Determination method and determination device

Abstract

To accurately determine whether an object to be inspected satisfies an inspection standard without complicating processing.SOLUTION: A path / fail determination of an inspection work is made by: acquiring reference data, which is a measurement value obtained by measuring a reference work, which is an inspection object that satisfies the inspection standard; calculating average data by performing statistical processing on the reference data; and comparing a degree of deviation between measurement data, which is the measurement value obtained by measuring the inspection work, which is the object to be inspected, and the average data with a determination value set according to the inspection standard.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a determination method and a determination device. [Background technology]

[0002] There is an ultrasonic inspection device that uses ultrasonic waves to inspect whether the sealing state of a packaging container, in which the opening is sealed by welding sheet members, meets the inspection criteria (inspection standards).The ultrasonic inspection device transmits ultrasonic waves to the packaging container (workpiece) to be inspected, receives the ultrasonic waves (received waves) that have passed through the packaging container, and compares the measurement data indicating the intensity of the received waves with a threshold value to inspect whether the sealing state meets the inspection criteria. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2020 / 162618 Summary of the Invention [Problem to be solved by the invention]

[0004] However, depending on the type of the object to be inspected and the arrangement of the packaging container and the ultrasonic inspection device, the strength of the received wave may be large or small even if the bonding state is uniform. For example, the received wave may tend to be small at the ends of each side of a rectangular packaging container and large at the center of each side. In such a case, if the strength of the received wave is compared with a uniform threshold value, the strength of the received wave may be smaller than the threshold value even if the bonding state meets the inspection standard, or the strength of the received wave may be larger than the threshold value even if the bonding state does not meet the inspection standard, which may result in erroneous inspection. On the other hand, if different threshold values ​​are used depending on the object to be inspected, the processing becomes complicated and the efficiency of the inspection decreases.

[0005] The present invention has been made in consideration of the above-mentioned circumstances, and its object is to provide a determination method and a determination device that can accurately determine whether or not an object to be inspected satisfies an inspection standard without complicating the processing. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems, one aspect of the present invention is a method for determining whether an object to be inspected satisfies an inspection criterion by a computer, which obtains reference data, which is a measurement value obtained by measuring a reference work, which is an object to be inspected that satisfies the inspection criterion, calculates averaged data by performing statistical processing on the reference data, and determines whether the inspection work passes or fails by comparing the degree of deviation between the measurement data, which is a measurement value obtained by measuring an inspection work, which is an object to be inspected, and the averaged data, with a judgment value set according to the inspection criterion.

[0007] Moreover, one aspect of the present invention is a judgment device that judges whether an object to be inspected satisfies an inspection criterion, and includes an acquisition unit that acquires reference data, which is a measurement value obtained by measuring a reference work, which is an object to be inspected that satisfies the inspection criterion, a calculation unit that calculates averaged data by performing statistical processing on the reference data, and a judgment unit that judges whether the inspection work passes or fails by comparing the degree of deviation between the measurement data, which is a measurement value obtained by measuring an inspection work, which is an object to be inspected, and the averaged data, with a judgment value that is set according to the inspection criterion. Effect of the Invention

[0008] According to the present invention, it is possible to accurately determine whether or not an inspection object satisfies an inspection standard without complicating the processing. [Brief description of the drawings]

[0009] [Figure 1] 1 is a block diagram showing an example of the configuration of an ultrasonic inspection system 1 according to an embodiment. [Diagram 2] 2 is a diagram for explaining an inspection performed by an ultrasonic inspection device 20 of an embodiment. FIG. [Diagram 3] FIG. 4 is a diagram illustrating an example of an inspection target area according to the embodiment. [Figure 4] 4 is a diagram showing an example of measurement values ​​in the inspection target area shown in FIG. 3. [Diagram 5] 4 is a diagram showing an example of a map representing averaged data and measurement data in the inspection target area shown in FIG. 3. FIG. [Figure 6] 4 is a diagram showing an example of determination data in the inspection target area shown in FIG. 3. [Figure 7] FIG. 11 is a diagram showing another example of the inspection target area according to the embodiment. [Figure 8A] 8 is a diagram showing an example of averaged data in the inspection target area shown in FIG. 7. [Figure 8B] 8 is a diagram showing an example of measurement data in the inspection target area shown in FIG. 7. [Figure 8C] 8 is a diagram showing an example of measurement data in the inspection target area shown in FIG. 7. [Figure 8D] 8 is a diagram showing an example of determination data in the inspection target area shown in FIG. 7. [Figure 8E] 8 is a diagram showing an example of determination data in the inspection target area shown in FIG. 7. [Figure 9] 4 is a flowchart showing the flow of processing performed by the ultrasonic inspection device 20. [Figure 10] 4 is a flowchart showing the flow of processing performed by the ultrasonic inspection device 20. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0011] (About Ultrasound Inspection System 1) 1 is a block diagram showing an example of the configuration of an ultrasonic inspection system 1 according to an embodiment. The ultrasonic inspection system 1 includes a display device 10, an ultrasonic inspection device 20, and a conveyance device 30. The ultrasonic inspection system 1 inspects an object 40 to be inspected.

[0012] The display device 10 is connected to an ultrasonic inspection device 20. The display device 10 displays various information output from the ultrasonic inspection device 20. As the display device 10, for example, a liquid crystal display device can be used.

[0013] The ultrasonic inspection device 20 inspects the inspection object 40. The ultrasonic inspection device 20 irradiates ultrasonic waves to the inspection object 40 and receives the received waves that reach the receiving unit 280 after the irradiated ultrasonic waves pass through the inspection object 40. The ultrasonic inspection device 20 inspects the inspection object 40 based on the intensity of the received waves. The ultrasonic inspection device 20 displays the inspection results, such as the intensity of the irradiated ultrasonic waves, the intensity of the received waves, and information indicating whether the inspection object 40 meets the inspection criteria, on the display device 10.

[0014] The conveying device 30 conveys the inspection object 40. In the example shown in this figure, the conveying device 30 is a belt conveyor. The conveying device 30 includes rollers 31 (rollers 31a and 31b) and a belt 32, and conveys the inspection object 40 placed on the belt 32 by rotating the rollers 31. The conveying device 30 rotates the rollers 31 under the control of the ultrasonic inspection device 20, and conveys the inspection object 40 to a position where ultrasonic waves from the ultrasonic inspection device 20 are irradiated to a predetermined area of ​​the inspection object 40.

