Liquid jet head and liquid jet device

Abstract

To provide a liquid jet head where a space for pressure adjustment having a flexible member is formed and which solves a problem where the flexible member is easily peeled from a substrate defining a flow channel.SOLUTION: A liquid jet head 1 includes a first common liquid chamber RC1 for storing a liquid. A plurality of channel substrates include a first channel substrate 21 for defining a part of the first common liquid chamber RC1, a second channel substrate 22, and a first flexible member 71 having flexibility. The first flexible member 71 has a first surface Fz1 and a second surface Fz2 on a side opposite to the first surface Fz1. A compliance space CS1 for absorbing pressure fluctuation in the first common liquid chamber RC1 is arranged between the first channel substrate 21 and the second channel substrate 22. The first surface includes a first region RL1 for defining a part of the first common liquid chamber RC1 and a second region RL2 surrounding the first region RL1. The second surface Fz2 defines a part of the compliance space CS1. The first flexible member 71 is bonded to the first channel substrate 21 in the second region RL2 of the first surface Fz1.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a liquid ejection head and a liquid ejection apparatus. [Background technology]

[0002] Patent document 1 discloses a liquid ejection head including an individual flow path connected to a nozzle that ejects liquid, a supply liquid chamber that supplies liquid to the individual flow path, a recovery liquid chamber that recovers liquid from the individual flow path, and a flexible plate provided between the supply liquid chamber and the recovery liquid chamber for absorbing pressure fluctuations of the liquid in the supply flow path and the recovery flow path. In the liquid ejecting head, the individual flow paths are provided so as to penetrate through a supply liquid chamber forming substrate in which the supply liquid chamber is provided, a recovery liquid chamber forming substrate in which the recovery liquid chamber is provided, and a flexible plate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-88117 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the conventional technology, the individual flow paths are provided to penetrate the supply liquid chamber forming substrate, the recovery liquid chamber forming substrate, and the flexible plate, so that the liquid flowing through the individual flow paths comes into contact with the adhesive that bonds the flexible plate to the supply liquid chamber forming substrate and the adhesive that bonds the flexible plate to the recovery liquid chamber forming substrate, which results in deterioration of the adhesive that bonds the flexible plate to the supply liquid chamber forming substrate, and there is a risk that the flexible plate will peel off from the supply liquid chamber forming substrate or the recovery liquid chamber forming substrate. [Means for solving the problem]

[0005] A liquid ejecting head according to one aspect of the present invention includes a plurality of flow path substrates stacked in a stacking direction to define a flow path, the flow path including a plurality of individual flow paths communicating with each of a plurality of nozzles that eject liquid, and a first common liquid chamber communicating with the plurality of individual flow paths, the plurality of flow path substrates including a first flow path substrate defining a portion of the first common liquid chamber, a second flow path substrate, and a first flexible member having flexibility, the first flexible member having a first surface and a second surface opposite to the first surface, a compliance space for absorbing pressure fluctuations in the first common liquid chamber is disposed between the first flow path substrate and the second flow path substrate, the first surface includes a first region defining a portion of the first common liquid chamber and a second region surrounding the first region, the second surface defines a portion of the compliance space, and the first flexible member is adhered to the first flow path substrate in the second region of the first surface.

[0006] A liquid ejection apparatus according to one aspect of the present invention includes the above-described liquid ejection head, and a liquid storage unit that stores liquid to be supplied to the liquid ejection head. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is an explanatory diagram illustrating an example of a liquid ejection device 100. [Diagram 2] FIG. 2 is an exploded perspective view of the liquid jet head 1. [Diagram 3] FIG. 2 is a cross-sectional view of the liquid jet head 1. [Figure 4] 13 is a perspective view of an example of compliance sheets 71 and 72. [Diagram 5] FIG. 4 is an enlarged cross-sectional view of the vicinity of the piezoelectric element PZq. [Figure 6] 11 is a cross-sectional view of a supply flow passage RD1, a supply flow passage RC1, a part of an individual flow passage RJ1, a discharge flow passage RA1, and a discharge flow passage RB1. [Figure 7] FIG. 4 is an enlarged view of the vicinity of the end portion in the −X direction of the inner circumferential surface IF. [Figure 8] FIG. 4 is an enlarged view of the vicinity of the end portion in the +X direction of the inner circumferential surface IF. [Figure 9]11 is a cross-sectional view of a supply flow passage RD1, a supply flow passage RC1, a part of an individual flow passage RJ1, a discharge flow passage RA1, and a discharge flow passage RB1. [Figure 10] 11 is a cross-sectional view of a supply flow passage RD1, a supply flow passage RC1, a part of an individual flow passage RJ1, a discharge flow passage RA1, and a discharge flow passage RB1. [Figure 11] FIG. 4 is an enlarged view of the vicinity of the end portion in the −X direction of the inner circumferential surface IF. [Figure 12A] FIG. 13 is a diagram showing a method for manufacturing compliance space CS1A. [Figure 12B] FIG. 13 is a diagram showing a method for manufacturing compliance space CS1A. [Figure 12C] FIG. 13 is a diagram showing a method for manufacturing compliance space CS1A. [Figure 12D] FIG. 13 is a diagram showing a method for manufacturing compliance space CS1A. [Figure 12E] FIG. 13 is a diagram showing a method for manufacturing compliance space CS1A. [Figure 13A] FIG. 4 is a diagram showing an example of a first region RL1 and a third region RL3. [Figure 13B] FIG. 4 is a diagram showing an example of a first region RL1 and a third region RL3. [Figure 13C] FIG. 4 is a diagram showing an example of a first region RL1 and a third region RL3. [Figure 14] 11 is a cross-sectional view of a supply flow passage RD1, a supply flow passage RC1, a part of an individual flow passage RJ1, a discharge flow passage RA1, and a discharge flow passage RB1. [Figure 15] 11 is a cross-sectional view of a supply flow passage RD1, a supply flow passage RC1, a part of an individual flow passage RJ1, a discharge flow passage RA1, and a discharge flow passage RB1. [Figure 16] 11 is a cross-sectional view of a supply flow passage RD1, a supply flow passage RC1, a part of an individual flow passage RJ1, a discharge flow passage RA1, and a discharge flow passage RB1. [Figure 17] FIG. 2 is a cross-sectional view of the liquid jet head 1. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, the embodiments for carrying out the present invention will be described with reference to the drawings. However, in each drawing, the dimensions and scale of each part are appropriately different from the actual ones. In addition, since the embodiments described below are preferred specific examples of the present invention, various technically preferable limitations are attached, but the scope of the present invention is not limited to these embodiments unless otherwise specified in the following description to the effect that the present invention is limited.

[0009] 1: First embodiment A liquid ejecting apparatus 100 according to this embodiment will be described below with reference to FIG.

[0010] 1-1: Overview of liquid injection device 1 is an explanatory diagram showing an example of a liquid ejection device 100 according to the present embodiment. The liquid ejection device 100 according to the present embodiment is an inkjet printing device that ejects ink onto a medium PP. The medium PP is typically printing paper, but any printing target such as a resin film or fabric can be used as the medium PP. 1, the liquid ejection device 100 includes a liquid container 93 that stores ink. As the liquid container 93, for example, a cartridge that is detachable from the liquid ejection device 100, a bag-shaped ink pack formed of a flexible film, or an ink tank that can be refilled with ink can be used. A plurality of types of ink with different colors are stored in the liquid container 93.

