Inspection device

Abstract

To provide an inspection device capable of inspecting at low cost a transport facility including different types of transport objects and transfer target locations corresponding to each of the transport objects.SOLUTION: An inspection device includes: a detection unit 40 that detects a relative positional relationship with a first detectable unit 30 and a relative positional relationship with a second detectable unit; a first adapter unit 50 including a first placement part 50a that is placed on a first transfer target location 3a in a state where it is positioned with respect to the first transfer target location 3a, and a first unit holding part 50b that holds the detection unit 40 in a positioned state; and a second adapter unit including a second placement part that is placed on a second transfer target location in a state where it is positioned with respect to the second transfer target location, and a second unit holding part that holds the detection unit 40 in a positioned state.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to an inspection device used in a transport facility that includes a transport vehicle that transports an object by holding the object with a holding part, and a transfer target location where the object is transferred by the transport vehicle. [Background technology]

[0002] In a transport facility in which an object to be transported is held by a holding part of a transport vehicle and transported automatically, in order for the transport vehicle to properly transfer the object to and from a target location, it is preferable to transfer the object while improving the accuracy of the relative position between the transport vehicle and the target location. Specifically, in order to properly transfer such an object to be transported, it is preferable that the stopping position of the transport vehicle and the position and posture of the holding part of the transport vehicle that holds the object to be transported are accurately adjusted to the target location.

[0003] Patent Document 1 (Japanese Patent No. 6146537) discloses an inspection device that performs teaching for such adjustment. More specifically, in the inspection device disclosed in Patent Document 1, a teaching unit (20) is held by a holding portion (15) of a transport vehicle (10), and a target unit (30) is installed at a transfer target location (3). The teaching unit (20) is provided with a plurality of distance sensors (23X1, 23Y1, 23Y2, 23Z1, 23Z2, 23Z3), and the plurality of distance sensors have detection directions along the X-, Y-, and Z-axis directions in an XYZ-axis three-dimensional Cartesian coordinate system. The target unit (30) is provided with target plates (32, 33, 34) that are detection targets of the respective distance sensors, whose detection directions are along the X-, Y-, and Z-axis directions, respectively. The teaching unit (20) detects the relative positional relationship in three-dimensional space between the holding portion (15) of the transport vehicle (10) and the transfer target location (3) based on the detection results of these target plates (32, 33, 34) by the plurality of distance sensors. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6146537 Summary of the Invention [Problem to be solved by the invention]

[0005] According to the inspection device disclosed in the above-mentioned Patent Document 1, the relative positional relationship in three-dimensional space between the holding part of the transport vehicle and the transfer target location can be detected by teaching using a teaching unit and a target unit. However, in a transport facility including a plurality of different types of transport objects and transfer target locations corresponding to each type of transport object, not only the shapes of the transport objects differ for each type of transport object, but also the shapes of the transfer target locations to which each transport object is transferred may differ. In such a case, it is necessary to prepare a teaching unit including a plurality of sensors for each type of transport object, which tends to increase the cost of the inspection device.

[0006] In view of the above background, it is desirable to provide an inspection device that can inspect, at low cost, a transport facility that includes multiple different types of transport objects and transfer locations corresponding to each type of transport object. [Means for solving the problem]

[0007] In view of the above, a characteristic configuration of an inspection device is an inspection device used in a transport facility that includes a transport vehicle that transports an object to be transported by holding the object by a holding part, and a transfer target location where the object to be transported by the transport vehicle is transferred, the object to be transported includes a first object and a second object that are different from each other, the transfer target location includes a first transfer target location where the first object is transferred, and a second transfer target location where the second object is transferred, the inspection device including a first detectable unit held by the holding part in place of the first object, a second detectable unit held by the holding part in place of the second object, and the first detectable unit and the second detectable unit, and is configured to detect both the first detectable unit and the second detectable unit, and is provided with a detection unit that detects the relative positional relationship with the first detectable unit and the relative positional relationship with the second detectable unit, a first adapter unit including a first mounting section that is positioned with respect to the first transfer target location and placed on the first transfer target location, and a first unit holding section that holds the detection unit in a positioned state, and a second adapter unit including a second mounting section that is positioned with respect to the second transfer target location and placed on the second transfer target location, and a second unit holding section that holds the detection unit in a positioned state.