[0015] The inspection object 40 is an object to be inspected by the ultrasonic inspection device 20. The inspection object 40 is a packaging container in which the entire periphery of the first sheet member 40a and the entire periphery of the second sheet member 40b are joined (sealed) to each other, and which has a space for accommodating contents on the inner periphery side. Both the first sheet member 40a and the second sheet member 40b are flexible. The inspection target area of ​​the inspection object 40 that is the subject of inspection is the joint. The joint is a place where two sheets (the first sheet member 40a and the second sheet member 40b) that make up the packaging container should be joined. For example, the peripheral portion 41, which is an area covering the entire periphery of the inspection object 40, is the joint and the inspection target area.

[0016] Here, specific examples of the inspection items inspected by the ultrasonic inspection device 20 will be described. The first example is whether or not there is peeling in the peripheral portion 41. The second example is whether or not there is a hole or a scratch in the peripheral portion 41. The third example is whether or not the peripheral portion 41 is joined without any foreign object being sandwiched. Each of these inspection items can be determined according to the intensity of the received wave. For example, in the first example, the intensity of the received wave differs between the case where there is peeling in the peripheral portion 41 and the case where there is no peeling. In the second example, the intensity of the received wave differs between the case where there is a hole or a scratch in the peripheral portion 41 and the case where there is no hole or a scratch. In the third example, the intensity of the received wave differs between the case where the peripheral portion 41 is joined without any foreign object being sandwiched and the case where there is no foreign object being sandwiched. Inspection is performed based on such a difference in the intensity of the received wave.

[0017] (Regarding ultrasonic inspection device 20) As shown in FIG. 1, the ultrasonic inspection device 20 includes, for example, an operation unit 210, a control unit 220, a signal control unit 230, a transmitting unit 260, and a receiving unit 280.

[0018] The ultrasonic inspection device 20 includes at least a computer. This computer includes a processor such as a CPU (Central Processing Unit) and a program memory that stores a program executed by the processor. In the ultrasonic inspection device 20, each functional unit (operation unit 210, control unit 220, signal control unit 230, transmission unit 260, and reception unit 280) is realized by a processor such as a CPU executing a program stored in the program memory. In addition, some or all of these functional units may be realized by hardware such as an LSI (Large Scale Integration), an ASIC (Application Specific Integrated Circuit), or an FPGA (Field-Programmable Gate Array).

[0019] The operation unit 210 can be configured with a keyboard, a mouse, etc. The operation unit 210 accepts input operations of various information related to ultrasonic examinations in response to user operations. The operation unit 210 supplies the control unit 220 with various information in response to the input operations.

[0020] The control unit 220 controls each unit of the ultrasonic inspection device 20. The control unit 220 outputs, for example, various information input from the operation unit 210, measurement values ​​obtained from a signal control unit 230 described later, and inspection results determined by a determination unit 223 to the display device 10.

[0021] Furthermore, the control unit 220 controls the position of the inspection object 40 by controlling the transport device 30, so that ultrasonic waves are irradiated onto a predetermined inspection target area of ​​the inspection object 40. In this embodiment, the inspection target area may be at least a part of the peripheral portion 41 of the inspection object 40.

[0022] The signal control unit 230 controls the ultrasonic waves irradiated to the inspection object 40. For example, the signal control unit 230 controls the timing and time period of irradiation so that the ultrasonic waves irradiated to the inspection object 40 become burst waves that are irradiated for a set period of time. The transmitting unit 260 transmits (radiates) a burst wave (ultrasound wave) according to the control from the signal control unit 230.

[0023] The receiving unit 280 receives ultrasonic waves transmitted by the transmitting unit 260. When an inspection target 40 is present between the transmitting unit 260 and the receiving unit 280, the receiving unit 280 receives the received waves that have reached the receiving unit 280 by passing through the inspection target 40 or the like. The receiving unit 280 outputs the received ultrasonic waves to the signal control unit 230. The receiving unit 280 may include an A / D conversion unit. In this case, the receiving unit 280 outputs a digital signal corresponding to the received ultrasonic waves to the signal control unit 230. The signal control unit 230 outputs a signal that has been subjected to necessary processing, such as processing to remove noise from the received ultrasonic waves, to the control unit 220.

[0024] (Regarding the positional relationship between the ultrasonic inspection device 20 and the inspection object 40) Here, the positional relationship between the transmitting section 260, the receiving section 280, and the inspection object 40 will be described with reference to FIG.

[0025] 2, the transmitting unit 260 and the receiving unit 280 are arranged at an interval in one direction (Z-axis direction). The transmitting unit 260 and the receiving unit 280 are fixed to a base unit (not shown) in the ultrasonic inspection device 20. This maintains the interval between the transmitting unit 260 and the receiving unit 280. The transmitting unit 260 transmits ultrasonic waves from a transmitting surface 261 facing the receiving unit 280 toward the receiving unit 280. The receiving unit 280 receives the ultrasonic waves transmitted from the transmitting unit 260 at a receiving surface 281 facing the transmitting unit 260.

[0026] 2, the conveying direction of the inspection object 40 by the conveying device 30 is the X-axis direction. The conveying direction (X-axis direction) is perpendicular to the arrangement direction (Z-axis direction) of the transmitting units 260 and the receiving units 280. An end portion 411 of the inspection object 40 is an edge of the inspection object 40 that extends linearly when viewed from the Z-axis direction. A boundary line 420 of the inspection object 40 indicates the boundary line between the joined and non-joined parts. This boundary line 420 is a line that follows the edge of the inspection object 40.

[0027] The inspection object 40 is placed between the transmitting unit 260 and the receiving unit 280. The ultrasonic waves transmitted by the transmitting unit 260 reach the inspection object 40, and the ultrasonic waves (received waves) that have passed through the inspection object 40 reach and are received by the receiving unit 280. The ultrasonic waves transmitted from the transmitting unit 260 are focused at a predetermined position. The area where the ultrasonic waves are focused is area S1. The inspection object 40 is transported on the XY plane that passes through area S1.

[0028] Fig. 3 is a diagram showing an example of an inspection target area in an embodiment. Fig. 3 shows an example of the appearance of an inspection target 40 in a bird's-eye view. In the example of Fig. 3, the inspection target 40 is a packaging container. The packaging container is placed on an XY plane. The packaging container can contain a beverage or liquid food. A drinking spout 42 with a lid 43 attached is provided at the left end of a peripheral portion 41 of the packaging container in Fig. 3.

