Actuator device

Abstract

To provide an actuator device that can suppress deterioration of wiring provided at a connection part.SOLUTION: An actuator device comprises: a support part; a movable part; a first connection part which connects the movable part to the support part on a prescribed axis so that the movable part can oscillate around the axis; a first wiring provided at the first connection part; a second wiring provided at the movable part; a first insulation layer having a first opening that exposes a surface on a side opposite to the movable part at a first connection portion of one wiring of the first wiring and the second wiring that is positioned at the movable part; and a second insulation layer which covers the first wiring and the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection portion at the first opening, and a region of the surface of the insulation layer on a side opposite to movable part that corresponds to a corner of the other wiring of the first wiring and the second wiring convexly curves toward the opposite side of the movable part.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to an actuator device configured as, for example, a MEMS (Micro Electro Mechanical Systems) device. [Background technology]

[0002] As a MEMS device, an actuator device is known that includes a support part, a movable part, a connecting part that connects the movable part to the support part on an axis so that the movable part can swing around a predetermined axis, and wiring provided on the connecting part and the support part. In such an actuator device, for example, the movable part may swing at high speed at its resonance frequency level (several KHz to several tens of KHz). In such a case, metal fatigue may occur in the wiring on the connecting part, which may lead to deterioration of characteristics, breakage, etc.

[0003] In order to solve the problems described above, a technology has been proposed in which a first wiring made of a high-rigidity metal material is provided on a connecting portion, and the first wiring and a second wiring made of a low-rigidity metal material are electrically connected to each other in a low-stress region on a support portion (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] U.S. Patent No. 8,218,218 Summary of the Invention [Problem to be solved by the invention]

[0005] The inventor discovered that by positioning the electrical connection position between the first wiring and the second wiring on the support portion, and by devising the electrical connection structure between the first wiring and the second wiring, deterioration of the connecting portion and the wiring provided on the support portion can be further suppressed.

[0006] An object of the present invention is to provide an actuator device capable of suppressing deterioration of wiring provided on a connecting portion and a supporting portion. [Means for solving the problem]

[0007] The actuator device of the present invention comprises a support portion, a movable portion, a connecting portion that connects the movable portion to the support portion on an axis so that the movable portion can swing around a predetermined axis, a first wiring provided on the connecting portion, a second wiring provided on the support portion, and an insulating layer having a first opening that exposes a surface opposite to the support portion at a first connection portion of one of the first wiring and the second wiring that is located on the support portion and covering a corner of the first connection portion, wherein a first metal material constituting the first wiring has a higher rigidity than a second metal material constituting the second wiring, and the other of the first wiring and the second wiring is connected to the surface of the first connection portion at the first opening.

[0008] In this actuator device, the first metal material constituting the first wiring provided on the connecting portion is more rigid than the second metal material constituting the second wiring provided on the support portion. This suppresses deterioration of the first wiring provided on the connecting portion. At this time, deformation (warping, etc.) of the support portion caused by the wiring provided on the connecting portion and the support portion being entirely made of a highly rigid metal material is also suppressed. In addition, the first wiring and the second wiring are connected to each other at a first connection portion located on the support portion. This reduces the stress acting on the first connection portion, thereby suppressing deterioration of the first connection portion. Furthermore, the corner of the first connection portion is covered by the insulating layer, and the first wiring and the second wiring are connected to each other at the surface of the support portion opposite the first connection portion exposed by the first opening in the insulating layer. This reduces the stress acting from the first wiring to the second wiring by the insulating layer, thereby suppressing deterioration of the second wiring made of the second metal material having a lower rigidity than the first metal material. Therefore, this actuator device can suppress deterioration of the wiring provided on the connecting portion and the support portion.

[0009] In the actuator device of the present invention, the first connection portion may be spaced a predetermined distance from the axis. With this configuration, it is possible to reduce stress acting on the first connection portion while ensuring an area for providing other components on the support portion.

[0010] In the actuator device of the present invention, the distance may be greater than half the minimum width of the coupling portion. With this configuration, it is possible to further reduce the stress acting on the first connection portion while ensuring an area for providing other components on the support portion.

[0011] In the actuator device of the present invention, the cross-sectional area of ​​the first wire may be larger than the cross-sectional area of ​​the second wire. With this configuration, even if the resistivity of the first metal material is higher than the resistivity of the second metal material, an increase in the resistance value of the first wire can be suppressed.

[0012] In the actuator device of the present invention, the width of the first wire may be greater than the width of the second wire. With this configuration, it is possible to ensure the cross-sectional area of ​​the first wire and suppress an increase in the resistance value of the first wire while suppressing interference with twisting of the coupling portion.

[0013] In the actuator device of the present invention, the first opening may be away from a corner of the first connection portion. With this configuration, it is possible to reliably reduce the stress acting from the first wiring to the second wiring.

[0014] In the actuator device of the present invention, a region of the surface of the insulating layer opposite the support portion that corresponds to the corner of the first connection portion may be curved in a convex shape toward the opposite side of the support portion. With this configuration, it is possible to further reduce the stress acting from the first wiring to the second wiring.

[0015] The actuator device of the present invention may further include a coil provided on the movable part, a magnetic field generating unit that applies a magnetic field to the coil, and a third wiring provided on the movable part and electrically connected to the coil, the insulating layer having a second opening that exposes a surface of one of the first wiring and the third wiring on the opposite side to the movable part at a second connection part located on the movable part and covering a corner of the second connection part, the first metal material being higher in rigidity than the third metal material constituting the third wiring, and the other of the first wiring and the third wiring being connected to the surface of the second connection part at the second opening. With this configuration, deterioration of the connecting part and the wiring provided on the movable part can be suppressed.

