Spatial light modulation unit and spatial light modulation device

Abstract

To provide a spatial light modulation unit and a spatial light modulation device.SOLUTION: A spatial light modulation unit comprises a first electrode, a second electrode, and a super-aligned carbon nanotube-paraffin composite structure. The first electrode and the second electrode are insulated from each other and spaced apart. The super-aligned carbon nanotube-paraffin composite structure is electrically connected to the first electrode and the second electrode respectively. The super-aligned carbon nanotube-paraffin composite structure includes a super-aligned carbon nanotube structure and a paraffin layer, the paraffin layer covers the super-aligned carbon nanotube structure and is infiltrated on the super-aligned carbon nanotube structure. A spatial light modulation device comprising the spatial light modulation unit is provided.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a spatial light modulation unit and a spatial light modulation device. [Background technology]

[0002] Based on the extremely small unit area heat capacity and fast thermal response properties of super aligned carbon nanotube films, super aligned carbon nanotube films can be rapidly electrically modulated, heated, and used as an infrared light source for NDIR greenhouse gas monitoring. In addition, super aligned carbon nanotube films have excellent properties such as ultrathinness, electrical conductivity, transparency, flexibility, stretchability, uniformity, high emissivity, and ease of large-area fabrication. Due to these excellent properties, the optical and thermal management of super aligned carbon nanotube films has attracted research interest. [Prior art documents] [Non-patent literature]

[0003] [Non-Patent Document 1] Kaili Jiang, Qunqing Li, Shoushan Fan, “Spinning continuous carbon nanotube yarns”, Nature, 2002, vol. 419, p.801 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the application of ultra-oriented carbon nanotube films to optical active control still needs further development. A typical application is spatial light modulation. Spatial light modulation can be realized based on photonic crystals, liquid crystals, surface plasmas and phase change materials. Ultra-oriented carbon nanotube films have the advantages of fast thermal response, ultra-small HCPUA, and easy to fabricate and cut in large areas, so they can successfully realize functions such as fast-controllable incandescent light source arrays, fast thermal actuators, and fast-adaptive thermal camouflage. In the prior art, there are no examples of ultra-oriented carbon nanotube films being applied in the field of spatial light modulation.

[0005] Therefore, there is a need to provide a spatial light modulating unit and a spatial light modulating device utilizing ultra-oriented carbon nanotube films. [Means for solving the problem]

[0006] The spatial light modulation unit includes a first electrode, a second electrode, and an ultra-oriented carbon nanotube-paraffin composite structure. The first electrode and the second electrode are insulated from each other and spaced apart. The ultra-oriented carbon nanotube-paraffin composite structure is electrically connected to the first electrode and the second electrode, respectively. The ultra-oriented carbon nanotube-paraffin composite structure includes an ultra-oriented carbon nanotube structure and a paraffin layer, the paraffin layer covers the ultra-oriented carbon nanotube structure and permeates the ultra-oriented carbon nanotube structure.

[0007] The paraffin layer is laid down on the ultra-oriented carbon nanotube structure, with at least a portion of the thickness of the paraffin layer penetrating the ultra-oriented carbon nanotube structure.

[0008] A part of the paraffin layer permeates the ultra-oriented carbon nanotube structure, and another part covers the surface of the ultra-oriented carbon nanotube structure.

[0009] The spatial light modulation device includes an insulating substrate, a plurality of row electrodes, a plurality of column electrodes, and a plurality of spatial light modulation units, the plurality of row electrodes and the plurality of column electrodes are disposed on a surface of the insulating substrate crossing each other and insulated from each other, a grid is formed for every two adjacent row electrodes and every two adjacent column electrodes crossing the two adjacent row electrodes, and each spatial light modulation unit corresponds to one of the grids, each of the spatial light modulation units includes a first electrode, a second electrode, and a super-oriented carbon nanotube-paraffin composite structure, the first electrode and the second electrode are electrically connected to the row electrodes and the column electrodes, respectively, the super-oriented carbon nanotube-paraffin composite structure is electrically connected to the first electrode and the second electrode, respectively, the super-oriented carbon nanotube-paraffin composite structure includes a super-oriented carbon nanotube structure and a paraffin layer, the paraffin layer covers the super-oriented carbon nanotube structure, and the paraffin layer at least partially permeates the super-oriented carbon nanotube structure.

