Resist composition and method for producing resist pattern

Abstract

To provide a resist composition from which a resist pattern having good CD uniformity (CDU) can be produced.SOLUTION: The resist composition contains: a carboxylic acid generator containing a carboxylate represented by formula (I); an acid generator containing a salt represented by formula (B1); and a resin having an acid-labile group. [In the formulae, R1-R3 each represent a halogen atom, a fluorinated alkyl group or the like; X0 represents a substituted / unsubstituted alicyclic hydrocarbon group, a substituted / unsubstituted aromatic hydrocarbon group or the like; Qb1 and Qb2 each represent a fluorine atom or a perfluoroalkyl group; and Y represents a substituted / unsubstituted methyl group or a substituted / unsubstituted alicyclic hydrocarbon group.]SELECTED DRAWING: None

Description

[Technical field]

[0001] The present invention relates to a resist composition and a method for producing a resist pattern. [Background technology]

[0002] Patent Document 1 describes a resin containing a carboxylate represented by the following formula as a carboxylate generator. Dist compositions are described. TIFF2025013803000001.tif3050 Patent Document 2 describes a laser printer that contains a carboxylate represented by the following formula as a carboxylate generator. Dist compositions are described. TIFF2025013803000002.tif3052 [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2011-39502 A [Patent Document 2] JP 2014-88367 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention relates to a resist pattern formed using a resist composition containing the above-mentioned carboxylate. Carboxylates that form resist patterns with better CD uniformity (CDU) than tetrafluoroethylenes provide. [Means for solving the problem]

[0005] The present invention includes the following inventions. [1] A carboxylate represented by formula (I). TIFF2025013803000003.tif39100 [In formula (I), R1 , R 2 and R 3 each independently represents a halogen atom, a fluorinated alkyl group having 1 to 12 carbon atoms, represents an alkyl group or an alkyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkyl group is , -O- or -CO-. m1 represents an integer of 0 to 5, and when m1 is 2 or more, a plurality of R 1 are the same They may be the same or different. m2 represents an integer of 0 to 3, and when m2 is 2 or more, a plurality of R 2 are the same They may be the same or different. m3 represents an integer of 0 to 4, and when m3 is 2 or more, a plurality of R 3 are the same They may be the same or different. X 0 represents a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, The -CH2- may be replaced by -O-, -S-, -CO- or -SO2-. stomach.] [2]X 0 an aliphatic hydrocarbon group having 1 to 72 carbon atoms which may have a substituent (provided that the aliphatic The -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-. The carboxylate according to [1], wherein [3]X 0 is an alicyclic hydrocarbon group which may have a fluorine atom or a hydroxyl group (the The -CH2- in the alicyclic hydrocarbon group may be replaced by -O- or -CO-. ), or a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are combined (the alicyclic hydrocarbon group The -CH2- contained in the alkyl group and the chain hydrocarbon group is replaced with -O- or -CO-. The alicyclic hydrocarbon group and the chain hydrocarbon group may each optionally include a fluorine atom or a hydroxyl group. The carboxylate according to [1] or [2], wherein [4] m3 is 1 and R 3 is a fluorine atom. Carboxylic acid salts. [5] A carboxylic acid generator comprising the carboxylate according to any one of [1] to [4]. [6] The carboxylic acid generator according to [5], an acid generator other than the carboxylic acid generator, and an acid labile A resist composition comprising a resin having a functional group. [7] The resin having an acid labile group is a structural unit represented by formula (a1-1) and a structural unit represented by formula (a1- 2) is a resin containing at least one selected from the group consisting of structural units represented by the formula (6). The resist composition described above. TIFF2025013803000004.tif46102 [In formula (a1-1) and formula (a1-2), L a1 and L a2 are each independently -O- or *-O-(CH2) k1 -CO-O k1 represents an integer of 1 to 7, and * represents the bonding position with -CO-. R a4 and R a5 each independently represents a hydrogen atom or a methyl group. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, It represents an alicyclic hydrocarbon group or a combination thereof. m1 represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3. [8] The resin having an acid labile group further contains a structural unit represented by formula (a2-A): The resist composition according to item [6] or [7]. TIFF2025013803000005.tif3843[In formula (a2-A), R a50 is a hydrogen atom, a halogen atom, or a group having 1 to 6 carbon atoms which may have a halogen atom represents an alkyl group represented by the formula: R a51 is a halogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, Alkoxy groups, alkylcarbonyl groups having 2 to 4 carbon atoms, alkylcarbonyl groups having 2 to 4 carbon atoms It represents an acryloyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 is a single bond or * -X a51 -(A a52 -X a52 ) nb - stands for -R. a50 Combined represents the bond position to the carbon atom. A a52 represents an alkanediyl group having 1 to 6 carbon atoms. X a51 and X a52 each independently represents -O-, -CO-O-, or -O-CO-. nb represents 0 or 1. mb represents an integer of 0 to 4. When mb is an integer of 2 or more, R in Numbers a51 may be the same or different.] [9] (1) A process for applying the resist composition according to any one of [6] to [8] onto a substrate. About (2) A step of drying the applied composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) A method for producing a resist pattern, comprising the step of developing the composition layer after heating. Effect of the Invention

[0006] By using a resist composition using the carboxylate of the present invention, good CD uniformity can be obtained. Resist patterns can be produced with high photoresistivity (CDU). DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] In this specification, the term "(meth)acrylic monomer" refers to a monomer having a structure such as "CH2=CH-CO-" Monomers having the structure "CH2=C(CH3)-CO-" and monomers having the structure "CH2=C(CH3)-CO-" Similarly, "(meth)acrylate" and "(Meth)acrylic acid" refers to a compound selected from the group consisting of acrylate and methacrylate. "At least one selected from the group consisting of acrylic acid and methacrylic acid" and "at least one selected from the group consisting of acrylic acid and methacrylic acid "CH2=C(CH3)-CO-" or "CH2=CH-C When a structural unit having "O-" is exemplified, structural units having both groups are also included. In addition, in the groups described in this specification, straight chain structures and branched structures are For those which can have both structures, either one is acceptable. The valence of the groups may vary depending on the bond type. "Derived from" or "derived from" refers to a polymerizable C=C This means that the bond is polymerized to become a -CC- group. When stereoisomers exist, all Includes stereoisomers. In this specification, the term "solid content of a resist composition" refers to the fraction of the total amount of the resist composition that is This refers to the total of all components excluding the solvent (E) described below.

[0008] [Carboxylic acid salt represented by formula (I)] The present invention relates to a carboxylate represented by formula (I) (hereinafter referred to as "carboxylate (I)"). (There is.) In the carboxylate (I), the side with the negative charge is called the "anion (I)" and the side with the positive charge is called the "anion (I)". The side is sometimes referred to as "cation (I)". In formula (I), R 1 , R 2 and R 3 The halogen atoms are fluorine and chlorine. Examples of the alkyl group include an alkyl atom, a bromine atom, and an iodine atom. R 1 , R 2 and R 3 Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, and a propyl group. propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl The alkyl groups include, for example, hexyl, octyl, and nonyl groups. is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. be. R 1 , R 2 and R 3 The fluorinated alkyl group having 1 to 12 carbon atoms is preferably a fluorinated alkyl group having 1 to 12 carbon atoms. and a group in which at least one hydrogen atom in the alkyl group is replaced by a fluorine atom. Examples of such groups include a trifluoromethyl group, a difluoromethyl group, a perfluoromethyl group, and Fluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group perfluoropropyl, 3,3,3-trifluoropropyl, 2,2, 3,3,3-Pentafluoropropyl group, perfluorobutyl group, 4,4,4-trifluoro Perfluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, 2,2,3,3,4,4 ,4-heptafluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl perfluoropentyl group, 4,4,5,5,5-pentafluoropentyl group, 3, 3,4,4,5,5,5-heptafluoropentyl group, 2,2,3,3,4,4,5,5 ,5-nonafluoropentyl group, perfluorohexyl group, 5,5,6,6,6-penta Fluorohexyl group, 4,4,5,5,6,6,6-heptafluorohexyl group, 3,3 ,4,4,5,5,6,6,6-nonafluorohexyl group, 2,2,3,3,4,4,5 ,5,6,6,6-dodecafluorohexyl group, perfluoroheptyl group and perfluoro The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, and More preferably, it is 1 to 6, and further preferably, it is 1 to 4. R 1 , R 2 and R 3 The -CH2- contained in the alkyl group represented by the formula: When it is replaced with -, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms in the alkyl group. The replaced group is a hydroxy group (the -CH2- in a methyl group is replaced by -O- ), carboxy group (the -CH2-CH2- in the ethyl group is replaced by -O- CO- substituted groups), alkoxy groups with 1 to 11 carbon atoms (alkyl groups with 2 to 12 carbon atoms A group in which -CH2- is replaced with -O-), an alkoxy group having 2 to 11 carbon atoms Carbonyl group (-CH2-CH2- in alkyl group having 3 to 12 carbon atoms is -OC O- substituted groups), alkylcarbonyl groups having 2 to 12 carbon atoms (alkylcarbonyl groups having 2 to 12 carbon atoms) alkyl group in which -CH2- is replaced with -CO-; Alkylcarbonyloxy group (-CH2-CH2- contained in an alkyl group having 3 to 12 carbon atoms) is replaced with -CO-O-. m1 is preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. It is more preferable that the number of the suffixes is 1 or 2, and it is even more preferable that the number of the suffixes is 1 or 2. m2 is preferably an integer of 0 to 2, and more preferably 0 or 1. I wish. m3 is preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. More preferably, it is 1 or 2, and even more preferably it is 1. This is more preferable. R 1 is a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. A alkyl group (the -CH2- contained in the alkyl group may be replaced by -O- or -CO-) It is preferable that the alkyl group is a fluorine atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or a carbon atom. An alkyl group having 1 to 4 carbon atoms (wherein -CH2- in the alkyl group is -O- or -CO-). It is more preferable that the alkyl group is a fluorine atom or a alkyl group having 1 to 4 carbon atoms. Alkyl group (-CH2- contained in the alkyl group is replaced by -O- or -CO-) It is more preferable that the above formula is 1. R 2 and R 3 each independently represents a halogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms. or an alkyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkyl group is -O- or -C O-) is preferably a fluorine atom, a Fluorinated alkyl group or alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group) may be replaced by -O- or -CO-. a nitrogen atom, a trifluoromethyl group, or an alkyl group having 1 to 3 carbon atoms (including the alkyl group It is more preferable that -CH2- may be replaced by -O- or -CO-. I wish.

[0009] Examples of the cation (I) include the following cations: TIFF2025013803000006.tif198155

[0010] In formula (I), X 0 The hydrocarbon group represented by the formula (I) is an aliphatic hydrocarbon group (alkyl chain hydrocarbon groups such as alkyl, alkenyl, and alkynyl groups, and alicyclic hydrocarbon groups), aromatic carbons, Aliphatic hydrocarbon groups, aromatic hydrocarbon groups, and combinations thereof are also included. The -CH2- in the radical is replaced by -O-, -S-, -CO- or -SO2-. It's fine. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, Isobutyl group, tert-butyl group, pentyl group, hexyl group, octyl group, nonyl group, etc. The alkyl group preferably has 1 to 12 carbon atoms, and more preferably has 1 to 12 carbon atoms. Preferably, it is 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. be. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, and a butenyl group. isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, Examples of such groups include an octynyl group, an isooctynyl group, and a nonenyl group. Examples of the alkynyl group include an ethynyl group, a propynyl group, an isopropynyl group, a butynyl group, isobutynyl group, tert-butynyl group, pentynyl group, hexynyl group, octynyl group, Examples thereof include a nonynyl group. The alicyclic hydrocarbon group may be any of monocyclic, polycyclic and spirocyclic groups, and may be saturated or unsaturated. The alicyclic hydrocarbon group may be a cyclopropyl group, a cyclobutyl group, a cyclobutyl group, or a cyclopropyl group. Cyclopentyl group, cyclohexyl group, cyclooctyl group, cyclononyl group, cyclodecyl group group, monocyclic cycloalkyl groups such as cyclododecyl group, norbornyl group, adamantyl group, etc. Examples of the polycyclic cycloalkyl group include the following. TIFF2025013803000007.tif64163As the alicyclic hydrocarbon group, the above formulas (Y1) to (Y11) and formulas (Y36) to (Y38) Groups represented by formulae (Y42) to (Y46) and (Y57) to (Y59) (* indicates a bonding position) ) is preferable, and a group represented by any one of formulas (Y1) to (Y11) is more preferable. Preferably, it is a group represented by formula (Y3), (Y4), formula (Y9) or formula (Y11). The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 36, and more preferably It is preferably 3 to 24, more preferably 3 to 18, and even more preferably 3 to 16. and even more preferably 3 to 12.

[0011] Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, Examples of aromatic hydrocarbon groups include aryl groups such as phenanthryl and binaphthyl groups. The prime number is preferably 6 to 36, more preferably 6 to 24, and even more preferably It is preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. be. In the case of a combination of groups, the above groups each having a different valence (such as an alkanediyl group, ... cycloalkanetriyl group, alkanetetrayl group, cycloalkanediyl group, cycloalkanetriyl group A cycloalkyl group, a cycloalkanetetrayl group, etc. may be included.

[0012] The combined groups are: A group combining an alicyclic hydrocarbon group and a chain hydrocarbon group (the chain hydrocarbon group and the alicyclic The -CH2- contained in the hydrocarbon group of the formula may be replaced with -O-, -S-, -CO- or -SO2-. may be replaced), A group that combines a chain hydrocarbon group and an aromatic hydrocarbon group (the chain hydrocarbon group -CH2- may be replaced by -O-, -S-, -CO- or -SO2-; and A group that combines an alicyclic hydrocarbon group with an aromatic hydrocarbon group (including the alicyclic hydrocarbon group) -CH2- may be replaced by -O-, -S-, -CO- or -SO2-. ) In addition, in the combination, alicyclic hydrocarbon groups, chain hydrocarbon groups and aromatic hydrocarbon groups may be used in combination of two or more of each. Specifically, the combined groups are Alicyclic hydrocarbon groups such as adamantylmethylene groups and cyclohexylmethylene groups - Chain carbonization Hydrogen group-*, (alicyclic hydrocarbon group) 2-chain aliphatic hydrocarbon group-* (said chain hydrocarbon group and and -CH2- contained in the alicyclic hydrocarbon group is -O-, -S-, -CO- or -SO2 -), Chain hydrocarbon groups such as methyladamantyl group, dimethyladamantyl group, etc. - Alicyclic hydrocarbons Group-*, (chain hydrocarbon group) 2-alicyclic hydrocarbon group-* (the chain hydrocarbon group and the alicyclic -CH2- in the hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-. (You may know), Aromatic hydrocarbon groups such as tolyl and xylyl groups - Aromatic hydrocarbon groups - * (Aromatic hydrocarbon groups The -CH2- in the formula is replaced with -O-, -S-, -CO- or -SO2-. (also acceptable) Methylcyclohexylmethylene group and other chain hydrocarbon groups - alicyclic hydrocarbon groups - chain hydrocarbon groups Aromatic group-*, (chain hydrocarbon group) 2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain Hydrogen group-alicyclic hydrocarbon group) 2-chain hydrocarbon group-* (the chain hydrocarbon group and the alicyclic hydrocarbon group The -CH2- in the hydride group is replaced by -O-, -S-, -CO- or -SO2-. (It may be possible to Aromatic hydrocarbon groups such as benzyl groups - Chain hydrocarbon groups -* (The chain hydrocarbon groups include -CH2- may be replaced by -O-, -S-, -CO- or -SO2-; Aromatic hydrocarbon groups such as tolylmethyl groups - Aromatic hydrocarbon groups - Aromatic hydrocarbon groups - Aromatic hydrocarbon groups -* (The above -CH2- in the hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-. (You may know this) Methyladamantane methylene adamantyl group, di(methyladamantane methylene)adamantyl group Manthyl group or other open chain hydrocarbon groups - alicyclic hydrocarbon groups - open chain hydrocarbon groups - alicyclic hydrocarbon groups -*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group) 2-alicyclic hydrocarbon group- *, (chain hydrocarbon group-alicyclic hydrocarbon group) 2-chain hydrocarbon group-alicyclic hydrocarbon group-* , (chain hydrocarbon group) 2-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-*( The -CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is not limited to -O-, -S-, - may be replaced by -CO- or -SO2-; Alicyclic hydrocarbon group-Acyclic hydrocarbon group-Acyclic hydrocarbon group-Acyclic hydrocarbon group-*, (alicyclic A chain hydrocarbon group)2-alicyclic hydrocarbon group-alicyclic hydrocarbon group-a chain hydrocarbon group-*, (alicyclic Hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic Hydrocarbon group-acyclic hydrocarbon group-alicyclic hydrocarbon group) 2-acyclic hydrocarbon group-*(acyclic hydrocarbon group The -CH2- contained in the alkyl group and the alicyclic hydrocarbon group is -O-, -S-, -CO- or - (which may be replaced by SO2-) Acyclic hydrocarbon group - alicyclic hydrocarbon group - acyclic hydrocarbon group - alicyclic hydrocarbon group - acyclic hydrocarbon group Aromatic group -*, (chain hydrocarbon group) 2-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon Group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group) 2-chain hydrocarbon group- Alicyclic hydrocarbon group-open chain hydrocarbon group-*, (open chain hydrocarbon group-alicyclic hydrocarbon group-open chain Hydrocarbon group) 2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic Hydrogen group-chain hydrocarbon group-alicyclic hydrocarbon group) 2-chain hydrocarbon group-*(chain hydrocarbon The -CH2- contained in the group and the alicyclic hydrocarbon group is -O-, -S-, -CO- or -S O2- may be substituted), Here, * indicates the bond position to the carbon atom of the carbonyl group.

[0013] X 0 The -CH2- contained in the hydrocarbon group represented by the following formula is -O-, -S-, -CO- or - When replaced with SO2-, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms in the hydrocarbon group. Also, X 0 When a substituent is bonded to a hydrocarbon group represented by the following formula, the number of carbon atoms before the substitution is The total number of carbon atoms in the hydrocarbon group. For example, the -CH2- in the alkyl group can be -O-, -S-, -CO- or -SO2 The group substituted with - is a hydroxy group (-CH2- in a methyl group is replaced with -O -), carboxy group (the -CH2-CH2- in the ethyl group is replaced by -O -CO- is replaced), alkoxy group (-CH2- in the alkyl group is replaced by - O-), alkoxycarbonyl group (-CH2- contained in alkyl group) CH2- is replaced by -O-CO-), alkylcarbonyl group (alkyl group -CH2- is replaced by -CO-), alkylcarbonyloxy group (a (a group in which -CH2-CH2- in an alkyl group is replaced with -CO-O-) can be. The -CH2- contained in the alicyclic hydrocarbon group is -O-, -S-, -CO- or -SO2-. Examples of the groups substituted with include the following groups: TIFF2025013803000008.tif109165The -CH2- contained in the alicyclic hydrocarbon group is -O-, -S-, -CO- or -SO2-. The groups substituted with are those represented by the formulae (Y12) to (Y35) and (Y39) to (Y41): , a group represented by any one of formulas (Y47) to (Y56), (Y60) to (Y68), It is preferable that the formula (Y12) to the formula (Y20), the formula (Y26), the formula (Y27), the formula ( Y30), formula (Y31), formula (Y39) ~ formula (Y41), formula (Y47) ~ formula (Y56), More preferably, it is a group represented by any one of formulas (Y60) to (Y68), and formula (Y 14), Formula (Y15), Formula (Y16), Formula (Y20), Formula (Y26), Formula (Y27), Formula (Y30), Formula (Y31), Formula (Y39), Formula (Y40), Formula (Y47) ~ Formula (Y56) More preferably, it is a group represented by formula (Y60) to formula (Y68).