[0008] According to this configuration, even in a transport facility where two types of transport objects are transported and two types of transfer target locations are provided corresponding to the types of transport objects, a single type of inspection device can detect the relative positional relationship between each of the two types of transfer target locations and the holding unit of the transport vehicle. Generally, inspection devices tend to be expensive because they are equipped with measuring instruments, etc., but according to this configuration, there is no need to prepare two types of such inspection devices. Therefore, it is easy to reduce the cost of the inspection device. [Brief description of the drawings]

[0009] [Figure 1] Plan view of the transport facility [Diagram 2] Side view of the transport vehicle and the processing device [Diagram 3]Control Block Diagram [Figure 4] Side view of the inspection device during teaching (left side of page), and side view of the inspection device during transfer posture confirmation (right side of page) [Diagram 5] FIG. 2 is a perspective view of a first detected unit and a detection unit; [Figure 6] FIG. 2 is a perspective view of a first adapter unit and a first transfer target portion; [Figure 7] FIG. 13 is a perspective view of a second detected unit and a detection unit; [Figure 8] FIG. 13 is a perspective view of a second adapter unit and a second transfer target portion; [Figure 9] A side view of a unit transport cart that holds a detection unit and a first detected unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] 1. Embodiment An embodiment of an inspection device used in a transport facility will be described with reference to the drawings. As shown in Figures 1 and 2, the conveying equipment 200 includes a conveying vehicle 1 that travels along a travel path L near the ceiling and holds and conveys the conveying object W, a support table 3 (an example of a transfer target location) to which the conveying vehicle 1 transfers the conveying object W, a processing device 2 that is installed adjacent to the support table 3 and processes the conveying object W, and an inspection device 100. The control device Sh of the transport facility 200 and the operation control unit Ss of the transport vehicle 1 communicate wirelessly, for example, by wireless LAN, as shown in Fig. 3. The operation control unit Ss of the transport vehicle 1 is composed of a microcomputer or the like, and in the transport control, the transport vehicle 1 is operated by autonomous control based on commands from the control device Sh of the transport facility 200.

[0011] In this embodiment, the transport target object W includes a first target object W1 and a second target object W2 which are different from each other, the first target object W1 is an EUV pod (Extreme ultraviolet lithography pod), and the second target object W2 is a reticle pod. Furthermore, the support table 3 includes a first support table 3a (an example of a first transfer target location) to which the first target object W1 is transferred, and a second support table 3b (an example of a second transfer target location) to which the second target object W2 is transferred.

[0012] 1 to 9, the direction in which the rail 5 installed along the travel path L extends is referred to as the extension direction X, and the direction perpendicular to the extension direction X as viewed in the up-down direction Z is referred to as the width direction Y. In this example, the transport vehicle 1 travels along the extension direction X.

[0013] 2 or 3, the transport vehicle 1 includes a running section 6 that runs on the rails 5 in an extension direction X along the rails 5, a lifting section 7 that supports an object W to be transported in a suspended state, a lifting device 8 that moves the lifting section 7 in the vertical direction Z, a sliding motor 16b that supplies power to slide the lifting section 7 in the width direction Y relative to the running section 6, and a rotating motor 16a that supplies power to rotate the lifting section 7 about a vertical axis along the vertical direction Z. In this way, the transport vehicle 1 is capable of raising and lowering the lifting section 7 in the vertical direction Z, sliding in the extension direction X and the width direction Y, and rotating about the vertical axis along the vertical direction Z. The traveling section 6 includes a first traveling unit 6A and a second traveling unit 6B adjacent to the first traveling unit 6A in the extension direction X. The first traveling unit 6A includes a pair of wheels 11 that roll on the rails 5 and a traveling motor 12 that rotates the pair of wheels 11. Similarly to the first traveling unit 6A, the second traveling unit 6B includes a pair of wheels 11 and a traveling motor 12.

[0014] 2, the lifting device 8 includes the wound body 14, a take-up belt 15 wound around the wound body 14 and connected to the lifting unit 7 at its tip, and a lifting motor 16c that rotates the wound body 14. The lifting device 8 is configured to rotate the wound body 14 in the forward direction by driving the lifting motor 16c to unwind the take-up belt 15, thereby lowering the lifting unit 7, and to rotate the wound body 14 in the reverse direction by winding up the take-up belt 15, thereby lifting the lifting unit 7.

[0015] The lifting unit 7 includes a pair of gripping claws 18 that are movable in a direction approaching or separating from each other along a horizontal direction (extension direction X in FIG. 2), a gripping motor 19 that moves each of the pair of gripping claws 18 in the direction approaching or separating from each other, and a housing 20 that accommodates the gripping motor 19. The lifting unit 7 is configured to transition between a state in which the pair of gripping claws 18 grip the transport target object W and a state in which the pair of gripping claws 18 release their grip on the transport target object W by driving the gripping motor 19 to move the pair of gripping claws 18 in the direction approaching or separating from each other.