[0010] The ultra-oriented carbon nanotube-paraffin composite structure is mounted on the first electrode and the second electrode and suspended above the insulating substrate.

[0011] A portion of the paraffin layer penetrates the pores of the ultra-oriented carbon nanotube structure, and a portion of the paraffin layer covers the surface of the ultra-oriented carbon nanotube structure. Effect of the Invention

[0012] Compared with the prior art, the spatial light modulation unit and spatial light modulation device provided by the present invention include a super-oriented carbon nanotube-paraffin composite structure. The super-oriented carbon nanotube-paraffin composite structure includes a super-oriented carbon nanotube structure and a paraffin layer. Since the super-oriented carbon nanotube structure has a rapid thermal response, when the super-oriented carbon nanotube structure is heated and modulated by applying a voltage, the temperature of the paraffin covering the super-oriented carbon nanotube structure also changes rapidly, resulting in a rapid phase change in the paraffin. Thereby, the super-oriented carbon nanotube structure plays the role of a heating device. Under the control of the circuit, as the super-oriented carbon nanotube structure heats the paraffin, the solidified paraffin in the original super-oriented carbon nanotube-paraffin composite structure melts, and the low light transmittance of the super-oriented carbon nanotube-paraffin composite structure is transformed into a high light transmittance. Thereby, a large difference in the transmitted light intensity is generated, and spatial light modulation is realized. The ultra-oriented carbon nanotube structure can rapidly raise and lower the temperature in the order of several hundred milliseconds, so that the transmitted light intensity also responds quickly and recovers in the order of several hundred milliseconds, achieving a rapid spatial light modulation effect. [Brief description of the drawings]

[0013] [Figure 1] 1 is a diagram showing a configuration of a spatial light modulation device provided according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a diagram showing the configuration of a superoriented carbon nanotube film-paraffin composite structure in an embodiment of the present invention. [Diagram 3] 1 is a scanning electron microscope photograph of a single-layer, highly aligned carbon nanotube film. [Figure 4] 13 is a comparative photograph of the transparency of an ultra-oriented carbon nanotube-paraffin composite structure before and after the paraffin layer in the ultra-oriented carbon nanotube composite structure melts. [Diagram 5] FIG. 1 shows the optical transmittance spectral lines of ultra-aligned carbon nanotube-paraffin composite structures with different surface densities when the paraffin layer is in a solidified state. [Figure 6] FIG. 13 is a diagram showing the light transmittance of a super-oriented carbon nanotube-paraffin composite structure when the power is repeatedly turned on and off when the surface density of the paraffin layer is 2.81*10-4g / mm2. [Figure 7] FIG. 13 is a diagram showing the difference in light transmittance of a super-oriented carbon nanotube-paraffin composite structure when the power is repeatedly turned on and off when the surface density of the paraffin layer is 2.81*10-4g / mm2. [Figure 8] FIG. 13 shows a comparison of the transmission signal upon modulated heating obtained with a silicon (Si) detector (active band: 350 nm to 1100 nm) by applying a modulated pulse voltage signal. [Figure 9] Photograph taken from the back of a spatial light modulator showing a "THU" modulated by addressable circuitry. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the embodiments of the technical solution of the present invention will be described in more detail with reference to the accompanying drawings and specific embodiments.

[0015] 1 and 2, the present invention provides a spatial light modulation device 20, which includes an insulating substrate 202, a plurality of row electrodes 204, a plurality of column electrodes 206, and a plurality of spatial light modulation units 220. The plurality of row electrodes 204 and the plurality of column electrodes 206 are disposed crossing each other on the insulating substrate 202. The plurality of row electrodes 204 or the plurality of column electrodes 206 are separated by an insulating dielectric layer 216. For every two adjacent row electrodes 204 and two adjacent column electrodes 206, a grid 214 is formed, and one spatial light modulation unit 220 is positioned on each grid 214, that is, there is a one-to-one correspondence between the spatial light modulation units 220 and the grid 214.