[0014] X 0 The hydrocarbon group represented by the following formula may have one or more substituents. The substituents include halogen atoms, cyano groups, hydroxy groups, and alkyl groups having 1 to 12 carbon atoms. group, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, Alkylcarbonyl groups having 2 to 13 carbon atoms, alkylcarbonyloxy groups having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a combination thereof Examples of the group include a group obtained by combining the Examples of halogen atoms include fluorine, chlorine, bromine and iodine atoms. Of these, a fluorine atom is preferable. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, and an isopropyl group. butyl, isobutyl, tert-butyl, pentyl, hexyl, octyl Examples of the alkyl group include an aryl group and a nonyl group. Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, a propoxy group, a bromine group, and a butyl group. hexyloxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyl oxy group, nonyloxy group, decyloxy group, undecyloxy group, dodecyloxy group etc. Alkoxycarbonyl groups having 2 to 13 carbon atoms, alkylcarbonyl groups having 2 to 13 carbon atoms, and the alkylcarbonyloxy group having 2 to 13 carbon atoms is the above-mentioned alkyl or alkoxy group. The aryl group represents a group having a carbonyl group or a carbonyloxy group bonded to the aryl group. Examples of the alkoxycarbonyl group having 2 to 13 carbon atoms include a methoxycarbonyl group, an ethoxy carbonyl group, butoxycarbonyl group, etc., and alkylcarbonyl groups having 2 to 13 carbon atoms. Examples of the aryl group include an acetyl group, a propionyl group, and a butyryl group, and the like. The alkylcarbonyloxy group of 3 is an acetyloxy group, a propionyloxy group, butyryloxy group and the like. Examples of the alicyclic hydrocarbon group having 3 to 12 carbon atoms include the groups shown below. ** represents X 0 represents the bonding position with TIFF2025013803000009.tif17162Aromatic hydrocarbon groups having 6 to 10 carbon atoms include aryl groups such as phenyl and naphthyl groups. Examples include: The combined group is a combination of a hydroxyl group and an alkyl group having 1 to 12 carbon atoms. a group in which an alkyl group having 1 to 12 carbon atoms is combined with an aromatic hydrocarbon group having 6 to 10 carbon atoms; a group consisting of an alicyclic hydrocarbon group having 3 to 12 carbon atoms and an aromatic hydrocarbon group having 6 to 10 carbon atoms; and the like. Examples of the group combining a hydroxyl group and an alkyl group having 1 to 12 carbon atoms include hydroxyl Examples of the hydroxyalkyl group include a methyl group and a hydroxyethyl group, each of which has 1 to 12 carbon atoms. do. A group formed by combining an alkyl group having 1 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms. Examples of the alkyl group include aralkyl groups having 7 to 22 carbon atoms, such as benzyl groups, tolyl groups, and xylyl groups. Examples of the alkylaryl groups include alkylaryl groups having 7 to 22 prime numbers. A combination of an alicyclic hydrocarbon group having 3 to 12 carbon atoms and an aromatic hydrocarbon group having 6 to 10 carbon atoms. Examples of the group include a cyclohexylphenyl group.

[0015] X 0 The hydrocarbon group represented by the formula (I) is preferably a hydrocarbon group having 1 to 7 carbon atoms, which may have a substituent. 2 an aliphatic hydrocarbon group (the -CH2- contained in the aliphatic hydrocarbon group is not -O-, -S-, 6 carbon atoms, which may be substituted with -CO- or -SO2-. an aromatic hydrocarbon group having a molecular weight of 1 to 36 or a group represented by formula (aa), More preferably, it is an alicyclic hydrocarbon group which may have a hydroxy group or a fluorine atom ( The -CH2- contained in the alicyclic hydrocarbon group is -O-, -S-, -CO- or -SO2-. ), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are combined, (The -CH2- contained in the alicyclic hydrocarbon group is -O-, -S-, -CO- or -SO2 -CH2- contained in the chain hydrocarbon group may be replaced by -O- or - The alicyclic hydrocarbon group and the chain hydrocarbon group may be replaced with fluorine. or a group represented by formula (aa): More preferably, the *-alicyclic hydrocarbon group (the —CH2— contained in the alicyclic hydrocarbon group) may be replaced by -O-, -S-, -CO- or -SO2-, and the alicyclic carbon The hydrogen group may have a hydroxyl group or a fluorine atom. * indicates the carbon atom of the carbonyl group. represents the bonding position of the alicyclic hydrocarbon group.) -CH2- may be replaced by -O-, -S-, -CO- or -SO2-; -CH2- contained in the alkyl group may be replaced by -O- or -CO-, The alicyclic hydrocarbon group and the alkyl group may contain a fluorine atom or a hydroxy group. * represents the bonding position to the carbon atom of the carbonyl group.) or a group represented by formula (aa), More preferably, the polycyclic alicyclic hydrocarbon group is The -CH2- contained may be replaced by -O-, -S-, -CO- or -SO2-. Preferably, the polycyclic alicyclic hydrocarbon group may have a hydroxy group or a fluorine atom. represents the bond position to the carbon atom of the carbonyl group. The -CH2- contained in the polycyclic alicyclic hydrocarbon group is -O-, -S-, -CO - or -SO2-, and -CH2- contained in the alkyl group may be replaced by - The polycyclic alicyclic hydrocarbon group and the alkyl group may be replaced by -O- or -CO-. The aryl group may have a fluorine atom or a hydroxyl group. represents a bonding position.) or a group represented by formula (aa): Particularly preferred are an adamantanone group, a hydroxyadamantyl group, and a combination of an adamantyl group and an adamantanyl group. A group combining an alkyl group with an alkyl group (wherein the -CH2- in the alkyl group is -O- or -CO - may be replaced by.), a group represented by formula (Y30F) or a group represented by formula (aa): It is a group. In the above groups, the alicyclic hydrocarbon group preferably has 3 to 36 carbon atoms, more preferably It is preferably 3 to 24, more preferably 3 to 18, and even more preferably 3 to 1 The number of carbon atoms in the chain hydrocarbon group is preferably 6, and more preferably 3 to 12. is 1 to 12, more preferably 1 to 9, even more preferably 1 to 6, The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 36. It is more preferably 6 to 24, even more preferably 6 to 18, and still more preferably It is preferably 6-14, and more preferably 6-10. TIFF2025013803000010.tif2866[In formula (aa), X a and X b each independently represents -O- or -S-. X 1 represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, The -CH2- may be replaced by -O-, -S-, -CO- or -SO2-. stomach. X 2 represents a hydrocarbon group having 1 to 48 carbon atoms which may have a substituent, The -CH2- may be replaced by -O-, -S-, -CO- or -SO2-. stomach. * indicates the bonding position with the carbon atom of the carbonyl group.

[0016] X a and X b are preferably the same atom, and more preferably are both oxygen atoms. It is nice.

[0017] X 1 and X 2 The hydrocarbon group represented by the formula (I) is an aliphatic hydrocarbon group, an aromatic hydrocarbon group, or The hydrocarbon groups include groups in which two or more of these are combined. -CH2- may be replaced by -O-, -S-, -CO- or -SO2-.

[0018] X 1 The aliphatic hydrocarbon group may be a chain hydrocarbon group such as an alkanetriyl group, an alicyclic hydrocarbon group, etc. Hydrogen groups or combinations thereof. Specific examples of the alkanetriyl group include a methine group, an ethanetriyl group, a propanetriyl group, and a cyclohexyl group. Triyl, butanetriyl, pentanetriyl, hexanetriyl, heptanetriyl yl group, octanetriyl group, nonanetriyl group, decanetriyl group, undecanetriyl group Examples of the alkyl group include a cycloalkyl group and a dodecanetriyl group.

[0019] The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclobutanetriyl group, a cyclopentanetriyl group, and a cyclopentanetriyl group. Examples of the alkyl group include a cyclohexyl group, a cyclohexanetriyl group, and a cyclooctanetriyl group. Examples of the polycyclic alicyclic hydrocarbon group include a norbornane triyl group, a norbornane triyl group, group, adamantanetriyl group, and the like. Examples of the aromatic hydrocarbon group include a benzenetriyl group, a naphthalenetriyl group, an anthracene group, and Examples of the aryl group include phenyltriyl group. In the case of a combination of groups, the above groups each having a different valence (alkyl group, alkanediyl group, etc.) aryl group, alkanetetrayl group, cycloalkyl group, cycloalkanediyl group, cycloalkanediyl group, cantetrayl group, etc.) may be included.

[0020] X 1 The hydrocarbon group represented by the formula (I) has 1 to 24 carbon atoms and further has one or more substituents. The substituent may be a hydroxy group, a halogen atom, a cyano group, a carbon number Alkyl groups having 1 to 12 carbon atoms, alkoxy groups having 1 to 12 carbon atoms, alkoxy groups having 2 to 13 carbon atoms alkylcarbonyl group having 2 to 13 carbon atoms, alkylcarbonyl group having 2 to 13 carbon atoms nyloxy group, alicyclic hydrocarbon group having 3 to 12 carbon atoms, aromatic hydrocarbon group having 6 to 10 carbon atoms Or a group combining these may be mentioned. Examples of halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms. Of these, a fluorine atom is preferred. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, Pentyl, hexyl, heptyl, octyl, nonyl, decyl, undecyl , dodecyl group, etc. Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, a propoxy group, a bromine group, and a butyl group. hexyloxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyl oxy group, nonyloxy group, decyloxy group, undecyloxy group, dodecyloxy group etc. Alkoxycarbonyl groups having 2 to 13 carbon atoms, alkylcarbonyl groups having 2 to 13 carbon atoms, and the alkylcarbonyloxy group having 2 to 13 carbon atoms is the above-mentioned alkyl or alkoxy group. A carbonyl group or a carbonyloxy group is bonded to the alkyl group. Examples of the alicyclic hydrocarbon group having 3 to 12 carbon atoms include the groups shown below. ** represents X 1 represents the bonding position with TIFF2025013803000011.tif17162The aromatic hydrocarbon group having 6 to 10 carbon atoms is an aryl group such as a phenyl group or a naphthyl group. Examples include: The combined group is a combination of a hydroxyl group and an alkyl group having 1 to 12 carbon atoms. a group in which an alkyl group having 1 to 12 carbon atoms is combined with an aromatic hydrocarbon group having 6 to 10 carbon atoms; a group consisting of an alicyclic hydrocarbon group having 3 to 12 carbon atoms and an aromatic hydrocarbon group having 6 to 10 carbon atoms; and the like. Examples of the group combining a hydroxyl group and an alkyl group having 1 to 12 carbon atoms include hydroxyl Examples of the hydroxyalkyl group include a methyl group and a hydroxyethyl group, each of which has 1 to 12 carbon atoms. do. A group formed by combining an alkyl group having 1 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms. Examples of the alkyl group include aralkyl groups having 7 to 22 carbon atoms, such as benzyl groups, tolyl groups, and xylyl groups. Examples of the alkylaryl group include alkyl groups having 7 to 22 prime numbers. A combination of an alicyclic hydrocarbon group having 3 to 12 carbon atoms and an aromatic hydrocarbon group having 6 to 10 carbon atoms. Examples of the group include a cyclohexylphenyl group.

[0021] X 1The hydrocarbon group represented by the formula (I) is an alkane group having 1 to 6 carbon atoms which may have a substituent. It is preferably an aryl group or an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent. Alkanetriyl groups having 1 to 6 carbon atoms, represented by formulas (w1-1) to (w1-11), More preferably, it is an alkanetriyl group having 1 to 6 carbon atoms, a group represented by the formula (w1-1): a polycyclic hydrocarbon group such as a group represented by formula (w1-3) or a group represented by formula (w1-2) or a monocyclic hydrocarbon group such as a group represented by formula (w1-6): It is nice. TIFF2025013803000012.tif62148[Formula (w1-1)~Formula (w1-11), The ring may be a hydroxyl group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, or a an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, Alkylcarbonyl group, alkylcarbonyloxy group having 2 to 13 carbon atoms, alkylcarbonyloxy group having 3 to 12 carbon atoms an alicyclic hydrocarbon group having 6 to 10 carbon atoms, or a combination thereof It may have. * represents a bond position. In formulas (w1-9) to (w1-11), the three bond positions are arbitrary. The position can be any position.]

[0022] X 2 The number of carbon atoms in the hydrocarbon group represented by the formula (I) is preferably 2 to 48, and more preferably 4 to 48. It is more preferable that the ratio is 6 to 44, and further preferably 8 to 40. More preferably, the carbon content is 10 to 38. The hydrocarbon group may have a substituent. Furthermore, the -CH2- contained in this hydrocarbon group , -O-, -S-, -CO- or -SO2-. Here, the number of carbon atoms in the hydrocarbon group is the number of carbon atoms in the hydrocarbon group that does not have a substituent and is not replaced. It means prime number.

[0023] X 2 The substituents which the hydrocarbon group may have in the formula (I) include a halogen atom, a cyano group, , a hydroxy group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, Alkoxycarbonyl groups having 2 to 13 carbon atoms, alkylcarbonyl groups having 2 to 13 carbon atoms, alkylcarbonyloxy groups having 3 to 13 carbon atoms, alicyclic hydrocarbon groups having 3 to 12 carbon atoms, 10 aromatic hydrocarbon groups or combinations thereof. Halogen atoms, alkyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, The aryl group, the alkylcarbonyloxy group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group are as described above. The same groups as those shown below can be mentioned. X 2 The hydrocarbon group having 1 to 48 carbon atoms represented by the formula (I) has one or more substituents. It may be possible.

[0024] X 2 The hydrocarbon group in the formula (I) is a straight-chain or branched chain hydrocarbon group (e.g., arylene). candiyl group, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups. Two or more of these groups may be combined. Specifically, methylene group, ethylene group, propane-1,3-diyl group, butane-1,4 -diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1 linear alkanediyl groups such as octane-1,7-diyl group and octane-1,8-diyl group; Ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane- 1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group branched alkanediyl groups such as 2-methylbutane-1,4-diyl group; Cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexa Monocyclic cycloalkanediyl group, such as cyclohexene-1,4-diyl group, cyclooctane-1,5-diyl group, etc. a monocyclic alicyclic hydrocarbon group which is an yl group; Norbornane-1,4-diyl group, Norbornane-2,5-diyl group, Adamantane- Polycyclic cycloalkanediyl groups such as 1,5-diyl group and adamantane-2,6-diyl group a polycyclic alicyclic hydrocarbon group, Phenylene group, naphthylene group, biphenylene group, anthrylene group, phenanthrylene group and aromatic hydrocarbon groups such as a binaphthylene group. In the case of a combination of groups, the above groups each having a different valence (alkyl group, alkanetri group, etc.) yl group, alkanetetrayl group, cycloalkyl group, cycloalkanetriyl group, cyclo An alkanetetrayl group may be included. Examples of the combined group include a group that combines a chain hydrocarbon group and an alicyclic hydrocarbon group; Groups that combine a hydrocarbon group and an aromatic hydrocarbon group, and alicyclic hydrocarbon groups and aromatic hydrocarbon groups Specifically, a group in which one or more alicyclic hydrocarbon groups are combined with a chain hydrocarbon group can be mentioned. A group in which - is bonded (for example, -chain hydrocarbon group-alicyclic hydrocarbon group, -chain hydrocarbon group-(alicyclic Cyclic hydrocarbon groups)2, etc.), groups in which one or more chain hydrocarbon groups are bonded to an alicyclic hydrocarbon group (e.g. For example, -alicyclic hydrocarbon group-chain hydrocarbon group, -alicyclic hydrocarbon group-(chain hydrocarbon group) 2, etc.), groups in which one or more alicyclic hydrocarbon groups and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g. For example, -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group, -chain hydrocarbon group-(alicyclic Cyclic hydrocarbon group-chain hydrocarbon group)2, etc.

[0025] X 2 As the hydrocarbon group in A chain hydrocarbon group having 2 to 18 carbon atoms which may have a substituent (including the chain hydrocarbon group) -CH2- may be replaced by -O- or -CO-; or A chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (including the chain hydrocarbon group The -CH2- may be replaced with -O- or -CO-. An alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH2 - may be replaced by -O-, -S-, -CO- or -SO2-. It is preferable that the group is a combination of A chain hydrocarbon group having 4 to 18 carbon atoms which may have a substituent (the chain saturated hydrocarbon group The -CH2- contained therein may be replaced by -O- or -CO-; or A chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (including the chain hydrocarbon group The -CH2- may be replaced with -O- or -CO-. An alicyclic hydrocarbon group (the -CH2- contained in the alicyclic hydrocarbon group is not limited to -O-, -S-, - may be replaced by -CO- or -SO2-. Preferably, A chain hydrocarbon group having 6 to 14 carbon atoms which may have a substituent (including the chain hydrocarbon group) -CH2- may be replaced by -O- or -CO-; or A chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (including the chain hydrocarbon group The -CH2- may be replaced with -O- or -CO-. An alicyclic hydrocarbon group having 5 to 14 carbon atoms (the -CH2 - may be replaced by -O-, -S-, -CO- or -SO2-. It is more preferable that the group is a group obtained by combining the above groups.

[0026] Specifically, X 2 Examples of the hydrocarbon group in An alkanediyl group having 2 to 18 carbon atoms which may have a substituent (the alkanediyl group The -CH2- contained therein may be replaced by -O- or -CO-. An alkanediyl group having 1 to 12 carbon atoms which may have a substituent (the alkanediyl group The -CH2- contained therein may be replaced with -O- or -CO-. An alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -C contained in the alicyclic hydrocarbon group) which may be H2- may be replaced by -O-, -S-, -CO- or -SO2-. or An alkanediyl group having 1 to 12 carbon atoms which may have a substituent (the alkanediyl group The -CH2- contained therein may be replaced with -O- or -CO-. An alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 1 carbon atom which may have a substituent -12 alkyl groups (-CH2- contained in the alkyl groups is replaced with -O- or -CO-) and An alkanediyl group having 4 to 18 carbon atoms which may have a substituent (the alkanediyl group The -CH2- contained therein may be replaced by -O- or -CO-. An alkanediyl group having 1 to 12 carbon atoms which may have a substituent (the alkanediyl group The -CH2- contained therein may be replaced with -O- or -CO-. 16 alicyclic saturated hydrocarbon groups (the -CH2- contained in the alicyclic saturated hydrocarbon group is -O- , -S-, -CO- or -SO2- may be substituted; or An alkanediyl group having 1 to 12 carbon atoms which may have a substituent (the alkanediyl group The -CH2- contained therein may be replaced with -O- or -CO-. An alicyclic saturated hydrocarbon group having 3 to 16 carbon atoms which may be substituted and a carbon atom which may be substituted An alkyl group having a number of 1 to 12 (wherein -CH2- in the alkyl group is -O- or -CO-) and An alkanediyl group having 6 to 14 carbon atoms which may have a substituent (the alkanediyl group The -CH2- contained therein may be replaced by -O- or -CO-. An alkanediyl group having 1 to 12 carbon atoms which may have a substituent (the alkanediyl group The -CH2- contained therein may be replaced with -O- or -CO-. An adamantanediyl group which may be , which may be replaced by -O- or -CO-; or An alkanediyl group having 1 to 12 carbon atoms which may have a substituent (the alkanediyl group The -CH2- contained therein may be replaced with -O- or -CO-. An optionally substituted adamantanediyl group and an optionally substituted aryl group having 1 to 12 carbon atoms The alkyl group (the -CH2- in the alkyl group is replaced with -O- or -CO-) It is more preferable that the group is a group consisting of

[0027] Specifically, X 2 is the formula (X 2 -1), a group represented by the formula (X 2 -2), a group represented by the formula (X 2 -3) or a group represented by the formula (X 2 -4) is preferred. TIFF2025013803000013.tif31154[In the formula, R 1 , R 2 , R 3 , R 4 , R 5 and R 6 each independently represents an alkyl group having 1 to 6 carbon atoms, represents an alicyclic hydrocarbon group having 5 to 12 carbon atoms or a group formed by combining two or more of these groups, The -CH2- contained in the alkyl group and the alicyclic hydrocarbon group is not limited to -O-, -S-, -CO-. or -SO2-, and the alkyl group and the alicyclic hydrocarbon group may be substituted. It may have a substituent. * is X a and X b represents the bond position with The combined group is a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined one by one. The group may be a combination of two or more of either one or two or more of both. The combined carbon number of the groups is 39 or less, preferably 37 or less.

[0028] Among them, R 1 , R 2 , R 3 , R 4 , R 5 and R 6 As the alkyl group, an alkyl group having 1 to 6 carbon atoms is preferably used. The -CH2- contained in the alkyl group may be replaced with -O- or -CO-. The alkyl group may have a substituent.) and an alicyclic hydrocarbon group having 5 to 12 carbon atoms (the The -CH2- contained in the alicyclic hydrocarbon group may be converted to -O-, -S-, -CO- or -SO2-. The alicyclic hydrocarbon group may have a substituent. An alkyl group having 1 to 6 carbon atoms (wherein -CH2- in the alkyl group is -O- or -CO-) ) and an alicyclic hydrocarbon group having 5 to 12 carbon atoms (the alicyclic hydrocarbon group The -CH2- in the formula is replaced with -O-, -S-, -CO- or -SO2-. and a group which may have a substituent. Preferably, the aryl group is a methoxy group, an adamantyl group (the -CH2- contained in the adamantyl group is -O - or -CO-, and the adamantyl group may have a substituent. ) or an alkyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkyl group is preferably -O- or -CO-; and a group combining an adamantyl group (the group may have a substituent.