[0016] Next, the inspection device 100 will be described. As described above, the inspection device 100 includes a first object W1 and a second object W2, which are different types of objects to be transported W, and is capable of detecting the relative positional relationship between each of the two types of support tables 3 and the gripping claws 18 (an example of a holding portion) of the transport vehicle 1 by using one type of detection unit 40 (illustrated in FIG. 4), even in a transport facility 200 in which two types of support tables 3, a first support table 3a (an example of a first transfer target location) and a second support table 3b (an example of a second transfer target location), are provided corresponding to each of the transport objects W. Incidentally, after the relative positional relationship between each of the two types of support bases 3 and the gripping claws 18 (an example of a holding portion) of the transport vehicle 1 is detected, the detection unit 40 of the inspection device 100 and the transport vehicle 1 perform wireless communication, for example, via short-range wireless communication or wireless LAN, or wired communication via a cable, etc., and adjust the transport vehicle 1 (set and update profile information) based on the detected relative positional relationship.

[0017] As shown in Figure 4, 5 or 6, the inspection device 100 comprises a first detectable unit 30 that is gripped by the gripping claws 18 in place of the first object W1 (shown in Figure 1), a detection unit 40 that is configured to detect the first detectable unit 30 and detects the relative positional relationship with the first detectable unit 30, and a first adapter unit 50 that has a first bottom surface portion 50a (an example of a first mounting portion) that is positioned relative to the first support base 3a and placed on the first support base 3a, and a first top surface portion 50b (an example of a first unit holding portion) that holds the detection unit 40 in a positioned state. Furthermore, as shown in Figure 7 or Figure 8, the inspection device 100 is equipped with a second detectable unit 70 that is gripped by the gripping claws 18 (not shown) in place of the second object W2 (shown in Figure 1), and a second adapter unit 80 that has a second bottom surface portion 80a (an example of a second mounting portion) that is placed on the second support base 3b in a positioned state relative to the second support base 3b, and a second top surface portion 80b (an example of a second unit holding portion) that holds the detection unit 40 in a positioned state. Here, the detection unit 40 is configured to also detect the second detectable unit 70, and detects the relative positional relationship with the second detectable unit 70. That is, the detection unit 40 is configured to selectively detect both the first detectable unit 30 and the second detectable unit 70, and detects the relative positional relationship with the first detectable unit 30 and the relative positional relationship with the second detectable unit 70.

[0018] More specifically, as shown in Figure 4, 5 or 6, the first support base 3a is provided with a kinematic pin 61 (an example of a first engagement portion) for positioning the first object W1 when the first object W1 is placed on it, the detection unit 40 is provided with a third engagement hole 41 (an example of a third engagement portion) for engaging with the first top surface portion 50b of the first adapter unit 50, and the first adapter unit 50 is provided with a first engagement hole 52 (an example of a first engaged portion) provided on the first bottom surface portion 50a and engaging with the kinematic pin 61 when placed on the first support base 3a, and a first protrusion 51 (an example of a third engaged portion) provided on the first top surface portion 50b and engaging with the third engagement hole 41 when the detection unit 40 is held. Furthermore, as shown in Figure 7 or Figure 8, the second support base 3b is provided with a recess 91 (an example of a second engagement portion) for positioning the second object W2 when the second object W2 is placed on it, and the detection unit 40 is provided with a third engagement hole 41 for engaging with the second top surface portion 80b of the second adapter unit 80, and the second adapter unit 80 is provided with a second main body portion 80c (an example of a second engaged portion) provided on the second bottom surface portion 80a and engaging with the recess 91 when placed on the second support base 3b, and a second protrusion 81 (an example of a fourth engaged portion) provided on the second top surface portion 80b and engaging with the third engagement hole 41 when the detection unit 40 is held.

[0019] That is, the first protrusion 51 of the first adaptor unit 50 and the second protrusion 81 of the second adaptor unit 80 are both protrusions of the same shape that engage with the third engagement hole 41 of the detection unit 40 . As described above, the first bottom surface 50a of the first adapter unit 50 is placed on the first support stand 3a, and the detection unit 40 can be held in a positioned state on the first top surface 50b of the first adapter unit 50, and at the same time, the second bottom surface 80a of the second adapter unit 80 is placed on the second support stand 3b, and the detection unit 40 can be held in a positioned state on the second top surface 80b of the second adapter unit 80. This allows the detection unit 40 to be shared by both the first support stand 3a and the second support stand 3b.

