Stacked structure with interposer

Abstract

A laminate structure is disclosed having an interposer attached to a packaging substrate. In one example, the laminate structure can include a laminate substrate. The laminate structure can also include an interposer mounted on the laminate substrate without the use of solder, for example, by a non-conductive adhesive layer. A plurality of conductive vias can extend through the interposer and, if present, through the non-conductive adhesive layer to connect to the laminate substrate. The laminate structure can also include a redistribution layer (RDL) adjacent to the interposer. The RDL can be configured to electrically connect to an electronic device. Methods of forming such laminate structures are also disclosed.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to U.S. Provisional Patent Application No. 63 / 239,783, filed September 1, 2021, and entitled “BONDED STRUCTURE WITH INTERPOSER,” the disclosure of which is incorporated herein by reference in its entirety for all purposes.

[0002] The present invention relates generally to laminated structures, and more particularly to laminated electronic components for packaging or mounting on boards, including interposers and packaging substrates. [Background technology]

[0003] Packaging multiple die within an electronic system may require assembling multiple die onto a substrate using solder balls, thermal conductive bonding (TCB), or the like. Summary of the Invention [Problem to be solved by the invention]

[0004] As assemblies become smaller, it becomes more difficult to connect a large number of contacts to the substrate. Introducing a redistribution layer (RDL) between the substrate and the die with fine lines and spaces can provide better connectivity. However, the RDL may have an alignment interval of about 1 micron. Substrates, such as printed circuit boards (PCBs), tend to be wavy and not have a smooth surface, so it is difficult to align the RDL to the substrate at the 1 micron scale.

[0005] Specific implementations are described below with reference to the drawings, which are given by way of example and not limitation. [Brief description of the drawings]

[0006] [Figure 1] 1A-1C are schematic diagrams illustrating example stacked structures in accordance with some embodiments of the disclosed technology. [Figure 2A] 2A to 2C are schematic cross-sectional views showing an example of a process for forming the laminated structure shown in FIG. [Figure 2B] 2A to 2C are schematic cross-sectional views showing an example of a process for forming the laminated structure shown in FIG. [Figure 2C] 2A to 2C are schematic cross-sectional views showing an example of a process for forming the laminated structure shown in FIG. [Figure 2D] 2A to 2C are schematic cross-sectional views showing an example of a process for forming the laminated structure shown in FIG. [Figure 2E] 2A to 2C are schematic cross-sectional views showing an example of a process for forming the laminated structure shown in FIG. [Figure 3A] 3A to 3C are schematic cross-sectional views showing another example of a process for forming the laminate structure shown in FIG. [Figure 3B] 3A to 3C are schematic cross-sectional views showing another example of a process for forming the laminate structure shown in FIG. [Figure 3C] 3A to 3C are schematic cross-sectional views showing another example of a process for forming the laminate structure shown in FIG. [Figure 3D] 3A to 3C are schematic cross-sectional views showing another example of a process for forming the laminate structure shown in FIG. [Figure 3E] 3A to 3C are schematic cross-sectional views showing another example of a process for forming the laminate structure shown in FIG. [Figure 3F] 3A to 3C are schematic cross-sectional views showing another example of a process for forming the laminate structure shown in FIG. [Figure 4A] 1. FIG. 4 is a schematic cross-sectional view showing yet another example of a process for forming the laminate structure shown in FIG. [Figure 4B] 1. FIG. 4 is a schematic cross-sectional view showing yet another example of a process for forming the laminate structure shown in FIG. [Figure 4C] 1. FIG. 4 is a schematic cross-sectional view showing yet another example of a process for forming the laminate structure shown in FIG. [Figure 4D] 1. FIG. 4 is a schematic cross-sectional view showing yet another example of a process for forming the laminate structure shown in FIG. [Figure 5A] 1 is a schematic cross-sectional view showing an example of a stacked structure having a plurality of interposers. [Figure 5B] 1 is a schematic cross-sectional view showing an example of a stacked structure having a plurality of interposers. [Figure 5C] 1 is a schematic cross-sectional view showing an example of a stacked structure having a plurality of interposers. [Figure 5D] 1 is a schematic cross-sectional view showing an example of a stacked structure having a plurality of interposers. [Figure 6A] FIG. 1 is a schematic cross-sectional view showing an example of use of the disclosed stacked structure in a packaging system. [Figure 6B] FIG. 1 is a schematic cross-sectional view showing an example of use of the disclosed stacked structure in a packaging system. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] Packaging multiple dies into an electronic system may require first assembling the die on an interposer, then soldering the die and interposer assembly onto a packaging substrate, which is then attached to a system board. An interposer with a redistribution layer on top can provide fine lines and spaces. However, the soldering process requires the temperature at the interface to be raised and then lowered, which creates stress at the interface. There remains a need to simplify the packaging process to improve the electrical performance of packaged electronic systems.

[0008] In some embodiments, the present disclosure provides a method for assembling an interposer with a packaging substrate without the use of solder. In some embodiments, the present disclosure provides a stacked structure having multiple interposers per substrate that are attached to a packaging substrate without the use of solder. The stacked structure can be used in a multi-chip module having multiple substrates.