[0029] The carboxylate anion in the carboxylate salt represented by formula (I) may be any of the following: carboxylate anion and the like. TIFF2025013803000014.tif133158

[0030] TIFF2025013803000015.tif117149

[0031] TIFF2025013803000016.tif119157

[0032] TIFF2025013803000017.tif110156

[0033] TIFF2025013803000018.tif79148

[0034] Specific examples of the carboxylate (I) include carboxylates having any combination of the above cations and anions. Specific examples of the carboxylate (I) are shown in the table below. In the table below, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation. For example, the carboxylate (I-1) is a compound having an anion represented by the formula (Ia-1) and an anion represented by the formula (I -c-1) is a salt formed with a cation represented by the following formula: TIFF2025013803000019.tif29102 [Table 1] TIFF2025013803000021.tif223154 TIFF2025013803000022.tif223154 TIFF2025013803000023.tif223154 TIFF2025013803000024.tif223154 TIFF2025013803000025.tif223154 TIFF2025013803000026.tif223154 TIFF2025013803000027.tif223154 TIFF2025013803000028.tif223154 TIFF2025013803000029.tif223154 TIFF2025013803000030.tif223154 TIFF2025013803000031.tif223154 TIFF2025013803000032.tif223154 TIFF2025013803000033.tif114153

[0035] Among them, the carboxylate (I) includes salts (I-1) to (I-5) and salt (I-55). ) ~ salt (I-59), salt (I-109) ~ salt (I-113), salt (I-163) ~ salt (I -167), salt (I-217) ~ salt (I-221), salt (I-271) ~ salt (I-275) ), salt(I-325)~salt(I-329), salt(I-379)~salt(I-383), salt( I-433) to salt (I-437), and salt (I-487) to salt (I-491) are preferred.

[0036] <Method for producing carboxylate (I)> The carboxylate (I) is a salt represented by the formula (Ia) and a salt represented by the formula (Ib). It can be produced by reacting in a solvent. JPEG2025013803000034.jpg44163 [wherein all symbols have the same meanings as defined above. R A , R B and R C each independently represents a hydrocarbon group having 1 to 12 carbon atoms, or R A , R B and R C may combine together to form an aromatic ring. D is a hydrogen atom or a carbon atom represents a hydrocarbon group having a molecular weight of from 1 to 12. Solvents include chloroform, monochlorobenzene, acetonitrile, water, etc. can be. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0037] The salt represented by formula (Ib) is disclosed in JP 2011-39502 A and JP 2014-888 A. The salts can be synthesized by referring to the method described in the publication of US Pat. No. 367, and include salts represented by the following formula: Examples include: JPEG2025013803000035.jpg119151

[0038] JPEG2025013803000036.jpg2957

[0039] The salt represented by formula (Ia) is a compound represented by formula (Ic) and a compound represented by formula (Id). The compound is reacted in a solvent in the presence of diphosphorus pentaoxide and methanesulfonic acid. It can be manufactured more. TIFF2025013803000037.tif44141 [wherein all symbols have the same meanings as defined above.] Examples of the solvent include chloroform and acetonitrile. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0040] The compound represented by formula (Id) includes a salt represented by the following formula, which is commercially available. It is easily available. TIFF2025013803000038.tif2179

[0041] The compound represented by formula (Ic) can be prepared by reacting a salt represented by formula (Ie) in a solvent in the presence of a base. It can be produced by reacting TIFF2025013803000039.tif41106 [wherein all symbols have the same meanings as defined above.] The base includes sodium hydroxide, potassium hydroxide, and the like. Solvents include chloroform, dimethylformamide, acetonitrile, and water. can be done. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0042] Examples of the salt represented by formula (Ie) include the salt represented by the following formula, which is readily available on the market. can be obtained at. TIFF2025013803000040.tif26102

[0043] [Carboxylic Acid Generator] The carboxylic acid generator of the present invention is an acid generator containing a carboxylate (I). The carboxylate (I) can act as an acid generator in a resist composition. When the carboxylate (I) is used as an acid generator in the resist composition, may contain only one type or two or more types of carboxylates (I). The carboxylic acid generator of the present invention is a carboxylic acid generator known in the resist field other than the carboxylate (I). In this case, the carboxylate (I) and the salt other than the carboxylate (I) may be included. The ratio (mass ratio) of the content to the carboxylate is usually 1:99 to 100:0, preferably 1: :99 to 99:1, more preferably 2:98 to 98:2, and even more preferably 5:95 to 9 It's 5:5. In addition, the resist composition of the present invention contains a carboxylate (I) as described below. The acid generator (B) may be an acid generator known in the resist field other than the carboxylic acid generator. The acid generator (B) may be used alone or in combination of two or more. The above may be used in combination. When an acid generator (B) is contained, the content ratio of the carboxylate (I) to the acid generator (B) The mass ratio of the carboxylate (I):acid generator (B) is usually 1:99 to 100:0, preferably Preferably, the ratio is 1:99 to 99:1, more preferably 2:98 to 98:2, and even more preferably 5: :95~95:5.

[0044] [Resist Composition] The resist composition comprises a carboxylic acid generator containing the carboxylate (I) of the present invention and a carboxylate. The acid generator (B) is a resin having an acid labile group (hereinafter referred to as "resin (A)"). In this context, the term "acid labile group" refers to a group that has a leaving group and is labile upon contact with an acid. The leaving group is eliminated by the reaction to form a hydrophilic group (e.g., a hydroxy group or a carboxy group). It means a group. The resist composition of the present invention contains, as a carboxylic acid generator other than the carboxylate (I), a resist The composition may also contain a carboxylic acid generator known in the art. The resist composition further contains a quencher (hereinafter sometimes referred to as “quencher (C)”). The composition may contain a binder (which may be referred to hereinafter as "solvent (E)") and / or a solvent (which may be referred to hereinafter as "solvent (E)").

[0045] <Acid Generator (B)> The acid generator (B) may be either a nonionic or ionic acid generator. Biocides include sulfonate esters (e.g., 2-nitrobenzyl esters, aromatic sulfonates, etc.). sulfonates, oximesulfonates, N-sulfonyloxyimides, sulfonyloxyketones ton, diazonaphthoquinone 4-sulfonate), sulfones (e.g. disulfone, ketone Examples of ionic acid generators include oni Onium salts containing ion cations (e.g. diazonium salts, phosphonium salts, sulfonium salts) The anion of the onium salt is typically a sulfonate anion. ion, sulfonylimide anion, sulfonylmethide anion, etc.

[0046] Examples of the acid generator (B) include those described in JP-A-63-26653 and JP-A-55-164824. JP-A-62-69263, JP-A-63-146038, JP-A-63-163452 , JP-A-62-153853, JP-A-63-146029, U.S. Pat. No. 3,779, 778, U.S. Pat. No. 3,849,137, German Patent No. 3914407, European Patent No. Compounds that generate an acid when exposed to radiation, such as those described in US Pat. No. 5,312,712, can be used. In addition, a compound produced by a known method may be used. The acid generator (B) may be a compound containing two or more kinds of compounds. They may also be used in combination.

[0047] The acid generator (B) is preferably a fluorine-containing acid generator, more preferably represented by the formula (B1): (hereinafter, may be referred to as "acid generator (B1)"). TIFF2025013803000041.tif2863[In formula (B1), Q b1 and Q b2 each independently represents a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. represents an alkyl group. L b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, The -CH2- contained therein may be replaced with -O- or -CO-, and the divalent saturated carbon atom A hydrogen atom contained in the hydride group may be substituted with a fluorine atom or a hydroxy group. Y is a methyl group which may have a substituent or a substituted group having 3 to 1 carbon atoms. 8, and -CH2- contained in the alicyclic hydrocarbon group is -O-, - It may be replaced by S(O)2- or -CO-. Z + represents an organic cation.

[0048] Q b1 and Q b2 The perfluoroalkyl group represented by the formula (I) is a trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perfluoro perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group, Examples include a fluoropentyl group and a perfluorohexyl group. Q b1 and Q b2 each independently represents a fluorine atom or a trifluoromethyl group; and more preferably, both of them are fluorine atoms.

[0049] L b1The divalent saturated hydrocarbon group in the formula (I) is a linear alkanediyl group, a branched alkanediyl group, candiyl group, and monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups. It may also be a group formed by combining two or more of the following. Specifically, methylene group, ethylene group, propane-1,3-diyl group, butane-1,4 -diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1 ,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1 ,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, Tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane- 1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17- Linear alkanediyl groups such as diyl groups; Ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane- 1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group branched alkanediyl groups such as 2-methylbutane-1,4-diyl group; Cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexa Cycloalkanediyl groups such as cyclohexene-1,4-diyl group and cyclooctane-1,5-diyl group a monocyclic divalent alicyclic saturated hydrocarbon group, Norbornane-1,4-diyl group, Norbornane-2,5-diyl group, Adamantane- Polycyclic divalent alicyclic saturated carbons such as 1,5-diyl and adamantane-2,6-diyl groups Hydrogen groups and the like.

[0050] L b1The -CH2- contained in the divalent saturated hydrocarbon group represented by the formula: The substituted group is, for example, a group represented by any one of formulas (b1-1) to (b1-3). In addition, the groups represented by the formulae (b1-1) to (b1-3) and their components are also included. In the exemplary groups represented by formulae (b1-4) to (b1-11), * and ** represent bonds. represents the position of the bond to -Y.

[0051] TIFF2025013803000042.tif26118[In formula (b1-1), L b2 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, A hydrogen atom contained in the group may be substituted with a fluorine atom. L b3 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, The hydrogen atoms contained in the group may be substituted with fluorine atoms or hydroxy groups, and the saturated The --CH2-- contained in the hydrocarbon group may be replaced by --O-- or --CO--. However, L b2 and L b3 The total number of carbon atoms is 22 or less. In formula (b1-2), L b4 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, A hydrogen atom contained in the group may be substituted with a fluorine atom. L b5 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, The hydrogen atoms contained in the group may be substituted with fluorine atoms or hydroxy groups, and the saturated The --CH2-- contained in the hydrocarbon group may be replaced by --O-- or --CO--. However, L b4 and L b5 The total number of carbon atoms is 22 or less. In formula (b1-3), L b6 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, A hydrogen atom contained in the group may be substituted with a fluorine atom or a hydroxy group. L b7 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, The hydrogen atoms contained in the group may be substituted with fluorine atoms or hydroxy groups, and the saturated The --CH2-- contained in the hydrocarbon group may be replaced by --O-- or --CO--. However, L b6 and L b7 The total number of carbon atoms is 23 or less.

[0052] In the groups represented by formulae (b1-1) to (b1-3), the saturated hydrocarbon group When -CH2- is replaced by -O- or -CO-, the number of carbon atoms before the replacement is The number of carbon atoms in the hydrocarbon group. As the divalent saturated hydrocarbon group, L b1 The divalent saturated hydrocarbon groups are the same as those mentioned above. can be.

[0053] L b2 is preferably a single bond. L b3 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b4 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms, The hydrogen atom contained in the hydrogen group may be substituted with a fluorine atom. L b5 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b6 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms, The hydrogen atoms contained in the hydrocarbon group may be substituted with fluorine atoms. L b7 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, The hydrogen atoms contained in the hydrocarbon group may be substituted with fluorine atoms or hydroxy groups. In the divalent saturated hydrocarbon group, -CH2- is replaced with -O- or -CO-. This is also fine.

[0054] L b1 The -CH2- contained in the divalent saturated hydrocarbon group represented by the formula: The substituted group is preferably a group represented by formula (b1-1) or formula (b1-3).

[0055] The group represented by formula (b1-1) is preferably any of the groups represented by formulas (b1-4) to (b1-8). Examples of such groups include those mentioned above. TIFF2025013803000043.tif48120[In formula (b1-4), L b8 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, A hydrogen atom contained in the group may be substituted with a fluorine atom or a hydroxy group. In formula (b1-5), L b9 represents a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, The contained --CH2-- may be replaced by --O-- or --CO--. L b10 represents a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, The hydrogen atoms contained in the hydrocarbon group may be substituted with fluorine atoms or hydroxy groups. . However, L b9 and L b10 The total number of carbon atoms is 20 or less. In formula (b1-6), L b11 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b12 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, The hydrogen atoms contained in the hydrocarbon group may be substituted with fluorine atoms or hydroxy groups. . However, L b11 and L b12 The total number of carbon atoms is 21 or less. In formula (b1-7), L b13 represents a divalent saturated hydrocarbon group having 1 to 19 carbon atoms. L b14 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, The --CH2-- contained in the hydrocarbon group may be replaced by --O-- or --CO--. L b15 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, The hydrogen atoms contained in the hydrocarbon group may be substituted with fluorine atoms or hydroxy groups. . However, L b13 ~L b15 The total number of carbon atoms is 19 or less. In formula (b1-8), L b16 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, The -CH2- contained in the formula may be replaced by -O- or -CO-. L b17 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms. L b18 represents a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, The hydrogen atoms contained in the hydrocarbon group may be substituted with fluorine atoms or hydroxy groups. . However, L b16 ~L b18 The total number of carbon atoms is 19 or less.

[0056] L b8is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b9 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b10 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, more preferably More preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b11 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b12 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b13 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b14 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b15 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, more preferably More preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b16 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b17 is preferably a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b18 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, more preferably More preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.

[0057] The group represented by formula (b1-3) is represented by formulas (b1-9) to (b1-11), Examples of the groups include those represented by the following formula: TIFF2025013803000044.tif23139 [In formula (b1-9), L b19 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, A hydrogen atom contained in the group may be substituted with a fluorine atom. L b20 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, The hydrogen atoms contained in the group are substituted with fluorine atoms, hydroxy groups, or alkylcarbonyloxy groups. The -CH2- contained in the alkylcarbonyloxy group may be -O- or -CO-, and the hydrogen atom contained in the alkylcarbonyloxy group may be replaced by The atom may be substituted with a hydroxy group. However, L b19 and L b20 The total number of carbon atoms is 23 or less. In formula (b1-10), L b21 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, A hydrogen atom contained in the group may be substituted with a fluorine atom. L b22 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b23 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, The hydrogen atoms contained in the group are substituted with fluorine atoms, hydroxy groups, or alkylcarbonyloxy groups. The -CH2- contained in the alkylcarbonyloxy group may be -O- or -CO-, and the hydrogen atom contained in the alkylcarbonyloxy group may be replaced by The atom may be substituted with a hydroxy group. However, L b21 , L b22 and L b23 The total number of carbon atoms is 21 or less. In formula (b1-11), L b24 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, A hydrogen atom contained in the group may be substituted with a fluorine atom. L b25 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b26 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, The hydrogen atoms contained in the group are substituted with fluorine atoms, hydroxy groups, or alkylcarbonyloxy groups. The -CH2- contained in the alkylcarbonyloxy group may be -O- or -CO-, and the hydrogen atom contained in the alkylcarbonyloxy group may be replaced by The atom may be substituted with a hydroxy group. However, L b24 , L b25 and L b26 The total number of carbon atoms is 21 or less.

[0058] In addition, in the groups represented by formulae (b1-9) to (b1-11), When a hydrogen atom in a hydrocarbon group is substituted with an alkylcarbonyloxy group, The number of carbon atoms before substitution is regarded as the number of carbon atoms of the saturated hydrocarbon group.

[0059] The alkylcarbonyloxy group includes an acetyloxy group, a propionyloxy group, a bromooxy group, Thyryloxy group, cyclohexylcarbonyloxy group, adamantylcarbonyloxy group etc.

[0060] Examples of the group represented by formula (b1-4) include the following. TIFF2025013803000045.tif16154

[0061] Examples of the group represented by formula (b1-5) include the following. TIFF2025013803000046.tif68151

[0062] Examples of the group represented by formula (b1-6) include the following. TIFF2025013803000047.tif31163

[0063] Examples of the group represented by formula (b1-7) include the following. TIFF2025013803000048.tif58145

[0064] Examples of the group represented by formula (b1-8) include the following. TIFF2025013803000049.tif23150

[0065] Examples of the group represented by formula (b1-2) include the following. TIFF2025013803000050.tif31161

[0066] Examples of the group represented by formula (b1-9) include the following. TIFF2025013803000051.tif44137

[0067] Examples of the group represented by formula (b1-10) include the following. TIFF2025013803000052.tif92165

[0068] Examples of the group represented by formula (b1-11) include the following. TIFF2025013803000053.tif84164

[0069] The alicyclic hydrocarbon group represented by Y is, for example, X in formula (I). 0 As an example of Examples of the groups include those represented by formulae (Y1) to (Y11) and (Y36) to (Y38). The -CH2- contained in the alicyclic hydrocarbon group represented by Y is -O-, -S(O)2- or - When the group is replaced by CO-, the number of the CO- may be one or more. Examples of the groups include those represented by the formulae (Y12) to (Y35) and (Y39) to (Y41). can be. The alicyclic hydrocarbon group represented by Y is preferably a group represented by the formula (Y1) to the formula (Y20), Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39) to formula (Y41) and more preferably a group represented by formula (Y11), formula (Y15), or formula (Y16) ), formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y 39) or (Y40), and more preferably a group represented by formula (Y11), formula (Y1 5), formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula ( Y39) or a group represented by formula (Y40). The alicyclic hydrocarbon group represented by Y is represented by the formula (Y28) to the formula (Y35), the formula (Y39) to the formula (Y In the case of a spiro ring containing an oxygen atom such as 40), the alkanediyl between the two oxygen atoms is The group preferably has one or more fluorine atoms. In the candiyl group, the methylene group adjacent to the oxygen atom is not substituted with a fluorine atom. It is preferable that

[0070] The substituent of the methyl group represented by Y is a halogen atom, a hydroxyl group, a methyl group having 3 to 1 carbon atoms, 6 alicyclic hydrocarbon groups, aromatic hydrocarbon groups having 6 to 18 carbon atoms, glycidyloxy groups, -( CH2) ja -CO-OR b1 Group or -(CH2) ja -O-CO-R b1 group (in the formula, R b1 is an alkyl group having 1 to 16 carbon atoms, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, to 18 aromatic hydrocarbon groups or combinations thereof, The -CH2- contained in the hydrocarbon group is replaced by -O-, -SO2- or -CO-. The hydrogen atoms contained in the alkyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be The atom may be replaced by a hydroxy group or a fluorine atom. ja is any one of 0 to 4. It represents any one of the integers. The substituent of the alicyclic hydrocarbon group represented by Y is a halogen atom, a hydroxyl group, an alkyl group having 1 to 12 carbon atoms which may be substituted with an aryloxy group; an alicyclic group having 3 to 16 carbon atoms; Hydrocarbon groups, alkoxy groups having 1 to 12 carbon atoms, aromatic hydrocarbon groups having 6 to 18 carbon atoms, carbon Aralkyl groups having 7 to 21 carbon atoms, alkylcarbonyl groups having 2 to 4 carbon atoms, and glycidyloxy groups. , -(CH2) ja -CO-OR b1 Group or -(CH2) ja -O-CO-R b1 base( In the formula, R b1 is an alkyl group having 1 to 16 carbon atoms, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, The alkyl group and the aromatic hydrocarbon group each having 6 to 18 carbon atoms or a combination thereof are represented by the formula: The -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -SO2- or -CO-. The alkyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be different from each other. The hydrogen atom may be replaced by a hydroxy group or a fluorine atom. (It represents any integer of either 0 or 1.)

[0071] Examples of halogen atoms include fluorine, chlorine, bromine and iodine atoms. do. Examples of the alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a methylcyclohexane group, and a cyclohexane group. Cyclohexyl group, dimethylcyclohexyl group, cycloheptyl group, cyclooctyl group, Examples of the alkyl group include a carbonyl group and an adamantyl group. Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and the like. Examples of the aromatic hydrocarbon group include aryl groups such as an alkyl group and an aryl group such as a phenyl group and a phenanthryl group. The aromatic hydrocarbon group may have a hydrocarbon group or an alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a chain hydrocarbon group. The hydrogen group is a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a p-ethylphenyl group, group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6- Examples of the aromatic hydrocarbon group having an alicyclic hydrocarbon group include: Examples thereof include a p-cyclohexylphenyl group and a p-adamantylphenyl group. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, and a bromoalkyl group. butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group , 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group etc. Examples of alkyl groups substituted with hydroxy groups include hydroxymethyl groups, hydroxy Examples of such groups include hydroxyalkyl groups such as an ethyl group. The alkoxy group includes a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentoxy group, aryloxy, hexyloxy, heptyloxy, octyloxy, decyloxy and dodecyloxy groups. The aralkyl group includes a benzyl group, a phenethyl group, a phenylpropyl group, a naphthyl group, and the like. Examples of the alkyl group include ethyl and naphthylethyl groups. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. etc.