[0011] As illustrated in FIG. 1, the liquid ejecting apparatus 100 includes a control device 90, a transport mechanism 91, a moving mechanism 92, and a circulation mechanism 94. Of these, the control device 90 includes a processing circuit such as a CPU or FPGA, and a storage circuit such as a semiconductor memory, and controls each element of the liquid ejection device 100. Here, CPU is an abbreviation for Central Processing Unit, and FPGA is an abbreviation for Field Programmable Gate Array. Furthermore, the transport mechanism 91 transports the medium PP in the +Y direction under the control of the control device 90. Note that, hereinafter, the +Y direction and the -Y direction opposite to the +Y direction are collectively referred to as the Y axis direction. Further, under the control of the control device 90, the movement mechanism 92 reciprocates the multiple liquid jet heads 1 in the +X direction and the -X direction, which is the direction opposite to the +X direction. Note that, hereinafter, the +X direction and the -X direction are collectively referred to as the X-axis direction. Here, the +X direction is a direction that intersects with the +Y direction. Typically, the +X direction is a direction that is perpendicular to the +Y direction. The moving mechanism 92 includes a storage case 921 that stores a plurality of liquid ejecting heads 1, and an endless belt 922 to which the storage case 921 is fixed. Note that the liquid container 93 may be stored in the storage case 921 together with the liquid ejecting heads 1. Moreover, under the control of the control device 90, the circulation mechanism 94 supplies the ink stored in the liquid container 93 to a supply flow path RC1 provided in the liquid jet head 1. Furthermore, under the control of the control device 90, the circulation mechanism 94 recovers the ink stored in a discharge flow path RA1 provided in the liquid jet head 1, and returns the recovered ink to the supply flow path RC1. The supply flow path RC1 and the discharge flow path RA1 will be described later with reference to FIGS. 3 and 4.

[0012] As illustrated in FIG. 1, the liquid jet head 1 is supplied with a drive signal Com for driving the liquid jet head 1 and a control signal SI for controlling the liquid jet head 1 from a control device 90. The liquid jet head 1 is driven by the drive signal Com under the control of the control signal SI, and ejects ink in the +Z direction from some or all of the M nozzles N provided in the liquid jet head 1. Here, the value M is a natural number of 2 or more. The +Z direction is a direction intersecting the +X direction and the +Y direction. Typically, the +Z direction is a direction perpendicular to the +X direction and the +Y direction. Hereinafter, the +Z direction and the -Z direction, which is the opposite direction to the +Z direction, may be collectively referred to as the Z-axis direction. The Z-axis direction is an example of a "stacking direction". The nozzle N will be described later with reference to FIGS. The liquid ejection head 1 ejects ink from some or all of the M nozzles N in conjunction with the transportation of the medium PP by the transport mechanism 91 and the reciprocating movement of the liquid ejection head 1 by the movement mechanism 92, and causes the ejected ink to land on the surface of the medium PP, thereby forming a desired image on the surface of the medium PP.

[0013] 1-2: Overview of liquid jet heads 2 to 5, an overview of the liquid jet head 1 will be described. Fig. 2 is an exploded perspective view of the liquid jet head 1. Fig. 3 is a cross-sectional view of the liquid jet head 1 cut parallel to the XZ plane so as to pass through an individual flow path RJ1 described below.

[0014] As illustrated in FIGS. 2 to 4, the liquid jet head 1 includes a nozzle substrate 60, a cover member 61, a communication plate 2, a pressure chamber substrate 3, a vibration plate 4, a storage chamber forming substrate 5, and a wiring substrate 8.

[0015] As illustrated in FIG. 2 and FIG. 3, the nozzle substrate 60 is a plate-like member that is long in the Y-axis direction and extends approximately parallel to the XY plane, and is provided with the nozzle row Ln1. Here, the term "approximately parallel" is a concept that includes a case where the nozzles are completely parallel, as well as a case where the nozzles are considered to be parallel when an error is taken into consideration. Here, the nozzle row Ln1 is a collection of M nozzles N that are provided so as to extend in the Y-axis direction. In addition, in the following, the nozzles N that constitute the nozzle row Ln1 may be referred to as nozzles N1. The nozzle substrate 60 is manufactured by processing a silicon single crystal substrate using a semiconductor manufacturing technique such as etching. However, known materials and manufacturing methods may be arbitrarily adopted for manufacturing the nozzle substrate 60. Also, the nozzles N are through holes provided in the nozzle substrate 60.

[0016] 2 and 3, a communication plate 2 is provided on the -Z side of the nozzle substrate 60. The communication plate 2 is a plate-shaped member that is elongated in the Y-axis direction and extends approximately parallel to the XY plane, and forms an ink flow path. Specifically, the communication plate 2 is formed with a discharge flow passage RA1, a part of the discharge flow passage RB1, an intersection AR1 connecting the discharge flow passage RA1 and the discharge flow passage RB1, and a supply flow passage RC1. Of these, the discharge flow passage RA1 is provided so as to communicate with the discharge flow passage RB1 via the intersection AR1 and extend in the X-axis direction. The discharge flow passage RB1 is provided at an end of the +X side of the discharge flow passage RA1 so as to communicate with the discharge flow passage RA1 via the intersection AR1 and extend in the Z-axis direction. The supply flow passage RC1 is provided so as to communicate with a supply flow passage RD1 described later and extend in the X-axis direction in the -Z direction as viewed from the discharge flow passage RA1. In addition, the communication plate 2 is formed with M connection flow paths RK1 corresponding to the M nozzles N1 one-to-one, M communication flow paths RR1 corresponding to the M nozzles N1 one-to-one, and M nozzle flow paths RN1 corresponding to the M nozzles N one-to-one. Among them, the connection flow path RK1 communicates with the supply flow path RC1 and is provided so as to extend in the Z-axis direction in the -Z direction as viewed from the supply flow path RC1. In addition, the communication flow path RR1 is provided so as to extend in the Z-axis direction in the -X direction as viewed from the connection flow path RK1. In addition, the nozzle flow path RN1 communicates with the discharge flow path RA1 and the communication flow path RR1 together with the flow path R11 and the flow path R12, and is provided so as to extend in the X-axis direction in the +Z direction as viewed from the communication flow path RR1 and the connection flow path RK1. The nozzle flow path RN1 communicates with the nozzle N1 corresponding to the nozzle flow path RN1.

[0017] As illustrated in FIG. 3, the communication plate 2 is formed by stacking the first communication plate 21 and the second communication plate 22 in the Z-axis direction. The first communication plate 21 is stacked on the -Z side with respect to the second communication plate 22. A recess CV1 is provided on a joining surface SF (see FIG. 6) of the first communication plate 21 that is joined to the second communication plate 22 and is located in the +Z direction with respect to the supply flow path RC1 and in the -Z direction with respect to the discharge flow path RA1. The joining surface SF of the first communication plate may be joined to the second communication plate 22 by an adhesive, or may be joined by a joining method by pressure welding without using an adhesive, such as diffusion bonding. An opening OP1 (see FIG. 7) that communicates between the recess CV1 and the supply flow path RC1 is formed on the bottom surface BF of the recess CV1. A compliance sheet 71 is arranged on the -Z side of the recess CV1 so as to close the opening OP1. A compliance sheet 72 is disposed in an opening OP2 (see FIG. 7) on the +Z side of the recess CV1. As a result, the communication plate 2 has a compliance space CS1 between the supply flow path RC1 and the discharge flow path RA1, the boundary surface on the -Z side being defined by the compliance sheet 71, and the boundary surface on the +Z side being defined by the compliance sheet 72. The first communication plate 21 is an example of a "first flow path substrate". The second communication plate 22 is an example of a "second flow path substrate". The compliance sheet 71 is an example of a "first flexible member". The compliance sheet 72 is an example of a "second flexible member". The compliance space CS1 is an example of a "first space". The supply flow path RC1 is an example of a "first common liquid chamber", and the discharge flow path RA1 is an example of a "second common liquid chamber". However, the supply flow path RC1 may be an example of a "second common liquid chamber", and the discharge flow path RA1 may be an example of a "first common liquid chamber". Furthermore, each of the first communication plate 21, the second communication plate 22, the compliance sheet 71, the compliance sheet 72, the pressure chamber substrate 3, the vibration plate 4, the storage chamber forming substrate 5, the nozzle substrate 60, and the cover member 61 is an example of "a plurality of flow path substrates that define a flow path by being stacked in the stacking direction." In other words, members that do not define a flow path in the liquid ejecting head are not "a plurality of flow path substrates that define a flow path by being stacked in the stacking direction."

