Composition and method for selectively etching silicon nitride film

Abstract

To provide a composition and a method for selectively etching a silicon nitride film in the presence of silicon dioxide and polysilicon.SOLUTION: A wet etching compositions for etching the surfaces of microelectronic devices include polysilicon in contact with a surface comprising silicon nitride (SiN), silicon oxide, and compounds that are electrochemically nobler than silicon, and optionally other materials, including conductive, semiconductive, or insulating materials useful in microelectronic devices or process materials useful in the fabrication of microelectronic devices.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention generally relates to compositions and methods for selectively etching silicon nitride films in the presence of silicon dioxide and polysilicon. [Background technology]

[0002] In the microelectronics industry, there is a continuing demand for improved device performance as well as smaller device and feature sizes. Smaller features have the dual benefits of increased device feature density and increased device speed.

[0003] The shrinking of features and devices requires new methods to be found and steps to be improved in the multi-step process of fabricating microelectronic devices. In the methods of making many types of microelectronic devices, the step of removing silicon nitride is common. A thin layer of silicon nitride (Si3N4), usually deposited by chemical vapor deposition from silane (SiH4) and ammonia (NH3), can be useful in microelectronic devices as a barrier against water and sodium. A patterned silicon nitride layer is also used as a mask for spatially selective silicon oxide growth. After this silicon nitride material has been applied, it may be necessary to remove all or part of it, which is typically done by etching.

[0004] Silicon nitride is advantageously removed from the substrate by etching in a manner that does not damage or destroy other exposed or covered features of the microelectronic device. Often, the process of removing silicon nitride is performed in a manner that preferentially removes silicon nitride over other materials, such as silicon dioxide, that are also present on the surface of the microelectronic device substrate. According to various industrial methods, silicon nitride is removed from the microelectronic device surface by a process of wet etching in which the substrate surface is exposed to concentrated phosphoric acid (H3PO4) at elevated temperatures, for example in a bath having a temperature in the range of 150°C to 180°C. Conventional wet etching techniques for selectively removing silicon nitride over silicon oxide have used aqueous solutions of phosphoric acid (H3PO4), typically about 85 weight percent phosphoric acid and 15 weight percent water. Using fresh hot phosphoric acid typically allows for a Si3N4:SiO2 selectivity of about 40:1.

[0005] Furthermore, in addition to silicon oxide, device structures may also have exposed polysilicon surfaces, further complicating the desired selective silicon nitride etch process. Thus, there is a need for compositions and methods useful for preferentially etching silicon nitride in the presence of silicon oxide and polysilicon surfaces. Summary of the Invention

[0006] In summary, the present invention relates to a wet etching composition for etching the surface of a microelectronic device that contains silicon nitride (SiN), silicon oxide, and polysilicon. In some embodiments, the polysilicon is in contact with a surface that contains a compound that is electrochemically nobler than silicon. Optionally, other materials are present, such as conductive, semiconductive, or insulating materials useful in microelectronic devices, or process materials useful in the fabrication of microelectronic devices. The described etching composition includes phosphoric acid, aminoalkylsilanol, certain polysilicon corrosion inhibitors, optionally a fluorine compound, and an amount of water that is associated with the components of the etching composition or added separately. [Brief description of the drawings]

[0007] [Figure 1] 2 shows an exemplary substrate before and after an etching step performed during the method of the present invention. [Diagram 2] Table 1 is provided to support the examples provided. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] In a first aspect, the present invention provides a method of etching silicon nitride on a microelectronic device substrate, the substrate comprising a surface comprising silicon nitride, a surface comprising silicon oxide, and a surface comprising polysilicon, the method comprising: 1. An etching composition comprising: a. concentrated phosphoric acid in an amount of at least 60 weight percent, based on the total weight of the composition; b. a polysilicon corrosion inhibitor compound; c. aminoalkylsilanol; d. Optionally, with a fluorine compound An etching composition comprising To provide providing a substrate having a surface comprising silicon nitride and a surface comprising polysilicon; contacting the substrate with the composition under conditions effective to etch silicon nitride. Includes.

[0009] In one embodiment, the surface comprising polysilicon is in contact with a surface comprising a composition that is electrochemically nobler than silicon, hi one embodiment, the composition does not contain a fluorine compound.

[0010] The compositions of the present invention are useful as etching compositions in etching or removing silicon nitride films on certain microelectronic devices, and have unexpectedly demonstrated superior selectivity in etching silicon nitride in the presence of other materials commonly present in certain microelectronic devices.

[0011] As used herein, the term "microelectronic device" (or "microelectronic device substrate" or simply "substrate") is used consistent with the commonly understood meaning of the term in the electronics, microelectronics, and semiconductor manufacturing arts, and refers to, for example, any of a variety of different types of semiconductor substrates; integrated circuits; solid state memory devices; hard disk memories; read heads, write heads, read / write heads and their mechanical or electronic components; flat panel displays; phase change memory devices; solar panels and other products that include one or more solar cell devices; photovoltaic cells; and microelectromechanical systems (MEMS) fabricated for use in microelectronics, integrated circuit, energy harvesting, or computer chip applications. It should be understood that the term "microelectronic device" can refer to any in-process microelectronic device or microelectronic device substrate that contains, or is being fabricated to contain, functional electronic (current carrying) structures, functional semiconductor structures, and insulating structures for ultimate electronic use in a microelectronic device or microelectronic assembly.