[0029] 3, an inspection target area 44 shows an example of an area to be inspected in the inspection target 40. For example, the inspection target area 44 is an area formed along the peripheral portion 41 of the inspection target 40, and is an area that is a distance d11 away from the edge portion 411 and a distance d12 away from the boundary line 420. The distances d11 and d12 are determined according to the inspection purpose and inspection items.

[0030] The inspection object 40 is transported by the transport device 30, and moves in the X-axis direction relative to the ultrasonic inspection device 20. Then, ultrasonic waves are irradiated to the peripheral portion 41 along the inspection direction (direction along the X-axis). The receiving unit 280 receives the ultrasonic waves. Based on the received signals, it is possible to inspect each position of the peripheral portion 41 along the inspection direction.

[0031] Furthermore, in the ultrasonic inspection device 20, a sensor portion consisting of a pair of a transmitting unit 260 and a receiving unit 280 may be configured as an array sensor in which a plurality of sensors are arranged along a direction (Y-axis direction) perpendicular to the inspection direction (X-axis direction). By using an array sensor, it is possible to inspect a wider range at once in the Y-axis direction perpendicular to the transport direction for the inspection object 40 transported to a certain position.

[0032] (Regarding ultrasonic inspection device 20) Returning to FIG. 1, the control unit 220 includes a storage unit 221, an acquisition unit 222, a determination unit 223, and a calculation unit 224.

[0033] The storage unit 221 is configured by a storage medium, for example, a hard disk drive (HDD), a flash memory, an electrically erasable programmable read only memory (EEPROM), a random access read / write memory (RAM), a read only memory (ROM), or any combination of these storage media. The storage unit 221 can use, for example, a non-volatile memory.

[0034] The memory unit 221 stores, for example, reference data and averaged data. The reference data is a measurement value of a reference work. The reference work is an object of the inspection object 40 that has been confirmed to satisfy the inspection standard. The measurement value is a measurement value measured during inspection, and is, for example, data in which the intensity of the received wave is associated with each inspection point on the inspection object 40. The averaged data is data obtained by averaging multiple reference data.

[0035] The storage unit 221 may also store information other than the reference data and the averaged data. The storage unit 221 may store, for example, measurement data that is a measurement value of an inspection work. The storage unit 221 may also store parameters for calculating a judgment value, for example, variables indicating a range of data that is acceptable for a passing product when determining pass / fail. The judgment value is a value used in determining whether or not an inspection standard is met in the inspection of this embodiment. The storage unit 221 may also store a judgment result of the inspection work, that is, information indicating whether or not the inspection standard is met.

[0036] The acquisition unit 222 acquires various information. For example, the acquisition unit 222 acquires a measurement value via the signal control unit 230. When the acquired measurement value is a measurement value of a reference work, the acquisition unit 222 stores the measurement value as reference data in the storage unit 221. When the acquired measurement value is a measurement value of an inspection work, the acquisition unit 222 outputs the measurement value to the calculation unit 224 as measurement data.

[0037] The acquiring unit 222 may be configured to acquire variables used in various processes via the operation unit 210. The variables here are, for example, parameters for calculating a judgment value. The acquiring unit 222 stores the acquired variables in the storage unit 221.

[0038] The judgment unit 223 judges whether the inspection work satisfies the inspection criteria using a judgment value. The inspection work is an object to be inspected among the objects to be inspected 40. The judgment unit 223 judges whether the inspection work passes or fails by comparing the degree of deviation between the measurement data of the inspection work and the averaged data with the judgment value. For example, when the measurement data of the inspection work is almost equal to the averaged data and there is no deviation, the judgment unit 223 judges that the inspection work satisfies the inspection criteria. On the other hand, when, for example, the measurement data of the inspection work deviates from the averaged data and the degree of deviation exceeds the judgment value, the judgment unit 223 judges that the inspection work does not satisfy the inspection criteria.

[0039] Here, the inspection object of this embodiment has a plurality of measurement positions, and measurement data corresponding to each of the plurality of measurement positions is measured.

[0040] Fig. 4 is a diagram showing an example of measurement values ​​in the inspection target area 44 shown in Fig. 3. The horizontal axis of Fig. 4 indicates the x coordinate, and the vertical axis indicates the y coordinate. Here, a case where the y coordinate in Fig. 4 is set along the Y axis direction in Fig. 2 and the x coordinate in Fig. 4 is set along the X axis direction in Fig. 2 is taken as an example for explanation, but is not limited to this. The x axis direction in Fig. 4 may or may not coincide with the inspection direction (the X axis direction in Fig. 2).

[0041] As shown in the example of FIG. 4, for example, the measurement values ​​are represented by a two-dimensional array, and the measurement values ​​are associated with the measurement positions represented by each of the two-dimensional coordinates. For example, the measurement value (0.21) is associated with the measurement position represented by the two-dimensional coordinates (x1, y1). The measurement value (0.19) is associated with the measurement position represented by the two-dimensional coordinates (x2, y2). The measurement value (0.23) is associated with the measurement position represented by the two-dimensional coordinates (xn, yn). Here, n is an arbitrary natural number. Note that, in the example of this figure, the number of elements in the x-axis direction and the number of elements in the y-axis direction are the same, but this is not limited to this. Of course, the number of elements in the x-axis direction and the number of elements in the y-axis direction may be different. Note that an array sensor may be used in which a plurality of sensor parts each consisting of a pair of a transmitting unit 260 and a receiving unit 280 are arranged along the sensor arrangement direction (Y-axis direction). In this case, the array sensor may measure two-dimensional coordinate values ​​as shown in FIG. 4 by relatively moving the inspection target area 44 along the X-axis direction.

[0042] The two-dimensional coordinates (x1, y1) may be a position calculated based on the measurement timing of measuring the inspection target 40. In this case, for example, it is assumed that the position coordinates of the start position where the measurement is started are determined in advance, and the speed at which the inspection target 40 is transported during the measurement is constant. Then, the two-dimensional coordinates corresponding to the measurement position can be calculated based on the timing at which the measurement is started, the start position, the transport speed, and the time elapsed since the measurement was started.

[0043] FIG. 5 is a diagram showing an example in which the averaged data and the measured data in the inspection target area 44 shown in FIG. 3 are expressed in the form of a map.