[0018] Fig. 4 is an example of a perspective view of the compliance sheets 71 and 72. The compliance sheets 71 and 72 are members that are long in the Y-axis direction and extend approximately parallel to the XY plane. In the example shown in Fig. 4, the compliance sheets 71 and 72 have the same shape and are provided at the same position when viewed in the Z-axis direction. However, as described later, the shapes and positions of the compliance sheets 71 and 72 illustrated in Fig. 4 are merely examples and are not limited to the shapes and positions shown in Fig. 4.

[0019] 4, the compliance sheets 71 and 72 are drawn on the +Z side with respect to the communication plate 2, but in reality, the compliance sheets 71 and 72 are incorporated into the communication plate 2 as exemplified in FIG.

[0020] The compliance sheet 71 is made of an elastic material and absorbs pressure fluctuations of the ink in the supply flow path RC1. The compliance sheet 72 is made of an elastic material and absorbs pressure fluctuations of the ink in the discharge flow path RA1. The compliance sheets 71 and 72 are made of a flexible thin material such as polyphenylene sulfide, silicon nitride film, or tantalum oxide film. The compliance sheets 71 and 72 may be made of a metal such as a thin plate of stainless steel. The compliance space CS1 is preferably a space filled with gas and open to the atmosphere. However, the compliance space CS1 may be a closed space as long as a predetermined displacement amount is secured as the displacement amount of the compliance sheets 71 and 72.

[0021] The communicating plate 2 is manufactured by processing a single crystal silicon substrate using semiconductor manufacturing technology, for example. However, any known material or manufacturing method may be used to manufacture the communicating plate 2.

[0022] 2 and 3, a pressure chamber substrate 3 is provided on the -Z side of the communication plate 2. The pressure chamber substrate 3 is a plate-shaped member that is elongated in the Y-axis direction and extends substantially parallel to the XY plane, and has an ink flow path formed therein. Specifically, M pressure chambers CB1 corresponding one-to-one to the M nozzles N1 are formed in the pressure chamber substrate 3. Among these, the pressure chamber CB1 communicates between the connection flow channel RK1 and the communication flow channel RR1, and is provided so as to connect the -Z side end of the connection flow channel RK1 and the -Z side end of the communication flow channel RR1 when viewed in the Y-axis direction, and extend in the X-axis direction. The pressure chamber substrate 3 is manufactured by processing a single crystal silicon substrate using, for example, semiconductor manufacturing technology. However, any known material or manufacturing method may be used to manufacture the pressure chamber substrate 3.

[0023] In the following, the ink flow path that communicates the supply flow path RC1 and the discharge flow path RA1 is referred to as an individual flow path RJ1. That is, the supply flow path RC1 and the discharge flow path RA1 are communicated by M individual flow paths RJ1 that correspond one-to-one to the M nozzles N1. Each individual flow path RJ1 includes a connection flow path RK1 that communicates with the supply flow path RC1, a pressure chamber CB1 that communicates with the connection flow path RK1, a communication flow path RR1 that communicates with the pressure chamber CB1, a nozzle flow path RN1 that communicates with the communication flow path RR1, a flow path R11 that communicates with the nozzle flow path RN1 and is formed in the second communication plate 22, and a flow path R12 that communicates with the flow path R11 and is formed in the second communication plate 22. In this embodiment, the supply flow path RC1 and the discharge flow path RA1 are communicated by M individual flow paths RJ1.

[0024] 2 to 4, a diaphragm 4 is provided on the -Z side of the pressure chamber substrate 3. The diaphragm 4 is a plate-like member that is elongated in the Y-axis direction and extends substantially parallel to the XY plane, and is a member that can vibrate elastically.

[0025] As illustrated in FIGS. 2 to 4, M piezoelectric elements PZ1 are provided on the -Z side of the vibration plate 4 in one-to-one correspondence with the M pressure chambers CB1. Hereinafter, the piezoelectric elements PZ1 are collectively referred to as piezoelectric element PZq. The piezoelectric element PZq is a passive element that deforms in response to a change in potential of the drive signal Com. In other words, the piezoelectric element PZq is an example of an energy conversion element that converts the electrical energy of the drive signal Com into kinetic energy. Note that, below, the suffix "q" may be added to the reference numeral indicating a component or signal of the liquid ejection head 1 that corresponds to the piezoelectric element PZq.

[0026] FIG. 5 is an enlarged cross-sectional view of the vicinity of the piezoelectric element PZq. 5, the piezoelectric element PZq is a laminate in which a piezoelectric body ZMq is interposed between a lower electrode ZDq to which a predetermined reference potential VBS is supplied and an upper electrode ZUq to which a drive signal Com is supplied. The piezoelectric element PZq is, for example, a portion where the lower electrode ZDq, the upper electrode ZUq, and the piezoelectric body ZMq overlap when viewed from the -Z direction. In addition, a pressure chamber CBq is provided in the +Z direction of the piezoelectric element PZq. As described above, the piezoelectric element PZq is driven and deformed in response to the change in potential of the drive signal Com. The diaphragm 4 vibrates in conjunction with the deformation of the piezoelectric element PZq. When the diaphragm 4 vibrates, the pressure in the pressure chamber CBq fluctuates. As the pressure in the pressure chamber CBq fluctuates, the ink filled in the pressure chamber CBq is ejected in the +Z direction from the nozzle Nq via the communication flow path RRq and the nozzle flow path RNq.

[0027] As illustrated in FIG. 2 and FIG. 3, a wiring board 8 is mounted on the surface of the vibration plate 4 on the -Z side. The wiring board 8 is a component for electrically connecting the control device 90 and the liquid jet head 1. For example, a flexible wiring board such as an FPC or an FFC is preferably used as the wiring board 8. Here, FPC is an abbreviation for Flexible Printed Circuit, and FFC is an abbreviation for Flexible Flat Cable. A drive circuit 81 is mounted on the wiring board 8. The drive circuit 81 is an electric circuit that switches whether or not to supply a drive signal Com to the piezoelectric element PZq under the control of a control signal SI. As illustrated in FIG. 5, the drive circuit 81 supplies the drive signal Com to the upper electrode ZUq of the piezoelectric element PZq via a wiring 810. In the following, the drive signal Com supplied to the piezoelectric element PZ1 when ink is ejected from the nozzle N may be referred to as the drive signal Com1.

[0028] 2 and 3, a storage chamber forming substrate 5 is provided on the -Z side of the communication plate 2. The storage chamber forming substrate 5 is a member that is elongated in the Y-axis direction, and has an ink flow path formed therein. Specifically, the reservoir chamber forming substrate 5 is formed with a supply flow path RD1 and a portion of the discharge flow path RB1 that is not included in the communication plate 2. Of these, the supply flow path RD1 communicates with the supply flow path RC1 and is provided so as to extend in the Z-axis direction in the -Z direction as viewed from the supply flow path RC1. The discharge flow path RB1 communicates with the discharge flow path RA1 and is provided so as to extend in the Z-axis direction in the -Z direction as viewed from the discharge flow path RA1. Further, the storage chamber forming substrate 5 is provided with a discharge port 51 communicating with the discharge flow path RB1 and a supply port 52 communicating with the supply flow path RD1. Ink is supplied to the supply flow path RD1 from the liquid container 93 via the supply port 52. Furthermore, the ink stored in the discharge flow path RB1 is collected via the discharge port 51. The reservoir chamber forming substrate 5 is formed, for example, by injection molding of a resin material. However, the reservoir chamber forming substrate 5 can be manufactured using any known material or method.