[0016] The actuator device of the present invention may further include a frame portion supporting the support portion and the movable portion, and the support portion may be connected to the frame portion so as to be swingable around an axis line intersecting the axis line. With this configuration, the movable portion can be swung around each of the two axes intersecting each other.

[0017] The actuator device of the present invention may further include a mirror provided on the movable portion. With this configuration, the mirror can be swung about an axis and used for light scanning, etc. Effect of the Invention

[0018] According to the present invention, deterioration of the wiring provided on the connecting portion and the supporting portion can be suppressed. [Brief description of the drawings]

[0019] [Figure 1] 1 is a perspective view of an actuator device according to an embodiment of the present invention; [Diagram 2] 2 is a plan view of a circuit configuration of the actuator device of FIG. 1. [Diagram 3] FIG. 3 is a partially enlarged view of FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Diagram 5] 4 is a cross-sectional view taken along line VV in FIG. 3. [Figure 6]13 is a cross-sectional view of a first connection portion of an actuator device according to a first modified example. FIG. [Figure 7] 13 is a cross-sectional view of a first connection portion of an actuator device according to a second modified example. FIG. [Figure 8] FIG. 13 is a partial enlarged view of an actuator device according to a third modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the following description, the same or corresponding elements are designated by the same reference numerals, and duplicated description will be omitted.

[0021] 1 and 2, the actuator device 1 includes a mirror 2, a magnetic field generating unit 3, a frame unit 4, a support unit 5, a movable unit 6, a pair of connecting units 7, and a pair of connecting units 8. The actuator device 1 is configured as a MEMS device that oscillates the mirror 2 about a first axis X1 and a second axis X2 that are perpendicular to each other. Such an actuator device 1 is used, for example, in an optical switch for optical communication, an optical scanner, or the like.

[0022] The mirror 2 is a light reflecting film made of a metal film. The mirror 2 has a circular shape in a plan view (when viewed from a direction perpendicular to the plane on which at least the support portion 5, the movable portion 6, and the pair of connecting portions 7 are arranged). The metal material constituting the mirror 2 is, for example, aluminum (Al), gold (Au), silver (Ag), or the like.

[0023] The magnetic field generating unit 3 is a rectangular flat plate having a pair of main surfaces. The magnetic field generating unit 3 applies a magnetic field to a coil 11 provided on the support unit 5 and a coil 12 provided on the movable unit 6 (the coils 11 and 12 will be described later). The magnetic field generating unit 3 is composed of, for example, a permanent magnet. The magnetic poles in the magnetic field generating unit 3 are arranged in a Halbach array, for example.

[0024] The frame 4 is a flat frame body having a rectangular shape in a plan view. The frame 4 is disposed on one of the main surfaces of the magnetic field generating unit 3. The frame 4 supports the support unit 5, the movable unit 6, the mirror 2, and the like via a pair of connecting units 7. Each connecting unit 7 connects the support unit 5 to the frame 4 on the first axis X1 so that the support unit 5 can swing around the first axis X1. In other words, each connecting unit 7 functions as a torsion bar. Each connecting unit 7 has a serpentine shape in a plan view to improve strength and facilitate adjustment of the torsional spring constant.

[0025] The support unit 5 is a flat frame body having a rectangular shape in a plan view, and is located inside the frame unit 4. The support unit 5 is disposed so as to face one main surface of the magnetic field generating unit 3 and to be spaced apart from the one main surface of the magnetic field generating unit 3. The support unit 5 supports the movable unit 6, the mirror 2, etc. via a pair of connecting units 8. Each connecting unit 8 connects the movable unit 6 to the support unit 5 on the second axis X2 so that the movable unit 6 can swing around the second axis X2. In other words, each connecting unit 8 functions as a torsion bar.

[0026] As shown in FIG. 3, each of the connecting parts 8 is a flat plate-like member having a substantially rectangular shape in a plan view, and extends along the second axis X2. The end 8a of each of the connecting parts 8 on the movable part 6 side increases in width as it approaches the movable part 6. Here, the width of the connecting part 8 refers to the length of the connecting part 8 in a direction perpendicular to the second axis X2 in a plan view. When the connecting part 8 is expanded at least at one end and connected to the support part 5 or the movable part 6, the connecting part 8 is, for example, a region whose width is 1.5 times the minimum width W0. In FIG. 3, the boundary B between the connecting part 8 and the support part 5 and the boundary B between the connecting part 8 and the movable part 6 are indicated by two-dot chain lines. The connecting part 8 may be a region in which the stress acting when the movable part 6 swings relative to the support part 5 is 2 / 3 times the maximum stress.

[0027] 1 and 2, the movable part 6 is a flat frame body having a rectangular shape in a plan view, and is located inside the support part 5. The movable part 6 is disposed so as to face one main surface of the magnetic field generating part 3 and to be spaced apart from the one main surface of the magnetic field generating part 3. A placement part 9 having a circular shape in a plan view is provided inside the movable part 6. The mirror 2 is disposed on the placement part 9. In other words, the mirror 2 is provided on the movable part 6. The frame part 4, the support part 5, the movable part 6, the pair of connecting parts 7, and the pair of connecting parts 8 are integrally formed from, for example, silicon (Si).