[0072] Y includes the following: TIFF2025013803000054.tif125146

[0073] TIFF2025013803000055.tif82127

[0074] Y is preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent. More preferably, it is an adamantyl group which may have a substituent. The -CH2- constituting the adamantyl group is replaced with -CO-, -S(O)2- or -CO-. Y is more preferably an adamantyl group, a hydroxyadamantyl group, A group, an oxoadamantyl group, or a group represented by the following formula: TIFF2025013803000056.tif58160

[0075] The anion in the salt represented by formula (B1) is represented by the formulas (B1-A-1) to (B1- A-55) (hereinafter, "anion (B1-A-1), etc." according to the formula number) Formula (B1-A-1) to Formula (B1-A-4), Formula (B1 -A-9), formula (B1-A-10), formula (B1-A-24) ~ formula (B1-A-33), formula (B1-A-36) ~ Formula (B1-A-40), Formula (B1-A-47) ~ Formula (B1-A-5 5) is more preferable.

[0076] TIFF2025013803000057.tif111143

[0077] TIFF2025013803000058.tif128167

[0078] TIFF2025013803000059.tif117146

[0079] TIFF2025013803000060.tif107140

[0080] TIFF2025013803000061.tif124167 Here R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably R is preferably a methyl group or an ethyl group. i8 is, for example, an aliphatic hydrocarbon having 1 to 12 carbon atoms. a group, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or More preferably, the group formed by combining these is a methyl group, an ethyl group, or a cyclohexyl group. It is a silyl group or an adamantyl group. A4 is a single bond or an alkanediyl having 1 to 4 carbon atoms. It is based on Q b1 and Q b2 has the same meaning as above. Specific examples of the anion in the salt represented by formula (B1) include those described in JP-A-2010-20 Examples of the anions include those described in US Pat. No. 4,646.

[0081] Preferred anions in the salt represented by formula (B1) include those represented by formulae (B1a-1) to (B1a-2) B1a-34) are examples of anions represented by the formula: TIFF2025013803000062.tif193158

[0082] TIFF2025013803000063.tif177151

[0083] Among them, the compounds represented by formulae (B1a-1) to (B1a-3) and (B1a-7) to (B1a- 16), formula (B1a-18), formula (B1a-19), formula (B1a-22) ~ formula (B1a- 30) is preferably an anion represented by any one of the following:

[0084] Z1 + Examples of the organic cation include organic onium cations, organic sulfonium cations, Organic iodonium cations, organic ammonium cations, benzothiazolium cations and Among these, organic sulfonium cations are Preferred are iodonium and organic iodonium cations, and more preferred are arylsulfonium cations. Specifically, the cation represented by any one of formulas (b2-1) to (b2-4) (hereinafter In some cases, they are referred to as "cation (b2-1)" depending on the formula number. TIFF2025013803000064.tif77115In equations (b2-1) to (b2-4), R b4 ~R b6 each independently represents a chain hydrocarbon group having 1 to 30 carbon atoms, It represents an alicyclic hydrocarbon group or an aromatic hydrocarbon group having 6 to 36 carbon atoms, and the chain hydrocarbon group The hydrogen atoms contained in the alkyl group are hydroxyl groups, alkoxy groups having 1 to 12 carbon atoms, and fatty acids having 3 to 12 carbon atoms. The alicyclic group may be substituted with a cyclic hydrocarbon group or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms contained in the hydrocarbon group are halogen atoms, aliphatic hydrocarbon groups having 1 to 18 carbon atoms, may be substituted with an alkylcarbonyl group having 2 to 4 carbon atoms or a glycidyloxy group. The hydrogen atom contained in the aromatic hydrocarbon group is replaced by a halogen atom, a hydroxyl group, or a C1 It may be substituted with up to 12 alkoxy groups. R b4 and R b5 are bonded together to form a ring with the sulfur atom to which they are attached The -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. good. R b7and R b8 each independently represents a hydroxyl group or an aliphatic hydrocarbon group having 1 to 12 carbon atoms; Or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of 0 to 5. When m2 is 2 or more, multiple R b7 may be the same or different, and when n2 is 2 or more, R in Numbers b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or a chain hydrocarbon group having 3 to 4 carbon atoms, Represents 36 alicyclic hydrocarbon groups. R b9 and R b10 are bonded together to form a ring with the sulfur atom to which they are attached The -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. Good too. R b11 is a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, It represents a hydrogen group or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or It represents an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the chain hydrocarbon is It may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the aromatic hydrocarbon group The hydrogen atom is preferably an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyl group having 1 to 12 carbon atoms. It may be substituted with an oxy group. R b11 and R b12 means that they are bonded together to form a ring including the -CH-CO- to which they are attached. The -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. It is also possible. Rb13 ~R b18 each independently represents a hydroxyl group or an aliphatic hydrocarbon group having 1 to 12 carbon atoms; Or an alkoxy group having 1 to 12 carbon atoms. L b31 represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5. q2 and r2 each independently represent an integer of 0 to 4. u2 represents 0 or 1. When o2 is 2 or more, multiple R b13 are the same or different, and when p2 is 2 or more, multiple R b14 are the same or different, and when q2 is 2 or more, multiple R b15 are the same or different, r2 When is 2 or more, multiple R b16 are the same or different, and when s2 is 2 or more, multiple R b17 teeth Identical or different, when t2 is 2 or more, multiple R b18 are the same or different. The aliphatic hydrocarbon group refers to a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include a methyl group, an ethyl group, a propyl group, an isopropyl group, and a butyl group. butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and An example of the alkyl group is 2-ethylhexyl. In particular, R b9 ~R b12 The chain hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the hydrogen group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. cycloalkyl groups such as cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl groups. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl and adamantyl groups. , norbornyl group, and the following groups. TIFF2025013803000065.tif9158 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably has 4 to 12 carbon atoms. Examples of alicyclic hydrocarbon groups in which hydrogen atoms are replaced by aliphatic hydrocarbon groups include methylcyclohexane. cyclohexyl, dimethylcyclohexyl, 2-methyladamantan-2-yl, 2-ethyl 2-Isopropyladamantan-2-yl group, methylnor Examples of the alkyl group include a bornyl group and an isobornyl group. In the alicyclic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably Preferably, it is 20 or less. Examples of the aromatic hydrocarbon group include a phenyl group, a biphenyl group, a naphthyl group, and a phenanthryl group. The aromatic hydrocarbon group may be an open-chain hydrocarbon group or an alicyclic hydrocarbon group. The aromatic hydrocarbon group having a chain hydrocarbon group may be a tolyl group. , xylyl group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert-butyl Examples of the phenyl group include a phenyl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. As the aromatic hydrocarbon group having an alicyclic hydrocarbon group, p-cyclohexylphenyl Examples of the aromatic hydrocarbon group include a chain carbonyl group and a p-adamantylphenyl group. When the compound has a hydrocarbon group or an alicyclic hydrocarbon group, it is preferably a chain hydrocarbon group having 1 to 18 carbon atoms and a carbon atom. Alicyclic hydrocarbon groups having 3 to 18 prime numbers are preferred. Examples of aromatic hydrocarbon groups in which hydrogen atoms are substituted with alkoxy groups include p-methoxyphenyl. Examples thereof include the aryl group. Examples of the chain hydrocarbon group in which a hydrogen atom is replaced by an aromatic hydrocarbon group include a benzyl group, a phenoxy group, and the like. ethyl group, phenylpropyl group, trityl group, naphthylmethyl group, naphthylethyl group, etc. Examples of such groups include aralkyl groups. The alkoxy group includes a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentoxy group, aryloxy, hexyloxy, heptyloxy, octyloxy, decyloxy and dodecyloxy groups. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. can be done. Examples of halogen atoms include fluorine, chlorine, bromine and iodine atoms. do. The alkylcarbonyloxy group includes a methylcarbonyloxy group, an ethylcarbonyloxy group, and an ethyl Oxy group, propylcarbonyloxy group, isopropylcarbonyloxy group, butylcarbonyloxy group butylcarbonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy group Si group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyl Examples thereof include an oxy group and a 2-ethylhexylcarbonyloxy group. R b4 and R b5 and form a ring together with the sulfur atom to which they are attached: The ring may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated. The ring may be one having 3 to 18 carbon atoms, and preferably one having 4 to 18 carbon atoms. The ring containing a sulfur atom may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring. Examples of the ring include the following rings, where * represents the bond position. TIFF2025013803000066.tif23144R b9 and R b10The ring formed by and together can be monocyclic, polycyclic, aromatic, or nonaromatic. The ring may be either a saturated or unsaturated ring. Examples of the ring include a 3-membered ring to a 12-membered ring. Preferably, it is a 3- to 7-membered ring. For example, a thiolane-1-ium ring (tetrahydrothio ophenium ring), thian-1-ium ring, 1,4-oxathiane-4-ium ring, etc. Can be obtained. R b11 and R b12 The ring formed by and together can be monocyclic, polycyclic, aromatic, or nonaromatic. The ring may be either a saturated or unsaturated ring. Examples of the ring include a 3-membered ring to a 12-membered ring. and preferably a 3- to 7-membered ring. Oxocycloheptane ring, oxocyclohexane ring , oxonorbornane ring, oxoadamantane ring, etc.

[0085] Among the cations (b2-1) to (b2-4), the cation (b2 -1). Examples of the cation (b2-1) include the following cations. TIFF2025013803000067.tif79158

[0086] TIFF2025013803000068.tif74143

[0087] Examples of the cation (b2-2) include the following cations. TIFF2025013803000069.tif18127

[0088] Examples of the cation (b2-3) include the following cations. TIFF2025013803000070.tif26139

[0089] Examples of the cation (b2-4) include the following cations. TIFF2025013803000071.tif83167

[0090] The acid generator (B) is a combination of the above-mentioned anion and the above-mentioned organic cation. The acid generator (B) is preferably a compound represented by the formula (B1a-1) to Formula (B1a-3), Formula (B1a-7) to Formula (B1a-16), Formula (B1a-18), Formula (B1a-19), an aniline represented by any one of formulas (B1a-22) to (B1a-34) A combination of on and the cation (b2-1) or the cation (b2-3) is also included.

[0091] The acid generator (B) is preferably one represented by formula (B1-1) to formula (B1-48), Among them, those containing an arylsulfonium cation are preferred. Formula (B1-1) ~ Formula (B1-3), Formula (B1-5) ~ Formula (B1-7), Formula (B1-11) ~Formula (B1-14), Formula (B1-20) ~Formula (B1-26), Formula (B1-29), Formula (B Those represented by formulas (B1-31) to (B1-48) are particularly preferred. TIFF2025013803000072.tif119149

[0092] JPEG2025013803000073.jpg77147

[0093] JPEG2025013803000074.jpg147147

[0094] JPEG2025013803000075.jpg61154

[0095] TIFF2025013803000076.tif107143

[0096] In the resist composition of the present invention, the content of the carboxylate (I) in the resist composition is The solid content is preferably 0.1% by mass or more and 35% by mass or less, and more preferably 0.5% by mass or more and 30% by mass or less. % by mass or less is more preferable, and 1% by mass or more and 25% by mass or less is even more preferable. In addition, when the acid generator (B) is contained, the total of the carboxylate (I) and the acid generator (B) is The content is preferably 1 part by mass or more (more preferably 1 part by mass or more) based on 100 parts by mass of the resin (A). 3 parts by mass or more), preferably 55 parts by mass or less (more preferably 50 parts by mass or less, even more preferably Preferably, the amount is 45 parts by mass or less.

[0097] <Resin (A)> Resin (A) contains a structural unit having an acid labile group (hereinafter sometimes referred to as “structural unit (a1)”). The resin (A) may further contain a structural unit other than the structural unit (a1). As the structural unit other than the structural unit (a1), a structural unit not having an acid labile group ( (hereinafter sometimes referred to as "structural unit (s)"), structural unit (a1) and structural unit (s) other than (for example, a structural unit having a halogen atom described later (hereinafter referred to as "structural unit (a4) "), a structural unit having a non-leaving hydrocarbon group described below (hereinafter referred to as a "structural unit ( a5) and other structural units derived from monomers known in the art etc.

[0098] <Structural unit (a1)> The structural unit (a1) is a monomer having an acid labile group (hereinafter referred to as "monomer (a1)"). In some cases, The acid labile group contained in the resin (A) is a group represented by formula (1) (hereinafter, also referred to as group (1)). ) and / or a group represented by formula (2) (hereinafter also referred to as group (2)) is preferred. TIFF2025013803000077.tif2397 [In formula (1), Ra1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms , an alicyclic hydrocarbon group having 3 to 20 carbon atoms, or a combination thereof, or R a1 and R a2 are bonded together with the carbon atoms to which they are bonded to form alicyclic hydrocarbons having 3 to 20 carbon atoms. Form a group. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * indicates the bond position.] TIFF2025013803000078.tif2379[In formula (2), R a1’ and R a2’ each independently represents a hydrogen atom or a group having 1 to 1 carbon atoms R represents a hydrocarbon group of a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ Reach BiR a3’ are bonded to each other and, together with the carbon atom to which they are bonded and X, A heterocyclic group is formed, and -CH2- contained in the hydrocarbon group and the heterocyclic group is -O- or - May be replaced with S-. X represents an oxygen atom or a sulfur atom. na′ represents 0 or 1. * indicates the bond position.]

[0099] R a1 , R a2 and R a3 The alkyl group in the formula (I) is a methyl group, an ethyl group, a propyl group, Examples of the alkyl group include an aryl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. R a1 , R a2 and R a3 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, Examples of cycloalkyl groups include cycloheptyl and cyclooctyl groups. Examples of the hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups: (* indicates the bond position). a1 ~R a3 The number of carbon atoms in the alicyclic hydrocarbon group is , preferably 3 to 16. TIFF2025013803000079.tif10159As a group combining an alkyl group and an alicyclic hydrocarbon group, for example, methylcyclohexane xyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group , adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc. do. Preferably, ma is 0 and na is 1. R a1 and R a2 When they are bonded to each other to form an alicyclic hydrocarbon group, -C(R a1 )(R a2 )(R a3 The alicyclic hydrocarbon group preferably has 3 carbon atoms. ~12. * indicates the bond position with -O-. TIFF2025013803000080.tif31136

[0100] R a1’ , R a2’ and R a3’ The hydrocarbon group in the Examples of the alkyl group include a fluorine atom, an aromatic hydrocarbon group, and a group formed by combining these groups. can be done. The alkyl group and the alicyclic hydrocarbon group are R a1 , R a2 and R a3 The same groups as those listed in The following are some of the reasons. Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, Examples of the aryl group include a phenanthryl group and the like. The combined group may be a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined. (e.g., cycloalkylalkyl groups), aralkyl groups such as benzyl groups, and alkyl groups. Aromatic hydrocarbon groups (p-methylphenyl, p-tert-butylphenyl, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl- 6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexyl p-adamantylphenyl group, p-adamantylphenyl group, phenylcyclohexyl group, etc. Examples include aryl-cycloalkyl groups. R a2’ and R a3’ are bonded to each other and together with the carbon atom to which they are bonded and X, When a ring is formed, -C(R a1’ )(R a2’ )-XR a3’ The following groups are listed as examples: * indicates the bond position. TIFF2025013803000081.tif21142R a1’ and R a2’ At least one of these is preferably a hydrogen atom. na' is preferably 0.

[0101] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 is an alkyl group, ma=0, and n A group where a=1. As the group, a tert-butoxycarbonyl group is preferable. In formula (1), R a1 , Ra2 However, together with the carbon atoms to which they are bonded, they form adamantane. Forming a ethyl group, R a3 is an alkyl group, ma=0, and na=1. In formula (1), R a1 and R a2 are each independently an alkyl group; R a3 Adama A group in which ma=0 and na=1. Specific examples of the group (1) include the following groups. * represents a bonding position. TIFF2025013803000082.tif48157

[0102] TIFF2025013803000083.tif45147

[0103] Specific examples of the group (2) include the following groups. * represents the bonding position. TIFF2025013803000084.tif74154

[0104] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond. More preferably, it is a (meth)acrylic monomer having an acid labile group.

[0105] Of the (meth)acrylic monomers having an acid labile group, those having 5 to 20 carbon atoms are preferred. Examples of such a bulky structure include those having an alicyclic hydrocarbon group. A resin (A) having a structural unit derived from a monomer (a1) having the above structure is used in a resist composition. This can improve the resolution of the resist pattern.

[0106] As a structural unit derived from a (meth)acrylic monomer having a group (1), 0) (hereinafter, may be referred to as structural unit (a1-0)), -1) (hereinafter, may be referred to as structural unit (a1-1)) or a1-2) (hereinafter, may be referred to as structural unit (a1-2)). Preferably, the structural unit (a1-1) is selected from the group consisting of the structural unit (a1-2) These may be used alone or in combination of two or more. They may be used in combination. TIFF2025013803000085.tif38127 [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 each independently represents -O- or * -O-(CH2) k1 - represents CO-O-, k1 represents an integer of 1 to 7, and * represents the bond position with -CO-. vinegar. R a01 , R a4 and R a5 each independently represents a hydrogen atom or a methyl group. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, 18 alicyclic hydrocarbon groups or combinations thereof. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, It represents an alicyclic hydrocarbon group or a group formed by combining these. m1 represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3.

[0107] R a01 , R a4 and R a5 is preferably a methyl group. L a01 , L a1 and L a2 is preferably an oxygen atom or *-O-(CH2) k01 -C OO- (wherein k01 is preferably an integer of 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 , R a03 , R a04 , R a6 and R a7 The alkyl group, alicyclic hydrocarbon group, and As a group combining these, R in formula (1) a1 , R a2 and R a3 The same groups as those listed in Examples of such groups include R a02 , R a03 , and R a04 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms. A methyl group or an ethyl group is more preferable, and a methyl group is even more preferable. do. R a6 and R a7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms. More preferably, it is a methyl group, an ethyl group, or an isopropyl group, and even more preferably, it is an ethyl group. It is a propyl group or an isopropyl group. R a02 , R a03 and R a04 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms. More preferably, it is 5 to 10. The group consisting of a combination of an alkyl group and an alicyclic hydrocarbon group is It is preferred that the total number of carbon atoms in combination with the group is 18 or less. R a02 and R a03 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably methyl It is a phenyl group or an ethyl group. R a04 is preferably an alkyl group having 1 to 6 carbon atoms or an alicyclic hydrocarbon group having 5 to 12 carbon atoms. is preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group. be. R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably Preferably, the alkyl group is a ethyl group, an ethyl group, or an isopropyl group, more preferably an ethyl group or an isopropyl group. It is a aryl group. m1 is preferably an integer of 0 to 3, and more preferably 0 or 1. n1 is preferably an integer of 0 to 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0108] Examples of the structural unit (a1-0) include those represented by the formulae (a1-0-1) to (a1-0-12): and R in the structural unit (a1-0) a01 The equivalent The structural units represented by the formula (a1-0-1) to the formula (a1- 0-10) are preferred. TIFF2025013803000086.tif66158

[0109] Examples of the structural unit (a1-1) include those described in JP-A-2010-204646. Among them, structural units derived from the monomers of formula (a1-1-1) to formula (a1-1-2) are included. -1-4) and R in the structural unit (a1-1) a4 In accordance with The structural units represented by the formulae (a1-1-1) to (a1-1-2) are preferably those in which the corresponding methyl groups are replaced by hydrogen atoms. A structural unit represented by any one of (a1-1-4) is more preferred. TIFF2025013803000087.tif44114

[0110] The structural unit (a1-2) is any one of the structural units represented by formula (a1-2-1) to (a1-2-6). The structural unit represented by the formula (a1-2) is R a5 The methyl group corresponding to The structural units are represented by the formula (a1-2-2), the formula (a1-2-5), and A structural unit represented by any one of the formulas (a1-2-6) is preferred. TIFF2025013803000088.tif36160

[0111] When the resin (A) contains the structural unit (a1-0), the content of the structural unit (a1-0) is determined based on the total amount of the structural units of the resin (A). The amount is usually 5 to 60 mol %, preferably 5 to 50 mol %, more preferably The content is usually 10 to 40 mol %. When the resin (A) contains the structural unit (a1-1) and / or the structural unit (a1-2), The total content of these units is usually 10 to 95 mol % based on the total structural units of the resin (A). The content is preferably 15 to 85 mol %, more preferably 15 to 80 mol %, and further preferably Preferably, it is 20 to 80 mol %, and even more preferably, it is 20 to 75 mol %.

