Showerhead assembly and showerhead plate

Abstract

To provide a showerhead plate and a showerhead assembly that form a uniform gas flow.SOLUTION: In a reactor to process a substrate, a showerhead plate 215 included in a showerhead assembly has a plurality of through-holes 315 each having a conically shaped inlet and a conically shaped outlet. The through-holes include through-holes in a center region 300 having first dimensions, and through-holes in an outer region 305 having second dimensions different from the first dimensions.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates generally to showerhead assemblies and showerhead plates, and more particularly, to showerhead plates used in semiconductor manufacturing tools. [Background technology]

[0002] A showerhead assembly may be used during a deposition process to provide uniform gas flow over the wafer. However, due to the arrangement of through-holes in the showerhead plate and variations in the gas flow rate, non-uniformity across the wafer may occur. In particular, the central region of the wafer may vary in thickness relative to the outer edge of the wafer. Summary of the Invention

[0003] Various embodiments of the present technology can provide a showerhead assembly that includes a showerhead plate having a plurality of through-holes, each having a cone-shaped inlet and a cone-shaped outlet. The showerhead plate can include the through-holes in a central region having a first dimension and the through-holes in an outer region having a second dimension different from the first dimension.

[0004] According to one aspect, a showerhead plate includes a top surface and an opposing bottom surface, a central region located at a geometric center of the showerhead plate and having a diameter in a range of 10 mm to 60 mm, an outer region surrounding the central region and extending toward an outer edge of the showerhead plate, a plurality of first through holes located in the central region and extending from the top surface to the bottom surface, and a plurality of second through holes located in the outer region and extending from the top surface to the bottom surface, the second through holes being a different shape than the first through holes.

[0005] In one embodiment of the showerhead plate, each second through hole comprises a conical inlet having a first dimension at a top surface, a conical outlet having a first dimension at a bottom surface, and a linear channel connecting the inlet to the outlet.

[0006] In one embodiment of the showerhead plate, the linear channels have lengths ranging from 11 mm to 17 mm and diameters ranging from 0.5 mm to 1.5 mm, and the cone-shaped inlets and outlets have maximum diameters ranging from 8 mm to 9 mm.

[0007] In one embodiment of the showerhead plate, each first through hole comprises a first conically shaped inlet having a first dimension at a top surface, a second conically shaped outlet having a second dimension at a bottom surface, and a linear channel connecting the inlet to the outlet, where the first dimension is different from the second dimension.

[0008] In one embodiment of the showerhead plate, the linear channels have lengths in the range of 4 mm to 6 mm and diameters in the range of 0.5 mm to 1.5 mm, and the cone-shaped inlets and outlets have maximum diameters in the range of 8 mm to 9 mm.

[0009] In one embodiment of the showerhead plate, the linear channels have lengths ranging from 8 mm to 11 mm and diameters ranging from 0.5 mm to 1.5 mm, and the cone-shaped inlets and outlets have maximum diameters ranging from 8 mm to 9 mm.

[0010] In one embodiment of the showerhead plate, the linear channels have lengths in the range of 4 mm to 6 mm and diameters in the range of 0.5 mm to 1.5 mm, and the cone-shaped inlets and outlets have maximum diameters in the range of 8 mm to 9 mm.

[0011] In one embodiment of the showerhead plate, the linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, the cone-shaped inlet has a first maximum diameter and the outlet has a second maximum diameter, the second maximum diameter being larger than the first maximum diameter.

[0012] In one embodiment of the showerhead plate, the plurality of first holes has a number in the range of 18-20 first holes.

[0013] In one embodiment of the showerhead plate, the plurality of first holes has a number of first holes in the range of 28-32.

