Semi-finished pipe manufacturing method and semi-finished pipe

Abstract

To provide a semi-product tube serving in manufacturing a tube (final product tube) with a small outer diameter by using a lathe, even if the lathe has a small outer diameter and therefore holding the tube with a chucking jig is difficult and cutting is difficult.SOLUTION: A semi-product tube 1 is a semi-product tube before formed into a final product tube 2 by being cut using a lathe. The semi-product tube 1 comprises: a first layer 11 for a final product tube constitution which remains even after being cut by the lathe; and a second dummy layer 12 which is formed on the outside of the first layer 11, and does not remain after being cut by the lathe.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a semi-finished pipe manufacturing method, a semi-finished pipe, a pipe manufacturing method and a pipe. Here, the term "semi-finished pipe" refers to a so-called intermediate product on the way to the final pipe product, which is in a state that can be sold. [Background technology]

[0002] In recent years, there has been an increasing need for long, thin tubes with very small outer diameters in a variety of fields, such as metal tubes called microtubes or micropipes, which are used in contact probes for semiconductor inspection, nozzles for medical and printing applications, connectors for optical communication, and metal ferrules for optical communication. In such a pipe, it may be desirable to form a recess or a protrusion on the surface of the pipe for the purpose of mounting the pipe to a device, for the purpose of indicating the manufacturer of the pipe, and the like. For example, when a contact pin (plunger) and a spring for restoring force are placed inside a tube (barrel) to make a contact probe for semiconductor inspection, if a convex portion is formed on the outside of the tube, the contact probe will be less likely to come loose by fitting it into a concave portion provided on the mounting part, making it possible to perform even more reliable inspections of miniaturized and highly dense semiconductor electrodes. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2001-162404 A Summary of the Invention [Problem to be solved by the invention]

[0004] Patent Document 1 discloses a technique for manufacturing a highly accurate cylindrical base by cutting the surface of a cylindrical workpiece using a conventional lathe as is, as shown in Fig. 14. In this technique, a lathe jig for holding a cylindrical workpiece 9120 has a pair of cylindrical pressing members 9112 and 9114, and the pressing members 9112 and 9114 have recesses 9122 and 9124 into which an end of a shaft 9116 can be inserted. When cutting the surface of a cylindrical workpiece using the lathe jig, the shaft 9116 is inserted into the cylindrical workpiece 9120, and the gap between the shaft 9116 and the cylindrical workpiece 9120 is filled with a filling member 9118 to hold the cylindrical workpiece 9120 and cut its surface. The technique disclosed in Patent Document 1 is useful when the cylindrical workpiece 9120 has a large diameter, such as when the cylindrical substrate is used to manufacture a substrate for an electrophotographic photosensitive member or a developing sleeve for electrophotography.

[0005] However, in a very small tube, for example, with an outer diameter of less than 0.6 to 1.0 mm, the inner diameter of the tube is even smaller, so it is almost impossible to insert shaft 9116 therein or fill the gap with filler member 9118 as described in Patent Document 1, and it is difficult to machine the surface of the tube using the method of Patent Document 1. In addition, tubes with very small outer diameters usually cannot be gripped by the chucking tool of a lathe, or even if they are gripped, the gripping is unstable, making it very difficult to provide tubes with recesses or protrusions formed on the surface by cutting.

[0006] Therefore, an object of the present invention is to provide a method for manufacturing a tube having a small outer diameter and having a concave or convex portion on its surface using a lathe, even if the lathe is difficult to use for cutting because a small outer diameter makes it difficult to grip the tube with a chucking jig, and to provide the tube. In addition, there are users who wish to receive not a final product (final product pipe), but a pipe in the previous stage, that is, a semi-finished product (semi-finished pipe), and cut it on a lathe to produce a small outer diameter pipe (final product pipe) with a desired concave or convex shape on the surface, and there is a market need for such semi-finished pipes. Therefore, the objective of the present invention is to provide a semi-finished pipe that is useful for producing a small outer diameter pipe (final product pipe) with a concave or convex shape on the surface by using a lathe, even if the lathe is difficult to cut because it is difficult to hold the small outer diameter with a chucking jig, and a method for producing the same. [Means for solving the problem]

[0007] [1] The semi-finished pipe (first semi-finished pipe) of the present invention is a semi-finished pipe (first semi-finished pipe) used to be cut by a lathe to form a final product pipe, and is characterized in that it comprises a first layer for forming the final product pipe that remains after the cutting by the lathe, and a dummy second layer that is formed outside the first layer and is to be cut by the lathe. "Finished pipe" is in contrast to "semi-finished pipe" and means pipe that is a finished product, whether the pipe is traded in its own right or as part of a finished product. "For dummy" means that it is not used for constructing a final product pipe, but is used for holding by a chucking jig. The first layer may be mainly made of a rare metal, and the second layer may be made of a common metal (base metal).

[0008] With such a semi-finished tube (first semi-finished tube), a dummy second layer to be cut by the lathe is formed on the outside of the first layer for the final product tube that remains even after being cut by the lathe. Therefore, by gripping the dummy second layer, it is possible to provide a semi-finished tube that can be used to manufacture a tube (final product tube) with a small outer diameter and having a concave or convex portion on its surface, even if the lathe is difficult to use for cutting because it is difficult to grip with a chucking jig when the outer diameter is small. In this specification, the term "chucking jig" includes jigs that grip with jaws, such as three-jaw chucks and jaw chucks (jaws), as well as jigs that grip by contact or surface contact, such as open jaws and closed jaws. Note that a collet chuck is a type of closed jaw, and it is preferable to use a collet chuck as the chucking jig in this application.

[0009] [2] In the above-described semi-finished pipe (first semi-finished pipe), the outer diameter of the first layer is preferably close to the outer diameter of the final pipe.

[0010] [3] In the above-described semi-finished tube (first semi-finished tube), it is preferable that the first layer has a small outer diameter that makes it difficult to grip with a chucking jig of the lathe, and the second layer has a large outer diameter that can be gripped by the chucking jig of the lathe.

[0011] [4] In the semi-finished pipe (first semi-finished pipe) described above, the first layer preferably has an outer diameter of 0.05 mm or more and less than 0.60 mm, and the second layer preferably has an outer diameter of 0.40 mm or more and less than 3.00 mm. More preferably, the first layer has an outer diameter of 0.05 mm or more and less than 0.50 mm, and the second layer has an outer diameter of 0.50 mm or more and less than 2.00 mm. More preferably, the first layer has an outer diameter of 0.10 mm or more and less than 0.40 mm, and the second layer has an outer diameter of 0.40 mm or more and less than 1.00 mm. More preferably, the first layer has an outer diameter of 0.10 mm or more and less than 0.30 mm, and the second layer has an outer diameter of 0.40 mm or more and less than 0.60 mm.

[0012] [5] In the above-described semi-finished pipe (first semi-finished pipe), the second layer preferably has better machinability than at least a portion of the first layer adjacent to the second layer.

[0013] [6] In the semi-finished pipe (first semi-finished pipe) described above, the first layer has a first outer layer forming an adjacent portion to the second layer, and a first inner layer formed inside the first outer layer, and it is preferable that the first outer layer has a Vickers hardness in the range of 350 to 550 HV.

[0014] [7] In the above-described semi-finished pipe (first semi-finished pipe), it is preferable that the first inner layer is made of any one of gold, a gold-cobalt alloy, palladium, a palladium alloy, or a co-deposit of polytetrafluoroethylene and nickel, the first outer layer is made of any one of a nickel-cobalt alloy, a nickel-manganese alloy, or pure nickel, and the second layer is made of any one of copper, pure nickel, or a nickel-manganese alloy. Polytetrafluoroethylene (PTFE) is a fluororesin consisting only of fluorine atoms and carbon atoms. Further, examples of pure nickel include NC-Ni (Ni200) (normal pure nickel), LC-Ni (Ni201) (nickel with an especially low carbon content), D-Ni (nickel with small amounts of aluminum and titanium added), A-Ni (high-purity nickel with a purity of 99.7% or more), and K-Ni (high-purity nickel with a purity of 99.5% or more) (sold by Hitachi Metals, Ltd., etc.).

[0015] [8] The method for manufacturing a semi-finished pipe (first semi-finished pipe) of the present invention is characterized by comprising the steps of: preparing a wire; forming, on the outer periphery of the wire, a first layer for a final product pipe configuration that will remain after cutting by the lathe; and forming, on the outer periphery of the first layer, a second layer for a dummy that will be cut by the lathe. According to this method for manufacturing a semi-finished tube (first semi-finished tube), a first layer for the final product tube, which remains even after being cut by the lathe, is formed on the wire, and a dummy second layer to be cut by the lathe is formed outside of that.Therefore, even if a lathe is used for cutting purposes because it is difficult to hold the small outer diameter with a chucking jig, by holding the dummy second layer, it is possible to provide a method for manufacturing a semi-finished tube, which is used to manufacture a tube (final product tube) with a small outer diameter and having a concave or convex portion on its surface, using the lathe.

[0016] [9] The manufacturing method of a semi-finished tube (second semi-finished tube) of the present invention is a manufacturing method of a semi-finished tube using a lathe to manufacture a second semi-finished tube that is closer to a final product tube from a semi-finished tube (first semi-finished tube), the manufacturing method comprising the steps of: preparing the semi-finished tube (first semi-finished tube); holding the semi-finished tube (first semi-finished tube) from outside the second layer; cutting the second layer by cutting from outside the second layer to form recesses or protrusions in the first layer; and forming the second semi-finished tube into the second layer with the held portions and the portions where the recesses or protrusions are formed connected to each other. According to this method for manufacturing a semi-finished pipe (second semi-finished pipe), the first semi-finished pipe can be gripped from outside the second layer to form a concave or convex portion in the first layer. The gripped portion and the portion where the concave or convex portion is formed are connected to form the semi-finished pipe (second semi-finished pipe), and the semi-finished pipe (second semi-finished pipe) can be cut to form a final pipe product. Thus, according to this manufacturing method, even if a lathe is used that is difficult to cut because a small outer diameter makes it difficult to grip the pipe with a chucking jig, a method for manufacturing a semi-finished pipe (second semi-finished pipe) can be provided that can manufacture a pipe (final pipe product) having a small outer diameter and a concave or convex portion on its surface using the lathe.