[0020] Although not shown, the first support stand 3a and the second support stand 3b are arranged side by side along the travel path L of the conveying equipment 200 when viewed in the vertical direction Z, for example. As shown in FIG. 4 or FIG. 6, the first support base 3a includes three kinematic pins 61 extending upward in the vertical direction Z on a third top surface portion 62 located above in the vertical direction Z. 8, the second support base 3b has a recessed portion 91 formed in a fourth top surface portion 92 above in the vertical direction Z and recessed downward in the vertical direction Z. When viewed in the vertical direction Z, the recessed portion 91 has a rectangular shape into which the second main body portion 80c of the second adaptor unit 80 is fitted, and the depth in the vertical direction Z is smaller than the thickness in the vertical direction Z of the second main body portion 80c of the second adaptor unit 80.

[0021] 4 or 6, the first adapter unit 50 includes a flat first main body portion 50c, a first bottom surface portion 50a as a lower bottom surface in the vertical direction Z of the first main body portion 50c, and a first top surface portion 50b as an upper top surface in the vertical direction Z of the first main body portion 50c. The first adapter unit 50 includes three first engagement holes 52 in the first bottom surface portion 50a that engage with the kinematic pins 61 when placed on the first support base 3a, and includes a pair of first protrusions 51 in the first top surface portion 50b that engage with a pair of third engagement holes 41 (shown in FIG. 5) of the detection unit 40 when the detection unit 40 is placed and held on the first top surface portion 50b. 8, the second adaptor unit 80 includes a flat second main body portion 80c, a second bottom surface portion 80a as a lower bottom surface in the vertical direction Z of the second main body portion 80c, and a second top surface portion 80b as an upper top surface in the vertical direction Z of the second main body portion 80c. The second adaptor unit 80 includes a pair of second protrusions 81 on the second top surface portion 80b that engage with a pair of third engagement holes 41 (shown in FIG. 7) of the detection unit 40 when the detection unit 40 is placed and held on the second top surface portion 80b. The second main body portion 80c of the second adaptor unit 80 fits into a recessed portion 91 of the second support base 3b when placed on the second support base 3b.

[0022] As shown in Fig. 4, the first detectable unit 30 has a first held portion 31 as a top flange gripped and held by the gripping jaws 18, which has a shape corresponding to the first object W1 (shown in Fig. 2), and the weight and center of gravity are equivalent to those of the first object W1. As shown in Fig. 7, the second detectable unit 70 has a second held portion 71 as a top flange gripped and held by the gripping jaws 18, which has a shape corresponding to the second object W2 (shown in Fig. 2), and the weight and center of gravity are equivalent to those of the second object W2. Here, the first object W1 and the second object W2, which are different in type from each other, are different in shape, weight, and center of gravity position. In this embodiment, being equivalent only needs to be the same to perform the same function, and does not have to be completely identical.

[0023] 4 or 5, the first detectable unit 30 has a first recessed portion 35 recessed from the detection unit 40 side toward the gripping claw 18 side at a portion facing the detection unit 40 in a state in which the relative positional relationship is detected by the detection unit 40, and three first detection target surfaces 32 that are perpendicular to each other and are surfaces to be detected by the detection unit 40 are formed on the inner surface of the first recessed portion 35. Here, the inner surface of the first recessed portion 35 includes all surfaces surrounding the first recessed portion 35. The first detection target surface 32 includes a first opposing surface 32a, which is a plane facing the detection unit 40 in a state where the relative positional relationship is detected by the detection unit 40, a first orthogonal first surface 32c perpendicular to the first opposing surface 32a, and a first orthogonal second surface 32b perpendicular to the first opposing surface 32a and the first orthogonal first surface 32c. The first orthogonal second surface 32b is formed on a wall portion 34 formed perpendicular to the first opposing surface 32a, and a pair of fourth engagement holes 33 with which the first protrusions 51 of the first adapter unit 50 engage in a confirmation state in which the transfer position is confirmed as shown in the right diagram of FIG. 4. The first held portion 31 is made of a flat plate member 31a parallel to the first opposing surface 32a, as shown in FIGS. 4 and 5.

[0024] 7, second detectable unit 70 has second recessed portion 75 recessed from detection unit 40 toward gripping claw 18 at a portion facing detection unit 40 in a state in which the relative positional relationship is detected by detection unit 40, and three second detection target surfaces 72 that are perpendicular to each other and are surfaces to be detected by detection unit 40 are formed on the inner surface of second recessed portion 75. Here, the inner surface of second recessed portion 75 includes all surfaces surrounding second recessed portion 75. The second detection target surface 72 includes a second opposing surface 72a, which is a flat surface facing the detection unit 40 in a state in which the relative positional relationship is detected by the detection unit 40, a second orthogonal first surface 72c perpendicular to the second opposing surface 72a, and a second orthogonal second surface 72b perpendicular to the second opposing surface 72a and the second orthogonal first surface 72c. The second orthogonal second surface 72b is formed on a wall portion 74 formed perpendicular to the second opposing surface 72a, and a pair of fifth engagement holes 73 with which second protrusions 81 (shown in FIG. 8) of a second adapter unit 80 (shown in FIG. 8) engage in a confirmation state in which the transfer position is confirmed. As shown in FIG. 7, the second held portion 71 consists of a first flange portion 71a having a first gripping portion 76 parallel to the second opposing surface 72a, and a second flange portion 71b having a second gripping portion 77 parallel to the second opposing surface 72a.