[0112] The structural unit (a1) having the group (2) is represented by the formula (a1-4). Examples of the structural unit include a structural unit (hereinafter sometimes referred to as "structural unit (a1-4)"). TIFF2025013803000089.tif3867[In formula (a1-4), R a32 is a hydrogen atom, a halogen atom, or a C1-6 alkyl group which may have a halogen atom represents an alkyl group represented by the formula: R a33is a halogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, Alkoxy groups, alkylcarbonyl groups having 2 to 4 carbon atoms, alkylcarbonyl groups having 2 to 4 carbon atoms It represents an acryloyloxy group, an acryloyloxy group, or a methacryloyloxy group. la represents an integer of 0 to 4. When la is 2 or more, a plurality of R a33 are mutual may be the same or different. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are combined with each other and These form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -CO- to which they are bonded, and the hydrocarbon The -CH2- contained in the alkyl group and the divalent hydrocarbon group is replaced by -O- or -S-. That's fine.]

[0113] R a32 and R a33 The alkyl group in the formula (I) is a methyl group, an ethyl group, a propyl group, an isopropyl group, Examples of the alkyl group include propyl, butyl, pentyl and hexyl groups. An alkyl group having 1 to 4 carbon atoms is preferred, a methyl group or an ethyl group is more preferred, and a methyl group is Even more preferred. R a32 and R a33 Examples of the halogen atom in the formula (I) include a fluorine atom, a chlorine atom, and a bromine atom. Examples include: Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include trifluoromethyl. group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoro Ethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoro 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, Examples of the alkyl group include an alkyl group, a hexyl group, and a perfluorohexyl group. The alkoxy group includes a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentoxy group, Among them, alkoxy groups having 1 to 4 carbon atoms are particularly preferred. A methoxy group or an ethoxy group is preferred, and a methoxy group is even more preferred. . Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. can be. The alkylcarbonyloxy group includes an acetyloxy group, a propionyloxy group, a bromooxy group, Examples thereof include a thyloxy group. R a34 , R a35 and R a36 The hydrocarbon group in the formula (I) is an alkyl group or an alicyclic hydrocarbon group. , aromatic hydrocarbon groups, and groups combining these. The alkyl group includes a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, and a hexyl group. Examples include a silyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the aryl group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthalene, The following groups (* indicates a bonding site): Some examples include: TIFF2025013803000090.tif10151 Aromatic hydrocarbon groups include phenyl, naphthyl, anthryl, biphenyl, Examples of the aryl group include a phenanthryl group and the like. The combined group may be a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined. (e.g., cycloalkylalkyl groups), aralkyl groups such as benzyl groups, and alkyl groups. Aromatic hydrocarbon groups (p-methylphenyl, p-tert-butylphenyl, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl- 6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexyl p-adamantylphenyl group, p-adamantylphenyl group, phenylcyclohexyl group, etc. In particular, R a36 As for the carbon number 1-18, an alkyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or Examples of the groups include groups formed by combining these.

[0114] In formula (a1-4), R a32 is preferably a hydrogen atom. R a33 is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group. is more preferred, and a methoxy group is even more preferred. la is preferably 0 or 1, and more preferably 0. R a34 is preferably a hydrogen atom. R a35 is preferably an alkyl group or an alicyclic hydrocarbon group having 1 to 12 carbon atoms, more preferably More preferably, it is a methyl group or an ethyl group. R a36 The hydrocarbon group is preferably an alkyl group having 1 to 18 carbon atoms, Alicyclic hydrocarbon groups, aromatic hydrocarbon groups having 6 to 18 carbon atoms, or combinations thereof More preferably, it is an alkyl group having 1 to 18 carbon atoms, a group having 3 to 1 R is an alicyclic hydrocarbon group having 8 carbon atoms or an aralkyl group having 7 to 18 carbon atoms. a36 Archi The R alkyl group and the alicyclic hydrocarbon group are preferably unsubstituted. a36 Aromatic carbonization in The hydrogen group is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0115] -OC(R a34 )(R a35 )-OR a36 is an acid (e.g. p-toluenesulfonic acid) and is eliminated to form a hydroxyl group. Examples of the structural unit (a1-4) include those described in JP-A-2010-204646. The structural units derived from the monomers represented by the formula (a1-4-1) to (a1-4-2) are preferably included. -4-12) and R in the structural unit (a1-4) a32 To A structural unit in which the corresponding hydrogen atom is replaced by a methyl group is preferred. a1-4-1) to (a1-4-5) and (a1-4-10) are structural units represented by the formulas Rankings include: TIFF2025013803000091.tif69157 When the resin (A) has the structural unit (a1-4), the content of the structural unit (a1-4) is determined based on the total structure of the resin (A). It is preferably 5 to 60 mol %, more preferably 5 to 50 mol %, based on the total of the structural units. It is more preferable that the content is 10 to 40 mol %.

[0116] The structural unit derived from a (meth)acrylic monomer having the group (2) is represented by the formula (a1 -5) (hereinafter sometimes referred to as "structural unit (a1-5)") can also be mentioned. can be. TIFF2025013803000092.tif4354 formula (a1-5), R a8 is an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Represents an acetylene atom. Z a1 is a single bond or -(CH2) h3 -CO-L 54 -, h3 is 1 to 4 represents an integer, and * represents L 51 represents the bonding position with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents an integer of 1 to 3. s1' represents an integer of 0 to 3.

[0117] Examples of the halogen atom include a fluorine atom and a chlorine atom, with a fluorine atom being preferred. Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a methyl group, an ethyl group, Propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, fluoromethyl group Examples of the alkyl group include the ethyl group and the trifluoromethyl group. In formula (a1-5), R a8 is a hydrogen atom, a methyl group, or a trifluoromethyl group. preferable. L 51 is preferably an oxygen atom. L 52 and L 53 Of these, it is preferred that one is -O- and the other is -S-. It is preferable that s1 is 1. s1' is preferably an integer of 0 to 2. Z a1is preferably a single bond or -CH2-CO-O-.

[0118] Examples of the structural unit (a1-5) include those described in JP-A-2010-61117. Among them, structural units derived from the monomers represented by the formula (a1-5-1) to the formula (a1-5- 4), and the structural units represented by the formula (a1-5-1) or the formula (a1-5-2) are preferred. ) is more preferred. TIFF2025013803000093.tif34138When resin (A) has structural units (a1-5), the content of the structural units is determined based on the total structure of resin (A). The content of the copolymer is preferably 1 to 50 mol %, more preferably 3 to 45 mol %, and more preferably 5 to 40 mol %. % by mole is more preferable, and 5 to 30 mol % is even more preferable.

[0119] Examples of the structural unit (a1) include a structural unit represented by the formula (a1-0X) (hereinafter, This is sometimes called the structural unit (a1-0X). TIFF2025013803000094.tif3961[In formula (a1-0X), R x1 represents a hydrogen atom or a methyl group. R x2 and R x3 each independently represents a saturated hydrocarbon group having 1 to 6 carbon atoms. Ar x1 represents an aromatic hydrocarbon group having 6 to 36 carbon atoms.]

[0120] R x2 and R x3 The saturated hydrocarbon group includes an alkyl group, an alicyclic hydrocarbon group, and the like. and the like. The alkyl group includes methyl, ethyl, n-propyl, isopropyl, and n-butyl. butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, etc. do. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and a monocyclic alicyclic hydrocarbon group Examples of the aryl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples include: Ar x1 Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, an anthryl group, and the like. Examples of the aryl groups include those having 6 to 36 prime numbers. The aromatic hydrocarbon group preferably has 6 to 24 carbon atoms, more preferably 6 to 1 8, and more preferably a phenyl group. Ar x1 is preferably an aromatic hydrocarbon group having 6 to 18 carbon atoms, more preferably Preferably, the aryl group is a phenyl group or a naphthyl group, and more preferably, a phenyl group. R x1 , R x2 and R x3 are each preferably independently a methyl group or an ethyl group. A methyl group is preferable.

[0121] The structural unit (a1-0X) may be any of the structural units and structural units (a1-0X) shown below. R in x1 Examples of compounds in which the methyl group corresponding to the structure is replaced with a hydrogen atom include: The unit (a1-0X) is a structural unit (a1-0X-1) to a structural unit (a1-0X-3). It is preferable that TIFF2025013803000095.tif34161 When resin (A) has a structural unit (a1-0X), the content of the structural unit (a1-0X) in resin (A) is It is preferably 5 to 60 mol %, more preferably 5 to 50 mol %, based on the total monomers in the copolymer. It is more preferable that the content is 10 to 40 mol %, and further more preferable that the content is 10 to 40 mol %. The resin (A) may contain two or more types of the structural unit (a1-0X).

[0122] Further, examples of the structural unit (a1) include the following structural units. TIFF2025013803000096.tif27161When resin (A) contains the above structural unit, its content is based on the total structural units of resin (A). The content is preferably 5 to 60 mol %, more preferably 5 to 50 mol %, and even more preferably 10 to 40 mol %. More preferred.

[0123] Structural unit(s) The monomer from which the structural unit (s) is derived is a monomer that does not have an acid labile group known in the resist field. can be used. The structural unit (s) preferably has a hydroxy group or a lactone ring. A structural unit having an oxy group and no acid labile group (hereinafter referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and no acid labile group (hereinafter referred to as "structural unit" When a resin having the structural unit (a3) ​​is used in the resist composition of the present invention, For example, the resolution of the resist pattern and the adhesion to the substrate can be improved.

[0124] <Structural unit (a2)> The hydroxy group of the structural unit (a2) may be an alcoholic hydroxy group or a phenolic hydroxy group. It may also be a carboxylic hydroxy group. When a resist pattern is produced from the resist composition of the present invention, the exposure light source is KrF Using high energy rays such as excimer laser (248 nm), electron beam or EUV (extreme ultraviolet light) In this case, the structural unit (a2) is a structural unit having a phenolic hydroxy group ( a2) is preferred, and it is more preferred to use the structural unit (a2-A) described below. When using an ArF excimer laser (193 nm) or the like, the structural unit (a2) is The structural unit (a2) having an alcoholic hydroxy group is preferred, and the structural unit (a2) described below is It is more preferable to use the structural unit (a2) alone. It may contain two or more kinds.

[0125] The structural unit (a2) having a phenolic hydroxy group is represented by the formula (a2 -A) (hereinafter sometimes referred to as "structural unit (a2-A)"). can be. TIFF2025013803000097.tif3843[In formula (a2-A), R a50 is a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom represents an alkyl group. R a51 is a halogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, Alkoxy groups, alkylcarbonyl groups having 2 to 4 carbon atoms, alkylcarbonyl groups having 2 to 4 carbon atoms It represents an acryloyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 is a single bond or *-X a51 -(A a52 -X a52 ) nb - stands for -R. a50 Combined represents the bond position to the carbon atom. A a52 each independently represents an alkanediyl group having 1 to 6 carbon atoms. X a51 and X a52 each independently represents -O-, -CO-O-, or -O-CO-. nb represents 0 or 1. mb represents an integer of 0 to 4. When mb is an integer of 2 or more, R in Numbers a51 may be the same or different.]

[0126] R a50 Examples of the halogen atom in the formula (I) include a fluorine atom, a chlorine atom, and a bromine atom. can be. R a50 The alkyl group having 1 to 6 carbon atoms which may have a halogen atom is, for example, tri Fluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2 -Trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoroethyl group 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluoropropyl group, Fluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group Examples of the alkyl group include ethyl, pentyl, hexyl and perfluorohexyl groups. R a50 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and more preferably a hydrogen atom, a methyl group or is more preferably an ethyl group, and further preferably a hydrogen atom or a methyl group. R a51 The alkyl group in the formula (I) is a methyl group, an ethyl group, a propyl group, an isopropyl group, Examples of the butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group are listed below. can be done. R a51 The alkoxy group in the formula (I) is a methoxy group, an ethoxy group, a propoxy group, an iso Examples of the group include a propoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. An alkoxy group having 1 to 4 carbon atoms is preferred, a methoxy group or an ethoxy group is more preferred, and a methoxy group or an ethoxy group is more preferred. A toxyl group is more preferred. R a51 The alkylcarbonyl group in the formula (I) is an acetyl group, a propionyl group, or a butyl group. Examples of the alkyl group include an aryl group. R a51 The alkylcarbonyloxy group in the formula (I) is an acetyloxy group, a propionyloxy group, Examples of the alkyl groups include an alkyloxy group and a butyryloxy group. R a51 is preferably a methyl group.

[0127] *-X a51 -(A a52 -X a52 ) nb - includes *-O-, *-CO-O-, *-OC O-, *-CO-OA a52 -CO-O-, *-O-CO-A a52 -O-, *-OA a52 -CO-O-, *-CO-OA a52 -O-CO-, *-O-CO-A a52 -O-CO-, Among them, *-CO-O- and *-CO-OA are a52 -CO-O- or *- Office Automation a52 -CO-O- is preferred. Examples of the alkanediyl group include a methylene group, an ethylene group, and a propane-1,3-diyl group. Propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group , hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1, 3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and and 2-methylbutane-1,4-diyl group. A a52 is preferably a methylene group or an ethylene group. A a50 is a single bond, *-CO-O- or *-CO-OA a52 -CO-O- Preferably, it is a single bond, *-CO-O- or *-CO-O-CH2-CO-O-. A single bond or *--CO--O-- is more preferable, and a single bond or *--CO--O-- is even more preferable. mb is preferably 0, 1 or 2, more preferably 0 or 1, and particularly preferably 0. The hydroxy group is preferably bonded to the ortho or para position of the benzene ring, and more preferably to the para position. It is more preferred to bind to

[0128] Examples of the structural unit (a2-A) include those described in JP-A-2010-204634 and JP-A-2012- Examples of structural units include those derived from monomers described in US Pat. No. 5,12577. The structural unit (a2-A) is represented by the formulas (a2-2-1) to (a2-2-6). In the structural units and the structural units represented by formulae (a2-2-1) to (a2-2-6), R in structural unit (a2-A) a50 The structure in which the methyl group corresponding to is replaced by a hydrogen atom The structural unit (a2-A) is a structural unit represented by the formula (a2-2-1): A structural unit represented by formula (a2-2-3), a structural unit represented by formula (a2-2-6) and a structural unit represented by formula (a2-2-7) A structural unit represented by formula (a2-2-1), a structural unit represented by formula (a2-2-3), or a structural unit represented by formula ( In the structural unit represented by a2-2-6), R in the structural unit (a2-A) a50 To It is preferable that the corresponding methyl group is substituted with a hydrogen atom. TIFF2025013803000098.tif42166Content of structural unit (a2-A) when structural unit (a2-A) is contained in resin (A) is preferably 5 to 80 mol %, more preferably 10 to 70 mol %, based on all structural units. % by mole, more preferably 15 to 65 mol %, and even more preferably 20 to 65 mol %. It is 65 mol%. The structural unit (a2-A) can be prepared, for example, by polymerization of the structural unit (a1-4) followed by p-toluenesulfonyl chloride. It can be incorporated into the resin (A) by treating it with an acid such as benzenesulfonic acid. After polymerization using acetoxystyrene, etc., tetramethylammonium hydroxide, etc. By treating the resin with an alkali, the structural unit (a2-A) can be incorporated into the resin (A). can.

[0129] In the structural unit (a2), the structural unit having an alcoholic hydroxy group is represented by the formula ( a2-1) (hereinafter sometimes referred to as "structural unit (a2-1)") Some examples include: TIFF2025013803000099.tif3956 formula (a2-1), L a3 is -O- or * -O-(CH2) k2 represents -CO-O-, k2 represents an integer of any one of 1 to 7. * represents the bonding position with -CO-. R a14 represents a hydrogen atom or a methyl group. R a15 and R a16 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. o1 represents an integer of 0 to 10.

[0130] In formula (a2-1), L a3 is preferably -O-, -O-(CH2) f1 -CO-O- (wherein f1 represents an integer of 1 to 4), and more preferably —O—. R a14 is preferably a methyl group. R a15 is preferably a hydrogen atom. R a16 is preferably a hydrogen atom or a hydroxy group. o1 is preferably an integer of 0 to 3, and more preferably 0 or 1.

[0131] Examples of the structural unit (a2-1) include those described in JP-A-2010-204646. The structural units derived from the monomers of formula (a2-1-1) to formula (a2-1-6) are included. ), and the structural unit represented by any one of the formulas (a2-1-1) to (a2-1-4) is preferred. A structural unit represented by any one of the formulas (a2-1-1) or (a2-1- The structural unit represented by 3) is more preferred. TIFF2025013803000100.tif50138When resin (A) contains the structural unit (a2-1), its content is the total of all structural units of resin (A). The amount is usually 1 to 45 mol %, preferably 1 to 40 mol %, more preferably The content is preferably 1 to 35 mol %, more preferably 2 to 20 mol %, and even more preferably The content is usually 2 to 10 mol %.

[0132] <Structural unit (a3)> The lactone ring contained in the structural unit (a3) ​​is a β-propiolactone ring, a γ-butyrolactone ring, or It may be a monocyclic ring such as a lactone ring or a δ-valerolactone ring, or a condensation ring of a monocyclic lactone ring with another ring. It may be a γ-butyrolactone ring, an adamantane lactone ring, or a γ -Bridged ring containing a butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)) Examples include: The structural unit (a3) ​​is preferably represented by the formula (a3-1), the formula (a3-2), the formula (a3-3), or a structural unit represented by formula (a3-4). One of these may be contained alone, Two or more types may be contained. TIFF2025013803000101.tif49153 [In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6are each independently -O- or *-O-(CH2) k3 - It represents a group represented by CO-O- (k3 represents an integer of any of 1 to 7). L a7 , -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 -O- vinegar. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bond position to the carbonyl group. R a18 , R a19 and R a20 each independently represents a hydrogen atom or a methyl group. R a24 is an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Represents an halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or a carbon atom; Represents an aliphatic hydrocarbon group having 1 to 4 prime numbers. p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3. w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a2 3 and / or Ra25 may be the same or different.]

[0133] R a21 , R a22 , R a23 and R a25 The aliphatic hydrocarbon group in propyl, isopropyl, butyl, sec-butyl and tert-butyl groups Examples of alkyl groups include the following. R a24 The halogen atom in the formula (I) is a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. Examples of atoms include: R a24 The alkyl group in the formula (I) is a methyl group, an ethyl group, a propyl group, an isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group, etc. Of these, preferred is an alkyl group having 1 to 4 carbon atoms, and more preferred is a methyl group. or an ethyl group. R a24 Examples of the alkyl group having a halogen atom in the formula (I) include a trifluoromethyl group, Perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perfluoro perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group, perfluoropentyl group, perfluorohexyl group, trichloromethyl group, tribromomethyl group Examples of the alkyl group include an alkyl group, a triiodomethyl group, and a triiodomethyl group. L a8 and L a9 The alkanediyl group in the formula (I) is a methylene group, an ethylene group, a proline group, Pan-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pe hexane-1,5-diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-Methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentamethylpropane Examples include 2-methylbutane-1,4-diyl group and 2-methylbutane-1,4-diyl group.

[0134] In formulas (a3-1) to (a3-3), L a4 ~L a6 are each independently preferred or -O- or *-O-(CH2) k3 In -CO-O-, k3 is 1 to 4 More preferably, -O- and *-O-CH2-CO-O- are also preferred. An oxygen atom is preferred. R a18 ~R a21 is preferably a methyl group. R a22 and R a23 are each independently preferably a carboxy group, a cyano group or a methyl group. It is a ethyl group. p1, q1 and r1 each independently represent an integer of preferably 0 to 2; More preferably, it is 0 or 1. In formula (a3-4), R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. is preferably a hydrogen atom, a methyl group, or an ethyl group, and more preferably It is a hydrogen atom or a methyl group. R a25 is preferably a carboxy group, a cyano group or a methyl group. L a7 is preferably -O- or *-OL a8 -CO-O-, more preferably -O-, -O-CH2-CO-O- or -O-C2H4-CO-O-. w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'. TIFF2025013803000102.tif4052 (in the formula, R a24 , L a7 has the same meaning as above.)