[0014] According to another aspect, a showerhead plate includes a top surface and an opposing bottom surface, a central region located at a geometric center of the showerhead plate, the central region having a diameter in a range of 10 mm to 60 mm, an outer region surrounding the central region and extending to an outer edge of the showerhead plate, and a plurality of first through holes located within the central region and extending from the top surface to the bottom surface, each first through hole having a first inlet at the top surface having a first conical shape and a first dimension and a second conical shape and a second dimension at the bottom surface. a first outlet having a first conical shape and a first linear channel connecting the first inlet to the first outlet, a plurality of first through holes having a first dimension different from the second dimension, a plurality of second through holes located in the outer region and extending from the top surface to the bottom surface, each second through hole at the top surface having a second inlet having a first conical shape and a first dimension, a second outlet at the bottom surface having the first conical shape and a first dimension, and a second linear channel connecting the second inlet to the second outlet.

[0015] In one embodiment of the showerhead plate, the second linear channel has a length in the range of 11 mm to 17 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the second inlet and second outlet each have a maximum diameter in the range of 8 mm to 9 mm.

[0016] In one embodiment of the showerhead plate, the first linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the first inlet and first outlet each have a maximum diameter in the range of 8 mm to 9 mm.

[0017] In one embodiment of the showerhead plate, the first linear channel has a length in the range of 8 mm to 11 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the first inlet and first outlet each have a maximum diameter in the range of 8 mm to 9 mm.

[0018] In one embodiment of the showerhead plate, the first linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the first inlet and first outlet have a maximum diameter in the range of 8 mm to 9 mm.

[0019] In one embodiment of the showerhead plate, the first linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, the cone-shaped inlet has a first maximum diameter and the outlet has a second maximum diameter, the second maximum diameter being greater than the first maximum diameter.

[0020] In one embodiment of the showerhead plate, the plurality of first holes has a number of first holes in the range of 18-32.

[0021] According to another aspect, a showerhead assembly includes a lid including a main inlet configured to couple to a gas source; and a plenum space in communication with the main inlet and at least partially defined by the lid and a showerhead plate, the showerhead plate having a top surface and an opposing bottom surface, a central region located at a geometric center of the showerhead plate, the central region having a diameter in a range of 10 mm to 60 mm, an outer region surrounding the central region and extending to an outer edge of the showerhead plate, and a plurality of first through holes located within the central region and extending from the top surface to the bottom surface, each first through hole having a cone-shaped first inlet and ... a plurality of first through holes having a conically shaped first outlet and a first linear channel connecting the inlet and the outlet; and a plurality of second through holes located in the outer region and extending from the top surface to the bottom surface, each second through hole having a conically shaped second inlet, a conically shaped second outlet, the conically shaped second outlet, the second inlet and second outlet having equal conical dimensions, and a second linear channel connecting the inlet and the outlet, the second through holes being a different shape than the first through holes, and the second linear channel having a length greater than a length of the first linear channel.

[0022] The plurality of first holes has a number in the range of 18-32 first holes.

[0023] The first linear channel has a length in the range of 4 mm to 12 mm, and the second linear channel has a length in the range of 12 mm to 20 mm.

[0024] According to yet another aspect, a showerhead assembly includes a lid including a main inlet configured to couple to a gas source; and a plenum space in communication with the main inlet and at least partially defined by the lid and the showerhead plate, the showerhead plate having a top surface and an opposing bottom surface, a central region located at a geometric center of the showerhead plate, the central region having a diameter in a range of 10 mm to 60 mm, an outer region surrounding the central region and extending to an outer edge of the showerhead plate, and an outer region located within the central region and extending from the top surface to the bottom surface. a plurality of first through holes extending to the surface, at least one hole from the plurality of first through holes having an angled channel extending from a first inlet at the top surface to a cone-shaped first outlet at the bottom surface; and a plurality of second through holes located in the outer region and extending from the top surface to the bottom surface, each of the second through holes comprising a cone-shaped second inlet and a cone-shaped second outlet, the second inlet and second outlet having equal conical dimensions, and a second linear channel connecting the inlet and outlet, the second through holes being a different shape than the first through holes. [Brief description of the drawings]

[0025] A more complete understanding of the present technology may be obtained by reference to the detailed description when considered in conjunction with the following illustrative drawings, in which like reference numbers refer to like elements and steps throughout.