[0017]

[10] The semi-finished pipe (second semi-finished pipe) of the present invention is a semi-finished pipe (second semi-finished pipe) used to form a final product pipe by cutting at predetermined locations, and is characterized in having a dummy layer lamination area where a first layer for forming the final product pipe and a dummy second layer formed on the outside of the first layer are laminated, and a first layer unevenness formation area where a recess or protrusion is formed. With this configuration, the final product pipe can be obtained by grasping the dummy layer stacked area and cutting off the area where the first layer is uneven, making it possible to provide a semi-finished pipe (second semi-finished pipe) that can be used to manufacture a pipe (final product pipe) with a small outer diameter and having recesses or protrusions on its surface.

[0018]

[11] The method for manufacturing a pipe (final pipe product) of the present invention is characterized by including a step of preparing the above-mentioned semi-finished pipe (second semi-finished pipe), a step of holding the semi-finished pipe (second semi-finished pipe) at the dummy layer lamination location, and a cutting step of cutting off the first layer unevenness formation location from the dummy layer lamination location side. According to this method for manufacturing a pipe (final pipe product), the final pipe product can be obtained by grasping the dummy layer stacked area and cutting off the area where the first layer unevenness is formed, making it possible to provide a method for manufacturing a semi-finished pipe (second semi-finished pipe product) that is used to manufacture a pipe (final pipe product) with a small outer diameter and having recesses or protrusions on its surface.

[0019]

[12] The tube (final tube) manufacturing method of the present invention is a tube manufacturing method for manufacturing a final tube from a semi-finished tube (first semi-finished tube) by using a lathe, and is characterized by including the steps of: preparing the semi-finished tube (first semi-finished tube); holding the semi-finished tube (first semi-finished tube) from outside the second layer; cutting the second layer from outside to form a recess or protrusion in the first layer; and cutting the semi-finished tube (first semi-finished tube) at a predetermined location. According to this method for manufacturing a tube (final product tube), even if a lathe is used in which cutting is difficult because a small outer diameter makes it difficult to grip with a chucking jig, by gripping the dummy second layer, it is possible to provide a semi-finished tube that can be used to manufacture a tube (final product tube) with a small outer diameter and having a concave or convex portion on its surface.

[0020]

[13] In the method for producing a pipe (final pipe product) of the present invention, when producing a semi-finished pipe (first semi-finished pipe or second semi-finished pipe), it is preferable to cut the second layer so that a part of it remains. By using this type of pipe (final pipe product) manufacturing method, part of the second layer can be left remaining, which can be used to adjust the depth of the recesses or the height of the protrusions, for electromagnetic shielding (strengthening), etc.

[0021]

[14] The pipe of the present invention (final product pipe) is characterized in that the outside diameter of the metal pipe is 0.05 mm or more and less than 0.60 mm, and the pipe has recesses or protrusions on the outer periphery as well as cutting marks. Such tubes (final product tubes) have a small outer diameter, making it possible to manufacture small-diameter contact probes (used for semiconductor inspection, etc.) that were previously difficult to manufacture, and can be used for a variety of purposes. Also, tubes with small outer diameters require a certain level of strength, but the presence of cutting marks indicates that the outer diameter has been reduced by cutting, which can ease concerns about strength, etc. This is because, when the outer layer is formed by sputtering or plating, the outer layer is usually thin and has low strength, whereas tubes with cutting marks have a thick outer layer and high strength.

[0022]

[15] In the semi-finished tube (first semi-finished tube) described above (e.g., [1] to [5]), the first layer and the second layer are preferably made of metals that are alloyed with the first layer and the vicinity of the first layer of the second layer when the semi-finished tube is heated. Note that alloying refers to the mixing of the metal of the first layer and the metal of the second layer (through thermal diffusion). Alloying refers to the alloying of the metal of the first layer with the metal of the second layer. An alloy is an alloy of the metal of the first layer with the metal of the second layer. The metals of the first and second layers that are alloyed are not limited to pure metals. They may be metals containing impurities. In this way, the first layer can be easily alloyed and hardened by heating. The vicinity of the first layer of the second layer can also be hardened by alloying. On the other hand, the outside of the second layer is not alloyed or has a low (small) degree of alloying (alloying rate), making it easy to cut.

[0023]

[16] In the semi-finished tube (first semi-finished tube) described above (for example,

[15] ), the first layer is preferably made of palladium or silver, and the first layer is preferably made of copper or iron. Note that "palladium," "silver," "copper," and "iron" refer to the main components that make up the layer, and include metals that are composed of only a single element as well as metals that contain impurities. In this way, alloying is facilitated.

[0024]

[17] It is preferable that the semi-finished tube (first semi-finished tube) described above (e.g.,

[15] or

[16] ) further comprises a third layer of metal formed inside the first layer, and an intermediate layer formed between the first layer and the third layer, wherein the intermediate layer is configured to prevent the metal of the third layer from being alloyed with the metals of the first layer and the second layer when heated. In this way, when the metal of the first layer and the metal of the second layer are alloyed, it is possible to prevent the metal of the third layer from being alloyed therewith. Furthermore, the third layer is preferably made of a material such as a metal having a lower thermal conductivity than the first layer (more preferably the first layer and the third layer, and even more preferably the first layer, the second layer and the third layer). The intermediate layer may be made of a rare metal, the third layer may be made of a rare metal, or the third layer may be made of an alloy.

[0025]

[18] In the semi-finished tube (first semi-finished tube) described above (eg,

[16] ), the intermediate layer is preferably made of nickel. When the intermediate layer is made of nickel, it is possible to prevent the metal of the third layer from being alloyed with the metal of the first layer (or the first and second layers) by heating, even if various metals with higher thermal conductivity than nickel are used as the metal of the third layer, because nickel has a low thermal conductivity among metals. Nickel is also easy to obtain. It is also easy to form the intermediate layer by electrolytic plating, etc.

[0026]

[19] In the semi-finished pipe (first semi-finished pipe) described above (e.g., any one of [1] to [4]), it is preferable that the first layer is made of an alloy, and the second layer is configured such that the degree of alloying decreases (smallers) toward the outside. In this way, it is possible to make the first layer hard. Also, the second layer is softer in the outward direction (a direction that does not require precise cutting), making it easier to cut. On the other hand, the second layer is harder in the opposite direction (towards the first layer, a direction that requires precise cutting), making it possible to reduce cutting errors.

[0027]

[20] In the method for manufacturing a semi-finished tube (first semi-finished tube) described above (e.g., [8]), in the step of forming the first layer and the step of forming the second layer, it is preferable that the first layer and the second layer adjacent to the first layer are formed from metals that are alloyed when the semi-finished tube is heated. In this way, the semi-finished pipe can be easily alloyed by heating it.

[0028]

[21] A tube manufacturing method for producing a final tube product from a semi-finished tube using a lathe of the present invention includes the steps of: preparing a semi-finished tube (e.g., as described in any one of

[15] to

[18] ); holding the semi-finished tube from outside the second layer; cutting the second layer from outside the second layer so that a portion of it remains; and an alloying step of heating the semi-finished tube to alloy the first layer and the remaining second layer. In this way, in the cutting step, the second layer is cut in a soft state before being alloyed, which makes cutting easy. Also, in the alloying step, the first layer and the remaining second layer are easily made into a homogenized alloy. Generally, alloys are harder than the metals in the first and second layers, so if the strength of the final product pipe is the same, the thickness of the layer (wall) of the final product pipe can be thinner when alloyed than when not alloyed, and the outer diameter of the pipe can also be made smaller.

[0029]

[22] A tube manufacturing method for producing a final tube product from a semi-finished tube using a lathe according to the present invention includes the steps of: preparing a semi-finished tube (e.g., as described in any one of

[15] to

[18] ); an alloying step of heating the semi-finished tube to alloy the first layer and the second layer in the vicinity of the first layer; a gripping step of gripping the semi-finished tube from outside the second layer; and a cutting step of cutting the second layer from outside the second layer, thereby cutting the second layer down to the vicinity of the first layer. In this way, in the cutting process, the material is softer in the outward direction of the second layer 12 (a direction that does not require precise cutting), making it easier to cut the outside of the second layer. On the other hand, the material is harder in the opposite direction (towards the first layer, a direction that requires precise cutting), making it possible to prevent cutting errors on the outer periphery of the final product tube 2. Generally, alloys are harder than the metals in the first and second layers, so if the strength of the final product pipe is the same, the thickness of the layer (wall) of the final product pipe can be thinner when alloyed than when not alloyed, and the outer diameter of the pipe can also be made smaller. [Brief description of the drawings]