[0028] As shown in Fig. 2, the actuator device 1 further includes a coil 11 provided on the support portion 5 and a coil 12 provided on the movable portion 6. The coil 11 is embedded in the support portion 5, and the coil 12 is embedded in the movable portion 6. Each of the coils 11, 12 is made of a metal material such as copper (Cu). Note that, in Fig. 2, each wiring is shown by a solid line for ease of understanding, but each wiring such as the coils 11, 12 is actually covered with an insulating layer 52 and / or an insulating layer 53, which will be described later.

[0029] The coil 11 is wound in a spiral shape in plan view. One end of the wiring 14a is electrically connected to the inner end of the coil 11. One end of the wiring 14b is electrically connected to the outer end of the coil 11. Each of the wirings 14a, 14b is made of a metal material such as aluminum. Each of the wirings 14a, 14b is provided on one of the connecting parts 7 and extends from the support part 5 to the frame part 4. The other end of the wiring 14a is electrically connected to an electrode 15a provided on the support part 5, and the other end of the wiring 14b is electrically connected to an electrode 15b provided on the support part 5. Each of the electrodes 15a, 15b is electrically connected to a control circuit or the like. The wiring 14a crosses the coil 11 three-dimensionally so as to pass above the coil 11.

[0030] The coil 12 is wound in a spiral shape in plan view. One end of the wiring 16a is electrically connected to the inner end of the coil 12. One end of the wiring 16b is electrically connected to the outer end of the coil 12. Each of the wirings 16a and 16b is provided on the pair of connecting parts 8, the support part 5, and the other connecting part 7, and extends from the movable part 6 to the frame part 4. The other end of the wiring 16a is electrically connected to the electrode 17a provided on the support part 5, and the other end of the wiring 16b is electrically connected to the electrode 17b provided on the support part 5. Each of the electrodes 17a and 17b is electrically connected to a control circuit or the like. The wiring 16a crosses the coil 12 three-dimensionally so as to pass above the coil 12.

[0031] Each of the wirings 16a, 16b has a first wiring 21 provided on each connecting portion 8, a second wiring 31 provided on the support portion 5, and a third wiring 41 provided on the movable portion 6. Hereinafter, the configurations of the first wiring 21, the second wiring 31, and the third wiring 41 in the vicinity of one connecting portion 8 will be described with reference to Figs. 3, 4, and 5. The configurations of the first wiring 21, etc. in the vicinity of the other connecting portion 8 are similar to the configurations of the first wiring 21, etc. in the vicinity of one connecting portion 8, and therefore the description thereof will be omitted. Note that an insulating layer 52 (see Figs. 4 and 5) described later is omitted in Fig. 3.

[0032] The first wiring 21 is made of a first metal material. The first wiring 21 is provided over the support 5, the connecting portion 8, and the movable portion 6. The first wiring 21 has a first portion 22, a second portion 23, and a third portion 24. The first portion 22 extends along the second axis X2 on the support 5, the connecting portion 8, and the movable portion 6. The second portion 23 extends from the end of the first portion 22 on the support 5 side to the other connecting portion 7 side on the support 5. The third portion 24 extends from the end of the first portion 22 on the movable portion 6 side to one connecting portion 7 side on the movable portion 6. The extending direction of the first portion 22 and the extending direction of the second portion 23 are mutually perpendicular, and the extending direction of the first portion 22 and the extending direction of the third portion 24 are mutually perpendicular.

[0033] The first wiring 21 is electrically connected to the second wiring 31 at a first connection portion 25 located at an end on the support portion 5. The first wiring 21 is electrically connected to the third wiring 41 at a second connection portion 26 located at an end on the movable portion 6. The first connection portion 25 is a predetermined distance D1 away from the second axis X2. The distance D1 is greater than 1 / 2 times the minimum width W0 of the connecting portion 8. The second connection portion 26 is a predetermined distance D2 away from the second axis X2. The distance D2 is greater than 1 / 2 times the minimum width W0 of the connecting portion 8. The first portion 22, the second portion 23, and the third portion 24 have the same width. The width W1 of the first wiring 21 is 1 / 2 times or more the minimum width W0 of the connecting portion 8, and in this example, is 2 / 3 times or more. Here, the width W1 of the first wiring 21 refers to the length of the first wiring 21 in a direction perpendicular to the extension direction of the first wiring 21 in a plan view. With respect to the first portion 22, the width W1 refers to the length of the first portion 22 in a direction perpendicular to the second axis X2 in a plan view. The width W1 of the first wiring 21 is, for example, about 50 to 100 μm.

[0034] The second wiring 31 is made of a second metal material. One end of the second wiring 31 is electrically connected to the first wiring 21. The other end of the second wiring 31 is electrically connected to the electrode 17a. One end of the second wiring 31 is provided with a widened portion 32 that is wider than other portions. The second wiring 31 is electrically connected to the first connection portion 25 of the first wiring 21 at the widened portion 32.

[0035] The third wiring 41 is made of a third metal material. One end of the third wiring 41 is electrically connected to the first wiring 21. The other end of the third wiring 41 is electrically connected to the coil 12. One end of the third wiring 41 is provided with a widened portion 42 that is wider than other portions. The third wiring 41 is electrically connected to the second connection portion 26 of the first wiring 21 at the widened portion 42.