[0009] FIG. 1 shows a laminate structure 100 having a substrate, such as an interposer, bonded to a packaging substrate. The laminate structure 100 can include a laminate substrate 103 (e.g., PCB or ceramic) and an interposer 101 attached onto the laminate substrate 103 by a non-conductive adhesive layer 102, a die attach material (e.g., die attach film or paste) or an underfill. In some embodiments, the interposer substrate or at least its bulk material has a coefficient of thermal expansion (CTE) of less than 10 ppm / ° C., more particularly, less than or equal to 7 ppm / ° C. In some embodiments, the adhesive layer 102 can be a composite including an epoxy filled with low CTE particles, such as glass beads, to reduce the overall coefficient of thermal expansion (CTE) of the composite after curing. The laminate substrate 103 can include multiple non-conductive layers with conductive traces 105 embedded therein. The laminate structure 100 can further include a redistribution layer (RDL) 109 on the interposer 101. The RDL 109 having conductors 107 (pads, vias, traces, etc.) embedded in an insulating material can be configured to electrically connect to an electronic device. In some embodiments, the insulating material of the RDL 109 can be a deposited organic material such as a polymer (e.g., polyamide, polyimide, BCB, etc.). In other embodiments, the insulating material of the RDL 109 can be a deposited inorganic material suitable for subsequent direct bonding with similar insulating or semiconducting materials (e.g., silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, silicon carbonitride, etc.). In some embodiments, the redistribution layer 109 has a line spacing of less than 5 microns. As shown, a plurality of conductive vias 106 can penetrate the interposer 101 to connect with the conductors 107 of the RDL 109 and further penetrate the redistribution layer 109 (see FIGS. 4A-4D and accompanying description). In some embodiments, the RDL 109 is disposed over the plurality of conductive vias 106. In some embodiments, an additional redistribution layer is further disposed between the interposer 101 and the laminate substrate 103 .

[0010] The interposer 101 may include a non-conductive material formed of glass, a semiconductor material (e.g., silicon, GaAs, InP, etc.), or a ceramic. In some embodiments, the interposer 101 may include a single crystal semiconductor material. In some embodiments, the interposer 101 has a footprint that is smaller than the footprint of the laminate substrate 103. In some embodiments, the interposer 101 does not include active circuitry (e.g., transistors). In other embodiments, the interposer 101 may include active circuitry. In some embodiments, the laminate substrate 103 has a high density of interconnects within the substrate to the laminate substrate 103. In some embodiments, the non-conductive adhesive layer 102 may be formed of a strong adhesive between the silicon portion of the interposer 101 and the PCB. In some embodiments, the thermal expansion coefficient of the non-conductive material (e.g., Si) of the interposer 101 is substantially matched to the thermal expansion coefficient of the laminate substrate 103 (e.g., PCB).

[0011] 2A-2E illustrate a process for forming the laminate structure shown in FIG. 1, where like features are referenced by like reference numbers incremented by 100 and suffixes are added to designate features at different process stages. The process can begin with providing a laminate substrate 203a and an interposer 201a as shown in FIG. 2A. The interposer 201a can have a mounting surface configured to support an electronic device and a back surface opposite the mounting surface. The interposer 201a can further include a number of through vias formed in a non-conductive material. The interposer 201a can further include a barrier material 204a and can also include metallization (traces, vias, pads) for localized connections or wiring other than simple through vias. The laminate substrate 203a can include metal traces 205a and contact pads 2050a. The process can then bond, adhere, or otherwise integrate the backside of the interposer 201b to the laminate substrate 203b through the non-conductive adhesive layer 202b in the illustrated embodiment, as shown in FIG. 2B. The process can then remove a portion of the adhesive 202c from the through vias (e.g., by CO2 laser ablation) to expose the contact pads 2050c in the laminate substrate 203c, as shown in FIG. 2C. The process can then metallize the through vias to form the conductive vias 206d, as shown in FIG. 2D. The conductive vias 206d can be formed to contact the contact pads 2050d of the laminate substrate 203d. The process can then form a redistribution layer (RDL) 209e on the interposer 201e after bonding the backside of the interposer 201e to the laminate substrate 203e, as shown in FIG. 2E. Forming the redistribution layer 209e can involve growing or depositing the redistribution layer 209e on the interposer 201e.As one skilled in the art will appreciate, forming the RDL involves depositing and patterning an insulating layer(s) and a conductive layer(s) such that the redistribution layer 209e includes conductors 207e (e.g., vias, traces, pads) embedded in the insulating material and in electrical communication with the underlying conductive vias 206e through the interposer 201e.

[0012] 3A-3F illustrate another process for forming the laminate structure shown in FIG. 1, where like features are referenced by like reference numbers incremented by 200 and suffixes are added to designate features at different process stages. The process can begin with providing a laminate substrate 303a and an interposer 301a as shown in FIG. 3A. The interposer 301a can have a mounting surface configured to support an electronic device and a back surface opposite the mounting surface. The interposer 301a can further include a number of through vias formed in a non-conductive material. The interposer 301a can further include a barrier material 304a and can also include metallization (traces, vias, pads) for localized connections or wiring other than simple through vias. The laminate substrate 303a can include metal traces 305a and contact pads 3050a. The process may then bond, adhere, or otherwise integrate the backside of the interposer 301b to the laminate substrate 303b through the non-conductive adhesive layer 302b in the illustrated embodiment, as shown in FIG. 3B. The process may then remove a portion of the adhesive 302c from the through vias to expose the contact pads 3050c in the laminate substrate 303c, as shown in FIG. 3C. The process may then metallize the through vias to form the conductive vias 306d, as shown in FIG. 3D. The conductive vias 306d may be formed to contact the contact pads 3050d of the laminate substrate 303d. The process may proceed to form a redistribution layer on the interposer after bonding the backside of the interposer to the laminate substrate. To this point, the process of FIGS. 3A-3D may be similar to the process described for FIGS. 2A-2D.