[0030] [Figure 1] FIG. 1 is a diagram for explaining a semi-finished tube 1 (first semi-finished tube) and a final product tube 2 according to the first embodiment. [Diagram 2] 2A to 2C are diagrams for explaining a manufacturing method of the semi-finished pipe 1 according to the first embodiment. [Diagram 3] FIG. 2 is a diagram for explaining a manufacturing method of the final product pipe 2 according to the first embodiment. [Figure 4] FIG. 2 is a diagram (diagram) for explaining dimensions of a semi-finished pipe 1, a final product pipe 2, and the like according to the first embodiment. [Diagram 5] FIG. 2 is a diagram for explaining an example of use of the final product pipe 2 according to the first embodiment. [Figure 6] FIG. 1 is a diagram (diagram) for explaining dimensions, etc. of a semi-finished pipe 1, a final product pipe 2, etc. according to embodiments 2 to 8. [Figure 7] FIG. 13 is a diagram for explaining embodiments 9 to 11. [Figure 8]FIG. 13 is a diagram (diagram) for explaining dimensions, etc. of a semi-finished pipe 1, a final product pipe 2, etc. according to the 9th to 11th embodiments. [Figure 9] FIG. 23 is a diagram for explaining embodiment 12 (method of cutting after alloying). [Figure 10] FIG. 15 is a diagram for explaining embodiment 12 (method of cutting before alloying). [Figure 11] FIG. 2 is a diagram (diagram) for explaining dimensions, etc. of a semi-finished pipe 1, a final product pipe 2, etc. according to the twelfth to sixteenth embodiments. [Figure 12] 11A to 11C are diagrams for explaining modified examples of cutting the first layer 11. [Figure 13] 4A to 4C are diagrams illustrating modified examples of the first layer 11 and the second layer 12. [Figure 14] FIG. 1 is a diagram for explaining a conventional technique. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0031] Hereinafter, the semi-finished pipe, the semi-finished pipe manufacturing method, the pipe, and the pipe manufacturing method of the present invention will be described with reference to Figs. 1 to 13. Note that each of the drawings described below is a schematic diagram showing the actual shape, configuration, method, etc. in a simplified manner.

[0032] [Embodiment 1] 1 to 5, a semi-finished pipe 1 (first semi-finished pipe), a manufacturing method for the semi-finished pipe 1, a pipe (final pipe product 2), and a manufacturing method for the pipe according to embodiment 1 will be described. A semi-finished pipe 9 (second semi-finished pipe) and a manufacturing method for the semi-finished pipe 9 will also be described.

[0033] [Regarding semi-finished pipes 1 and final product pipes 2] FIG. 1 is a diagram for explaining a semi-finished pipe 1 (first semi-finished pipe) and a final product pipe 2 according to embodiment 1. FIG. 1(a) is a diagram for explaining a longitudinal cross-sectional view of the semi-finished pipe 1, and FIG. 1(b) is a diagram for explaining a longitudinal cross-sectional view of the final product pipe 2. The semi-finished pipe 1 and the final product pipe 2 have an approximately circular shape on the outside in the short axis direction. In this specification, the "final product pipe" may be simply referred to as "pipe". As shown in Fig. 1, the semi-finished product 1 according to Embodiment 1 is a semi-finished product 1 before being made into a finished product by cutting on a lathe, and includes a first layer 11 for the configuration of the finished product that remains even after cutting on the lathe, and a second layer 12 for dummy formed outside the first layer 11 and to be cut by the lathe.

[0034] The outer diameter D1 of the first layer 11 of the semi-finished product 1 is an outer diameter near the outer diameter D5 (the outermost diameter) of the finished product 2. "Near" means "in the vicinity", "close", etc., meaning that the outer diameter D1 is close to D5, including the case where D1 is the same as D5. In Embodiment 1, the outer diameter D1 of the first layer 11 is the same as the outer diameter D5 of the finished product 2. D19 is the inner diameter of the semi-finished product 1 or the finished product 2 and is the same as the outer diameter of the wire rod 3 described later.

[0035] In the above semi-finished product 1, the first layer 11 has a small outer diameter D1 that is difficult to be gripped by the chucking jig 51 of the lathe, and the second layer 12 has a large outer diameter D3 that can be gripped by the chucking jig 51 of the lathe. The outer diameter D2 in the figure is the minimum diameter that can be gripped by the chucking jig 51. The outer diameters D1, D2, and D3 have a relationship of D1 < D2 < D3. D5 is the outer diameter of the finished product 2. In Embodiment 1, the outer diameter D5 of the finished product 2 is the same as the outer diameter D1 of the first layer 11.

[0036] In the above semi-finished product 1, the first layer 11 has an outer diameter D1 of 0.05 mm or more and less than 0.60 mm, and the second layer 12 has an outer diameter D3 of 0.40 mm or more and 3.00 mm or less.

[0037] In the above semi-finished product 1, the second layer 12 has better machinability than at least the adjacent portion 11E of the first layer 11 with the second layer 12.

[0038] In the above semi-finished product 1, the first layer 11 has a first layer outer layer 11B that forms the adjacent portion 11E with the second layer 12, and a first layer inner layer 11A formed inside the first layer outer layer 11B, and the first layer outer layer 11B has a Vickers hardness in the range of 350 to 550 HV. In the first embodiment, the first inner layer 11A is made of a gold-cobalt alloy, the first outer layer 11B is made of a nickel-cobalt alloy (Vickers hardness 400 to 550 HV), and the second layer 12 is made of copper (Vickers hardness 150 to 230 HV).

[0039] As shown in FIG. 1, the first layer 11 in the semi-finished pipe 1 has a first inner layer 11A and a first outer layer 11B. The inside of the first inner layer 11A is a hollow portion 19. In the first embodiment, the second layer 12 is cut away and a part of the first outer layer 11B is cut away to form a convex portion 115 and a concave portion 116. Reference numeral 111 denotes the first layer surface before cutting, and 112 denotes the first layer surface after cutting. There are cutting marks on the first layer surface 112 after cutting.

[0040] [Method of manufacturing semi-finished pipe 1] Fig. 2 is a diagram for explaining a method for manufacturing a semi-finished pipe 1 according to the embodiment 1. Figs. 2(a) to 2(f) are diagrams for explaining the steps. As shown in Fig. 2, the method for manufacturing a semi-finished pipe 1 according to the embodiment 1 is a method for manufacturing a semi-finished pipe 1 before it is cut by a lathe to become a final product pipe 2, and includes a step of preparing a wire rod 3 (Fig. 2(a)), a step of forming a first layer 11 for constituting a final product pipe on the wire rod 3 (Figs. 2(b) and 2(c)), and a step of forming a dummy second layer 12 to be cut by the lathe outside the first layer 11 (Fig. 2(d)).

[0041] To explain in more detail, first prepare a stainless steel wire (wire material) 3 with a diameter (outer diameter, D19) of 0.20 mm (Figure 2(a)). A "stainless steel wire" is stainless steel formed into a wire shape. Stainless steel is an alloy steel that contains 1.2% or less carbon (mass percent concentration) and 10.5% or more chromium, and is mainly composed of iron (Fe). Then, a first inner layer 11A of gold-cobalt alloy (thickness 1 μm) is formed on the wire 3 (stainless steel wire) by electrolytic plating (FIG. 2(b)). On the outside of that, a first outer layer 11B (outer diameter D1 0.25 mm) of nickel-cobalt alloy (thickness 24 μm) is formed by electrolytic plating (FIG. 2(c)). In this way, a first layer 11 for the final product tube configuration having the first inner layer 11A and the first outer layer 11B is formed on the wire 3. Then, a second layer 12 (outer diameter D3 is 1.25 mm) made of copper (thickness 500 μm) is formed by electrolytic plating on the outside of the first layer 11 (FIG. 2(d)). The second layer 12 is a dummy layer to be cut by a lathe. Then, the wire 3 is pulled out and removed (FIG. 2(e)). FIG. 2(f) shows a semi-finished pipe 1 (inner diameter D19, outer diameter D3) manufactured through the steps shown in FIGS. 2(a) to 2(e) above.

[0042] [Manufacturing method of final product pipe 2] FIG. 3 is a diagram for explaining a method for manufacturing the final product pipe 2 according to the embodiment 1. FIGS. 3(a) to 3(d) are diagrams for explaining steps of the manufacturing method. As shown in FIG. 3, the method for manufacturing the final product pipe 2 according to the embodiment 1 is a pipe manufacturing method for manufacturing the final product pipe 2 from the semi-finished pipe 1 using a lathe, and includes the above-mentioned step of preparing the semi-finished pipe 1 (FIG. 3(a)), a holding step of holding the semi-finished pipe 1 from the outside of the second layer 12 (FIG. 3(a)), a cutting step of cutting the second layer 12 of the other parts 1N than the held parts 1N from the outside and cutting predetermined parts of the first layer 11 to form recesses 116 or protrusions 115 (FIG. 3(b)), and a cutting step of cutting (separating) the held parts IY (dummy layer lamination parts) (FIG. 3(c)).

[0043] More specifically, first, a semi-finished tube 1 is prepared for manufacturing a final product tube 2 (FIG. 3(a)). The semi-finished tube 1 is the one described with reference to FIG. 1 and the like. Then, the semi-finished tube 1 is gripped from the outside of the second layer 12 with a chucking jig 51 such as a collet (FIG. 3(a)). The outer diameter D3 of the second layer 12 is formed to a size that can be gripped by the chucking jig 51. Note that the process of preparing the semi-finished tube 1 and the gripping process of gripping the semi-finished tube 1 are both shown in the same FIG. 3(a).

[0044] Then, the second layer 12 at the other locations 1N than the location 1Y gripped by the chucking jig 51 is cut from the outside with a cutting tool 52 such as a cutting tool, to form recesses 116 or protrusions 115 at predetermined locations of the first layer 11 (FIG. 3(b)). The cutting depth is 0.01 mm. The locations where the first layer 11 is cut in the thickness direction (short axis direction) become recesses 116, and the locations where the first layer 11 is not cut become protrusions 115. The recesses 116 or protrusions 115 can be formed by moving the cutting tool 52 relative to the semi-finished pipe 1 in the longitudinal direction of the semi-finished pipe 1 to sequentially cut the second layer 12 and the first layer 11 at predetermined locations to form the recesses 116 or protrusions 115, or by cutting the second layer 12 for a predetermined length in the longitudinal direction of the semi-finished pipe 1 and then forming the recesses 116 or protrusions 115 in the first layer 11 within the range of the predetermined length.