[0036] The first metal material constituting the first wiring 21 has a higher rigidity than the second metal material constituting the second wiring 31. The first metal material constituting the first wiring 21 has a higher rigidity than the third metal material constituting the third wiring 41. In other words, the second metal material constituting the second wiring 31 has a lower rigidity than the first metal material constituting the first wiring 21. The third metal material constituting the third wiring 41 has a lower rigidity than the first metal material constituting the first wiring 21. Examples of combinations of the first metal material and the second metal material include a combination of tungsten (W) (first metal material) and aluminum (second metal material), a combination of tungsten (first metal material) and copper (second metal material), and a combination of tungsten (first metal material) and gold (second metal material). Examples of combinations of the first metal material and the third metal material include a combination of tungsten (W) (first metal material) and aluminum (third metal material), a combination of tungsten (first metal material) and copper (third metal material), a combination of tungsten (first metal material) and gold (third metal material), etc. The first metal material may be an aluminum alloy (such as AL-Cu), nickel (Ni), platinum (Pt), etc.

[0037] In the actuator device 1, the width W1 of the first wiring 21 is larger than each of the width W2 of the second wiring 31 and the width W3 of the third wiring 41. The thickness of the first wiring 21 is equal to each of the thickness of the second wiring 31 and the thickness of the third wiring 41. Therefore, the cross-sectional area of ​​the first wiring 21 is larger than each of the cross-sectional areas of the second wiring 31 and the third wiring 41. Here, the width W2 of the second wiring 31 refers to the length of the second wiring 31 (excluding the widened portion 32) in a direction perpendicular to the extension direction of the second wiring 31 in a plan view. The width W3 of the third wiring 41 refers to the length of the third wiring 41 (excluding the widened portion 42) in a direction perpendicular to the extension direction of the third wiring 41 in a plan view. The cross-sectional area of ​​the first wiring 21 refers to the area of ​​a cross section perpendicular to the extension direction of the first wiring 21. The cross-sectional area of ​​the second wiring 31 refers to the area of ​​a cross section perpendicular to the extension direction of the second wiring 31. The cross-sectional area of ​​the third wiring 41 refers to the area of ​​a cross section perpendicular to the extension direction of the third wiring 41. The width of the second wiring 31 is, for example, about 5 to 10 μm.

[0038] 4, the actuator device 1 further includes insulating layers 51, 52, and 53. Each of the insulating layers 51, 52, and 53 is made of, for example, a silicon oxide film (SiO 2 ).

[0039] The insulating layer 51 is provided on the surfaces of the frame portion 4, the support portion 5, the movable portion 6, the pair of connecting portions 7, and the pair of connecting portions 8. The first wiring 21 is provided on the insulating layer 51. That is, the first wiring 21 is provided on the support portion 5 with the insulating layer 51 interposed therebetween.

[0040] The insulating layer 52 is provided on the insulating layer 51 so as to cover the first wiring 21. The insulating layer 52 is provided over the frame 4, the support 5, the movable portion 6, the pair of connecting portions 7, and the pair of connecting portions 8. The insulating layer 52 has a first opening 52a that exposes a surface 25a of the first connecting portion 25 opposite the support 5. The first opening 52a is a hole having a circular shape in a plan view. The first opening 52a is a predetermined distance away from the corner 25b of the first connecting portion 25. The insulating layer 52 covers the corner 25b of the first connecting portion 25. A region 53d corresponding to the corner 25b of the surface of the insulating layer 52 opposite the support 5 is curved in a convex shape toward the opposite side of the support 5. Here, the corner 25b of the first connecting portion 25 refers to a portion along the outer edge of the surface 25a of the first connecting portion 25 (a portion where at least two surfaces intersect in the first connecting portion 25).

[0041] The second wiring 31 is provided on the insulating layer 52. That is, the second wiring 31 is provided on the support portion 5 via the insulating layers 51 and 52. The widened portion 32 of the second wiring 31 rides on the first connection portion 25 so as to cover the first opening 52a. A part 32a of the widened portion 32 is disposed in the first opening 52a and is connected to the surface 25a of the first connection portion 25 at the first opening 52a. The widened portion 32 has a recess 32b at a position corresponding to the first opening 52a on the surface opposite to the support portion 5. The recess 32b is formed by the part 32a of the widened portion 32 entering the first opening 52a when the second wiring 31 is formed.

[0042] The electrical connection structure between the first wiring 21 and the third wiring 41 is the same as the electrical connection structure between the first wiring 21 and the second wiring 31 described above. That is, as shown in FIG. 3, the insulating layer 52 has a second opening 52b that exposes the surface 26a of the second connection portion 26 opposite the movable portion 6. The second opening 52b is a hole having a circular shape in a plan view. The second opening 52b is a predetermined distance away from the corner 26b of the second connection portion 26. The insulating layer 52 covers the corner 26b of the second connection portion 26. The region of the surface of the insulating layer 52 opposite the movable portion 6 that corresponds to the corner 26b is curved in a convex shape toward the opposite side of the movable portion 6. Here, the corner 26b of the second connection portion 26 refers to a portion along the outer edge of the surface 26a of the second connection portion 26 (a portion where at least two surfaces intersect in the second connection portion 26).

[0043] The third wiring 41 is provided on the insulating layer 52. That is, the third wiring 41 is provided on the movable part 6 via the insulating layers 51 and 52. The widened part 42 of the third wiring 41 rides up on the second connection part 26 so as to cover the second opening 52b. A part of the widened part 42 is disposed in the second opening 52b and is connected to the surface 26a of the second connection part 26 at the second opening 52b. The widened part 42 has a recess at a position corresponding to the second opening 52b on the surface opposite to the support part 5. The recess is formed by a part of the widened part 42 entering the second opening 52b when the third wiring 41 is formed.

