gas and the liquid, and ejects the mixed liquid; a horizontal pipe for supplying the liquid to the plurality of mixing nozzles; a flexible tube that connects the liquid tank and the horizontal pipe and supplies the liquid; a variable mechanism for varying a relative position in a height direction between the mixing nozzle and the liquid tank; A humidifier comprising:

2. A management device connected to the variable mechanism, 2. The humidifier according to claim 1, wherein the control device determines a relative position at which a target spray particle diameter is achieved and instructs the variable mechanism.

3. A humidification method using a two-fluid spray type humidifier that mixes and sprays gas and liquid, comprising: The humidifier comprises: A gas supply unit that pressurizes and supplies the gas; A liquid tank for storing the liquid; a mixing nozzle that sucks the liquid from the liquid tank by a negative pressure generated by pressurizing the gas, mixes the gas and the liquid, and ejects the mixed liquid; a horizontal pipe for supplying the liquid to the plurality of mixing nozzles; a flexible tube that connects the liquid tank and the horizontal pipe and supplies the liquid, A humidification method comprising changing a relative position of the liquid tank with respect to the horizontal pipe, thereby changing a relative position of the mixing nozzle and the liquid tank in a height direction.

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