[0045] Then, while still holding the semi-finished pipe 1, the cut portion is cut off and cut with a cutting tool 53 such as a cutting tool (FIG. 3(c)). Note that, when the length of the final product pipe 2 is short, such as 1-5 mm, while the length of the semi-finished pipe 1 is long, such as 1-1.5 m, the pipe is cut in increments equal to the length of the final product pipe 2 from the end opposite the held portion 1Y. FIG. 3(d) shows the final product pipe 2 manufactured through the steps of FIGS. 3(a) to 3(c).

[0046] Fig. 4 is a diagram (diagram) for explaining the dimensions of the semi-finished pipe 1, the final product pipe 2, etc. according to embodiment 1. Fig. 4 shows the materials, thicknesses, outer diameters D, etc. of the wire 3 (core wire), the first layer 11, the second layer 12, and the final product pipe 2 used in embodiment 1. "Cuttability" in FIG. 4 indicates the degree of machinability relative to pure nickel, which is not easy to cut. ◯ indicates good, and ◎ indicates very good. The outer diameter D5 of the final product tube 2 is the outermost diameter including any protruding portions, if any. In the description of content, for example, "AuCo alloy (Co 0.1-1.0%)" means that the gold-cobalt alloy has a cobalt content (weight ratio) of 0.1-1.0%, with the remainder being gold. However, it may contain trace additives. The same applies to the descriptions of other alloys. (The above explanations are also applicable to FIG. 6 and FIG. 8.)

[0047] [Second semi-finished pipe 9] The semi-finished pipe 1 (first semi-finished pipe) described so far is in a state before the second layer 12 is cut, but the semi-finished pipe 9 (second semi-finished pipe) may be the pipe after the second layer 12 is cut and before it is cut at a predetermined location (see Figure 3(c)). [Second semi-finished pipe 9] This method for manufacturing a semi-finished pipe 9 (second semi-finished pipe) is a method for manufacturing a second semi-finished pipe that is closer to the final product pipe 2 from a semi-finished pipe (first semi-finished pipe) using a lathe, and includes the steps of: preparing the semi-finished pipe (first semi-finished pipe 1); holding the semi-finished pipe (first semi-finished pipe) from outside the second layer 12; cutting the second layer 11 by cutting from outside the second layer 12 to form recesses 116 or protrusions 115 in the first layer 11; and forming the second semi-finished pipe 9 with the held portions 1Y connected to the portions where the recesses 116 or protrusions 115 are formed.

[0048] The manufactured semi-finished pipe (second semi-finished pipe 9) is a semi-finished pipe (second semi-finished pipe 9) to be used for forming the final product pipe 2 by cutting at a predetermined location, and includes a dummy layer lamination portion where a first layer 11 for forming the final product pipe and a dummy second layer 12 formed on the outside of the first layer 11 are laminated, and a first layer irregularity formation portion where a recess 116 or a protrusion 115 is formed. In other words, the recess 116 or the protrusion 115 is formed on the outside, and the final product pipe 2 can be formed by cutting (separating) at a predetermined location.

[0049] A method for manufacturing a pipe (final pipe 2) using this second semi-finished pipe 9 includes a step of preparing the semi-finished pipe (second semi-finished pipe 9), a holding step of holding the semi-finished pipe (second semi-finished pipe 9) at the dummy layer lamination location 1Y, and a cutting step of cutting off the location where the first layer irregularities are formed from the dummy layer lamination location side.

[0050] [Final product pipe 2] The final product tube 2 according to the first embodiment shown in FIG. 3(d) etc. has a metallic outer diameter D5 of 0.05 mm or more and less than 0.60 mm, has recesses 116 or protrusions 115 on the outer periphery, and has cutting marks on the cut parts.

[0051] [Example of use of final product tube 2] 5 is a diagram for explaining an example of use of the final product tube 2 according to the embodiment 1. An example of use in a semiconductor inspection device 7 is shown. In this example, the final product tube 2 is used as a barrel 61 (cylinder) of a contact probe 6 in which a plunger 62 and a spring 63 are placed. A spring attachment 64 is installed on the upper part of the barrel 61, and the spring 63 is attached to the spring attachment 64. The contact probe 6 is housed in the contact probe attachment 71 of the semiconductor inspection device 7 by fitting the protruding part 115 of the final product tube 2 (barrel 61) to the fitting part 72 of the semiconductor inspection device 7. The contact probe 6 moves up and down as shown by the arrow in the figure, so that the plunger 62 comes into contact with or does not come into contact with the electrode 81 of the semiconductor element 8. When the plunger 62 comes into contact with the electrode, the plunger 62 comes into contact with the electrode with an appropriate pressure due to the elastic force of the spring 63. Then, a signal to or from the electrode 81 is transmitted or received via the wiring conductor 73, thereby inspecting the semiconductor.

[0052] [Effects of the first embodiment] In the semi-finished tube 1 of embodiment 1, a dummy second layer 12 to be cut by a lathe is formed on the outside of the first layer 11 for constituting the final product tube. Therefore, even if a lathe is used for cutting because a small outer diameter makes it difficult to grip with a chucking jig, by gripping the dummy second layer 12, it is possible to provide a semi-finished tube 1 for use in manufacturing a tube (final product tube 2) with a small outer diameter and having a concave or convex portion on its surface, using the lathe.

[0053] Furthermore, since the outer diameter D1 of the first layer 11 is formed to be close to the outer diameter D5 of the final product tube 2, it is possible to provide a semi-finished tube 1 in which it is easy to cut the dummy second layer 12 and to form recesses 116 or protrusions 115 on the surface of the first layer 11.

[0054] Furthermore, even if the outer diameter D1 of the first layer 11 is small enough that it is difficult to grasp with the chucking jig 51 of a lathe, the outer second layer 12 is configured to have a large outer diameter D2 that can be grasped by the chucking jig of a lathe, so it is possible to provide a semi-finished pipe 1 that can be easily cut by a lathe by grasping the second layer 12 with a chucking jig.

[0055] In the semi-finished pipe 1 of embodiment 1, the first layer 11 has an outer diameter D1 of 0.05 mm or more and less than 0.60 mm. Although the small outer diameter D1 makes it difficult to grip and form irregularities on a lathe, the second layer 12 having an outer diameter D3 of 0.40 mm or more and 3.00 mm or less is formed on the outside of the first layer 11, making it possible to perform cutting processing.

[0056] Furthermore, since the second layer 12 has better machinability than at least the portion 11E of the first layer 11 adjacent to the second layer 12, the dummy second layer 12 can be easily cut.

[0057] The first layer 11 has a first outer layer 11B forming an adjacent portion 11E with the second layer 12, and a first inner layer 11A formed inside the first outer layer 11B, and since the first outer layer 11B has a Vickers hardness in the range of 350 to 550 HV, it is not easily cut by a lathe, but can be cut by a lathe. For example, it is possible to form a functional layer (a layer that imparts good electrical conductivity, etc.) of the final product pipe 2 on the first inner layer 11A and protect it with the hard first outer layer 11B formed on the outside.

[0058] The manufacturing method of the semi-finished tube 1 (semi-finished tube 1 used to be cut by a lathe to become a final product tube 2) of embodiment 1 includes the steps of preparing a wire 3, forming a first layer 11 for constituting the final product tube 2 that will remain even after cutting by the lathe on the outer periphery of the wire 3, and forming a dummy second layer 12 to be cut by the lathe on the outer periphery of the first layer 11.Therefore, even if a lathe is used for cutting because the outer diameter is small and it is difficult to hold the tube with a chucking jig, it is possible to manufacture the semi-finished tube 1 to be used to manufacture a tube with a small outer diameter (final product tube 2) having a recess 116 or a protrusion 115 on its surface by using the lathe.

[0059] The pipe manufacturing method of embodiment 1 (pipe manufacturing method for manufacturing a final product pipe 2 from a semi-finished pipe 1 using a lathe) includes a step of preparing the semi-finished pipe 1, a gripping step of gripping the semi-finished pipe 1 from outside the second layer 12, a cutting step of forming recesses or protrusions in the first layer 11 by cutting from the outside of the second layer 12, and a cutting step of cutting the semi-finished pipe 1 at predetermined locations. Therefore, even if a lathe is used that is difficult to use for cutting because the pipe has a small outer diameter and is difficult to grip with a chucking jig, it is possible to manufacture a pipe (final product pipe 2) with a small outer diameter and having recesses 116 or protrusions 115 on its surface by using the lathe.

[0060] The semi-finished tube 9 of embodiment 1 (the tube manufacturing method for manufacturing a second semi-finished tube 9 that is closer to the final product tube 2 from the semi-finished tube 1) includes a step of preparing the semi-finished tube 1, a holding step of holding the semi-finished tube 1 from outside the second layer 12, a cutting step of forming a recess 116 or a protrusion 115 in the first layer 11 by cutting from the outside of the second layer 12, and a step of forming a second semi-finished tube 9 in a state in which the held portion IY and the portion where the recess 116 or the protrusion 115 is formed are connected, thereby making it possible to manufacture the second semi-finished tube 9 that is closer to the final product tube 2.

[0061] The semi-finished tube 9 of embodiment 1 (semi-finished tube 9 used to become the final product tube 2 by cutting a predetermined portion) has a dummy layer lamination portion where a first layer 11 for constituting the final product tube and a dummy second layer 12 formed on the outside of the first layer 11 are laminated, and a first layer unevenness formation portion where a recess 116 or a protrusion 115 is formed.Therefore, it is possible to make it into the final product tube 2 by grasping the dummy layer lamination portion and cutting a predetermined portion of the first layer unevenness formation portion.