[0044] The insulating layer 53 is provided on the insulating layer 52 so as to cover the second wiring 31 and the third wiring 41. The insulating layer 53 is provided over the frame portion 4, the support portion 5, the movable portion 6, the pair of connecting portions 7, and the pair of connecting portions 8. The insulating layer 53 has a recess 53a at a position corresponding to the first opening 52a on the surface opposite the support portion 5. The recess 53a is formed by a part of the insulating layer 53 entering the recess 32b when the insulating layer 53 is formed. The insulating layer 53 has a recess at a position corresponding to the second opening 52b on the surface opposite the support portion 5. The recess of the insulating layer 53 is formed by a part of the insulating layer 53 entering the recess of the widening portion 42 when the insulating layer 53 is formed.

[0045] As shown in FIG. 5, the movable part 6 is provided with a groove 55 having a shape corresponding to the coil 12. An insulating layer 51 is provided on the inner surface of the groove 55. A seed layer 56 is provided on the insulating layer 51 in the groove 55. The seed layer 56 is made of, for example, titanium nitride (TiN). The coil 12 is disposed in the groove 55 via the insulating layer 51 and the seed layer 56. The coil 12 is formed by, for example, embedding a metal material such as copper in the groove 55 by a damascene method. The insulating layer 52 is provided so as to cover the coil 12 disposed in the groove 55. The third wiring 41 is electrically connected to the coil 12 through an opening provided in the insulating layer 52 so as to expose the inner end of the coil 12.

[0046] In the process of forming the coil 12, the groove 13 is formed along the boundary between the surface of the coil 12 on the insulating layer 52 side and the seed layer 56. The insulating layer 52 has a groove 52c at a position corresponding to the groove 13 on the surface opposite the movable part 6. The groove 52c is formed by a part of the insulating layer 52 entering the groove 13 when the insulating layer 52 is formed. The third wiring 41 has a groove 41a at a position corresponding to the groove 12a on the surface opposite the movable part 6. The groove 41a is formed by a part of the third wiring 41 entering the groove 52c when the third wiring 41 is formed. The insulating layer 53 has a groove 53b at a position corresponding to the groove 12a on the surface opposite the movable part 6. The groove 53b is formed by a part of the insulating layer 53 entering the groove 41a when the insulating layer 53 is formed.

[0047] In the actuator device 1, when a current flows through the coil 11, a Lorentz force is generated in a predetermined direction on the electrons flowing through the coil 11 by the magnetic field generated by the magnetic field generating unit 3. As a result, the coil 11 receives a force in a predetermined direction. Therefore, by controlling the direction or magnitude of the current flowing through the coil 11, the support unit 5 can be swung around the first axis X1. Similarly, by controlling the direction or magnitude of the current flowing through the coil 12, the movable unit 6 can be swung around the second axis X2. Therefore, by controlling the direction or magnitude of the currents in the coils 11 and 12, respectively, the mirror 2 can be swung around the first axis X1 and the second axis X2, which are perpendicular to each other. In addition, by passing a current of a frequency corresponding to the resonant frequency of the movable unit 6 through the coil 12, the movable unit 6 can be swung at high speed at the resonant frequency level.

[0048] In the actuator device 1 described above, the first metal material constituting the first wiring 21 provided on the connecting portion 8 has higher rigidity than the second metal material constituting the second wiring 31 provided on the support portion 5. This suppresses deterioration of the first wiring 21 provided on the connecting portion 8. At this time, deformation (warping, etc.) of the support portion 5 caused by the entire wiring provided on the connecting portion 8 and the support portion 5 being made of the first metal material having high rigidity is also suppressed. In addition, the first wiring 21 and the second wiring 31 are connected to each other at the first connection portion 25 located on the support portion 5. This reduces the stress acting on the first connection portion 25, and suppresses deterioration of the first connection portion 25. Furthermore, in the actuator device 1, the corner 25b of the first connection portion 25 is covered by the insulating layer 52, and the first wiring 21 and the second wiring 31 are connected to each other at the surface 25a on the opposite side of the support portion 5 in the first connection portion 25 exposed by the first opening 52a of the insulating layer 52. As a result, the stress acting from the first wiring 21 to the second wiring 31 is reduced by the insulating layer 52, and deterioration of the second wiring 31 made of the second metal material having a lower rigidity than the first metal material is suppressed. Therefore, according to the actuator device 1, deterioration of the wirings 16a, 16b provided on the connecting portion 8 and the support portion 5 can be suppressed. In addition, since the first wiring 21 and the second wiring 31 are directly connected, the resistance of the wirings 16a, 16b provided on the connecting portion 8 and the support portion 5 can be reduced.

[0049] In the actuator device 1, the first connection portion 25 is spaced a predetermined distance D from the second axis X2. This makes it possible to reduce the stress acting on the first connection portion 25 while ensuring an area for providing other components (e.g., the coil 11) on the support portion 5. That is, compared to the case in which the stress acting on the first connection portion 25 is reduced by ensuring the distance along the second axis X2 between the first connection portion 25 and the coupling portion 8, it is possible to ensure an area for providing other components on the support portion 5.

[0050] In the actuator device 1, the distance D is greater than ½ the minimum width W0 of the coupling portion 8. This makes it possible to further reduce the stress acting on the first connection portion 25 while ensuring an area for providing other components on the support portion 5.

[0051] In the actuator device 1, the cross-sectional area of ​​the first wiring 21 is larger than the cross-sectional area of ​​the second wiring 31. As a result, even if the resistivity of the first metal material constituting the first wiring 21 is higher than the resistivity of the second metal material constituting the second wiring 31, an increase in the resistance value of the first wiring 21 can be suppressed.