[0135] As the structural unit (a3), a monomer described in JP-A-2010-204646 can be used. , Monomers described in JP 2000-122294 A, and JP 2012-41274 A Examples of the structural unit (a3) ​​include structural units derived from the monomers described in the above publication. , formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2) , Formula (a3-3-1), Formula (a3-3-2) and Formula (a3-4-1) to Formula (a3-4-1 2), and in the structural unit, the structural unit represented by any one of the formulas (a3-1) to (a3-2) R in a3-4) a18 , R a19 , R a20 and R a24 The methyl group corresponding to Atom-substituted structural units are preferred. TIFF2025013803000103.tif117168When resin (A) contains structural unit (a3), the total content is the total content of all structural units of resin (A). The amount is usually 1 to 70 mol %, preferably 1 to 65 mol %, more preferably The content is usually 1 to 60 mol %. In addition, the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3) or the structural unit The content of the units (a3-4) is 1 to 60 moieties relative to the total structural units of the resin (A). % by mole is preferable, 1 to 50 mol % is more preferable, and 1 to 50 mol % is even more preferable.

[0136] <Structural unit (a4)> Examples of the structural unit (a4) include the following structural units. TIFF2025013803000104.tif3165[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents a saturated hydrocarbon group having 1 to 24 carbon atoms and containing a fluorine atom, The -CH2- contained in the group may be replaced with -O- or -CO. R 42 The saturated hydrocarbon group represented by the formula (I) is a chain hydrocarbon group and a monocyclic or polycyclic alicyclic hydrocarbon group. groups, as well as groups formed by combining these groups.

[0137] Examples of the chain hydrocarbon group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, Hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexa Examples include decyl, heptadecyl and octadecyl groups. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cyclohexyl group, Cycloalkyl groups such as cycloheptyl and cyclooctyl; decahydronaphthyl, adipyl, Polycyclic alicyclic carbons such as manthyl group, norbornyl group, and the following groups (* indicates the bond position): Examples of the aryl group include aryl groups. TIFF2025013803000105.tif10161 The group formed by the combination may be one or more alkyl groups or one or more alkanedi groups. and groups formed by combining an alkyl group with one or more alicyclic hydrocarbon groups. In particular, -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, -alkanediyl group-alicyclic hydrocarbon group Examples thereof include a candiyl group-alicyclic hydrocarbon group-alkyl group.

[0138] The structural unit (a4) may be any of the following: a4-3) and at least one structure selected from the group consisting of formula (a4-4) Units include: TIFF2025013803000106.tif3952[In formula (a4-0), R 5a represents a hydrogen atom or a methyl group. L 4a represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 3a is a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluoroalkanediyl group having 3 to 12 carbon atoms. represents a fluorocycloalkanediyl group. R 6a represents a hydrogen atom or a fluorine atom.

[0139] L 4a The alkanediyl group in the formula (I) is a methylene group, an ethylene group, a propane-1, linear alkanediyl groups such as butane-1,4-diyl group, ethane-1,1 -diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane Branched alkanes such as pan-1,3-diyl and 2-methylpropane-1,2-diyl groups An example of such a group is a diyl group.

[0140] L 3a The perfluoroalkanediyl group in the formula (I) is a difluoromethylene group, Fluoroethylene group, perfluoropropane-1,1-diyl group, perfluoropropane -1,3-diyl group, perfluoropropane-1,2-diyl group, perfluoropropane -2,2-diyl group, perfluorobutane-1,4-diyl group, perfluorobutane-2 ,2-diyl group, perfluorobutane-1,2-diyl group, perfluoropentane-1, 5-diyl group, perfluoropentane-2,2-diyl group, perfluoropentane-3, 3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2, 2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1, 7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3, 4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1, 8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3, 3-diyl group, perfluorooctane-4,4-diyl group, and the like. L 3a The perfluorocycloalkanediyl group in xanediyl group, perfluorocyclopentanediyl group, perfluorocycloheptanediyl group yl group, perfluoroadamantanediyl group, and the like.

[0141] L 4a is preferably a single bond, a methylene group or an ethylene group, and more preferably a single bond, a methylene group. L 3a is preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, more preferably or a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0142] The structural unit (a4-0) may be any of the structural units shown below and the structural units ( a4-0) in R 5a The structural unit in which the methyl group corresponding to the can be done. TIFF2025013803000107.tif96165

[0143] TIFF2025013803000108.tif5170[In formula (a4-1), R a41 represents a hydrogen atom or a methyl group. R a42represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, The --CH2-- contained in the hydrocarbon group may be replaced by --O-- or --CO--. A a41 represents an alkanediyl group having 1 to 6 carbon atoms which may have a substituent, or a group represented by the formula (ag 1), where A a41 and R a42 At least one of the The group has a halogen atom (preferably a fluorine atom). TIFF2025013803000109.tif1383 [In formula (a-g1), s represents 0 or 1. A a42 and A a44 each independently represents a divalent alkyl group having 1 to 5 carbon atoms which may have a substituent. Represents a saturated hydrocarbon group. A a43 is a divalent aliphatic hydrocarbon having 1 to 5 carbon atoms which may have a single bond or a substituent. Represents a group. X a41 and X a42 each independently represents -O-, -CO-, -CO-O-, or -O-CO - represents. However, A a42 , A a43 , A a44 , X a41 and X a42 The total number of carbon atoms is 7 or less. * indicates the bond position, and the * on the right is -O-CO-R a42 ]

[0144] R a42 The saturated hydrocarbon group in the formula (I) is preferably a chain saturated hydrocarbon group or a monocyclic or polycyclic alicyclic and groups formed by combining these. do.

[0145] Examples of the chain saturated hydrocarbon group include a methyl group, an ethyl group, a propyl group, a butyl group, and a pentyl group. group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, heptyl group, Examples include xadecyl, heptadecyl and octadecyl groups. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include a cyclopentyl group and a cyclohexyl group. cycloalkyl groups such as cycloheptyl and cyclooctyl groups; decahydronaphthyl groups, Polycyclic alicyclic rings such as adamantyl group, norbornyl group, and the following groups (* indicates the bond position): Saturated hydrocarbon groups of the formula: TIFF2025013803000110.tif10161 The group formed by the combination may be one or more alkyl groups or one or more alkanedi groups. and groups formed by combining an alkyl group with one or more saturated alicyclic hydrocarbon groups. Examples of the alkyl groups include -alkanediyl group-saturated alicyclic hydrocarbon group, -saturated alicyclic hydrocarbon group-alkyl Examples of the alkyl group include an alkyl group, -alkanediyl group-saturated alicyclic hydrocarbon group-alkyl group, and the like.

[0146] R a42 The substituent of is selected from a halogen atom and a group represented by formula (a-g3): Examples of the halogen atom include a fluorine atom, a chlorine atom, Examples of the atom include a bromine atom and an iodine atom, and a fluorine atom is preferred. TIFF2025013803000111.tif752[In formula (a-g3), X a43 represents an oxygen atom, a carbonyl group, *-O-CO-, or *-CO-O-. A a45 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom. . * stands for R a42 represents the bond position with However, R a42-X a43 -A a45 In R a42 When A does not have a halogen atom, a4 5 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms and at least one halogen atom .

[0147] A a45 The aliphatic hydrocarbon group in the formula (I) is a methyl group, an ethyl group, a propyl group, a butyl group, group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, penta Alkyl groups such as decyl, hexadecyl, heptadecyl, and octadecyl groups; Monocyclic groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups alicyclic hydrocarbon radicals; and Decahydronaphthyl group, adamantyl group, norbornyl group, and the following groups (* indicates the bond position): Examples of the polycyclic alicyclic hydrocarbon group include the polycyclic alicyclic hydrocarbon groups. TIFF2025013803000112.tif10161 The group formed by the combination may be one or more alkyl groups or one or more alkanedi groups. and groups formed by combining an alkyl group with one or more alicyclic hydrocarbon groups. In particular, -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, -alkanediyl group-alicyclic hydrocarbon group Examples thereof include a candiyl group-alicyclic hydrocarbon group-alkyl group.

[0148] R a42 is preferably a saturated hydrocarbon group which may have a halogen atom, and / or a saturated hydrocarbon group having a group represented by formula (a-g3) is preferably This is more preferable. R a42 When is a saturated hydrocarbon group having a halogen atom, it is preferably a saturated hydrocarbon group having a fluorine atom. More preferably, it is a saturated hydrocarbon group having a fluoroalkyl group or a perfluorosilyl group. Preferably, the alkyl group is a chloroalkyl group, more preferably a perfluoroalkyl group having 1 to 6 carbon atoms. Particularly preferred is a perfluoroalkyl group having 1 to 3 carbon atoms. Examples of the alkyl group include a perfluoromethyl group, a perfluoroethyl group, and a perfluoropropyl group. , perfluorobutyl group, perfluoropentyl group, perfluorohexyl group, perfluoro perfluorooctyl and perfluoroheptyl groups. Examples of the aryl group include a perfluorocyclohexyl group. R a42 is a saturated hydrocarbon group having a group represented by formula (a-g3), g3), including the number of carbon atoms contained in the group represented by R a42 The total number of carbon atoms is preferably 15 or less. When the alkyl group has a group represented by formula (a-g3) as a substituent, The number is preferably one.

[0149] R a42 is a saturated hydrocarbon group having a group represented by formula (a-g3), R a42 Yes, More preferably, it is a group represented by formula (a-g2). TIFF2025013803000113.tif874[In formula (a-g2), A a46 represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom. represent. X a44 represents **-O-CO- or **-CO-O- (** represents A a46 The bond position with vinegar.). A a47 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom. . However, A a46 , A a47 and X a44 The total number of carbon atoms in A is 18 or less. a46 and A a47 of At least one of them has at least one halogen atom. * indicates the bond position with the carbonyl group.

[0150] A a46 The saturated hydrocarbon group preferably has 1 to 6 carbon atoms, and more preferably has 1 to 3 carbon atoms. A a47 The aliphatic hydrocarbon group preferably has 4 to 15 carbon atoms, more preferably 5 to 12 carbon atoms. A a47 is more preferably a cyclohexyl group or an adamantyl group.

[0151] A preferred structure of the group represented by formula (a-g2) is the following structure (* represents a carbonyl group). (This is the bonding site with ). TIFF2025013803000114.tif13161

[0152] A a41 The alkanediyl group in the formula (I) is a methylene group, an ethylene group, a propane-1, 3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 linear alkanediyl groups such as propane-1,2-diyl, butane-1,6-diyl; ,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4- and branched alkanediyl groups such as 2-methylbutane-1,4-diyl and the like. do. A a41 The substituents in the alkanediyl group represented by the formula (I) are a hydroxy group and an alkanediyl group having 1 to 10 carbon atoms. Examples of the alkoxy group include alkoxy groups represented by the formula (6). A a41 is preferably an alkanediyl group having 1 to 4 carbon atoms, more preferably It is preferably an alkanediyl group having 2 to 4 carbon atoms, and more preferably an ethylene group.

[0153] A in the group represented by formula (a-g1) a42 , A a43 and A a44 The bivalent saturation represented by The hydrocarbon group may be a straight-chain or branched alkanediyl group or a monocyclic or polycyclic divalent alicyclic group. By combining a divalent hydrocarbon group with an alkanediyl group and a divalent alicyclic hydrocarbon group, Specifically, a methylene group, an ethylene group, a propane-1 ,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, 1-methyl Propane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane Examples include a pan-1,2-diyl group. A a42 , A a43 and A a44 The substituent of the divalent saturated hydrocarbon group represented by is hydroxyl. Examples of the alkoxy group include an alkoxy group and an alkoxy group having 1 to 6 carbon atoms. It is preferred that s is 0.

[0154] In the group represented by formula (a-g1), X a42 is -O-, -CO-, -CO-O- or Examples of the -O-CO- group include the following groups. In the following examples, * and ** indicates the bond position, and ** is -O-CO-R. a42 This is the bonding position with. TIFF2025013803000115.tif49153

[0155] The structural unit represented by formula (a4-1) includes the structural units shown below and the structural units shown below. R in the structural unit represented by formula (a4-1) a41 A methyl group corresponding to Examples of structural units that have been replaced include: TIFF2025013803000116.tif100142

[0156] TIFF2025013803000117.tif123141

[0157] As the structural unit represented by formula (a4-1), a structural unit represented by formula (a4-2) is preferred. I wish. TIFF2025013803000118.tif3251[In formula (a4-2), R f5 represents a hydrogen atom or a methyl group. L 44 represents an alkanediyl group having 1 to 6 carbon atoms, H2- may be replaced by -O- or -CO-. R f6 represents a saturated hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom. However, L 44 and R f6 The total number of carbon atoms in the molecule is limited to 21.

[0158] L 44 The alkanediyl group of A a41 Examples of the groups include the same groups as those exemplified in the above. R f6 The saturated hydrocarbon group of R a42 Examples of the groups include the same groups as those exemplified in the above. L 44 The alkanediyl group in the formula (I) is preferably an alkanediyl group having 2 to 4 carbon atoms. An ethylene group is more preferred.

[0159] Examples of the structural unit represented by formula (a4-2) include the structural units represented by formulae (a4-1-1) to (a4 -1-11) are structural units represented by the following formulas. R f5 The structural unit in which the corresponding methyl group is replaced by a hydrogen atom is also represented by formula (a4-2). It can be mentioned as a structural unit.

[0160] TIFF2025013803000119.tif5164[In formula (a4-3), R f7 represents a hydrogen atom or a methyl group. L 5 represents an alkanediyl group having 1 to 6 carbon atoms. A f13 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms which may have a fluorine atom. vinegar. X f12 is *-O-CO- or *-CO-O-(* is A f13 represents the bond position with . A f14 represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may contain a fluorine atom. However, A f13 and A f14 At least one of L has a fluorine atom. 5 , A f13 and A f14 The total number of carbon atoms in the molecule is limited to 20.

[0161] L 5 The alkanediyl group in a41 The same as those exemplified for the alkanediyl group The following groups are mentioned: A f13 The divalent saturated hydrocarbon group which may have a fluorine atom in or a divalent chain saturated hydrocarbon group which may have a fluorine atom and a It is preferably a divalent alicyclic saturated hydrocarbon group, more preferably a perfluoroalkane dialkyl group. It is a aryl group. Examples of the divalent chain hydrocarbon group which may have a fluorine atom include a methylene group, an ethylene alkanediyl groups such as propanediyl, butanediyl and pentanediyl groups; Fluoromethylene group, perfluoroethylene group, perfluoropropanediyl group, perfluoro perfluoroalkanediyl groups such as perfluorobutanediyl and perfluoropentanediyl groups Examples thereof include the aryl group. The divalent alicyclic hydrocarbon group which may have a fluorine atom may be either a monocyclic or a polycyclic group. Examples of the monocyclic group include a cyclohexanediyl group and a perfluorocyclohexa Examples of the polycyclic group include an adamantanediyl group, a norbornanediyl group, and the like. diyl group, perfluoroadamantanediyl group, and the like.

[0162] A f14 The saturated hydrocarbon group and the saturated hydrocarbon group which may have a fluorine atom are represented by R a42 in The same groups as those exemplified above can be mentioned. Among them, trifluoromethyl group, difluoromethyl group, ethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1 ,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3, 3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2, 2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2 ,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group , perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group and perfluorohexyl group. Fluorinated alkyl groups such as fluorooctyl group, cyclopropylmethyl group, cyclopropyl group , cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group xyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbornyl group, norbornyl group, norbornylmethyl group, perfluoroadamantyl group, perfluoroadamantyl group A methyl group and the like are preferred.

[0163] In formula (a4-3), L 5 is preferably an ethylene group. A f13 The divalent saturated hydrocarbon group is a divalent chain hydrocarbon group having 1 to 6 carbon atoms and a divalent chain hydrocarbon group having 3 A group containing a divalent alicyclic hydrocarbon group having from 1 to 12 carbon atoms is preferred, and a divalent chain hydrocarbon group having from 2 to 3 carbon atoms is preferred. A base is more preferred. A f14 The saturated hydrocarbon group is a chain hydrocarbon group having 3 to 12 carbon atoms and an aliphatic hydrocarbon group having 3 to 12 carbon atoms. Groups containing cyclic hydrocarbon groups are preferred, and chain hydrocarbon groups having 3 to 10 carbon atoms and groups containing 3 to 1 More preferred is a group containing an alicyclic hydrocarbon group of A f14 is preferably carbon It is a group containing an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably, cyclopropylmethyl. groups, cyclopentyl groups, cyclohexyl groups, norbornyl groups, and adamantyl groups.

[0164] Examples of the structural unit represented by formula (a4-3) include the structural units represented by formulae (a4-1'-1) to (a 4-1'-11) are examples of structural units represented by the structural unit (a4-3). R f7 The structural unit in which the corresponding methyl group is replaced by a hydrogen atom is also represented by formula (a4-3). It is one of the structural units that can be mentioned.

[0165] The structural unit (a4) also includes a structural unit represented by the formula (a4-4). TIFF2025013803000120.tif3858[In formula (a4-4), R f21 represents a hydrogen atom or a methyl group. A f21 is -(CH2) j1 -, -(CH2) j2 -O-(CH2)j3 -or-(CH2) j4 - CO-O-(CH2) j5 - represents. j1 to j5 each independently represent an integer of 1 to 6. R f22 represents a saturated hydrocarbon group having 1 to 10 carbon atoms and containing a fluorine atom.]

[0166] R f22 The saturated hydrocarbon group of R a42 The saturated hydrocarbon group may be the same as that represented by the following formula: R f22 represents an alkyl group having 1 to 10 carbon atoms and a fluorine atom, or a carbon An alicyclic hydrocarbon group having 1 to 10 carbon atoms is preferred, and an alkyl group having 1 to 10 carbon atoms and a fluorine atom is preferred. A fluorine atom-containing alkyl group having 1 to 6 carbon atoms is more preferred. In formula (a4-4), A f21 As an example, -(CH2) j1 - is preferred, and ethylene A group or a methylene group is more preferred, and a methylene group is even more preferred.

[0167] Examples of the structural unit represented by formula (a4-4) include the following structural units and In the structural unit represented by the formula (a4-4), R f21 The methyl group corresponding to Examples of structural units include those in which hydrogen atoms are replaced by hydrogen atoms. TIFF2025013803000121.tif87162 When the resin (A) has the structural unit (a4), the content of the structural unit (a4) is determined based on the total structural units of the resin (A). The ratio is preferably 1 to 20 mol %, more preferably 2 to 15 mol %, and more preferably 3 to 10 mol %. % is more preferred.

[0168] <Structural unit (a5)> The non-leaving hydrocarbon group contained in the structural unit (a5) is a straight-chain, branched or cyclic hydrocarbon group. Among them, the structural unit (a5) is preferably a group having an alicyclic hydrocarbon group. The group is preferred. Examples of the structural unit (a5) include a structural unit represented by the formula (a5-1): . TIFF2025013803000122.tif3972[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the water contained in the alicyclic hydrocarbon group The atom may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, The -CH2- contained in the formula (I) may be replaced with -O- or -CO-.

[0169] R 52 The alicyclic hydrocarbon group in may be either a monocyclic or polycyclic group. Examples of the alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentene group, and the like. Examples of the polycyclic alicyclic hydrocarbon group include, for example, , adamantyl group and norbornyl group. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include a methyl group, an ethyl group, a propyl group, and an isopropyl group. Propyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl Examples of the alkyl group include an octyl group and a 2-ethylhexyl group. Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group. do. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably Examples thereof include an adamantyl group, a norbornyl group, and a cyclohexyl group.

[0170] L 55 The divalent saturated hydrocarbon group in the formula (I) is a divalent chain saturated hydrocarbon group or a divalent fatty acid group. Examples of the hydrocarbon group include cyclic saturated hydrocarbon groups, and preferably divalent chain saturated hydrocarbon groups. Examples of the divalent chain saturated hydrocarbon group include a methylene group, an ethylene group, and a propanediyl group. Examples of the alkyl groups include alkanediyl groups such as dialkyl groups, butanediyl groups, and pentanediyl groups. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the saturated hydrocarbon group include cyclopentanediyl and cyclohexanediyl groups. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adatomyl groups. Examples thereof include a manthanediyl group and a norbornanediyl group.