[0016] The insulating substrate 202 is an insulating transparent substrate or a substrate with as high a transmittance as possible in the visible light band. The insulating substrate 202 may be, for example, one or more of a glass substrate, a resin substrate, a quartz substrate, etc., or may be a flexible substrate such as PI. The size and thickness of the insulating substrate 202 are not limited, and a person skilled in the art may design the size of the insulating substrate 202 according to actual needs, such as the predetermined size of the spatial light modulator 20. In this embodiment, the insulating substrate 202 is preferably a square soda lime glass substrate with a thickness of about 0.33 mm and a side length of about 80 mm.

[0017] The row electrodes 204 and the column electrodes 206 are arranged to cross each other, and an insulating dielectric layer 216 is provided at the intersection of the row electrodes 204 and the column electrodes 206. The insulating dielectric layer 216 can ensure that the row electrodes 204 and the column electrodes 206 are electrically insulated from each other, so as to prevent short circuit. The row electrodes 204 or the column electrodes 206 may be arranged at equal intervals or at unequal intervals. The row electrodes 204 or the column electrodes 206 are preferably arranged at equal intervals. The row electrodes 204 and the column electrodes 206 are made of a conductive material or an insulating material coated with a conductive material layer. In this embodiment, the row electrodes 204 and the column electrodes 206 are preferably planar conductors printed with conductive silver paste, and the row interval of the row electrodes 204 is 3 mm, and the column interval of the column electrodes 206 is 3 mm, or the size of the interval can be set according to needs. Since the precision of the laser-cut ultra-oriented carbon nanotube film is several tens of microns or less, the interval is determined by the processing precision of the screen printing and the ultra-oriented carbon nanotube film. The width of the row electrodes 204 and the column electrodes 206 is 200 μm to 1000 μm, and the thickness is 30 μm to 100 μm. Specifically, the width and thickness of the row electrodes 204 and the column electrodes 206 are not limited to this range, and may be set according to actual needs and manufacturing processes. In this embodiment, the crossing angle between the row electrodes 204 and the column electrodes 206 is 10 degrees to 90 degrees, and is preferably 90 degrees. In this embodiment, the row electrodes 204 and the column electrodes 206 are manufactured by printing a conductive paste on the insulating substrate 202 by screen printing. The components of the conductive paste include metal powder, low-melting glass powder, and binder. Among them, the metal powder is preferably silver powder, and the binder is preferably terpineol or ethyl cellulose, and the specific physical properties of the metal powder and the binder may be adjusted according to needs.

[0018] A plurality of spatial light modulating units 220 are arranged in one-to-one correspondence with the plurality of grids 214, respectively. It can be seen that the spatial light modulating units 220 are arranged in a matrix to form a heating point array. Each spatial light modulating unit corresponds to an independent heating point. Each spatial light modulating unit 220 includes a first electrode 210, a second electrode 224, and an ultra-oriented carbon nanotube-paraffin composite structure 208. The first electrode 210 and the second electrode 224 are arranged in correspondence with each other and insulated from each other at a distance. The distance between the first electrode 210 and the second electrode 224 in each grid 214 is the thickness of the insulating dielectric layer. The ultra-oriented carbon nanotube-paraffin composite structure 208 is arranged between the first electrode 210 and the second electrode 224, and is electrically connected to the first electrode 210 and the second electrode 224, respectively. The screen printing and manufacturing procedure of the ultra-oriented carbon nanotube-paraffin composite structure array are as follows.

[0019] 1) Print the column electrode layer. 2) Print an insulating dielectric layer. 3) Print the row electrode layer. 4) The first and second electrodes can be printed and both made with one printing screen. 5) A single layer of superoriented carbon nanotube film having a width greater than the width of the entire printed array is laid over the entire printed array. 6) Using a laser cutting machine, the ultra-oriented carbon nanotube film is cut according to a specified ablation program, leaving only the portions in contact with the first electrode and the second electrode and the portions between the first electrode and the second electrode. 7) After the above steps are completed, the entire substrate is placed on a hot plate whose temperature exceeds the melting point of the paraffin. In this embodiment, the paraffin is paraffin number 58, and its melting point is 58°C. Pour the molten paraffin into the four corners of the entire printed array, and after the paraffin spreads evenly on the array, turn off the hot plate and wait for the paraffin to harden naturally to form the final spatial light modulation array.