[0012] As used herein, the term "silicon nitride" has a meaning consistent with that used in the microelectronics and semiconductor manufacturing industries. Consistent with this, silicon nitride refers to a material such as a thin film of amorphous silicon nitride having commercially useful low levels of other materials or impurities and any possible variations that are nominally close to stoichiometric to Si3N4. Silicon nitride may be present as a functional feature of the device, for example as part of a microelectronic device substrate as a barrier or insulating layer, or may be present to function as a material that facilitates a multi-step manufacturing process for making a microelectronic device.

[0013] As used herein, the term "silicon oxide" has a meaning consistent with that of the term used in the microelectronics and semiconductor manufacturing industries. Consistent with this, silicon oxide refers to silicon oxide (SiO x ), e.g. SiO2, "thermal oxide" (ThO x ), etc. The silicon oxide can be applied to the substrate by any method, for example, by chemical vapor deposition from tetraethoxysilane (TEOS) or another source, or by thermal deposition. The silicon oxide can advantageously contain industrially useful low levels of other materials or impurities. Silicon oxide may be present as a feature of a microelectronic device, for example, as part of a microelectronic device substrate as an insulating layer.

[0014] As used herein, the term "polysilicon" has its commonly understood meaning as used in the microelectronics and semiconductor manufacturing industries as a polycrystalline form of silicon. In other words, polysilicon or "poly-Si" is a high-purity polycrystalline form of silicon that can be doped to modify the electrical properties of the silicon.

[0015] Reference herein to a polysilicon surface in contact with a surface comprising a composition that is electrochemically nobler than silicon is intended to describe a surface that can cause galvanic corrosion (of the polysilicon) when in contact with the polysilicon. The term "noble" as used herein is intended to refer to the characteristics of various noble elements, which exhibit their properties as elements that are resistant to oxidation and corrosion in an aqueous environment. Thus, surfaces and compositions that include such surfaces are sufficiently "noble" than silicon if they are capable of causing electrochemical flux and thus corrosive degradation over time when in intimate contact with polysilicon in an aqueous environment. As described herein, the methods and compositions of the present invention are particularly useful in the selective etching of silicon nitride on microelectronic device substrates that also have such polysilicon structures or surfaces in contact with such "nobler surfaces". Examples of such surfaces include tungsten silicide, nickel silicide, platinum silicide, and titanium silicide.

[0016] Certain etching composition embodiments include compositions in the form of an aqueous solution that comprises, consists essentially of, or consists of an effective amount of aqueous phosphoric acid (e.g., concentrated phosphoric acid with an optional amount of added water) and a fluorine compound to produce a desired etch (such as a useful or advantageous etch rate) of silicon nitride, an effective amount of an aminoalkylsilanol to improve the selectivity of silicon nitride over silicon oxide, an effective amount of one or more certain galvanic inhibitors, and optionally dissolved silica. These and other compositions of the examples can comprise, consist of, or consist essentially of the listed components and optional ingredients. As generally defined throughout this specification, compositions of matter such as the described etching compositions, or components or constituents thereof, are said to "consist essentially of" a particular group of components or materials, referring to compositions that contain a particular component or material together with low or insignificant amounts or less of other components or materials, e.g., 5, 2, 1, 0.5, 0.1, or 0.05 parts by weight or less of other components or materials. For example, as described, an etching composition containing materials consisting essentially of aqueous phosphoric acid, an aminoalkylsilane, a polysilicon corrosion inhibitor, and optional ingredients means an etching composition containing those ingredients plus no more than 5, 2, 1, 0.5, 0.1, or 0.05 parts by weight of any other material, dissolved or undissolved, or materials other than the specified material (individually or collectively).

[0017] The etching composition includes an amount of aqueous phosphoric acid (e.g., concentrated phosphoric acid) effective to produce a desired etch of silicon nitride. The term "aqueous phosphoric acid" refers to the component of the etching composition that is mixed or combined with other components of the etching composition to form the etching composition. The term "phosphoric acid solids" refers to the non-aqueous components of the aqueous phosphoric acid component or the non-aqueous components of the etching composition made from the aqueous phosphoric acid component.

[0018] The amount of phosphoric acid solids included in the etching composition can be an amount that, in combination with other materials of the etching composition, provides the desired etching performance, such as the desired silicon nitride etch rate and selectivity, which typically requires a relatively large amount (concentration) of phosphoric acid solids. For example, the etching composition can contain an amount of phosphoric acid solids that is at least about 50 weight percent based on the total weight of the etching composition, such as at least 70 weight percent, or at least about 80 or 85 weight percent based on the total weight of the etching composition.