[0171] L 55 The -CH2- contained in the divalent saturated hydrocarbon group represented by the formula (I) is replaced by -O- or -CO-. Examples of the substituted groups include groups represented by formulae (L1-1) to (L1-4). In the following formula, * and ** represent bond positions, and * represents the bond position with an oxygen atom. TIFF2025013803000123.tif18164 formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents L x1 It represents the bond position with . L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, L x3 and L x4 The total number of carbon atoms is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represents a single bond or a divalent aliphatic saturated carbon atom having 1 to 14 carbon atoms; Represents a hydrogen group. However, L x5 , L x6 and L x7 The total number of carbon atoms is 15 or less. In formula (L1-4), L x8 and L x9 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 The total number of carbon atoms is 15 or less.

[0172] L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably It is a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably Preferably, it is a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. Lx5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably It is a methylene group or an ethylene group. L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably A methylene group or an ethylene group is preferred. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably Preferably, it is a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably Preferably, it is a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably , a cyclohexanediyl group, or an adamantanediyl group.

[0173] Examples of the group represented by formula (L1-1) include the divalent groups shown below. TIFF2025013803000124.tif54134

[0174] Examples of the group represented by formula (L1-2) include the divalent groups shown below. TIFF2025013803000125.tif25131

[0175] Examples of the group represented by formula (L1-3) include the divalent groups shown below. TIFF2025013803000126.tif15145

[0176] Examples of the group represented by formula (L1-4) include the divalent groups shown below. TIFF2025013803000127.tif26114L 55 is preferably a single bond or a group represented by formula (L1-1).

[0177] The structural unit (a5-1) may be any of the structural units shown below and the structural units ( R in a5-1) 51 The structural unit in which the methyl group corresponding to the can be. TIFF2025013803000128.tif110150When resin (A) has structural unit (a5), its content is determined based on the total structural units of resin (A). The ratio is preferably 1 to 30 mol %, more preferably 2 to 20 mol %, and more preferably 3 to 15 mol %. % is more preferred.

[0178] <Structural unit (II)> The resin (A) further includes a structural unit that decomposes upon exposure to generate an acid (hereinafter, “structural unit The structural unit (II) may specifically include is a structural unit described in JP 2016-79235 A, and has a sulfonate group in the side chain. or a structural unit having a carboxylate group and an organic cation, or a sulfonio group on the side chain and an organic anion.

[0179] The structural unit having a sulfonate group or a carboxylate group in the side chain is represented by the formula (II-2 -A') is preferably a structural unit represented by the formula: TIFF2025013803000129.tif36104[In formula (II-2-A'), X III3 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, The -CH2- contained in the saturated carbon atom may be replaced by -O-, -S- or -CO-. The hydrogen atom contained in the hydrogen hydride group is a halogen atom, a carbon number which may have a halogen atom It may be substituted with 1 to 6 alkyl groups or hydroxy groups. A x1 represents an alkanediyl group having 1 to 8 carbon atoms, and the water contained in the alkanediyl group The nitrogen atom may be substituted with a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. stomach. RA - represents a sulfonate group or a carboxylate group. R III3 is a hydrogen atom, a halogen atom, or a carbon atom having 1 Represents an alkyl group of 1 to 6. Z.A. + represents an organic cation.

[0180] R III3 Examples of the halogen atom represented by the formula (I) include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples include an uran atom. R III3 The alkyl group having 1 to 6 carbon atoms and optionally having a halogen atom is represented by the formula: R a8 The same as an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, represented by the formula: Examples include the following. A x1 Examples of the alkanediyl group having 1 to 8 carbon atoms represented by the formula: , propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group group, hexane-1,6-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4- Diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group Examples of the aryl group include pentane-1,4-diyl group and 2-methylbutane-1,4-diyl group. do. A x1 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms which may be substituted include trifluoroalkyl groups. Fluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluoroiso Propyl group, perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group Examples of the alkyl group include a perfluoroethyl group, a perfluoropentyl group, and a perfluorohexyl group. X III3 The divalent saturated hydrocarbon group having 1 to 18 carbon atoms represented by the formula (I) is a straight-chain or branched and monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups. It may be a combination of the above. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1, 2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 ,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane- 1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, Linear alkanediyl groups such as decane-1,12-diyl group; butane-1,3-diyl group; 2-Methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentamethylpropane Branched alkanediyl groups such as 2-methylbutane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. Cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohetane-1,3-diyl group, Cycloalkanediyl groups such as cyclohexanone-1,4-diyl group and cyclooctane-1,5-diyl group norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane Divalent polycyclic alicyclic saturated carbons such as cyclohexyl-1,5-diyl and adamantane-2,6-diyl groups Hydrogen groups and the like. A saturated hydrocarbon group in which -CH2- has been replaced with -O-, -S- or -CO- Examples of the divalent group include those represented by the formulae (X1) to (X53). The -CH2- contained in the saturated hydrocarbon group is replaced with -O-, -S- or -CO-. The number of carbon atoms in front of each is 17 or less. In the following formula, * and ** represent bond positions, * A x1 represents the bonding position with TIFF2025013803000130.tif145161

[0181] X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

[0182] ZA in formula (II-2-A') + represents the cation Z1 in the acid generator (B1). + Similar to Examples include:

[0183] The structural unit represented by the formula (II-2-A') is a structural unit represented by the formula (II-2-A) It is preferable that: TIFF2025013803000131.tif38109 [In formula (II-2-A), R III3 , X III3 and Z.A. + has the same meaning as above. z2A represents an integer of 0 to 6. R III2 and R III4 each independently represents a hydrogen atom, a fluorine atom, or a carbon atom represents a perfluoroalkyl group having a number of 1 to 6, and when z is 2 or more, a plurality of R III2 and R II I4 may be the same as or different from each other. Q a and Q b each independently represents a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. represents the alkyl group. R III2 , R III4 , Q a and Q b Perfluoroalkyl groups having 1 to 6 carbon atoms, represented by the formula: The Q group is b1 The same as the perfluoroalkyl group having 1 to 6 carbon atoms represented by the formula: The following are some of the reasons.

[0184] The structural unit represented by formula (II-2-A) is a structural unit represented by formula (II-2-A-1). It is preferable that the position is 1. TIFF2025013803000132.tif5578 [In formula (II-2-A-1), R III2 , R III3 , R III4 , Q a , Q b and Z.A. + has the same meaning as above . R III5 represents a saturated hydrocarbon group having 1 to 12 carbon atoms. z2A1 represents an integer of 0 to 6. X I2 represents a divalent saturated hydrocarbon group having 1 to 11 carbon atoms, The -CH2- may be replaced by -O-, -S- or -CO-, and the saturated hydrocarbon may be The hydrogen atoms contained in the radicals may be substituted with halogen atoms or hydroxy groups. R III5 Examples of the saturated hydrocarbon group having 1 to 12 carbon atoms represented by the formula (I) include a methyl group, an ethyl group, and the like. , propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, butyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group and and dodecyl group. X I2 As the divalent saturated hydrocarbon group represented by the formula: III3 Divalent saturated carbon represented by The same as the hydride group can be mentioned.

[0185] The structural unit represented by formula (II-2-A-1) is preferably a structural unit represented by formula (II-2-A-2). More preferred are structural units in which TIFF2025013803000133.tif5287 [In formula (II-2-A-2), R III3 , R III5 and Z.A. + has the same meaning as above. mA and nA each independently represent 1 or 2.

[0186] Examples of the structural unit represented by formula (II-2-A') include the following structural units, R III3 The group corresponding to the methyl group in the formula (I) is a hydrogen atom, a halogen atom (e.g., a fluorine atom) or a halogen atom. an alkyl group having 1 to 6 carbon atoms which may have a fluorine atom (for example, a trifluoromethyl group, etc.); ) and structural units described in WO 2012 / 050015 are listed. It can be given. ZA + represents an organic cation. TIFF2025013803000134.tif86163

[0187] The structural unit having a sulfonio group and an organic anion in the side chain is represented by the formula (II-1-1): It is preferable that the structural unit is a structural unit that is TIFF2025013803000135.tif3791 [In formula (II-1-1), A II1 represents a single bond or a divalent linking group. R II1 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms. R II2 and R II3 each independently represents a hydrocarbon group having 1 to 18 carbon atoms; R II2 and R II3 are bonded together to form a ring with the sulfur atom to which they are attached. This is also fine. R II4 is a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom represents an alkyl group. A - represents an organic anion. R II1 As the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by the formula (I), a phenylene group is preferable. and naphthylene groups. R II2 and R II3 Examples of the hydrocarbon group represented by the formula (I) include an alkyl group and an alicyclic hydrocarbon group. , aromatic hydrocarbon groups, and groups formed by combining these groups. R II4 The halogen atom represented by the formula (I) is a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. Examples of such atoms include elementary atoms. R II4 As an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, represented by is R a8 The same as the alkyl group having 1 to 6 carbon atoms which may have a halogen atom and which is represented by the formula: Some examples include: A II1Examples of the divalent linking group represented by the formula (I) include a divalent saturated carbon atom having 1 to 18 carbon atoms. The -CH2- contained in the divalent saturated hydrocarbon group is -O-, -S- or may be replaced by -CO-. Specifically, X III3 The carbon number is 1 to 1 Examples of the divalent saturated hydrocarbon group include the same as those in 8.

[0188] The structural unit containing a cation in formula (II-1-1) includes the structural units represented by the following formula: BiR II4 The group corresponding to the methyl group in the formula (I) is replaced with a hydrogen atom, a fluorine atom, trifluoromethyl, etc. Examples include replaced structural units.

[0189] TIFF2025013803000136.tif84130

[0190] A - As the organic anion represented by the formula (I), a sulfonate anion, a sulfonylimide anion, Examples of the anion include sulfonylmethide anion and carboxylate anion. - Represented by The organic anion is preferably a sulfonate anion. More preferably, it is an anion contained in the salt represented by formula (B1).

[0191] A - Examples of the sulfonylimide anion represented by the formula (I) include the following. TIFF2025013803000137.tif43135

[0192] Examples of sulfonylmethide anions include the following: TIFF2025013803000138.tif29123

[0193] Examples of carboxylate anions include the following: TIFF2025013803000139.tif51153

[0194] Examples of the structural unit represented by formula (II-1-1) include the structural units represented by the following formula: can be done. TIFF2025013803000140.tif88149When the resin (A) contains the structural unit (II), the content of the structural unit (II) is It is preferably 1 to 20 mol %, more preferably 2 to 4 mol %, based on the total structural units of the oil (A). It is 15 mol %, and more preferably 3 to 10 mol %.

[0195] The resin (A) may have structural units other than the above-mentioned structural units. The positions include structural units known in the art.

[0196] The resin (A) is preferably a resin composed of the structural unit (a1) and the structural unit (s). . The structural unit (a1) is preferably a structural unit (a1-0), a structural unit (a1-1) and a structural unit (a1-2). The structural unit (a1-2) (preferably a cyclohexyl group or a structural unit having a cyclopentyl group) At least one selected from the group consisting of structural units, more preferably at least two It is. The structural unit (s) is preferably selected from the group consisting of the structural unit (a2) and the structural unit (a3). The structural unit (a2) is preferably represented by the formula (a2-A): The structural unit (a3) ​​is preferably a structural unit represented by the formula (a2-1). or a structural unit represented by formula (a3-1), a structural unit represented by formula (a3-2) and a structural unit represented by formula (a3-3) a3-4) is at least one selected from the group consisting of structural units represented by the following formula:

[0197] Each structural unit constituting the resin (A) may be used alone or in combination of two or more. Instead, monomers that lead to these structural units are used in known polymerization methods (e.g., radical polymerization methods). The content of each structural unit in the resin (A) can be determined by the following procedure. This can be adjusted by the amount of monomer used. The weight average molecular weight of the resin (A) is preferably 2,000 or more (more preferably 2,500 or more). 00 or more, more preferably 3,000 or more), 50,000 or less (more preferably 30 In the present specification, the weight average molecular weight is preferably 1,000 or less, and more preferably 15,000 or less. The molecular weight is a value determined by gel permeation chromatography under the conditions described in the Examples. It is.

[0198] <Resins other than resin (A)> The resist composition of the present invention may contain a resin other than the resin (A) in combination. Examples of the resin other than the resin (A) include a resin containing the structural unit (a4) or the structural unit (a5). (hereinafter, may be referred to as resin (X)). As the resin (X), a resin containing the structural unit (a4) is particularly preferred. In resin (X), the content of the structural unit (a4) is the sum of all structural units in resin (X). It is preferably 30 mol % or more, and more preferably 40 mol % or more. It is more preferable that the content is 45 mol % or more. Examples of the structural unit that the resin (X) may further have include the structural unit (a2), the structural unit (a3) and structural units derived from other known monomers. X) is preferably a resin consisting of only the structural unit (a4) and / or the structural unit (a5). It is preferable that the resin is composed only of the structural unit (a4). Each structural unit constituting the resin (X) may be used alone or in combination of two or more kinds. Using monomers that derive these structural units, a known polymerization method (e.g., radical polymerization method) is performed. The content of each structural unit in the resin (X) can be determined by the following procedure. This can be adjusted by the amount of monomer used. The weight average molecular weight of the resin (X) is preferably 6,000 or more (more preferably 7,000 or more). 0 or more) and 80,000 or less (more preferably 60,000 or less). The method for measuring the weight average molecular weight is the same as in the case of resin (A). Furthermore, when the resist composition contains resin (X), the content of resin (X) is parts, preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, More preferably, the content is 1 to 40 parts by mass, and particularly preferably, the content is 1 to 30 parts by mass. The amount is preferably 1 to 8 parts by mass.

[0199] The content of the resin (A) in the resist composition is 8 to 100% based on the solid content of the resist composition. It is preferably 0% by mass or more and 99% by mass or less, and more preferably 90% by mass or more and 99% by mass or less. In addition, when a resin other than the resin (A) is contained, the resin (A) and the resin other than the resin (A) are preferably mixed. The total content of the resin is 80% by mass or more and 99% by mass or less based on the solid content of the resist composition. The content of the resist is preferably 90% by mass or less and more preferably 99% by mass or less. The solid content of the product and the resin content relative to the solid content are measured by liquid chromatography or gas chromatography. It can be measured by known analytical means such as fluorography.

[0200] <Solvent (E)> The content of the solvent (E) in the resist composition is usually 90% by mass or more and 99.9% by mass or less. It is preferably 92% by mass or more and 99% by mass or less, and more preferably 94% by mass or more. The content of the solvent (E) is 99% by mass or less. The content of the solvent (E) is measured, for example, by liquid chromatography or gas chromatography. This can be measured by known analytical means such as chromatography. The solvent (E) may be ethyl cellosolve acetate, methyl cellosolve acetate, or Glycol ether esters such as propylene glycol monomethyl ether acetate ; Glycol ethers such as propylene glycol monomethyl ether; Ethyl lactate, acetic acid esters such as butyl acetate, amyl acetate, and ethyl pyruvate; acetone, methyl isobutyl ketones such as cyclohexanone, 2-heptanone, and cyclohexanone; cyclic esters; etc. One type of solvent (E) may be used alone, Two or more types may be used.

[0201] <Quencher (C)> The quencher (C) is a basic nitrogen-containing organic compound or an acid generated from the acid generator (B). A salt that generates an acid weaker in acidity than the above (excluding the carboxylate salt represented by formula (I)). The content of the quencher (C) is 0 to 100% based on the solid content of the resist composition. It is preferably about 0.01 to 15% by mass, and more preferably about 0.01 to 10% by mass. More preferably, it is about 0.01 to 5 mass %, and even more preferably, it is about 0.01 to 3 mass %. It is even more preferable that the content is about %. Examples of basic nitrogen-containing organic compounds include amines and ammonium salts. The amines include aliphatic amines and aromatic amines. The aliphatic amines include primary Amines include secondary amines and tertiary amines. Amines include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylamine, aniline, 2-, 3- or 4-methylaniline, 4-nitroaniline, N-methylaniline Phosphorus, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine , octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, Dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine amine, triethylamine, trimethylamine, tripropylamine, tributylamine, Tripentylamine, trihexylamine, triheptylamine, trioctylamine, Trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine , methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, Methyldioctylamine, Methyldinonylamine, Methyldidecylamine, Ethyldibutylamine diamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine , ethyldioctylamine, ethyldinonylamine, ethyldidecylamine, dicyclohexylamine xylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropylamine Propanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine amine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3' -Dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmethane 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridinium 4-Methylpyridine, 1,2-di(2-pyridyl)ethane, 1,2-di(4-pyridyl)ethane 1,2-di(2-pyridyl)ethane, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy)ethane, di( (2-pyridyl)ketone, 4,4'-dipyridyl sulfide, 4,4'-dipyridyl disulfide, 2,2'-dipyridylamine, 2,2'-dipicolylamine, bipyridine, etc. are mentioned, preferably aromatic amines such as diisopropyl aniline are mentioned, and more preferably 2,6-diisopropyl aniline is mentioned. As the ammonium salt, tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, and choline, etc. are mentioned.

[0202] The acidity of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is indicated by the acid dissociation constant (pKa). The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is a salt with an acid dissociation constant of the acid generated from the salt usually being -3 < pKa, preferably -1 < pKa < 7, and more preferably 0 < pKa < 5. As the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B), the salts represented by the following 9502 and JP-A 2011-191745. is a salt (carbohydrate) that generates a carboxylic acid having a weaker acidity than the acid generated by the acid generator (B). A salt having a phosphate anion is preferred, and a weak acid inner salt (D) is more preferred. TIFF2025013803000141.tif89165

[0203] Examples of the weak acid inner salt (D) include the following salts. TIFF2025013803000142.tif72165

[0204] <Other Ingredients> The resist composition of the present invention may further contain components other than the above-mentioned components (hereinafter referred to as “other components”) as necessary. (F)) may be contained. There are no particular limitations on other components (F). However, additives known in the resist art, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, etc., may be used. Agents, dyes, etc. can be used.

[0205] Preparation of Resist Composition The resist composition of the present invention comprises a carboxylate (I), a resin (A), an acid generator (B), and In addition, if necessary, resins other than resin (A), solvent (E), quencher (C) and the like The composition can be prepared by mixing the other component (F) in any order. The temperature during mixing is not limited. It can be from 10 to 40°C depending on the type of resin, etc. An appropriate temperature can be selected depending on the solubility of the compound in the solvent (E) such as the above. The mixing time is Depending on the mixing temperature, the appropriate time can be selected from 0.5 to 24 hours. The mixing means is not particularly limited, and stirring and mixing, etc. can be used. After mixing the components, filter the mixture using a filter with a pore size of about 0.003 to 0.2 μm. It is preferable that

[0206] <Method for Producing Resist Pattern> The method for producing a resist pattern of the present invention comprises the steps of: (1) applying the resist composition of the present invention onto a substrate; (2) A step of drying the applied composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) A step of developing the composition layer after heating. To apply the resist composition onto a substrate, a commonly used device such as a spin coater is used. The substrate can be an inorganic substrate such as a silicon wafer. Before applying the resist composition, the substrate may be cleaned, and an anti-reflection film or the like may be formed on the substrate. It may be possible. The composition after coating is dried to remove the solvent and form a composition layer. For example, the solvent can be evaporated using a heating device such as a hot plate (prebaking). The heating temperature is 50 to 200°C. It is preferable that the heating time is 10 to 180 seconds. The pressure during the process is 1 to 1.0×10 5 It is preferable that the pressure is about Pa. The obtained composition layer is usually exposed using an exposure machine. The exposure light source may be a KrF excimer laser (wavelength 248 nm), an ArF excimer Lasers in the ultraviolet range such as F2 excimer laser (wavelength 157 nm) and F2 laser (wavelength 193 nm) Laser light emitted from a solid-state laser light source (YAG or semiconductor laser, etc.) Those that convert the wavelength and emit harmonic laser light in the far ultraviolet or vacuum ultraviolet range, electron beams, Various types of light sources can be used, such as those that irradiate ultraviolet light (EUV). In this case, the irradiation of these radiations is sometimes collectively called "exposure". Exposure is usually carried out through a mask corresponding to the desired pattern. In the case of lines, exposure may be performed by direct writing without using a mask. The composition layer after exposure is subjected to a heat treatment (so-called heat treatment) in order to promote the deprotection reaction of the acid labile group. The heating temperature is usually about 50 to 200°C, preferably The temperature is usually around 70 to 150 degrees Celsius. The composition layer after heating is usually developed using a developing device and a developing solution. Examples of the method include the dip method, the paddle method, the spray method, and the dynamic dispense method. The development temperature is preferably, for example, 5 to 60° C., and the development time is, for example, 5 The time is preferably 300 seconds or less. By selecting the type of developer as follows: Either a positive resist pattern or a negative resist pattern can be produced. When a positive resist pattern is produced from the resist composition of the present invention, a developer An alkaline developer is used. The alkaline developer is any of the various alkaline solutions used in this field. Any solution is acceptable. For example, tetramethylammonium hydroxide or (2-hydroxy Examples of the aqueous solution ... ethyl)trimethylammonium hydroxide (commonly known as choline) include aqueous solutions of ethyl)trimethylammonium hydroxide (commonly known as choline). The alkaline developer may contain a surfactant. After development, the resist pattern is washed with ultrapure water, and then the water remaining on the substrate and pattern is It is preferable to remove it. When a negative resist pattern is produced from the resist composition of the present invention, A developer containing an organic solvent (hereinafter sometimes referred to as an "organic developer") is used. The organic solvents contained in organic developers are ketones such as 2-hexanone and 2-heptanone. Solvents; glycol ether ethers such as propylene glycol monomethyl ether acetate Steryl solvents; ester solvents such as butyl acetate; propylene glycol monomethyl ether, etc. glycol ether solvents; amide solvents such as N,N-dimethylacetamide; anisole and the like aromatic hydrocarbon solvents. In the organic developer, the content of the organic solvent is preferably 90% by mass or more and 100% by mass or less, The content is preferably from 95% by mass to 100% by mass, and more preferably substantially only an organic solvent. More preferred. Among them, organic developers include those containing butyl acetate and / or 2-heptanone. In the organic developer, the total content of butyl acetate and 2-heptanone is preferably 50% by mass. Preferably, the content is 90% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less. It is even more preferable that the components are qualitatively only butyl acetate and / or 2-heptanone. The organic developer may contain a surfactant. The water content may be less than 10%. During development, development is stopped by replacing the organic developer with a different type of solvent. Good too. It is preferable to wash the resist pattern after development with a rinse solution. There are no particular limitations as long as the solvent does not dissolve the resist pattern, and any solvent containing a general organic solvent may be used. Any suitable solvent may be used, preferably an alcohol or ester solvent. After cleaning, it is preferable to remove any rinsing liquid remaining on the substrate and the pattern.