[0062] The pipe manufacturing method of embodiment 1 (pipe manufacturing method for manufacturing the final product pipe 2 from the second semi-finished pipe 9) includes a step of preparing the semi-finished pipe 9 (second semi-finished pipe), a holding step of holding the semi-finished pipe 9 at the dummy layer stacking location, and a cutting step of cutting off the location where the first layer irregularity is formed from the dummy layer stacking location, making it possible to easily manufacture the final product pipe 2 from the second semi-finished pipe 9.

[0063] The tube (final product tube 2) according to embodiment 1 has a small outer diameter, making it possible to manufacture a contact probe 6 (see FIG. 5) with a small diameter that has been difficult to manufacture up until now. In addition, the presence of cutting marks indicates that the tube was manufactured by cutting, not by sputtering or plating, and the tube can be used without concerns about strength, etc.

[0064] [Embodiments 2 to 8] Fig. 6 is a diagram (diagram) for explaining the dimensions, etc. of the semi-finished pipe 1, the final product pipe 2, etc. according to embodiments 2 to 8. Fig. 6 shows the material, thickness, outer diameter D, etc. of the wire rod 3, the first layer 11, the second layer 12, and the final product pipe 2 according to embodiments 2 to 8. The pipes (semi-finished pipes 1, 9, final product pipe 2) and their manufacturing methods in embodiments 2 to 8 are basically the same as those in embodiment 1, but as shown in FIG. 6, the materials constituting them are different from those in embodiment 1. That is, in embodiments 2 to 8, the first inner layer 11A is made of any one of gold, gold-cobalt alloy, palladium, palladium alloy, or a co-deposit of polytetrafluoroethylene and nickel, the first outer layer 11B is made of any one of a nickel-cobalt alloy, nickel-manganese alloy, or pure nickel, and the second layer 12 is made of any one of copper, pure nickel, or a nickel-manganese alloy. In addition, with regard to the materials, dimensions, etc. of the first layer, second layer, etc. in embodiments 2 to 8, the contents of FIG. 6 are assumed to be described in the specification, and the contents of FIG. 6 will not be written down in text (the same applies to FIG. 4 above and FIG. 8 described later).

[0065] [Effects of Embodiments 2 to 8] By using components made of appropriate materials for the first inner layer 11A, the first outer layer 11B, and the second layer 12, it becomes easier to manufacture a method for manufacturing a tube having a small outer diameter and having a concave or convex portion on its surface using a lathe, even if the lathe is difficult to use for cutting because a small outer diameter makes it difficult to hold the tube using a chucking jig, and to provide the tube.

[0066] In addition, it is possible to appropriately select materials suited to the first inner layer 11A, which determines the functionality of the pipe, the first outer layer 11B which protects it, and the outer layer 11B which allows cutting processing on a lathe.

[0067] For example, when the first inner layer 11A is made of gold (pure gold), it is possible to exhibit functions such as good electrical conductivity, good rust prevention, and softness. When made of a gold-cobalt alloy, it can be made harder than pure gold and can exhibit functions such as good electrical conductivity and good rust resistance.

[0068] When made of palladium, it is possible for the material to exhibit hydrogen storage properties, which allow it to absorb hydrogen, and catalytic functions, which remove harmful substances from automobile exhaust gases. Palladium alloys can exhibit hydrogen storage and catalytic functions as well as biological safety and corrosion resistance. Examples of palladium alloys include an alloy mainly composed of silver with palladium added to prevent silver from sulfiding, and an alloy further containing gold for corrosion resistance, such as a 12% gold-silver-palladium alloy. The 12% gold-silver-palladium alloy is an alloy consisting of 12% gold, 20% palladium, and the remainder consisting of about 50% silver, about 20% copper, indium, etc.

[0069] The eutectoid of polytetrafluoroethylene (PTFE) and nickel can exhibit sliding properties or lubricity. When the surface wears away, new PTFE particles appear, maintaining a low coefficient of friction. PTFE is a polymer of tetrafluoroethylene, a fluororesin (carbon fluoride resin) consisting only of fluorine atoms and carbon atoms.

[0070] Furthermore, if the first outer layer 11B is made of either a nickel-cobalt alloy or a nickel-manganese alloy, it is hard and can protect the first inner layer 11A. However, cutting with a lathe is also possible, and unevenness can also be formed.

[0071] Furthermore, if the second layer 12 is made of either copper or pure nickel, it is easy to hold and has good machinability.

[0072] Furthermore, when the first inner layer 11A, the first outer layer 11B, and the second layer 12 are made of the above-mentioned combination of materials, the lamination can be easily formed.

[0073] Regarding points other than those described in the second to sixth embodiments, the configurations, methods, effects, and the like described in the first embodiment can be applied to the second to sixth embodiments as they are.

[0074] [Embodiments 9 to 11] Fig. 7 is a diagram (cross-sectional view) for explaining embodiments 9 to 11. Fig. 8 is a diagram (diagram) for explaining dimensions, etc. of the semi-finished pipe 1, the final product pipe 2, etc. according to embodiments 9 to 11. The configurations of the semi-finished pipes 1, 9 and the final pipe product 2 according to the ninth to eleventh embodiments and the manufacturing methods thereof are basically the same as those of the first embodiment, except that, as shown in Fig. 7 (or Fig. 8), even after the second layer 12 is cut, a part of the second layer 12 remains in the semi-finished pipe 9 or the final pipe product 2. Reference numeral 121 denotes a part of the second layer that remains after cutting (see Figs. 7 and 8). When the surface is cut, the cut portion has a cutting mark. Regarding the manufacturing method of the pipe (final product pipe 2) of embodiments 9 to 11, the manufacturing method is basically the same as the manufacturing method described in embodiment 1, except that when manufacturing the final product pipe 2 (or the second semi-finished pipe 9) from the semi-finished pipe (first semi-finished pipe 1), in the cutting process of cutting the second layer 12, the second layer 12 is cut so that a portion 121 of it remains.

[0075] In the ninth embodiment, the material, thickness, outer diameter, etc. of the first layer 11 and the second layer 12, or the manufacturing method thereof, are basically the same as those of the first embodiment, but when the first semi-finished pipe 1 is made into the final product pipe 2 (or the second semi-finished pipe 9), the second layer 12 is cut so that a part 121 remains (see Figs. 7 and 8). In the final product pipe 2 (or the second semi-finished pipe 9), in the first embodiment, the second layer 12 is entirely cut, and the first layer 11 is cut so that the convex portion 115 or the concave portion 116 is formed and the (maximum) outer diameter is 0.25 mm, whereas in the ninth embodiment, the second layer 12 is cut so that a part 121 remains (so that a thickness of 50 μm remains above the convex portion 115). In order to achieve this, the (maximum) outer diameter of the final product pipe 2 (or the second semi-finished pipe 9) is 0.27 mm, which is larger than the outer diameter of the first layer 11, 0.25 mm. In addition, the first layer 11 has protrusions 115 or recesses 116 formed therein.

[0076] Moreover, embodiment 10 is a slight modification of embodiment 9. In embodiment 10, the materials of the first layer 11 and the second layer 12 and the thickness of the first inner layer are the same as those in embodiment 9, but the thickness of the second layer 12 before cutting and the thickness of the portion 121 of the second layer that remains after cutting are different. The outer diameter of the final product pipe 2 (or the second semi-finished pipe 9) is also different from that of embodiment 9. However, it is similar to embodiment 9 in that there is a portion 121 of the second layer that remains after cutting.

[0077] The eleventh embodiment is an embodiment different from the ninth embodiment in the materials, layer thicknesses, and outer diameters of the first layer 11 and the second layer 12, as well as the thickness of the portion 121 of the second layer remaining after cutting and the outer diameter of the final product pipe 2 (or the second semi-finished pipe 9) (see FIG. 8). However, the eleventh embodiment is similar to the ninth embodiment in that there is a portion 121 of the second layer remaining after cutting.

[0078] [Effects of Embodiments 9 to 11] In this way, when manufacturing a final product pipe 2 (or a second semi-finished pipe 9) from a semi-finished pipe (a first semi-finished pipe 1), cutting the second layer 12 so that a part of it remains in the cutting process has the following advantages: the height of the convex portion 115 can be easily adjusted, the surface of the convex portion 115 can be made soft or hard, or the shielding properties can be further improved.

[0079] Regarding points other than those described in the ninth to eleventh embodiments, the configurations, methods, effects, and other aspects described in the first embodiment can be applied to the ninth to eleventh embodiments as they are.

[0080] [Embodiments 12 to 16] The twelfth to sixteenth embodiments are basically the same as the first embodiment, except that the first layer 11 and a part of the second layer 12 are used as components of the final pipe product 2 in an alloyed state.

[0081] [Embodiment 12] This will be explained using embodiment 12. Fig. 9 and Fig. 10 are both diagrams for explaining embodiment 12. Fig. 9 is a diagram for explaining a method of cutting after alloying, and Fig. 10 is a diagram for explaining a method of cutting before alloying. Fig. 11 is a diagram (diagram) for explaining dimensions, etc. of the semi-finished pipe 1 and the final product pipe 2 according to embodiments 12 to 16. In Fig. 11, the metals "Pg", "Ag", and "Ni" described as constituent materials mean metals whose main components are these elements. They are not limited to pure metals. They may contain impurities.

[0082] [Method of cutting after alloying (see Figure 9)] In the method of cutting after alloying, first, a semi-finished pipe 1 (first semi-finished pipe) is prepared (see FIG. 9(a)). The wire 3 (not shown) used to make the hollow portion 19 (inner diameter D19, 0.200 mm, see FIG. 11 for dimensions) is made of stainless steel. The first layer 11 (layer thickness 2 μm) is made of palladium and formed by electrolytic plating (outer diameter D1, 0.204 mm). The second layer 12 (layer thickness 523 μm) is made of copper and formed by electrolytic plating (outer diameter D3, 1.250 mm). Reference numeral 12E denotes the vicinity of the first layer of the second layer 12. Then, the wire 3 (not shown) is pulled out and removed to obtain the semi-finished pipe 1.