[0019] To provide the desired amount of phosphoric acid solids, the composition may contain "concentrated" phosphoric acid as a component that is mixed or combined with other components (optionally water, one component in some form) to produce the etching composition. "Concentrated" phosphoric acid refers to an aqueous phosphoric acid component that contains a large or maximum amount of phosphoric acid solids in the presence of a small or minimum amount of water and is substantially free of other components (e.g., less than 0.5 or 0.1 weight percent of any non-aqueous or non-phosphoric acid solid materials). Concentrated phosphoric acid can be considered to have at least about 80 or 85 weight percent phosphoric acid solids, typically in about 15 or 20 weight percent water. Alternatively, the etching composition may be considered to include a quantity of concentrated phosphoric acid diluted with water or an equivalent formed in some manner, where a quantity of concentrated phosphoric acid diluted with water means, for example, concentrated phosphoric acid diluted with a quantity of water before or after combining with other components of the etching composition. Alternatively, the etching composition component may be concentrated or diluted phosphoric acid, and the etching composition may contain an additional amount of water provided to the etching composition, either as a component of a different component or as a separate water component.

[0020] As an example, when concentrated phosphoric acid is used to form the composition, the amount of concentrated phosphoric acid (85 weight percent in water) can be an amount of at least 60 weight percent of the etching composition, such as at least 80 weight percent, or at least 90, 93, 95, or at least 98 weight percent, based on the total weight etching composition.

[0021] As used herein, the term "fluorine compound" refers to certain etchants that are optionally added to enhance the etch rate of titanium nitride. Such compounds include, but are not limited to, HF, ammonium fluoride, tetrafluoroboric acid, hexafluorosilicic acid, other compounds containing BF or Si-F bonds, tetrabutylammonium tetrafluoroborate (TBA-BF4), tetraalkylammonium fluorides (NR1R2R3R4F), and combinations thereof. In one embodiment, the fluoride compound is HF, ammonium fluoride, tetrafluoroboric acid, hexafluorosilicic acid, tetrabutylammonium tetrafluoroborate, tetraalkylammonium fluoride (C 1~ C6 alkyl)ammonium, and combinations thereof. In another embodiment, the fluorine compound can include any fluorine compound covalently bonded to carbon, and can be any CF2 or CF3 group or any fluorosurfactant group.

[0022] The amount of optional fluorine compound contained in the composition of the present invention can be an amount that, in combination with other materials of the etching composition, provides the desired etching performance, such as the desired silicon nitride etch rate and selectivity. For example, the etching composition can contain an amount of fluorine source compound in the range of about 5 to 10,000 ppm, or even up to 50,000 ppm (i.e., 0.0005 to 1 weight percent, or even 5 weight percent) based on the total weight of the etching composition, such as about 20 to 2,000 ppm (i.e., 0.002 to 0.2 weight percent) based on the total weight of the etching composition.

[0023] The composition comprises an aminoalkylsilanol, the term aminoalkylsilanol as used herein refers to a silane (-SiO-) based compound or molecule that contains at least one silicon atom and at least one amine group located on an alkyl substituent of the silane based compound, i.e., an aminoalkyl substituent linked to a silicon atom. The silanol functional group may be present in the manufactured formulation or may be formed by hydrolysis when added to the formulation or under process conditions. For example, silicon alkoxides are known to hydrolyze rapidly under strong acidic conditions, and siloxanes hydrolyze under process conditions.

[0024] In certain embodiments, the aminoalkylsilanol compound has the formula: (HO)3Si-(C1~C 12 alkyl)-NH2, and (HO)3Si-(C1-C6 alkyl)-NH-(C1-C6 alkyl)-NH2 has.

[0025] In accordance with the present invention, applicants have discovered that the presence of an aminoalkylsilanol compound as part of an etching composition containing phosphoric acid in combination with a fluorine compound and a polysilicon corrosion inhibitor can provide improved performance as described herein.

[0026] Examples of aminoalkylsilanols include 3-aminopropylsilanetriol, N-(6-aminohexyl)aminopropylsilanol, N-(2,aminoethyl)-(2,aminoethyl)-3-aminopropylsilanetriol, and (3-trimethoxysilylpropyl)diethylenetriamine.

[0027] In the compositions of the present invention, the amount of aminoalkylsilanol contained in such compositions can be an amount that, in combination with other materials of the etching composition, provides the desired selective etching performance, such as the desired etch rate and selectivity of silicon nitride relative to silicon dioxide and polysilicon. For example, the etching composition can contain an amount of aminoalkylsilanol compound, which can be a single species or a combination of two or more species, in the range of about 20 to 10,000 ppm (i.e., 0.0020 to 1.0 weight percent) based on the total weight of the composition, or in the range of about 20 to 2,000, 4,000, or 5,000 ppm (i.e., 0.002 to 0.2, 0.4, or 0.5 weight percent) based on the total weight of the composition.