[0044] The vertical axis of Fig. 5 indicates the y coordinate of the measurement position, and the horizontal axis indicates the x coordinate of the measurement position. Here, the horizontal axis of Fig. 5 is described as coinciding with the inspection direction (X-axis direction in Fig. 2) and the vertical axis of Fig. 5 is described as coinciding with the Y-axis direction in Fig. 2), but this is not limiting. The horizontal axis of Fig. 5 may or may not coincide with the inspection direction (X-axis direction in Fig. 2).

[0045] When the horizontal axis of FIG. 5 coincides with the inspection direction (the X-axis direction in FIG. 2), the left end of the inspection target area 44 in FIG. 3 corresponds to the x-coordinate (K0) in FIG. 5, and the right end in FIG. 3 corresponds to the x-coordinate (K3) in FIG. 5.

[0046] FIG. 5 shows maps MA to MC in which the measurement values ​​(strength of received waves) corresponding to each measurement position (x, y) are expressed by shading. Map MA shows an example of averaged data for a reference work. Map MB shows an example of measurement data for an inspection work that has no defects. Map MC shows an example of measurement data for an inspection work that has defects in the areas corresponding to x-coordinates (K1) and (K2).

[0047] As shown in map MA, in a reference work that meets the inspection criteria, the measurement value has a tendency to change depending on the measurement position (bias depending on the measurement position). In this case, the measurement value is not constant regardless of the measurement position. Such bias is thought to occur due to various factors such as the shape of the inspection object 40, the joining (sealing) conditions, the measurement (scanning) conditions, the position set when the inspection object 40 is transported to the ultrasonic inspection device 20, and the distortion of the shape in the measurement area.

[0048] In this embodiment, even if the inspection target 40 is a reference workpiece that does not have a defect that satisfies the inspection criteria, the measurement value has a bias according to the measurement position. In this way, when the measurement value (not a uniform value) has a bias according to the measurement position, it becomes difficult for the determination unit 223 to determine whether or not the inspection criteria are satisfied using a uniform threshold value.

[0049] For example, as shown in the example of map MA, the bias in the measurement value according to the measurement position is assumed to be large in the center of the inspection target area 44, for example, near the x-coordinate (K2), and small in the end of the inspection target area 44, for example, near the x-coordinate (K1) and near the x-coordinate (K3). In this case, it is considered that the bias according to the measurement position equivalent to that of map MA is measured in maps MB and MC. In order to determine whether the inspection work corresponding to maps MB and MC meets the inspection standard, multiple thresholds, for example, a first threshold and a second threshold, must be used according to the measurement position. The first threshold is a threshold applied to the measurement position located in the center of the inspection target area 44, and has a relatively large value. The second threshold is a threshold applied to the measurement position located at the end of the inspection target area 44, and has a relatively small value. In this way, when there is a bias in the measurement value according to the measurement position, multiple thresholds must be used according to the measurement position, which causes a problem of complicated processing.

[0050] To deal with this problem, in this embodiment, even if the measurement value is biased according to the measurement position, a constant value (judgment value) that is independent of the measurement position is used to judge pass / fail. Specifically, data (judgment data) that eliminates the bias is generated from the measurement data. It becomes possible to judge pass / fail by comparing the judgment value with the judgment data that eliminates the bias according to the measurement position.

[0051] Fig. 6 is a diagram showing an example of judgment data in the embodiment in the inspection target area 44 shown in Fig. 3. In the map of Fig. 6, similar to Fig. 5, the value of the judgment data at the measurement position (x, y) is expressed by shading.

[0052] The judgment unit 223 uses the property that the averaged data and the measurement data of the inspection work have the same tendency of bias depending on the measurement position to generate judgment data that eliminates the bias depending on the measurement position in the measurement data of the inspection work. For example, the judgment unit 223 determines the magnitude of the difference between the measurement data and the averaged data of the inspection work for each measurement position as the judgment data at that measurement position. Alternatively, for example, the judgment unit 223 determines the magnitude of the ratio between the measurement data and the averaged data of the inspection work for each measurement position, for example, the value obtained by dividing the measurement data by the averaged data, as the judgment data at that measurement position. Here, the magnitude of the difference between the measurement data and the averaged data, or the magnitude of the ratio between the measurement data and the averaged data is an example of the "degree of deviation between the measurement data and the averaged data".

[0053] An example of the judgment data calculated using the difference is shown in Fig. 6. The upper part of Fig. 6 shows an example of a map (MB-MA) in which, for each measurement position, a difference value obtained by subtracting the measurement data in map MA from the measurement data in map MB is mapped as the judgment data. The lower part of Fig. 6 shows an example of a map (MC-MA) in which, for each measurement position, a difference value obtained by subtracting the measurement data in map MA from the measurement data in map MC is mapped as the judgment data.

[0054] As shown in FIG. 5, maps MA and MB have the same tendency of bias according to the measurement position. Moreover, map MB shows measurement data of an inspection workpiece having no defects. In this case, as shown in FIG. 6, in map (MB-MA), the bias according to the measurement position is eliminated, and since maps MA and MB do not have a large deviation between the measurement values ​​corresponding to the same measurement position, map (MB-MA) has almost uniform values ​​at all measurement positions. In other words, map (MB-MA) is a map in which the entire inspection target area 44 is shown with a density corresponding to a constant value.

[0055] On the other hand, as shown in Fig. 5, maps MA and MC have the same tendency of bias according to the measurement position, but map MC has defective parts. In this case, as shown in Fig. 6, in map (MC-MA), the bias according to the measurement position is eliminated and the values ​​are almost uniform, but in the area corresponding to x-coordinates (K1) and (K2), there are areas where the measurement values ​​corresponding to the same measurement position in maps MC and MA deviate from each other, and therefore a value different from that of the surrounding defect-free areas is shown. In other words, map (MC-MA) is a map in which only the areas having defects in inspection target area 44 are shown with a different density from other defect-free areas.

[0056] In this manner, in this embodiment, judgment data is generated from the measurement data, eliminating bias according to the measurement position. This makes it possible to easily judge pass / fail by comparing the judgment data with a constant judgment value that is independent of the measurement position.