[0020] From the above procedure, it can be seen that in one grid 214, except for the electrode part, the dielectric insulating part, and the super-aligned carbon nanotube-paraffin composite structure formed between the first electrode 210 and the second electrode 224, other regions are also covered with paraffin. When the thickness of the paraffin is thicker than the thickness that can cover the electrode sufficiently, the electrode is also covered with paraffin. However, the working area is limited only to the super-aligned carbon nanotube-paraffin composite structure 208. In this embodiment, the first electrodes 210 in the spatial light modulating units 220 in the same row are electrically connected to the same row electrode 204, and the second electrodes 224 in the spatial light modulating units 220 in the same column are electrically connected to the same column electrode 206.

[0021] The first electrode 210 and the second electrode 224 are conductors such as metal layers. The first electrode 210 may be an extension of the row electrode 204, and the second electrode 224 may be an extension of the column electrode 206. The first electrode 210 and the row electrode 204 may be integrally molded, and the second electrode 224 and the column electrode 206 may also be integrally molded. In this embodiment, the first electrode 210 and the second electrode 224 are both planar conductors, and as long as they are conductive electrodes, their materials may be the same as the printing materials of the row electrodes or column electrodes. The first electrode 210 is directly electrically connected to the row electrode 204, and the second electrode 224 is directly electrically connected to the column electrode 206. The first electrode 210 and the second electrode 224 have a length of 100 μm to 1 mm, a width of 100 μm to 1 mm, and a thickness of 10 μm to 500 μm, but the relevant size parameters are not limited to these ranges according to needs. The second electrode 224 and the first electrode 210 preferably have a length of 100 μm to 1 mm, a width of 10 μm to 500 μm, and a thickness of 10 μm to 500 μm, and the relevant size parameters are not limited to these ranges according to needs. In this embodiment, the material of the first electrode 210 and the second electrode 224 is a conductive paste, which is printed on the insulating substrate 202 by screen printing. The composition of the conductive paste is the same as that of the conductive paste used for the row electrodes and column electrodes described above.

[0022] In the spatial light modulating unit 220, before laying the super-oriented carbon nanotube film, an adhesive layer may be printed on the first electrode 210 and the second electrode 224. The adhesive layer is a material of the adhesive in the slurry of the row electrodes 204, and is used to adhere and fix the super-oriented carbon nanotube film, so that the super-oriented carbon nanotube film is more firmly fixed to the first electrode 210 and the second electrode 224. The adhesive layer is an optional structure, and it is understood that the spatial light modulating unit 220 does not need to include an adhesive layer. For convenience, the adhesive layer may be directly formed from the electrode paste, as long as it does not affect the connection between the first electrode 210 and the second electrode 224 and the super-oriented carbon nanotube film. In this embodiment, the adhesive layer uses silver paste for printing the electrodes.

[0023] 2, the ultra-oriented carbon nanotube-paraffin composite structure 208 includes an ultra-oriented carbon nanotube structure 2082 and a paraffin layer 2084. The paraffin layer 2084 is a thin layer of paraffin material. The paraffin layer 2084 permeates the ultra-oriented carbon nanotube structure 2082 such that at least a portion of the thickness of the paraffin layer 2084 permeates the micropores of the ultra-oriented carbon nanotube structure 2082. The thickness of the ultra-oriented carbon nanotube structure 2082 is between 30 μm and 100 μm, and the thickness of the paraffin layer is between 300 μm and 1 mm.