[0029] In this embodiment, ink supplied from the liquid container 93 to the supply port 52 flows into the supply channel RC1 via the supply channel RD1. Then, a portion of the ink that flows into the supply channel RC1 flows into the pressure chamber CB1 via the connection channel RK1. In addition, a portion of the ink that flows into the pressure chamber CB1 passes through the communication channel RR1, the nozzle channel RN1, the channel R11, the channel R12, the discharge channel RA1, and the discharge channel RB1, and is discharged from the discharge port 51. When the piezoelectric element PZ1 is driven by the drive signal Com1, part of the ink filling the inside of the pressure chamber CB1 passes through the communication flow path RR1 and the nozzle flow path RN1 and is ejected from the nozzle N1.

[0030] 2 and 3, a cover member 61 is provided on the +Z side surface of the communication plate 2 so as to close the discharge flow path RA1. The cover member 61 is made of an elastic material and absorbs pressure fluctuations of the ink in the discharge flow path RA1. The cover member 61 may be a rigid body instead of an elastic material.

[0031] As described above, the liquid jet head 1 according to this embodiment circulates ink from the supply flow path RC1 to the discharge flow path RA1 via the individual flow path RJ1. Therefore, in this embodiment, even if there is a period in which the ink in the pressure chamber CBq is not ejected from the nozzle N, it is possible to prevent the ink from remaining in the pressure chamber CBq and the nozzle flow path RN, etc. from continuing to remain in that state. Therefore, in this embodiment, even if there is a period in which the ink in the pressure chamber CBq is not ejected from the nozzle N1, it is possible to suppress the ink in the pressure chamber CBq from thickening, and it is possible to prevent the occurrence of an ejection abnormality in which the ink cannot be ejected from the nozzle N1 due to the thickening of the ink.

[0032] Furthermore, the liquid jet head 1 according to this embodiment is capable of ejecting ink filled inside the pressure chamber CB1 from the nozzle N1.

[0033] 1-3: Location and composition of compliance space Hereinafter, the relative positional relationship of the compliance space CS1 with respect to the flow path and the configuration of the compliance space CS1 will be described with reference to FIGS.

[0034] 6 is a cross-sectional view of the supply flow passage RD1, the supply flow passage RC1, a part of the individual flow passage RJ1, the discharge flow passage RA1, and the discharge flow passage RB1. In the following, the supply flow passage RC1 and the discharge flow passage RA1 will be mainly described with reference to FIG.

[0035] When viewed from the Y-axis direction, the supply flow path RC1 is defined by a wall surface HCa1, a -Z side wall surface HCb1, and a first region RL1 of a first surface Fz1 which is the -Z side surface of the compliance sheet 71. The wall surface HCa1 is connected to intersect with the first region RL1 of the first surface Fz1. The wall surface HCa1 is a wall surface that defines the outer periphery of the supply flow channel RC1 when viewed in the Z-axis direction, and includes wall surfaces that face each other in the X-axis direction. The wall surface HCb1 is a wall surface that faces the +Z direction. In other words, the wall surface HCb1 is a wall surface whose normal line faces the +Z direction and faces the internal space that defines the flow channel in the liquid jet head 1 in the +Z direction. The first surface Fz1 is a wall surface that faces the -Z direction. In other words, the first surface Fz1 is a wall surface whose normal line faces the -Z direction and faces the internal space in the -Z direction. As described above, pressure fluctuations of the ink flowing through the supply flow channel RC1 are absorbed by the compliance sheet 71 that contacts the ink at the first region RL1 of the first surface Fz1.

[0036] When viewed from the Y-axis direction, the discharge flow path RA1 is defined by a wall surface HAa1 on the -Z side, a wall surface HAa2 which is the inner peripheral surface of an opening penetrating the second communication plate 22 from the wall surface HAa1 to a wall surface HAa3 described below, a third region RL3 of the third surface Fz3 which is the +Z side surface of the compliance sheet 72, and a surface of the cover member 61 facing the -Z direction. The wall surface HAa1 is connected to the wall surface HAa2. The wall surface HAa2 is connected to the third region RL3 of the third surface Fz3. The wall surface HAa1 is located in the +Z direction with respect to the third surface Fz3. The wall surface HAa1 faces the +Z direction. In other words, the normal of the wall surface HAa1 faces the +Z direction and faces the internal space in the +Z direction. As described above, the pressure fluctuation of the ink flowing through the discharge flow path RA1 is absorbed by the compliance sheet 72 that contacts the ink in the third region RL3 of the third surface Fz3.

[0037] The first communication plate 21 is provided with a recess CV1. The recess CV1 is defined by a bottom surface BF and an inner peripheral surface IF. The inner peripheral surface IF extends from the bottom surface BF in the +Z direction. The bottom surface BF faces the +Z direction. The inner peripheral surface IF is an annular surface that defines the outer peripheral surface of the compliance space CS1 when viewed in the Z-axis direction. In this embodiment, the inner peripheral surface IF is composed of two surfaces that face each other in the X-axis direction and extend in the Y-axis direction, and two surfaces (not shown) that face each other in the Y-axis direction and extend in the X-axis direction. In FIG. 7, the surface that faces the +X direction among the two surfaces that extend in the Y-axis direction is illustrated as the inner peripheral surface IF, and in FIG. 8, the surface that faces the -X direction among the two surfaces that extend in the Y-axis direction is illustrated as the inner peripheral surface IF. The bottom surface BF is connected to the wall surface HCa1. An opening OP1 that can communicate with the supply channel RC1 is provided on a bottom surface BF of the recess CV1. The opening OP1 is closed by a compliance sheet 71.

[0038] The compliance space CS1 in this embodiment is defined by the bottom surface BF, the inner circumferential surface IF, the wall surface HAa3, a second surface Fz2 which is the +Z side surface of the compliance sheet 71, and a fourth surface Fz4 which is the -Z side surface of the compliance sheet 72. The second surface Fz2 and the fourth surface Fz4 face the compliance space CS1.

[0039] FIG. 7 is an enlarged view of the vicinity of the end portion in the −X direction of the inner circumferential surface IF. An end portion in the -X direction of the first surface Fz1 of the compliance sheet 71 facing the -Z direction is adhered to the bottom surface BF. The end portion in the -X direction of the compliance sheet 71 is preferably disposed at a predetermined distance from the inner circumferential surface IF. An end portion in the -X direction of the second surface Fz2 of the compliance sheet 72 facing the +Z direction is adhered to the wall surface HAa3. The end portion in the -X direction of the compliance sheet 72 is preferably disposed at a predetermined distance from the inner circumferential surface IF. A gap GP1 is provided between a side surface Fz5 on the -X side of the compliance sheet 71 and the inner circumferential surface IF. As a result, the side surface Fz5 faces the compliance space CS1. The first surface Fz1 on the -Z side of the compliance sheet 71 is composed of a first region RL1 that defines the supply flow path RC1 and a second region RL2 that surrounds the first region RL1. The second region RL2 and the bottom surface BF are bonded by a portion of the adhesive GL1. The remainder of the adhesive GL1 is disposed in the gap GP1. As an example, the adhesive GL1 is preferably an epoxy-based adhesive.