[0025] 5 or 7, in a state where the detection unit 40 detects the relative positional relationship between the first detectable unit 30 and the second detectable unit 70, the detection unit 40 includes a sensor unit 42 at a position facing the first recessed portion 35 and the second recessed portion 75, and the sensor unit 42 detects in the X, Y, and Z axis directions in an XYZ three-dimensional orthogonal coordinate system. In this embodiment, the X axis direction is synonymous with the extension direction X, the Y axis direction is synonymous with the width direction Y, and the Z axis direction is synonymous with the up-down direction Z, but since the description is given in the three-dimensional orthogonal coordinate system, the directions are referred to as the X, Y, and Z axes. The sensor unit 42 is composed of a first distance sensor 42X1 and a second distance sensor 42X2 whose detection direction is the X-axis direction, a third distance sensor 42Y whose detection direction is the Y-axis direction, and a fourth distance sensor 42Z1, a fifth distance sensor 42Z2, and a sixth distance sensor 42Z3 whose detection direction is the Z-axis direction.

[0026] When the detection unit 40 detects the relative positional relationship with the first detectable unit 30, as shown in Figure 5, the first distance sensor 42X1 and the second distance sensor 42X2, whose detection direction is the X-axis direction, detect the distance to the first orthogonal second surface 32b, the third distance sensor 42Y, whose detection direction is the Y-axis direction, detects the distance to the first orthogonal first surface 32c, and the fourth distance sensor 42Z1, the fifth distance sensor 42Z2, and the sixth distance sensor 42Z3, whose detection direction is the Z-axis direction, detect the distance to the first opposing surface 32a. With the above configuration, detection unit 40 detects the relative position with respect to first detected unit 30 in the X-axis direction and Y-axis direction, the rotation angle around the Z-axis, and the tilt angle with respect to the Z-axis.

[0027] Furthermore, when the detection unit 40 detects the relative positional relationship with the second detected unit 70, as shown in FIG. 7, the first distance sensor 42X1 and the second distance sensor 42X2, whose detection direction is the X-axis direction, detect the distance to the second orthogonal second surface 72b, the third distance sensor 42Y, whose detection direction is the Y-axis direction, detects the distance to the second orthogonal first surface 72c, and the fourth distance sensor 42Z1, the fifth distance sensor 42Z2, and the sixth distance sensor 42Z3, whose detection direction is the Z-axis direction, detect the distance to the second opposing surface 72a. With the above configuration, detection unit 40 detects the relative position with respect to second detected unit 70 in the X-axis and Y-axis directions, the rotation angle around the Z-axis, and the tilt angle with respect to the Z-axis. The detection result by the detection unit 40, i.e., the teaching result, is shared with the operation control unit Ss of the transport vehicle 1. Based on the teaching result, the transport vehicle 1 adjusts the relative positional relationship between the first support base 3a and the gripping jaws 18 when transferring the first object W1 to the first support base 3a, and adjusts the relative positional relationship between the second support base 3b and the gripping jaws 18 when transferring the second object W2 to the second support base 3b.

[0028] The sensor unit 42 of the detection unit 40 overlaps the first detectable unit 30 and the second detectable unit 70 in plan view in the vertical direction Z, making the detection unit 40 compact in plan view. The bottom surface 43 of the detection unit 40 is provided with a third engagement hole 41 that engages with both a pair of first protrusions 51 provided on the first top surface 50b of the first adapter unit 50 and a pair of second protrusions 81 provided on the second top surface 80b of the second adapter unit 80.