[0013] In this embodiment, forming the redistribution layer can be accomplished through a transfer process as shown in FIG. 3E and FIG. 3F. For example, as shown in FIG. 3E, forming the redistribution layer can involve preparing a preformed RDL 309e and bonding the preformed RDL 309e to the interposer 301e by an intermediary adhesive (not shown). The redistribution layer 309e can include conductors 307e (e.g., traces, vias, pads) embedded in an insulating material. Alternatively, forming the redistribution layer can involve preparing a preformed RDL and directly bonding the preformed RDL to the interposer without the use of an intermediary adhesive (e.g., by a hybrid direct bonding process). The preformed RDL 309e can be formed on a carrier 312e (such as a semiconductor or glass carrier). As shown in FIG. 3F, the carrier 312e can be removed from the RDL 309f after transferring the RDL 309f to the interposer 301f. An example RDL transfer process is described in US Patent Application Serial No. 17 / 171,351, the contents of which are incorporated herein by reference in their entirety for all purposes.

[0014] 4A-4D illustrate another process for forming the laminate structure shown in FIG. 1, where like features are referenced by like reference numbers incremented by 300 and suffixes are added to designate features at different process stages. In some examples, the process can begin with providing a laminate substrate 403a and an interposer 401a as shown in FIG. 4A. The interposer 401a can have a mounting surface configured to support an electronic device and a back surface opposite the mounting surface. The laminate substrate 403a can include metal traces 405a and contact pads 4050a. The process can then form a redistribution layer (RDL) 409a on the mounting surface of the interposer 401a. As will be appreciated by those skilled in the art, forming the RDL involves depositing and patterning an insulating layer(s) and a conductive layer(s) such that the redistribution layer 409a includes conductors 407a (e.g., vias, traces, pads) embedded in the insulating material. In some embodiments, a plurality of through vias may pass through both the interposer 401a and the RDL 409a and line the through vias with a barrier material 404a as shown. The process may then bond, adhere, or otherwise integrate the backside of the interposer 401b to the laminate substrate 403b through a non-conductive adhesive layer 402b in the illustrated embodiment as shown in FIG. 4B. The process may then remove a portion of the adhesive 403c from the plurality of through vias to expose a plurality of contact pads 4050c in the laminate substrate 403c as shown in FIG. 4C. The process may then metallize the plurality of through vias to form a plurality of conductive vias 406d that pass through both the interposer 401d and the RDL 409d and connect the conductors 407d of the RDL 409d to the contact pads 4050d of the laminate substrate 403d as shown in FIG. 4D.

[0015] After the process shown in Figures 2A-2E, 3A-3F, or 4A-4D, at least one integrated device die can be attached onto the redistribution layer through solder bonding, adhesive bonding, or direct bonding without the use of an intermediate adhesive. In some examples where the integrated device die is attached to the redistribution layer through solder bonding, an underfill can further be provided between the integrated device die and the redistribution layer. The underfill can flow between the die and the redistribution layer to mechanically protect the solder ball joints. In some embodiments, the underfill can be a composite including an epoxy filled with low-CTE particles such as glass beads to reduce the overall coefficient of thermal expansion (CTE) of the composite after curing.

[0016] In some stacked structures, such as those shown in FIGS. 5A and 5B, in which similar features as those in FIG. 1 are referenced with similar reference numbers incremented by 400 and suffixed to designate features at different process stages, multiple interposers are integrated with a laminate substrate. Multiple interposers 501a, 501b can be integrated with substrates 503a, 503b by multiple respective adhesive layers 502a, 502b. Alternatively, multiple interposers can be integrated with substrates by a common continuous or patterned adhesive. At least one integrated device die 523b can be attached to the same RDL (e.g., 509a or 509b). For example, integrated device die 523b can be integrated with and electrically connected to RDL 509b by solder balls 521b in the illustrated embodiment. As described above, laminate substrates 503a, 503b can include metal traces 505a, 505b and contact pads 5050a, 5050b. The RDLs 509a, 509b can include conductors 507a, 507b (e.g., traces, vias, pads). The interposers 501a, 501b can be bonded, adhered, or otherwise integrated with the laminate substrates 503a, 503b by adhesives 502a, 502b in the illustrated embodiment. The laminate substrate contact pads 5050a, 5050b can be contacted by a number of conductive vias 506a, 506b that pass through the interposers 501a, 501b, which can pass through both the interposers 501a, 501b and the RDLs 509a, 509b as shown in Figures 4A-5B, or through the interposers to connect with the overlying RDLs as shown in Figures 1-3F. In some embodiments, one or more RDLs and interposers attached to the same substrate can include the same or substantially similar structures. In some embodiments, one or more RDLs and interposers attached to the same substrate can include different structures, hi some embodiments, one or more RDLs and interposers attached to the same substrate can include functionally similar structures.In some embodiments, one or more RDLs and interposers mounted on the same substrate may include functionally distinct structures.