[0040] When the entire area from the supply port 52 to the discharge port 51 is defined as an internal-head flow path, which is a flow path inside the liquid ejection head 1, the side surface Fz5 on the -X side of the compliance sheet 71 is not exposed to the internal-head flow path. As a result, the adhesive GL1 in the vicinity of the side surface Fz5 is not exposed to the ink flowing in the internal-head flow path.

[0041] A gap GP2 is provided between a side surface Fz6 on the -X side of the compliance sheet 72 and the inner circumferential surface IF. As a result, the side surface Fz6 faces the compliance space CS1. A third surface Fz3 on the +Z side of the compliance sheet 72 is composed of a third region RL3 that defines a part of the discharge flow path RA1 and a fourth region RL4 that surrounds the third region RL3. The fourth region RL4 and the wall surface HAa3 are bonded by a part of the adhesive GL2. The remaining part of the adhesive GL2 is disposed in the gap GP2. As an example, the adhesive GL2 is preferably an epoxy-based adhesive.

[0042] In addition, since the compliance sheet 71 of this embodiment is very thin, the dimension in the thickness direction of the side surface Fz5 is very small. Therefore, when the compliance sheet 71 is viewed in a direction perpendicular to the thickness direction of the compliance sheet 71, the compliance sheet 71 actually looks linear, but strictly speaking the thickness of the compliance sheet 71 is not zero, so the side surface Fz5 is illustrated as having a certain thickness. The same applies to the compliance sheet 72 and the side surface Fz6.

[0043] A side surface Fz6 on the -X side of the compliance sheet 72 is not exposed to the flow passage in the head. As a result, the adhesive GL2 in the vicinity of the side surface Fz6 is not exposed to the ink flowing through the flow passage in the head.

[0044] It is preferable that the distance of the gap GP1 in the X-axis direction and the distance of the gap GP2 in the X-axis direction are equal to each other, but the two distances may be different.

[0045] FIG. 8 is an enlarged view of the vicinity of the end portion in the +X direction of the inner circumferential surface IF. 8, a gap GP1 is provided between a side surface Fz5 on the +X side of the compliance sheet 71 and an inner circumferential surface IF corresponding to the outer circumferential surface on the +X side of the compliance space CS1. Similarly, a gap GP2 is provided between a side surface Fz6 on the +X side of the compliance sheet 72 and an inner circumferential surface IF corresponding to the outer circumferential surface on the +X side of the compliance space CS1. 7 and 8, in this embodiment, the configuration near the end of the inner circumferential surface IF in the -X direction and the configuration near the end of the inner circumferential surface IF in the +X direction are arranged between the wall surfaces HCa1 facing each other in the X-axis direction and are in a line-symmetrical relationship with respect to a straight line extending in the Z-axis direction as an axis of symmetry. Therefore, other detailed explanations regarding FIG. 8 will be omitted.

[0046] 8, which is disposed in the -X direction with respect to the compliance sheet 71, and the distance in the X-axis direction with respect to the gap GP1 in FIG. 9, which is disposed in the +X direction with respect to the compliance sheet 71, are preferably equal to each other. However, the two distances may be different. The above distance relationship may also be the same for the compliance sheet 72.

[0047] The first region RL1 and the third region RL3 at least partially overlap when viewed in the Z-axis direction, which is the stacking direction.

[0048] The same is true in the Y-axis direction. Specifically, a gap GP1 or a gap GP2 is provided between the side surface Fz5 on the -Y side of the compliance sheet 71 and the inner peripheral surface IF corresponding to the wall surface on the -Y side of the compliance space CS1, between the side surface Fz5 on the +Y side of the compliance sheet 71 and the inner peripheral surface IF corresponding to the wall surface on the +Y side of the compliance space CS1, between the side surface Fz6 on the -Y side of the compliance sheet 72 and the inner peripheral surface IF corresponding to the wall surface on the -Y side of the compliance space CS1, and between the side surface Fz6 on the +Y side of the compliance sheet 72 and the inner peripheral surface IF corresponding to the wall surface on the +Y side of the compliance space CS1. In other words, when viewed in the Z-axis direction, a gap GP1 is provided between the entire circumference of the side surface Fz5 of the compliance sheet 71 and the entire circumference of the inner peripheral surface IF corresponding to the outer peripheral surface of the compliance space CS1. Similarly, when viewed in the Z-axis direction, a gap GP2 is provided between the entire circumference of the side surface Fz6 of the compliance sheet 72 and the entire circumference of the inner peripheral surface IF corresponding to the outer peripheral surface of the compliance space CS1.

[0049] 9 is a cross-sectional view of the supply flow path RD1, the supply flow path RC1, a portion of the individual flow path RJ1, the discharge flow path RA1, and the discharge flow path RB1 in a liquid jet head 1Z as a reference example. In the liquid jet head 1Z, the compliance sheets 71 and 72 extend in the XY plane so as to define the communication flow path RR1 and the discharge flow path RB1 with the third communication plate 23 in between. The third communication plate 23 is formed with a hole penetrating in the Z-axis direction to define the compliance space CS1, a hole penetrating in the Z-axis direction to define the communication flow path RR1, and a hole penetrating in the Z-axis direction to define the discharge flow path RB1. As a result, around the compliance space CS1, the adhesive bonding the compliance sheet 71 to the first communicating plate 21 and the adhesive bonding the compliance sheet 71 to the third communicating plate 23 are exposed to ink at four points: point CL1 where the compliance sheet 71 intersects with wall surface HCa1, point CL3 where the compliance sheet 71 intersects with wall surface HCa1, point CL5 where the cross section of the compliance sheet 71 is exposed to wall surface HBa1, and point CL7 where the cross section of the compliance sheet 71 is exposed to the wall surface defining the communicating flow path RR1. Similarly, around the compliance space CS1, the adhesive that bonds the compliance sheet 72 to the second communication plate 22 and the adhesive that bonds the compliance sheet 72 to the third communication plate 23 are exposed to ink at four locations around the compliance space CS1: a location CL2 where the compliance sheet 72 intersects with the wall surface HAa2, a location CL4 where the compliance sheet 72 intersects with the wall surface HAa2, a location CL6 where the cross section of the compliance sheet 72 is exposed to the wall surface HAr1, and a location CL8 where the cross section of the compliance sheet 72 is exposed to the wall surface that defines the communication flow path RR1. That is, in the liquid jet head 1Z as a reference example, the adhesive layered on the compliance sheets 71 and 72 is exposed to ink at eight locations, namely, the locations CL1 to CL8. On the other hand, the liquid jet head 1 according to this embodiment does not have the locations CL5 to CL8 in Fig. 10. Therefore, in the liquid jet head 1 according to this embodiment, the compliance sheets 71 and 72 are not easily peeled off from the communication plate 2.

[0050] 6, the present embodiment does not have the locations CL5 to CL8 in FIG. 9. Furthermore, compared to the reference example in which the side surface Fz5 of the compliance sheet 71 and the side surface Fz6 of the compliance sheet 72 are exposed to the communication flow path RR1 and the discharge flow path RB1, the number of locations where the adhesive layered on the compliance sheets 71 and 72 is exposed to the ink is relatively smaller. Therefore, in the liquid jet head 1 according to the present embodiment, the compliance sheets 71 and 72 are not easily peeled off.