[0083] Next, the semi-finished pipe 1 is placed in a heating furnace and heated (see FIG. 9(b)). For example, it is heated to 400 to 500°C. Then, the first layer 11 (palladium) and the portion 12E (copper) near the first layer of the second layer 12 are thermally diffused and alloyed (copper-palladium alloy). The degree of alloying of the second layer 12 increases as it approaches the first layer 11, and decreases as it moves away from the first layer 11. The degree of alloying can be changed by the heating time and temperature.

[0084] Next, the semi-finished pipe 1 is cut (see FIG. 9(c)). For example, a chucking jig 51 holds the end (one end or both ends) of the semi-finished pipe 1 in the longitudinal direction, and a cutting jig 52 cuts the second layer 12 (copper) to a predetermined outer diameter D6 (0.220 mm). At this time, a convex portion (see FIG. 9(d)) or a concave portion (not shown) may be formed. However, even if a convex portion or a concave portion is formed, it is only a part of the pipe, and the pipe is cut to a predetermined outer diameter D6 (0.220 mm) overall. After that, a cutting tool (not shown) of a cut-off tool cuts off the portion held by the chucking jig 51. If the length of the final product pipe 2 is short, such as 1 to 5 mm, while the length of the semi-finished pipe 1 is long, such as 1 to 1.5 m, the pipe is cut off by the length of the final product pipe 2.

[0085] In this manner, the final product tube 2 is manufactured (see FIG. 9(d)). Reference numeral 111 denotes an alloy layer (copper-palladium alloy layer) in which the first layer (palladium) and the portion 12E of the second layer 12 (copper) near the first layer are alloyed. When the second layer 12 (copper) is cut away leaving a layer thickness of 8 μm with a high degree of alloying, the alloy layer 200 (copper-palladium alloy) becomes an alloy layer in which copper (8 μm) and palladium (2 μm) are alloyed in a ratio of approximately 8:2 (see the table in Figure 11 for the layer thickness and outer diameter D6 of the final product tube 2, etc.).

[0086] [Method of alloying after cutting (see Figure 10)] First, in the same manner as in the method of cutting after alloying (see FIG. 9(a)), a semi-finished pipe 1 (first semi-finished pipe) is prepared (see FIG. 10(a)). (The wire 3 (not shown) is pulled out to produce the removed semi-finished pipe 1.)

[0087] Next, the semi-finished tube 1 is cut (see FIG. 10(b)). For example, a chucking jig 51 grips the longitudinal end (one end or both ends) of the semi-finished tube 1, and a cutting jig 52 cuts the second layer 12 (copper) to a predetermined outer diameter D6 (0.220 mm). At this time, convex portions (see drawing) or concave portions (not shown) may be formed. However, even if convex portions or concave portions are formed, they are only formed in some places, and the entire tube is cut to the predetermined outer diameter D6 (0.220 mm).

[0088] Then, the portion gripped by the chucking jig 51 is cut off with a cutting tool (not shown) of a cut-off tool. When the length of the final product pipe 2 is short, such as 1 to 5 mm, while the length of the semi-finished pipe 1 is long, such as 1 to 1.5 m, it is cut into portions equal to the length of the final product pipe 2. The final product pipe 2 is formed into its shape. Alternatively, the portion gripped by the chucking jig 51 is left without being cut off (the portion other than the portion gripped by the chucking jig 51 has the outer shape of the final product pipe 2).

[0089] Next, the semi-finished pipe 1 after cutting the second layer 12 is placed in a heating furnace and heated (see FIG. 10(c)). Then, the first layer 11 (palladium) and the portion 12E near the first layer of the second layer 12 (copper) are thermally diffused and alloyed to form an alloy layer 200 (copper-palladium alloy layer). When the second layer 12 (copper) is cut leaving a layer thickness of 8 μm, the alloy layer 200 (copper-palladium alloy layer, 10 μm) becomes an alloy layer in which copper (8 μm) and palladium (2 μm) are almost uniformly alloyed overall at a ratio of about 8:2. Even if there are some protrusions or recesses, the entire alloy layer, including these areas, is almost uniformly alloyed.

[0090] In addition, when the portion of the semi-finished tube 1 held by the chucking jig 51 is cut off and cut into the shape of the final product tube 2, it becomes the final product tube 2 having the alloy layer 200 as is (see Figure 10 (d)). On the other hand, if the portion of the semi-finished tube 1 held by the chucking jig 51 remains uncut, cutting off that portion will result in a final product tube 2 having an alloy layer 200 (see the table in FIG. 11 for the layer thickness, outer diameter D6, etc. of the final product tube 2). Reference numeral 215 denotes a protrusion, if one is formed.

[0091] Note that the pipe between the pipe shown in FIG. 9(a) and the pipe shown in FIG. 9(d) (for example, the pipe shown in FIG. 9(b) or FIG. 9(c)) may be the semi-finished pipe 1 to be traded. Furthermore, a pipe between the pipe shown in FIG. 10(a) and the pipe shown in FIG. 10(d) (for example, a pipe shown in FIG. 9(b) or FIG. 9(c)) may be the semi-finished pipe 1 to be traded.

[0092] [Embodiment 13] The thirteenth embodiment is basically the same as the twelfth embodiment, except that the first layer 11 of the semi-finished tube 1 is made of a first inner layer 11A (silver) and a first outer layer 11B (palladium), the second layer 12 is made of copper, and the alloy layer of the final product tube 2 is a copper-silver-palladium alloy layer (see FIG. 11).

[0093] That is, on the outside of the wire 3, a first inner layer 11A (silver, 1 μm), a first outer layer 11B (palladium, 1 μm), and a second layer 12 (copper, 523 μm) are laminated by electrolytic plating. Then, the wire 3 (not shown) is pulled out and removed to obtain the semi-finished pipe 1. By heating the semi-finished tube 1, the first inner layer 11A (silver) and the first outer layer 11B (palladium) are alloyed with the second layer 12 (copper), and a final product tube 2 having an alloy layer (10 μm, copper-silver-palladium alloy, copper:silver:palladium ratio is approximately 8:1:1) is produced (see the diagram in Figure 11 for the layer thickness, outer diameter D6, etc. of the final product tube 2).

[0094] [Embodiment 14] The fourteenth embodiment is basically the same as the twelfth embodiment, but differs in that the semi-finished tube 1 has a laminated structure of, from the inside to the outside, a third layer (gold-cobalt alloy layer, not shown), an intermediate layer (nickel layer, not shown), a first layer 11 (palladium layer), and a second layer 12 (copper layer), while the final product tube 2 has a laminated structure of a third layer (gold-cobalt alloy layer), an intermediate layer (nickel layer), and an alloy layer (copper-silver-palladium alloy layer) (see FIG. 11). It should be noted that the third layer and the intermediate layer are layers formed inside the first layer 11 and are not part of the first layer 11, but for the sake of convenience, they are listed in the column for the first layer 11 in FIG.

[0095] That is, on the outside of the wire 3, a third layer (gold-cobalt alloy layer, 1 μm), an intermediate layer (nickel layer, 1 μm), a first layer 11 (palladium layer, 2 μm), and a second layer 12 (copper layer, 188.5 μm) are laminated by electrolytic plating. Then, the wire 3 (not shown) is pulled out and removed to obtain the semi-finished pipe 1. By heating the semi-finished tube 1, the first layer 11 (palladium layer) is alloyed with the second layer 12 (copper layer), and the final product tube 2 is produced having a laminated structure of a third layer (gold-cobalt alloy layer, 1 μm), an intermediate layer (nickel layer, 1 μm), and an alloy layer (copper-palladium alloy layer, 10.5 μm, copper:palladium ratio is approximately 8.5:2) (see the diagram in Figure 11 for the layer thickness, outer diameter D6, etc. of the final product tube 2). As mentioned above, nickel has a lower thermal conductivity than palladium, so when the metal of the first layer is alloyed with the metal of the second layer, the metal of the third layer can be prevented from being alloyed with it as well.

[0096] [Embodiment 15] The fifteenth embodiment is basically the same as the twelfth embodiment, but differs in that the semi-finished tube 1 has a laminated structure of, from the inside to the outside, a third layer (gold-cobalt alloy layer, not shown), an intermediate layer (nickel layer, not shown), a first inner layer 11A (silver layer), a first outer layer 11B (palladium layer), and a second layer 12 (copper layer), and the final product tube 2 has a laminated structure of a third layer (gold-cobalt alloy layer), an intermediate layer (nickel layer), and an alloy layer (copper-silver-palladium alloy layer) (see FIG. 11).

[0097] That is, on the outside of the wire 3, a third layer (gold-cobalt alloy layer, 1 μm), an intermediate layer (nickel layer, 1 μm), a first inner layer 11A (silver layer, 3 μm), a first outer layer 11B (palladium layer, 3 μm), and a second layer 12 (copper layer, 202 μm) are laminated by electrolytic plating. Then, the wire 3 (not shown) is pulled out and removed to obtain the semi-finished pipe 1. By heating the semi-finished tube 1, the first inner layer 11A (silver layer) and the first outer layer 11B (palladium layer) are alloyed with the second layer 12 (copper layer), and the final product tube 2 is produced having a layered structure of a third layer (gold-cobalt alloy layer, 1 μm), an intermediate layer (nickel layer, 1 μm), and an alloy layer (copper-silver-palladium alloy layer, 18 μm, with a copper:silver:palladium ratio of approximately 12:3:3) (see the diagram in Figure 11 for the layer thicknesses, outer diameter D6, etc. of the final product tube 2). As mentioned above, nickel has a lower thermal conductivity than silver (or silver and palladium), so when the metal of the first layer is alloyed with the metal of the second layer, the metal of the third layer can be prevented from being alloyed with it as well.