[0029] 9, the inspection device 100 further includes a unit transporting cart K for holding and transporting the detection unit 40, and the unit transporting cart K is configured to be movable by being equipped with wheels K2. The unit transporting cart K includes a support plate K3 (an example of a cart-side holding part) that holds the detection unit 40 in a positioned state, and a cart-side detectable part that is fixed in position relative to the support plate K3 and is to be detected by the detection unit 40 held by the support plate K3. Incidentally, the support plate K3 is provided with a pair of third protrusions K1 that engage with a pair of third engagement holes 41 of the detection unit 40, and the detection unit 40 is positioned and fixed to the support plate K3 by the third protrusions K1 engaging with the third engagement holes 41. The unit transport cart K includes an attachment part T to which one selected from the first detectable unit 30 and the second detectable unit 70 can be attached. The attachment part T includes a first attachment part T1 to which the first detectable unit 30 can be attached, and the first detectable unit 30 attached to the first attachment part T1 functions as the cart-side detectable part. Furthermore, the attachment part T includes a second attachment part T2 to which the second detectable unit 70 can be attached, and the second detectable unit 70 attached to the second attachment part T2 functions as the cart-side detectable part. As described above, with the detection unit 40 positioned on the unit transport cart K and the first detectable unit 30 attached to the first attachment part T1, calibration can be performed for detection of the relative positional relationship of the first detectable unit 30 with respect to the detection unit 40. Also, with the detection unit 40 positioned on the unit transport cart K and the second detectable unit 70 attached to the second attachment part T2, calibration can be performed for detection of the relative positional relationship of the second detectable unit 70 with respect to the detection unit 40.

[0030] 2. Other embodiments (1) In the above embodiment, the transport objects W are two different types of objects, a first object W1 and a second object W2, and the inspection device 100 is used in a transport facility 200 that includes a first support table 3a (an example of a first transfer target location) to which the first object W1 is transferred, and a second support table 3b (an example of a second transfer target location) to which the second object W2 is transferred. However, the transport object W may include three or more different types of objects, and the transfer target locations where each object is transferred may be inspection devices 100 used in a transport facility 200 provided for each of the transport objects W. In the inspection device 100, for each object to be transported W, an adapter unit is provided which includes a detection unit which is held by the gripping claws 18 in place of the object, a placement section which is placed at the transfer target location in a state positioned relative to the transfer location where the object is to be transferred, and a unit holding section which holds the detection unit 40 in a positioned state.

[0031] (2) In the above embodiment, an example was described in which the first detectable unit 30 and the second detectable unit 70 have top flanges (first held portion 31 and second held portion 71) that are gripped by the gripping claws 18 with different shapes, weights, and center of gravity positions that are different from each other. However, without being limited to this configuration, the first detectable unit 30 and the second detectable unit 70 may differ in only one of the shape, weight, and center of gravity position. For example, the shape and weight may be the same, and only the center of gravity position may be different.

[0032] (3) In the above embodiment, the configuration example is shown in which three kinematic pins 61 are provided, and a pair of first protrusions 51 and a pair of second protrusions 81 are provided. However, the present invention is not limited to this configuration, and it is sufficient that the kinematic pins 61, the first protrusions 51, and the second protrusions 81 are each provided in a plurality of two or more. In this case, the first engagement holes 52 that engage with the kinematic pins 61 are provided in the same number as the kinematic pins 61, the third engagement holes 41 and the fourth engagement holes 33 that engage with the first protrusions 51 are also provided in the same number as the first protrusions 51, and the third engagement holes 41 and the fifth engagement holes 73 that engage with the second protrusions 81 are also provided in the same number as the second protrusions 81.

[0033] (4) In the above embodiment, the configuration includes, as the bogie-side detectable portion, the first detectable unit 30 attached to the first attachment portion T1 or the second detectable unit 70 attached to the second attachment portion T2. However, the present invention is not limited to this configuration, and the first detectable unit 30 or the second detectable unit 70 may be integrally provided on the unit transport cart K as the cart-side detectable portion.

[0034] Furthermore, the configurations disclosed in the above embodiments (including other embodiments, the same applies below) can be applied in combination with configurations disclosed in other embodiments, provided that no contradiction arises. Furthermore, the embodiments disclosed in this specification are merely examples, and the embodiments of the present invention are not limited thereto, and can be appropriately modified within the scope that does not deviate from the purpose of the present invention.

[0035] 3. Summary of this embodiment The inspection device is used in a transport facility that includes a transport vehicle that holds an object to be transported by a holding unit and transports the object to be transported, and a transfer target location where the object to be transported by the transport vehicle is transferred, the object to be transported includes a first object and a second object that are different from each other, and the transfer target location includes a first transfer target location where the first object is transferred and a second transfer target location where the second object is transferred, a first detectable unit held by the holding part in place of the first object; a second detectable unit held by the holding portion in place of the second object; a detection unit configured to detect both the first detectable unit and the second detectable unit, and detecting a relative positional relationship with the first detectable unit and a relative positional relationship with the second detectable unit; a first adapter unit including a first placement section that is placed on the first transfer target location in a state where the first placement section is positioned with respect to the first transfer target location, and a first unit holding section that holds the detection unit in a positioned state; The second adapter unit includes a second mounting section that is positioned relative to the second transfer target location and is placed on the second transfer target location, and a second unit holding section that holds the detection unit in a positioned state.