[0051] 1-4: Advantages of the First Embodiment The liquid jet head 1 according to the present embodiment includes a plurality of flow path substrates that are stacked in the Z-axis direction, which is the stacking direction, to define a flow path. The above flow path includes a plurality of individual flow paths RJ1 that communicate with each of a plurality of nozzles N1 that eject liquid, and a supply flow path RC1 that communicates with the plurality of individual flow paths RJ1 and stores liquid. The plurality of flow path substrates include a first communication plate 21 that defines a portion of the supply flow path RC1, a second communication plate 22, and a flexible compliance sheet 71. The compliance sheet 71 has a first surface Fz1 and a second surface Fz2 opposite to the first surface Fz1. A compliance space CS1 for absorbing pressure fluctuations in the supply flow path RC1 is disposed between the first communication plate 21 and the second communication plate 22. The first surface Fz1 includes a first region RL1 that defines a portion of the supply flow path RC1, and a second region RL2 that surrounds the first region RL1. The second surface Fz2 defines a part of the compliance space CS1. The compliance sheet 71 is adhered to the first communicating plate 21 in the second region RL2 of the first surface Fz1.

[0052] Therefore, even when a compliance space CS1 is provided between the first communicating plate 21 and the second communicating plate 22, the number of points where the adhesive layer bonding the compliance sheet 71 and the first communicating plate 21 comes into contact with the liquid flowing through the flow path can be reduced compared to the reference example, and by suppressing deterioration of the adhesive due to the liquid, the risk of the compliance sheet 71 peeling off can be reduced.

[0053] Furthermore, in the liquid jet head 1, the side surface Fz5 of the compliance sheet 71 faces the compliance space CS1.

[0054] Therefore, when viewed in the stacking direction, the outer periphery of the compliance sheet 71 is slightly smaller than the outer periphery of the compliance space CS1, which makes it possible to prevent assembly defects due to manufacturing errors.

[0055] Furthermore, in the liquid jet head 1, a gap GP1 exists between the side surface Fz5 of the compliance sheet 71 and an inner circumferential surface IF that corresponds to the outer circumferential surface of the compliance space CS1.

[0056] Therefore, when viewed in the stacking direction, the outer periphery of the compliance sheet 71 is slightly smaller than the outer periphery of the compliance space CS1, which makes it possible to prevent assembly defects due to manufacturing errors.

[0057] In the liquid ejecting head 1, a portion of the adhesive GL1 that bonds the compliance sheet 71 and the first communication plate 21 is disposed in the gap GP1.

[0058] Therefore, by disposing excess adhesive GL1 in the gap GP1, the risk of the adhesive GL1 flowing toward the supply flow path RC1 can be reduced.

[0059] Furthermore, in the liquid jet head 1, the first communication plate 21 has a recess CV1 provided on a joint surface SF with the second communication plate 22. An opening OP1 communicating with the supply flow path RC1 is formed in a bottom surface BF of the recess CV1. The first surface Fz1 of the compliance sheet 71 is adhered to the bottom surface BF of the recess CV1 such that the opening OP1 is blocked by the first region RL1 of the first surface Fz1.

[0060] Therefore, by forming a recess CV1 in the first communication plate 21, it is possible to configure the adhesive GL1 that adheres the compliance sheet 71 to the first communication plate 21 so that the adhesive GL1 does not come into contact with liquid on the side surface Fz5, which is the outer periphery of the compliance sheet 71, without increasing the number of flow path substrates.

[0061] In the liquid jet head 1, the entire surface of the second surface Fz2 faces the compliance space CS1.

[0062] Therefore, a jig can be placed within the compliance space CS1, and the compliance sheet 71 and the first communicating plate 21 can be easily fixed together by heat pressing the compliance sheet 71 against the first communicating plate 21 using the jig.

[0063] In the liquid jet head 1, the above flow paths include discharge flow paths RA1 that communicate with the individual flow paths RJ1. The flow path substrates include a flexible compliance sheet 72. The compliance sheet 72 has a third surface Fz3 and a fourth surface Fz4 opposite to the third surface Fz3. A portion of the discharge flow path RA1 is defined by the second communication plate 22. The third surface Fz3 includes a third region RL3 that defines a portion of the discharge flow path RA1, and a fourth region RL4 that surrounds the third region RL3. The fourth surface Fz4 defines a portion of the compliance space CS1. The compliance sheet 72 is bonded to the second communication plate 22 by the fourth region RL4 of the third surface Fz3.

[0064] Therefore, the reliability of the compliance sheets 71 and 72 corresponding to both the supply flow path RC1 and the discharge flow path RA1 can be improved.

[0065] Furthermore, in the liquid jet head 1, when viewed in the stacking direction, at least a portion of the first region RL1 and at least a portion of the third region RL3 overlap with each other.

[0066] This makes it possible to reduce the size of the liquid jet head 1 in the XY plane. In this embodiment, the entire first region RL1 and the entire third region RL3 overlap with each other.

[0067] 2: Second embodiment Hereinafter, the liquid ejecting apparatus according to the second embodiment will be described with reference to FIGS. 10 to 12E.

[0068] The liquid jet apparatus according to this embodiment includes a liquid jet head 1A instead of the liquid jet head 1 included in the liquid jet apparatus 100 according to the first embodiment. The liquid jet head 1A is different from the liquid jet head 1 in the configuration of the compliance space CS1.

[0069] 2-1: Composition of compliance space 10 is a cross-sectional view of the supply flow path RD1, the supply flow path RC1, a part of the individual flow path RJ1, the discharge flow path RA1, and the discharge flow path RB1. In the following, the compliance space CS1A will be mainly described with reference to FIG.

[0070] The liquid jet head 1A is provided with a compliance space CS1A instead of the compliance space CS1 provided in the liquid jet head 1.

[0071] 10, a frame body 85 is disposed between the compliance sheets 71 and 72 as viewed in the Z-axis direction. As described below, the frame body 85 is configured by bonding a frame body 85A and a frame body 85B with an adhesive GL5. The frame body 85 is disposed without any gap between the compliance sheets 71 and 72 in the Z-axis direction. In addition, in the XY plane, it is preferable that the shape of the outer periphery of the frame body 85 coincides with the shape of the outer periphery of the compliance sheets 71 and 72, but the shape is not limited to this. Frame body 85 has a through hole PN1 penetrating in the Z-axis direction. Through hole PN1 is a rectangular hole located in the center of the XY plane in frame body 85. It is preferable that the position of the periphery of through hole PN1 coincides with the position of the periphery of opening OP1, but the position is not limited to this. The material of the frame 85 is preferably stainless steel (Steel Use Stainless: SUS), but the material need only be rigid and is not limited to stainless steel.

[0072] FIG. 11 is an enlarged view of the vicinity of the end of the inner peripheral surface IF in the -X direction. A gap GP3 is provided between the outer peripheral surface HF2 on the -X side of the frame body 85 and the inner peripheral surface IF. The distance in the X-axis direction of the gap GP3 is preferably equal to at least one of the distance in the X-axis direction of the gap GP1 and the distance in the X-axis direction of the gap GP2, but may be different from both. The inner peripheral surface HF1 on the -X side of the frame body 85 faces the compliance space CS1A. The frame body 85 is bonded to the compliance sheet 71 by a part of the adhesive GL3 laminated on the second surface Fz2 of the compliance sheet 71. The remaining part of the adhesive GL3 provided on the part of the second surface Fz2 facing the through hole PN1 is exposed to the compliance space CS1A. The flexibility of the adhesive GL3 is preferably higher than that of the adhesive GL1. The frame body 85 is bonded to the compliance sheet 72 by a part of the adhesive GL4 laminated on the fourth surface Fz4 of the compliance sheet 72. The remaining portion of the adhesive GL4 provided on the portion of the fourth surface Fz4 facing the through hole PN1 is exposed to the compliance space CS1A. The flexibility of the adhesive GL4 is preferably higher than that of the adhesive GL2. As an example, the adhesives GL3 and GL4 are preferably urethane adhesives. The adhesives GL1 and GL2 are preferably epoxy adhesives. The configurations near the +X-direction end, +Y-direction end, and -Y-direction end of the inner circumferential surface IF are similar to those in FIG. 10, and therefore detailed description thereof will be omitted.