[0207] <Application> The resist composition of the present invention is a resist composition for exposure to a KrF excimer laser, Resist composition for exposure to ximer laser, resist composition for exposure to electron beam (EB) or EU A resist composition for V exposure, particularly a resist composition for electron beam (EB) exposure or EUV exposure The composition is suitable as a resist composition for semiconductor microfabrication. EXAMPLES

[0208] The present invention will be described in more detail with reference to examples. "%" and "parts" are by weight unless otherwise specified. The weight average molecular weight is a value determined by gel permeation chromatography. The analytical conditions for gel permeation chromatography are as follows: Column: TSKgel Multipore HXL-M x 3 + guard column (Tosoh Corporation) Eluent: Tetrahydrofuran Flow rate: 1.0mL / min Detector: RI detector Column temperature: 40℃ Injection volume: 100μl Molecular weight standard: Standard polystyrene (Tosoh Corporation) The structure of the compound was determined by mass spectrometry (LC: Agilent 1100, MASS: Agilent The molecular ion peak was measured using a LC / MSD (manufactured by Entec). In the examples, the value of this molecular ion peak is indicated as "MASS."

[0209] Example 1: Synthesis of a salt represented by formula (I-326) TIFF2025013803000143.tif29103 25.30 parts of the salt represented by the formula (I-326-a), 50.60 parts of dimethylformamide 100 parts of ion-exchanged water and 200 parts of chloroform were mixed and stirred at 23° C. for 30 minutes. Then, a mixture of 6.93 parts of sodium hydroxide and 27.70 parts of ion-exchanged water was added dropwise. The mixture was stirred at 50° C. for 30 minutes. To the resulting reaction mixture, 60 parts of chloroform and 6 parts of ion-exchanged water were added. 0 parts was added, and the mixture was stirred at 23°C for 30 minutes, and then the organic layer was separated and taken out. Add 60 parts of ion-exchanged water to the layer, stir at 23°C for 30 minutes, and then separate the organic layer. This water washing procedure was repeated five times. The recovered organic layer was concentrated to obtain a product of the formula ( 13.13 parts of the compound represented by I-326-b) were obtained. TIFF2025013803000144.tif48151 3.00 parts of a salt represented by formula (I-326-b), a compound represented by formula (I-326-c) 3.41 parts of the product and 6 parts of chloroform were mixed and stirred at 23°C for 30 minutes. A mixture of 9.01 parts of phosphorus pentoxide and 0.90 parts of phosphorus pentaoxide was added dropwise, and the mixture was stirred at 50°C for 18 hours. The resulting reaction mixture was cooled to 23°C, and then 25 parts of chloroform and 10% carbonate were added. Add 25 parts of potassium aqueous solution, stir at 23°C for 30 minutes, separate and remove the organic layer. To the obtained organic layer, 25 parts of ion-exchanged water was added, and the mixture was stirred at 23° C. for 30 minutes, and then separated. The organic layer was extracted by washing with water. This water washing procedure was repeated five times. The collected organic layer was concentrated. Then, 2 parts of methanol, 2 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added. After stirring at 23°C for 30 minutes, the mixture was filtered to obtain a compound represented by formula (I-326-d). 4.46 parts of the salt were obtained. TIFF2025013803000145.tif46137 0.68 parts of a salt represented by formula (I-326-e), 1 part of a salt represented by formula (I-326-d) 0.17 parts of ethanol and 10 parts of chloroform were mixed and stirred at 23°C for 12 hours. Add 5 parts of 5% oxalic acid aqueous solution to the mixture, stir at 23°C for 30 minutes, and then separate the mixture to obtain an organic layer. Five parts of ion-exchanged water was added to the obtained organic layer, and the mixture was stirred at 23°C for 30 minutes. The organic layer was extracted by washing with water. This water washing procedure was repeated five times. The obtained organic layer was concentrated. As a result, 0.45 parts of the salt represented by the formula (I-326) was obtained. MASS(ESI(+)Spectrum):M + 353.1 MASS(ESI(-)Spectrum):M - 193.1

[0210] Example 2: Synthesis of a salt represented by formula (I-272) TIFF2025013803000146.tif49152 3.00 parts of a salt represented by formula (I-326-b), a compound represented by formula (I-272-c) 2.34 parts of the product and 6 parts of chloroform were mixed and stirred at 23°C for 30 minutes. A mixture of 9.01 parts of phosphorus pentoxide and 0.90 parts of phosphorus pentaoxide was added dropwise, and the mixture was stirred at 50°C for 18 hours. The resulting reaction mixture was cooled to 23°C, and then 25 parts of chloroform and 10% carbonate were added. Add 25 parts of potassium aqueous solution, stir at 23°C for 30 minutes, separate and remove the organic layer. To the obtained organic layer, 25 parts of ion-exchanged water was added, and the mixture was stirred at 23° C. for 30 minutes, and then separated. The organic layer was extracted by washing with water. This water washing procedure was repeated five times. The collected organic layer was concentrated. Then, 2 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added and the mixture was stirred at 23°C for 3 After stirring for 10 minutes, the mixture was filtered to obtain 4.12 parts of a salt represented by formula (I-272-d). obtained. TIFF2025013803000147.tif46137 0.68 parts of a salt represented by formula (I-326-e), 1 part of a salt represented by formula (I-272-d) 0.06 parts of ethanol and 10 parts of chloroform were mixed and stirred at 23°C for 12 hours. Add 5 parts of 5% oxalic acid aqueous solution to the mixture, stir at 23°C for 30 minutes, and then separate the mixture to obtain an organic layer. Five parts of ion-exchanged water was added to the obtained organic layer, and the mixture was stirred at 23°C for 30 minutes. The organic layer was extracted by washing with water. This water washing procedure was repeated five times. The obtained organic layer was concentrated. As a result, 0.39 parts of the salt represented by the formula (I-272) was obtained. MASS(ESI(+)Spectrum):M + 311.1 MASS(ESI(-)Spectrum):M - 193.1

[0211] Example 3: Synthesis of salt represented by formula (I-434) TIFF2025013803000148.tif43152 3.00 parts of a salt represented by formula (I-326-b), a compound represented by formula (I-434-c) 2.70 parts of the product and 6 parts of chloroform were mixed and stirred at 23°C for 30 minutes. A mixture of 9.01 parts of phosphorus pentoxide and 0.90 parts of phosphorus pentaoxide was added dropwise, and the mixture was stirred at 50°C for 18 hours. The resulting reaction mixture was cooled to 23°C, and then 25 parts of chloroform and 10% carbonate were added. Add 25 parts of potassium aqueous solution, stir at 23°C for 30 minutes, separate and remove the organic layer. To the obtained organic layer, 25 parts of ion-exchanged water was added, and the mixture was stirred at 23° C. for 30 minutes, and then separated. The organic layer was extracted by washing with water. This water washing procedure was repeated five times. The collected organic layer was concentrated. Then, 2 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added and the mixture was stirred at 23°C for 3 After stirring for 10 minutes, the mixture was filtered to obtain 3.48 parts of a salt represented by formula (I-434-d). obtained. TIFF2025013803000149.tif46137 0.68 parts of a salt represented by formula (I-326-e), 1 part of a salt represented by formula (I-434-d) 10 parts of ethanol and 10 parts of chloroform were mixed and stirred at 23°C for 12 hours. Add 5 parts of 5% oxalic acid aqueous solution to the mixture, stir at 23°C for 30 minutes, and then separate the mixture to obtain an organic layer. Five parts of ion-exchanged water was added to the obtained organic layer, and the mixture was stirred at 23°C for 30 minutes. The organic layer was extracted by washing with water. This water washing procedure was repeated five times. The obtained organic layer was concentrated. As a result, 0.31 part of the salt represented by the formula (I-434) was obtained. MASS(ESI(+)Spectrum):M + 325.1 MASS(ESI(-)Spectrum):M - 193.1

[0212] Example 4: Synthesis of salt represented by formula (I-488) TIFF2025013803000150.tif43152 3.00 parts of a salt represented by formula (I-326-b), a compound represented by formula (I-488-c) 2.70 parts of the product and 6 parts of chloroform were mixed and stirred at 23°C for 30 minutes. A mixture of 9.01 parts of phosphorus pentoxide and 0.90 parts of phosphorus pentaoxide was added dropwise, and the mixture was stirred at 50°C for 18 hours. The resulting reaction mixture was cooled to 23°C, and then 25 parts of chloroform and 10% carbonate were added. Add 25 parts of potassium aqueous solution, stir at 23°C for 30 minutes, separate and remove the organic layer. To the obtained organic layer, 25 parts of ion-exchanged water was added, and the mixture was stirred at 23° C. for 30 minutes, and then separated. The organic layer was extracted by washing with water. This water washing procedure was repeated five times. The collected organic layer was concentrated. Then, 2 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added and the mixture was stirred at 23°C for 3 After stirring for 10 minutes, the mixture was filtered to obtain 4.49 parts of a salt represented by formula (I-488-d). obtained. TIFF2025013803000151.tif46137 0.68 parts of a salt represented by formula (I-326-e), 1 part of a salt represented by formula (I-488-d) 10 parts of ethanol and 10 parts of chloroform were mixed and stirred at 23°C for 12 hours. Add 5 parts of 5% oxalic acid aqueous solution to the mixture, stir at 23°C for 30 minutes, and then separate the mixture to obtain an organic layer. Five parts of ion-exchanged water was added to the obtained organic layer, and the mixture was stirred at 23°C for 30 minutes. The organic layer was extracted by washing with water. This water washing procedure was repeated five times. The obtained organic layer was concentrated. As a result, 0.49 parts of the salt represented by the formula (I-488) was obtained. MASS(ESI(+)Spectrum):M + 325.1 MASS(ESI(-)Spectrum):M - 193.1

[0213] Example 5: Synthesis of a salt represented by formula (I-490) TIFF2025013803000152.tif45154 1.01 parts of a salt represented by formula (I-490-e), 1.01 parts of a salt represented by formula (I-488-d) 10 parts of ethanol and 10 parts of chloroform were mixed and stirred at 23°C for 12 hours. Add 5 parts of 5% oxalic acid aqueous solution to the mixture, stir at 23°C for 30 minutes, and then separate the mixture to obtain an organic layer. Five parts of ion-exchanged water was added to the obtained organic layer, and the mixture was stirred at 23°C for 30 minutes. The organic layer was extracted by washing with water. This water washing procedure was repeated five times. The obtained organic layer was concentrated. As a result, 0.68 part of the salt represented by the formula (I-490) was obtained. MASS(ESI(+)Spectrum):M + 325.1 MASS(ESI(-)Spectrum):M - 337.1

[0214] Resin synthesis The compounds (monomers) used in the synthesis of resin (A) are shown below. are referred to as "monomer (a1-1-3)" etc. depending on their formula numbers. TIFF2025013803000153.tif4097

[0215] Synthesis Example 1 [Synthesis of Resin A1] As the monomer, monomer (a1-4-2), monomer (a1-1-3) and monomer (a1-2-6) was used, and the molar ratio [monomer (a1-4-2):monomer (a1-1 -3):monomer (a1-2-6) in a ratio of 38:24:38. Further, this monomer mixture was mixed with 1.5 times by mass of methyl ether based on the total mass of all monomers. Isobutyl ketone was mixed in the mixture. Azobisisobutyronite was added as an initiator to the mixture. Add 7 mol% of propylene to the total number of moles of all monomers, and heat the mixture at 85°C. The polymerization was carried out by heating at 40° C. for about 5 hours. After that, the polymerization reaction solution was diluted with p-toluenesulfone The acid solution was added, and the mixture was stirred for 6 hours, and then separated. The obtained organic layer was diluted with a large amount of n-heptane. The resin was precipitated by pouring it into a flask, and then filtered and collected to obtain a resin with a weight-average molecular weight of approximately 5.3 × 10 3 Resin A1 (copolymer) was obtained in a yield of 78%. This resin A1 has the following structural units: This is what we do. TIFF2025013803000154.tif29126

[0216] <Preparation of Resist Composition> As shown in Table 2, the following components were mixed, and the resulting mixture was passed through a fluorine-containing filter with a pore size of 0.2 μm. The mixture was filtered through a resin filter to prepare a resist composition. [Table 2]

[0217] <Resin> A1: Resin A1 <Acid Generator (B)> B1-25: A salt represented by the formula (B1-25); described in JP 2011-126869 A Synthesized by the method TIFF2025013803000156.tif2667<Carboxylate(I)> I-272: A salt represented by the formula (I-272) I-326: A salt represented by the formula (I-326) I-434: A salt represented by the formula (I-434) I-488: A salt represented by the formula (I-488) I-490: A salt represented by the formula (I-490) <Quencher (C)> IX-1: Synthesized according to the example in JP2011-39502A TIFF2025013803000157.tif3151IX-2: Synthesized according to the example of JP2014-88367A TIFF2025013803000158.tif3153C1: Synthesized by the method described in JP-A-2011-39502 TIFF2025013803000159.tif4349<solvent> Propylene glycol monomethyl ether acetate 400 parts Propylene glycol monomethyl ether 100 parts γ-Butyrolactone 5 parts

[0218] (Electron beam exposure evaluation of resist composition) A 6-inch silicon wafer is heated on a direct hot plate with hexamethyldisilazane. The silicon wafer was treated at 90° C. for 60 seconds. Spin coating was performed so that the film thickness of the layer became 0.04 μm. Then, on a direct hot plate pre-baking was carried out at the temperature shown in the "PB" column of Table 2 for 60 seconds to form a composition layer. On the composition layer formed on the wafer, using an electron beam lithography machine ["ELS-F1 25 125keV" manufactured by Elionix, Inc.], a contact hole pattern (hole pitch 40 nm / hole diameter 17 nm) was directly drawn with the exposure dose changed step by step. After exposure, post-exposure baking was carried out at the temperature shown in the "PEB" column of Table 2 for 60 seconds on a hot plate, and further, 60 seconds of paddle development was performed with a 2.38 mass% tetramethylammonium hydroxide aqueous solution to obtain a resist pattern. In the resist pattern obtained after development, the exposure dose at which the formed hole diameter became 17 nm was defined as the effective sensitivity.

[0219] <CD Uniformity (CDU) Evaluation> At the effective sensitivity, the hole diameter of the pattern formed with a hole diameter of 17 nm was measured 24 times for one hole and the average value was taken as the average hole diameter of one hole. Among those measured 400 places for the average hole diameter of the pattern formed with a hole diameter of 17 nm within the same wafer as the population, the standard deviation was obtained. The results are shown in Table 3. The numerical values in the table indicate the standard deviation (nm).

Table 3

Industrial Applicability

[0220] The resist composition of the present invention can form a resist pattern having good CD uniformity (CDU). Therefore, it is suitable for semiconductor microfabrication and is extremely useful industrially.

Claims

1. A carboxylic acid generator containing a carboxylate represented by formula (I); an acid generator containing a salt represented by formula (B1); and a resin having an acid labile group. [In formula (I), R １ , R ２ and R ３ each independently represents a halogen atom, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkyl group having 1 to 12 carbon atoms, and —CH 2 - may be replaced by -O- or -CO-. m1 represents an integer of 0 to 5, and when m1 is 2 or more, a plurality of R １ may be the same or different from each other. m2 represents an integer of 0 to 3, and when m2 is 2 or more, a plurality of R ２ may be the same or different from each other. m3 represents an integer of 0 to 4, and when m3 is 2 or more, a plurality of R ３ may be the same or different from each other. X ０ represents an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent (-CH contained in the alicyclic hydrocarbon group). ２ - is -O-, -S-, -CO- or -SO ２ -), a group formed by combining an alicyclic hydrocarbon group having 3 to 24 carbon atoms with a chain hydrocarbon group having 1 to 12 carbon atoms (the -CH contained in the alicyclic hydrocarbon group and the chain hydrocarbon group may be replaced with -). ２ - is -O-, -S-, -CO- or -SO ２ -, and the alicyclic hydrocarbon group and the chain hydrocarbon group may have a substituent.), an aromatic hydrocarbon group having 6 to 24 carbon atoms which may have a substituent, or a group combining an aromatic hydrocarbon group having 6 to 24 carbon atoms and a chain hydrocarbon group having 1 to 12 carbon atoms (the -CH contained in the chain hydrocarbon group ２ - is -O-, -S-, -CO- or -SO ２ -, and the aromatic hydrocarbon group and the chain hydrocarbon group may have a substituent. [In formula (B1), Q ｂ１ and Q. ｂ２ each independently represents a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. L ｂ１ represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and the —CH ２ - may be replaced by -O- or -CO-, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted by a fluorine atom or a hydroxy group. Y represents an optionally substituted methyl group or an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the —CH ２ - is -O-, -S(O) ２ It may be replaced by --or --CO--. Z1 ＋ represents an organic cation.

2. X ０ is an alicyclic hydrocarbon group which may have a fluorine atom or a hydroxyl group (-CH contained in the alicyclic hydrocarbon group) 2 - may be replaced by -O- or -CO-), or a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are combined (the -CH 2 2. The resist composition according to claim 1, wherein - may be replaced by -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group may contain a fluorine atom or a hydroxyl group.

3. m3 is 1, R ３ 3. The resist composition according to claim 1, wherein is a fluorine atom.

4. 4. The resist composition according to claim 1, wherein the resin having an acid labile group is a resin containing at least one selected from the group consisting of a structural unit represented by formula (a1-1) and a structural unit represented by formula (a1-2): [In formula (a1-1) and formula (a1-2), L ａ１ and L ａ２ are each independently -O- or *-O-(CH ２ ) ｋ１ represents --CO--O--, k1 represents an integer of 1 to 7, and * represents the bonding position with --CO--. R ａ４ and R ａ５ each independently represents a hydrogen atom or a methyl group. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or a combination thereof. m1 represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3.

5. 5. The resist composition according to claim 1, wherein the resin having an acid labile group further contains a structural unit represented by formula (a2-A). [In formula (a2-A), R a50 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a51 represents a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a50 is a single bond or *-X a51 - (A a52 -X a52 ) nｂ -, * represents -R a50 represents the bond position with respect to the carbon atom to which it is bonded. A a52 represents an alkanediyl group having 1 to 6 carbon atoms. X a51 and X a52 each independently represents -O-, -CO-O- or -O-CO-. nb represents 0 or 1. mb represents an integer of 0 to 4. When mb is an integer of 2 or more, a plurality of R a51 may be the same or different.

6. (1) A step of applying the resist composition according to any one of claims 1 to 5 onto a substrate; (2) A step of drying the applied composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

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