[0057] The map corresponding to the judgment data is not limited to the example of FIG. 6. Instead of the map (MB-MA), a map (MA-MB) obtained by subtracting the map MB from the map MA may be used. Instead of the map (MC-MA), a map (MA-MC) obtained by subtracting the map MC from the map MA may be used. Instead of the map (MB-MA), a map (MB / MA) indicating the ratio of the map MB to the map MA, or a map (MA / MB) indicating the ratio of the map MA to the map MB may be used. Instead of the map (MC-MA), a map (MC / MA) indicating the ratio of the map MC to the map MA, or a map (MA / MC) indicating the ratio of the map MA to the map MC may be used. In any case, only the portions having defects in the inspection target area 44 are shown in a different density from other defect-free areas.

[0058] The calculation unit 224 calculates the averaged data. Any method may be adopted for calculating the averaged data. For example, the determination unit 223 refers to the storage unit 221 to acquire a plurality of reference data. The calculation unit 224 performs statistical processing on the acquired plurality of reference data to calculate an average value of the reference data for each measurement position. Any method may be adopted for the calculation unit 224 to calculate the average value. For example, the calculation unit 224 calculates the average value using a simple arithmetic average.

[0059] Furthermore, the calculation unit 224 may calculate the averaged data using reference data measured before inspecting the inspection work, for example, immediately before the inspection of the inspection work. By using the reference data measured immediately before the inspection of the inspection work, the tendencies of elements that generate bias according to the measurement position, such as the shape of the inspection target 40, joining (sealing) conditions, measurement (scanning) conditions, the position set when the inspection target 40 is transported to the ultrasonic inspection device 20, and distortion of the shape in the measurement area, can be made closer to the tendency of the inspection work.

[0060] In addition, when calculating the averaged data using the reference data measured immediately before the inspection of the inspection work, the calculation unit 224 may calculate the averaged data using a weighted arithmetic average. For example, the weighting is increased as the reference data is measured immediately before the inspection of the inspection work. This makes it possible to generate averaged data that reflects a tendency of bias similar to that of the inspection work by using a reference work having a bias similar to that of the inspection work.

[0061] Furthermore, when there is little reference data to be used for calculating the averaged data, the calculation unit 224 may calculate the averaged data using data (similar data, described later) having a measurement value with a small difference from the average value of the reference data among a plurality of measured values ​​(referred to as original data). For example, the calculation unit 224 may extract similar data having a measurement value close to the average value of the reference data from the original data, and calculate the averaged data using the extracted similar data. For example, as a method of calculating the similar data, the calculation unit 224 calculates an evaluation value s for evaluating the similarity between the original data and the average value of the reference data. Then, the calculation unit 224 may perform weighting according to the calculated evaluation value s, and generate the averaged data by calculating the average value using the weighted arithmetic average. For example, the evaluation value s may be expressed by Equation (1) or Equation (2).

[0062]

number

[0063] FIG. 7 is a diagram showing another example of the inspection target area of ​​the embodiment, different from FIG. 3. FIG. 7 shows an example of the appearance of the same inspection target 40 as FIG. 3 in a bird's-eye view. In FIG. 7, the inspection target area 44 is an area that is a distance d2 away from the end 411 and formed linearly along the end 411. The distance d2 is determined according to the inspection purpose and the inspection item. The inspection target 40 is transported by the transport device 30 and moves relatively in the X-axis direction with respect to the ultrasonic inspection device 20, so that ultrasonic waves are irradiated along the inspection direction (direction along the X-axis) from the end of the inspection target area 44. The irradiated ultrasonic waves pass through the inspection target 40 and reach the receiving unit 280. The receiving unit 280 receives the ultrasonic waves, so that a measurement value according to the intensity of the received signal can be obtained.

[0064] 8 (FIGS. 8A to 8E) are diagrams showing the relationship between the measurement position and the measurement value in the inspection target area 44 shown in FIG. 7. The horizontal axis in FIG. 8 indicates the x-coordinate of the measurement position. The vertical axis in FIG. 8A to FIG. 8C indicates the measurement value (strength of the received wave). The vertical axis in FIG. 8D to FIG. 8E indicates the value of the judgment data. Here, the horizontal axis in FIG. 8 is described as coinciding with the inspection direction (X-axis direction in FIG. 2), but is not limited to this. The horizontal axis in FIG. 8 may or may not coincide with the inspection direction (X-axis direction in FIG. 2). When the horizontal axis in FIG. 8 coincides with the inspection direction (X-axis direction in FIG. 2), the left end of the inspection target area 44 in FIG. 7 corresponds to the x-coordinate (K0) in FIG. 8, and the right end in FIG. 7 corresponds to the x-coordinate (K3) in FIG. 8.

[0065] Fig. 8A shows an example of averaged data Da in the inspection target area shown in Fig. 7. As shown in the example of this figure, the averaged data Da has a bias according to the measurement position. In the example of this figure, the averaged data Da tends to have small measurement values ​​at the ends of the inspection target area 44, for example, near the x-coordinate (K0) and near the x-coordinate (K3), and tends to have large measurement values ​​in the center.

[0066] 8B shows an example of measurement data Db of an inspection workpiece having no defects among the measurement values ​​in the inspection target area shown in FIG. 7. As shown in the example of this figure, the measurement data Db has a bias according to the measurement position, similar to the averaged data Da. Moreover, the biases of the measurement data Db and the averaged data Da have a similar tendency.

[0067] Fig. 8C shows an example of measurement data Dc of an inspection workpiece having a defective portion among the measurement values ​​in the inspection target area shown in Fig. 7. Specifically, the measurement value is small in the area corresponding to x-coordinates (K1) and (K2), and the area corresponding to the x-coordinates (K1) and (K2) has a defect.

[0068] In the example of FIG. 8C, the pass / fail judgment is performed on the measurement data Dc using a uniform threshold value th1 that does not depend on the measurement position. In this case, the measurement value is below the threshold value th1 in the areas corresponding to the x coordinates (K1) and (K2), and it can be judged that there is a defect in these areas. However, due to bias in the measurement data, the measurement value may be below the threshold value th1 in areas where the measurement value tends to be small even if there is no defect, for example, in areas corresponding to the vicinity of the x coordinates (K0) or (K3), and it may be erroneously judged that there is a defect. On the other hand, in the example of FIG. 8C, the pass / fail judgment is performed on the measurement data Dc using a uniform threshold value th2 that is smaller than the threshold value th1 and does not depend on the measurement position. In this case, it is possible to avoid a situation where the measurement value exceeds the threshold value th2 in the area corresponding to the vicinity of the x coordinates (K0) or (K3), and it is erroneously judged that there is a defect. Also, the measurement value is below the threshold value th2 in the area corresponding to the x coordinate (K1), and it can be judged that there is a defect in this area. However, the measurement value in the region corresponding to the x-coordinate (K2) exceeds the threshold value th2, and this region may be erroneously determined to have no defect. In order to avoid such an erroneous determination, it is possible to use multiple threshold values ​​according to the bias of the measurement data. For example, it is possible to apply a relatively large threshold value th1 to the center of the inspection target region 44, and to use a relatively small threshold value th2 near the x-coordinate (K0) and near the x-coordinate (K3) at the edge. However, if multiple threshold values ​​are used depending on the measurement position, the processing becomes complicated.