[0073] As described above, the compliance space CS1A is defined by the second surface Fz2, the fourth surface Fz4, and the inner circumferential surface HF1.

[0074] In this embodiment, the compliance sheets 71 and 72 are bonded to the frame 85 as a single unit. As a result, the compliance sheets 71 and 72 can be easily held and moved during the manufacture of the liquid jet head 1. In addition, since the adhesives GL3 and GL4 are highly flexible, they do not impair the vibration absorbing function of the compliance sheets 71 and 72. Furthermore, since the adhesives GL3 and GL4 are open to the compliance space CS1A without coming into contact with the ink, peeling of the compliance sheets 71 and 72 due to contact of the ink with the adhesive layer can be prevented.

[0075] 2-2: Manufacturing method of compliance space 12A to 12E are diagrams illustrating a manufacturing method for the compliance space CS1A. First, as shown in FIG. 12A, adhesive GL4 is transferred to the -Z side surface of film-like compliance sheet 72. Next, as shown in FIG. 12B, a frame 85B is adhered to the -Z side surface of the layer of adhesive GL4. Next, as shown in FIG. 12C, the center portion of frame 85B is removed by wet etching. Finally, as shown in FIG. 12D, a set of frame body 85B, adhesive GL4, and compliance sheet 72 manufactured by the process shown in FIGS. 12A to 12C and a set of frame body 85A, adhesive GL3, and compliance sheet 71 similar to the set are joined together in a symmetrical positional relationship with respect to each other across the XY plane, so that frame body 85A and frame body 85B are integrated. 12E, a single frame body 85 may be adhered to the -Z side surface of the compliance sheet 72 with an adhesive GL4, and the compliance sheet 71 may be adhered to the -Z side surface of the single frame body 85 with an adhesive GL3. As shown in Fig. 14, the adhesive GL4 may not be applied to a portion of the -Z side fourth surface Fz4 of the compliance sheet 72 facing the through hole PN1 of the single frame body 85, and the adhesive GL3 may not be applied to a portion of the +Z side second surface Fz2 of the compliance sheet 71 facing the through hole PN1 of the single frame body 85.

[0076] 2-3: Advantages of the Second Embodiment The liquid jet head 1A according to this embodiment includes a frame 85 having a through-hole PN1 penetrating in the stacking direction. The frame 85 is adhered to the compliance sheet 71 by an adhesive GL3 laminated on the second surface Fz2 of the compliance sheet 71. A portion of the adhesive GL3 laminated on the second surface Fz2 is exposed to the compliance space CS1A.

[0077] This makes it easy to hold and move the compliance sheet 71 during manufacture of the liquid jet head 1. Furthermore, since the adhesive GL3 is open to the compliance space CS1A without contacting the ink, it is possible to prevent peeling of the compliance sheet 71 due to contact of the ink with the adhesive layer.

[0078] Furthermore, in the liquid jet head 1A, the adhesive GL3 laminated on the second surface Fz2 has higher flexibility than the adhesive GL1 that bonds the compliance sheet 71 and the first communication plate 21 together.

[0079] Therefore, the adhesive GL3 has high flexibility and does not impair the vibration absorbing function of the compliance sheet 71.

[0080] In addition, in the liquid jet head having a single frame body 85 shown in FIG. 12E, the frame body 85 has a through hole PN1 penetrating in the stacking direction, and the frame body 85 is attached to the compliance sheet 71 by an adhesive GL3 laminated on the second surface Fz2 of the compliance sheet 71. The head internal flow path includes a discharge flow path RA1 communicating with the multiple individual flow paths RJ1. The multiple flow path substrates include a flexible compliance sheet 72. The compliance sheet 72 has a third surface Fz3 and a fourth surface Fz4 opposite to the third surface Fz3. A portion of the discharge flow path RA1 is defined by the second communication plate 22. The third surface Fz3 includes a third region RL3 that defines a portion of the discharge flow path RA1, and a fourth region RL4 that surrounds the third region RL3. The fourth surface Fz4 defines a portion of the compliance space CS1A. The compliance sheet 72 is adhered to the second communicating plate 22 by the fourth region RL4 of the third surface Fz3. The surface of the frame 85 opposite to the surface to which the compliance sheet 71 is adhered is adhered to the compliance sheet 72 by an adhesive GL4 adhered to the fourth surface Fz4 of the compliance sheet 72.

[0081] Therefore, the compliance sheets 71 and 72 can share the same frame 85 to be adhered thereto.

[0082] 3: Variations The present disclosure is not limited to the above-described embodiments. Specific modified embodiments are exemplified below. Two or more embodiments selected from the following examples may be combined as long as they are not mutually inconsistent.

[0083] 3-1: Variation 1 In the above embodiment, the first region RL1 and the third region RL3 have substantially the same shape and are located at substantially the same position when viewed in the Z-axis direction, so that they entirely overlap each other. However, the first region RL1 and the third region RL3 may have different shapes. Furthermore, the first region RL1 and the third region RL3 may be provided at different positions when viewed in the Z-axis direction. As a result, the center CG1 of the first region RL1 and the center CG3 of the third region RL3 may be located at different positions when viewed in the Z-axis direction.

[0084] 13A to 13C are diagrams showing examples of the first region RL1 and the third region RL3 in this modified example. 13A, the first region RL1 and the third region RL3 have the same shape, but the third region RL3 may be shifted in the +X direction from the first region RL1 when viewed in the Z-axis direction. As a result, the center CG3 of the third region RL3 may be shifted in the +X direction from the center CG1 of the first region RL1 when viewed in the Z-axis direction. Alternatively, as shown in FIG. 13B, the first region RL1 and the third region RL3 may have the same shape, but the third region RL3 may be located at a position further shifted in the +X direction with respect to the first region RL1 when viewed in the Z-axis direction, compared to the example shown in FIG. 13A. As a result, when viewed in the Z-axis direction, the center CG3 of the third region RL3 may be located at a position further shifted in the +X direction than the center CG1 of the first region RL1. In the example shown in FIG. 13A, both the center CG1 and the center CG3 are located in the overlapping portion of the first region RL1 and the third region RL3. On the other hand, in the example shown in FIG. 13B, the center CG1 is located in a region of the first region RL1 other than the overlapping portion. Also, the center CG3 is located in a region of the third region RL3 other than the overlapping portion. 13C, the first region RL1 and the third region RL3 may have different shapes and the +X side edges of both regions may be positioned at the same position, so that the center CG3 of the third region RL3 may be shifted in the +X direction from the center CG1 of the first region RL1 when viewed in the Z-axis direction.

[0085] In addition, in FIGS. 13A to 13C, the "center" may refer to the center of gravity of each region, or may be the geometric center in the X-axis and Y-axis directions.

[0086] In this modification, the center CG1 of the first region RL1 and the center CG3 of the third region RL3 are not overlapped with each other and are located at different positions when viewed in the Z-axis direction. Therefore, by arranging the portions of the opposing compliance sheets 71 and 72 that are most likely to be displaced in a shifted manner, it is possible to prevent the compliance sheets 71 and 72 from coming into contact with each other when displaced, even if the compliance space CS1 is made smaller in the stacking direction.