[0028] The compositions of the present invention utilize at least one compound that functions as a polysilicon inhibitor during the selective etching of silicon nitride in the presence of polysilicon. Without wishing to be bound by theory, the applicants believe that this component in the composition helps inhibit the corrosion of the surface of polysilicon by inhibiting the flow of electrons and / or the migration of corrosion products when such a surface of polysilicon is in contact with a surface containing a material more noble than silicon. In this regard, the inventors have discovered several compounds that can serve this purpose of polysilicon corrosion inhibition, some of which can be classified as surfactants. Examples include: Decyltrimethylammonium Chloride Dodecyltrimethylammonium chloride Hexadecyltrimethylammonium chloride 4-Phenylpyridine N-oxide 3-(Cyclohexylamino)-1-propanesulfonic acid (CAPS) Trimethylamine N-oxide 4-Aminobenzenesulfonic acid Dodecylamine Isonicotinic acid N-oxide Trimethylphenylammonium chloride 4-(cyclohexylamino)-1-butanesulfonic acid (CABS) Lauryl dimethylamine oxide 1-Decyl-3-methylimidazolium Chloride [2-(Dicyclohexylphosphino)ethyl]trimethylammonium chloride Tomamine AO-405 Nicotinic acid N-oxide Poly(4-vinylpyridine) 4-(Benzyloxy)pyridine N-oxide 1-Octyl-2-pyrrolidone 1-Dodecyl-2-pyrrolidinone Ammonium dinonyl sulfosuccinate Poly(4-styrenesulfonic acid) Tolyltriazole Myristyldimethylamine N-oxide (N-oxide, tetradecyl diemthylamine) 1-Octanesulfonic Acid Benzyltrimethylammonium chloride p-Aminobenzenesulfonamide Pyridine N-oxide Polyethyleneimine Polyacrylic acid Polyvinylpyrrolidone Thetawet FS-8150 2,5 Dimethylphenylacetic acid 2-Hydroxypyridine n-oxide 4-(Cyclohexylamino)-1-butanesulfonic acid (CABS) Tetradecyldimethylamine oxide) Benzalkonium Chloride Hexyldiphenyloxide disulfonic acid (5-hexyl-2-(4-hexyl-2-sulfophenoxy)benzenesulfonic acid) Dodecyldiphenyloxide disulfonic acid (5-dodecyl-2-(4-dodecyl-2-sulfophenoxy)benzenesulfonic acid) Capstone FS-35 (fluorosurfactant) Dodecylbenzenesulfonic acid (DDBSA) Flexiwet® NF (low foaming, anionic fluorosurfactant) Flexiwet® NI-M (Fluorinated Nonionic Surfactant) Heptane-4-sulfonic acid p-Triacetic acid Sulfosuccinic acid Thetawet FS-8050 (non-ionic ethoxylated fluorosurfactant) Tomamine AO-14-2 (50% active bis-(2-hydroxyethyl)isodecyloxypropylamine oxide)

[0029] In one embodiment, the polysilicon corrosion inhibitor is a linear and branched C-C 16 Examples of the alkyl benzene sulfonic acid include octyl benzene sulfonic acid, nonyl alkyl benzene sulfonic acid, decyl benzene sulfonic acid, undecyl benzene sulfonic acid, dodecyl benzene sulfonic acid, tridecyl benzene sulfonic acid, tetradecyl benzene sulfonic acid, pentadecyl benzene sulfonic acid, hexadecyl benzene sulfonic acid, heptadecyl benzene sulfonic acid, octadecyl benzene sulfonic acid, and C6 to C7 alkyl benzene sulfonic acids. 16 Alkyldiphenylsulfide disulfonic acid and C6-C 16 Included are alkyldiphenylamine disulfonic acids. In one embodiment, the polysilicon corrosion inhibitor is dodecylbenzene sulfonic acid.

[0030] In one embodiment, the polysilicon corrosion inhibitor is a chalcogenide or C6-C 16 In one embodiment, the polysilicon corrosion inhibitor is selected from hexyl diphenyl oxide disulfonic acid and dodecyl diphenyl oxide disulfonic acid.

[0031] Optionally, the compositions of the present invention can also contain an amount of silica dissolved in phosphoric acid, for example by dissolving a solid silica material in phosphoric acid or by adding a soluble silicon-containing compound capable of forming dissolved silica by reaction with aqueous phosphoric acid, examples of such compounds include tetramethylammonium silicate (TMAS), tetraacetoxysilane, or tetraalkoxysilanes such as tetramethoxysilane, tetraethoxysilane, etc. The dissolved silica can be effective in improving the selectivity of the etching composition relative to silicon nitride. The amount of silica can be any useful amount that does not result in supersaturation of the pretreatment silica at the etching process conditions, for example, about 5 to 10,000 ppm of dissolved silica or soluble silicon-containing compound based on the total weight of the etching composition, or about 20 to 5,000, 3,000, 1,000, or 500 ppm based on the total weight of the etching composition.