[0026] [Figure 1] FIG. 1 is a block diagram of a system in accordance with various embodiments of the present technology. [Diagram 2]FIG. 2 representatively illustrates a system in accordance with various embodiments of the present technology. [Diagram 3] FIG. 1 illustrates a top view of a showerhead plate according to a system in accordance with various embodiments of the present technique. [Figure 4] FIG. 4 shows an isometric view of a portion of a showerhead plate in accordance with an embodiment of the present technique. [Diagram 5] FIG. 5 is a cross-sectional view showing a central region of a showerhead plate in accordance with various embodiments of the present technique. [Figure 6] FIG. 6 shows a cross-sectional view of a central region of a showerhead plate in accordance with an embodiment of the present technique. [Figure 7] FIG. 7 shows a cross-sectional view of a central region of a showerhead plate in accordance with an alternative embodiment of the present technique. [Figure 8] FIG. 8 shows a cross-sectional view of a central region of a showerhead plate in accordance with an alternative embodiment of the present technique. [Figure 9] FIG. 9 shows a top view of a central region of a showerhead plate in accordance with an alternative embodiment of the present technique. [Figure 10] FIG. 10 illustrates a cross-sectional view of a central region of a showerhead plate according to the embodiment of FIG. [Figure 11] FIG. 11 illustrates a cross-sectional view of a central region of a showerhead plate according to the embodiment of FIG. [Figure 12] FIG. 12 shows a bottom view of the showerhead plate according to the embodiment of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0027] The present technology may be described in terms of functional block components and various process steps. Such functional blocks may be realized by any number of components configured to perform the specified functions and to achieve various results. For example, the present technology may employ various reaction chambers, susceptors, valves, precursors, and delivery lines.

[0028] With reference to FIG. 1, the exemplary system 100 may include a reactor 105 configured to process a substrate (e.g., wafer 225, FIG. 2). For example, the reactor 105 may be configured to deposit a film on a wafer and perform etching. The system 100 may further include a source container 110 configured to contain or hold chemicals (e.g., precursors, or reactants) used in a semiconductor manufacturing process. The chemicals in the source container 110 may initially be in a solid, liquid, or gas phase. In the case of solid or liquid chemicals, the solid or liquid phase may be converted to a gas phase. For example, the system 110 may further include various devices and / or systems for converting the solid or liquid to a gas. The conversion to the gas phase may occur within the source container 110. Additionally, the system 100 may further include a gas line 120 for transporting a gas to the reactor 105. For example, the gas line 120 may be coupled to the source container 110 at a first end and to the reactor 105 at a second end. In various embodiments, the system 100 may further comprise a valve manifold 115 configured to provide mixing of multiple gas sources prior to entering the reactor 105. The valve manifold 115 may be directly coupled to the reactor 105 or may be coupled to a gas line 120 and may be configured to receive gas from a source vessel 110.

[0029] 2, the reactor 105 may include a reaction chamber 200 and a showerhead assembly 205. The reaction chamber 200 may include a susceptor 220 configured to support a wafer 225.

[0030] In various embodiments, the showerhead assembly 205 may be disposed above the reaction chamber 200. In an exemplary embodiment, the showerhead assembly 205 may comprise a lid 210 and a showerhead plate 215. The showerhead assembly 205 may further comprise a plenum volume 230 defined by the lid 210 and the showerhead plate 215. The lid 210 may comprise a main inlet configured to allow gas from the gas lines 120 or the valve manifold 115 to enter the plenum volume 230.

[0031] The showerhead plate 215 may be disposed above the susceptor 220 or the wafer 225 and may be configured to allow gases to pass therethrough and into the reaction chamber 200. For example, with reference to FIGS. 3 and 4, the showerhead assembly 205 may include a plurality of through-holes 315 extending from a first surface 235 (e.g., a top surface) of the showerhead plate 215 to an opposing second surface 240 (e.g., a bottom surface) of the showerhead plate 215. Each through-hole may be configured to allow gases to flow through the showerhead plate 215, i.e., from the top surface 235 to the bottom surface 240. In various embodiments, the showerhead plate 215 may have a total thickness T in the range of 20 to 30 mm.