[0052] In the actuator device 1, the width of the first wiring 21 is greater than the width of the second wiring 31. This makes it possible to ensure the cross-sectional area of ​​the first wiring 21 and suppress an increase in the resistance value of the first wiring 21 while suppressing interference with the twisting of the connecting portion 8.

[0053] In the actuator device 1, the first opening 52a is located away from the corner 25b of the first connection portion 25. This makes it possible to reliably reduce the stress acting on the second wiring 31 from the first wiring 21.

[0054] In the actuator device 1, a region 53d of the surface of the insulating layer 52 opposite the support portion 5, which corresponds to the corner 25b, is curved in a convex shape toward the opposite side of the support portion. This makes it possible to further reduce the stress acting from the first wiring 21 to the second wiring 31.

[0055] In the actuator device 1, the first metal material constituting the first wiring 21 provided on the connecting portion 8 has higher rigidity than the third metal material constituting the third wiring 41 provided on the movable portion 6. In addition, the first wiring 21 and the third wiring 41 are connected to each other at the second connection portion 26 located on the movable portion 6. Furthermore, the corner 26b of the second connection portion 26 is covered by the insulating layer 52, and the first wiring 21 and the third wiring 41 are connected to each other at the surface 26a on the opposite side of the movable portion 6 in the second connection portion 26 exposed by the second opening 52b of the insulating layer 52. Therefore, deterioration of the wirings 16a and 16b provided on the connecting portion 8 and the movable portion 6 can be suppressed.

[0056] The actuator device 1 further includes a frame 4 that supports a support portion 5 and a movable portion 6, and the support portion 5 is connected to the frame 4 so as to be swingable about a first axis X1 perpendicular to a second axis X2. This allows the movable portion 6 to swing about each of the two axes perpendicular to each other.

[0057] The actuator device 1 further includes a mirror 2 provided on the movable portion 6. This allows the mirror 2 to be swung about each of the first axis X1 and the second axis X2, and can be used for light scanning or the like.

[0058] In the actuator device 1, the second wiring 31 is connected to the surface 25a of the first connection portion 25 of the first wiring 21 located on the support portion 5 on the opposite side to the support portion 5. This allows the stress acting on the second wiring 31 from the first wiring 21 to escape to the opposite side of the support portion 5, suppressing deterioration of the second wiring 31 made of a second metal material having a lower rigidity than the first metal material. That is, it is possible to prevent the stress acting on the first wiring 21 from the second wiring 31 and the reaction force from the support portion 5 from acting in a concentrated manner on the end portion of the second wiring 31, as in the case where the end portion of the second wiring 31 is sandwiched between the first wiring 21 and the support portion 5. This also allows the actuator device 1 to suppress deterioration of the wirings 16a and 16b provided on the connection portion 8 and the support portion 5.

[0059] Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. For example, as in a first modified example shown in FIG. 6, the second wiring 31 may be electrically connected to the first wiring 21 at the first connection portion 33 located at the end on the support portion 5. In the first modified example, the second wiring 31 is provided on the insulating layer 51. The insulating layer 52 is provided on the insulating layer 51 so as to cover the second wiring 31. The insulating layer 52 has a first opening 52a that exposes the surface 33a of the first connection portion 33 opposite the support portion 5. The insulating layer 52 covers the corner 33b of the first connection portion 33. A region 53d corresponding to the corner 25b of the surface of the insulating layer 52 opposite the support portion 5 is curved in a convex shape toward the opposite side of the support portion 5. The first wiring 21 is provided on the insulating layer 52. The tip portion of the second portion 23 of the first wiring 21 rides up onto the first connection portion 33 so as to cover the first opening 52a. A part 23a of the second portion 23 is disposed within the first opening 52a, and is connected to a surface 33a of the first connection portion 33 at the first opening 52a. As in the above embodiment, this first modified example also makes it possible to suppress deterioration of the wirings 16a, 16b provided on the coupling portion 8 and the support portion 5. As in the first modified example, the third wiring 41 may be electrically connected to the first wiring 21 at the second connection portion 26 located at the end portion on the movable portion 6.

[0060] As in the second modified example shown in FIG. 7, a diffusion layer 58 may be provided instead of the insulating layer 51. The diffusion layer 58 is provided in the regions in contact with the first wiring 21 on the surfaces of the support 5, the movable part 6, and the pair of connecting parts 8. The diffusion layer 58 is, for example, a diffusion region formed by diffusing p-type impurities on the surface of an n-type silicon substrate. With such a second modified example, deterioration of the wirings 16a, 16b provided on the connecting part 8 and the support 5 can be suppressed as in the above embodiment. Furthermore, according to the second modified example, since the diffusion layer 58 functions as a part of the first wiring 21, it is possible to reduce the resistance of the wirings 16a, 16b provided on the connecting part 8 and the support 5 while ensuring insulation at the diffusion layer 58. Furthermore, when the first metal material is tungsten, tungsten is easily attached to the diffusion layer 58, so that the first wiring 21 can be stably provided on the connecting part 8.

[0061] As in a third modified example shown in Fig. 8, the end 8b of each connecting portion 8 on the support portion 5 side may have an increased width as it approaches the support portion 5. In Fig. 8, the boundary B between the connecting portion 8 and the support portion 5 and the boundary B between the connecting portion 8 and the movable portion 6 are indicated by two-dot chain lines. With this third modified example as well, deterioration of the wirings 16a, 16b provided on the connecting portion 8 and the support portion 5 can be suppressed, as in the above embodiment.