[0032] The etching composition may contain water from one or more sources. For example, water is present in the aqueous phosphoric acid component. Additionally, water may be used as a carrier for one or more other components of the composition, or may be added alone as a component of the composition itself. The amount of water should be low enough so that the composition exhibits desired or preferred or advantageous performance characteristics, such as a useful (sufficiently high) silicon nitride etch rate. More water present tends to improve the silicon nitride etch rate, but may also lower the boiling point of the composition, which lowers the temperature at which the composition operates, which is counterproductive. In the etching composition, the amount of water from all sources may be, for example, less than about 50, 40, or 30 weight percent, for example, in the range of about 5 weight percent to about 25 weight percent water based on the total weight of the etching composition, or in the range of about 10 to 20 weight percent water based on the total weight of the etching composition.

[0033] Optionally, the etching compositions described in these and other examples can contain, consist of, or consist essentially of any one or any combination of phosphoric acid, aminoalkylsilane, at least one polysilicon corrosion inhibitor, and certain optional ingredients. In certain embodiments, the compositions of the present invention do not require or may exclude other types of ingredients not typically included in etching compositions, such as solid materials such as pH adjusters (other than the acids mentioned as possible ingredients herein) and abrasives.

[0034] The compositions of the present invention can be made by any method useful for producing the described etching compositions. By one method, the aqueous or solid components can be combined, optionally with heating, and mixed to homogenize.

[0035] The described compositions may be useful in methods of removing silicon nitride from a surface of a microelectronic device substrate. The substrate may include other materials useful in microelectronic devices, such as one or more of insulators, barrier layers, conductive materials, semiconducting materials, or materials useful in the processing of microelectronic devices (e.g., photoresists, masks, among others). Example substrates have surfaces including silicon nitride, thermal oxide (ThOx), and plasma enhanced tetra ethyl orthosilicate (PETEOS, an oxide deposited using plasma enhanced tetra ethyl orthosilicate), and polysilicon.

[0036] In use, the compositions of the present invention can provide useful etching performance based on industrial performance needs and expectations, and can provide improved performance in terms of silicon nitride etch rate and selectivity as compared to comparative etching compositions.

[0037] Methods for etching microelectronic device substrates are known in the semiconductor manufacturing art and can be performed using known commercially available equipment. Generally, to etch a substrate to selectively remove material from a surface of the substrate, an etching composition is applied to the surface and contacted with the surface structures to chemically selectively remove some of the structures.

[0038] Because the composition is designed to etch oxide very slowly, silicon nitride films may have a thin oxide surface that can inhibit the etching process. In such cases, a very brief treatment with dilute HF can be an advantageous first process step.

[0039] In the etching process, the etching composition can be applied to the surface of the substrate by any suitable means, such as by spraying the etching composition onto the surface; by immersing the substrate in the etching composition (in a static or dynamic volume of the composition); by contacting the surface with another material onto which the etching composition has been absorbed, such as a pad or fibrous adsorbent applicator element; by contacting the substrate with a volume of the etching composition in a circulating pool; or by any other suitable means, means or technique that removes and contacts the etching composition with the surface of the silicon germanium and silicon-containing microelectronic substrate. The application can be in a batch or single wafer equipment for dynamic or static cleaning.

[0040] Useful etching process conditions (e.g., time and temperature) can be any that are found to be effective or advantageous. In general, the etching composition is contacted with the surface for a time sufficient to selectively remove silicon nitride, for example by submerging the surface in a bath of the etching composition. The exposure time to the etching composition and the temperature of the etching composition can be effective to remove the desired amount of silicon nitride from the surface of the substrate. The time of the etching step should not be too short, as this means that the etching rate of silicon nitride may be too high, which may make process control difficult and lead to poor quality of the microelectronic device at the end of the etching step. Of course, it is preferred that the time required for the etching step is not too long to allow good efficiency and throughput of the etching process and the semiconductor manufacturing line. Useful times for the etching step may range, for example, from about 5 minutes to about 200 minutes, or from about 10 minutes to about 60 minutes, at temperatures ranging from about 100° C. to about 180° C. Such contact times and temperatures are exemplary, and any other suitable time and temperature conditions effective to achieve the required removal selectivity may be used.

[0041] The etching process herein may be useful for etching silicon nitride material from the surface of any type of substrate. According to certain embodiments, the substrate may include alternating thin layers of silicon nitride as structural features of the substrate, which may include alternating thin layers of silicon nitride layers along with silicon oxide and dielectrics such as polysilicon, conductive metal silicides, and zirconium oxide or aluminum oxide. The silicon oxide layers are high aspect ratio structures including silicon nitride layers disposed between layers of silicon oxide. Referring to FIG. 1, a substrate is shown before and after a selective etching process described herein that is effective for removing silicon nitride from a substrate in a selective manner, e.g., preferentially to silicon oxide. The substrate prior to the etching process includes alternating layers of silicon nitride disposed in openings between high aspect ratio silicon oxide structures. The etching process removes the silicon nitride to leave behind silicon oxide layers with openings or "slits" separating the silicon oxide layers as shown in the substrate on the right side of FIG. 1. According to the present specification, the substrate shown in FIG. 1 may be etched using an etching process as shown in FIG. 1. The example etching processes can significantly improve SiN etch rates, exhibit good selectivity to silicon oxide (>50, preferably close to or greater than 100), and avoid significant silica redeposition (as evidenced by closed or nearly closed slit openings) compared to prior art and comparable etching compositions and processes.