[0032] 3, the showerhead plate 215 may include a central region 300 located at the geometric center of the showerhead plate 215. The showerhead plate 215 may further include an outer region 305 surrounding the central region 300 and extending toward an outer edge 310 of the showerhead plate 215. In various embodiments, the central region 300 may include a plurality of first through holes having a first dimension and the outer region 305 may include a plurality of second through holes having a second dimension, where the first through holes are a different dimension than the second through holes.

[0033] In various embodiments, and with reference to FIGS. 4-8, each through hole 315 of the plurality of first through holes and the plurality of second through holes may include an inlet 400 having a conical shape and an outlet 405 having a conical shape. Each through hole 315 may further include a linear channel 410 connecting the inlet 400 to the outlet 405. The linear channel 410 may have a uniform diameter. In an exemplary embodiment, the diameter of the linear channel 410 may be in the range of 0.8 mm to 1.5 mm. In an exemplary embodiment, the diameter of the linear channel 410 is 1 mm. Additionally, the linear channel 410 may be parallel to the vertical axis Z of the showerhead plate 215.

[0034] 5, each through-hole of the plurality of second through-holes comprises an inlet 400(a) having a maximum diameter DI1 in the range of 8 mm to 9 mm, and an outlet 405(a) having a maximum diameter DO1 in the range of 8 mm to 9 mm. Each through-hole may further comprise a linear channel 410(a) having a height h1 in the range of 11 mm to 17 mm and a diameter DC1 in the range of 0.5 mm to 1.5 mm. Furthermore, the conical shape of the inlet is the same as the conical shape of the outlet. In particular, the oblique height CI1 of the conical inlet 400(a) is the same as the oblique height CO1 of the conical outlet 405(a).

[0035] In one embodiment, and referring to FIG. 6, each through-hole of the plurality of first through-holes may comprise an inlet 400(b) having a maximum diameter DI2 in the range of 8 mm to 9 mm, and an outlet 405(b) having a maximum diameter DO2 in the range of 8 mm to 9 mm. In particular, DI2 is equal to DO2. Each through-hole according to this embodiment may further comprise a linear channel 410(b) having a height H2 in the range of 8 mm to 11 mm and a diameter DC2 in the range of 0.5 mm to 1.5 mm. Furthermore, the conical shape of the inlet is different from the conical shape of the outlet. In particular, the oblique height CI2 of the conical inlet 400(b) is smaller than the oblique height CO2 of the conical outlet 405(b). The oblique height CI2 may be equal to the oblique height CI1. In this embodiment, the central region 300 may include 31 through-holes 400(b).

[0036] In another embodiment, and referring to FIG. 7, each through-hole from the plurality of first through-holes may comprise an inlet 400(c) having a maximum diameter DI3 in the range of 8 mm to 9 mm, and an outlet 405(c) having a maximum diameter DO3 in the range of 12 mm to 15 mm. Each through-hole according to this embodiment may further comprise a linear channel 410(c) having a height H3 in the range of 4 mm to 6 mm and a diameter DC3 in the range of 0.5 mm to 1.5 mm. Furthermore, the conical shape of the inlet is different from the conical shape of the outlet. In particular, the oblique height CI3 of the conical shaped inlet 400(c) is smaller than the oblique height CO3 of the conical shaped outlet 405(c). The oblique height CI3 of the inlet 400(c) may be equal to the oblique height CI1 of the inlet 400(a). In this embodiment, the central region 300 may include 19 through-holes 400(c).

[0037] In another embodiment, and referring to FIG. 8, each through-hole from the plurality of first through-holes may comprise an inlet 400(d) having a maximum diameter DI4 in the range of 8 mm to 9 mm, and an outlet 405(d) having a maximum diameter DO4 in the range of 8 mm to 9 mm. In particular, DI4 is equal to DO4. Each through-hole according to this embodiment may further comprise a linear channel 410(d) having a height H4 in the range of 4 mm to 6 mm and a diameter DC4 in the range of 0.5 mm to 1.5 mm. Furthermore, the conical shape of the inlet is different from the conical shape of the outlet. In particular, the oblique height CI4 of the conical shaped inlet 400(d) is smaller than the oblique height CO4 of the conical shaped outlet 405(d). The oblique height CI4 of the inlet 400(d) may be equal to the oblique height CI1 of the inlet 400(a). In this embodiment, the central region 300 may include 31 through-holes 400(d).