[0036] According to this configuration, even in a transport facility where two types of transport objects are transported and two types of transfer target locations are provided corresponding to the types of transport objects, a single type of inspection device can detect the relative positional relationship between each of the two types of transfer target locations and the holding unit of the transport vehicle. Generally, inspection devices tend to be expensive because they are equipped with measuring instruments, etc., but according to this configuration, there is no need to prepare two types of such inspection devices. Therefore, it is easy to reduce the cost of the inspection device.

[0037] Here, a first engagement portion is provided in the first transfer target location to position the first object in a state in which the first object is placed thereon, The second transfer target location is provided with a second engagement portion for positioning the second object in a state in which the second object is placed thereon; the detection unit includes a third engagement portion for engaging with the first unit holding portion and the second unit holding portion, the first adapter unit includes a first engaged portion that is provided on the first placement portion and engages with the first engaging portion when placed on the first transfer target location, and a third engaged portion that is provided on the first unit holding portion and engages with the third engaging portion when holding the detection unit, It is preferable that the second adapter unit comprises a second engaged portion provided on the second mounting portion and engaging with the second engaging portion when placed on the second transfer target location, and a fourth engaged portion provided on the second unit holding portion and engaging with the third engaging portion when holding the detection unit.

[0038] According to this configuration, the detection unit can be held in an appropriately positioned state at the first transfer target location via the first adaptor unit, and the detection unit can be held in an appropriately positioned state at the second transfer target location via the second adaptor unit. Therefore, one type of inspection device can be appropriately held at both of the two types of transfer target locations, and the relative positional relationship between each of the two types of transfer target locations and the holding part of the transport vehicle can be detected.

[0039] Here, the first object and the second object are different from each other in at least one of shape, weight, and center of gravity position, the first detection unit has a shape of a held portion held by the holding portion corresponding to the first object, and has a weight and a center of gravity similar to those of the first object; It is preferable that the second detectable unit has a shape of a hold portion held by the holding portion that corresponds to the second object, and has a weight and a center of gravity position that are equivalent to those of the second object.

[0040] According to this configuration, the first detectable unit can be detected by the inspection device in a state similar to the state in which the first object is held by the holding part of the transport vehicle, and the second detectable unit can be detected by the inspection device in a state similar to the state in which the second object is held by the holding part of the transport vehicle. Therefore, it is easy to improve the accuracy of detecting the relative positional relationship between each of the two types of transfer target locations and the holding part of the transport vehicle.

[0041] wherein the first detectable unit includes a first recessed portion recessed from the detection unit side toward the holding portion side at a portion facing the detection unit in a state in which the relative positional relationship is detected by the detection unit, Three first detection target surfaces that are surfaces to be detected by the detection unit and are perpendicular to each other are formed on an inner surface of the first recessed portion, the second detected unit includes a second recessed portion recessed from the detection unit side toward the holding portion side at a portion facing the detection unit in a state in which the relative positional relationship is detected by the detection unit, It is preferable that three second detection target surfaces, which are surfaces to be detected by the detection unit and are perpendicular to one another, be formed on an inner surface of the second recess.

[0042] According to this configuration, when the detection unit detects the relative positional relationship, the detection part of the detection unit, such as a sensor, can be positioned inside the first recessed portion of the first detectable unit or the second recessed portion of the second detectable unit, making it easier to reduce the external size of the detection unit compared to when the detection part of the detection unit is positioned outside the first detectable unit or the second detectable unit. Furthermore, since three mutually perpendicular detection surfaces are formed on the inner surfaces of each of the first recess and the second recess, the relative positional relationship in three-dimensional space between the holding portion of the transport vehicle and the transfer corresponding location can be properly detected.

[0043] The apparatus further includes a unit transport vehicle for holding and transporting the detection unit, The unit transport cart includes: A carriage-side holding portion that holds the detection unit in a positioned state; It is preferable that the vehicle further comprises a vehicle-side detectable portion whose position is fixed relative to the vehicle-side holding portion and which serves as an object of detection by the detection unit held by the vehicle-side holding portion.

[0044] With this configuration, the detection unit can be easily transported, and calibration processing of the detection unit can be performed by having the detection unit detect the cart-side detected part while the detection unit is held on the unit transport cart.

[0045] Here, the unit transport cart includes an attachment portion to which one selected from the first detectable unit and the second detectable unit can be attached, It is preferable that the first detectable unit or the second detectable unit attached to the attachment portion functions as the bogie-side detectable portion.