[0042] After selective etching of the desired amount of silicon nitride is complete, the etching composition remaining on the surface of the etched microelectronic device can be removed from the surface by any desired useful method, such as rinsing, cleaning, or other removal step using water (or optionally phosphoric acid followed by water). For example, after etching, the microelectronic device substrate can be rinsed with a rinse of deionized water (e.g., at a temperature ranging from about 20 to about 90° C.), followed by drying, such as spin drying, N2, steam drying, etc. After rinsing, the substrate surface can be evaluated for the presence and amount of particles on the surface.

[0043] As noted above, the compositions of the present invention exhibit surprisingly superior selectivity in wet etching environments on microelectronic device substrates having polysilicon covered areas due to the presence of the polysilicon corrosion inhibitor component. Thus, in a further aspect, the present invention provides a method for preparing a composition comprising: a. concentrated phosphoric acid in an amount of at least 60 weight percent, based on the total weight of the composition; b. Linear and branched C8-C 16 Alkylbenzenesulfonic acid and C6-C 12 a polysilicon corrosion inhibitor compound selected from alkyldiphenyloxide disulfonic acids; c. Aminoalkylsilanol A composition comprising:

[0044] In some embodiments, the aminoalkylsilanol is selected from 3-aminopropylsilanetriol, N-(6-aminohexyl)aminopropylsilanol, 3-aminopropyltriethoxide, and 3-aminopropyltrimethoxide, and (3-trimethoxysilylpropyl)diethylenetriamine. In some embodiments, the polysilicon corrosion inhibitor is selected from hexyldiphenyloxide disulfonic acid, dodecyldiphenyloxide disulfonic acid, and dodecylbenzenesulfonic acid. In some embodiments, the composition further comprises a fluorine compound, such as HF.

[0045] In one embodiment, the composition comprises: a. concentrated phosphoric acid in an amount of at least 60 weight percent, based on the total weight of the composition; b. dodecylbenzenesulfonic acid; c. 3-aminopropylsilanetriol In one embodiment, the composition further comprises HF.

[0046] In one embodiment, the composition comprises: a. concentrated phosphoric acid in an amount of at least 60 weight percent, based on the total weight of the composition; b. Linear and branched C6-C 16 Alkylbenzenesulfonic acid and C6-C 16 a polysilicon corrosion inhibitor compound selected from alkyldiphenyloxide disulfonic acids; c. an aminoalkylsilanol, and optionally d. Fluorine compounds and Includes.

[0047] In one embodiment, the polysilicon corrosion inhibitor compound is selected from dodecylbenzenesulfonic acid, dodecyldiphenyloxidedisulfonic acid, and hexyldiphenyloxidedisulfonic acid.

[0048] In one embodiment, the aminoalkylsilanol compound has the formula: (HO)3Si-(C1~C 12 alkyl)-NH2, and (HO)3Si-(C1-C6 alkyl)-NH-(C1-C6 alkyl)-NH2 has.

[0049] In one embodiment, the alkylaminosilanol is selected from 3-aminopropylsilanetriol and N-(6-aminohexyl)aminopropylsilanol. In another embodiment, the fluorine compound is HF, the polysilicon corrosion inhibitor compound is dodecylbenzenesulfonic acid, and the aminoalkylsilane is 3-aminopropylsilanetriol.

[0050] It will be appreciated that it is common practice to make the semi-aqueous composition in a concentrated form and dilute it prior to use. For example, the composition may be manufactured in a more concentrated form and then diluted with at least one solvent at the manufacturer prior to use and / or during use at the manufacturing plant. The dilution ratio may range from about 0.1 parts diluent:1 part composition concentrate to about 100 parts diluent:1 part composition concentrate. The compositions described herein can be readily prepared by simply adding the respective components and mixing until homogenous. Furthermore, the compositions can be readily prepared as single package formulations or multi-component formulations, preferably multi-component formulations, that are mixed at or prior to use. The individual components of the multi-component formulation may be mixed at the tool or in a mixing area / zone such as an in-line mixer or in a storage tank upstream of the tool. It is contemplated that the various components of the multi-component formulation may contain any combination of ingredients / components that when mixed together form the desired composition. It will be understood that the concentration of each component may vary widely in a particular fold of the semi-aqueous composition, i.e., may be more dilute or more concentrated, and that the semi-aqueous composition may variously and alternatively comprise, consist of, or consist essentially of any combination of components consistent with the disclosure herein.

[0051] Thus, in a third aspect, the present invention provides a kit comprising one or more components adapted to form a composition as described herein in one or more containers. The container of the kit should be suitable for storing and transporting the semi-aqueous composition components, for example, a NOWPak® container (Advanced Technology Materials, Danbury, Connecticut, USA). The container or containers containing the composition components preferably include a means for fluid communication for blending and dispensing the components in the container or containers. For example, referring to a NOWPak® container, gas pressure may be applied to the outside of a liner in the container or containers to expel at least a portion of the contents of the liner, thereby providing fluid communication for blending and dispensing. Alternatively, gas pressure may be applied to the head space of a conventional pressurized container, or a pump may be used to provide fluid communication. The system also preferably includes a dispense port for dispensing the blended composition to a process tool.