[0069] To address this issue, in this embodiment, judgment data is generated from the measurement data to eliminate this bias.

[0070] Fig. 8D shows an example of judgment data (Db-Da) obtained by subtracting the averaged data Da shown in Fig. 8A from the measured data Db shown in Fig. 8B. The measured data Db has a bias similar to that of the averaged data Da, and does not contain any defective parts, so the judgment data (Db-Da) is a constant value regardless of the measurement position.

[0071] The judgment unit 223 sets a constant value that eliminates bias due to the position of the averaged data Da, for example, a value obtained by subtracting the averaged data Da from the averaged data Da (constant value 0 (zero)), and changing the value by only the range of data acceptable for an acceptable product, as a uniform judgment value H1 that is independent of the measurement position.

[0072] The judgment unit 223 performs pass / fail judgment on the judgment data (Db-Da) using a uniform judgment value H1 that is independent of the measurement position. As shown in the example of this figure, the result is that the value corresponding to any measurement position in the judgment data (Db-Da) exceeds the judgment value H1. Therefore, the judgment unit 223 can judge from the judgment data (Db-Da) that there is no measurement position that has a defect in the measurement data Db, and can make a correct pass / fail judgment.

[0073] Fig. 8E shows an example of judgment data (Dc-Da) obtained by subtracting the averaged data Da shown in Fig. 8A from the measured data Dc shown in Fig. 8C. The measured data Dc has a bias similar to that of the averaged data Da, and is data that includes a defective portion. Therefore, the judgment data (Dc-Da) is a constant value regardless of the measurement position when there is no defect, but shows a value that deviates from the averaged data in the defective area corresponding to the x-coordinates (K1) and (K2).

[0074] The judgment unit 223 performs pass / fail judgment on the judgment data (Dc-Da) using a uniform judgment value H1 that is independent of the measurement position. As shown in the example of this figure, only the areas having defects in the judgment data (Dc-Da) are below the judgment value H1, and other areas that are not defective are above the judgment value H1. Therefore, the judgment unit 223 can use the judgment data (Dc-Da) to judge that there is a measurement position having a defect in the measurement data Dc, and can correctly judge the part having a defect. Note that in the embodiment, the judgment value H1 can be set arbitrarily. For example, a value that can correctly judge an inspection work having a defect that should be rejected as a failure can be set as the judgment value H1.

[0075] Here, the flow of processing performed by the ultrasonic inspection device 20 will be described with reference to Fig. 9 and Fig. 10. Fig. 9 and Fig. 10 are flowcharts showing the flow of processing performed by the ultrasonic inspection device 20.

[0076] FIG. 9 shows a process flow for calculating the averaged data. First, the inspection target 40 as a reference work is transported by the transport device 30 or the like (step S101), and an inspection target area is set in an area S1 (see FIG. 2) in the ultrasonic inspection device 20 between the transmitting unit 260 and the receiving unit 280. The ultrasonic inspection device 20 acquires reference data (step S102). The ultrasonic inspection device 20 irradiates ultrasonic waves from the transmitting unit 260, and receives the reception waves that arrive at the receiving unit 280 by irradiating the ultrasonic waves, by the receiving unit 280. In this way, the ultrasonic inspection device 20 acquires reference data. The ultrasonic inspection device 20 stores the reference data in the storage unit 221 (step S103). Note that the same reference work may be inspected multiple times repeatedly to acquire multiple reference data from the same reference work, or multiple reference data may be acquired by inspecting each of different reference works once and acquiring reference data corresponding to each reference work.

[0077] Next, the ultrasonic inspection device 20 calculates averaged data (step S104). For example, the ultrasonic inspection device 20 calculates an average value in the reference data for each measurement position using the calculation unit 224, and calculates the averaged data by associating the calculated average value with the measurement position. The ultrasonic inspection device 20 stores the averaged data in the storage unit 221 (step S105).

[0078] FIG. 10 shows a process flow for determining whether an inspection work passes or fails. First, an inspection target 40 as an inspection work is transported by the transport device 30 or the like (step S201), and an inspection target area is set in an area S1 (see FIG. 2) in the ultrasonic inspection device 20 between the transmitting unit 260 and the receiving unit 280. The ultrasonic inspection device 20 acquires measurement data (step S202). The ultrasonic inspection device 20 irradiates ultrasonic waves from the transmitting unit 260, and receives the reception waves that arrive at the receiving unit 280 as a result of the ultrasonic irradiation, by the receiving unit 280. In this way, the ultrasonic inspection device 20 acquires measurement data on the inspection work. The ultrasonic inspection device 20 stores the acquired measurement data in the memory unit 221 (step S203).

[0079] Next, the ultrasonic inspection device 20 calculates judgment data (step S204). For example, the ultrasonic inspection device 20 calculates judgment data by subtracting the averaged data from the measurement data for each measurement position using the judgment unit 223 and associating the subtracted value with the measurement position.

[0080] Next, the ultrasonic inspection device 20 calculates a judgment value (step S205). For example, the ultrasonic inspection device 20 refers to the storage unit 221 and acquires a variable indicating the range of data acceptable for a pass product. The ultrasonic inspection device 20 calculates a judgment value by subtracting or adding an allowable value corresponding to the acceptable range of data from a certain value that eliminates bias due to the position of the averaged data. Note that the judgment value may be calculated at the time the averaged data is calculated in step S104 of FIG. 9. In that case, step S205 is omitted.