[0017] Figures 5C-5D show a similar stackup structure as Figures 5A and 5B, and like reference numbers are used to refer to like features, with the difference being that Figures 5C-5D show an integrated device die 523b hybrid bonded directly to or onto the RDL 509b of the interposer 509b without the use of an intervening solder or other adhesive layer.

[0018] As shown in FIG. 6A, the disclosed stack structure can be used to provide a signal path in a package system to transfer signals from the laminate substrate 603 through the interposer 601 by some of the conductive vias, through the redistribution layer 609 to the integrated device die 623 (e.g., CPU, GPU, memory stack, etc.), and vice versa. The integrated device die 623 can be soldered to the redistribution layer 609 by solder balls 641 and communicate with each other through the redistribution layer(s) 609. Also shown in FIG. 6A is another integrated device die 624 that is directly connected to the laminate substrate 603 by further solder balls 631. The laminate substrate 603 can be soldered to a system board 625 by solder balls 621. It can be seen that this integrated device die 624 communicates with the other device die 623 through the RDL 609, the interposer 601, and the laminate substrate 603. Thus, the disclosed stack structure can also provide signal paths to transfer signals from an integrated device die, through a redistribution layer, to another integrated device die connected to the redistribution layer(s) or to the laminate substrate, and vice versa. Interposer 601 is electrically and mechanically connected to laminate substrate 603 without the use of solder.

[0019] FIG. 6B is similar to FIG. 6A except that it shows an integrated device die 623 hybrid bonded directly to the RDL 609 on the interposer 601 .

[0020] redistribution layer An integrated device package can use a redistribution layer (RDL) to reroute signals from one or more integrated device dies in the package to other devices (e.g., other devices outside the footprint of the integrated device die). The RDL can include laterally extending traces to connect top pads that are laterally offset relative to bottom pads. Such lateral extensions can connect features at the bottom and top of the RDL that have different pitches (fan-out or fan-in) or multiple dies can simply be laterally offset and / or electrically connected. The RDL can include conductors embedded in an insulating or non-conductive material. An electronic component (e.g., an integrated device die) can be connected to a redistribution layer that can include conductive routing traces that route signals laterally outside the footprint of the electronic component. In some embodiments, the RDL includes metal traces or conductors that extend laterally to transfer signals inward (fan-in) or outward (fan-out) from the integrated device die attached to the RDL. In some embodiments, the interconnect structure can include one or more layers. The RDL may advantageously include numerous or high density interconnects and signal lines capable of carrying a significant number of signals between the dies.

[0021] In some embodiments, fan-out rewiring can carry signals from fine pitch bond pads of an integrated device die to other devices spaced laterally from the die. In some implementations, fan-out RDLs can carry signals from high density contacts of the die to widely spaced leads or contact pads configured to connect to a system board (e.g., printed circuit board or PCB). In some implementations, fan-out RDLs can carry signals from the die to other devices, such as other integrated device dies. In some packages that include multiple integrated device dies, the die can be attached to a sacrificial carrier and a molding compound can be provided over the die and carrier. The sacrificial carrier can be removed and the molded device die can be flipped over. An RDL can be deposited over the molding compound and device die to form a reconstituted wafer. The reconstituted wafer can be singulated into multiple packages, each package including one or more dies connected to an RDL.

[0022] Integrated Device Die In some embodiments, one or more of the multiple integrated device dies may be flip-chip mounted to the RDL. The multiple integrated device dies may include any suitable type of device die. For example, one or more of the multiple integrated device dies may include electronic components such as a processor die, a memory die, a microelectromechanical system (MEMS) die, an optical device, or any other suitable type of device die. In other embodiments, the electronic components may include passive devices such as capacitors, inductors, or other surface mount devices. In various embodiments, circuitry (such as active components such as transistors) may be patterned at or near an active surface(s) of one or more of the multiple integrated device dies. The active surface may be on a side of one or more of the multiple integrated device dies that is opposite a respective back surface of the one or more of the multiple integrated device dies. The back surface may or may not include any active circuitry or passive devices. In various embodiments, the integrated device dies attached to the substrate may be the same type of integrated device die or may be different types of device dies.

[0023] The integrated device die may include a bonding surface and a back surface opposite the bonding surface. The bonding surface may have a plurality of conductive bond pads including conductive bond pads and a non-conductive material proximate the conductive bond pads. In some embodiments, the conductive bond pads of the integrated device die may be directly bonded to corresponding conductive pads of the RDL without the use of an intermediary adhesive, and the non-conductive material of the integrated device die may be directly bonded to a portion of the corresponding non-conductive material of the RDL without the use of an intermediary adhesive. Direct bonding without adhesive is further described below and is described in U.S. Pat. Nos. 7,126,212, 8,153,505, 7,622,324, 7,602,070, 8,163,373, 8,389,378, 7,485,968, 8,735,219, 9,385,024, 9,391,102, and 9,485,968. Nos. 43, 9,431,368, 9,953,941, 9,716,033, 9,852,988, 10,032,068, 10,204,893, 10,434,749, and 10,446,532, the contents of each of which are incorporated herein by reference in their entirety for all purposes. In some embodiments, multiple integrated device dies can also be bonded to the RDL by thermally conductive bonding (TCB).