[0052] The manufacture of liners for the one or more containers can utilize substantially chemically inert, impurity-free, flexible, and resilient polymeric film materials, such as high density polyethylene. Desirable liner materials generally do not require coextrusion or barrier layers, and are processed without any pigments, UV inhibitors, or processing agents that may adversely affect the purity requirements of the components disposed in the liner. Desirable liner materials include films including virgin (additive-free) polyethylene, virgin polytetrafluoroethylene (PTFE), polypropylene, polyurethane, polyvinylidene chloride, polyvinyl chloride, polyacetal, polystyrene, polyacrylonitrile, polybutylene, and the like. Preferred thicknesses of such liner materials range from about 5 mils (0.005 inches) to about 30 mils (0.030 inches), such as 20 mils (0.020 inches) thick.

[0053] With respect to containers for kits, the disclosures of the following patents and patent applications are incorporated herein by reference in their entirety: U.S. Pat. No. 7,188,644, entitled "APPARATUS AND METHOD FOR MINIMIZING THE GENERATION OF PARTICLES IN ULTRAPURE LIQUIDS," U.S. Pat. No. 6,698,619, entitled "RETURNABLE AND REUSABLE, BAG-IN-DRUM FLUID STORAGE AND DISPENSING CONTAINER SYSTEM," and PCT / US 08 / 63276, filed May 9, 2008, entitled "SYSTEMS AND METHODS FOR MATERIAL BLENDING AND DISTRIBUTION."

[0054] The present invention can be further illustrated by the following examples of certain embodiments of the invention, although it will be understood that these examples are included for illustrative purposes only and are not intended to limit the scope of the invention unless specifically stated. EXAMPLES

[0055] The attack of polysilicon by selective silicon nitride etching can be modified by the addition of small amounts of a wide variety of polysilicon corrosion inhibitors. Without these inhibitors, the polysilicon surface experiences high overall erosion rates and uneven erosion resulting in rough films. An example of a selective silicon nitride etch formulation is shown in Example A. It consists of concentrated phosphoric acid with a small amount of 3-aminopropylsilanetriol added to reduce redeposition of dissolved silicon. A small amount of HF is also included to enhance the silicon nitride removal rate.

[0056] A wide variety of compounds have been found to modify polysilicon corrosion behavior (i.e., act as inhibitors) in selective nitride etching (Table 1 shown in Figure 2). The performance of some of these polysilicon corrosion inhibitors is shown in Table 3. Prior to exposure to the selective silicon nitride etching formulation, native oxide was removed using a 0.5 wt% aqueous HF solution for 60 seconds at room temperature and rinsed with flowing deionized water for 2 minutes. Polysilicon loss during a 1 hour exposure at 150°C was used to evaluate the corrosion rate. Galvanic polysilicon corrosion rates were evaluated using structures with polysilicon films in contact with more noble metals and films on both sides in contact with the etching solution.

[0057] Legend: APST: 3-aminopropylsilanetriol DIW: Deionized water Aromox 14D-W970: Tetradecyldimethylamine oxide PSSA: poly(4-styrenesulfonic acid) CAPS: 3-(cyclohexylamino)-1-propanesulfonic acid PAA: poly(acrylic acid) FlexiWet® NF: Low Foaming Fluorosurfactant FlexiWet® NI-M: Water-soluble non-ionic fluorosurfactant Thetawet™ FS-8050: 50% active water-soluble non-ionic surfactant FlexiWet® Q22: Cationic Fluorosurfactant DDBSA: dodecylbenzenesulfonic acid Thetawet™ FS-8150: Non-ionic flurosurfactant Calfax® 6LA-70: 72% active C-6 linear diphenyl oxide disulfonic acid Calfax® DBA-70: 71% active C-12 branched diphenyl oxide disulfonic acid

[0058] Performance data: TIFF2025003967000002.tif69170

[0059] Example A shows the polysilicon corrosion rate of the base formulation, which has the highest polysilicon corrosion rate and approximately 50% higher galvanic corrosion rate. In Examples B-N, tetramethylammonium silicate was used and 45 ppm of dissolved silicon was added to the solution to replicate the typical solution concentration expected after partial etching of silicon nitride in a typical silicon nitride removal process. Example B consists of the base formulation with the addition of dissolved silicon. Both general and galvanic corrosion are slightly reduced. In Examples C-N, a galvanic inhibitor and 45 ppm of dissolved silicon were added to the base formulation. In Examples C, D, E, and F, the corrosion rate is not reduced by the additive, but the removal is more uniform, resulting in a smoother surface. In Examples G-N, the corrosion rate is suppressed.

[0060] The invention has been described in detail with particular reference to certain embodiments thereof, but it will be understood that variations and modifications can be effected within the spirit and scope of the invention.