[0038] In yet another embodiment, referring to Figs. 9-12, the central region 300 may include a plurality of third through holes 920 and a plurality of fourth through holes 905. The outer region 305 may include a plurality of fifth through holes 925. For example, the central region 300 may include twelve third through holes 920 and six fourth through holes 905. The central region 300 may further include at least one sixth through hole 900. In this embodiment, the central region 300 has a maximum width in the range of 30 mm to 60 mm. For example, the distance between opposing third through holes 920 may be approximately 40 mm.

[0039] In this embodiment, each through-hole 920 from the plurality of third through-holes may include an inlet having a conical shape at the first surface 235 and an outlet having a conical shape at the second surface 240. In this embodiment, a maximum diameter DI5 of the inlet may be smaller than a maximum diameter DO5 of the outlet.

[0040] In this embodiment, each through hole 905 from the plurality of fourth through holes may comprise an inlet having a tubular shape at the first surface 235 and an outlet having a conical shape at the second surface 240. Each through hole 905 comprises a channel 1100 having a length extending from the inlet to the outlet and having a uniform diameter along the length. For example, the channel 1100 may have a diameter in the range of 1.0 mm to 1.1 mm. In one exemplary embodiment, the diameter is 1.04 mm. Additionally, the channel 1100 may be angled with respect to the vertical axis Z and angled inward toward the center of the showerhead plate 215.

[0041] In this embodiment, the sixth through hole 900 may include an inlet having a tubular shape at the first surface 235 and an outlet 910 having a conical shape at the second surface 240. The sixth through hole 900 includes a channel 930 having a length extending from the inlet to the outlet 910 and having a uniform diameter along the length. For example, the channel 930 may have a diameter in the range of 1.0 mm to 1.2 mm. In one exemplary embodiment, the diameter is 1.0 mm. The outlet 910 of the sixth through hole 900 may be located at the geometric center of the showerhead plate 215. The channel 930 is angled with respect to the vertical axis Z and angled inward toward and connected to the outlet 910.

[0042] In the preceding description, the technology has been described with reference to certain exemplary embodiments. The specific implementations shown and described are illustrative of the technology and its best modes, and are not intended to otherwise limit the scope of the technology in any way. Indeed, for the sake of brevity, conventional manufacturing, connection, preparation, and other functional aspects of the methods and systems may not be described in detail. Furthermore, the connecting lines shown in the various figures are intended to represent exemplary functional relationships and / or steps between the various elements. Many alternative or additional functional relationships or physical connections may exist in an actual system.

[0043] The present technology has been described with reference to certain exemplary embodiments. However, various modifications and changes may be made without departing from the scope of the present technology. The description and drawings are to be regarded in an illustrative manner, not restrictive, and all such modifications are intended to be included within the scope of the present technology. Thus, the scope of the technology should be determined by the general embodiments described, and their legal equivalents, and not merely by the specific examples described above. For example, the steps recited in any method or process embodiment may be performed in any order, unless expressly specified otherwise, and are not limited to the explicit order presented in the specific examples. Furthermore, the components and / or elements recited in any apparatus embodiment may be assembled in various permutations or configured to operate in other ways to produce substantially the same results as the present technology, and therefore are not limited to the specific configurations recited in the specific examples.

[0044] Benefits, other advantages, and solutions to problems have been described above with regard to specific embodiments. Any element that may cause or make more pronounced any benefit, advantage, solution to a problem, or any element that may cause any particular benefit, advantage, or solution, is not, however, construed as a critical, required, or essential feature or component.