[0024] Examples of direct bonding methods and direct bonding structures Various embodiments disclosed herein relate to direct bonding structures that allow two elements to be directly bonded together without the use of an intermediary adhesive. Two or more elements (such as integrated device dies, wafers, interposers, redistribution layers, etc.) can be stacked or bonded together to form a bonded structure. Conductive contact pads of one element can be electrically connected to corresponding conductive contact pads of another element. Any suitable number of elements can be stacked in a bonded structure. The contact pads can include metal pads formed in the non-conductive bonded regions and can be connected to an underlying metallization such as a redistribution layer (RDL).

[0025] In some embodiments, the elements are directly bonded to each other without the use of adhesive. In various embodiments, the non-conductive or dielectric material of the first element can be directly bonded to the corresponding non-conductive or dielectric field region of the second element without the use of adhesive. The non-conductive material can be referred to as the non-conductive bonding region or bonding layer of the first element. In some embodiments, the non-conductive material of the first element can be directly bonded to the corresponding non-conductive material of the second element using dielectric-dielectric bonding techniques. For example, the dielectric-dielectric bond can be formed without the use of adhesive using direct bonding techniques disclosed in at least U.S. Patent Nos. 9,564,414, 9,391,143, and 10,434,749, the contents of each of which are incorporated herein by reference in their entirety for all purposes.

[0026] In various embodiments, a hybrid direct bond can be formed without the use of an intermediary adhesive. For example, the dielectric bonding surfaces can be polished to a high degree of smoothness. The bonding surfaces can be cleaned and exposed to plasma and / or etchants to activate the surfaces. In some embodiments, the surfaces can be terminated with chemical species after or during activation (e.g., during a plasma and / or etch process). Without being limited by theory, in some embodiments, an activation process can be performed to break chemical bonds at the bonding surfaces, and the termination process can provide additional chemical species at the bonding surfaces that increase the bond energy during direct bonding. In some embodiments, activation and termination are performed in the same process, such as activating and terminating the surfaces with plasma or wet etchants. In other embodiments, the bonding surfaces can be terminated in a separate process to provide additional chemical species for direct bonding. In various embodiments, the terminating species can include nitrogen. Additionally, in some embodiments, the bonding surfaces can be exposed to fluorine. For example, there can be one or more fluorine peaks near the layers and / or bonding interface. Thus, in a direct bonding structure, the bond interface between the two dielectric materials can include a very smooth interface with a high nitrogen content and / or fluorine peak at the bond interface. Further examples of activation and / or termination processes are described in U.S. Patent Nos. 9,564,414, 9,391,143, and 10,434,749, the contents of each of which are incorporated herein by reference in their entirety for all purposes.

[0027] In various embodiments, the conductive contact pads of a first component can also be directly bonded to corresponding conductive contact pads of a second component. For example, hybrid bonding techniques can be used to provide conductor-conductor direct bonds along a bonding interface that includes a covalently directly bonded dielectric-dielectric surface prepared as described above. In various embodiments, conductor-conductor (e.g., contact pad-contact pad) direct bonds and dielectric-dielectric hybrid bonds can be formed using direct bonding techniques disclosed at least in U.S. Patent Nos. 9,716,033 and 9,852,988, the contents of each of which are incorporated herein by reference in their entirety for all purposes.

[0028] For example, the dielectric bonding surfaces can be prepared as described above and bonded directly to each other without the use of an intermediary adhesive. The conductive contact pads (which can be surrounded by a non-conductive dielectric field region) can also be bonded directly to each other without the use of an intermediary adhesive. In some embodiments, each contact pad can be recessed downward from the outer surface (e.g., top surface) of the dielectric field region or non-conductive bonding region by, for example, less than 30 nm, less than 20 nm, less than 15 nm, or less than 10 nm, for example, within the range of 2 nm to 20 nm, or within the range of 4 nm to 10 nm. In some embodiments, the non-conductive bonding regions can be bonded directly to each other without the use of an adhesive at room temperature, and the bonded structure can then be annealed. Upon annealing, the contact pads can expand and contact each other to form a metal-metal direct bond. The use of hybrid bonding technology, such as Direct Bond Interconnect or DBI®, available from Xperi, Inc., San Jose, Calif., can advantageously allow for a high density of pads connected across the direct bond interface (e.g., small or fine pitch for regular arrays). In some embodiments, the pitch of the bonding pads or the pitch of the conductive traces embedded in the bonding surface of one of the bonded elements can be less than 40 microns, or less than 10 microns, or less than 2 microns. In some applications, it is desirable for the ratio of the pitch of the bonding pads to one of the dimensions of the bonding pads to be less than 5 or less than 3, and in some cases less than 2. In other applications, the width of the conductive traces embedded in the bonding surface of one of the bonded elements can range from 0.3 to 3 microns. In various embodiments, the contact pads and / or traces can include copper, although other metals may be suitable.

[0029] In this manner, a direct bonding process can directly bond a first element to a second element without the use of an intermediary adhesive. In some configurations, the first element can include a singulated element, such as a singulated integrated device die. In other configurations, the first element can include a carrier or substrate (e.g., a wafer) that includes multiple (e.g., tens, hundreds, or more) element regions that upon singulation form multiple integrated device dies. Similarly, the second element can also include a singulated element, such as a singulated integrated device die. In other configurations, the second element can include a carrier or substrate (e.g., a wafer).