[0046] According to this configuration, the calibration process can be performed using the detected unit that is actually used, which makes it easier to improve the accuracy of the calibration process. [Industrial Applicability]

[0047] The technology according to the present invention can be used in an inspection device that can inspect, at low cost, a transport facility that includes different types of transport objects and transfer locations corresponding to each of the transport objects. [Explanation of symbols]

[0048] 1: Transport vehicle 3: Support stand (transfer target area) 3a: First support platform (first transfer target location) 3b: Second support platform (second transfer target location) 18: Gripping claw (holding part) 30: First detected unit 31: First held part 32: First detection target surface 33: Fourth engagement hole 35: First recess 40:Detection unit 41: Third engagement hole (third engagement portion) 50: First adapter unit 50a: First bottom surface portion (first placement portion) 50b: First top surface portion (first unit holding portion) 51: 1st protrusion (3rd engaged part) 52: First engagement hole (first engaged part) 61: Kinematic pin (first engagement part) 70: Second detected unit 71:Second held part 72: Second detection target surface 73: Fifth engagement hole 75: Second recess 80: Second adapter unit 80a: Second bottom surface portion (second placement portion) 80b: Second top surface portion (second unit holding portion) 80c: Second main body part (second engaged part) 81: 2nd protrusion (4th engaged part) 91: Recessed part (second engagement part) 100: Inspection equipment 200:Transportation equipment K: Unit transport cart K3: Support plate (cart side holding part) T: Mounting part W: Object to be transported W1: First object W2: Second object

Claims

1. An inspection device for use in a transport facility, the inspection device comprising: a transport vehicle that transports an object to be transported while holding the object by a holding part; and a transfer target location where the object to be transported by the transport vehicle is transferred; the object to be transported includes a first object and a second object that are different from each other; and the transfer target location includes a first transfer target location where the first object is transferred and a second transfer target location where the second object is transferred, a first detectable unit held by the holding portion in place of the first object; a second detection target unit held by the holding portion in place of the second object; a detection unit configured to detect both the first detectable unit and the second detectable unit, and to detect a relative positional relationship between the first detectable unit and the second detectable unit; a first adapter unit including a first placement section that is placed on the first transfer target location in a state where the first placement section is positioned with respect to the first transfer target location, and a first unit holding section that holds the detection unit in a positioned state; a second adapter unit including a second placement section that is placed on the second transfer target location in a state where the second placement section is positioned with respect to the second transfer target location, and a second unit holding section that holds the detection unit in a positioned state; An inspection device comprising:

2. A first engagement portion is provided at the first transfer target location to position the first object in a state where the first object is placed thereon; A second engagement portion is provided at the second transfer target location to position the second object in a state where the second object is placed thereon; the detection unit includes a third engagement portion for engaging with the first unit holding portion and the second unit holding portion, the first adapter unit includes a first engaged portion that is provided on the first placement portion and engages with the first engaging portion in a state where the first adapter unit is placed on the first transfer target location, and a third engaged portion that is provided on the first unit holding portion and engages with the third engaging portion in a state where the detection unit is held, The inspection device of claim 1, wherein the second adapter unit comprises a second engaged portion provided on the second mounting portion and engages with the second engaging portion when placed on the second transfer target location, and a fourth engaged portion provided on the second unit holding portion and engages with the third engaging portion when holding the detection unit.

3. The first object and the second object are different from each other in at least one of shape, weight, and center of gravity position, the first detection unit has a shape of a held portion held by the holding portion corresponding to the first object, and has a weight and a center of gravity similar to those of the first object; The inspection device according to claim 1 , wherein the second detectable unit has a shape of a held portion held by the holding portion that corresponds to the second object, and has a weight and center of gravity position that are equivalent to those of the second object.

4. the first detected unit includes a first recessed portion recessed from the detection unit side toward the holding portion side at a portion facing the detection unit in a state in which the relative positional relationship is detected by the detection unit, Three first detection target surfaces that are surfaces to be detected by the detection unit and are perpendicular to each other are formed on an inner surface of the first recessed portion, the second detected unit includes a second recessed portion recessed from the detection unit side toward the holding portion side at a portion facing the detection unit in a state in which the relative positional relationship is detected by the detection unit, The inspection device according to claim 1 , wherein three second detection target surfaces that are surfaces to be detected by the detection unit and are perpendicular to each other are formed on an inner surface of the second recessed portion.

5. a unit transport cart for holding and transporting the detection unit, The unit transport cart includes: A carriage-side holding portion that holds the detection unit in a positioned state; The inspection device according to claim 1 , further comprising: a carriage-side detectable portion whose position is fixed relative to the carriage-side holding portion and which is to be detected by the detection unit held by the carriage-side holding portion.

6. the unit transport cart includes an attachment portion to which one selected from the first detectable unit and the second detectable unit can be attached, The inspection device according to claim 5 , wherein the first detectable unit or the second detectable unit attached to the attachment portion functions as the carriage-side detectable portion.

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