[0081] Next, the ultrasonic inspection device 20 judges whether or not the measurement value satisfies the inspection standard for each measurement position. The ultrasonic inspection device 20 sets the measurement position for judging pass / fail (step S206). The ultrasonic inspection device 20 acquires judgment data corresponding to the set measurement position (step S207), and judges whether or not the value of the acquired judgment data is equal to or greater than the judgment value calculated in step S205 (step S208). If the value of the judgment data is equal to or greater than the judgment value, the ultrasonic inspection device 20 judges that the inspection standard is satisfied, that is, that the inspection has been passed (step S209). On the other hand, if the value of the judgment data is less than the judgment value, the ultrasonic inspection device 20 judges that the inspection standard is not satisfied, that is, that the inspection has been failed (step S210). The ultrasonic inspection device 20 associates the judgment result with the inspection work and the measurement position on the inspection work, and stores the judgment result in the storage unit 221 (step S211). The ultrasonic inspection device 20 judges whether or not there is still a measurement position for which pass / fail has not been judged (step S212). If there are still measurement positions for which the pass / fail determination has not been made, the ultrasonic inspection device 20 returns to step S206 and performs the process of determining pass / fail. On the other hand, if the pass / fail determination has been made for all measurement positions, the ultrasonic inspection device 20 ends the process.

[0082] Here, in the above-described embodiment, the case where there are multiple measurement positions has been described as an example, but the present invention is not limited to this. It is also applicable to a case where there is one measurement position on the inspection target 40.

[0083] For example, let us say that 5.0 is set as the reference value for measurement position K4 based on the measurement value when an inspection workpiece that meets the inspection criteria is measured in a normal state at one measurement position K4. Let us also say that 2.0 is set as the acceptable range for passing the inspection. In this case, if the measurement value is 3.0 (=5.0-2.0) or more, it is considered to pass, and if a measurement value below 3.0, for example a measurement value of 2.9, is measured, it is considered to fail. Note that here, the acceptable range is set to the range below the reference value, but depending on the inspection system, the acceptable range may be set to the range above the reference value.

[0084] However, there may be cases where the measured values ​​tend to tend to decrease overall due to some reason. For example, the ultrasonic transmission output may temporarily decrease, or the inspection target area may change in a direction other than the transport direction during the process of transporting the inspection target 40, causing the intensity of the received wave to temporarily decrease.

[0085] For example, assume that the measurement values ​​corresponding to the measurement position K4 for three reference works are (4.8, 4.6, and 4.7). In this case, all of the reference works meet the inspection criteria, but are below the median value of 5.0 set as the reference value. When an inspection work is measured in a measurement system with such a tendency, it is highly likely that the measurement values ​​will show a similar tendency to the reference data and will generally fall below the reference value. Despite this tendency for the measurement values ​​to fall below the reference value, if the pass / fail judgment is made based on the absolute reference value (5.0) without taking this tendency into consideration, the accuracy of the inspection may be reduced.

[0086] Therefore, in this embodiment, the degree of deviation between the measurement data and the averaged data is compared with a threshold value. In other words, the standard value can be adjusted based on the tendency of the reference data. Specifically, when the measurement values ​​tend to be generally downward as described above, the standard value can be adjusted from 5.0 to a downwardly-slanted 4.7 (a value obtained by simply averaging three reference data). This is more suitable for the actual situation. In this case, the pass / fail can be determined based on the adjusted standard value of 4.7 and the allowable range of 2.0. Therefore, if the measurement value is 2.7 (=4.7-2.0) or more, it is passed.

[0087] As described above, the ultrasonic inspection device 20 in the embodiment executes the following judgment method. The judgment method is a judgment method performed by a computer that is the ultrasonic inspection device 20. The judgment method is a judgment method for judging whether or not an inspection object satisfies an inspection criterion. In the judgment method, the acquisition unit 222 acquires reference data, which is a measurement value obtained by measuring a reference work, which is an inspection object that satisfies the inspection criterion. The calculation unit 224 calculates averaged data by performing statistical processing on the reference data. The judgment unit 223 judges whether the inspection work passes or fails by comparing the degree of deviation between the measurement data, which is a measurement value obtained by measuring an inspection work, which is an inspection object of the inspection target, and the averaged data with a judgment value.

[0088] As a result, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, if the measurement data of the inspection work shows a value that does not deviate significantly from the averaged data, it can be judged as pass, and if it deviates significantly from the averaged data, it can be judged as fail. Since pass / fail can be judged by comparing with the averaged data and the tendency of the measurement system can be taken into consideration, it is possible to improve the accuracy of the inspection. Moreover, even if various tendencies are shown depending on the measurement system, it is not necessary to use different threshold values ​​for each measurement system. Therefore, it is possible to accurately judge whether the inspection object meets the inspection standard without complicating the processing.

[0089] As described above, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, the object 40 has a plurality of measurement positions. The acquisition unit 222 acquires reference data corresponding to each of the measurement positions. The calculation unit 224 calculates the averaged data corresponding to each of the measurement positions. The judgment unit 223 judges the pass / fail of the inspection work by comparing the degree of deviation between the measurement data measured at a specific position among the measurement positions in the inspection work and the averaged data corresponding to the specific position with the judgment value. As a result, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, pass / fail judgment can be made based on the degree of deviation between the measurement data and the averaged data for each measurement position. Therefore, it is possible to take into account the case where the measurement value has a tendency to vary depending on the measurement system and the measurement position. Therefore, it is possible to improve the accuracy of the inspection. Moreover, even if various tendencies are shown depending on the measurement system and the measurement position, it is not necessary to use different threshold values ​​for each measurement system and each measurement position. Therefore, it is possible to accurately judge whether the object to be inspected meets the inspection standard without complicating the processing.

[0090] As described above, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, the averaged data and the measurement data have a bias that changes depending on the measurement position. The judgment unit 223 calculates judgment data in which the bias in the measurement data is eliminated using the averaged data. The judgment unit 223 judges the pass / fail of the inspection work by comparing the judgment data with a uniform (same) judgment value regardless of the measurement position. As a result, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, pass / fail can be judged using only one judgment value. Therefore, even if the measurement value has a tendency to vary depending on the measurement system and the measurement position, it is not necessary to use multiple threshold values ​​depending on the measurement system, the measurement position, etc. Therefore, it is possible to perform the inspection without complicating the processing.

[0091] As described above, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, the calculation unit 224 sets the measurement value that is close to the average value of the reference data among the measurement values ​​corresponding to a specific number of inspection objects 40 measured immediately before the inspection of the inspection work as the original data. The calculation unit 224 calculates an evaluation value s that is the degree of similarity between the average value of the reference data and the original data. The calculation unit 224 weights the original data using the calculated evaluation value s, and sets the average value of the weighted original data as the averaged data. As a result, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, the measurement values ​​corresponding to a specific number of inspection objects 40 measured immediately before the inspection of the inspection work can be used as the averaged data. Therefore, in the measurement system of the inspection work, the most recent tendency of inspecting the inspection work can be reflected in the averaged data.