[0062] In the above embodiment, the first wiring 21, the second wiring 31, and the third wiring 41 may be provided not only on the connecting portion 8 but also on the connecting portion 7. In this case, the first wiring 21 is provided on the connecting portion 7, the second wiring 31 is provided on the frame portion 4 and electrically connected to the electrodes 15a, 15b or the electrodes 17a, 17b, and the third wiring 41 is provided on the support portion 5 and electrically connected to the coil 11 or the second wiring 31 in the above embodiment. The connecting portion 7 may be linear. The connecting portion 8 may have any shape as long as it connects the movable portion 6 to the support portion 5 on the second axis X2 so that the movable portion 6 can swing around the second axis X2.

[0063] In the above embodiment, the insulating layer 52 is provided over the frame portion 4, the support portion 5, the movable portion 6, the pair of connecting portions 7, and the pair of connecting portions 8, but it is sufficient that the insulating layer 52 is provided so as to be interposed at least between the first wiring 21 and the second wiring 31 or the third wiring 41. The shapes of the first opening 52a and the second opening 52b are not limited to a circular shape. The first opening 52a and the second opening 52b may have, for example, a rectangular shape or a diamond shape. In addition, the first opening 52a and the second opening 52b may have, for example, a notch shape that is also open in the extension direction of the second portion 23 or the third portion 24.

[0064] A part of the first opening 52a may be in contact with the corner 25b of the first connection portion 25. Even with this configuration, the corner 25b is covered by the insulating layer 52, so that the stress acting from the first wiring 21 to the second wiring 31 can be reduced, as in the above embodiment. A part of the second opening 52b may be in contact with the corner 26b of the second connection portion 26. Even with this configuration, the corner 26b is covered by the insulating layer 52, so that the stress acting from the first wiring 21 to the second wiring 31 can be reduced, as in the above embodiment. The area of ​​the surface of the insulating layer 52 opposite the support portion 5 that corresponds to the corner 25b does not have to be curved in a convex shape, and may be, for example, flat. Even with this configuration, the stress acting from the first wiring 21 to the second wiring 31 can be reduced, as in the above embodiment. The area of ​​the surface of the insulating layer 52 opposite the movable portion 6 that corresponds to the corner 26b does not have to be curved in a convex shape, and may be, for example, flat. With this configuration as well, the stress acting on the second wiring 31 from the first wiring 21 can be reduced, similarly to the above embodiment.

[0065] The first connection portion 25 may be a predetermined distance away from the second axis X2, and may not be a distance D1 greater than ½ the minimum width W0 of the coupling portion 8. Similarly, the second connection portion 26 may be a predetermined distance away from the second axis X2, and may not be a distance D2 greater than ½ the minimum width W0 of the coupling portion 8. The second wiring 31 may not be provided with the widened portion 32, and the third wiring 41 may not be provided with the widened portion 42. The third wiring 41 may be electrically connected to the coil 12 via another member made of a metal material.

[0066] In the first wiring 21, the first portion 22 and the second portion 23 or the third portion 24 may intersect at an angle other than perpendicular. Alternatively, the entire first wiring 21 may extend straight along the extension direction of the coupling portion. In this case, the first connection portion 25 is located on the second axis X2. The first portion 22, the second portion 23, and the third portion 24 may not have the same width. In this case, the width of the first wiring 21 refers to the minimum width or maximum width of the first portion 22, the second portion 23, and the third portion 24.

[0067] The cross-sectional area of ​​the first wiring 21 may be larger than that of the second wiring 31, and the width W1 of the first wiring 21 may be smaller than the width W2 of the second wiring 31. For example, the thickness of the first wiring 21 may be larger than that of the second wiring 31, and the cross-sectional area of ​​the first wiring 21 may be larger than that of the second wiring 31. However, the above embodiment is preferable in that the twisting of the connecting portion 8 can be prevented from being hindered and the manufacturing can be simplified. Similarly, the cross-sectional area of ​​the first wiring 21 may be larger than that of the third wiring 41, and the width W1 of the first wiring 21 may be smaller than the width W3 of the third wiring 41. The cross-sectional area of ​​the first wiring 21 may be equal to or smaller than the cross-sectional area of ​​the second wiring 31 or the third wiring 41.

[0068] The actuator device 1 may drive something other than the mirror 2. The shape of the mirror 2 is not limited to a circular shape. The mirror 2 may have, for example, a rectangular or diamond shape. In the above embodiment, the mirror 2 is oscillated (driven) by electromagnetic force, but it may also be oscillated by, for example, a piezoelectric element. In this case, wiring for applying a voltage to the piezoelectric element is provided instead of the coils 11 and 12. The magnetic field generating unit 3 may be omitted.

[0069] The first axis X1 and the second axis X2 do not have to be perpendicular to each other, but may intersect each other. The actuator device 1 may be swung only around the second axis X2. In this case, the frame 4 and the connecting portion 7 may be omitted, and electrodes for electrical connection to a control circuit or the like may be provided on the support portion 5. The connecting portion 8 may be a region whose width is twice the minimum width W0. Alternatively, the connecting portion 8 may be a region whose stress acting when the movable portion 6 sways relative to the support portion 5 is 1 / 2 the maximum stress. [Explanation of symbols]

[0070] 1...actuator device, 2...mirror, 3...magnetic field generating section, 4...frame section, 5...support section, 6...movable section, 8...connecting section, 12...coil, 21...first wiring, 25, 33...first connection section, 25a, 33a...surface, 25b, 33b...corner, 26...second connection section, 26a...surface, 26b...corner, 31...second wiring, 41...third wiring, 52...insulating layer, 52a...first opening, 52b...second opening.