[0030] As described herein, the first and second elements can be directly bonded to each other without the use of adhesive, which is distinct from a deposition process. In one application, the width of the first element in the bonded structure can be similar to the width of the second element. In some other embodiments, the width of the first element in the bonded structure can be different from the width of the second element. The width or area of ​​the larger element in the bonded structure can be at least 10% greater than the width or area of ​​the smaller element. Thus, the first and second elements can include non-deposited elements. Furthermore, the direct bonded structure, unlike a deposited layer, can include defective regions along the bond interface where nanovoids exist. The nanovoids can be formed due to activation (e.g., exposure to plasma) of the bonded surface. As discussed above, the bond interface can include concentrations of materials from the activation and / or last chemical treatment process. For example, in embodiments that utilize nitrogen plasma for activation, nitrogen peaks can be formed at the bond interface. In embodiments that utilize oxygen plasma for activation, oxygen peaks can be formed at the bond interface. In some embodiments, the bond interface can include silicon oxynitride, silicon oxycarbonitride, or silicon carbonitride. As described herein, the direct bonds can include covalent bonds that are stronger than van der Waals bonds. The bond layer can also include a polished surface that is highly smooth and planarized.

[0031] In various embodiments, the metal-metal bond between the contact pads can be bonded such that the copper grains grow together across the bond interface. In some embodiments, the copper can have grains oriented along 111 crystal planes to enhance diffusion of copper across the bond interface. The bond interface can extend substantially completely to at least a portion of the bonded contact pads such that there are substantially no gaps between the non-conductive bonded regions at or near the bonded contact pads. In some embodiments, a barrier layer (which can include, for example, copper) can be provided below the contact pads. However, in other embodiments, there can be no barrier layer below the contact pads, as described, for example, in U.S. Patent Application Publication No. 2019 / 0096741, which is incorporated herein by reference in its entirety for all purposes.

[0032] In one embodiment, a laminate structure is disclosed. The laminate structure may include a laminate substrate. The laminate structure may also include an interposer attached onto the laminate substrate by an adhesive layer. A plurality of conductive vias pass through the interposer and the non-conductive adhesive layer to connect to the laminate substrate. The laminate structure may also include a redistribution layer (RDL) adjacent to the interposer.

[0033] In one embodiment, the RDL is on the interposer.

[0034] In one embodiment, the RDL is between the interposer and the adhesive layer.

[0035] In one embodiment, the laminate structure further comprises an additional RDL between the interposer and the adhesive layer.

[0036] In one embodiment, the RDL is configured to electrically connect to an electronic device.

[0037] In one embodiment, a number of conductive vias extend through the redistribution layer.

[0038] In one embodiment, the interposer includes a non-conductive material formed from glass, a semiconductor, and / or a ceramic.

[0039] In one embodiment, the redistribution layer includes conductors embedded in an insulating material.

[0040] In one embodiment, a redistribution layer is grown or deposited on the interposer.

[0041] In one embodiment, the redistribution layer is integrated with the interposer by an intermediate adhesive.

[0042] In one embodiment, the redistribution layer is bonded directly to the interposer without the use of an intermediary adhesive.

[0043] In one embodiment, the stack further includes at least one integrated device die disposed on the redistribution layer.

[0044] In one embodiment, at least one integrated device die is electrically connected to the redistribution layer.

[0045] In one embodiment, at least one integrated device die is integrated with the redistribution layer by soldering.

[0046] In one embodiment, at least one integrated device die is integrated with the redistribution layer by an intermediary adhesive.

[0047] In one embodiment, at least one integrated device die is bonded directly to the redistribution layer without the use of an intermediary adhesive.

[0048] In one embodiment, the laminate substrate comprises a printed circuit board and / or the laminate substrate comprises a ceramic.

[0049] In one embodiment, the adhesive layer comprises a non-conductive adhesive and / or an underfill.

[0050] In one embodiment, the laminate structure may also include signal paths configured to convey signals from the laminate substrate through a plurality of conductive vias, through the interposer, through the redistribution layer to one of the at least one integrated device die, and vice versa.

[0051] In one embodiment, the stack structure may also include signal paths configured to transfer signals from one of the at least one integrated device die through the redistribution layer to another of the at least one integrated device die and vice versa.

[0052] In one embodiment, the stack may also include an additional redistribution layer disposed between the interposer and the laminate substrate.

[0053] In one embodiment, the interposer does not include active circuitry.

[0054] In one embodiment, a RDL is disposed over a plurality of conductive vias.

[0055] In one embodiment, a number of conductive vias extend from the interposer to the RDL.

[0056] In one embodiment, a laminate structure is disclosed. The laminate structure can include a laminate substrate. The laminate structure can also include at least two interposers disposed on the laminate substrate. Each of the at least two interposers is integrated with the laminate substrate by one or more non-conductive adhesive layers.

[0057] In one embodiment, each of the at least two interposers includes a respective plurality of conductive vias formed in a non-conductive material.

[0058] In one embodiment, the stack may also include a respective redistribution layer disposed on each of the at least two interposers.