[0087] 3-2: Variation 2 14 is a cross-sectional view of the supply flow passage RD1, the supply flow passage RC1, a part of the individual flow passage RJ1, the discharge flow passage RA1, and the discharge flow passage RB1 according to this modified example. In the above embodiment, the recess CV1 provided in the first communication plate 21 is used as the compliance space CS1. However, as shown in FIG. 14, the third communication plate 23 may be disposed between the first communication plate 21 and the second communication plate 22 in the Z-axis direction, and the through hole provided in the third communication plate 23 may be used as the compliance space CS1. In this way, the side surface Fz5 of the compliance sheet 71 and the side surface Fz6 of the compliance sheet 72 face the compliance space CS1, and therefore the same effect as in the first embodiment can be obtained.

[0088] 3-3: Variation 3 15 is a cross-sectional view of the supply flow passage RD1, the supply flow passage RC1, a part of the individual flow passage RJ1, the discharge flow passage RA1, and the discharge flow passage RB1 according to this modified example. In the above embodiment, the compliance space CS1 is defined by one recess CV1 and the compliance sheets 71 and 72. However, as shown in FIG. 15, the first communication plate 21 may be provided with two recesses CV3 and CV4 adjacent to each other in the X-axis direction, and the first compliance space CS1B may be formed by disposing the compliance sheet 71 at the opening on the -Z side of the recess CV3 located in the -X direction. At the same time, the second compliance space CS1C may be formed by disposing the compliance sheet 72 at the opening on the +Z side of the recess CV4 located in the +X direction.

[0089] 3-4: Variation 4 16 is a cross-sectional view of the supply flow passage RD1, the supply flow passage RC1, a part of the individual flow passage RJ1, the discharge flow passage RA1, and the discharge flow passage RB1 according to this modified example. In the above embodiment, a single compliance space CS1 is defined by one recess CV1 and the compliance sheets 71 and 72. However, as shown in FIG. 16, a third communication plate 23 may be disposed between the first communication plate 21 and the second communication plate 22 in the Z-axis direction, and the third communication plate 23 may divide the single compliance space CS1 in the Z-axis direction to provide two compliance spaces, a first compliance space CS1D and a second compliance space CS1E.

[0090] 3-5: Variation 5 17 is a cross-sectional view of the liquid jet head 1 according to this modified example, cut parallel to the XZ plane so as to pass through the individual flow path RJ1. In the above embodiment, for example as shown in FIG. 2, the bottom surface of the liquid jet head 1 is configured such that the lid member 61 is disposed on the +X side of the nozzle substrate 60. However, as shown in FIG. 17, the lid member 61 may not be disposed on the bottom surface of the liquid jet head 1, and the entire bottom surface may be the nozzle substrate 60. In this modified example, the pressure fluctuation in the discharge flow path RA1 is absorbed by the compliance space CS1, so that the entire bottom surface of the liquid jet head 1 can be the nozzle substrate 60. [Explanation of symbols]

[0091] Reference Signs List 1, 1A, 1Z...liquid ejection head, 2...communication plate, 3...pressure chamber substrate, 4...vibration plate, 5...storage chamber forming substrate, 8...wiring substrate, 21...first communication plate, 22...second communication plate, 23...third communication plate, 51...discharge port, 52...supply port, 60...nozzle substrate, 61...cover member, 71, 72...compliance sheet, 81...drive circuit, 85, 85A, 85B...frame, 100...liquid ejection device, 810...wiring, 921...storage case, 922...endless belt, BF...bottom surface, CG1, CG3...center, CS1, CS 1A...compliance space, CV1, CV3, CV4...recess, Fz1...first surface, Fz2...second surface, Fz3...third surface, Fz4...fourth surface, Fz5, Fz6...side surface, GL1, GL2, GL3, GL4, GL5...adhesive, GP1, GP2, GP3...gap, HF2...outer periphery, N, N1, Nq...nozzle, OP1, OP2...opening, PN1...through hole, R11, R12...flow path, RJ1...individual flow path, RL1...first region, RL2...second region, RL3...third region, RL4...fourth region, SF...joint surface

Claims

1. A plurality of flow path substrates are stacked in a stacking direction to define a flow path, The flow path is a plurality of individual flow paths each communicating with a plurality of nozzles for ejecting liquid; a first common liquid chamber communicating with the plurality of individual flow paths; The plurality of flow path substrates include a first flow path substrate that defines a portion of the first common liquid chamber; A second flow path substrate; a first flexible member having flexibility; The first flexible member has a first surface and a second surface opposite the first surface, a compliance space for absorbing pressure fluctuations in the first common liquid chamber is disposed between the first flow path substrate and the second flow path substrate; the first surface includes a first region that defines a portion of the first common liquid chamber and a second region that surrounds the first region; the second surface defines a portion of the compliance space; the first flexible member is bonded to the first flow path substrate in the second region of the first surface; A liquid jet head comprising:

2. A side surface of the first flexible member faces the compliance space. The liquid jet head according to claim 1 .

3. a gap exists between the side surface of the first flexible member and an outer peripheral surface of the compliance space; The liquid jet head according to claim 1 .

4. a part of the adhesive that bonds the first flexible member and the first flow path substrate is disposed in the gap; The liquid jet head according to claim 3 .

5. the first flow path substrate has a recess provided on a surface to be joined to the second flow path substrate, an opening communicating with the first common liquid chamber is formed in a bottom surface of the recess; the first surface of the first flexible member is adhered to a bottom surface of the recess so as to close the opening with the first region of the first surface; The liquid jet head according to claim 1 .

6. The entire second surface faces the compliance space. The liquid jet head according to claim 1 .

7. the flow path includes a second common liquid chamber communicating with the plurality of individual flow paths; The plurality of flow path substrates include a second flexible member having flexibility, the second flexible member has a third surface and a fourth surface opposite the third surface, a portion of the second common liquid chamber is defined by the second flow path substrate; the third surface includes a third region that defines a portion of the second common liquid chamber and a fourth region that surrounds the third region; the fourth surface defines a portion of the compliance space; the second flexible member is adhered to the second flow path substrate by the fourth region of the third surface; The liquid jet head according to claim 1 .

8. When viewed in the stacking direction, at least a portion of the first region and at least a portion of the third region overlap with each other. The liquid jet head according to claim 7 .

9. When viewed in the stacking direction, a center of the first region and a center of the third region do not overlap. The liquid jet head according to claim 8 .

10. A frame body having a through hole penetrating in the stacking direction, the frame is bonded to the first flexible member by an adhesive layered on the second surface of the first flexible member; A portion of the adhesive laminated on the second surface is exposed to the compliance space. The liquid jet head according to claim 1 .

11. the adhesive layered on the second surface is softer than the adhesive layer bonding the first flexible member and the first flow path substrate; The liquid jet head according to claim 10 .

12. A frame body having a through hole penetrating in the stacking direction, the frame is bonded to the first flexible member by an adhesive layered on the second surface of the first flexible member; the flow path includes a second common liquid chamber communicating with the plurality of individual flow paths; The plurality of flow path substrates include a second flexible member having flexibility, the second flexible member has a third surface and a fourth surface opposite the third surface, a portion of the second common liquid chamber is defined by the second flow path substrate; the third surface includes a third region that defines a portion of the second common liquid chamber and a fourth region that surrounds the third region; the fourth surface defines a portion of the compliance space; the second flexible member is bonded to the second flow path substrate by the fourth region of the third surface, a surface of the frame opposite to the surface to which the first flexible member is adhered is adhered to the second flexible member by an adhesive laminated on the fourth surface of the second flexible member; The liquid jet head according to claim 1 .

13. A liquid jet head according to any one of claims 1 to 12, a liquid storage section configured to store a liquid to be supplied to the liquid jet head; A liquid ejection apparatus comprising:

Images