[0045] The terms "comprises," "comprising," or any other variation thereof, are intended to refer to an open-ended inclusion, such that a process, method, article, component, or apparatus comprising a list of elements may include not only those elements listed, but also other elements not expressly listed or inherent to such process, method, article, component, or apparatus. In addition to those not specifically listed, other combinations and / or modifications of the above-described structure, arrangement, application, proportions, elements, materials, or components used in the practice of the technology may be changed or otherwise specifically adapted to particular environments, manufacturing specifications, design parameters, or other operating requirements without departing from the general principles thereof.

[0046] The present technology has been described above with reference to exemplary embodiments. However, changes and modifications may be made to the exemplary embodiments without departing from the scope of the technology. These and other changes or modifications are intended to be included within the scope of the technology, as expressed in the following claims. [Explanation of symbols]

[0047] 100 Systems 105 Reactor 110 Source container 115 Valve manifold 120 Gas Line 200 Reaction Chamber 205 shower head assembly 210 Lid 215 Shower Head Plate 220 Susceptor 225 Wafer 230 Plenum Space 235 First surface, top surface 240 Second surface, bottom 300 central area 305 Outer area 310 Outer edge 315 Through hole 400 entrance 400 through hole 405 Exit 410 Linear Channel 900 Through hole 905 Through hole 910 Exit 920 Through hole 925 Through hole 930 Channels 1100 Channels

Claims

1. 1. A showerhead plate, comprising: a top surface and an opposing bottom surface; a central region located at a geometric center of the showerhead plate, the central region having a diameter in the range of 10 mm to 60 mm; an outer region surrounding the central region and extending to an outer edge of the showerhead plate; a plurality of first through holes located within the central region and extending from the top surface to the bottom surface; a plurality of second through holes located within the outer region and extending from the top surface to the bottom surface; The second through hole is a different shape than the first through hole.

2. 10. The showerhead plate of claim 1, wherein each second through hole comprises a conical inlet having a first dimension at the top surface, a conical outlet having a first dimension at the bottom surface, and a linear channel connecting the inlet to the outlet.

3. 3. The showerhead plate of claim 2, wherein the linear channel has a length in the range of 11 mm to 17 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the cone-shaped inlet and outlet have a maximum diameter in the range of 8 mm to 9 mm.

4. 10. The showerhead plate of claim 1, wherein each first through hole comprises a first conically shaped inlet having a first dimension at the top surface, a second conically shaped outlet having a second dimension at the bottom surface, and a linear channel connecting the inlet to the outlet, wherein the first dimension is different from the second dimension.

5. 5. The showerhead plate of claim 4, wherein the linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the cone-shaped inlet and outlet have a maximum diameter in the range of 8 mm to 9 mm.

6. 5. The showerhead plate of claim 4, wherein the linear channel has a length in the range of 8 mm to 11 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the cone-shaped inlet and outlet have a maximum diameter in the range of 8 mm to 9 mm.

7. 5. The showerhead plate of claim 4, wherein the linear channel has a length in the range of 4 mm to 6 mm and a diameter in the range of 0.5 mm to 1.5 mm, and the cone-shaped inlet and outlet have a maximum diameter in the range of 8 mm to 9 mm.

8. 5. The showerhead plate of claim 4, wherein the linear channel has a length in a range of 4 mm to 6 mm and a diameter in a range of 0.5 mm to 1.5 mm, the conical inlet has a first maximum diameter and the outlet has a second maximum diameter, the second maximum diameter being greater than the first maximum diameter.

9. 10. The showerhead plate of claim 8, wherein the plurality of first holes has a number of first holes in a range of 18 to 20.

10. 5. The showerhead plate of claim 4, wherein the plurality of first holes has a number of first holes in a range of 28 to 32.

11. 1. A showerhead plate, comprising: a top surface and an opposing bottom surface; a central region located at a geometric center of the showerhead plate, the central region having a diameter in the range of 10 mm to 60 mm; an outer region surrounding the central region and extending toward an outer edge of the showerhead plate; a plurality of first through holes located within the central region and extending from the top surface to the bottom surface, each first through hole comprising: a first inlet having a first conical shape and a first dimension in the upper surface; a first outlet at the base having a second conical shape and a second dimension; a first linear channel connecting the first inlet to the first outlet; a plurality of first through holes, the first dimension being different from the second dimension; a plurality of second through holes located within the outer region and extending from the top surface to the bottom surface, each second through hole comprising: a second inlet in the upper surface, the second inlet having the first conical shape and a first dimension; a second outlet at the base having the first conical shape and a first dimension; a second linear channel connecting the second inlet to the second outlet; and a plurality of second through holes.