Claims

1. 1. A method of etching silicon nitride on a microelectronic device substrate, the substrate including a surface including silicon nitride, a surface including silicon oxide, and a surface including polysilicon, the method comprising:

1. An etching composition comprising: a. concentrated phosphoric acid in an amount of at least 60 weight percent based on the total weight of the composition; b. a polysilicon corrosion inhibitor compound; c. an aminoalkylsilanol; d. Optionally, a fluorine compound An etching composition comprising To provide providing a substrate having a surface comprising silicon nitride and a surface comprising polysilicon; contacting the substrate with the composition under conditions effective to etch silicon nitride. Includes.

2. 10. The method of claim 1, wherein the surface comprising polysilicon is in contact with a surface comprising a composition that is electrochemically nobler than silicon.

3. 3. The method of claim 2, wherein said surface comprising a composition more noble than silicon is selected from tungsten silicide, nickel silicide, platinum silicide, and titanium silicide.

4. The fluorine compound is present, and the fluorine compound is HF, ammonium fluoride, tetrafluoroboric acid, hexafluorosilicic acid, tetrabutylammonium tetrafluoroborate, tetra(C １～ C ６ 10. The method of claim 1, wherein the cation is selected from the group consisting of ammonium, alkyl, ammonium salts, and combinations thereof.

5. The method of claim 1 , wherein the fluorine compound is a fluorosurfactant.

6. The method of claim 4 , wherein the fluorine compound is HF.

7. 2. The method of claim 1, wherein the aminoalkylsilanol is selected from 3-aminopropylsilanetriol, N-(6-aminohexyl)aminopropylsilanol, 3-aminopropyltriethoxide, and 3-aminopropyltrimethoxide, and (3-trimethoxysilylpropyl)diethylenetriamine.

8. The method of claim 6 , wherein the aminoalkylsilanol is formed in situ from an aminoalkoxysilane.

9. The polysilicon corrosion inhibitor is a linear and branched C ８ ~C １６ 2. The method of claim 1, wherein the alkylbenzene sulfonic acid is selected from alkylbenzene sulfonic acids.

10. The polysilicon corrosion inhibitor is ６ ~C １６ Alkyldiphenyloxide disulfonic acid, C ６ ~C １６ Alkyldiphenylsulfide disulfonic acid, and C ６ ~C １６ 2. The method of claim 1, wherein the alkyl diphenylamine disulfonic acid is selected from alkyl diphenylamine disulfonic acids.

11. 2. The method of claim 1, wherein the polysilicon corrosion inhibitor is selected from hexyldiphenyloxide disulfonic acid, dodecyldiphenyloxide disulfonic acid, and dodecylbenzene sulfonic acid.

12. The method of claim 1, wherein the substrate is contacted with the composition at a temperature of about 130°C to about 180°C.

13. The composition, a. concentrated phosphoric acid in an amount of at least 60 weight percent, based on the total weight of the composition; b. dodecylbenzenesulfonic acid; c. 3-aminopropylsilanetriol and The method of claim 1 , comprising:

14. The composition, a. concentrated phosphoric acid in an amount of at least 60 weight percent, based on the total weight of the composition; b.C ６ ~C １６ Alkyldiphenyloxide disulfonic acid, C ６ ~C １６ Alkyldiphenylsulfide disulfonic acid, or C ６ ~C １６ Alkyldiphenylamine disulfonic acid, c. 3-aminopropylsilanetriol and The method of claim 1 , comprising:

15. The method of claim 1 further comprising a fluorine compound.

16. 1. A composition comprising: a. concentrated phosphoric acid in an amount of at least 60 weight percent based on the total weight of the composition; b. Linear and branched C ８ ~C １６ Alkylbenzene sulfonic acid, C ６ ~C １６ Alkyldiphenyloxide disulfonic acid, C ６ ~C １６ Alkyldiphenylsulfide disulfonic acid, or C ６ ~C １６ a polysilicon corrosion inhibitor compound selected from alkyldiphenylamine disulfonic acids; c. Aminoalkylsilanol and A composition comprising:

17. 16. The composition of claim 15, wherein the aminoalkylsilanol is selected from 3-aminopropylsilanetriol, N-(6-aminohexyl)aminopropylsilanol, 3-aminopropyltriethoxide, and 3-aminopropyltrimethoxide, and (3-trimethoxysilylpropyl)diethylenetriamine.

18. 16. The composition of claim 15, wherein the polysilicon corrosion inhibitor is selected from hexyldiphenyloxide disulfonic acid, dodecyldiphenyloxide disulfonic acid, and dodecylbenzene sulfonic acid.

19. The composition of claim 15 further comprising a fluorine compound.

20. 20. The composition of claim 18, wherein the fluorine compound is HF.

21. a. concentrated phosphoric acid in an amount of at least 60 weight percent, based on the total weight of the composition; b. dodecylbenzenesulfonic acid; c. 3-aminopropylsilanetriol and The composition of claim 15 comprising:

22. 21. The composition of claim 20 further comprising HF.

23. A kit comprising one or more components a. to d. of claim 1 in one or more containers.

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