[0059] In one embodiment, the stacked structure may also include a respective redistribution layer disposed on each of the at least two interposers, with a respective plurality of conductive vias penetrating the respective redistribution layer.

[0060] In one embodiment, the non-conductive material is formed of a glass, a semiconductor, and / or a ceramic.

[0061] In one embodiment, each redistribution layer includes a conductor embedded in an insulating material.

[0062] In one embodiment, each redistribution layer is grown or deposited on the interposer.

[0063] In one embodiment, each redistribution layer is integrated with the interposer by an intermediate adhesive.

[0064] In one embodiment, each redistribution layer is bonded directly to the interposer without the use of an intermediary adhesive.

[0065] In one embodiment, the stack may also include at least one integrated device die disposed on each redistribution layer.

[0066] In one embodiment, at least one integrated device die is integrated with each redistribution layer by soldering.

[0067] In one embodiment, at least one integrated device die is integrated with a respective redistribution layer by an intermediary adhesive.

[0068] In one embodiment, at least one integrated device die is bonded directly to a respective redistribution layer without the use of an intermediary adhesive.

[0069] In one embodiment, the laminate substrate is a printed circuit board and / or the laminate substrate comprises a ceramic.

[0070] In one embodiment, each adhesive layer includes a non-conductive adhesive and / or an underfill.

[0071] In one embodiment, the laminate structure may also include signal paths configured to transfer signals from the laminate substrate through a respective plurality of conductive vias, through one of the at least two interposers, through a respective redistribution layer to one of the at least one integrated device die, and vice versa.

[0072] In one embodiment, the stacked structure may also include an additional redistribution layer disposed between one of the at least two interposers and the laminate substrate.

[0073] In one embodiment, a method of forming a laminate structure is disclosed. The method can include providing a laminate substrate. The method can also include providing an interposer. The interposer has a mounting surface configured to support an electronic device and a back surface opposite the mounting surface. The method can include integrating the interposer with the laminate substrate without the use of solder. A plurality of conductive vias extend through the interposer and connect to the laminate substrate.

[0074] In one embodiment, the interposer includes a plurality of through vias formed from a non-conductive material.

[0075] In one embodiment, the method may also include forming a redistribution layer on the interposer after bonding the backside of the interposer to the laminate substrate.

[0076] In one embodiment, the method may also include forming a redistribution layer on the interposer before adhering the backside of the interposer to the laminate substrate.

[0077] In one embodiment, a number of through vias extend through the redistribution layer.

[0078] In one embodiment, the non-conductive material is formed of a glass, a semiconductor, and / or a ceramic.

[0079] In one embodiment, integrating the interposer with the laminate substrate includes providing a non-conductive adhesive, and the method includes removing a portion of the adhesive from the plurality of through vias to expose a plurality of contact pads in the laminate substrate. The method may also include metallizing the plurality of through vias to form a plurality of conductive vias.

[0080] In one embodiment, the redistribution layer includes conductors embedded in an insulating material.

[0081] In one embodiment, forming the redistribution layer includes growing or depositing the redistribution layer on the interposer.

[0082] In one embodiment, forming the redistribution layer includes adhering the redistribution layer to the interposer with an intermediary adhesive, the redistribution layer being preformed.

[0083] In one embodiment, forming the redistribution layer includes directly bonding the redistribution layer to the interposer without the use of an intermediary adhesive, and the redistribution layer is preformed.

[0084] In one embodiment, the method may also include attaching at least one integrated device die onto the redistribution layer.

[0085] In one embodiment, attaching the at least one integrated device die includes solder bonding the at least one integrated device die to the redistribution layer.

[0086] In one embodiment, attaching the at least one integrated device die includes adhesively bonding the at least one integrated device die to the redistribution layer.

[0087] In one embodiment, attaching the at least one integrated device die includes directly bonding the at least one integrated device die to the redistribution layer without the use of an intermediary adhesive.

[0088] In one embodiment, the laminate substrate comprises a printed circuit board and / or the laminate substrate comprises a ceramic.

[0089] In one embodiment, integrating the interposer with the laminate substrate includes providing an underfill.

[0090] In one embodiment, the method may also include providing an additional redistribution layer between the interposer and the laminate substrate.

[0091] In one embodiment, integrating the interposer with the laminate substrate includes providing a non-conductive adhesive, and the method may also include removing a portion of the adhesive from the plurality of through vias and metallizing the plurality of through vias after adhering a back surface of the interposer to the laminate substrate.

[0092] In one embodiment, the interposer has a footprint that is smaller than the footprint of the laminate substrate.

[0093] In one embodiment, each of the at least two interposers has a footprint that is smaller than the footprint of the laminate substrate.

[0094] In one embodiment, the coefficient of thermal expansion of the non-conductive material is substantially matched to the coefficient of thermal expansion of the laminate substrate.

[0095] In one embodiment, the redistribution layer has a line spacing of less than 5 microns.

[0096] In one embodiment, each of the at least two redistribution layers has a line spacing of less than 5 microns.

[0097] In one embodiment, a laminate structure is disclosed. The laminate structure can include a laminate substrate. The laminate structure can also include a substrate mounted on the laminate substrate without the use of solder. A plurality of conductive vias penetrate the substrate and connect to the laminate substrate. The laminate structure can also include a redistribution layer (RDL) adjacent to the substrate.