[0024] The super-oriented carbon nanotube structure is a self-supporting structure. Here, the term "self-supporting structure" refers to a form in which the super-oriented carbon nanotube structure can maintain a predetermined shape without using a support material and can be supported independently. That is, it means that the super-oriented carbon nanotube structure can be supported from both opposing sides and suspended without changing the structure of the super-oriented carbon nanotube structure. The self-supporting super-oriented carbon nanotube structure includes a plurality of carbon nanotubes, which are attracted to each other by intermolecular forces, so that the super-oriented carbon nanotube structure has a predetermined shape. The carbon nanotubes in the super-oriented carbon nanotube structure include one or more of single-walled carbon nanotubes, double-walled carbon nanotubes, and multi-walled carbon nanotubes. The diameter of the single-walled carbon nanotube is 0.5 nanometers to 50 nanometers, the diameter of the double-walled carbon nanotube is 1.0 nanometers to 50 nanometers, and the diameter of the multi-walled carbon nanotube is 1.5 nanometers to 50 nanometers. The carbon nanotubes in the super-oriented carbon nanotube structure have many gaps between them, and therefore the super-oriented carbon nanotube structure has many micropores. The heat capacity per unit area of ​​the carbon nanotube structure is 7.7×10 -3 The thermal capacity of carbon nanotubes is small, so the super-oriented carbon nanotube structure has a fast thermal response speed and can heat objects quickly.

[0025] The superoriented carbon nanotube structure includes at least one layer of the superoriented carbon nanotube film. Referring to FIG. 3, specifically, the superoriented carbon nanotube film includes a plurality of carbon nanotube segments aligned in a continuous alignment. The plurality of carbon nanotube segments are connected end-to-end along the length direction by intermolecular forces. Each carbon nanotube segment includes a plurality of carbon nanotubes that are parallel to each other and bonded by intermolecular forces. The carbon nanotube segments have any width, thickness, uniformity, and shape. The carbon nanotubes in the superoriented carbon nanotube film are aligned along the same direction. The superoriented carbon nanotube film is obtained by drawing from a superaligned carbon nanotube array (see Non-Patent Document 1).

[0026] The spatial light modulator 20 provided by this embodiment can be obtained by the following method. Print row electrodes (lateral electrodes) on an insulating substrate, print an insulating dielectric layer, print column electrodes (longitudinal electrodes), print first and second electrodes on which the superoriented carbon nanotube film is mounted, print an adhesive layer used to adhere the superoriented carbon nanotube film, lay a single layer of superoriented carbon nanotube film, cut the superoriented carbon nanotube film with a laser, and allow molten paraffin to penetrate the superoriented carbon nanotube film array. The first and second electrodes are both CNT electrodes. The lateral electrodes, longitudinal electrodes, CNT electrodes, and adhesive layers are printed with the same silver paste, and in consideration of the circuit control of the entire array, the ends of the lateral silver electrodes and longitudinal silver electrodes are designed to be thick and long to facilitate connection with the control circuit. After printing each layer, each layer needs to be cured. The horizontal silver electrodes, the longitudinal silver electrodes, the insulating dielectric layer and the CNT electrodes all need to be sintered and cured at 570°C. The adhesive layer used to bond the superoriented carbon nanotube film is laid down by placing the entire array on a hot plate with a surface temperature of 150°C and heating for 5 minutes. Finally, the superoriented carbon nanotube film is cut by laser, and the superoriented carbon nanotube film between the CNT electrodes is left to obtain a complete superoriented carbon nanotube film array. Then, the glass substrate and the petri dish containing the paraffin are placed on a hot plate with a temperature of 100°C. After the paraffin melts, the paraffin droplets are dropped on the four corners of the superoriented carbon nanotube film array except for the cross markings on the edge of the superoriented carbon nanotube film array. The melted paraffin is uniformly spread on the superoriented carbon nanotube film array to form a uniform composite structure of the superoriented carbon nanotube film and the paraffin layer, that is, a superoriented carbon nanotube-paraffin composite structure is formed. Finally, turn off the hot plate and wait for the paraffin to harden naturally to obtain the final sample.

[0027] The spatial light modulator provided by the present invention can realize periodic change of light intensity. When the spatial light modulator is applied, a voltage is applied to the super-oriented carbon nanotube structure in the spatial light modulator, so that the super-oriented carbon nanotube structure generates Joule heat and the temperature rises, the paraffin covering the super-oriented carbon nanotube structure is heated, and the paraffin layer melts. After the paraffin layer melts, the light transmittance of the super-oriented carbon nanotube-paraffin composite structure increases, and when the super-oriented carbon nanotube film at the corresponding point of the array is heated under the control of the circuit, the paraffin melts, and the low light transmittance of the original paraffin solidified state is transformed into high light transmittance, thereby realizing efficient spatial light modulation in the addressable array.