Claims

1. A support portion; A movable part; a first connecting portion that connects the movable portion to the support portion on a predetermined axis so that the movable portion can swing around the axis; A first wiring provided on the first connection portion; A second wiring provided on the movable portion; a first insulating layer having a first opening exposing a surface of one of the first wiring and the second wiring, the surface being opposite to the movable portion at a first connection portion located at the movable portion; a second insulating layer covering the first wiring and the second wiring, the other of the first wiring and the second wiring is connected to the surface of the first connection portion in the first opening, An actuator device, wherein a region of the surface of the second insulating layer opposite the movable portion corresponding to a corner of the other of the first wiring and the second wiring is convexly curved toward the opposite side of the movable portion.

2. 2 . The actuator device according to claim 1 , wherein the one of the first wiring and the second wiring is the first wiring, and the other of the first wiring and the second wiring is the second wiring.

3. 2 . The actuator device according to claim 1 , wherein the one of the first wiring and the second wiring is the second wiring, and the other of the first wiring and the second wiring is the first wiring.

4. The movable portion further includes a coil. An actuator device as described in any one of claims 1 to 3, wherein the movable portion has a groove portion having a shape corresponding to the coil, the coil is disposed within the groove portion, and is electrically connected to the first wiring and the second wiring.

5. 5. The actuator device according to claim 1, wherein the first wiring is provided across the support portion, the first connecting portion, and the movable portion.

6. An actuator device according to any one of claims 1 to 5, wherein in the first connection portion, a width of the second wiring in a direction perpendicular to the extension direction of the second wiring is larger than a width of the first wiring in a direction perpendicular to the extension direction of the first wiring.

7. The actuator device according to claim 1, wherein a total length of the first wirings is longer than a total length of the second wirings.

8. 8. The actuator device according to claim 1, wherein the movable portion has a frame portion connected to the first connecting portion and an arrangement portion arranged inside the frame portion, and a mirror is arranged in the arrangement portion.

9. a second connecting portion that connects the movable portion to the support portion on the axis so that the movable portion can swing around the axis; A third wiring provided on the second connection portion, the first insulating layer has a second opening exposing a surface of one of the third wiring and the second wiring, the surface being opposite to the movable portion at a second connection portion located at the movable portion, 9. The actuator device according to claim 1, wherein the other of the third wiring and the second wiring is connected to the surface of the second connection portion at the second opening.

10. A frame portion and 10. The actuator device according to claim 1, further comprising: a third connecting portion that connects the support portion to the frame portion on another axis line intersecting the axis line so that the support portion can swing around the other axis line.

11. The actuator device according to claim 10 , wherein the first connecting portion has a straight shape and the third connecting portion has a serpentine shape.

12. The actuator device according to any one of claims 1 to 11, wherein a width of the first connecting portion at an end portion on the movable portion side increases toward the movable portion.

13. A support portion; A movable part; a first connecting portion that connects the movable portion to the support portion on a predetermined axis so that the movable portion can swing around the axis; A first wiring provided on the first connection portion; A second wiring provided on the support portion; a first insulating layer having a first opening exposing a surface of one of the first wiring and the second wiring, the surface being opposite to the support portion at a first connection portion located on the support portion; a second insulating layer covering the first wiring and the second wiring, the other of the first wiring and the second wiring is connected to the surface of the first connection portion in the first opening, An actuator device, wherein a region of the surface of the second insulating layer opposite the support portion corresponding to a corner of the other of the first wiring and the second wiring is convexly curved toward the opposite side of the support portion.

14. 14 . The actuator device according to claim 13 , wherein the one of the first wiring and the second wiring is the first wiring, and the other of the first wiring and the second wiring is the second wiring.

15. 14 . The actuator device according to claim 13 , wherein the one of the first wiring and the second wiring is the second wiring, and the other of the first wiring and the second wiring is the first wiring.

16. The movable portion further includes a coil. An actuator device as described in any one of claims 13 to 15, wherein the movable portion has a groove portion having a shape corresponding to the coil, the coil is disposed within the groove portion, and is electrically connected to the first wiring and the second wiring.

17. The actuator device according to any one of claims 13 to 16, wherein the first wiring is provided across the support portion, the first connecting portion, and the movable portion.

18. An actuator device according to any one of claims 13 to 17, wherein in the first connection portion, a width of the second wiring in a direction perpendicular to the extension direction of the second wiring is larger than a width of the first wiring in a direction perpendicular to the extension direction of the first wiring.

19. The actuator device according to any one of claims 13 to 18, wherein a total length of the second wirings is longer than a total length of the first wirings.

20. The actuator device according to any one of claims 13 to 19, wherein the movable portion has a frame portion connected to the first connecting portion and an arrangement portion arranged inside the frame portion, and a mirror is arranged in the arrangement portion.

21. a second connecting portion that connects the movable portion to the support portion on the axis so that the movable portion can swing around the axis; A third wiring provided on the second connection portion, the first insulating layer has a second opening that exposes a surface of one of the third wiring and the second wiring, the surface being located on the support portion at a second connection portion, the surface being opposite the support portion; The actuator device according to any one of claims 13 to 20, wherein the other of the third wiring and the second wiring is connected to the surface of the second connection portion at the second opening.

22. A frame portion and 22. The actuator device according to claim 13, further comprising: a third connecting portion that connects the support portion to the frame portion on another axis line intersecting the axis line so that the support portion can swing around the other axis line.

23. 23. The actuator device of claim 22, wherein the first link has a straight shape and the third link has a serpentine shape.

24. The actuator device according to any one of claims 13 to 23, wherein a width of the end of the first connecting portion on the support portion side increases toward the support portion.

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