[0098] [Embodiment 16] The sixteenth embodiment is basically the same as the twelfth embodiment, but differs in that the semi-finished tube 1 has a laminated structure of, from the inside to the outside, a third layer (gold-nickel alloy layer, not shown), an intermediate layer (nickel layer, not shown), a first layer 11 (palladium layer), and a second layer 12 (copper layer), while the final product tube 2 has a laminated structure of a third layer (gold-nickel alloy layer), an intermediate layer (nickel layer), and an alloy layer (copper-palladium alloy layer) (see FIG. 11).

[0099] That is, on the outside of the wire 3, a third layer (gold-nickel alloy layer, 2 μm), an intermediate layer (nickel layer, 1 μm), a first layer 11 (palladium layer, 3 μm), and a second layer 12 (copper layer, 254 μm) are laminated by electrolytic plating. Then, the wire 3 (not shown) is pulled out and removed to obtain the semi-finished pipe 1. By heating the semi-finished tube 1, the first layer 11 (palladium layer) is alloyed with the second layer 12 (copper layer), and the final product tube 2 is produced having a layered structure consisting of a third layer (gold-nickel alloy layer, 2 μm), an intermediate layer (nickel layer, 1 μm), and an alloy layer (copper-palladium alloy layer, 7 μm, copper:palladium ratio is approximately 4:3) (see the diagram in Figure 11 for the layer thickness, outer diameter D6, etc. of the final product tube 2). As mentioned above, nickel has a lower thermal conductivity than palladium, so when the metal of the first layer is alloyed with the metal of the second layer, the metal of the third layer can be prevented from being alloyed with it as well.

[0100] In the above-described embodiments 12 to 16, copper (Cu) is used for the second layer 12, but copper may be replaced with iron (Fe). When copper is replaced with iron, in the embodiment 12 of FIG. 11, the second layer 12 is made of iron, and the alloy of the final product tube 2 is an iron-palladium alloy. In the embodiment 13, the second layer 12 is made of iron, and the alloy of the final product tube 2 is an iron-silver-palladium alloy. In the embodiment 14, the second layer 12 is made of iron, and the alloy (outer layer) of the final product tube 2 is an iron-palladium alloy. In the embodiment 15, the second layer 12 is made of iron, and the alloy (outer layer) of the final product tube 2 is an iron-silver-palladium alloy. In the embodiment 16, the second layer 12 is made of iron, and the alloy (outer layer) of the final product tube 2 is an iron-palladium alloy. Other points (component materials, dimensions, etc.) shown in FIG. 11 remain unchanged.

[0101] [Summary of embodiments 12 to 16 (configuration, method)] The configurations and methods of the above-mentioned embodiments 12 to 16 can be summarized as follows. In the semi-finished pipe 1 (first semi-finished pipe), the first layer 11 and the second layer 12 (part of the second layer, 12E near the first layer) can be configured to be made of metals that are alloyed together when the semi-finished pipe 1 is heated (see Figures 9 to 11).

[0102] In the semi-finished tube 1 (first semi-finished tube), the first layer 11 is preferably made of palladium or silver, and the second layer 12 is preferably made of copper or iron (see FIG. 11). Examples of combinations (component materials) of the first layer 11 / second layer 12 include palladium / copper, palladium / iron, silver / copper, silver / iron, silver-palladium / copper, and silver-palladium / iron. Note that "palladium," "silver," "copper," and "iron" refer to metals whose main components are these elements. They are not limited to pure metals. They may contain impurities.

[0103] Such a semi-finished tube 1 may further include a third layer of metal formed on the inside of the first layer 11, and an intermediate layer formed between the first layer 11 and the third layer, and the intermediate layer may be configured to prevent the metal of the third layer from being alloyed with the metals of the first layer 11 and the second layer 12 when heated. The third layer is preferably a layer having a lower thermal conductivity than the first layer 11 (more preferably the first layer 11 and the third layer, more preferably the first layer 11, the second layer 12 and the third layer). The intermediate layer may be made of a rare metal. The third layer may be made of a rare metal. The third layer may be made of an alloy.

[0104] Such an intermediate layer can be made of nickel (composed of nickel). The thermal conductivity of metals [W / m K] at 1 atm and 20°C is 59 for nickel (99.2%), compared to 418 for silver and 70 for palladium.

[0105] In such a semi-finished tube 1, for example, as shown in FIG. 9(b), the first layer 11 may be made of an alloy, and the second layer 12 may be configured so that the degree of alloying decreases toward the outside.

[0106] In the semi-finished pipe manufacturing method described above (e.g., [8]), in the step of forming the first layer 11 and the step of forming the second layer 12, the first layer 11 and the vicinity of the first layer (12E) of the second layer 12 may be formed from metals that are alloyed when the semi-finished pipe 1 is heated, thereby manufacturing the semi-finished pipe (see Figures 9, 10, etc.).

[0107] As described with reference to FIG. 10 , a pipe manufacturing method for producing a final product pipe from a semi-finished pipe using a lathe may include a step of preparing the semi-finished pipe 1 described above (e.g., any one of

[15] to

[18] ), a holding step of holding the semi-finished pipe 1 from outside the second layer 12, a cutting step of cutting the second layer 12 from outside the second layer 12 so that a portion of it remains, and an alloying step of heating the semi-finished pipe 1 to alloy the first layer 11 and the remaining second layer 12 (121).

[0108] In addition, a pipe manufacturing method for producing a final product pipe from a semi-finished pipe using a lathe may include, as described with reference to Figure 9, a step of preparing the semi-finished pipe 1 as described above (e.g., any of

[15] to

[18] ), an alloying step of heating the semi-finished pipe 1 to alloy the first layer 11 and the vicinity of the first layer 12E of the second layer 12, a holding step of holding the semi-finished pipe 1 from outside the second layer 12, and a cutting step of cutting the second layer 12 from the outside thereof to drill down to the vicinity of the first layer 12E.

[0109] [Effects of Embodiments 12 to 16] As described in the twelfth to sixteenth embodiments, in the semi-finished pipe 1 (first semi-finished pipe), if the first layer 11 and the second layer 12 (part of the second layer, the vicinity 12E of the first layer 11) are made of metals that are alloyed when the semi-finished pipe 1 is heated, the first layer 11 can be easily alloyed and hardened by heating. In addition, the vicinity of the first layer of the second layer 12 can also be hardened by alloying. On the other hand, the outside of the second layer 12 is not alloyed or is alloyed to a low degree, and therefore can be easily cut.

[0110] When the semi-finished tube 1 (first semi-finished tube) is configured so that the first layer 11 is made of palladium or silver and the second layer 12 is made of copper or iron, alloying is facilitated.

[0111] Such a semi-finished pipe 1 further includes a third layer of metal formed on the inside of the first layer 11, and an intermediate layer formed between the first layer 11 and the third layer, and the intermediate layer is configured to prevent the metal of the third layer from being alloyed with the metals of the first layer 11 and the second layer 12 when heated. This makes it possible to prevent the metal of the third layer from being alloyed together with the metal of the first layer 11 and the metal of the second layer 12 when they are alloyed.

[0112] Furthermore, when the intermediate layer is made of nickel (is made of nickel), nickel has a low thermal conductivity among metals, so even if various metals with a higher thermal conductivity than nickel are used as the metal of the third layer, it is possible to prevent the metal of the third layer from being alloyed with the metal of the first layer 11 (or the first layer 11 and the second layer 12) by heating. Nickel is also easy to obtain. Furthermore, it is also easy to form the layer by electrolytic plating or the like.

[0113] In the semi-finished pipe 1, if the first layer 11 is made of an alloy and the second layer 12 is configured so that the degree of alloying decreases toward the outside (see FIG. 9(b)), it is possible to make the first layer 11 hard. Also, the second layer 12 is softer toward the outside (a direction that does not require precise cutting), making it easier to cut. On the other hand, the second layer 12 is harder in the opposite direction (toward the first layer 11, a direction that requires precise cutting), making it possible to suppress cutting errors.

[0114] In the above-mentioned semi-finished pipe manufacturing method (e.g., [8]), in the step of forming the first layer 11 and the step of forming the second layer 12, if the first layer 11 and the vicinity of the first layer (12E) of the second layer 12 are formed from metals that are alloyed when the semi-finished pipe 1 is heated, it becomes possible to easily alloy the semi-finished pipe 1 by heating it.

[0115] If the pipe manufacturing method for manufacturing a final pipe product from a semi-finished pipe using a lathe includes the steps of preparing the semi-finished pipe 1 as described above (e.g., any one of

[15] to

[18] ), holding the semi-finished pipe 1 from outside the second layer 12, cutting the second layer 12 from outside so that a part of it remains, and an alloying step of heating the semi-finished pipe 1 to alloy the first layer 11 and the remaining second layer 12 (121) (see FIG. 10), the cutting step is easy because the second layer 12 is cut in a soft state before being alloyed. Also, the first layer 11 and the remaining second layer 12 (121) can be easily made into a homogenized alloy in the alloying step. In addition, alloying the first layer 11 and the second layer 12 can be made harder than the metals, and the thickness of the layer (wall) of the final product tube 2 can be made thinner. In addition, the outer diameter D6 of the tube can be made smaller.