[0028] In the present invention, the super-oriented carbon nanotube-paraffin composite structure is fabricated into an addressable array using screen printing technology, and the circuit controls the temperature of the corresponding pixel of the super-oriented carbon nanotube film composite structure array. As a result, the temperature of the paraffin layer composited with the super-oriented carbon nanotube structure in the super-oriented carbon nanotube-paraffin composite structure is also rapidly adjusted. Because the super-oriented carbon nanotube structure has a rapid thermal response, the temperature of the paraffin covering the super-oriented carbon nanotube structure also changes rapidly, resulting in rapid phase change modulation. Under the control of the circuit, when the super-oriented carbon nanotube structure at the corresponding point of the array is heated, the paraffin layer melts, and the low light transmittance of the original paraffin solidified state is transformed into high light transmittance, achieving a large difference in light transmittance. This realizes efficient spatial light modulation of the addressable array.

[0029] In this embodiment, the super-oriented carbon nanotube structure includes a single layer of super-oriented carbon nanotube film. Referring to FIG. 4, a white paper with the letter "C" printed on it is attached to the substrate on the back side of the dot matrix, and the point is heated by passing electricity through it. FIG. 4 shows the display comparison of the letter "C" before and after the paraffin melts in the dot matrix. Before the paraffin layer melts, the light transmittance of the single layer of super-oriented carbon nanotube film and the glass substrate is high, but the solidified paraffin exists, so the letters on the back side of the glass substrate are hardly displayed. After the paraffin layer melts, not only the carbon nanotubes in the super-oriented carbon nanotube film are visible, but the letter "C" on the back side of the glass substrate is also visible, and the toner around the inkjet-printed letters can also be observed. This shows that the heated dot matrix has a large difference in light transmittance before and after the paraffin melts. This is because as paraffin melts, its refractive index decreases; the refractive index of liquid paraffin is approximately 1.43, approaching the refractive index of water, 1.33, so that as the paraffin melts, the composite structure has a lower reflectance and a higher light transmittance.

[0030] Figure 5 also shows that the light transmittance of the super-oriented carbon nanotube composite structure increases significantly after the paraffin layer melts. The surface density in the figure refers to the mass surface density of paraffin. To test the change in the light transmittance of the super-oriented carbon nanotube composite structure before and after the paraffin phase change, the light transmittance of the composite structure is tested after the paraffin melts, and the super-oriented carbon nanotube film located in the array is repeatedly turned on and off. When the surface density of the paraffin is 2.81*10 -4 g / mm 2 Repeated light transmittance tests were conducted on the sample, and the results are shown in Figure 6. In addition, the difference in light transmittance due to the reciprocating changes of the paraffin between solidified and molten states when the power is turned on and off is calculated, as shown in Figure 7. This resulted in the surface density of paraffin being 2.81*10 -4 g / mm 2It can be seen that the difference in light transmittance of the composite structure array can reach 48% or more. By calculation, it can be seen that in the band of 400-900 nm, the average difference in light transmittance reaches 57.57%. Therefore, there is a large difference in the transmitted light intensity.

[0031] In another test experiment, a lamp is placed directly above the entire spatial light modulator to illuminate the entire spatial light modulator, and a white paper is placed at a certain distance behind the spatial light modulator. The super-oriented carbon nanotube composite structures located in the dot matrix of the array are periodically heated by the pulse voltage signal, and the shadow on the white paper is observed to change. Then, the silicon detector detects the change in light intensity after repeatedly turning the power on and off, and the result is shown in Figure 8. Based on all the above results, a frosted glass is placed on the back of the glass substrate, and combined with the characteristics of the addressable array obtained by screen printing, a spatial light modulation effect diagram is obtained by using a control circuit, which is the pattern of the three letters of "THU", as shown in Figure 9. It can be seen that the constructed array can produce a very clear letter "THU".