12. 12. The showerhead plate of claim 11, wherein the second linear channel has a length in a range of 11 mm to 17 mm and a diameter in a range of 0.5 mm to 1.5 mm, and the second inlet and the second outlet each have a maximum diameter in a range of 8 mm to 9 mm.

13. 12. The showerhead plate of claim 11, wherein the first linear channel has a length in a range of 4 mm to 6 mm and a diameter in a range of 0.5 mm to 1.5 mm, and the first inlet and the first outlet each have a maximum diameter in a range of 8 mm to 9 mm.

14. 12. The showerhead plate of claim 11, wherein the first linear channel has a length in a range of 8 mm to 11 mm and a diameter in a range of 0.5 mm to 1.5 mm, and the first inlet and the first outlet each have a maximum diameter in a range of 8 mm to 9 mm.

15. 12. The showerhead plate of claim 11, wherein the first linear channel has a length in a range of 4 mm to 6 mm and a diameter in a range of 0.5 mm to 1.5 mm, and the first inlet and the first outlet have a maximum diameter in a range of 8 mm to 9 mm.

16. 12. The showerhead plate of claim 11, wherein the first linear channel has a length in a range of 4 mm to 6 mm and a diameter in a range of 0.5 mm to 1.5 mm, the conical inlet has a first maximum diameter and the outlet has a second maximum diameter, the second maximum diameter being greater than the first maximum diameter.

17. 12. The showerhead plate of claim 11, wherein the plurality of first holes has a number of first holes in a range of 18 to 32.

18. 1. A showerhead assembly comprising: a lid having a main inlet configured to be coupled to a gas source; a plenum volume in communication with the main inlet and at least partially defined by the lid and a showerhead plate, the showerhead plate comprising: a top surface and an opposing bottom surface; a central region located at a geometric center of the showerhead plate, the central region having a diameter in the range of 10 mm to 60 mm; an outer region surrounding the central region and extending to an outer edge of the showerhead plate; a plurality of first through holes located within the central region and extending from the top surface to the bottom surface, each of the first through holes comprising: a cone-shaped first inlet; a cone-shaped first outlet; a first linear channel connecting the inlet and the outlet; and a plurality of second through holes located within the outer region and extending from the top surface to the bottom surface, each of the second through holes comprising: a second inlet having a conical shape; a cone-shaped second outlet, said second inlet and said second outlet having equal cone dimensions; a second linear channel connecting the inlet and the outlet; and a second plurality of through holes comprising the second linear channel; the second through hole has a different shape than the first through hole; the second linear channel having a length greater than a length of the first linear channel.

19. the plurality of first holes having a number of first holes in a range of 18 to 32; 20. The showerhead assembly of claim 18, wherein the first linear channel has a length in a range of 4 mm to 12 mm and the second linear channel has a length in a range of 12 mm to 20 mm.

20. 1. A showerhead assembly comprising: a lid having a main inlet configured to connect to a gas source; a plenum volume in communication with the main inlet and at least partially defined by the lid and a showerhead plate, the showerhead plate comprising: a top surface and an opposing bottom surface; a central region located at a geometric center of the showerhead plate; an outer region surrounding the central region and extending to an outer edge of the showerhead plate; a plurality of first through holes located within the central region and extending from the top surface to the bottom surface, at least one hole from the plurality of first through holes having an angled channel extending from a first inlet at the top surface to a cone-shaped first outlet at the bottom surface; a plurality of second through holes located within the outer region and extending from the top surface to the bottom surface, each of the second through holes comprising: a second inlet having a conical shape; a cone-shaped second outlet, said second inlet and said second outlet having equal cone dimensions; a second linear channel connecting the inlet and the outlet; the second through hole being a different shape than the first through hole.

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