[0098] Unless the context clearly requires otherwise, words such as "comprise, comprising, include, including" and the like are to be construed in an inclusive sense, i.e., "including, but not limited to," rather than an exclusive or exhaustive sense. The word "coupled," as generally used herein, means two or more elements that may be connected directly or through one or more intermediate elements. Similarly, the word "connected," as generally used herein, means two or more elements that may be connected directly or through one or more intermediate elements. Additionally, when the application uses words such as "herein," "above," "below," and words of similar import, these words are intended to refer to the application as a whole and not to any particular portion of the application. Furthermore, when a first element is described herein as being "on" or "over" a second element, the first element can be directly on or over the second element such that the first and second elements are in direct contact with each other, or indirectly on or over the second element such that there are one or more intervening elements between the first and second elements. Words using the singular or plural in the above detailed description can also include the plural or singular, respectively, where the context allows. The word "or" when referring to a list of two or more items covers all interpretations of the word, such as any of the items in the list, all of the items in the list, and any combination of the items in the list.

[0099] Additionally, as used herein, inter alia, conditional terms such as "can, could, might, may" and "eg, for example, such as" are generally intended to convey that some embodiments include certain features, elements and / or conditions and other embodiments do not include them, unless expressly stated otherwise or understood otherwise within the context of use. Thus, such conditional terms are generally not intended to imply that features, elements and / or conditions are in any way required for one or more embodiments.

[0100] Although several embodiments have been described, these embodiments are presented as examples only and are not intended to limit the scope of the present disclosure. Indeed, the novel apparatus, method and system described herein may be embodied in various other forms, and various omissions, substitutions and modifications of the forms of the methods and systems described herein may be made without departing from the spirit of the present disclosure. For example, although blocks are shown in a given arrangement, another embodiment may perform similar functions using different components and / or circuit topologies, and some blocks may be deleted, moved, added, subdivided, combined and / or modified. Each of these blocks may be implemented in a variety of different ways. Any suitable combination of elements and acts of the various embodiments described above may be combined to provide further embodiments. The appended claims and their equivalents are intended to cover such forms or modifications as fall within the scope and spirit of the present disclosure.

Claims

1. A laminated structure, A laminate substrate; an interposer mounted on the laminate substrate by a non-conductive adhesive layer, the interposer having a plurality of conductive vias passing through the interposer and the non-conductive adhesive layer to connect to the laminate substrate; a redistribution layer (RDL) adjacent to the interposer; A laminated structure comprising:

2. The RDL is present on the interposer. The laminate structure of claim 1 .

3. the RDL is between the interposer and the non-conductive adhesive layer; The laminate structure of claim 1 .

4. further comprising an additional RDL between the interposer and the non-conductive adhesive layer. The laminate structure of claim 2 .

5. the plurality of conductive vias penetrate the redistribution layer; The laminate structure of claim 1 .

6. the interposer comprises a non-conductive material formed of glass, semiconductor, and / or ceramic; The laminate structure of claim 1 .

7. The redistribution layer is integrated with the interposer by an intermediary adhesive. The laminate structure of claim 1 .

8. the redistribution layer is bonded directly to the interposer without the use of an intermediary adhesive; The laminate structure of claim 1 .

9. A laminated structure, A laminate substrate; at least two interposers disposed on the laminate substrate; each of the at least two interposers being integrated with the laminate substrate by one or more non-conductive adhesive layers; Laminated structure.

10. each of the at least two interposers including a respective plurality of through-interposer conductive vias formed in a non-conductive material; The laminate structure of claim 9.

11. A method for forming a laminated structure, comprising: providing a laminate substrate; Providing an interposer having a mounting surface configured to support an electronic device and a back surface opposite the mounting surface; integrating the interposer with the laminate substrate without the use of solder, wherein a plurality of conductive vias extend through the interposer and connect to the laminate substrate; A method comprising:

12. the interposer is integrated with the laminate substrate via an adhesive layer, and the plurality of conductive vias penetrate the adhesive layer; The method of claim 11.

13. The method further includes forming a redistribution layer on the interposer after integrating the interposer with the laminate substrate. The method of claim 11.

14. The method further includes forming a redistribution layer on the interposer before integrating the interposer with the laminate substrate. The method of claim 11.

15. removing a portion of the adhesive layer to expose a plurality of contact pads in the laminate substrate; metallizing a plurality of through vias in the interposer aligned with the plurality of contact pads to form the plurality of conductive vias; The method of claim 12 further comprising:

16. forming the redistribution layer includes bonding the redistribution layer to the interposer with an intermediary adhesive, the redistribution layer being preformed; The method of claim 13.

17. forming the redistribution layer includes directly bonding the redistribution layer to the interposer without using an intermediary adhesive, the redistribution layer being preformed; The method of claim 13.

18. A laminated structure, A laminate substrate; a substrate mounted on the laminate substrate without the use of solder, the substrate having a plurality of conductive vias extending through the substrate and connecting to the laminate substrate; a redistribution layer (RDL) on the substrate opposite the laminate substrate; A laminated structure comprising:

19. A laminated structure as described in claim 1, wherein the interposer is formed from a substrate different from the substrate of the laminate substrate.

20. The laminate structure of claim 1, wherein the laminate substrate has a plurality of contact pads connected to the plurality of conductive vias.

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