[0092] As described above, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, the judgment unit 223 subtracts the averaged data corresponding to a measurement position from the measurement data corresponding to the measurement position, and sets the data obtained by subtracting the averaged data corresponding to the measurement position as judgment data corresponding to the measurement position. As a result, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, it is possible to calculate the judgment data by a simple method of subtraction, and it is possible to perform the inspection without complicating the processing.

[0093] As described above, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, the judgment unit 223 divides the measurement data corresponding to the measurement position by the averaged data corresponding to the measurement position, and sets the result as judgment data corresponding to the measurement position. As a result, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, the judgment data can be calculated by a simple method of division, and it is possible to perform the inspection without complicating the processing.

[0094] As described above, in the judgment method performed by the ultrasonic inspection device 20 in the embodiment, ultrasonic waves are irradiated to a measurement position of the inspection object 40, and the intensity of the received wave of the irradiated ultrasonic waves transmitted through the inspection object 40 is set as the measurement value of the measurement position. As a result, the judgment method performed by the ultrasonic inspection device 20 in the embodiment can be applied to pass / fail judgment using the measurement value measured using ultrasonic waves. Therefore, it is possible to take into account the irradiation intensity of ultrasonic waves and the tendency of the received wave according to the measurement system.

[0095] As described above, the ultrasonic inspection device 20 in the embodiment is a judgment device that judges whether or not the inspection object satisfies the inspection standard. The ultrasonic inspection device 20 includes an acquisition unit 222, a calculation unit 224, and a judgment unit 223. The acquisition unit 222 acquires reference data, which is a measurement value obtained by measuring a reference work, which is an inspection object that has passed the inspection. The calculation unit 224 calculates averaged data by performing statistical processing on the reference data. The judgment unit 223 judges whether or not the inspection work passes by comparing the degree of deviation between the measurement data, which is a measurement value obtained by measuring an inspection work, which is an inspection object of the inspection target, and the averaged data with a judgment value. As a result, the ultrasonic inspection device 20 in the embodiment can accurately judge whether or not the inspection object satisfies the inspection standard without complicating the processing.

[0096] The ultrasonic inspection system 1 and the ultrasonic inspection device 20 in the above-mentioned embodiment may be realized in whole or in part by a computer. In that case, a program for realizing this function may be recorded in a computer-readable recording medium, and the program recorded in the recording medium may be read into a computer system and executed to realize the function. The term "computer system" as used herein includes hardware such as an OS and peripheral devices. The term "computer-readable recording medium" refers to portable media such as flexible disks, optical magnetic disks, ROMs, and CD-ROMs, and storage devices such as hard disks built into a computer system. The term "computer-readable recording medium" may also include a medium that dynamically holds a program for a short period of time, such as a communication line when a program is transmitted via a network such as the Internet or a communication line such as a telephone line, and a medium that holds a program for a certain period of time, such as a volatile memory inside a computer system that is a server or client in that case. The above-mentioned program may be a program for realizing a part of the above-mentioned function, or may be a program that can realize the above-mentioned function in combination with a program already recorded in the computer system, or may be a program that is realized using a programmable logic device such as an FPGA.

[0097] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope of the invention and its equivalents described in the claims, as well as in the scope and spirit of the invention. [Explanation of symbols]

[0098] 1: ultrasonic inspection system, 20: ultrasonic inspection device (determination device), 220: control unit, 221: memory unit, 222: acquisition unit, 223: determination unit, 224: calculation unit, 260: transmission unit, 280: reception unit, 40: inspection object, 41: peripheral portion, 44: inspection object area

Claims

1. A method for determining whether an inspection object satisfies an inspection criterion by a computer, comprising: Acquire reference data which is a measurement value obtained by measuring a reference work which is an inspection object that satisfies the inspection criteria; Calculating average data by performing statistical processing on the reference data; The degree of deviation between the measurement data, which is a measurement value obtained by measuring the inspection workpiece that is the inspection target, and the averaged data is compared with a judgment value set according to the inspection standard to judge whether the inspection workpiece passes or fails. Judgment method.

2. There are multiple measurement positions on the inspection object, acquiring the reference data corresponding to each of the measurement positions; Calculating the averaged data corresponding to each of the measurement positions; The degree of deviation between the measurement data measured at a specific position among the measurement positions on the inspection workpiece and the averaged data corresponding to the specific position is compared with the judgment value to judge whether the inspection workpiece passes or fails. The method according to claim 1 .

3. the averaged data and the measurement data have a bias according to the measurement position, The bias in the measurement data is eliminated by using the averaged data to calculate judgment data, and the pass / fail of the inspection work is judged by comparing the judgment data with the judgment value that is the same regardless of the measurement position. The method according to claim 2 .

4. Measurement values ​​corresponding to a specific number of inspection objects measured immediately before the inspection of the inspection work are used as original data; calculating an evaluation value which is a degree of similarity between the average value of the reference data and the original data, weighting the original data using the calculated evaluation value, and setting the average value of the weighted original data as the averaged data; The method according to claim 1 .

5. data obtained by subtracting the averaged data corresponding to the measurement position from the measurement data corresponding to the measurement position, the data being set as the judgment data; The method according to claim 3.

6. the measurement data corresponding to the measurement position is divided by the averaged data corresponding to the measurement position, and the resultant data is used as the judgment data. The method according to claim 3.

7. an ultrasonic wave is irradiated to the measurement position of the inspection object, and the intensity of a received wave of the irradiated ultrasonic wave transmitted through the inspection object is set as a measurement value of the measurement position; The method according to claim 2 .

8. A determination device for determining whether an inspection object satisfies an inspection standard, An acquisition unit that acquires reference data that is a measurement value obtained by measuring a reference work that is an inspection object that satisfies the inspection standard; A calculation unit that calculates average data by performing statistical processing on the reference data; A judgment unit that judges whether the inspection work passes or fails by comparing the degree of deviation between the measurement data, which is a measurement value obtained by measuring the inspection work, which is the inspection target, and the averaged data, with a judgment value set according to the inspection standard; A determination device comprising:

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