[0116] In addition, if a tube manufacturing method for manufacturing a final product tube from a semi-finished tube using a lathe includes the steps of preparing the semi-finished tube 1 as described above (e.g., any one of

[15] to

[18] ), an alloying step of heating the semi-finished tube 1 to alloy the first layer 11 and the first layer vicinity 12E of the second layer 12, a holding step of holding the semi-finished tube 1 from outside the second layer 12, and a cutting step of cutting the second layer 12 down to the first layer vicinity 12E by cutting from the outside of the second layer 12 (see FIG. 9), in the cutting step, the outer side of the second layer 12 is easier to cut because the material is softer toward the outside of the second layer 12 (a direction that does not require precise cutting). On the other hand, the material is harder in the opposite direction (a direction toward the first layer 11, a direction that requires precise cutting), so that cutting errors on the outer periphery of the final product tube 2 can be suppressed. In addition, alloying the first layer 11 and the second layer 12 can be made harder than the metals, and the thickness of the layer (wall) of the final product tube 2 can be made thinner. In addition, the outer diameter D6 of the tube can be made smaller.

[0117] In addition, with respect to points other than those described in embodiments 12 to 16, the corresponding aspects of the configurations, methods, effects, etc. described in embodiment 1 or embodiments 2 to 11 can be applied as they are to embodiment 1 or embodiments 12 to 16.

[0118] [Variations] Although the present invention has been described based on the above embodiment, the present invention is not limited to the above embodiment. Changes can be made without departing from the spirit of the present invention, and for example, the following modifications are also possible.

[0119] (1) In the above embodiment 1, a large area of ​​exposed surface 113 of first layer 11 is cut to form recesses 116, and protrusions 115 are formed in the remaining narrow areas. However, the proportion, shape, and method of formation of recesses 116 or protrusions 115 are not limited to this. Fig. 12 is a diagram for explaining a modified cutting example of the first layer 11. As shown in Fig. 12, a small area of ​​an exposed surface 113 of the first layer 11 may be cut to form a recess 116, so that the proportion of the area occupied by the protrusion 115 is greater than the proportion of the area occupied by the recess 116. (In Fig. 12, the first layer surface before cutting is shown by a dotted line indicated by reference numeral 111, and the surface after cutting is shown by a solid line indicated by reference numeral 112.) Alternatively, the proportion of the areas of the protrusion 115 and the recess 116 may be half and half. In this way, the proportion of the areas of the protrusion 115 and the recess 116 may be arbitrary. By doing this, for example, when the first outer layer 11B is hard or the cutting ability is not necessarily good, it is possible to reduce the amount or area of ​​cutting of the first outer layer 11B, improve cutting efficiency, etc. The number and shape of the recesses 116 or the protrusions 115 may be arbitrary. Also, the step between the protrusions 115 and the recesses 116 may be inclined instead of being vertical.

[0120] (2) In the above embodiment 1, the first layer 11 is configured of two layers, the first layer inner layer 11A and the first layer outer layer 11B, and the second layer 12 is configured as a single layer, but the configurations of the first layer 11 and the second layer 12 are not limited to this configuration. For example, the first layer 11 and the second layer may be made into single layers, the first layer 11 may be made into a single layer and the second layer may be made into a multi-layer (the number of layers is arbitrary), the first layer 11 may be made into a multi-layer (the number of layers is arbitrary) and the second layer may be made into a single layer, or both the first layer 11 and the second layer may be made into a multi-layer (the number of layers of each is arbitrary).

[0121] 13A and 13B are diagrams for explaining modified configurations of the first layer 11 or the second layer 12 of the semi-finished pipe 1, but for example, as shown in Fig. 13A, the first layer 11 may be formed as a single layer. In this way, the configuration of the first layer 11 can be simplified, and the formation of the first layer 11 and the manufacture of the semi-finished pipe 1 become easier. 13(b), the first layer 11 may be composed of three or more layers, such as a first inner layer 11A, a first outer layer 11B, and a first intermediate layer 11C between the first inner layer 11A and the first outer layer 11B. In this way, for example, when the adhesion between the first inner layer 11A and the first outer layer 11B is poor, it is possible to improve the adhesion by the first intermediate layer 11C. 13(c), the second layer 12 may be composed of two or more layers, such as a second inner layer 12A and a second outer layer 12B. In this way, for example, when the single-layer second layer 12 is desired to be hard for gripping, the second outer layer 12B can be hardened, and when the single-layer second layer 12 is desired to be soft for cutting, the second inner layer 12A can be softened, and so on.

[0122] (3) In the above embodiments 1 to 16, a stainless steel wire is used as the wire 3 (core wire), but the wire 3 is not limited to a stainless steel wire. For example, a nichrome wire or an iron chrome wire may be used as the wire 3 instead of the stainless steel wire. Nichrome wire is a wire made of an alloy (nichrome) mainly composed of nickel and chromium. It may contain small amounts of manganese, iron, carbon, silicon, etc. Iron chrome wire is a wire made of iron chrome, which is made by adding chromium and aluminum to iron. For example, iron chrome is sold under the name Kanthal (registered trademark).

[0123] (4) Although some of the explanations above overlap, in the above-mentioned embodiments 1 to 16, the semifinished pipe 1 (first semifinished pipe 1, second semifinished pipe 9) or the final pipe 2 may not have the convex portion (115, 215) or the concave portion (116). In other words, the semifinished pipe 1 may have only the convex portion, only the concave portion, both the convex and concave portions, or neither the convex and concave portions (see Figs. 4, 6, 8, 11, etc.). [Explanation of symbols]

[0124] 1... semi-finished pipe (first semi-finished pipe), 11... first layer, 11A... first layer inner layer, 11B... first layer outer layer, 11C... first layer middle layer, 11E... adjacent portion of first layer to second layer, 111... first layer surface before cutting, 112... first layer surface after cutting (cutting marks are present), 115... convex portion, 116... concave portion, 1Y... portion gripped by chucking jig, 1N... portion other than that gripped by chucking jig, 12... second layer, 12A... second layer inner layer, 12B... second layer outer layer, 12E... vicinity of first layer, 121... part of second layer remaining after cutting, 19... hollow portion, 2... final product pipe, 200... alloy layer, 215... convex portion, 3... wire (core wire material), 51...chucking jig, 52...cutting jig, 53...cutting jig, 6...contact probe, 61...barrel, 62...plunger, 63...spring, 64...spring mounting tool, 7...semiconductor inspection device, 71...contact probe mounting tool, 72...fitting portion, 73...wiring conductor, 8...semiconductor element, 81...electrode, 9...semiconductor tube (second semi-finished tube), D1...first layer outer diameter, D2...minimum diameter that can be chucked, D3...second layer outer diameter, D19...outer diameter of wire material (inner diameter of semi-finished tube or final product tube), 9112, 9114...holding member, 9118...filling member, 9120...workpiece, 9122, 9124...recess

Claims

1. A method for manufacturing semi-finished pipes, which is used to cut a pipe into a final product pipe by a predetermined lathe, comprising the steps of: preparing a wire; a first layer forming step of forming a first layer for a final product pipe configuration, which will remain after the wire is cut by the lathe, on an outer periphery of the wire by electrolytic plating; a second layer forming step of forming a second layer for a dummy to be cut by the lathe on an outer periphery of the first layer by electrolytic plating; A method for manufacturing a semi-finished pipe, comprising:

2. In the method for producing a semi-finished pipe as described in claim 1, In the first layer forming step, the first layer is formed to have a small outer diameter that makes it difficult to hold the first layer with a chucking jig of the lathe. In the second layer forming step, the second layer is formed so that the outer diameter of the second layer is large enough to be gripped by a chucking jig of the lathe. A method for manufacturing a semi-finished pipe.

3. In the method for producing a semi-finished pipe as described in claim 1, In the first layer forming step, the first layer is formed so that the outer diameter of the first layer is close to the outer diameter of the final product pipe. A method for manufacturing a semi-finished pipe comprising the steps of:

4. In the method for producing a semi-finished pipe as described in claim 1, In the first layer forming step, a first inner layer made of any one of gold, gold-cobalt alloy, palladium, palladium alloy, and a co-deposit of polytetrafluoroethylene and nickel is formed by electrolytic plating on the outer circumferential side of the wire, and a first outer layer made of any one of nickel-cobalt alloy, nickel-manganese alloy, and pure nickel is formed by electrolytic plating on the outer circumferential side of the first inner layer; In the second layer forming step, the second layer made of any one of copper, pure nickel, and nickel-manganese alloy is formed on the outer periphery of the first layer by electrolytic plating. A method for manufacturing a semi-finished pipe.

5. 2. The method for producing a semi-finished pipe according to claim 1, In the first layer forming step and the second layer forming step, the first layer and the second layer are formed of a metal having a predetermined thickness by electrolytic plating, the metal of the first layer and the metal of the second layer are made of metals that are alloyed with each other when the semi-finished pipe is heated, and the first layer and the vicinity of the first layer of the second layer are alloyed by the heating, and the first layer and the vicinity of the first layer of the second layer are hardened by the heating, whereas the outer side of the second layer that is not alloyed is softened so as to be easily cut by the lathe. A method for manufacturing a semi-finished pipe comprising the steps of:

6. A semi-finished pipe to be cut by a specified lathe to produce a final product pipe, a first layer for forming a final product tube that remains after being cut by the lathe; a second layer for a dummy formed outside the first layer and to be cut by the lathe; Equipped with the outer diameters of the first layer and the second layer do not change along a longitudinal axis of the semi-finished tube; The outer diameter of the first layer is small enough to be difficult to grip by a chucking jig of the lathe, The outer diameter of the second layer is a large outer diameter that can be gripped by a chucking jig of the lathe. It is configured as follows: A semi-finished pipe characterized in that

7. The semi-finished pipe according to claim 6, The outer diameter of the first layer is configured to be close to the outer diameter of the final product tube. A semi-finished pipe characterized in that

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