[0032] Compared with the prior art, the spatial light modulation device provided by the present invention includes a super-oriented carbon nanotube composite structure. The super-oriented carbon nanotube composite structure includes a carbon nanotube structure and a paraffin layer. Because the super-oriented carbon nanotube film has a rapid thermal response, the temperature of the paraffin covering the super-oriented carbon nanotube structure also changes rapidly, resulting in a rapid phase change. Under the control of the circuit, as the super-oriented carbon nanotube structure heats the paraffin, the paraffin melts, and the low light transmittance of the original paraffin solidified state is transformed into a high light transmittance. Thereby, spatial light modulation is realized. The present invention combines the super-oriented carbon nanotube film array with paraffin, and based on the high-speed electrical modulation performance of the super-oriented carbon nanotube film, it can realize a rapid phase change and spatial light modulation in a short time. In the present invention, the super-oriented carbon nanotube film array is combined with paraffin, and based on the high-speed electrical modulation performance of the super-oriented carbon nanotube film, it can realize a rapid phase change and spatial light modulation in a short time. In the present invention, screen printing technology is used to fabricate the superoriented carbon nanotube film into an addressable heater array, and the superoriented carbon nanotube film located at the corresponding pixel points of the superoriented carbon nanotube film array is modulated and heated through a circuit, so that the temperature of the paraffin covering the pixel points of the superoriented carbon nanotube film is also rapidly modulated, and the spatial light modulation effect of the entire array is also controlled.

[0033] In addition, those skilled in the art can make other modifications within the spirit of the present invention. Of course, all of these modifications made according to the spirit of the present invention should be included in the scope of the protection claims of the present invention. [Explanation of symbols]

[0034] 20 Spatial Light Modulator 202 Insulating substrate 204 row electrode 206 column electrode 208 Super-aligned carbon nanotube-paraffin composite structure 210 First electrode 220 Second electrode 214 Grid 216 Insulating Dielectric Layer 220 Spatial Light Modulation Unit 2082 Super-aligned carbon nanotube structure 2084 Paraffin layer

Claims

1. The spatial light modulation unit includes a first electrode, a second electrode and a super-oriented carbon nanotube-paraffin composite structure; the first electrode and the second electrode are insulated from each other and spaced apart; The ultra-oriented carbon nanotube-paraffin composite structure is electrically connected to the first electrode and the second electrode, respectively; The spatial light modulation unit is characterized in that the super-oriented carbon nanotube-paraffin composite structure includes a super-oriented carbon nanotube structure and a paraffin layer, the paraffin layer covering the super-oriented carbon nanotube structure and permeating the super-oriented carbon nanotube structure.

2. The spatial light modulation unit of claim 1 , wherein the paraffin layer is laid on the super-aligned carbon nanotube structure, and at least a portion of the thickness of the paraffin layer permeates the super-aligned carbon nanotube structure.

3. 2. The spatial light modulation unit of claim 1, wherein a part of the paraffin layer permeates the super-aligned carbon nanotube structure, and another part covers the surface of the super-aligned carbon nanotube structure.

4. The spatial light modulator includes an insulating substrate, a plurality of row electrodes, a plurality of column electrodes, and a plurality of spatial light modulator units; The row electrodes and the column electrodes are disposed on the surface of the insulating substrate, crossing each other and being insulated from each other. For every two adjacent row electrodes and every two adjacent column electrodes crossing the two adjacent row electrodes, a grid is formed. Each spatial light modulation unit corresponds to one of the grids. A spatial light modulation device characterized in that each of the spatial light modulation units includes a first electrode, a second electrode and a superoriented carbon nanotube-paraffin composite structure, the first electrode and the second electrode being electrically connected to the row electrode and the column electrode, respectively, the superoriented carbon nanotube-paraffin composite structure being electrically connected to the first electrode and the second electrode, respectively, the superoriented carbon nanotube-paraffin composite structure including a superoriented carbon nanotube structure and a paraffin layer, the paraffin layer covering the superoriented carbon nanotube structure and the paraffin layer at least partially penetrating the superoriented carbon nanotube structure.

5. 5. The spatial light modulator of claim 4, wherein the super-oriented carbon nanotube-paraffin composite structure is mounted on the first electrode and the second electrode and suspended above the insulating substrate.

6. 6. The spatial light modulator according to claim 5, wherein a portion of the paraffin layer penetrates into the pores of the superaligned carbon nanotube structure, and another portion covers the surface of the superaligned carbon nanotube structure.

Images